Film box carrying manipulator mechanism and coating equipment

Abstract

The utility model provides a film magazine carrying manipulator mechanism and film coating equipment. The manipulator mechanism comprises a plurality of synchronous belt modules, a gripper assembly and a lifting mechanism; wherein the lifting mechanism is used for driving the gripper assembly to move in the vertical direction, the synchronous belt modules are used for driving the gripper assembly to move in the transverse direction, and a gripper of the gripper assembly can support a wafer box located on a reacting furnace or a conveying mechanism when moving along with the lifting mechanism and the synchronous belt modules. And the wafer box is carried to the reaction furnace from the designated position of the conveying mechanism, or the wafer box is carried to the designated position of the conveying mechanism from the reaction furnace. According to the utility model, the functions of the push boat and the manipulator of the traditional coating equipment are combined, so that the number of moving parts in the carrying process of the film box is reduced; and a double-module synchronous belt translation transmission mechanism is adopted, and the feasibility of realizing long-distance carrying in a limited space is greatly improved through the laminated double-module synchronous belt translation transmission mechanism.

Description

Technical Field

[0001] This utility model relates to the field of solar cell coating technology, and in particular to a multi-axis robotic arm mechanism and equipment for transporting solar cell cassettes in a solar cell coating device. Background Technology

[0002] With the continuous development of the photovoltaic industry and the continuous upgrading of solar cell technology, various coating equipment is playing an increasingly important role in the production process of solar cells. However, the field of edge coating and passivation for solar cells is still in its early stages of market application, with relatively few corresponding edge passivation coating equipment options available, and most market players are still in the research and development phase. Current solar cell passivation processes lack dedicated handling mechanisms for the cell boxes, resulting in low handling efficiency. To address the need for efficient and precise handling of cell boxes in and out of the reactor during the solar cell passivation process, a novel robotic arm mechanism for handling cell boxes and its control method are required, specifically designed to adapt to the structural and functional requirements of the coating equipment. Utility Model Content

[0003] In order to solve the technical problem of low efficiency in film cassette handling in the prior art, this utility model proposes a film cassette handling robot mechanism and coating equipment.

[0004] The technical solution adopted in this utility model is:

[0005] This utility model proposes a robotic arm mechanism for handling film cassettes, comprising: multiple synchronous belt modules, a gripper assembly, and a lifting mechanism; wherein...

[0006] The lifting mechanism is used to drive the gripper assembly to move in the vertical direction, and the multiple synchronous belt modules are used to drive the gripper assembly to move in the horizontal direction. When the gripper of the gripper assembly moves with the lifting mechanism and the synchronous belt module assembly, it can lift the film box located on the reactor or the conveying mechanism, and move the film box from the designated position of the conveying mechanism to the reactor, or move the film box from the reactor to the designated position of the conveying mechanism.

[0007] In the first embodiment, the plurality of synchronous belt modules are stacked, specifically including: a first synchronous belt module connected to the lifting slider of the lifting mechanism, a second synchronous belt module stacked below the first synchronous belt module and connected to the first slider of the first synchronous belt module, and the second slider of the second synchronous belt module being connected to the gripper assembly.

[0008] Furthermore, one side of the synchronous belt module faces the lifting mechanism, and a motor for driving the synchronous belt module is vertically arranged on this side, with the motor located at the end of the synchronous belt module near the reactor.

[0009] Further, the profile of the first and second synchronous belt modules is provided with fastening strips on both sides, and a connecting plate is arranged above the profile and connected with the fastening strips on both sides, the side edge of the fastening strip is provided with a stop edge embedded in the groove on the side of the profile, the lifting slider of the lifting mechanism is connected with the connecting plate of the first synchronous belt module, and the first slider of the first synchronous belt module is connected with the connecting plate of the second synchronous belt module.

[0010] Further, the gripper assembly comprises:

[0011] A vertically arranged vertical mounting plate, which is provided with a transverse waist hole and a positioning pin hole below the waist hole;

[0012] A pair of L-shaped grippers arranged at intervals, and the vertical parts of the two grippers are respectively connected to the positions near the two sides of the back of the vertical mounting plate;

[0013] A photoelectric sensor arranged at the bottom of the vertical mounting plate for detecting whether there is a film cassette between the two grippers.

[0014] Further, a plurality of height-adjustable supporting blocks are arranged on the transverse part of the gripper, and the supporting blocks are used to hold the support rods protruding from the side of the film cassette.

