Partitioned multilayer coating device

Abstract

The utility model belongs to the technical field of vacuum coating, and particularly relates to a partitioned multilayer coating device. The utility model discloses a partitioned multi-layer coating device which mainly comprises a vacuum chamber, a plurality of coating regions and a conveying device, the plurality of coating areas are arranged adjacently; the coating area comprises a target material, a power supply and a magnetic field device; the target material is fixed on the inner wall of the coating area; the power supply is connected with the target through a cable; the magnetic field device is arranged on the back of the target; the plurality of coating areas are provided with corresponding target materials, power supplies and magnetic field devices; the number of the coating areas can be adjusted; an isolation plate is arranged between every two adjacent coating areas; the conveying device comprises a clamp; a base material is fixed on the clamp; the conveying device drives the base material to move in a plurality of coating intervals; the base material and the target material are oppositely arranged. The partitioned multi-layer coating device disclosed by the utility model can be used for carrying out multi-layer coating on the surface of a base material so as to meet different coating requirements, avoid pollution or damage of the base material in the coating process and improve the coating quality.

Description

Technical Field

[0001] This utility model belongs to the field of vacuum coating technology, specifically relating to a partitioned multilayer coating device. Background Technology

[0002] In modern industrial production, coating technology is widely used in the surface treatment of various products to endow them with specific functions, such as wear resistance, corrosion resistance, and optical properties.

[0003] For metal parts, coating is often carried out in a vacuum environment to reduce interference from impurities. In a vacuum environment, the atmospheric pressure is very low, almost zero, which helps to reduce the interference of impurities in the atmosphere, thereby avoiding unstable film quality and improving coating quality and efficiency. The vacuum environment can effectively prevent gas molecules from contaminating and interfering with the coating material and substrate surface during the coating process, thereby improving the quality and purity of the coating.

[0004] Traditional coating equipment can usually only perform the deposition of a single-function coating, or when depositing multiple coatings, the substrate is prone to contamination or damage during the coating and transfer process, which affects the coating quality. Utility Model Content

[0005] To address the shortcomings of existing technologies, this utility model provides a partitioned multi-layer coating device, which aims to perform multi-layer coating on the surface of a substrate to meet different coating requirements, avoid contamination or damage to the substrate during the coating process, and improve coating quality.

[0006] To achieve the above objectives, this utility model provides a partitioned multilayer coating apparatus, comprising a vacuum chamber, multiple coating zones, and a conveying device; the multiple coating zones are disposed within the vacuum chamber; the multiple coating zones are arranged adjacent to each other; each coating zone includes a target material, a power supply, and a magnetic field device; the target material is fixed to the inner wall of the coating zone; the power supply is installed outside the vacuum chamber; the power supply is connected to the target material via a cable; the magnetic field device is disposed on the back of the target material; each of the multiple coating zones has a corresponding target material, power supply, and magnetic field device; the number of coating zones is adjustable; an isolation plate is provided between two adjacent coating zones; the conveying device includes a clamp; a substrate is fixed on the clamp; the conveying device drives the substrate to move between the multiple coating zones; when the substrate moves to the coating zone, the substrate and the target material are arranged opposite each other.

[0007] A partitioned multilayer coating apparatus includes a vacuum chamber, multiple coating zones, and a conveying device. These components work together to achieve continuous deposition of different functional coatings on a substrate surface, ensuring efficient operation and stable coating quality. The vacuum chamber provides a vacuum environment for the entire partitioned multilayer coating apparatus, ensuring the coating process is carried out under high vacuum and avoiding the influence of air impurities on coating quality. The vacuum chamber contains multiple independent coating zones, each equipped with a corresponding target, power supply, and magnetic field device. The power supply is connected to the target via a cable, providing the required current and voltage. The magnetic field device is located on the back of the target. After evacuation before coating, high-purity argon gas is introduced into the coating zone. Under high voltage, the high-purity argon gas ionizes into plasma. The high-energy argon ions in the plasma collide with the target surface, sputtering target atoms. The sputtered target atoms diffuse and move to the substrate surface, gradually depositing to form a coating layer. The magnetic field enhances the density and stability of the plasma, thereby improving sputtering efficiency. After a layer of coating is applied to the substrate, the conveyor moves the substrate to the next coating zone for the next layer. This process is repeated to achieve continuous deposition of different functional coatings on the substrate, i.e., the surface of the metal part. The number of coating zones can be adjusted according to actual operational needs to meet the coating requirements of different metal parts, thus improving the versatility of this partitioned multilayer coating device. Isolation plates are installed between adjacent coating zones to separate multiple zones, preventing cross-contamination between different coating materials and ensuring the independence and quality of the coating process. The conveyor is equipped with clamps to fix the substrate to be coated, ensuring the stability of the coating process and guaranteeing coating quality.

