Probe card height difference measuring device

Abstract

The utility model discloses a height difference measuring device for a probe card. The height difference measuring device comprises a measuring plate and a mounting column arranged in the measuring plate, when the probe card height difference measuring device is used, firstly, the four measuring columns of the measuring plate are placed at the position where the wheel base is located, then the measuring plate abuts against the middle area through the telescopic columns, and the telescopic columns enable the induction plates in the telescopic columns to make contact with the middle area under the elastic action of the springs; after the induction plate is in contact with the middle area, a height difference is generated, at the moment, the induction plate transmits the height difference to a main control chip in the measuring device body through a transmission line, and the main control chip stores data and transmits the data to a liquid crystal display screen to be displayed; through the cooperative use of the measuring plate, the measuring column, the measuring device body, the telescopic column and the sensing plate, the convenience of measuring the height difference of the probe card is enhanced, and the production cost of the measuring device is reduced.

Description

TECHNICAL FIELD

[0001] The utility model belongs to the technical fields related to semiconductor manufacturing, specifically related to a probe card height difference measuring device. BACKGROUND

[0002] The probe card height difference measuring device belongs to the field of semiconductor manufacturing equipment and is mainly used for measuring the height difference between the cover plate and the roller base of the probe card. The probe card is fixed on the testing machine through the roller. The cover plate needs to have a certain gap with the cross beam of the testing machine to avoid being deadlocked, so as to ensure that the probe can be in good contact with the solder pad or bump on the wafer surface, thereby ensuring the accuracy and reliability of wafer testing. The existing probe card height difference measuring device uses laser to measure. That is, a laser beam is used to hit the planes where the four rollers are located, and then the middle area is hit again. Then, a certain algorithm is used to calculate the height difference. The existing probe card height difference measuring device needs large equipment during measurement, which leads to inconvenient measurement and high production cost. Therefore, a probe card height difference measuring device is indispensable. SUMMARY

[0003] The utility model aims at providing a probe card height difference measuring device to solve the problem of inconvenient measurement and high production cost caused by the need for large equipment during measurement of the existing probe card height difference measuring device in the background art.

[0004] To achieve the above-mentioned purpose, the utility model provides the following technical scheme: a probe card height difference measuring device, comprising

[0005] A measuring plate and a mounting column arranged at an internal position of the measuring plate;

[0006] An installation disc is installed at an external position of the mounting column and at a front position of the measuring plate. A measuring device body is installed at a left position of the installation disc.

[0007] A liquid crystal display screen is arranged at a left wall position of the measuring device body. A control button is arranged at a left wall of the measuring device body and below the liquid crystal display screen.

[0008] A placing groove is arranged at an internal position of the mounting column. A spring is installed at an internal position of the placing groove. A telescopic column is connected to the rear side of the spring and at a rear position of the measuring plate. A sensing plate is installed at a rear wall position of the telescopic column.

[0009] A measuring column is installed at a rear position of the measuring plate and at four corner positions of the measuring plate.

[0010] The measurement plate, the measurement column, the measurement device body, the telescopic column and the induction plate are used in cooperation, which not only enhances the convenience of measuring the height difference of the probe card, but also reduces the production cost of the measurement device.

[0011] Preferably, an installation plate is welded at the outer part of the installation column and at the front wall position of the measurement plate, and an insertion column is connected at the rear side of the installation plate.

[0012] Preferably, an installation slot is arranged at the inner part of the rear end of the insertion column, a magnetic plate is inlaid in the installation slot, an insertion hole is arranged at the outer side of the insertion column and at the inner part of the measurement plate, and a magnet plate is inlaid in the insertion hole.

[0013] Preferably, the insertion column and the insertion hole are connected through insertion, and the magnetic plate and the magnet plate are connected through magnetic adsorption.

[0014] Preferably, a clamping hole is arranged at the inner part of the measurement plate and at the outer side of the installation column, and a compression sleeve made of rubber is glued at the inner wall of the clamping hole.

