Molecular pump identification circuit and molecular pump

Abstract

The utility model relates to the technical field of molecular pumps, and discloses a molecular pump identification circuit and a molecular pump, the molecular pump identification circuit is connected with a control module, the molecular pump identification circuit comprises a pulse output device and an energy storage device, the pulse output device is respectively connected with a preset reference voltage, the control module and the energy storage device; the pulse output device is used for sending the electric energy of the preset reference voltage to the energy storage device for storage and discharging the electric energy of the energy storage device; the energy storage device is used for charging and discharging and sending an energy storage voltage signal to the pulse output device; and the pulse output device is further used for receiving the energy storage voltage signal, comparing the energy storage voltage signal with a preset voltage signal, and outputting pulse signals with different frequencies according to a comparison result, so that the control module identifies the model of the molecular pump according to the frequencies. The problem that limited recognition types exist when a divider resistor is used for recognizing the magnetic suspension molecular pump is solved.

Description

Technical Field

[0001] This utility model relates to the field of molecular pump technology, specifically to a molecular pump identification circuit and a molecular pump. Background Technology

[0002] The current resistance voltage divider model identification technology used in magnetic levitation molecular pump control boards, while offering advantages such as ease of operation, low cost, and high reliability, has limitations that are becoming increasingly apparent in the face of increasingly complex market demands. This technology differentiates pump models by measuring the voltage drop across a 3.3V resistor with a specific pre-set resistance value. However, in pursuit of high precision (such as the initially envisioned 0.1V resolution), the number of identifiable models is severely limited to only 33. More importantly, when considering factors such as minute errors in resistor manufacturing, slight fluctuations in power supply voltage, and the precision limitations of measuring equipment, the resolution must be relaxed to 0.15V to ensure accurate identification. This adjustment directly reduces the number of accurately identifiable models to a significant decrease to 21. Clearly, this number is far from sufficient to meet the diverse and sophisticated model requirements that the magnetic levitation molecular pump market may see in the future.

[0003] With technological advancements and evolving market demands, magnetic levitation molecular pumps are becoming increasingly diversified. They not only encompass products with varying specifications (such as diameter, pumping speed, rotational speed, and vacuum level) but also require functional customization to meet the specific needs of different industries and manufacturers. Against this backdrop, current model identification schemes based on resistive voltage division are clearly inadequate, failing to meet the dual high standards of breadth and accuracy required in practical applications. To address this challenge, we urgently need to explore and develop more efficient, flexible, and accurate model identification technologies to ensure that magnetic levitation molecular pumps can adapt to the rapid development and diverse needs of the future market. Utility Model Content

[0004] In view of this, the present invention provides a molecular pump identification circuit and a molecular pump to solve the problem of limited identification types in the prior art by identifying magnetic levitation molecular pumps through voltage divider resistors.

[0005] In a first aspect, the present invention provides a molecular pump identification circuit, which is connected to a control module. The molecular pump identification circuit includes a pulse output device and an energy storage device, wherein the pulse output device is connected to a preset reference voltage, the control module, and the energy storage device respectively.

[0006] The pulse output device is used to send the electrical energy of the preset reference voltage to the energy storage device for storage, and to release the electrical energy of the energy storage device.

[0007] The energy storage device is used for charging and discharging, and sends the energy storage voltage signal to the pulse output device;

[0008] The pulse output device is also used to receive the energy storage voltage signal, compare the energy storage voltage signal with a preset voltage signal, and output pulse signals of different frequencies according to the comparison result, so that the control module can identify the model of the molecular pump according to the frequency.

[0009] The molecular pump identification circuit provided by this invention includes a pulse output device for controlling the charging and discharging of an energy storage device. During the charging and discharging operations, the pulse output device acquires the energy storage voltage signal and compares it with a preset voltage signal. Based on the comparison result, it switches between high and low level output frequencies to output pulse signals of different frequencies. The pulse output device and the energy storage device can form a multivibrator, thereby generating self-excited oscillation during the charging and discharging process of the energy storage device, outputting periodic rectangular pulse signals. The control module identifies the molecular pump model based on the frequency of the pulse signal.