[0008] Furthermore, the top and bottom of the isolation plate are provided with sliding blocks; the inner wall of the vacuum chamber is provided with a sliding track; the sliding blocks cooperate with the sliding track; and the outer side of the isolation plate is provided with a first servo motor.

[0009] The top and bottom of the isolation plates are equipped with sliding blocks, which can be moved apart before the coating begins to start the vacuum process and ensure the vacuum conditions of the coating environment. After the coating begins, the isolation plates are closed, that is, distributed between multiple coating areas to separate the multiple coating areas and prevent cross-contamination between different coating materials. The outer side of the isolation plate is equipped with a first servo motor, which can ensure the precise movement of the isolation plates.

[0010] Furthermore, the isolation plate is provided with sealing strips on its two sides perpendicular to its sliding direction.

[0011] The isolation plate has sealing strips on two sides perpendicular to its sliding direction to provide a good seal when the isolation plate is closed, preventing cross-contamination between different coating materials. The sealing strips are made of rubber or silicone to ensure sealing performance.

[0012] Furthermore, an air extraction hole is provided on the side wall of the vacuum chamber; a vacuum pump is provided on the outside of the vacuum chamber; an air extraction pipe is connected to the air extraction hole; one end of the air extraction pipe is connected to the vacuum chamber, and the other end is connected to the vacuum pump.

[0013] The side wall of the vacuum chamber has an evacuation port, which is connected to a vacuum pump via an evacuation pipe. The vacuum pump is used to remove gas from the vacuum chamber, creating and maintaining a vacuum environment. Metal coating is performed in a vacuum environment, which reduces interference from other impurities such as oxygen, nitrogen, and water vapor, thereby preventing unstable film quality and achieving uniform film deposition.

[0014] Furthermore, an observation window is provided on the shell of the vacuum chamber.

[0015] An observation window is provided on the shell of the vacuum chamber. The observation window is made of a highly transparent material, such as quartz glass or special optical glass. It can be used to observe the process and state of the coating of metal parts inside the vacuum chamber, and to monitor the coating process of metal parts in real time to ensure the coating quality of metal parts.

[0016] Furthermore, ventilation holes are provided on the shell of the vacuum chamber.

[0017] The shell of the vacuum chamber has a vent hole, which is used to control the entry and exit of gas to ensure that the gas environment in the vacuum chamber meets the requirements of the coating process. During the coating process, a specific gas needs to be introduced as the working gas, which can be introduced through the vent hole. After coating, the gas in the vacuum chamber can be discharged through the vent hole to restore atmospheric pressure.

[0018] Furthermore, the conveying device also includes a conveying table, a second servo motor, a drive shaft, and a drive wheel; the fixture is fixed on the conveying table; the output shaft of the second servo motor is connected to the drive shaft, driving the drive shaft to rotate; the drive wheel is mounted on the drive shaft; the conveying table tightly surrounds the outside of the drive wheel; the inner side of the conveying table is in contact with the surface of the drive wheel.

[0019] The conveying device is the main component used to transport the substrate to be coated. It also includes a conveying table, a second servo motor, a drive shaft, and drive wheels. A clamp is fixed on the conveying table to secure the substrate. The second servo motor drives the drive shaft, which in turn drives the drive wheels. The conveying table, which is closely surrounded by the drive wheels, thus achieves the transmission, completing the transfer of the substrate between different functional zones. The second servo motor ensures precise movement of the conveying table, improving coating quality.

[0020] Furthermore, the vacuum chamber is provided with a pretreatment zone at the front end of the substrate entry point; an isolation plate is provided between the pretreatment zone and the vacuum chamber; and an activation device is provided inside the pretreatment zone.

[0021] The pretreatment area is equipped with an activation device, which is a plasma cleaner. The plasma high-energy particles bombard the surface of the metal parts to remove organic contaminants and tiny particles, while activating the surface of the metal parts and improving the adhesion of the coating.

