Ceramic electrode and plasma surface treatment machine

Abstract

The utility model belongs to the technical field of plasma surface treatment. According to the ceramic electrode and the plasma surface treatment machine, the wall thickness of the clamping part of the ceramic shell of the ceramic electrode is larger than the wall thickness (serving as the reference wall thickness) of the discharge blocking wall, the stress of the clamping part of the ceramic shell is the maximum, and through the design of the unequal wall thickness, the strength of the clamping part is guaranteed; deformation or burst caused by clamping force in a high-temperature environment is avoided, and the service life is prolonged.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of plasma surface treatment, and particularly relates to a ceramic electrode and a plasma surface treatment machine. BACKGROUND

[0002] The statements in this section merely provide background information related to the utility model and do not necessarily constitute the prior art.

[0003] The plasma surface treatment machine (or called corona machine) is a kind of equipment for material surface treatment, and the ceramic electrode is a key component of the plasma surface treatment machine, the electric conductor (or called discharge sheet) in the ceramic electrode is connected with the high-voltage power supply, when a high enough voltage is applied, a discharge electric field is formed with the low-voltage end (such as the ground guiding roller or the foil to be treated), and the discharge phenomenon is triggered. The active particles (such as plasma, free radicals, etc.) generated by the discharge have a chemical reaction with the material surface, change the chemical properties of the material surface, improve the wetting tension (or adhesion) thereof, and provide good surface conditions for subsequent processes.

[0004] The inventor found in the research that the ceramic electrode generally needs to be clamped and fixed through the clamping jaw or the clamping groove on the ceramic electrode frame during use, and the existing ceramic electrode is prone to deformation or burst in a high-temperature environment, especially the clamping part of the clamping jaw or the clamping groove, which is more prone to burst under the long-term clamping in a high-temperature environment.

[0005] Patent No. CN220291351U provides a ceramic electrode, the thickness of the ceramic shell thereof is the same, and the ceramic electrode is prone to burst at the claimed clamping position due to long-term clamping in a high-temperature environment; Patent No. CN116914566A discloses a ceramic electrode and a mounting method thereof, the thickness of the ceramic shell thereof is also the same, and the ceramic electrode is prone to burst at the claimed mounting position due to long-term clamping in a high-temperature environment; moreover, the corner of the clamping part of the above-mentioned existing scheme is provided with a small arc, and there is still a risk of burst due to long-term clamping.

[0006] Moreover, the existing ceramic electrode generally needs to be plugged at both ends, and the inside is a hollow filling structure, and there is still a large amount of air, and the air and the internal filler expand under high-temperature working conditions, and if there is no vent hole, the plugging material at both ends is easy to be blown out, which further increases the risk of burst of the ceramic electrode. Patent No. CN110001043A provides a ceramic electrode, a corona structure and a corona machine, and the heat dissipation hole is provided in the clamping part, and it can be seen that the heat dissipation hole is directly formed by sintering or formed by punching after sintering, and no matter whether it is formed by sintering or punching, it is easy to cause new deformation or burst points of the ceramic shell; at the same time, the inner diameter of the through hole of the existing heat dissipation hole design scheme is fixed, and the ventilation amount cannot be adaptively adjusted. The utility model discloses a ceramic electrode and plasma surface treatment machine

[0007] In order to solve the prior art's insufficient, the utility model provides a kind of ceramic electrode and plasma surface treatment machine, the clamping part of the most stress of ceramic shell is thickened and strengthened, by this unequal wall thickness design, the strength of clamping part is guaranteed, the deformation or burst caused by clamping force under high temperature environment is avoided, and service life is improved.

[0008] In order to realize the above-mentioned purpose, the utility model adopts the following technical scheme:

[0009] First, the utility model provides a kind of ceramic electrode.

[0010] A kind of ceramic electrode, including: the ceramic shell with through hole in longitudinal direction, the ceramic shell includes clamping part and discharge part, discharge conductor is arranged in the limiting cavity in the through hole, the wall of discharge face of the discharge conductor opposite discharge part is discharge resistance wall, the wall thickness of the clamping part is all greater than the wall thickness of the discharge resistance wall.

[0011] As the first aspect of the utility model further limited, the two sides of the clamping part are each provided with outwardly protruding protruding part, the protruding part and the outer surface of the ceramic shell form the concave circular-arc-shaped recess, the corresponding circular-arc-shaped recess is greater than the set threshold value, the corner of the protruding part is circular-arc-shaped.

[0012] As the first aspect of the utility model further limited, the two sides inner wall of the limiting cavity is inwardly inclined to limit the discharge conductor, and the two sides corner of the limiting cavity is circular-arc-shaped.

[0013] As the first aspect of the utility model further limited, the inwardly inclined manner is horizontally inwardly inclined or circular-arc-shaped inwardly inclined.

[0014] As the first aspect of the utility model further limited, the clamping part and the discharge part are integrally connected through the opposite two side walls, the clamping part is provided with accommodating cavity, the space of the accommodating cavity, the space of the limiting cavity and the inner cavity space between the opposite two side walls jointly constitute the space in the through hole.

[0015] As the first aspect of the utility model further limited, the opposite two side walls are parallel to each other, the thickness of the two side walls is uniform and equal, and the wall thickness of the two side walls is greater than the wall thickness of the discharge resistance wall.

[0016] As the first aspect of the utility model further limited, the opposite two side walls are inwardly inclined, and the wall thickness gradually increases in the inclined direction, and the wall thickness of the two side walls is greater than the wall thickness of the discharge resistance wall.

[0017] As a further limitation of the first aspect of the utility model, the cross section of the accommodating cavity is in the shape of a circular arc, and the inner wall surface of the two side walls respectively smoothly transitions to the inner wall surface of the accommodating cavity and the inner wall surface of the limiting cavity.

[0018] As a further limitation of the first aspect of the utility model, the wall thickness at the position of the circular arc vertex of the circular arc-shaped accommodating cavity is greater than the wall thickness of the discharge resistance wall.

[0019] Further, the wall thickness at the position of the circular arc vertex of the circular arc-shaped accommodating cavity is greater than the maximum thickness of the side wall.

[0020] The second aspect, the utility model provides a kind of ceramic electrode.

[0021] A kind of ceramic electrode, comprising: the ceramic shell with longitudinal through hole, the ceramic shell includes clamping part and discharge part, discharge conductor is arranged in the limiting cavity in the through hole, and the wall of the discharge surface of the discharge conductor opposite discharge part is discharge resistance wall, the clamping part is provided with accommodating cavity, the cross section of the accommodating cavity is in the shape of circular arc along radial midaxial line symmetry, and the clamping part includes enhanced thickness area and conventional thickness area.