[0010] In one optional embodiment, the preset voltage signal includes: a first preset voltage signal and a second preset voltage signal, and the pulse output device includes:

[0011] A pulse output module is connected to the control module. The pulse output module is used to output a charging signal and a high-level pulse signal to the control module when the energy storage voltage signal is detected to be lower than the first preset voltage signal, and to output a discharging signal and a low-level pulse signal to the control module when the energy storage voltage signal is detected to be higher than the second preset voltage signal.

[0012] A charge / discharge control module is connected to the pulse output module, the preset reference voltage, and the energy storage device. The charge / discharge control module is used to receive the charging signal and charge the energy storage device based on the preset reference voltage, and to receive the discharging signal and release the energy of the energy storage device.

[0013] In one alternative embodiment, the pulse output module includes:

[0014] A first comparison unit, connected to the energy storage device, is used to receive the energy storage voltage signal, compare the energy storage voltage signal with a first preset voltage signal, and output a first comparison result;

[0015] The second comparison unit is connected to the energy storage device and is used to receive the energy storage voltage signal, compare the energy storage voltage signal with a second preset voltage signal, and output a second comparison result.

[0016] The RS flip-flop is connected to the first comparison unit, the second comparison unit, and the control module respectively. It is used to receive the first comparison result and the second comparison result, and switch between outputting a high-level pulse signal and a low-level pulse signal according to the first comparison result and the second comparison result. When the energy storage voltage signal is lower than the first preset voltage signal, it outputs a high-level pulse signal, and when the energy storage voltage signal is higher than the second preset voltage signal, it outputs a low-level pulse signal.

[0017] The discharge unit is connected to the energy storage device and the RS trigger respectively, and is used to output discharge signals and charging signals to the charge and discharge control module.

[0018] In one optional implementation, the charge / discharge control module includes:

[0019] A first resistor, the first end of which is connected to a preset reference voltage, and the second end of which is connected to the pulse output module;

[0020] The second resistor has its first end connected to the second end of the first resistor, and its second end connected to the pulse output module.

[0021] In one alternative embodiment, the energy storage device is a first capacitor, wherein the first capacitor is a surface-mount capacitor.

[0022] In one optional embodiment, the energy storage device further includes:

[0023] A temperature compensation module is connected to the first capacitor and is used to stabilize the frequency of the pulse output by the pulse output device.

[0024] In one optional implementation, the temperature compensation module includes:

[0025] A thermistor is connected in parallel with the first capacitor.

[0026] In one optional embodiment, the pulse output device further includes:

[0027] The second capacitor has its first terminal connected to the preset reference voltage and its second terminal grounded.

[0028] The third resistor has its first end connected to the preset reference voltage and its second end connected to the pulse output module.

[0029] Secondly, this utility model provides a molecular pump, which includes the molecular pump identification circuit as described above. The molecular pump includes a pump body and a control board. The pulse output device is disposed on the control board, and the energy storage device is disposed on the pump body. The energy storage device and the pulse output device are connected by wires.

[0030] In one alternative embodiment, a shield is placed over the pulse output device, and the conductor is a shielded wire. Attached Figure Description

[0031] To more clearly illustrate the specific embodiments of this utility model or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0032] Figure 1 This is a structural diagram of a molecule pump identification circuit according to an embodiment of the present invention;

[0033] Figure 2 This is a structural diagram of the pulse output device in a molecule pump identification circuit according to an embodiment of the present invention;

[0034] Figure 3 This is a structural diagram of another molecular pump recognition circuit according to an embodiment of the present invention;

[0035] Figure 4 This is a structural diagram of another molecular pump recognition circuit according to an embodiment of the present utility model;

[0036] Figure 5 This is a structural diagram of a molecular pump recognition circuit according to an embodiment of the present invention.