[0022] Furthermore, a post-processing area is provided at the end of the vacuum chamber; an isolation plate is provided between the vacuum chamber and the post-processing area; the post-processing area is provided with an air-cooling device; the air-cooling device includes multiple air outlets, a temperature sensor and a fan; the multiple air outlets are located above the substrate; the air outlets are connected to the fan through pipelines; the temperature sensor is located close to the substrate; the fan is located outside the post-processing area.

[0023] After coating, the metal parts need to be properly cooled to prevent thermal stress from affecting the film layer and to ensure the stability and adhesion of the coating. An air-cooling device is installed inside the post-processing area. This device uses airflow to reduce the temperature of the coated metal parts. Multiple air outlets in the air-cooling device ensure even air distribution and effective cooling. In addition, a temperature sensor monitors the temperature near the substrate in real time to ensure cooling efficiency. If the temperature sensor detects that the substrate temperature is too high, the fan speed is increased to accelerate the cooling process; if the temperature is too low, the fan speed is reduced to save energy.

[0024] Furthermore, the coating area also includes a back plate; the back plate is fixed to the inner wall of the coating area; the target material is fixed to the back plate.

[0025] The inner wall of the coating area is equipped with a back plate for mounting the target material. The target material is fixed to the back plate with bolts to ensure the stability of the target material during the coating process and improve the utilization rate of the target material and the coating efficiency.

[0026] Beneficial effects

[0027] 1. The present invention provides a partitioned multilayer coating device, which, through partitioned design, enables continuous deposition of coatings with different functions;

[0028] 2. The present invention provides a partitioned multilayer coating device, which is equipped with a partition plate to separate multiple coating zones, prevent cross-contamination between different coating materials, and ensure the independence of the coating process and the coating quality.

[0029] 3. A partitioned multilayer coating device of this utility model has a sealing strip on the isolation plate to provide a good sealing effect when the isolation plate is closed, so as to prevent cross-contamination between different coating materials;

[0030] 4. The present invention provides a partitioned multilayer coating device, which includes a pretreatment zone and a posttreatment zone to perform surface pretreatment and post-coating treatment on the substrate, thereby further improving the adhesion between the coating and the substrate and the performance of the coating. Attached Figure Description

[0031] Figure 1 This is a schematic diagram of a partitioned multilayer coating device.

[0032] Figure 2 This is a top view of the coated area;

[0033] Figure 3 This is a schematic diagram of the isolation plate structure;

[0034] Figure 4 This is a side view of the isolation panel;

[0035] Figure 5 This is a schematic diagram of the transmission device.

[0036] Figure 6 This is a schematic diagram of the preprocessing area.

[0037] Figure 7 This is a schematic diagram of the post-processing area.

[0038] In the attached diagram: 1. Vacuum chamber; 2. Coating area; 3. Conveying device; 4. Pre-treatment area; 5. Post-treatment area; 11. Evacuation port; 12. Vacuum pump; 13. Evacuation pipe; 14. Observation window; 15. Vent; 21. Target material; 22. Power supply; 23. Magnetic field device; 24. Isolation plate; 25. Back plate; 31. Fixture; 32. Substrate; 33. Conveying table; 34. Second servo motor; 35. Drive shaft; 36. Drive wheel; 41. Activation device; 51. Air cooling device; 241. Sliding block; 242. Sliding track; 243. First servo motor; 244. Sealing strip; 511. Air outlet; 512. Temperature sensor. Detailed Implementation

[0039] Example 1

[0040] like Figures 1 to 3The illustrated multilayer coating apparatus includes a vacuum chamber 1, multiple coating zones 2, and a conveying device 3. The vacuum chamber 1 is a rectangular box. Multiple coating zones 2 are disposed within the vacuum chamber 1 and are arranged adjacent to each other. Each coating zone 2 includes a target material 21, a power supply 22, and a magnetic field device 23. The target material 21 is fixed to the inner wall of the coating zone 2. The power supply 22 is installed outside the vacuum chamber 1 and is connected to the target material 21 via a cable. The magnetic field device 23 is disposed on the back of the target material 21. Each coating zone 2 has a corresponding target material 21, power supply 22, and magnetic field device 23. The number of coating zones 2 is adjustable. An isolation plate 24 is provided between two adjacent coating zones 2. The conveying device 3 includes a clamp 31. A substrate 32 is fixed on the clamp 31. The target material 21 can be set according to the coating requirements of the substrate 32. The conveying device 3 drives the substrate 32 to move between the multiple coating zones 2. When the substrate 32 moves to the coating zone 2, the substrate 32 and the target material 21 are arranged opposite each other.