[0015] In the second embodiment, a plurality of synchronous belt modules are arranged side by side, specifically including: first and second synchronous belt modules arranged in parallel on both sides of the lifting mechanism, the sliders of the first and second synchronous belt modules are connected with the lifting mechanism through a transverse support, which can drive the lifting mechanism to move transversely, and the gripper assembly is connected with the lifting slider of the lifting mechanism.

[0016] Further, the gripper assembly comprises:

[0017] A gripper frame, the back of the gripper frame is connected with the lifting slider of the lifting mechanism;

[0018] A pair of grippers are respectively rotatably connected to the two sides of the bottom of the gripper frame, the gripper is divided into a supporting section and an adjusting section from the rotatable connection, the supporting section is provided with a guide structure corresponding to the support rod of the film cassette, and a top block assembly for pressing down or lifting the adjusting section is arranged on the gripper frame;

[0019] A photoelectric sensor arranged on the gripper frame for detecting whether there is a film cassette between the two grippers.

[0020] Further, the adjusting section is provided with a circular arc notch, and a pin shaft is arranged on the gripper frame and inserted into the circular arc notch to limit the rotation angle of the supporting section.

[0021] Further, the top of the guide rail of the lifting mechanism is provided with a sliding block buffer structure, which comprises a buffer plate mounted on the top of the guide rail, a buffer block located at the top stroke position of the lifting sliding block of the lifting mechanism, and a buffer pad mounted on the buffer block, and a screw connecting the buffer block and the buffer plate.

[0022] Further, a limiting guide rail mounting position limiting edge is vertically arranged on the guide rail mounting plate of the lifting mechanism.

[0023] The utility model discloses still propose a kind of coating equipment, it include: reaction furnace, the conveying mechanism for conveying sheet box being arranged in reaction furnace side, and above-mentioned sheet box handling manipulator mechanism.

[0024] The utility model discloses still propose a kind of sheet box handling control method, use above-mentioned coating equipment, including steps:

[0025] When reaction furnace sends out request box signal, and there is no sheet box on the specified position of conveying mechanism and sheet box handling manipulator mechanism, sheet box handling manipulator mechanism carries the sheet box that has been processed from reaction furnace to the specified position of conveying mechanism;

[0026] When conveying mechanism sends out request box signal to reaction furnace, and there is no sheet box on sheet box handling manipulator mechanism, sheet box handling manipulator mechanism carries the sheet box that is processed from the specified position of conveying mechanism to reaction furnace.

[0027] Specific control that sheet box handling manipulator mechanism carries the sheet box that has been processed from reaction furnace to the specified position of conveying mechanism is that lifting mechanism drives gripper assembly to ascend, second synchronous belt module drives gripper assembly to advance to stroke in place to reaction furnace direction, first synchronous belt module drives second synchronous belt module to continue advancing, until photoelectric sensor sends sheet box signal, lifting mechanism drives gripper assembly to ascend and grab sheet box;First synchronous belt module drives second synchronous belt module to retreat to position, second synchronous belt module drives gripper assembly to retreat to the top above the specified position of conveying mechanism, and lifting mechanism drives gripper assembly to descend and place the sheet box that has been processed in the specified position of conveying mechanism.

[0028] Specific control that sheet box handling manipulator mechanism carries the sheet box that is processed from the specified position of conveying mechanism to reaction furnace is that lifting mechanism drives gripper assembly to descend, second synchronous belt module drives gripper assembly to advance to sheet box grabbing position, photoelectric sensor sends sheet box signal, lifting mechanism drives gripper assembly to ascend and grab sheet box;Second synchronous belt module drives gripper assembly to continue advancing to stroke in place, and first synchronous belt module drives second synchronous belt module to advance to position and make up stroke, and lifting mechanism drives gripper assembly to descend and place the sheet box that has been processed in reaction furnace.

[0029] Compared with prior art, the utility model in particular has following advantages:

[0030] 1. The function of the traditional film coating equipment push boat and manipulator is combined, and the number of moving parts in the process of carrying the film box is reduced;

[0031] 2. The double module synchronous belt translation transmission mechanism is adopted, wherein the laminated double module synchronous belt translation transmission mechanism greatly improves the feasibility of long-distance carrying in limited space;

[0032] 3. The various adjusting structures of the manipulator solve the problems of the manipulator and the linear conveying mechanism, the reaction furnace pair and the horizontal problem of the film box carrying. BRIEF DESCRIPTION OF DRAWINGS

[0033] In order to more clearly illustrate the technical scheme in the embodiments of the present application, the drawings needed to be used in the embodiments or prior art description will be briefly introduced as follows. Obviously, the drawings in the following description are only some embodiments of the present application, and other drawings can be obtained by those skilled in the art without creative labor under the premise of not paying creative labor.

