Fixing piece of photomask box and photomask box

Abstract

The utility model discloses a fixing piece of a photomask box and the photomask box. The fixing piece comprises a first fixing unit, a second fixing unit and a mounting seat, the mounting seat and the second fixing unit are connected with the first fixing unit; the mounting seat is used for fixing the first fixing unit and the second fixing unit in the photomask box, and the mounting seat has two mounting modes of forward mounting and reverse mounting; when the mounting seat is mounted in the forward direction, the first fixing unit provides supporting and fixing effects for the photomask; when the mounting seat is reversely mounted, the second fixing unit provides supporting and fixing effects for the photomask; the fixing piece can be installed in a photomask box in the forward direction and the reverse direction, the photomask is fixed through the first fixing unit or the second fixing unit according to needs, the fixing and supporting requirements of different users can be met, and meanwhile the fixing piece can be produced in advance and installed in the forward direction and the reverse direction according to needs before leaving a factory; the production efficiency is improved; and the manufacturing cost is reduced.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing technology, and in particular to a photomask holder and a photomask holder. Background Technology

[0002] Photomasks are pattern transfer tools or masters in the microelectronics manufacturing process. Even slight vibrations and contaminants such as dust can damage photomasks, so they need to be stored and transported in photomask cases. Inside the photomask case, to prevent damage caused by shaking, a fixing device is installed. After the photomask case is closed, the fixing device secures the photomask inside, preventing damage caused by shaking during handling.

[0003] Currently, there are two commonly used photomask fixing components on the market: one uses a beveled structure for photomask fixing, and the other uses an S-shaped swan-head structure. The beveled structure uses one bevel and one contact surface to fix the photomask after the photomask box is closed, while the S-shaped swan-head structure uses two contact surfaces to fix the photomask after the photomask box is closed. Different photomask manufacturers choose one fixing method based on their own needs. Photomask box suppliers need to produce and configure the corresponding fixing components according to the photomask manufacturers' requirements. Different fixing components require two sets of production equipment, resulting in high production costs. Furthermore, it's impossible to know the customer's choice in advance; production can only proceed after the requirements are determined, leading to low production efficiency. Otherwise, producing fixing components in advance can result in mismatched components, stockpiling resources, and further increasing production costs. Summary of the Invention

[0004] In order to reduce the production cost of photomask boxes and improve production efficiency, this utility model proposes a fixing component for photomask boxes and a photomask box.

[0005] To achieve the above objectives, this utility model provides a fixing component for a photomask box, comprising: a single-sided fixing unit, a multi-sided fixing unit, and a mounting base; both the mounting base and the second fixing unit are connected to the first fixing unit; the mounting base is used to fix the first fixing unit and the second fixing unit inside the photomask box, and the mounting base has two installation methods: forward installation and reverse installation; when the mounting base is installed forward, the first fixing unit provides support and fixing for the photomask; when the mounting base is installed reverse, the second fixing unit provides support and fixing for the photomask.

[0006] Optionally, the first fixing unit is a single-sided fixing unit, providing a support surface for the photomask; the second fixing unit is a multi-sided fixing unit, providing multiple support surfaces for the photomask.

[0007] Optionally, the first fixing unit is an inclined body; one end of the inclined body is connected to the second fixing unit, and the other end is connected to the mounting base.

[0008] Optionally, the second fixing unit is an S-shaped elastomer, one end of which is connected to one end of the first fixing unit, and the other end is a barb.

[0009] Optionally, one end of the barb body contacts the upper or lower surface of the photomask as a first support surface, and the side of the other end of the barb body contacts the side of the photomask as a second support surface.

[0010] Optionally, the second fixing unit is a C-shaped elastomer, with the two ends of the C-shaped elastomer opening serving as the first support surface and the second support surface, respectively, and the middle section of the C-shaped elastomer connected to the first fixing unit.

[0011] Optionally, the end of the C-shaped elastomer opening near the mounting base is longer than the end away from the mounting base, for contacting the upper or lower surface of the photomask and serving as a first support surface; the end of the C-shaped elastomer opening away from the mounting base is used to contact the side of the photomask and serve as a second support surface.

[0012] Optionally, the fastener further includes a reinforcing rib; the reinforcing rib is disposed on the fixing base and is used to support the first fixing unit or the second fixing unit.

[0013] On the other hand, this utility model provides a photomask box, including: a fixing member, a positioning member, a cover, and a box body; the accommodating space of the cover and the box body is used to store the photomask; the fixing member and the positioning member are disposed at the corners of the cover and the box body; the fixing member is used to support and fix the photomask; the positioning member is used to position the photomask; wherein the fixing members are staggered at different corners of the cover and the box body.

[0014] Optionally, it also includes: a mounting post and a marker; the mounting base of the fastener is mounted on the mounting post, and the mounting base can be mounted on the mounting post in either a forward or reverse direction; the marker is disposed on the surface of the photomask box for marking the installation direction of the mounting base.