[0015] Preferably, a limiting knob is arranged at the rear wall of the measurement plate and at the outer part of the installation column, limiting rotation rods are connected at the upper and lower ends of the limiting knob, and the limiting knob and the installation column are connected through threads.

[0016] Preferably, a main control chip and a battery box are arranged at the inner part of the measurement device body, and the main control chip and the induction plate are connected through a transmission line.

[0017] Preferably, a connecting hole is arranged at the inner part of the right wall of the measurement device body, a first through hole is arranged at the inner center of the installation disc and corresponds to the connecting hole, a second through hole is arranged at the inner part of the installation column and corresponds to the through hole, the first through hole and the second through hole respectively penetrate the installation disc and the installation column, and internal threads are arranged at the inner wall of the connecting hole, the first through hole and the second through hole.

[0018] Preferably, the left end of the fastening knob is connected with a threaded column at the inner side position of the connecting hole, the first through hole and the second through hole, an external thread is arranged at the outer wall position of the threaded column, the threaded column is connected with the internal thread of the inner wall of the connecting hole, the first through hole and the second through hole through the external thread of the outer wall, so that the measurement device body, the mounting disc and the mounting column are connected together, and the convenience and stability of the connection between the measurement device body, the mounting disc and the mounting column are enhanced through the cooperation of the fastening knob, the threaded column, the connecting hole, the first through hole, the second through hole and the threaded connection.

[0019] Compared with the prior art, the probe card height difference measuring device has the following beneficial effects:

[0020] 1. In the probe card height difference measuring device, when the probe card height difference measuring device is used, first, the four measurement columns of the measurement plate are placed at the position of the wheel base, then the measurement plate is abutted to the middle area through the telescopic column, the telescopic column is subjected to the elastic force of the spring and makes the sensing plate inside the telescopic column contact with the middle area, the sensing plate contacts with the middle area and generates a height difference, at this time, the sensing plate transmits the height difference to the main control chip inside the measurement device body through the transmission line, the main control chip saves the data and transmits the data to the liquid crystal display to present, through the cooperation of the measurement plate, the measurement column, the measurement device body, the telescopic column and the sensing plate, the convenience of the probe card height difference measurement is enhanced, and the cost of the measurement device production is reduced, so that the probe card height difference measuring device can be better used.

[0021] 2. In the probe card height difference measuring device, when the probe card height difference measuring device is used, first, the mounting column is inserted into the card hole, and the insertion column at the front end of the mounting plate is inserted into the insertion hole, when the mounting column is inserted into the card hole, the extrusion sleeve on the inner wall of the card hole extrudes the mounting column, when the insertion column is inserted into the insertion hole, the magnetic plate at the front end of the insertion column is adsorbed by the magnet plate in the insertion hole, at this time, the limiting knob is aligned with the outside of the front end mounting column, and then the limiting knob is rotated through the limiting rotating rod, so that the limiting knob is connected with the front end of the mounting column through the thread, and then the measurement plate and the mounting column are limited by the limiting knob, through the cooperation of the mounting plate, the insertion column, the insertion hole, the magnetic plate, the magnet plate, the card hole, the extrusion sleeve, the limiting knob, the limiting rotating rod, the insertion, the magnetic adsorption connection and the threaded connection, the stability and convenience of the mounting column installation are enhanced. BRIEF DESCRIPTION OF DRAWINGS

[0022] Figure 1 It is a whole structure schematic view of the probe card height difference measuring device.

[0023] Figure 2The utility model discloses probe card height difference measuring device back structure schematic view.

[0024] Figure 3 The utility model discloses probe card height difference measuring device measuring plate side structure schematic view of analytic amplification.

[0025] Figure 4 The utility model discloses probe card height difference measuring device insert post analytic amplification structure schematic view.

[0026] In the drawing: 1, measuring plate, 2, measuring device body, 3, mounting column, 4, mounting disc, 5, fastening knob, 6, limit knob, 7, telescopic column, 8, limit rotating rod, 9, measuring column, 10, liquid crystal display, 11, control button, 12, induction plate, 13, insert post, 14, spring, 15, placing groove, 16, mounting plate, 17, jack, 18, clamping hole, 19, extrusion sleeve, 20, magnet plate, 21, magnetic plate, 22, mounting groove. DETAILED DESCRIPTION

[0027] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of the utility model.