[0022] Circular arc vertex is located on radial midaxial line, and the thickness area corresponding to the point on the left side continuous set arc segment of circular arc vertex and the thickness area corresponding to the point on the left side continuous set arc segment of circular arc vertex constitute the conventional thickness area, and the thickness of the conventional thickness area is equal to or less than discharge resistance wall, and the thickness of the enhanced thickness area is greater than the thickness of discharge resistance wall.

[0023] As the first aspect or the second aspect of the utility model is further preferred, the width of the discharge surface of the discharge conductor is greater than or equal to 0.5cm, and less than 1.0cm.

[0024] As the first aspect or the second aspect of the utility model is further preferred, the width of the discharge surface of the discharge conductor is greater than or equal to 1.0cm, and less than or equal to 4cm.

[0025] As a further limitation of the first aspect or the second aspect of the utility model, further comprising vent component, at least one vent pipe is provided on the vent component, the vent component is used together with the plugging material to block the end of the through hole of the ceramic electrode, and the vent pipe is used to connect the external working space of the ceramic electrode with the through hole internal space of the ceramic electrode.

[0026] As a further limitation of the first aspect or the second aspect of the present application, the venting component is provided with at least one vent hole, and the venting component is used together with the plugging material to plug the end of the through hole of the ceramic electrode, and the vent hole is used to communicate the external working space of the ceramic electrode with the internal space of the through hole of the ceramic electrode.

[0027] In a third aspect, the present application provides a ceramic electrode.

[0028] The ceramic electrode comprises a ceramic shell with a through hole in the longitudinal direction, the ceramic shell comprises a clamping part and a discharge part, a discharge conductor is arranged in a limiting cavity in the through hole, a wall of the discharge part opposite to the discharge surface of the discharge conductor is a discharge blocking wall, the discharge surface of the discharge conductor is opposite to the inner wall of the discharge blocking wall, and the width of the discharge surface of the discharge conductor is greater than or equal to 1.0 cm and less than or equal to 4 cm.

[0029] In a fourth aspect, the present application provides a ceramic electrode.

[0030] The ceramic electrode comprises a ceramic shell with a through hole in the longitudinal direction, the ceramic shell comprises a clamping part and a discharge part, a discharge conductor is arranged in a limiting cavity in the through hole, a wall of the discharge part opposite to the discharge surface of the discharge conductor is a discharge blocking wall, the discharge surface of the discharge conductor is opposite to the inner wall of the discharge blocking wall;

[0031] The venting component is provided with at least one vent hole, and the venting component is used together with the plugging material to plug the end of the through hole of the ceramic electrode, and the vent hole is used to communicate the external working space of the ceramic electrode with the internal space of the through hole of the ceramic electrode.

[0032] In a fifth aspect, the present application provides a ceramic electrode.

[0033] The ceramic electrode comprises a ceramic shell with a through hole in the longitudinal direction, the ceramic shell comprises a clamping part and a discharge part, a discharge conductor is arranged in a limiting cavity in the through hole, a wall of the discharge part opposite to the discharge surface of the discharge conductor is a discharge blocking wall, the discharge surface of the discharge conductor is opposite to the inner wall of the discharge blocking wall;

[0034] The venting component is provided with at least one vent hole, and the venting component is used together with the plugging material to plug the end of the through hole of the ceramic electrode, and the vent hole is used to communicate the external working space of the ceramic electrode with the internal space of the through hole of the ceramic electrode.

[0035] The preparation method of the ceramic electrode in the first aspect, the second aspect, the third aspect or the fourth aspect of the present application comprises the following process:

[0036] One end of the discharge conductor is led out of the through hole by a connecting line, and one end of the through hole is sealed by a sealing material;

[0037] The through hole of the ceramic electrode is filled with quartz sand or high-temperature-resistant insulating particles;

[0038] After the through hole is filled with quartz sand or high-temperature-resistant insulating particles, a ventilation component is installed at the other end of the through hole, and the other end of the through hole is sealed by a sealing material while the ventilation component is fixed;

[0039] The assembly of the ceramic electrode is completed.

[0040] In a sixth aspect, the utility model provides a kind of plasma surface treatment machine, including the ceramic electrode of the utility model first aspect, second aspect, third aspect or fourth aspect.

[0041] In a seventh aspect, the utility model provides a kind of plasma surface treatment machine, including ceramic electrode frame and the ceramic electrode of the utility model first aspect, second aspect, third aspect or fourth aspect, multiple clamping slots are opened on each ceramic electrode frame, and the clamping portion is accommodated and limited by the clamping slot.

[0042] As the further limitation of the seventh aspect of the utility model, the plasma surface treatment machine further includes a machine body and a guide roller installed inside the machine body.

[0043] Any two ceramic electrodes form a set of processing units, the processing unit includes a first ceramic electrode and a second ceramic electrode, and the discharge surface of the first ceramic electrode is opposite or offset opposite to the discharge surface of the second ceramic electrode.

[0044] The guide roller is made of conductive material, and the discharge surface of the first ceramic electrode and the discharge surface of the second ceramic electrode have a foil suspension gap, the foil suspension gap is greater than the thickness of the foil to be processed, and the foil to be processed can pass through the foil suspension gap without contacting the first ceramic electrode and the second ceramic electrode.

[0045] The operation method of the above-mentioned plasma surface treatment machine includes the following processes:

[0046] The foil to be processed is driven by the guide roller to pass through the foil suspension gap.

[0047] The foil to be processed is used as a low-voltage end, and the first ceramic electrode and the second ceramic electrode are used as high-voltage ends to perform plasma treatment on the two surfaces of the foil to be processed.

[0048] Compared with the prior art, the utility model has the beneficial effects that:

[0049] 1. This utility model innovatively proposes a ceramic electrode in which the wall thickness of the clamping part of the ceramic shell is greater than the wall thickness of the discharge barrier wall (as the reference wall thickness). The clamping part of the ceramic shell, which is subjected to the greatest force, is thickened and strengthened. Through this unequal wall thickness design, the strength of the clamping part is guaranteed, deformation or cracking caused by clamping force under high temperature environment is avoided, and the service life is improved.

[0050] 2. This utility model innovatively proposes a ceramic electrode in which both sides of the clamping part are provided with outwardly protruding parts to form concave arc-shaped notches. The radius of the arc angle corresponding to the arc-shaped notch is greater than a set threshold, and the corners of the protruding parts are all arc-shaped. Through this design of large arc-shaped notches, a more complete fit with the clamping slot or clamping claw of the ceramic electrode can be achieved, increasing the clamping force area of ​​the ceramic electrode shell and reducing the risk of cracking caused by single-point force.

