Device for automatically adjusting gas treatment amount of adsorption tower on line

Abstract

The utility model discloses a device for automatically adjusting the gas treatment amount of an adsorption tower on line, relates to the technical field of polycrystalline silicon production, and mainly aims to monitor the content of Cl <-> in hydrogen treated by the adsorption tower on line and realize automatic adjustment of an outlet adjusting valve of the hydrogen adsorption tower. According to the main technical scheme, the device for automatically adjusting the gas treatment amount of the adsorption tower on line comprises a reaction chamber, a gas inlet pipe and an ion chromatograph, the upper end of one side of the reaction chamber is connected to a discharge pipe, a filler layer is arranged in the reaction chamber, and the liquid level in the reaction chamber is located above the filler layer; one end of the gas inlet pipe is connected to the adsorption tower outlet pipe, the other end of the gas inlet pipe penetrates through the top wall of the other side of the reaction chamber and is connected to the bubbling pipe, the bubbling pipe is located below the filler layer, and a plurality of through holes are uniformly distributed in the pipe wall of the bubbling pipe; the detection end of the ion chromatograph extends into the liquid above the filler layer, and the ion chromatograph and the adsorption tower outlet regulating valve are in interlocking control.

Description

Technical Field

[0001] This utility model relates to the field of polycrystalline silicon production technology, and in particular to an online automatic adjustment device for the gas volume of an adsorption tower. Background Technology

[0002] In the improved Siemens process for polysilicon production, the reaction tail gas after the gas-phase sedimentation reaction at high temperature contains components such as hydrogen, hydrogen chloride, dichlorosilane, trichlorosilane, and silicon tetrachloride. After the tail gas is cooled in stages, most of the liquid-phase chlorosilanes are liquefied and recovered. The hydrogen gas, carrying a small amount of chlorosilanes and hydrogen chloride, enters the adsorption tower after being cooled and shuffled in stages. The packing material in the adsorption tower is activated carbon, which, utilizing its loose and porous physical properties, can adsorb other impurities in the hydrogen gas. The hydrogen gas after adsorption is sent to the reduction workshop for subsequent production. A hydrogen flow meter is installed after the hydrogen adsorption tower. The flow rate of hydrogen gas at the outlet of the adsorption tower can be adjusted by adjusting the outlet manual valve according to the reading of the hydrogen flow meter, ensuring that the flow rate of the adsorption tower does not exceed the design value.

[0003] However, the existing technology has the following drawbacks:

[0004] (1) It is impossible to directly determine whether the adsorption tower is saturated, and there is insufficient basis for adjustment;

[0005] (2) The amount of hydrogen gas is adjusted on-site by manual valve, which has a large error and lag. Utility Model Content

[0006] In view of this, the present invention provides an online automatic adjustment device for the gas flow rate of an adsorption tower, the main purpose of which is to monitor the Cl content in the hydrogen gas after treatment by the adsorption tower online. - The content is controlled to achieve automatic adjustment of the outlet regulating valve of the hydrogen adsorption tower.

[0007] To achieve the above objectives, this utility model mainly provides the following technical solutions:

[0008] This utility model provides an online automatic adjustment device for the gas volume of an adsorption tower, which includes: a reaction chamber, an inlet pipe, and an ion chromatograph;

[0009] The upper end of one side of the reaction chamber is connected to the discharge pipe. A packing layer is provided in the reaction chamber, and the liquid level in the reaction chamber is above the packing layer.

[0010] One end of the air inlet pipe is connected to the outlet pipe of the adsorption tower, and the other end passes through the top wall of the other side of the reaction chamber and is connected to the bubbling pipe. The bubbling pipe is located below the packing layer, and the pipe wall of the bubbling pipe is evenly distributed with multiple through holes.

[0011] The detection end of the ion chromatograph extends into the liquid above the packing layer, and the ion chromatograph and the outlet regulating valve of the adsorption tower are interlocked.

[0012] The purpose of this utility model and the technical problems to be solved can be further achieved by the following technical measures.

[0013] Optionally, the system further includes a plurality of first baffles and a plurality of second baffles, the first baffles and the second baffles being arranged alternately above the packing layer, the upper end of the first baffle being connected to the top wall of the reaction chamber, the upper end of the second baffle being spaced apart from the top wall of the reaction chamber, the lower end of the first baffle being higher than the lower end of the second baffle, and the liquid level in the reaction chamber being located between the lower ends of the first baffle and the lower ends of the second baffle.

[0014] Optionally, it also includes a pure water tank and a water pump, with the inlet of the water pump connected to the pure water tank and the outlet of the water pump connected to the upper side of the reaction chamber.

[0015] Optionally, a level gauge is also included, which is installed on the side wall of the reaction chamber.