[0034] Figure 1 It is a structure schematic view of the whole in the first embodiment of the present application;

[0035] Figure 2 It is a structure schematic view of the carrying manipulator in the first embodiment of the present application;

[0036] Figure 3 It is a top view of the carrying manipulator in the embodiment of the present application;

[0037] Figure 4 It is a structure schematic view of the lifting mechanism in the embodiment of the present application;

[0038] Figure 5 It is an enlarged view of E in the first embodiment of the present application; Figure 4

[0039] Figure 6 It is a local structure schematic view of the lifting mechanism in the embodiment of the present application;

[0040] Figure 7 It is a connection structure schematic view of the synchronous belt module in the first embodiment of the present application;

[0041] Figure 8 It is a local connection structure schematic view of the synchronous belt module in the first embodiment of the present application;

[0042] Figure 9 It is a structure schematic view of the gripper assembly in the first embodiment of the present application;

[0043] Figure 10 ​It is partial structure schematic view of the gripper assembly in the first embodiment of the utility model;

[0044] Figure 11 It is partial structure schematic view of the bearing part of the gripper assembly in the first embodiment of the utility model;

[0045] Figure 12 It is control flow chart in the first embodiment of the utility model;

[0046] Figure 13 It is structure schematic view of the whole in the second embodiment of the utility model;

[0047] Figure 14 It is structure schematic view of the carrying manipulator in the second embodiment of the utility model;

[0048] Figure 15 It is partial structure schematic view of the carrying manipulator in the second embodiment of the utility model;

[0049] Figure 16 It is control flow chart in the second embodiment of the utility model.

[0050] 1, reaction furnace;

[0051] 3, carrying manipulator;

[0052] 31, lifting mechanism; 311, buffer plate; 312, buffer block; 313, buffer pad; 314, guide rail mounting plate; 315, baffle;

[0053] 32, first synchronous belt module; 320, profiled material; 322, connecting plate; 323, fastening strip; 33, second synchronous belt module;

[0054] 34, gripper assembly; 341, gripper; 3411, horizontal part of gripper; 3412, bearing block; 3413, bearing top screw; 3402, adjusting screw; 3401, top block; 342, photoelectric sensor; 343, vertical mounting plate; 3431, waist hole; 3432, positioning pin hole; 344, rib plate; 345, alignment block; 3451, alignment screw; 3452, alignment top screw;

[0055] 4, conveying mechanism; 5, sheet box. DETAILED DESCRIPTION

[0056] In order to make the technical problems, technical schemes and beneficial effects to be solved in the utility model more clear and obvious, the utility model is further described in detail below by combining with the drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the utility model, and are not used to limit the utility model.

[0057] The principles and structures of the utility model will be explained in detail below in combination with the drawings and examples.

[0058] There is no suitable sheet box carrying manipulator system in the current industry, and therefore a new manipulator carrying mechanism, system and control method are urgently needed to meet the application requirements.

[0059] For this purpose, as shown in Figure 1 、 2 , 13, 14, the utility model provides a kind of sheet box carrying manipulator mechanism, which is specifically used for carrying sheet box 5 between conveying mechanism 4 and reaction furnace 1, comprising: multiple mutually coordinated synchronous belt module, gripper assembly 34 and lifting mechanism 31;Wherein, lifting mechanism 31 is directly connected with gripper assembly 34, or indirectly connected with gripper assembly 34 by synchronous belt module, drives gripper assembly 34 to move in vertical direction;Part of synchronous belt module in multiple synchronous belt modules is directly connected with gripper assembly 34, or indirectly connected with gripper assembly 34 by lifting mechanism 31, for driving gripper assembly 34 to move in the horizontal direction towards reaction furnace 1 and away from reaction furnace 1;Gripper assembly 34 is driven to lift by lifting assembly and move horizontally by synchronous belt module, and gripper 341 of gripper assembly 34 can move with lifting mechanism 31 and synchronous belt module assembly, lift sheet box 5 located on reaction furnace 1 or conveying mechanism 4, and carry sheet box 5 from the specified position of conveying mechanism 4 to reaction furnace 1, or carry sheet box 5 from reaction furnace 1 to the specified position of conveying mechanism 4.

[0060] The mechanical hand mechanism of the utility model drives gripper assembly 34 to move horizontally by adopting the mode of synchronous belt module, which stably and accurately conveys sheet box, and has no impact vibration and small transmission noise.In addition, by directly carrying sheet box, the number of moving parts in the sheet box carrying process is reduced, for example, the number of push boat components is reduced, and the conveying mode has the characteristics of low manufacturing, installation and maintenance cost, convenient debugging and strong compatibility.The sheet box conveyed by conveying mechanism can be directly carried.