[0051] 3. This utility model innovatively proposes a ceramic electrode in which the inner walls on both sides of the limiting cavity are inclined inward to limit the discharge conductor. The two corners of the limiting cavity are rounded, so that the inner wall of the limiting cavity presents a smooth transition, which reduces the firing difficulty in the ceramic shell firing process. Moreover, the smooth transition in the limiting cavity also enhances the uniformity of heating of the entire inner wall and avoids the risk of cracking caused by the abrupt shape change at the corner of the inner wall.

[0052] 4. This utility model innovatively proposes a ceramic electrode in which the clamping part and the discharge part are integrally connected by opposite side walls. The wall thickness of the side walls can be uniform and exactly the same (i.e., the side walls are parallel), or the opposite side walls can be inclined inward (i.e., inclined towards the central axis of the ceramic shell), and the wall thickness gradually increases in the inclined direction (i.e., the virtual extension lines of the side walls intersect). The wall thickness of the side walls in both of these ways is greater than the wall thickness of the discharge blocking wall (as the reference wall thickness), which ensures the overall strength of the entire ceramic shell and reduces the risk of high-temperature cracking.

[0053] 5. This utility model innovatively proposes a ceramic electrode with a clamping part having a receiving cavity. The cross-section of the receiving cavity is arc-shaped, and the inner wall surfaces of the two side walls smoothly transition (such as through a horizontal wall transition or through an arc-shaped wall transition) to the inner wall surface of the receiving cavity and the inner wall surface of the limiting cavity, reducing the risk of cracking caused by sudden thickness changes.

[0054] 6. This utility model innovatively proposes a ceramic electrode in which the wall thickness at the apex of the arc-shaped receiving cavity is greater than the wall thickness of the discharge blocking wall and greater than the maximum thickness of the side wall. This design increases the thickness of the entire clamping part, which can better offset the influence of clamping force and avoid the risk of cracking caused by clamping at high temperature for a long time.

[0055] 7. The utility model discloses a ceramic electrode, innovatively, which breaks through the width of the discharge surface of the discharge conductor, which is greater than 1 cm, and is greater than the width of the discharge surface used in the prior art (generally 0.95 cm). Through this design, more original ceramic electrodes can achieve the same discharge effect in a limited internal space of the machine body, and the space occupation is reduced.

[0056] 8. The utility model discloses a ceramic electrode, innovatively, which further comprises a ventilation component, at least one ventilation pipe is arranged on the ventilation component, the ventilation component is used for plugging the end of the through hole of the ceramic electrode together with the plugging material, and the ventilation pipe is used for connecting the external working space of the ceramic electrode with the internal space of the through hole of the ceramic electrode. Through the separate design of the ventilation component, the additional risk of explosion and the reduction of mechanical strength caused by the additional ventilation hole are avoided, the hole diameter of the ventilation pipe on the ventilation component can be adaptively set, and the demand in different scenarios can be met.

[0057] 9. The utility model discloses a ceramic electrode, innovatively, wherein the clamping part comprises a reinforced thickness area and a conventional thickness area, the circular arc vertex is located on the radial middle axis, the thickness area corresponding to the point on the continuous set arc segment on the left side of the circular arc vertex and the thickness area corresponding to the point on the continuous set arc segment on the left side of the circular arc vertex constitute the conventional thickness area, the thickness of the conventional thickness area is equal to or less than the thickness of the discharge resistance wall, and the thickness of the reinforced thickness area is greater than the thickness of the discharge resistance wall. In this way, the thickness of the clamping part can be reinforced to improve the stress capacity, and the material usage and cost can be reduced by thinning the circular arc vertex.

[0058] 10. The utility model discloses a plasma surface treatment machine using the ceramic electrode designed by the utility model, which can greatly reduce the frequency of replacing the ceramic electrode after increasing the stability of the ceramic electrode, thereby reducing the cost, continuously operating for a long time, improving the efficiency of the plasma surface, and reducing the downtime maintenance time.

[0059] The advantages of the additional aspects of the utility model will be partially given in the following description, partially will become obvious from the following description, or will be understood through the practice of the utility model. BRIEF DESCRIPTION OF DRAWINGS

[0060] The drawings accompanying the specification of the utility model form a part of the utility model and are used to provide further understanding of the utility model, and the illustrative embodiments of the utility model and the description thereof are used to explain the utility model, and do not constitute improper limitation on the utility model.

[0061] Figure 1The utility model discloses a ceramic electrode's schematic diagram for the embodiment 1 of the utility model provides Figure 1 ;

[0062] Figure 2 The utility model discloses a ceramic electrode's schematic diagram for the embodiment 1 of the utility model provides Figure 2 ;

[0063] Figure 3 The utility model discloses a ceramic electrode's schematic diagram for the embodiment 1 of the utility model provides Figure 3 ;

[0064] Figure 4 The utility model discloses a ceramic electrode's schematic diagram for the embodiment 1 of the utility model provides Figure 4 ;

[0065] Figure 5 The utility model discloses a ceramic electrode's schematic diagram for the embodiment 1 of the utility model provides

[0066] Figure 6 The utility model discloses a ceramic electrode's schematic diagram for the embodiment 1 of the utility model provides

[0067] Figure 7 The utility model discloses a ceramic electrode's schematic diagram for the embodiment 1 of the utility model provides

[0068] Figure 8 The utility model discloses a ceramic electrode's schematic diagram for the embodiment 1 of the utility model provides

[0069] Figure 9 The utility model discloses a ceramic electrode's schematic diagram for the embodiment 2 of the utility model provides Figure 5 ;

[0070] Figure 10 The utility model discloses a ceramic electrode's schematic diagram for the embodiment 6 of the utility model provides the flow chart schematic diagram of preparation method

[0071] Figure 11 The utility model discloses a ceramic electrode's schematic diagram for the embodiment 9 of the utility model provides with ceramic electrode frame cooperation

[0072] Figure 12 The utility model discloses a ceramic electrode's schematic diagram for the embodiment 10 of the utility model provides the flow chart schematic diagram of operation method of plasma surface treatment machine

[0073] Wherein, 1, ceramic shell, 2, clamping part, 3, discharge part, 4, side wall, 5, through -hole, 6, accommodating cavity, 7, first arc recess, 8, second arc recess, 9, limit cavity, 10, discharge conductor, 11, discharge barrier wall, 12, first protruding portion, 13, second protruding portion, 14, first outer plane, 15, second outer plane, 16, ceramic electrode holder, 17, vent component, 18, vent hole, 19, upper dotted line, 20, lower dotted line, 21, critical dotted line, 22, enhanced thickness area, 23, conventional thickness area. Detailed Implementation

[0074] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0075] It should be noted that the following detailed description is exemplary and intended to provide further explanation of the present invention. Unless otherwise specified, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains.