[0041] A partitioned multilayer coating apparatus includes a vacuum chamber 1, multiple coating zones 2, and a conveying device 3. These components work together to achieve continuous deposition of different functional coatings on the surface of a substrate 32, ensuring efficient operation and stable coating quality. The vacuum chamber 1 provides a vacuum environment for the entire partitioned multilayer coating apparatus, ensuring the coating process is carried out under high vacuum and avoiding the influence of airborne impurities on the coating quality. The vacuum chamber 1 contains multiple independent coating zones 2. Each coating zone 2 is equipped with a corresponding target 21, power supply 22, and magnetic field device 23. The power supply 22 is connected to the target 21 via a cable, providing the required current and voltage. The magnetic field device 23 is located on the back of the target 21. After vacuuming before coating, high-purity argon gas is introduced into the coating zone. Under high voltage, the high-purity argon gas is ionized into plasma. The high-energy argon ions in the plasma collide with the surface of the target 21, causing target atoms to be sputtered out. The sputtered target atoms diffuse and move to the surface of the substrate 32, gradually depositing to form a coating layer. The magnetic field enhances the density and stability of the plasma, thereby improving sputtering efficiency. After the substrate 32 completes one coating layer, the conveying device 3 moves the substrate 32 that has completed one coating layer to the next coating zone 2 for the next coating layer. This process is repeated to achieve continuous deposition of different functional coatings on the substrate 32, i.e., the surface of the metal part. The number of coating zones 2 can be adjusted according to actual operational needs to meet the coating requirements of different metal parts, thereby improving the versatility of the partitioned multilayer coating device of this application. A partition plate 24 is provided between two adjacent coating zones 2. The partition plate 24 can separate multiple coating zones 2, preventing cross-contamination between different coating materials and ensuring the independence of the coating process and the coating quality. A clamp 31 is provided on the conveying device 3. The clamp 31 is used to fix the substrate 32 to be coated, ensuring the stability of the coating process and guaranteeing the coating quality.

[0042] like Figure 3 and Figure 4 As shown, the top and bottom of the isolation plate 24 are provided with sliding blocks 241; the inner wall of the vacuum chamber 1 is provided with a sliding track 242; the sliding block 241 has a groove that matches the sliding track 242; the sliding block 241 has a groove, and the upper part of the sliding track 242 has a protrusion, the shape of the groove and the protrusion match; the outer side of the isolation plate 24 is provided with a first servo motor 243.

[0043] The top and bottom of the isolation plate 24 are provided with sliding blocks 241, which can be moved apart before the coating begins to start vacuuming and ensure the vacuum conditions of the coating environment. After the coating begins, the isolation plate 24 is closed, that is, distributed between multiple coating areas 2 to separate the multiple coating areas 2 and prevent cross-contamination between different coating materials. The outer side of the isolation plate 2 is provided with a first servo motor 243, which can ensure the precise movement of the isolation plate 24.

[0044] like Figure 3 and Figure 4 As shown, the isolation plate 24 has sealing strips 244 on two sides perpendicular to its sliding direction, and the sealing strips 244 are tightly attached to the sides of the isolation plate 24.

[0045] The isolation plate 24 has sealing strips 244 on its two sides perpendicular to its sliding direction, which are used to provide a good sealing effect when the isolation plate 24 is closed and prevent cross-contamination between different coating materials. The sealing strips 244 are made of rubber or silicone material, which can ensure sealing performance.

[0046] like Figure 1 As shown, a suction port 11 is provided on the side wall of the vacuum chamber 1; the suction port 11 is a round hole; a vacuum pump 12 is provided on the outside of the vacuum chamber 1; the suction port 11 is connected to a suction pipe 13; one end of the suction pipe 13 is connected to the vacuum chamber 1, and the other end is connected to the vacuum pump 12.

[0047] A evacuation port 11 is provided on the side wall of the vacuum chamber 1. The evacuation port 11 is connected to a vacuum pump 12 through an evacuation pipe 13. The vacuum pump 12 can be used to remove gas from the vacuum chamber 1 to form and maintain a vacuum environment. Metal parts are coated in a vacuum environment, which can reduce interference from other impurities, such as oxygen, nitrogen, and water vapor, thereby avoiding unstable film quality and achieving uniform film deposition.