[0016] Optionally, it also includes a wastewater tank and a drain pipe, with the lower end of the reaction chamber connected to one end of the drain pipe and the other end of the drain pipe connected to the wastewater tank.

[0017] Optionally, the bubbling tube is a straight tube, and the other end of the air inlet tube is connected to the middle wall of the bubbling tube.

[0018] Optionally, the bubbling tube is an annular tube, and the other end of the air intake tube is connected to the annular inner wall of the bubbling tube through multiple branch tubes.

[0019] Optionally, the end of the discharge pipe is provided with a rain cap.

[0020] Optionally, the filler layer is composed of multifaceted hollow spheres stacked together.

[0021] By employing the above technical solution, this utility model has at least the following advantages:

[0022] During the hydrogen adsorption process in the adsorption tower, the gas discharged from the tower outlet reaches the bubble tube through the inlet pipe, and then enters the water in the reaction chamber through multiple through-holes in the bubble tube wall. Because of the evenly distributed through-holes in the bubble tube wall, the bubbles are uniformly distributed in the water. Simultaneously, due to the blocking effect of the packing layer, the bubbles collide with the packing material, further breaking them up and prolonging their residence time in the water. This results in a higher concentration of Cl in the water above the packing layer. - Maintain uniform concentration;

[0023] After the hydrogen gas was introduced into the reaction chamber for 5 minutes, the ion chromatograph was started, and the Cl- in the water was detected at its detection end. - The concentration and pH value are recorded, and the electrical signal is transmitted to the central control processor. The central control processor calculates the current content of HCl and chlorosilane in the hydrogen gas. If the content is higher than the set value, the opening of the adsorption tower outlet regulating valve is automatically reduced.

[0024] Through the above process, it is possible to determine online whether the adsorption tower is saturated, thereby achieving automatic adjustment of the outlet regulating valve of the adsorption tower. Attached Figure Description

[0025] Figure 1 A schematic diagram of an online automatic adjustment device for adjusting the gas volume of an adsorption tower provided in this embodiment of the present invention;

[0026] Figure 2 for Figure 1 Enlarged view of section A.

[0027] The reference numerals in the accompanying drawings of the instruction manual include: reaction chamber 1, inlet pipe 2, ion chromatograph 3, outlet pipe 4, packing layer 5, adsorption tower 6, bubbling tube 7, through hole 8, first baffle plate 9, second baffle plate 10, pure water tank 11, water pump 12, level gauge 13, wastewater tank 14, drain pipe 15, rain cap 16. Detailed Implementation

[0028] To further illustrate the technical means and effects adopted by this utility model to achieve its intended purpose, the specific implementation methods, structures, features, and effects according to this utility model application are described in detail below with reference to the accompanying drawings and preferred embodiments. In the following description, different "embodiments" or "embodiments" do not necessarily refer to the same embodiment. Furthermore, specific features, structures, or characteristics in one or more embodiments can be combined in any suitable form.

[0029] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments.

[0030] like Figure 1 and Figure 2 As shown, an embodiment of this utility model provides an online automatic adjustment device for the gas volume of an adsorption tower, which includes: a reaction chamber 1, an inlet pipe 2, and an ion chromatograph 3;

[0031] The upper end of one side of the reaction chamber 1 is connected to the discharge pipe 4. A packing layer 5 is provided inside the reaction chamber 1, and the liquid level inside the reaction chamber 1 is above the packing layer 5.

[0032] One end of the air inlet pipe 2 is connected to the outlet pipe of the adsorption tower 6, and the other end passes through the top wall of the other side of the reaction chamber 1 and is connected to the bubbling pipe 7. The bubbling pipe 7 is located below the packing layer 5, and the pipe wall of the bubbling pipe 7 is evenly distributed with multiple through holes 8.

[0033] The detection end of the ion chromatograph 3 extends into the liquid above the packing layer 5, and the outlet regulating valve of the ion chromatograph 3 and the adsorption tower 6 are interlocked.

[0034] The working process of an online automatic adjustment adsorption tower 6 gas volume processing device is as follows:

[0035] During the adsorption of hydrogen in adsorption tower 6, the gas discharged from the outlet of adsorption tower 6 reaches bubble tube 7 through inlet pipe 2, and enters the water in reaction chamber 1 through multiple through holes 8 on the wall of bubble tube 7. Because multiple through holes 8 are evenly distributed on the wall of bubble tube 7, the bubbles are evenly distributed in the water. At the same time, due to the blocking effect of packing layer 5, the bubbles collide with the packing and are further broken up, and the residence time of the gas in the water is extended. This makes the Cl- concentration in the water above packing layer 5 uniform, and the Cl- concentration above packing layer 5 detected by ion chromatograph 3 is more representative.