[0037] Explanation of icon numbers: Detailed Implementation

[0038] The technical solution of this utility model will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0039] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0040] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can also refer to the internal connection of two components; and they can refer to a wireless connection or a wired connection. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0041] Furthermore, the technical features involved in the different embodiments of this utility model described below can be combined with each other as long as they do not conflict with each other.

[0042] The current resistance voltage divider model identification technology used in magnetic levitation molecular pump control boards, while offering advantages such as ease of operation, low cost, and high reliability, has limitations that are becoming increasingly apparent in the face of increasingly complex market demands. This technology differentiates pump models by measuring the voltage drop across a 3.3V resistor with a specific pre-set resistance value. However, in pursuit of high precision (such as the initially envisioned 0.1V resolution), the number of identifiable models is severely limited to only 33. More importantly, when considering factors such as minute errors in resistor manufacturing, slight fluctuations in power supply voltage, and the precision limitations of measuring equipment, the resolution must be relaxed to 0.15V to ensure accurate identification. This adjustment directly reduces the number of accurately identifiable models to a significant decrease to 21. Clearly, this number is far from sufficient to meet the diverse and sophisticated model requirements that the magnetic levitation molecular pump market may see in the future.

[0043] With technological advancements and evolving market demands, magnetic levitation molecular pumps are becoming increasingly diversified. They not only encompass products with varying specifications (such as diameter, pumping speed, rotational speed, and vacuum level) but also require functional customization to meet the specific needs of different industries and manufacturers. Against this backdrop, current model identification schemes based on resistive voltage division are clearly inadequate, failing to meet the dual high standards of breadth and accuracy required in practical applications. To address this challenge, we urgently need to explore and develop more efficient, flexible, and accurate model identification technologies to ensure that magnetic levitation molecular pumps can adapt to the rapid development and diverse needs of the future market.

[0044] In this embodiment, a molecular pump recognition circuit is provided, such as... Figure 1 As shown, the molecular pump recognition circuit includes:

[0045] The molecular pump identification circuit is connected to the control module. The molecular pump identification circuit includes a pulse output device 10 and an energy storage device 20. The pulse output device 10 is connected to the preset reference voltage VDD, the control module, and the energy storage device 20, respectively.

[0046] The pulse output device 10 is used to send the electrical energy of the preset reference voltage VDD to the energy storage device 20 for storage, and to release the electrical energy of the energy storage device 20.

[0047] The energy storage device 20 is used for charging and discharging, and sends the energy storage voltage signal to the pulse output device 10;

[0048] The pulse output device 10 is also used to receive the energy storage voltage signal, compare the energy storage voltage signal with a preset voltage signal, and output pulse signals of different frequencies according to the comparison result, so that the control module can identify the model of the molecular pump according to the frequency.

[0049] Specifically, the control module can be a molecular pump motherboard. The pulse output device 10 controls the charging and discharging of the energy storage device 20. During the charging and discharging operations, the pulse output device 10 acquires the energy storage voltage signal of the energy storage device 20 and compares it with a preset voltage signal. Based on the comparison result, it switches the frequency of the high and low level outputs to output pulse signals of different frequencies. The pulse output device 10 and the energy storage device 20 can form a multivibrator, thereby generating self-excited oscillation during the charging and discharging process of the energy storage device 20, outputting periodic rectangular pulse signals. The control module identifies the molecular pump model based on the frequency of the pulse signal.

[0050] Optionally, the pulse output device 10 can be a self-excited oscillator that does not require an external input signal, or it can be powered by an external input signal.

[0051] In some alternative implementations, such as Figure 2 As shown, the pulse output device 10 includes:

[0052] A pulse output module 11 is connected to a control module. The pulse output module is used to output a charging signal and a high-level pulse signal to the control module when the energy storage voltage signal is detected to be lower than the first preset voltage signal, and to output a discharging signal and a low-level pulse signal to the control module when the energy storage voltage signal is detected to be higher than the second preset voltage signal.