[0061] As shown in Figure 7 , the structure of synchronous belt module is consistent with that of existing conventional synchronous belt module, mainly comprising: profiled material 320 as shell, core shaft arranged in parallel at intervals, toothed synchronous belt sleeved on the core shaft, guide rail, and sliding block connected with the synchronous belt, which can slide back and forth on the guide rail under the drive of the synchronous belt.

[0062] As shown in Figure 2 、 7As shown, in the first embodiment, the plurality of synchronous belt modules specifically includes two, which are the first synchronous belt module 32 and the second synchronous belt module 33, and the first synchronous belt module 32 and the second synchronous belt module 33 are stacked one above the other. Among them, the first synchronous belt module 32 is connected with the lifting slider of the lifting mechanism 31, and can be driven by the lifting mechanism 31 to move up and down, and the second synchronous belt module 33 is stacked below the first synchronous belt module 32, specifically, the first slider on the bottom surface of the first synchronous belt module 32 is connected with the profile 320 of the second synchronous belt module 33, and when the first slider of the first synchronous belt module 32 is located at the initial position (the initial position is the end of the first synchronous belt module 32 away from the reaction furnace 1), the second synchronous belt module 33 is located directly below the first synchronous belt module 32, and the two ends of the second synchronous belt module 33 are flush with the two ends of the first synchronous belt module 32. The second slider of the second synchronous belt module 33 is located on the bottom surface, and the initial position of the second slider is the end of the second synchronous belt module 33 away from the reaction furnace 1, and the second slider is connected with the gripper assembly 34 below. Therefore, during operation, the second synchronous belt module 33 can drive the gripper assembly 34 to advance a certain distance towards the reaction furnace 1 through the second slider, and then the first synchronous belt module 32 drives the second synchronous belt module 33 to run a certain distance towards the reaction furnace 1, so that the gripper assembly 34 advances a certain distance towards the reaction furnace 1 to make up the distance.

[0063] That is, by adopting the form of stacked synchronous belt modules, the horizontal translation stroke of the gripper assembly 34 can be increased in the case of limited installation space, that is, long-distance precise positioning and handling can be realized in limited space.

[0064] In further embodiments, one side of the first synchronous belt module 32 and the second synchronous belt module 33 stacked one above the other faces the lifting mechanism 31, one end of the first synchronous belt module 32 and the second synchronous belt module 33 is close to the reaction furnace 1, and a motor for driving the synchronous belt module is vertically arranged on the side surface, and the motor is arranged at the end of the synchronous belt module close to the reaction furnace 1.

[0065] As shown, Figure 3 Because the motor 321 of the synchronous belt module and the lifting mechanism 31 are arranged on the same side of the synchronous belt, and the position of the motor is at the end of the synchronous belt module close to the reaction furnace 1, the motor will not interfere with the lifting mechanism 31 during operation of the synchronous belt module, and at the same time, the space occupied by the equipment can be reduced (that is, the lifting mechanism and the motor are on the same side, and the installation space in the width direction is limited to X).

[0066] As shown, Figure 7 , 8As shown, in further embodiments, the profile 320 of the first synchronous belt module 32 and the second synchronous belt module 33 has a groove extending along the length direction on both sides of the profile 320 (the groove is a structure that the existing synchronous belt module has), and each synchronous belt module is provided with a module connection structure, which facilitates the connection of the synchronous belt module with other components, and avoids drilling holes in the profile 320 to connect the synchronous belt module.

[0067] The module connection structure specifically includes:

[0068] The fastening strip 323 connected to both sides of the profile 320, and the connecting plate 322 connected to the upper edge of the fastening strip 323 above the profile 320, the side edge of the fastening strip 323 is provided with a stop edge 315 embedded in the groove on the side of the profile 320, that is, the connecting plate 322 can be provided with a screw hole, so that it can be directly connected with other components by screws or other connection methods.

[0069] Specifically, the lifting slider of the lifting mechanism 31 is connected (specifically, it can be screw connected) with the connecting plate 322 of the first synchronous belt module 32, and the first slider of the second synchronous belt module 33 is connected (specifically, it can be screw connected) with the connecting plate 322 of the second synchronous belt module 33.