[0076] Where there is no conflict, the embodiments and features in the embodiments of this utility model can be combined with each other.

[0077] Example 1:

[0078] In this implementation, such as Figure 1 As shown, a ceramic electrode is proposed, comprising: a ceramic shell 1 with a through hole 5 along the longitudinal direction (i.e., the length direction of the ceramic electrode) (the through hole 5 penetrates both ends of the ceramic shell 1), the ceramic shell 1 including a clamping part 2 and a discharge part 3, a discharge conductor 10 arranged in a limiting cavity 9 within the through hole 5, the wall of the discharge part opposite the discharge surface of the discharge conductor 10 being a discharge blocking wall 11 (here the discharge blocking wall 11 is part of the ceramic shell 1), the wall thickness of the clamping part 2 being greater than the wall thickness of the discharge blocking wall 11, the clamping part 2 of the ceramic shell 1 being subjected to the greatest force, through this unequal wall thickness design, ensuring the strength of the clamping part 2, avoiding deformation or cracking caused by clamping force under high temperature environment, and improving the life of the entire ceramic electrode.

[0079] It should be noted that the ceramic shell 1 described in this implementation has a left-right symmetrical structure, that is, the clamping part 2 is symmetrical about the left and right along the central axis, and the discharge part 3 is also symmetrical about the left and right along the central axis. This symmetrical structure can ensure the stability of the overall ceramic shell 1.

[0080] In this implementation, preferably, the clamping part 2 and the discharge part 3 are integrally connected via opposing side walls 4. The clamping part 2 has a receiving cavity 6. The space of the receiving cavity 6, the space of the limiting cavity 9, and the inner cavity space between the opposing side walls 4 together constitute the inner space of the through hole 5. It should be noted that in this implementation, the two side walls 4 are symmetrical about the central axis, the space of the receiving cavity 6 is symmetrical about the central axis, the space of the limiting cavity 9 is symmetrical about the central axis, and the inner cavity space between the two side walls 4 is also symmetrical about the central axis.

[0081] Specifically, such as Figure 2As shown, the upper and lower dashed lines (i.e. the upper dashed line 19 and the lower dashed line 20, the dashed lines do not exist on the actual product, here only for illustration) divide the entire ceramic electrode shell into the clamping part 2, the discharge part 3 and the side wall 4, and the two opposite side walls 4 are parallel and equal in thickness.

[0082] It should be noted that the division of the clamping part 2, the discharge part 3 and the side wall 4 here is to better express the shape of the ceramic shell 1 of the utility model through functional definition, and it is not necessary to divide. It can be understood that in other implementations, the side wall 4 here can also be allocated to the clamping part 2 and the discharge part 3 respectively (i.e. evenly or proportionally divided into the clamping part 2 and the discharge part 3, the clamping part 2 can extend to contain the entire side wall 4, and the discharge part 3 can also extend to contain the entire side wall 4), so that the entire ceramic shell 1 is only left with the clamping part 2 and the discharge part 3 (but the actual shape does not change, and it is still Figure 1 the shape represented in the middle).

[0083] In this implementation, preferably, the entire through hole 5 is in the shape of an "arched door hole", and only the limiting grooves at the bottom are recessed inward by a part on both sides to form the limiting space of the discharge conductor 10, and the entire through hole 5 is smooth inside.

[0084] In this implementation, preferably, the outer wall surface of one side of the discharge part 3 is coplanar with the outer wall surface of the adjacent one side wall 4 to form a first outer plane 14, and the outer wall surface of the other side of the discharge part 3 is coplanar with the outer wall surface of the adjacent other side wall 4 to form a second outer plane 15, and the first outer plane 14 and the second outer plane 15 are parallel to each other and symmetrical along the central axis. Of course, it can be understood that in other implementations, the first outer plane 14 and the second outer plane 15 can also be symmetrical to each other and arranged at a certain angle, which will not be described here.

[0085] In the present embodiment, preferably, the two sides of the clamping part 2 are provided with outwardly protruding protrusions to form concave circular-arc-shaped notches, where the protrusions include a first protrusion 12 and a second protrusion 13, the first protrusion 12 and the first outer plane 14 form a first circular-arc-shaped notch 7, the second protrusion 13 and the second outer plane 15 form a second circular-arc-shaped notch 8, the corresponding circular-arc radii of the first circular-arc-shaped notch 7 and the second circular-arc-shaped notch 8 are greater than a set threshold value, the corners of the first protrusion 12 and the second protrusion 13 are circular-arc-shaped, and through the design of such large circular-arc-shaped notches, more sufficient fitting (arc-surface fitting) with the clamping clamping slots or clamping jaws of the ceramic electrode can be achieved, the stress area of the ceramic electrode shell is increased, and the risk of bursting caused by single-point stress is reduced. It should be noted that the first protrusion 12 and the second protrusion 13 are relative to the first outer plane 14 and the second outer plane 15, that is, the first protrusion 12 protrudes outwardly relative to the first outer plane 14, and the second protrusion 13 protrudes outwardly relative to the second outer plane 15, and the design of the circular-arc-shaped corners makes the inner side wall 4 of the limiting cavity 9 present a smooth transition, reduces the firing difficulty in the ceramic shell firing process, and the smooth transition in the limiting cavity 9 also enhances the uniformity of the heat received by the inner wall of the entire limiting cavity 9, avoids the bursting risk caused by the shape mutation of the corner position of the inner wall of the limiting cavity 9, and improves the service life.

[0086] In the present embodiment, preferably, the discharge conductor 10 is a discharge sheet (presenting a certain thickness, but requiring a flat surface to ensure uniform discharge), the two ends of the discharge sheet are led out through the two ends of the lead hole 5, the inner wall surface of the discharge blocking wall 11 is horizontal, the inner wall surface of the discharge blocking wall 11 is opposite to the discharge surface of the discharge sheet to ensure the discharge effect, and the outer wall surface of the discharge blocking wall 11 is wave-shaped.

[0087] In the present embodiment, preferably, the two side walls of the limiting cavity 9 are inwardly inclined to limit the discharge conductor 10, and the corners of the two side walls of the limiting cavity 9 are circular-arc-shaped. The inwardly inclined manner can be horizontal inward inclination or circular-arc-shaped inward inclination, as long as it can ensure smooth transition, which will not be described here.