[0053] The charging and discharging control module 12 is connected to the pulse output module 11, the preset reference voltage VDD and the energy storage device 20 respectively. The charging and discharging control module 12 is used to receive the charging signal and charge the energy storage device 20 based on the preset reference voltage VDD, and to receive the discharging signal and release the electrical energy of the energy storage device.

[0054] Specifically, if the pulse output module 11 detects that the energy storage voltage signal is lower than the first preset voltage signal, it outputs a high-level pulse signal to the control module and simultaneously outputs a charging signal to the charge / discharge control module 12. The charge / discharge control module 12 charges the energy storage device 20 based on a preset reference voltage VDD. During the charging process, if the pulse output module 11 detects that the energy storage voltage signal is higher than the second preset voltage signal, it outputs a low-level pulse signal to the control module and simultaneously outputs a discharge signal to the charge / discharge control module 12. After receiving the discharge signal, the charge / discharge control module 12 discharges the energy from the energy storage device 20. This cycle of charging and discharging continues, with high-level and low-level pulse signals being output.

[0055] In some alternative implementations, such as Figure 4 As shown, the pulse output module 11 includes:

[0056] The first comparison unit A1 is connected to the energy storage device 20, and is used to receive the energy storage voltage signal, compare the energy storage voltage signal with a first preset voltage signal, and output a first comparison result;

[0057] The second comparison unit A2 is connected to the energy storage device 20, and is used to receive the energy storage voltage signal, compare the energy storage voltage signal with the second preset voltage signal, and output the second comparison result;

[0058] RS flip-flop U1 is connected to the first comparison unit A1, the second comparison unit A2 and the control module respectively. It is used to receive the first comparison result and the second comparison result, and switch between outputting a high-level pulse signal and a low-level pulse signal according to the first comparison result and the second comparison result. When the energy storage voltage signal is lower than the first preset voltage signal, it outputs a high-level pulse signal, and when the energy storage voltage signal is higher than the second preset voltage signal, it outputs a low-level pulse signal.

[0059] The discharge unit Q1 is connected to the energy storage device 20 and the RS trigger, respectively, and is used to output discharge signals and charging signals to the charge and discharge control module.

[0060] Specifically, both the first comparison unit A1 and the second comparison unit A2 can be comparators. The first input terminal of the first comparison unit A1 is connected to the energy storage device 20 and the charge / discharge control module 12, respectively, and the second input terminal of the first comparison unit A1 is connected to the first preset voltage signal. The first input terminal of the second comparison unit A2 is connected to the energy storage device 20 and the charge / discharge control module 12, respectively, and the second input terminal of the second comparison unit A2 is connected to the second preset voltage signal.

[0061] refer to Figure 3 The first terminal of the fourth resistor R4 is connected to a preset reference voltage VDD. The second terminal of the fourth resistor R4 is connected to the second input terminal of the first comparator A1 and the first terminal of the fifth resistor R5. The second terminal of the fifth resistor R5 is connected to the second input terminal of the second comparator A2 and the first terminal of the sixth resistor R6. The second terminal of the sixth resistor R6 is grounded. Thus, a first preset voltage signal is provided to the second input terminal of the first comparator A1, and a second preset voltage signal is provided to the second input terminal of the second comparator A2.

[0062] Specifically, when the first comparison unit A1 detects that the energy storage voltage signal is lower than the first preset voltage signal, the first comparison unit A1 outputs a high level to the RS flip-flop U1. At this time, the second comparison unit A2 detects that the energy storage voltage signal is not higher than the second preset voltage signal, and the second comparison unit A2 outputs a low level to the RS flip-flop U1. At this time, the RS flip-flop U1 outputs a high-level pulse signal to the control module.

[0063] Specifically, when the second comparison unit A2 detects that the energy storage voltage signal is higher than the second preset voltage signal, the second comparison unit A2 outputs a high level to the RS flip-flop U1. At this time, when the first comparison unit A1 detects that the energy storage voltage signal is not lower than the first preset voltage signal, the first comparison unit A1 outputs a low level to the RS flip-flop U1. The RS flip-flop U1 then outputs a low-level pulse signal to the control module. In other words, the RS flip-flop U1 alternately outputs high-level pulse signals and low-level pulse signals.