[0048] like Figure 1 As shown, an observation window 14 is provided on the shell of the vacuum chamber 1.

[0049] An observation window 14 is provided on the shell of the vacuum chamber 1. The observation window 14 is made of a highly transparent material, such as quartz glass or special optical glass. It can be used to observe the process and state of the coating of metal parts inside the vacuum chamber 1, and to monitor the coating process of metal parts in real time to ensure the coating quality of metal parts.

[0050] like Figure 6 As shown, a vent 15 is provided on the shell of the vacuum chamber 1. The vent 15 is a circular hole.

[0051] The shell of the vacuum chamber 1 is provided with a vent hole 15. The vent hole 15 is used to control the entry and exit of gas to ensure that the gas environment in the vacuum chamber 1 meets the requirements of the coating process. During the coating process, a specific gas needs to be introduced as the working gas, which can be introduced through the vent hole 15. After the coating, the gas in the vacuum chamber 1 can be discharged through the vent hole 15 to restore atmospheric pressure.

[0052] like Figure 1 and Figure 5 As shown, the conveying device 3 also includes a conveying table 33, a second servo motor 34, a drive shaft 35, and a drive wheel 36; the clamp 31 is fixed to the conveying table 33 by bolts; the output shaft of the second servo motor 34 is connected to the drive shaft 35, driving the drive shaft 35 to rotate; the drive wheel 36 is mounted on the drive shaft 35; the conveying table 33 tightly surrounds the outside of the drive wheel 36; the inner side of the conveying table 33 is in contact with the surface of the drive wheel 36.

[0053] The conveying device 3 is the main component used to convey the substrate 32 to be coated. It also includes a conveying table 33, a second servo motor 34, a drive shaft 35, and a drive wheel 36. A clamp 31 is fixed on the conveying table 33 to fix the substrate 32 to be coated. The second servo motor 34 can drive the drive shaft 35 to drive, thereby driving the drive wheel 36. The conveying table 33, which is closely surrounded by the drive wheel 36, realizes the transmission, completing the transmission of the substrate 32 to be coated between different functional zones. The setting of the second servo motor 34 can ensure the precise movement of the conveying table 33 and improve the coating quality.

[0054] like Figure 6 As shown, the vacuum chamber 1 is provided with a pretreatment zone 4 at the front end where the substrate 32 enters; a partition plate 24 is provided between the pretreatment zone 4 and the vacuum chamber 1; and an activation device 41 is provided inside the pretreatment zone 4.

[0055] The pretreatment zone 4 is equipped with an activation device 41, which is a plasma cleaner. The plasma high-energy particles bombard the surface of the metal parts to remove organic pollutants and tiny particles from the surface of the metal parts, while activating the surface of the metal parts and improving the adhesion of the coating on the metal parts.

[0056] like Figure 7 As shown, a post-processing zone 5 is also provided at the end of the vacuum chamber 1; an isolation plate 24 is provided between the vacuum chamber 1 and the post-processing zone 5; the post-processing zone 5 is provided with an air-cooling device 51; the air-cooling device 51 includes multiple air outlets 511, a temperature sensor 512 and a fan; the multiple air outlets 511 are located above the substrate 32; the air outlets 511 are connected to the fan through pipes; the temperature sensor 512 is located close to the substrate 32; the fan is located outside the post-processing zone 5.

[0057] After the metal parts are coated, the substrate needs to be properly cooled to prevent thermal stress from affecting the film layer and to ensure the stability and adhesion of the coating. An air-cooling device 51 is installed inside the post-processing zone 5. This device uses airflow to reduce the temperature of the coated metal parts. The air-cooling device 51 has multiple air outlets 511 to ensure uniform air distribution and thus effective cooling. In addition, a temperature sensor 512 is installed to monitor the temperature near the substrate in real time to ensure cooling efficiency. If the temperature sensor 512 detects that the substrate temperature is too high, the fan speed is increased to accelerate the cooling process; if the temperature is too low, the fan speed is reduced to save energy.

[0058] like Figure 2 As shown, the coating area 2 also includes a back plate 25; the back plate 25 is a thin plate fixed on the inner wall of the coating area 2; the target material 21 is fixed on the back plate 25.