[0070] As shown in Figure 2 , 9 , 10, in further embodiments, the gripper assembly 34 includes a gripper frame, a gripper 341, and a photoelectric sensor 42, the top surface of the gripper frame is connected with the second slider of the second synchronous belt module 33, so that the gripper frame can be driven by the second synchronous belt module 33 to move towards the reaction furnace 1; the gripper 341 is arranged in intervals and is L-shaped, divided into vertical and horizontal parts, the vertical parts of the two grippers 341 are respectively connected to the back surface of the gripper frame on both sides, and the horizontal parts extend towards the reaction furnace 1; the photoelectric sensor 42 is installed at the bottom of the gripper frame between the vertical parts of the two grippers 341, and its detection direction is parallel to the horizontal part of the gripper 341, which is used to detect whether there is a film box 5 between the two grippers 341.

[0071] Specifically, the gripper frame comprises: a vertical mounting plate 343, a horizontal mounting plate, and a web plate 344; the vertical mounting plate 343 and the horizontal mounting plate are connected vertically in an L shape (in an abutting state, not directly connected by a screw), wherein the horizontal mounting plate is mounted on the bottom surface of the second sliding block of the second synchronous belt module 33, and two web plates 344 having a generally triangular profile are further connected between the vertical mounting plate 343 and the horizontal mounting plate (i.e., a triangular plate for improving the connection strength), the upper side of the web plate 344 at the top is connected to the bottom surface of the horizontal mounting plate by a screw, and the vertical side of the web plate 344 at the side is connected to the vertical mounting plate 343, while the vertical mounting plate 343 has waist holes 3431 and positioning pin holes 3432 alternately arranged from top to bottom on both sides, for positioning and connecting with the two web plates 344, the position of the vertical mounting plate 343 can be adjusted through the waist holes 3431, so that the vertical mounting plate 343 can be finely adjusted in the left and right directions, and the vertical part of the gripper 341 is connected to the back of the vertical mounting plate 343 on both sides, so that the gripper 341 can be adjusted to be centered and aligned with the chamber of the reaction furnace 1.

[0072] Further, the outer side of each web plate 344 is further provided with a position correcting block 345, the side of the position correcting block 345 opposite to the vertical mounting plate 343 is provided with a screw hole, which can be screwed with the vertical mounting plate 343, and the side of the position correcting block 345 opposite to the web plate 344 is provided with a screw hole and a position correcting top screw 3452, which can lock the web plate 344 by pulling and topping to prevent loosening.

[0073] Through this adjusting and locking structure, the problem that the mechanical hand and the conveying mechanism 4 and the reaction furnace 1 cannot be centered due to installation errors can be solved.

[0074] As shown in Figure 11 , specifically, the horizontal part of the L-shaped gripper 341 is further provided with two supporting blocks 3412 corresponding to the side support rods of the sheet box 5, the middle of the top surface of the supporting block 3412 is raised and provided with an arc-shaped groove, which facilitates dragging the side support rods of the sheet box 5, the two sides of the top surface of the supporting block 3412 are provided with a gripper 341 connected by a screw, and are provided with a supporting top screw 3413, which can adjust the installation spacing between the supporting block 3412 and the gripper 341 by adjusting the top screw, i.e., adjusting the height of the supporting block 3412, to compensate for the sagging problem of the double synchronous belt module, the gripper assembly 34 or other structures during installation or operation, so that the sheet box 5 is always in a relatively horizontal state during the carrying process.

[0075] As shown in Figure 13 , 14As shown, in the second embodiment, multiple synchronous belt modules are arranged side by side. Specifically, the lifting mechanism 31 is located in the middle, and the first synchronous belt module 32 and the second synchronous belt module 33 are located on both sides of the lifting mechanism 31. At the same time, the sliders of the first synchronous belt module and the second synchronous belt module are connected to the support part of the lifting mechanism 31 through the transverse support, which can drive the lifting mechanism 31 to move laterally. The gripper assembly 34 is connected to the lifting slider of the lifting mechanism 31.

[0076] This structure occupies more installation space, but because the two synchronous belt modules drive the motor gripper assembly 34 to run synchronously, the running accuracy and stability are better.

[0077] like Figure 15 As shown, in this embodiment, the gripper assembly 34 includes: a gripper frame, a pair of grippers 341, and a photoelectric sensor 42. The gripper frame has a side plate and a bottom plate. The front of the side plate of the gripper frame faces the reactor 1, and the back of the side plate is connected to the lifting slider of the lifting mechanism 31. The pair of grippers 341 are respectively rotatably connected to both sides of the bottom plate of the gripper frame. The grippers 341 are divided into a support section and an adjustment section by their rotatable connection point. The support section is provided with a guide structure corresponding to the support rod of the plate box 5, and the bottom plate of the gripper frame is provided with a top block 3401 assembly for pressing down or lifting the adjustment section. The photoelectric sensor 42 is located at a lower position on the front of the side plate of the gripper frame and is used to detect whether there is a plate box 5 between the two grippers 341.