[0028] The utility model provides a kind of probe card height difference measuring device as Figures 1-4 , a kind of probe card height difference measuring device, including measuring plate 1 and the mounting column 3 of being set at the inside position of measuring plate 1;The outside of mounting column 3 and the front side position of measuring plate 1 are installed with mounting disc 4, and the left side position of mounting disc 4 is installed with measuring device body 2;The left wall position of measuring device body 2 is provided with liquid crystal display 10, and the left wall of measuring device body 2 and the lower position of liquid crystal display 10 are provided with control button 11;The inside position of mounting column 3 is provided with placing groove 15, and the inside position of placing groove 15 is installed with spring 14, and the rear side of spring 14 and the rear side of measuring plate 1 are connected with telescopic column 7, and the rear wall position of telescopic column 7 is installed with induction plate 12;The rear side of measuring plate 1 and the four corner positions of measuring plate 1 are installed with measuring column 9;By the setting of measuring plate 1, measuring column 9, measuring device body 2, telescopic column 7 and induction plate 12, cooperation is used, not only strengthen the convenience of probe card height difference measurement, also reduce the cost of measuring device production.

[0029] As Figure 1 , Figure 2 and Figure 3As shown, in order to enhance the convenience of the probe card height difference measurement, when using the probe card height difference measurement device, first put the four measurement columns 9 of the measurement plate 1 at the position of the wheel base, then put the measurement plate 1 to the middle area through the telescopic column 7, the telescopic column 7 is subjected to the elastic force of the spring 14, which makes the inductive plate 12 inside the telescopic column 7 contact with the middle area, and the inductive plate 12 will generate a height difference after contacting with the middle area, at this time the inductive plate 12 will transmit the height difference to the main control chip inside the measurement device body 2 through the transmission line, the main control chip will save the data and transmit it to the liquid crystal display 10 to present, through the cooperation of the measurement plate 1, the measurement column 9, the measurement device body 2, the telescopic column 7 and the inductive plate 12, not only the convenience of the probe card height difference measurement is enhanced, but also the cost of the measurement device production is reduced, so that the probe card height difference measurement device can be better used.

[0030] The outside of the mounting column 3 and the front wall position of the measurement plate 1 are welded with a mounting plate 16, the rear side of the mounting plate 16 is connected with a plug column 13, the rear end of the plug column 13 is provided with a mounting groove 22, the inside of the mounting groove 22 is inlaid with a magnetic plate 21, the outside of the plug column 13 and the inside of the measurement plate 1 is provided with a plug hole 17, the inside of the plug hole 17 is inlaid with a magnet plate 20, the plug column 13 and the plug hole 17 are connected by plug connection, the magnetic plate 21 and the magnet plate 20 are connected by magnetic attraction, the inside of the measurement plate 1 and the outside of the mounting column 3 is provided with a clamping hole 18, the inner wall of the clamping hole 18 is glued with a extrusion sleeve 19, the extrusion sleeve 19 is made of rubber material, the rear wall of the measurement plate 1 and the outside of the mounting column 3 is installed with a limiting knob 6, the upper and lower ends of the limiting knob 6 are connected with a limiting rotating rod 8, the limiting knob 6 and the mounting column 3 are connected by screw connection, through the cooperation of the mounting plate 16, the plug column 13, the plug hole 17, the magnetic plate 21, the magnet plate 20, the clamping hole 18, the extrusion sleeve 19, the limiting knob 6, the limiting rotating rod 8, the plug connection, the magnetic attraction connection and the screw connection, the stability and convenience of the mounting column 3 installation are enhanced.