[0064] In addition, the pulse output module 11 also includes an inverter NOT, which converts the high-level pulse signal output by the RS flip-flop U1 into a low-level pulse signal and outputs it to the control module, and converts the low-level pulse signal output by the RS flip-flop U1 into a high-level pulse signal and outputs it to the control module.

[0065] Specifically, the discharge unit Q1 can be a discharge tube, such as a transistor. When the RS flip-flop U1 outputs a high-level pulse signal, the discharge unit Q1 is turned off, thereby outputting a charging signal to the charge-discharge control module 12; when the RS flip-flop U1 outputs a low-level pulse signal, the discharge unit Q1 is turned on, thereby outputting a discharge signal to the charge-discharge control module 12.

[0066] In some alternative implementations, such as Figure 3 As shown, the charge / discharge control module 12 includes:

[0067] A first resistor R1, the first end of the first resistor R1 is connected to a preset reference voltage VDD, and the second end of the first resistor R1 is connected to the pulse output module 11;

[0068] The second resistor R2 has its first end connected to the second end of the first resistor R1, and its second end connected to the pulse output module 11.

[0069] Specifically, refer to Figure 3 When the discharge unit Q1 is turned off, a charging signal is output to the charge / discharge control module 12. At this time, the voltage of the preset reference voltage VDD charges the energy storage device 20 through the first resistor R1 and the second resistor R2. When the discharge unit Q1 is turned on, a discharge signal is output to the charge / discharge control module 12. At this time, the voltage of the preset reference voltage VDD is grounded through the first resistor R1, causing the energy storage device 20 to discharge.

[0070] In some alternative implementations, such as Figure 3 As shown, the energy storage device 20 is a first capacitor C1, wherein the first capacitor C1 is a surface-mount capacitor.

[0071] Specifically, the first capacitor C1 can be a separately configured device. The first capacitor C1 is a surface-mount capacitor. Surface-mount capacitors are characterized by their small size and light weight, thus reducing the size of the molecular pump recognition circuit. Furthermore, they have good high-frequency characteristics, exhibiting good electrical performance at high frequencies; they possess high precision and high stability, meeting the needs of precision instruments and equipment; they are easy to automate production, greatly improving production efficiency and reducing production costs; they have strong environmental adaptability, possessing good temperature resistance, moisture resistance, and corrosion resistance, meeting the needs of various application scenarios; and they are low-cost, making them one of the most cost-effective components in electronic design, and are widely used in the electronics industry. More importantly, capacitor values ​​also come in many different levels, including picofarads (pF), nanofarads (nF), microfarads (μF), millifarads (mF), and farads (F). The conversion relationships are: 1 farad (F) = 1000 millifarads (mF), 1 millifarad (mF) = 1000 microfarads (μF), 1 microfarad (μF) = 1000 nanofarads (nF), 1 nanofarad (nF) = 1000 picofarads (pF). Capacitors of various values ​​are widely available on the market, such as 1pF, 10pF, 100pF, 220pF, 470pF, 1nF, 10nF, 100nF, 220nF, 470nF, 1μF, 2.2μF, 4.7μF, 10μF, 22μF, 47μF, 100μF, etc. Therefore, by externally matching different capacitor values ​​in a circuit, the corresponding output frequency can be obtained, thereby determining the pump model to be identified. Ultimately, this allows for the identification of hundreds or even thousands of models, greatly expanding the range of molecular pump types and achieving a breakthrough in scale.

[0072] refer to Figure 4 The pulse output module 11 can be an integrated chip, which includes a first comparison unit A1, a second comparison unit A2, an RS flip-flop U1, a discharge unit Q1, and an inverter NOT. Specifically, the pulse output module 11 can be an SE555DR chip. Figure 4 OUT in the diagram represents the pulse signal output terminal.