[0078] like Figure 15 As shown, specifically, the top block 3401 assembly consists of a top block 3401 mounted on the base plate and an adjusting screw 3402 mounted on the top block 3401, which abuts against the side of the adjusting section of the gripper 341. By tightening and loosening the screw, the extension length of the screw can be changed, thereby changing the rotation angle of the adjusting section of the gripper 341, allowing the supporting section of the gripper 341 to be adjusted to a relatively horizontal state. In addition, the adjusting section is provided with an arc groove, and a screw that engages with the arc groove is provided on the base plate of the gripper frame. After the angle of the gripper 341 is adjusted by the top block 3401 assembly, the gripper 341 is fixed by the screw passing through the arc groove, restricting the movement of the gripper 341.

[0079] The guide structure is similar to the support block 3412. Specifically, the upward protrusion of the gripper 341 is provided with a V-shaped groove or an arc groove, which facilitates the support rod on the side of the film box 5 for support.

[0080] like Figure 5 As shown, in a specific embodiment, the top of the guide rail of the lifting mechanism 31 is provided with a slider buffer structure, which includes: a buffer plate 311 installed on the top of the guide rail, a buffer block 312 located at the top stroke position of the lifting slider of the lifting mechanism 31, a buffer pad 313 installed on the buffer block 312, and screws connecting the buffer block 312 and the buffer plate 311.

[0081] Before the lifting slider moves upward to its limit position, it will collide with the buffer pad 313 to prevent the lifting slider from directly hitting the components of the lifting mechanism 31 and causing damage to the components or the lifting slider.

[0082] like Figure 6 As shown, in a specific embodiment, a retaining edge 315 is vertically provided on the guide rail mounting plate 314 of the lifting mechanism 31 to limit the installation position of the guide rail, so as to avoid the guide rail from being misaligned when tightening the screws, which would cause the operation to be unsmooth.

[0083] like Figure 1 , 13 As shown, this utility model also proposes a coating equipment, specifically including: a reactor 1, a conveying mechanism 4 disposed on one side of the reactor 1 for conveying the film cassette 5, and the aforementioned film cassette handling robot mechanism. The conveying mechanism 4 is a linear conveying mechanism 4, the lateral conveying direction of the film cassette handling robot mechanism is perpendicular to the conveying direction of the conveying mechanism 4, and the reactor 1 is located in the lateral conveying direction of the film cassette handling robot mechanism.

[0084] This utility model also proposes a method for controlling the handling of film cassettes, using the aforementioned coating equipment, specifically including the following steps:

[0085] When the reactor sends a request to eject a cassette, and there are no cassettes at the designated position of the conveyor mechanism or on the cassette handling robot mechanism, the cassette handling robot mechanism will move the processed cassettes from the reactor to the designated position of the conveyor mechanism.

[0086] When the conveying mechanism sends a request signal to the reactor to put the cassette in, and there is no cassette on the cassette handling robot, the cassette handling robot will move the cassette to be processed from the designated position of the conveying mechanism to the reactor.

[0087] like Figure 12 As shown, specifically in the first embodiment, the process control of the cassette handling robot to move the processed cassette from the reactor to the designated position of the conveying mechanism is as follows: the lifting mechanism (shown as robot shaft 1 in the flowchart) drives the gripper assembly to rise, the second synchronous belt module (shown as robot shaft 3 in the flowchart) drives the gripper assembly to move forward towards the reactor until the stroke is complete, the first synchronous belt module (shown as robot shaft 2 in the flowchart) drives the second synchronous belt module to continue moving forward until the photoelectric sensor sends a signal indicating the presence of a cassette, at which point the lifting mechanism drives the gripper assembly to rise and grab the cassette; the first synchronous belt module drives the second synchronous belt module to return to its position, the second synchronous belt module drives the gripper assembly to return to above the designated position of the conveying mechanism, the lifting mechanism drives the gripper assembly to descend and place the processed cassette at the designated position of the conveying mechanism, and all moving parts of the robot return to their initial positions.

[0088] Specifically, in the first embodiment, the process of the cassette handling robot moving the cassette to be processed from the designated position of the conveying mechanism to the reactor is controlled as follows: the lifting mechanism drives the gripper assembly to descend, the second synchronous belt module drives the gripper assembly to advance to the cassette gripping position (corresponding to the designated position of the conveying mechanism), when the photoelectric sensor sends a signal that a cassette is present, the lifting mechanism drives the gripper assembly to rise and grip the cassette; the second synchronous belt module drives the gripper assembly to continue to advance to the end of the stroke, the first synchronous belt module drives the second synchronous belt module to advance to the end of the stroke to make up for the stroke, the lifting mechanism drives the gripper assembly to descend and place the cassette to be processed in the reactor, and all moving parts of the robot return to their initial positions.