[0088] In the present embodiment, preferably, the two opposite side walls 4 are parallel to each other, the thicknesses of the two side walls 4 are uniform and equal, and the wall thicknesses of the two side walls 4 are greater than the wall thickness of the discharge blocking wall 11. This way of making the wall thicknesses of the two side walls 4 greater than the wall thickness (as a reference wall thickness) of the discharge blocking wall 11 ensures the overall strength of the entire ceramic shell 1 and reduces the risk of high-temperature bursting. For example, the present embodiment gives a schematic as follows: Figure 3As shown, when the thickness of the discharge blocking wall 11 is H, the thickness of each of the two side walls 4 is 1.58H. Of course, 1.58H here is only a preferred design, and those skilled in the art can also set it to 1.3H, 1.8H, or 2.1H, etc., as long as it is greater than the thickness H of the discharge blocking wall 11. Those skilled in the art can choose according to specific needs, which will not be described here.

[0089] In other implementations, optionally, the two opposite side walls 4 are both inclined inward, the two side walls 4 are inclined inward and the wall thickness gradually increases in the inclined direction, the wall thickness of the two side walls 4 is greater than the wall thickness of the discharge blocking wall 11, and the minimum thickness of the two side walls 4 also needs to be greater than the thickness of the discharge blocking wall 11. The position of the minimum thickness of the two side walls 4 appears at the starting position of the inward inclination of the two side walls 4. Those skilled in the art can choose and design the specific thickness according to specific needs, which will not be described here.

[0090] In the present implementation, preferably, the cross section of the accommodating cavity 6 is in the shape of a circular arc, and the inner wall surfaces of the two side walls 4 are smoothly transitioned to the inner wall surfaces of the accommodating cavity 6 and the limiting cavity 9, respectively, so as to ensure that there is no dead angle in the through hole 5 and to avoid bursting due to high temperature.

[0091] In the present implementation, preferably, the wall thickness at the position of the circular arc vertex of the circular arc-shaped accommodating cavity 6 is greater than the wall thickness of the discharge blocking wall 11 and greater than the maximum thickness of the side wall 4. This design increases the thickness of the entire clamping portion 2 (especially ensures the strength of the contact position with the clamping groove of the ceramic electrode holder), which can better offset the influence of the clamping force and avoid the risk of bursting due to clamping under high temperature for a long time. Optionally, an example is provided in the present implementation, when the thickness of the discharge blocking wall 11 is H, the wall thickness at the position of the circular arc vertex of the accommodating cavity 6 is 1.67H. It can be understood that in other implementations, the thickness here can be any thickness greater than the maximum thickness of the side wall 4, for example, 1.61H, 1.89H, 2.21H, etc. Those skilled in the art can choose according to specific needs, which will not be described here.

[0092] Of course, it can be understood that in other implementations, for example, in use scenarios with low strength requirements, it is also possible to only require the wall thickness at the position of the circular arc vertex of the accommodating cavity 6 to be greater than the wall thickness H of the discharge blocking wall 11, and it is not necessarily required to be greater than the thickness of the side wall 4. Those skilled in the art can choose and design according to specific needs, which will not be described here.

[0093] Optionally, in other implementations, the wall thickness H1' at the position of the arc top point of the accommodating cavity 6 can be determined by optimizing the thermal expansion coefficient a, the difference between the working temperature and the room temperature AT, the contact area A with the ceramic electrode clamping groove, and a coefficient k1 related to the electrode geometry and constraint conditions, for example:

[0094] H1' = k1·a·AT·A -1 / 2 (1).

[0095] In this way, different H1' can be optimized according to the specific use scenario.

[0096] Similarly, in other implementations, the thickness H2' of the side wall can also be determined by optimizing the thermal expansion coefficient a, the thermal conductivity k, the difference between the working temperature and the room temperature AT, the contact area A with the ceramic electrode clamping groove, and a coefficient k2 related to the electrode geometry and constraint conditions, for example:

[0097]

[0098] Similarly, in this way, different side wall thicknesses can be optimized according to the specific use scenario.

[0099] In the present implementation, preferably, the width of the discharge surface of the discharge conductor 10 is in the range of 0.5 cm to 4 cm, for example, it can be 0.5 cm wide, or it can be 4 cm wide, and the present implementation preferably uses 0.9 cm wide, as shown in Figure 3 to achieve better discharge effect.

[0100] In other implementations, optionally, the width of the discharge surface of the discharge conductor 10 is in the range of 1 cm to 4 cm, for example, it can be 1 cm wide, or it can be 4 cm wide, and preferably 1.5 cm, as shown in Figure 4 Here, the width range is larger than the traditional 0.9 cm, that is, the width of the discharge surface is further increased relative to the traditional width. Through this design, more traditional ceramic electrodes can be realized with a small number of new ceramic electrodes arranged in a limited internal space of the machine body, reducing the space occupation.

[0101] In the present implementation, preferably, it further includes a ventilation component 17, as shown in Figure 6As shown, at least one vent pipe is provided on the venting component 17 (the vent pipe is provided through the vent hole 18 on the venting component 17), the venting component 17 is used together with the sealing material to seal the end of the through hole 5 of the ceramic electrode, and the vent pipe is used to communicate the external working space of the ceramic electrode with the internal space of the through hole 5 of the ceramic electrode. Through the separate design of the venting component, not only the difficulty of separately firing the vent hole is avoided, and the additional risk of explosion caused by the separate vent hole is avoided, but also the hole diameter of the vent pipe on the venting component can be adaptively set to meet the needs in different scenarios.

[0102] For example, in some use scenarios, the temperature may be higher, and at this time, the heat accumulated in the through hole 5 of the ceramic electrode will also be more, and at this time, a ceramic electrode with a larger aperture vent pipe needs to be used; and in some moderate temperature use scenarios, the heat accumulated in the through hole 5 of the ceramic electrode is at a normal level, and only a small aperture vent pipe is needed, therefore, through the provision of the venting component, the ceramic electrode assembly side can be free from the dependence on ceramic firing, and the design of the vent hole can be freely carried out, and the environmental adaptability is improved.

[0103] It should be noted that the product of the present embodiment is an optimized product form after multiple improvements, as shown in Figure 7 and Figure 8 , it is the previous iteration scheme (not disclosed) of the optimal design scheme of Figure 1 , as shown in Figure 7 , although the circular arc design is performed on part of the positions, the wall thickness of the entire ceramic shell 1 is still equal, which is similar to the existing manner introduced in the background art, and it has been verified that it still has the problems of low service life and easy explosion; as shown in Figure 8 , it is an improved version (not disclosed) of the product shown in Figure 7 , which increases the strength of the clamping jaw fixing part, but the corner transition of the through hole 5 is still not smooth, there is a sudden shape change, and there is still a high risk of high-temperature explosion.