[0073] It should be noted that the first preset voltage signal is one-third of the capacitance of the first capacitor C1, and the second preset voltage signal is two-thirds of the capacitance of the first capacitor C1. The pulse frequency output by the pulse output device can be adjusted by changing the combination of the first resistor R1 and / or the second resistor R2 and the first capacitor C1. The specific frequency value can be calculated using the formula f = 1.44 / ((R1 + 2 * R2) * C1).

[0074] In some alternative implementations, such as Figure 5 As shown, the energy storage device 20 further includes:

[0075] Temperature compensation module 21 is connected to the first capacitor C1 and is used to stabilize the frequency of the pulse output by the pulse output device 10.

[0076] Specifically, in order to compensate for the effect of temperature on the capacitance value, a temperature compensation module 21 is added to the circuit, thereby eliminating the effect of temperature on the capacitance value and improving the stability of the molecular pump identification.

[0077] In some alternative implementations, such as Figure 5 As shown, the temperature compensation module 21 includes:

[0078] The thermistor R0 is connected in parallel with the first capacitor C1.

[0079] Specifically, the thermistor R0 can be a negative temperature coefficient (NTC) thermistor. By connecting the thermistor R0 in parallel with the capacitor, when the temperature rises, the resistance of the thermistor R0 decreases, and the equivalent capacitance formed with the capacitor changes, thereby offsetting the effect of temperature on the capacitance value to a certain extent and stabilizing the pulse frequency.

[0080] In some alternative implementations, such as Figure 4 As shown, the pulse output device 10 further includes:

[0081] The second capacitor C2 has its first terminal connected to the preset reference voltage VDD and its second terminal grounded.

[0082] The third resistor R3 has its first end connected to the preset reference voltage VDD and its second end connected to the pulse output device.

[0083] Specifically, the second capacitor C2 is used to filter out high frequencies, and the third resistor R3 is used as a pull-up resistor to stabilize the high-level pulse signal and low-level pulse signal of the output.

[0084] In this embodiment, a molecular pump is also proposed, which includes a pump body and a control board. The pulse output device is disposed on the control board, and the energy storage device is disposed on the pump body. The energy storage device and the pulse output device are connected by wires.

[0085] Specifically, when the energy storage device is a surface-mount capacitor, the surface-mount capacitor can be directly attached to the molecular pump, thus eliminating the need to increase the structure of the molecular pump and greatly improving convenience.

[0086] In some alternative embodiments, the shielding cover is disposed outside the pulse output device 10, and the wire is a shielded wire.

[0087] Specifically, a metal shield is used to enclose the pulse output device 10 to reduce the impact of external electromagnetic interference on the circuit. The metal shield should be properly grounded to guide interference signals to the ground. Simultaneously, shielded wires are used for the external conductors connecting the pulse output device 10 to the energy storage devices 20, and the shielding layer is also grounded to prevent interference signals from coupling onto the conductors during signal transmission, thereby reducing interference caused by the large current during drive. Thus, self-excited oscillation is generated during the charging and discharging process of the energy storage device 20, outputting periodic rectangular pulse signals. The control module identifies the molecular pump model based on the frequency of the pulse signal.

[0088] In addition, to improve the stability of recognition, a filtering circuit can be added. The pulse output device 10 and the control module are integrated into a control board. A filtering circuit, such as a π-type filter composed of a capacitor and an inductor (not shown in the figure), is added to the power input terminal of the control board to filter out high-frequency noise in the power supply, stabilize the power supply voltage, and reduce the impact of power supply fluctuations on the multivibrator. Simultaneously, a low-pass filter circuit is added to the pulse signal output terminal to filter out high-frequency noise that may be caused by interference, ensuring the purity of the pulse signal transmitted to the management board. For example, a simple low-pass filter can be composed of a small-capacity capacitor and a resistor. An appropriate cutoff frequency can be selected as needed to allow only pulse signals below the cutoff frequency to pass through.

[0089] Although embodiments of the present invention have been described in conjunction with the accompanying drawings, those skilled in the art can make various modifications and variations without departing from the spirit and scope of the present invention, and such modifications and variations all fall within the scope defined by the appended claims.