[0089] like Figure 13 As shown, specifically in the second embodiment, the process of the cassette handling robot moving the processed cassette from the reactor to the designated position of the conveying mechanism is specifically controlled as follows: the lifting mechanism (shown as robot shaft 1 in the flowchart) drives the gripper assembly to rise, and the two synchronous belt modules drive the gripper assembly to move towards the reactor until the travel is complete. The photoelectric sensor emits a signal indicating the presence of a cassette, and the lifting mechanism drives the gripper assembly to rise and grab the cassette; the first synchronous belt module (shown as robot shaft 2 in the flowchart) and the second synchronous belt module drive the cassette back to above the designated position of the conveying mechanism, and the lifting mechanism drives the gripper assembly to descend and place the processed cassette at the designated position of the conveying mechanism. All moving parts of the robot return to their initial positions.

[0090] Specifically, in the second embodiment, the cassette handling robot mechanism moves the cassette to be processed from the designated position of the conveying mechanism to the reactor. The specific control is as follows: the lifting mechanism drives the gripper assembly to descend, the first and second synchronous belt modules drive the gripper assembly to advance to the cassette gripping position, when the photoelectric sensor sends a signal that a cassette is present, the lifting mechanism drives the gripper assembly to rise and grip the cassette; the first and second synchronous belt modules drive the gripper assembly to continue to advance to the end of the stroke, the lifting mechanism drives the gripper assembly to descend and place the cassette to be processed in the reactor, and all moving parts of the robot return to their initial positions.

[0091] It should be noted that the terminology used above is for the purpose of describing particular embodiments only and is not intended to limit the exemplary embodiments according to this utility model. As used herein, unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. Furthermore, it should be understood that when the terms "comprising" and / or "including" are used in this specification, they indicate the presence of features, steps, operations, devices, components, and / or combinations thereof.

[0092] Unless otherwise specifically stated, the relative arrangement, numerical expressions, and values ​​of the components and steps described in these embodiments do not limit the scope of this invention. It should also be understood that, for ease of description, the dimensions of the various parts shown in the drawings are not drawn to actual scale. Techniques, methods, and devices known to those skilled in the art may not be discussed in detail, but where appropriate, such techniques, methods, and devices should be considered part of the specification. In all examples shown and discussed herein, any specific values ​​should be interpreted as merely exemplary and not as limitations. Therefore, other examples of exemplary embodiments may have different values. It should be noted that similar reference numerals and letters in the following drawings denote similar items; therefore, once an item is defined in one drawing, it need not be further discussed in subsequent drawings.

[0093] In the description of this utility model, it should be understood that the directional terms such as "front, back, up, down, left, right", "horizontal, vertical, horizontal" and "top, bottom" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description. Unless otherwise stated, these directional terms do not indicate or imply that the device or element referred to must have a specific orientation or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on the scope of protection of this utility model. The directional terms "inner" and "outer" refer to the inner and outer contours of each component itself.

[0094] For ease of description, spatial relative terms such as "above," "on top of," "on the upper surface of," "above," etc., are used herein to describe the spatial positional relationship of a device or feature as shown in the figures to other devices or features. It should be understood that spatial relative terms are intended to encompass different orientations in use or operation beyond the orientation of the device as described in the figures. For example, if the device in the figures were inverted, a device described as "above" or "on top of" other devices or structures would subsequently be positioned as "below" or "under" other devices or structures. Thus, the exemplary term "above" can include both "above" and "below." The device may also be positioned in other different ways (rotated 90 degrees or in other orientations), and the spatial relative descriptions used herein will be interpreted accordingly.

[0095] Furthermore, it should be noted that the use of terms such as "first" and "second" to define components is merely for the purpose of distinguishing the corresponding components. Unless otherwise stated, the above terms have no special meaning and therefore cannot be construed as limiting the scope of protection of this utility model.

[0096] The above description is merely a preferred embodiment of this utility model and is not intended to limit the utility model. Various modifications and variations can be made to this utility model by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A chip cassette handling robot mechanism, characterized in that, include: Multiple synchronous belt modules, gripper assemblies, and lifting mechanisms; among them, The lifting mechanism is used to drive the gripper assembly to move in the vertical direction, and the multiple synchronous belt modules are used to drive the gripper assembly to move in the horizontal direction. When the gripper of the gripper assembly moves with the lifting mechanism and the synchronous belt module assembly, it can lift the film box located on the reactor or the conveying mechanism, and move the film box from the designated position of the conveying mechanism to the reactor, or move the film box from the reactor to the designated position of the conveying mechanism.