[0036] After the hydrogen gas is introduced into the reaction chamber 1 for 5 minutes, the ion chromatograph 3 is started. Its detection end detects the concentration of Cl- and the pH value in the water and transmits the electrical signal to the central control processor. The central control processor calculates the content of HCl and chlorosilane carried in the hydrogen gas through calculation logic. If the content is higher than the set value, the opening of the regulating valve at the outlet of the adsorption tower 6 is automatically reduced.

[0037] In the technical solution of this utility model, the automatic adjustment of the outlet regulating valve of adsorption tower 6 is achieved through the above process.

[0038] Specifically, the end of the discharge pipe 4 located inside the reaction chamber 1 is bent downwards and extended to a certain length, but it is located above the liquid surface. In this way, the gas rising to the top of the gas phase space of the reaction chamber 1 will not be discharged immediately, further prolonging the residence time of the gas in the reaction chamber 1, and indirectly prolonging the residence time of Cl- in the water.

[0039] Specifically, the ion chromatograph 3 uses the 850 series ion chromatograph, which is mainly used for the quantitative analysis of anions, cations and other polar substances in liquid samples.

[0040] The following is a summary of its detection range and related information:

[0041] Detection range of the 850 series ion chromatograph

[0042] Types of ions detected:

[0043] Common anions: F -Cl - ,Br - NO2 - NO3 - SO4 2- PO4 3- wait.

[0044] Common cations: Li + Na + K + NH4 + Mg 2+ Ca 2+ wait.

[0045] Other polar substances: organic acids, sugars, amino acids, etc.

[0046] Concentration range:

[0047] Typical range: ppb (μg / L) to ppm (mg / L) level.

[0048] Limit of detection (LOD): Usually in the ppb level (depending on the ion species and detection conditions).

[0049] Linear range:

[0050] Typical range: spanning 3 to 4 orders of magnitude (e.g., 1 ppb to 1000 ppb).

[0051] In a specific embodiment, it also includes a plurality of first baffles 9 and a plurality of second baffles 10. The first baffles 9 and the second baffles 10 are arranged alternately above the packing layer 5. The upper end of the first baffle 9 is connected to the top wall of the reaction chamber 1. There is a gap between the upper end of the second baffle 10 and the top wall of the reaction chamber 1. The lower end of the first baffle 9 is higher than the lower end of the second baffle 10. The liquid level in the reaction chamber 1 is located between the lower ends of the first baffle 9 and the lower ends of the second baffle 10.

[0052] In this embodiment, the gas to be detected enters the water in the reaction chamber 1 through the bubble tube 7, and after passing through the packing layer 5, it evaporates to the upper space of the reaction chamber 1. Because multiple first baffles 9 and multiple second baffles 10 form a baffle channel, the gas in the upper space flows along the baffle channel to the discharge pipe 4, which prolongs the residence time of the gas in the upper space, slows down the gas discharge speed, and indirectly increases the gas phase concentration in the upper space of the reaction chamber 1. Due to the gas-liquid balance, the solubility of the gas in water will also increase accordingly. This allows the gas concentration to reach the detection limit of the ion chromatograph 3 more quickly, so that the ion chromatograph 3 can detect whether the Cl- content has reached the set value more quickly within a unit time.

[0053] In a specific embodiment, it also includes a pure water tank 11 and a water pump 12, the inlet of which is connected to the pure water tank 11 and the outlet of which is connected to the upper side of the reaction chamber 1.

[0054] In this embodiment, specifically, after a single ion chromatography detection is completed, the water pump 12 delivers water from the pure water tank 11 to the reaction chamber 1 to replace the wastewater in the reaction chamber 1.

[0055] In a specific embodiment, a level gauge 13 is also included, which is installed on the side wall of the reaction chamber 1.

[0056] In this embodiment, the level gauge 13 is electrically connected to the central control processor to facilitate real-time monitoring of the liquid level in the reaction chamber 1.

[0057] In a specific embodiment, it also includes a wastewater tank 14 and a drain pipe 15. The lower end of the reaction chamber 1 is connected to one end of the drain pipe 15, and the other end of the drain pipe 15 is connected to the wastewater tank 14.

[0058] In this embodiment, specifically, the drain pipe 15 is equipped with a drain valve. When the ion chromatograph 3 completes a single detection, the drain valve is opened, and the wastewater in the reaction chamber 1 is first drained into the wastewater tank 14. Then, the water pump 12 is started to deliver pure water to the reaction chamber 1. When the Cl- concentration is lower than the detection limit of the ion chromatograph 3, the cleaning of the reaction chamber 1 is stopped, and the water level in the reaction chamber 1 is kept between the lower end of the first baffle 9 and the lower end of the second baffle 10.

[0059] In a specific embodiment, the bubbling tube 7 is a straight tube, and the other end of the air inlet pipe 2 is connected to the middle wall of the bubbling tube 7.