Claims

1. A molecular pump recognition circuit, characterized in that, The molecular pump identification circuit is connected to the control module. The molecular pump identification circuit includes a pulse output device and an energy storage device. The pulse output device is connected to a preset reference voltage, the control module, and the energy storage device, respectively. The pulse output device is used to send the electrical energy of the preset reference voltage to the energy storage device for storage, and to release the electrical energy of the energy storage device. The energy storage device is used for charging and discharging, and sends the energy storage voltage signal to the pulse output device; The pulse output device is also used to receive the energy storage voltage signal, compare the energy storage voltage signal with a preset voltage signal, and output pulse signals of different frequencies according to the comparison result, so that the control module can identify the model of the molecular pump according to the frequency.

2. The molecular pump recognition circuit according to claim 1, characterized in that, The preset voltage signal includes: a first preset voltage signal and a second preset voltage signal; the pulse output device includes: A pulse output module is connected to the control module. The pulse output module is used to output a charging signal and a high-level pulse signal to the control module when the energy storage voltage signal is detected to be lower than the first preset voltage signal, and to output a discharging signal and a low-level pulse signal to the control module when the energy storage voltage signal is detected to be higher than the second preset voltage signal. A charge / discharge control module is connected to the pulse output module, the preset reference voltage, and the energy storage device. The charge / discharge control module is used to receive the charging signal and charge the energy storage device based on the preset reference voltage, and to receive the discharging signal and release the energy of the energy storage device.

3. The molecular pump recognition circuit according to claim 2, characterized in that, The pulse output module includes: A first comparison unit, connected to the energy storage device, is used to receive the energy storage voltage signal, compare the energy storage voltage signal with a first preset voltage signal, and output a first comparison result; The second comparison unit is connected to the energy storage device and is used to receive the energy storage voltage signal, compare the energy storage voltage signal with a second preset voltage signal, and output a second comparison result. The RS flip-flop is connected to the first comparison unit, the second comparison unit, and the control module respectively. It is used to receive the first comparison result and the second comparison result, and switch between outputting a high-level pulse signal and a low-level pulse signal according to the first comparison result and the second comparison result. When the energy storage voltage signal is lower than the first preset voltage signal, it outputs a high-level pulse signal, and when the energy storage voltage signal is higher than the second preset voltage signal, it outputs a low-level pulse signal. The discharge unit is connected to the energy storage device and the RS trigger respectively, and is used to output discharge signals and charging signals to the charge and discharge control module.

4. The molecular pump recognition circuit according to claim 2, characterized in that, The charge / discharge control module includes: A first resistor, the first end of which is connected to a preset reference voltage, and the second end of which is connected to the pulse output module; The second resistor has its first end connected to the second end of the first resistor, and its second end connected to the pulse output module.

5. The molecular pump recognition circuit according to claim 1, characterized in that, The energy storage device is a first capacitor, wherein the first capacitor is a surface-mount capacitor.

6. The molecular pump recognition circuit according to claim 5, characterized in that, The energy storage device also includes: A temperature compensation module is connected to the first capacitor and is used to stabilize the frequency of the pulse output by the pulse output device.

7. The molecular pump recognition circuit according to claim 6, characterized in that, The temperature compensation module includes: A thermistor is connected in parallel with the first capacitor.

8. The molecular pump recognition circuit according to claim 3, characterized in that, The pulse output device further includes: The second capacitor has its first terminal connected to the preset reference voltage and its second terminal grounded. The third resistor has its first end connected to the preset reference voltage and its second end connected to the pulse output module.

9. A molecular pump, said molecular pump comprising the molecular pump recognition circuit as described in any one of claims 1 to 8, characterized in that, The molecular pump includes a pump body and a control board. The pulse output device is disposed on the control board, and the energy storage device is disposed on the pump body. The energy storage device and the pulse output device are connected by wires.

10. The molecular pump according to claim 9, characterized in that, A shield is placed over the pulse output device, and the wire is a shielded wire.

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