2. The cassette handling robot mechanism as described in claim 1, characterized in that, The multiple synchronous belt modules are stacked together, specifically including: a first synchronous belt module connected to the lifting slider of the lifting mechanism; a second synchronous belt module stacked below the first synchronous belt module and connected to the first slider of the first synchronous belt module; and a second slider of the second synchronous belt module connected to the gripper assembly.

3. The cassette handling robot mechanism as described in claim 2, characterized in that, One side of the synchronous belt module faces the lifting mechanism, and a motor that drives the synchronous belt module is vertically arranged on this side. The motor is located at the end of the synchronous belt module near the reactor.

4. The cassette handling robot mechanism as described in claim 2, characterized in that, Both sides of the profiles of the first synchronous belt module and the second synchronous belt module are provided with fastening strips, and a connecting plate connecting the fastening strips on both sides is provided on the top of the profile. The side of the fastening strip is provided with a retaining edge embedded in the groove on the side of the profile. The lifting slider of the lifting mechanism is connected to the connecting plate of the first synchronous belt module, and the first slider of the first synchronous belt module is connected to the connecting plate of the second synchronous belt module.

5. The cassette handling robot mechanism as described in claim 2, characterized in that, The gripper assembly includes: The gripper frame is connected to the second slider of the second synchronous belt module; A pair of L-shaped grippers are spaced apart, and the vertical parts of the two grippers are respectively connected to the two sides of the back of the gripper frame; A photoelectric sensor is installed at the bottom of the gripper frame to detect whether there is a chip box between the two grippers.

6. The cassette handling robot mechanism as described in claim 5, characterized in that, The gripper frame includes: A horizontal mounting plate, which is connected to the second slider of the second synchronous belt module; A vertical mounting plate is vertically connected to one end of a horizontal mounting plate. The vertical mounting plate has alternating waist holes and positioning pin holes on both sides from top to bottom. The vertical part of the gripper is connected to both sides of the back of the vertical mounting plate. Two stiffening plates, the upper side of which is connected to the lower side of the horizontal mounting plate, and the vertical side of which rests against the front of the vertical mounting plate, and are positioned and connected through the waist hole and positioning pin hole on the vertical mounting plate. Alignment blocks are respectively covered on the outer sides of the two stiffening plates. The side of the block facing away from the vertical mounting plate has screw holes, and the side of the block facing away from the stiffening plate has screw holes and alignment screws.

7. The cassette handling robot mechanism as described in claim 5, characterized in that, The gripper has multiple height-adjustable support blocks on its horizontal portion, which are used to support the support rods protruding from the side of the cassette.

8. The cassette handling robot mechanism as described in claim 1, characterized in that, The multiple synchronous belt modules are arranged in parallel, specifically including: a first synchronous belt module and a second synchronous belt module arranged at the same height on both sides of the lifting mechanism. The sliders of the first synchronous belt module and the second synchronous belt module are connected to the lifting mechanism through a transverse support, which can drive the lifting mechanism to move laterally. The gripper assembly is connected to the lifting slider of the lifting mechanism.

9. The cassette handling robot mechanism as described in claim 8, characterized in that, The gripper assembly includes: A gripper frame, the back of which is connected to the lifting slider of the lifting mechanism; A pair of grippers are rotatably connected to both sides of the bottom of the gripper frame. The grippers are divided into a support section and an adjustment section from the rotatable connection point. The gripper frame is provided with a top block assembly for pressing down or lifting the adjustment section. A photoelectric sensor is mounted on the gripper frame to detect whether there is a chip box between the two grippers.

10. The cassette handling robot mechanism as described in claim 9, characterized in that, The adjustment section is provided with an arc-shaped groove, which can be fixedly connected to the gripper frame by screws passing through the arc-shaped groove to restrict the rotation of the support section.

11. The cassette handling robot mechanism as described in claim 1, characterized in that, The top of the guide rail of the lifting mechanism is provided with a slider buffer structure, which includes: a buffer plate installed on the top of the guide rail, a buffer block located at the top stroke position of the lifting slider of the lifting mechanism, a buffer pad installed on the buffer block, and screws connecting the buffer block and the buffer plate.

12. The cassette handling robot mechanism as described in claim 1, characterized in that, The lifting mechanism has a vertically installed baffle on the guide rail mounting plate that restricts the installation position of the guide rail.

13. A coating apparatus, characterized in that, include: The reactor, the conveying mechanism disposed on one side of the reactor for conveying the cassette, and the robotic arm mechanism as described in any one of claims 1 to 12.

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