[0060] In this embodiment, specifically, the bubbling tube 7 extends along the length of the reaction chamber 1. When the gas to be detected enters the bubbling tube 7, it diffuses from the middle to both ends and diffuses through multiple through holes 8 in the tube wall of the bubbling tube 7. The gas diffuses relatively evenly along the length of the reaction chamber 1.

[0061] In a specific embodiment, the bubbling tube 7 is an annular tube, and the other end of the air intake tube 2 is connected to the annular inner wall of the bubbling tube 7 through multiple branch tubes.

[0062] In this embodiment, specifically, the other end of the air inlet pipe 2 extends to the annular center of the bubbling pipe 7 and is connected to the annular inner edge sidewall of the bubbling pipe 7 through multiple branch pipes, so that the gas to be detected simultaneously reaches multiple through holes 8 and is sprayed into the water in the reaction chamber 1.

[0063] In a specific embodiment, the end of the discharge pipe 4 is provided with a rain cap 16.

[0064] In this embodiment, specifically, a rainproof cap 16 is provided, the discharge pipe 4 discharges the gas after detection normally, and external rainwater is prevented from flowing back into the reaction chamber 1.

[0065] In a specific embodiment, the filler layer 5 is composed of multifaceted hollow spheres stacked together.

[0066] In this embodiment, specifically, the multifaceted hollow spherical packing material is made of polypropylene plastic into a spherical shape. There is a reinforcing ring along the entire circumference in the middle of the sphere, and there are twelve spherical petals on the top and bottom of the ring, which are arranged radially along the central axis, so that the gas to be detected can diffuse better in the water.

[0067] Specifically, limiting grids are provided above and below the location of the packing layer 5. The edges of the limiting grids are fixedly connected to the inner wall of the reaction chamber 1. Multifaceted hollow spheres are stacked between the upper and lower limiting grids, which does not affect the rise of gas in the water in the reaction chamber 1, but prevents the movement of the multifaceted hollow spheres.

[0068] The above description is merely a specific embodiment of this utility model, but the protection scope of this utility model is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in this utility model should be included within the protection scope of this utility model. Therefore, the protection scope of this utility model should be determined by the protection scope of the claims.

Claims

1. An online automatic adjustment device for the gas processing capacity of an adsorption tower, characterized in that, include: A reaction chamber, one upper end of which is connected to a discharge pipe, is provided with a packing layer, and the liquid level in the reaction chamber is located above the packing layer; An air inlet pipe is provided, with one end connected to the outlet pipe of the adsorption tower and the other end penetrating through the top wall of the other side of the reaction chamber and connected to a bubbling pipe. The bubbling pipe is located below the packing layer and has multiple through holes evenly distributed on its wall. An ion chromatograph, wherein the detection end of the ion chromatograph extends into the liquid above the packing layer, and the ion chromatograph and the outlet regulating valve of the adsorption tower are interlocked.

2. The online automatic adjustment device for the gas processing capacity of the adsorption tower according to claim 1, characterized in that, It also includes multiple first baffles and multiple second baffles, which are arranged alternately above the packing layer. The upper end of the first baffle is connected to the top wall of the reaction chamber, and there is a gap between the upper end of the second baffle and the top wall of the reaction chamber. The lower end of the first baffle is higher than the lower end of the second baffle, and the liquid level in the reaction chamber is located between the lower ends of the first baffle and the lower ends of the second baffle.

3. The online automatic adjustment device for the gas processing capacity of the adsorption tower according to claim 1, characterized in that, It also includes a pure water tank and a water pump, with the inlet of the water pump connected to the pure water tank and the outlet of the water pump connected to the upper side of the reaction chamber.

4. The online automatic adjustment device for the gas processing capacity of the adsorption tower according to claim 3, characterized in that, It also includes a level gauge, which is installed on the side wall of the reaction chamber.

5. The online automatic adjustment device for the gas processing capacity of the adsorption tower according to claim 3, characterized in that, It also includes a wastewater tank and a drain pipe, with the lower end of the reaction chamber connected to one end of the drain pipe and the other end of the drain pipe connected to the wastewater tank.

6. The online automatic adjustment device for the gas processing capacity of the adsorption tower according to claim 1, characterized in that, The bubbling tube is a straight tube, and the other end of the air inlet tube is connected to the middle section of the bubbling tube wall.

7. The online automatic adjustment device for the gas processing capacity of the adsorption tower according to claim 1, characterized in that, The bubbling tube is an annular tube, and the other end of the air intake tube is connected to the annular inner wall of the bubbling tube through multiple branch tubes.

8. The online automatic adjustment device for the gas processing capacity of the adsorption tower according to claim 1, characterized in that, The end of the discharge pipe is equipped with a rain cap.

9. The online automatic adjustment device for the gas processing capacity of the adsorption tower according to claim 1, characterized in that, The filler layer is composed of multifaceted hollow spheres stacked together.

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