[0104] In summary, through the combined design of the unequal wall thickness, the venting component, and the circular arc-shaped notch of the ceramic electrode of the present embodiment, the strength of the clamping part is ensured, the deformation or explosion caused by the clamping force in the high-temperature environment is avoided, and the service life is improved.

[0105] Embodiment 2:

[0106] The present embodiment proposes a ceramic electrode, as shown in Figure 9As shown, the ceramic electrode comprises: a ceramic shell with a through hole in the longitudinal direction, the ceramic shell comprising a clamping part and a discharge part, a discharge conductor arranged in a limiting cavity in the through hole, a wall of the discharge part opposite to the discharge surface of the discharge conductor being a discharge blocking wall, the clamping part being provided with an accommodating cavity, the cross section of the accommodating cavity being a circular arc shape symmetrical to the radial middle axis, the clamping part being divided into an enhanced thickness area 22 and a conventional thickness area 23 by a critical dashed line 21.

[0107] The circular arc vertex is located on the radial middle axis, and the thickness area corresponding to the point on the set arc segment OM (less than OM') continuously located on the left side of the circular arc vertex and the thickness area corresponding to the point on the set arc segment ON (less than ON') continuously located on the left side of the circular arc vertex constitute the conventional thickness area 23, the thickness of the conventional thickness area being equal to or less than the thickness of the discharge blocking wall, and the thickness of the enhanced thickness area 22 being greater than the thickness of the discharge blocking wall.

[0108] Other venting component designs and constraint limitations of the discharge sheet are described in Embodiment 1, which will not be repeated here.

[0109] Embodiment 3:

[0110] The present implementation provides a ceramic electrode, comprising: a ceramic shell with a through hole in the longitudinal direction, the ceramic shell comprising a clamping part and a discharge part, a discharge conductor arranged in a limiting cavity in the through hole, a wall of the discharge part opposite to the discharge surface of the discharge conductor being a discharge blocking wall, the discharge surface of the discharge conductor being opposite to the inner wall of the discharge blocking wall, and the width of the discharge surface of the discharge conductor being 1.0 cm-4 cm (including the end point values 1.0 cm and 4.0 cm).

[0111] Embodiment 4:

[0112] The present implementation provides a ceramic electrode, comprising: a ceramic shell with a through hole in the longitudinal direction, the ceramic shell comprising a clamping part and a discharge part, a discharge conductor arranged in a limiting cavity in the through hole, a wall of the discharge part opposite to the discharge surface of the discharge conductor being a discharge blocking wall, the discharge surface of the discharge conductor being opposite to the inner wall of the discharge blocking wall;

[0113] Further comprising a venting component, the venting component being provided with at least one venting hole, the venting component being used together with a sealing material to seal the end of the through hole of the ceramic electrode, and the venting hole being used to communicate the external working space of the ceramic electrode with the internal space of the through hole of the ceramic electrode.

[0114] Embodiment 5:

[0115] The present embodiment provides a ceramic electrode, comprising: a ceramic shell with a through hole opened in a longitudinal direction, the ceramic shell comprising a clamping portion and a discharge portion, a discharge conductor arranged in a limiting cavity in the through hole, and a wall of the discharge portion facing the discharge surface of the discharge conductor being a discharge blocking wall, and the discharge surface of the discharge conductor facing the inner wall of the discharge blocking wall;

[0116] Further comprising a venting component with at least one vent hole opened thereon, the venting component being used together with the sealing material to seal the end of the through hole of the ceramic electrode, and the vent hole being used to communicate the external working space of the ceramic electrode with the internal space of the through hole of the ceramic electrode.

[0117] Embodiment 6:

[0118] The present embodiment provides a preparation method of the ceramic electrode described in Embodiment 1, as shown in the following processes: Figure 10

[0119] S6.1: One end of the discharge conductor 10 is led out of the through hole 5 through a connecting line. Specifically, it includes the following steps:

[0120] Ensure that the connecting line has good conductivity and insulation performance;

[0121] One end of the discharge conductor 10 is led out of the through hole 5 through a connecting line, the sealing material is evenly applied to one end of the through hole 5, and the sealing is ensured to be tight without air leakage, and the sealing material is solidified (the solidification time is determined according to the material properties);

[0122] The exposed part of the connecting line is wrapped with an insulating material to prevent short circuit.

[0123] S6.2: Fill quartz sand into the through hole 5 of the ceramic electrode. More specifically, it includes the following steps:

[0124] Ensure that the surface of the ceramic electrode is clean, crack-free and defect-free, and select quartz sand with moderate particle size and high purity to ensure good filling effect;

[0125] According to the volume of the through hole 5 of the ceramic electrode and the density of the quartz sand, the required amount of quartz sand is calculated;

[0126] Use appropriate tools (such as a funnel) to slowly pour the quartz sand into the through hole 5 of the ceramic electrode;

[0127] Gently knock or shake the outer wall of the ceramic electrode to promote the quartz sand to tightly fill the space in the through hole 5 and eliminate air gaps;

[0128] Continue to fill until the quartz sand completely fills the through hole 5 and slightly overflows the through hole 5, to ensure that there is no gap in the through hole 5.

[0129] ​S6.3: install the venting component 17 at the other end of the through hole 5, and seal the other end of the through hole 5 by the sealing material while fixing the venting component 17. Specifically, it includes:

[0130] The sealing material with good sealing performance and high temperature resistance is selected, such as ceramic mud, high temperature glue, etc.

[0131] The venting component is installed at the other end of the through hole 5, and the venting component is tightly connected with the through hole 5 to ensure no air leakage.

[0132] The other end of the through hole 5 is sealed by the sealing material, and the venting component 17 is fixed on the through hole 5 at the same time, and the sealing material is completely cured. The venting component 17 is fixed at one end of the through hole 5 together with the sealing material, which can ensure a certain stability.

[0133] S6.4: complete the assembly of the ceramic electrode. Specifically, it includes:

[0134] The assembly effect of the ceramic electrode is carefully checked to ensure that the quartz sand is tightly filled, the connecting line is correctly led out, the sealing material is well cured, and the venting component 17 is firmly installed. The appropriate tool is used to remove the excess sealing material and quartz sand on the surface of the ceramic electrode. If necessary, the ceramic electrode is treated as necessary, such as polishing, polishing, etc., to improve the surface finish and use performance.