[0031] As Figure 2 , Figure 3 and Figure 4As shown, in order to strengthen the stability and convenience of the installation of the mounting column 3. When using the probe card height difference measuring device, first insert the mounting column 3 into the card hole 18 and make the insertion column 13 at the front end of the mounting plate 16 inserted into the insertion hole 17, when the mounting column 3 is inserted into the card hole 18, the extrusion sleeve 19 on the inner wall of the card hole 18 will extrude the mounting column 3, when the insertion column 13 is inserted into the insertion hole 17, the magnetic plate 21 at the front end of the insertion column 13 will be adsorbed by the magnet plate 20 inside the insertion hole 17, at this time, align the limiting knob 6 with the outside of the front end of the mounting column 3, then rotate the limiting knob 6 through the limiting rotating rod 8, so that the limiting knob 6 is connected with the front end of the mounting column 3 through the thread, and then the measuring plate 1 and the mounting column 3 are limited by the limiting knob 6. Through the cooperation of the mounting plate 16, the insertion column 13, the insertion hole 17, the magnetic plate 21, the magnet plate 20, the card hole 18, the extrusion sleeve 19, the limiting knob 6, the limiting rotating rod 8, the insertion, the magnetic adsorption connection and the threaded connection, the stability and convenience of the installation of the mounting column 3 are strengthened.

[0032] The inner position of the measuring device body 2 is provided with a main control chip and a battery box, and the main control chip is connected with the induction plate 12 through a transmission line. The right wall of the measuring device body 2 is provided with a connecting hole, the inner center of the mounting disc 4 is provided with a first through hole corresponding to the connecting hole, and the inner center of the mounting column 3 is provided with a second through hole corresponding to the through hole. The first through hole and the second through hole respectively penetrate the mounting disc 4 and the mounting column 3, and the inner wall position of the connecting hole, the first through hole and the second through hole is provided with an internal thread. The left end of the fastening knob 5 is connected with a threaded column at the inner side position of the connecting hole, the first through hole and the second through hole, and the outer wall position of the threaded column is provided with an external thread. The threaded column is connected with the internal thread of the inner wall of the connecting hole, the first through hole and the second through hole through the external thread of the outer wall, so that the measuring device body 2, the mounting disc 4 and the mounting column 3 are connected together. Through the cooperation of the fastening knob 5, the threaded column, the connecting hole, the first through hole, the second through hole and the threaded connection, the connection convenience and stability between the measuring device body 2, the mounting disc 4 and the mounting column 3 are strengthened.

[0033] As Figure 1As shown, in order to strengthen the convenience and stability of the connection between the measuring device body 2, the mounting disc 4 and the mounting column 3, when using the probe card height difference measuring device, first, the mounting disc 4 is sleeved outside the mounting column 3, and the first through hole in the mounting disc 4 is aligned with the second through hole in the mounting column 3, then the measuring device body 2 is placed on the left wall of the mounting disc 4, and the connecting hole in the right wall of the measuring device body 2 is aligned with the first through hole and the second through hole, then the fastening nut 5 is aligned with the connecting hole, the first through hole and the second through hole through the threaded column, and the threaded column is connected with the inner thread of the connecting hole, the first through hole and the second through hole through the outer thread of the outer wall, so that the measuring device body 2, the mounting disc 4 and the mounting column 3 are connected together, and the convenience and stability of the connection between the measuring device body 2, the mounting disc 4 and the mounting column 3 are strengthened through the cooperation of the fastening knob 5, the threaded column, the connecting hole, the first through hole, the second through hole and the threaded connection.

[0034] Finally, it should be noted that: the above only for the preferred embodiments of the present application, and not for limiting the present application, although the foregoing detailed description of the present application, for those skilled in the art, it still can be modified, or part of the technical features of the equivalent replacement, within the spirit and principles of the present application, any modification, equivalent replacement, improvement, etc., should be included in the scope of the present application.