[0059] A back plate 25 is provided on the inner wall of the coating area 2. The back plate 25 is used to install the target material 21. The target material 21 is fixed to the back plate 25 by bolts to ensure the stability of the target material 21 during the coating process and improve the utilization rate and coating efficiency of the target material 21.

Claims

1. A partitioned multi-layer coating device, characterized by: The utility model relates to a vacuum coating device, including vacuum chamber (1), a plurality of film coating area (2) and conveying device (3), a plurality of film coating area (2) are arranged in vacuum chamber (1), a plurality of film coating area (2) are adjacent arrangement, film coating area (2) include target material (21), power supply (22) and magnetic field device (23), target material (21) is fixed on the inner wall of film coating area (2), power supply (22) is installed in the outside of vacuum chamber (1), power supply (22) is connected with target material (21) through cable, magnetic field device (23) is arranged at the back of target material (21), a plurality of film coating area (2) are equipped with corresponding target material (21), power supply (22) and magnetic field device (23), the number of film coating area (2) can be adjusted, the adjacent two film coating area (2) between are equipped with isolation board (24), and conveying device (3) includes clamp (31), clamp (31) is fixed with base material (32), and conveying device (3) drives base material (32) and moves between a plurality of film coating area (2), when base material (32) moves to film coating area (2), base material (32) and target material (21) are relatively arranged.

2. The partitioned multi-layer coating device according to claim 1, wherein: The top and bottom of the isolation board (24) are provided with sliding blocks (241), the inner wall of the vacuum chamber (1) is provided with sliding rails (242), the sliding blocks (241) cooperate with the sliding rails (242), and the outer side of the isolation board (24) is provided with a first servo motor (243).

3. The zoned multi-layer coating apparatus of claim 1, wherein: The isolation board (24) is provided with sealing strips (244) on two sides perpendicular to the sliding direction thereof.

4. The zoned multi-layer coating apparatus of claim 1, wherein: The side wall of the vacuum chamber (1) is provided with an air exhaust hole (11), the outer side of the vacuum chamber (1) is provided with a vacuum pump (12), the air exhaust hole (11) is connected with an air exhaust pipe (13), one end of the air exhaust pipe (13) is connected with the vacuum chamber (1), and the other end is connected with the vacuum pump (12).

5. The zoned multi-layer coating apparatus of claim 1, wherein: The housing of the vacuum chamber (1) is provided with an observation window (14).

6. The zoned multi-layer coating apparatus of claim 1, wherein: The housing of the vacuum chamber (1) is provided with a ventilation hole (15).

7. The zoned multi-layer coating apparatus of claim 1, wherein: The conveying device (3) further includes a conveying table (33), a second servo motor (34), a transmission shaft (35), and a transmission wheel (36), the clamp (31) is fixed on the conveying table (33), the output shaft of the second servo motor (34) is connected with the transmission shaft (35) to drive the transmission shaft (35) to rotate, the transmission wheel (36) is installed on the transmission shaft (35), the conveying table (33) is closely surrounded on the outer side of the transmission wheel (36), and the inner side surface of the conveying table (33) is in contact with the surface of the transmission wheel (36).

8. The zoned multi-layer coating apparatus of claim 1, wherein: The vacuum chamber (1) is further provided with a pretreatment area (4) at the front end where the base material (32) enters, an isolation board (24) is arranged between the pretreatment area (4) and the vacuum chamber (1), and the inside of the pretreatment area (4) is provided with an activation device (41).

9. The zoned multi-layer coating apparatus of claim 1, wherein: The vacuum chamber (1) is also provided with a post-processing area (5); an isolation plate (24) is arranged between the vacuum chamber (1) and the post-processing area (5); the post-processing area (5) is provided with an air cooling device (51); the air cooling device (51) comprises a plurality of air supply openings (511), a temperature sensor (512) and a fan; the plurality of air supply openings (511) are arranged above the substrate (32); the air supply openings (511) are connected with the fan through pipelines; the temperature sensor (512) is arranged close to the substrate (32); and the fan is arranged outside the post-processing area (5).

10. The zoned multi-layer coating apparatus of claim 1, wherein: The coating area (2) further comprises a back plate (25); the back plate (25) is fixed on the inner wall of the coating area (2); and the target material (21) is fixed on the back plate (25).

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