[0135] Example 7:

[0136] The implementation provides a kind of plasma surface treatment machine, including the ceramic electrode of the utility model embodiment 1, embodiment 2, embodiment 3, embodiment 4 or embodiment 5.

[0137] Example 8:

[0138] The implementation provides a kind of plasma surface treatment machine, including ceramic electrode frame and the ceramic electrode of the utility model embodiment 1, embodiment 2, embodiment 3, embodiment 4 or embodiment 5, multiple clamping slots are opened on each ceramic electrode frame, and the clamping part is accommodated and limited to the clamping slot of ceramic electrode.

[0139] Example 9:

[0140] The implementation provides a kind of plasma surface treatment machine, including machine body and the guide roller and the ceramic electrode of the utility model embodiment 1, embodiment 2, embodiment 3, embodiment 4 or embodiment 5 installed in the machine body;

[0141] Any two ceramic electrodes form a group of processing units, the processing unit includes first ceramic electrode and second ceramic electrode, and the discharge surface of the first ceramic electrode is opposite or staggered opposite to the discharge surface of the second ceramic electrode.

[0142] The guide roller is made of conductive material, the discharge surface of the first ceramic electrode and the discharge surface of the second ceramic electrode have a foil suspension gap, the foil suspension gap is greater than the thickness of the foil to be processed, and the foil to be processed can pass through the foil suspension gap and not contact the first ceramic electrode and the second ceramic electrode.

[0143] In the present embodiment, optionally, as shown in Figure 11 The ceramic electrode holder 16 is further provided with a clamping jaw, and the clamping jaw cooperates with the clamping portion to limit and fix the ceramic electrode.

[0144] It can be understood that the clamping jaw cooperates with the clamping portion to limit and fix the ceramic electrode because the ceramic housing is provided with a first circular arc notch 7 and a second circular arc notch 8.

[0145] More specifically, the body of the present embodiment is provided with a first ceramic electrode holder and a second ceramic electrode holder, the first ceramic electrode is mounted on the first ceramic electrode holder, and the second ceramic electrode is mounted on the second ceramic electrode holder. The first ceramic electrode holder and / or the second ceramic electrode holder are connected with an adjusting driving mechanism, the adjusting driving mechanism is a linear optical axis transmission, and the cylinder drives opening and closing to realize the position between the first ceramic electrode holder and the second ceramic electrode holder. The first ceramic electrode holder and the second ceramic electrode holder are both provided with a plurality of insulating mounting blocks, the insulating mounting blocks are provided with clamping jaws, the clamping jaws are mounted with cylindrical ceramic electrodes, and the cylindrical ceramic electrodes form discharge conductors after being connected with power supplies. The first ceramic electrode and the second ceramic electrode cooperated are a group, at least two groups are arranged in the body and are arranged in a horizontal direction, and corresponding guide rollers are arranged above and below each group of the first ceramic electrode and the second ceramic electrode. Multiple groups are arranged, reasonable layout is realized in limited space, processing efficiency is greatly improved, multiple processing is realized, and surface treatment effect is improved. In the present embodiment, preferably, the first ceramic electrode and the second ceramic electrode are connected with a 10000V power supply.

[0146] Example 10:

[0147] The present embodiment provides a working method of a plasma surface treatment machine, as shown in Figure 12 The working method of the plasma surface treatment machine according to the present embodiment 9 comprises the following processes:

[0148] S10.1: The foil to be processed is driven by the guide roller to pass through the foil suspension gap. More specifically, it comprises:

[0149] Ensure that the material, thickness and width of the foil meet the requirements of the plasma surface treatment, check whether the surface of the foil is clean, free of oil stains and scratches, so as to ensure the processing effect;

[0150] According to the width and thickness of the foil, the positions and distances of the guide rollers are adjusted to ensure that the foil can pass smoothly, and the surface of the guide roller is smooth and damage-free to avoid scratching the foil;

[0151] The to-be-processed foil is attached to the guide roller to ensure that the foil can be closely attached to the guide roller, the driving device of the guide roller is started, the foil is slowly and smoothly passed through the foil suspension gap under the driving of the guide roller, and the passing process of the foil is observed to ensure that there is no jamming and deviation.

[0152] S10.2: The to-be-processed foil is taken as the low-voltage end, and the first ceramic electrode and the second ceramic electrode are taken as the high-voltage ends to perform plasma treatment on the two surfaces of the to-be-processed foil. More specifically, it includes:

[0153] Connecting the power supply and the electrodes: The power supply of the plasma surface treatment machine is correctly connected with the first ceramic electrode and the second ceramic electrode to ensure that the output voltage and current of the power supply meet the requirements of plasma treatment;

[0154] Setting the electrode position: According to the width and thickness of the foil, the relative positions of the first ceramic electrode and the second ceramic electrode are adjusted so that they are located above or below the two surfaces of the foil, respectively, to ensure that the distance between the electrodes and the foil is moderate, neither too close to cause short circuit nor too far to affect the treatment effect;

[0155] Starting the plasma treatment: The switch of the plasma surface treatment machine is turned on to start the plasma discharge process, and the stability of the plasma discharge is observed to ensure that the discharge is uniform and has no abnormal phenomena;

[0156] Plasma treatment process: Under the action of plasma discharge, the molecules or atoms on the surface of the foil are excited or ionized to form plasma, and the plasma reacts chemically or physically with the surface of the foil to achieve the purpose of cleaning, modification or coating, etc. The treatment time is controlled to ensure that the surface of the foil is fully treated, while avoiding excessive treatment to cause the performance of the foil to decrease.

[0157] End of treatment and taking out the foil: When the treatment time reaches the preset value or the foil treatment is completed, the switch of the plasma surface treatment machine is turned off to stop the plasma discharge process, and subsequent inspection, packaging or storage processes are performed.

[0158] The above only describes preferred embodiments of the present application and is not intended to limit the present application. For those skilled in the art, the present application can be variously changed and modified. Any modification, equivalent replacement, improvement, etc. made within the spirit and principles of the present application shall be included in the protection scope of the present application.

Claims

1. A ceramic electrode comprising: A ceramic shell with a longitudinal through hole, the ceramic shell comprising a clamping part and a discharging part, characterized in that: a discharging conductor is arranged in a limiting cavity in the through hole, a wall of the discharging part opposite to a discharging surface of the discharging conductor is a discharging blocking wall, and the wall thickness of the clamping part is greater than the wall thickness of the discharging blocking wall.

2. The ceramic electrode of claim 1, characterized in that: both sides of the clamping part are provided with outward protruding protrusions, the protrusions and the outer surface of the ceramic shell form concave circular-arc-shaped notches, the corresponding circular-arc-shaped notch has a circular-arc angle radius greater than a set threshold, and the corner of the protrusion is circular-arc-shaped.