Claims

1. A probe card height difference measurement apparatus characterized by comprising: The utility model relates to a kind of probe card height difference measuring device, including Measuring plate (1) and installation column (3) being arranged at the inside position of the measuring plate (1); The outside of the installation column (3) and at the front side position of measuring plate (1) installation disc (4) is installed, the left side position of the installation disc (4) is installed measuring device body (2), the right wall position of the installation disc (4) is installed fastening knob (5); The left wall position of the measuring device body (2) is provided with liquid crystal display (10), the left wall of the measuring device body (2) and below the position of liquid crystal display (10) is provided with control button (11); The inside position of the installation column (3) is provided with placing groove (15), the inside position of the placing groove (15) is installed spring (14), the rear side of the spring (14) and below the rear side position of measuring plate (1) is connected with telescopic column (7), the rear wall position of the telescopic column (7) is installed induction plate (12); The rear side of the measuring plate (1) and below the four corner positions of the measuring plate (1) are installed measuring column (9); Through the cooperation of the measuring plate (1), measuring column (9), measuring device body (2), telescopic column (7) and induction plate (12), the convenience of probe card height difference measurement is strengthened, and the cost of measuring device production is reduced.

2. The probe card height difference measuring apparatus according to claim 1, characterized by: The outside of the installation column (3) and at the front wall position of measuring plate (1) welding installation plate (16), the rear side four positions of the installation plate (16) are connected with plug column (13).

3. The probe card height difference measuring apparatus according to claim 2, wherein: The inside position of the rear end of the plug column (13) is provided with mounting groove (22), the inside of the mounting groove (22) is inlaid with magnetic plate (21), the outside of the plug column (13) and at the inside position of measuring plate (1) is provided with jack (17), the inside of the jack (17) is inlaid with magnet plate (20).

4. The probe card height difference measuring apparatus according to claim 3, wherein: The plug column (13) and the jack (17) are connected by plug-in, and the magnetic plate (21) and the magnet plate (20) are connected by magnetic adsorption.

5. The probe card height difference measuring apparatus according to claim 3, wherein: The inside of the measuring plate (1) and at the outside position of the installation column (3) is provided with card hole (18), the inner wall position of the card hole (18) is glued with extrusion sleeve (19), and the extrusion sleeve (19) is made of rubber material.

6. The probe card height difference measuring apparatus according to claim 5, wherein: The rear wall of the measuring plate (1) and below the outside position of the installation column (3) is installed limit knob (6), the upper and lower end positions of the limit knob (6) are connected with limit rotating rod (8), the limit knob (6) and the installation column (3) are connected by screw thread, and the installation plate (16), the plug column (13), the jack (17), the magnetic plate (21), the magnet plate (20), the card hole (18), the extrusion sleeve (19), the limit knob (6), the limit rotating rod (8), the plug-in, the magnetic adsorption connection and the screw thread connection are used in cooperation, the stability and convenience of the installation column (3) installation are strengthened.

7. The probe card height difference measuring apparatus according to claim 1, characterized by: The inside of the measuring device body (2) is provided with a main control chip and a battery box, and the main control chip is connected with the induction plate (12) through a transmission line.

8. The probe card height difference measuring apparatus according to claim 7, wherein: The right wall of the measuring device body (2) is provided with a connecting hole, the inside of the mounting disc (4) is provided with a first through hole corresponding to the connecting hole, and the inside of the mounting column (3) is provided with a second through hole corresponding to the through hole, the first through hole and the second through hole respectively penetrate the mounting disc (4) and the mounting column (3), and the inner walls of the connecting hole, the first through hole and the second through hole are provided with internal threads.

9. The probe card height difference measuring apparatus according to claim 1, wherein: The left end of the fastening knob (5) is connected with a threaded column at the inner side of the connecting hole, the first through hole and the second through hole, the outer wall of the threaded column is provided with external threads, and the threaded column is connected with the internal threads of the inner walls of the connecting hole, the first through hole and the second through hole through the external threads of the outer wall, so that the measuring device body (2) is connected with the mounting disc (4), and the mounting disc (4) is connected with the mounting column (3), and the cooperation of the fastening knob (5), the threaded column, the connecting hole, the first through hole, the second through hole and the threaded connection strengthens the convenience and stability of the connection between the measuring device body (2), the mounting disc (4) and the mounting column (3).

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