3. The ceramic electrode of claim 1, characterized in that: the inner walls of both sides of the limiting cavity are inwardly inclined to limit the discharging conductor, and the corners of both sides of the limiting cavity are circular-arc-shaped.

4. The ceramic electrode of claim 3, characterized in that: the inwardly inclined manner is horizontal inward inclination or circular-arc-shaped inward inclination.

5. The ceramic electrode of claim 1, characterized in that: the clamping part and the discharging part are integrally connected through the opposite two side walls, the clamping part is provided with a receiving cavity, and the space of the receiving cavity, the space of the limiting cavity, and the inner cavity space between the opposite two side walls jointly constitute the space in the through hole.

6. The ceramic electrode of claim 5, characterized in that: the opposite two side walls are parallel to each other, the thicknesses of the two side walls are uniform and equal, and the wall thicknesses of the two side walls are greater than the wall thickness of the discharging blocking wall.

7. The ceramic electrode of claim 5, characterized in that: the opposite two side walls are inwardly inclined, and the wall thickness gradually increases in the inclined direction, and the wall thicknesses of the two side walls are greater than the wall thickness of the discharging blocking wall.

8. The ceramic electrode of any one of claims 5-7, characterized in that: the cross section of the receiving cavity is circular-arc-shaped, and the inner wall surfaces of the two side walls are respectively smoothly connected to the inner wall surface of the receiving cavity and the inner wall surface of the limiting cavity.

9. The ceramic electrode of claim 8, characterized in that: the wall thickness at the position of the circular-arc-shaped circular-arc apex of the circular-arc-shaped receiving cavity is greater than the wall thickness of the discharging blocking wall.

10. The ceramic electrode of claim 9, characterized in that: the wall thickness at the position of the circular-arc-shaped circular-arc apex of the circular-arc-shaped receiving cavity is greater than the maximum thickness of the side wall.

11. A ceramic electrode comprising: A ceramic shell with a longitudinal through hole, the ceramic shell comprising a clamping part and a discharging part, characterized in that: a discharging conductor is arranged in a limiting cavity in the through hole, a wall of the discharging part opposite to a discharging surface of the discharging conductor is a discharging blocking wall, the clamping part is provided with a receiving cavity, the cross section of the receiving cavity is circular-arc-shaped and symmetrical along a radial central axis, the clamping part comprises a reinforced thickness region and a conventional thickness region; a circular-arc apex is located on the radial central axis, the thickness region corresponding to the points on the set arc segment continuously located on the left side of the circular-arc apex and the thickness region corresponding to the points on the set arc segment continuously located on the left side of the circular-arc apex constitute the conventional thickness region, the thickness of the conventional thickness region is equal to or less than the thickness of the discharging blocking wall, and the thickness of the reinforced thickness region is greater than the thickness of the discharging blocking wall.

12. The ceramic electrode according to any one of claims 1-7, 11, wherein: the width of the discharge surface of the discharge conductor is greater than or equal to 0.5 cm and less than 1.0 cm.

13. The ceramic electrode according to any one of claims 1-7, 11, wherein: the width of the discharge surface of the discharge conductor is greater than or equal to 1.0 cm and less than or equal to 4 cm.

14. The ceramic electrode according to any one of claims 1-7, 11, further comprising a venting member having at least one venting tube formed thereon, the venting member being used together with the sealing material to seal the end of the through hole of the ceramic electrode, the venting tube being used to connect the external working space of the ceramic electrode with the internal space of the through hole of the ceramic electrode.

15. The ceramic electrode according to any one of claims 1-7, 11, further comprising a venting member having at least one venting hole formed thereon, the venting member being used together with the sealing material to seal the end of the through hole of the ceramic electrode, the venting hole being used to connect the external working space of the ceramic electrode with the internal space of the through hole of the ceramic electrode. a ceramic shell having a through hole formed in the longitudinal direction, the ceramic shell comprising a clamping portion and a discharge portion, wherein: the discharge conductor is arranged in a limiting cavity in the through hole, the wall of the discharge portion facing the discharge surface of the discharge conductor is a discharge blocking wall, the discharge surface of the discharge conductor faces the inner wall of the discharge blocking wall, and the width of the discharge surface of the discharge conductor is greater than or equal to 1.0 cm and less than or equal to 4 cm.

16. A ceramic electrode comprising: a ceramic shell having a through hole formed in the longitudinal direction, the ceramic shell comprising a clamping portion and a discharge portion, wherein: the discharge conductor is arranged in a limiting cavity in the through hole, the wall of the discharge portion facing the discharge surface of the discharge conductor is a discharge blocking wall, the discharge surface of the discharge conductor faces the inner wall of the discharge blocking wall, and 17. A ceramic electrode comprising: the venting member having at least one venting hole formed thereon is used together with the sealing material to seal the end of the through hole of the ceramic electrode, the venting hole being used to connect the external working space of the ceramic electrode with the internal space of the through hole of the ceramic electrode. a ceramic shell having a through hole formed in the longitudinal direction, the ceramic shell comprising a clamping portion and a discharge portion, wherein: the discharge conductor is arranged in a limiting cavity in the through hole, the wall of the discharge portion facing the discharge surface of the discharge conductor is a discharge blocking wall, the discharge surface of the discharge conductor faces the inner wall of the discharge blocking wall, and 18. A ceramic electrode comprising: the venting member having at least one venting hole formed thereon is used together with the sealing material to seal the end of the through hole of the ceramic electrode, the venting hole being used to connect the external working space of the ceramic electrode with the internal space of the through hole of the ceramic electrode. a ceramic electrode according to any one of claims 1-18. a ceramic electrode according to any one of claims 1-18.

19. A plasma surface treatment machine characterized by comprising:

21. The plasma surface treatment machine according to claim 20, wherein, 20. A plasma surface treatment machine characterized by, ​ ​ The plasma surface treatment machine further comprises a machine body and a guide roller installed inside the machine body. Any two of the ceramic electrodes form a processing unit, the processing unit comprising a first ceramic electrode and a second ceramic electrode, and the discharge surface of the first ceramic electrode is opposite to or offset from the discharge surface of the second ceramic electrode. The guide roller is made of conductive material, the discharge surface of the first ceramic electrode and the discharge surface of the second ceramic electrode have a foil suspension gap therebetween, the foil suspension gap is greater than the thickness of the foil to be treated, and the foil to be treated can pass through the foil suspension gap without contacting the first ceramic electrode and the second ceramic electrode.

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