[0015] This utility model has the following beneficial effects:

[0016] The fixing component of this utility model is provided with a first fixing unit and a second fixing unit, and can be installed in the photomask box in both forward and reverse directions. The photomask can be fixed and supported by the first fixing unit or the second fixing unit as needed, so that the photomask can be fixed and supported in multiple ways to meet the fixing and support needs of different users. At the same time, it also allows photomask box manufacturers to produce the fixing component in advance and install it in both forward and reverse directions according to user needs before leaving the factory. The fixing component, as an accessory, can be produced in advance to avoid resource waste, improve production efficiency and reduce manufacturing costs.

[0017] The second fixing unit of the fastener of this utility model is a C-shaped elastomer. The C-shaped elastomer has a simpler structure and manufacturing process than the S-shaped elastomer and can reduce manufacturing costs.

[0018] The fixing component of this utility model has reinforcing ribs 14 on the fixing base to support the first fixing unit or the second fixing unit, thereby improving the strength and rigidity of the first fixing unit or the second fixing unit to improve the stability of the first fixing unit and the second fixing unit and prevent the photomask from shaking in the photomask box.

[0019] The photomask box of this utility model has markings on its surface to indicate whether the installation direction of the mounting base is forward or reverse, so that the photomask box manufacturer can install the fixing parts according to the markings. Attached Figure Description

[0020] Figure 1 This is a structural schematic diagram of the fixing component according to Embodiment 1 of this utility model;

[0021] Figure 2 This is a structural schematic diagram of the fixing component in Embodiment 2 of this utility model;

[0022] Figure 3 This is a structural schematic diagram of the fixing component in Embodiment 3 of this utility model;

[0023] Figure 4 This is a structural schematic diagram of the fixing component in Embodiment 4 of this utility model;

[0024] Figure 5 This is a schematic diagram of the photomask box structure with the fixing component installed in the forward direction according to this utility model;

[0025] Figure 6 This is a schematic diagram of the photomask box structure with the fixing component installed in the reverse direction according to this utility model.

[0026] Explanation of icon numbers:

[0027] 1. Fixing component; 11. First fixing unit; 12. Second fixing unit; 121. First support surface; 122. Second support surface; 13. Mounting base; 14. Reinforcing rib; 2. Light cover; 3. Positioning component; 4. Cover; 5. Box body. Detailed Implementation

[0028] To make the above-mentioned objects, features, and advantages of this utility model more apparent and understandable, the specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a full understanding of this utility model. However, this utility model can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this utility model. Therefore, this utility model is not limited to the specific embodiments disclosed below.

[0029] Example 1, refer to Figure 1 , 5 -6, a fixing component 1 for a photomask box, comprising: a first fixing unit 11, a second fixing unit 12, and a mounting base 13; the mounting base 13 and the second fixing unit 12 are both connected to the first fixing unit 11; the mounting base 13 is used to fix the first fixing unit 11 and the second fixing unit 12 inside the photomask box, and the mounting base 13 has two installation methods: forward installation and reverse installation; when the mounting base 13 is installed forward, the first fixing unit provides support and fixing for the photomask 2; when the mounting base 13 is installed reverse, the second fixing unit provides support and fixing for the photomask.

[0030] Furthermore, the first fixing unit 11 is a single-sided fixing unit, providing a support surface for the photomask 2; the second fixing unit 12 is a multi-sided fixing unit, providing multiple support surfaces for the photomask 2.

[0031] Furthermore, the first fixing unit 11 is an inclined body, one end of which is connected to the second fixing unit, and the other end is connected to the mounting base (13). The inclined surface of the inclined body serves as a support surface for fixing and supporting the photomask 2, and contacts the photomask 2 to provide support force for the photomask.

[0032] Furthermore, the second fixing unit 12 is a curved elastic body.

[0033] Furthermore, the second fixing unit 12 is an S-shaped elastic body, one end of which is connected to one end of the first fixing unit 11, and the other end is a barb. One end of the barb contacts the upper or lower surface of the photomask 2 as a first support surface 121, and the other side of the barb contacts the side of the photomask 2 as a second support surface 122. The other end of the first fixing unit 11 is connected to the mounting base 13.

[0034] Example 2, refer to Figure 2 The difference from Embodiment 1 is that the second fixing unit 12 is a C-shaped elastomer, with its two ends serving as a first support surface 121 and a second support surface 122, respectively. The middle section of the C-shaped elastomer is connected to one end of the first fixing unit 11, and the other end of the first fixing unit 11 is connected to the mounting base 13. The end of the C-shaped elastomer opening near the mounting base 13 is longer than the end away from the mounting base 13. The end of the C-shaped elastomer opening near the mounting base 13 contacts the upper or lower surface of the photomask 2 and serves as the first support surface 121, while the end of the C-shaped elastomer opening away from the mounting base 13 contacts the side of the photomask 2 and serves as the second support surface 122. The C-shaped elastomer structure is simpler than the S-shaped elastomer structure, and the manufacturing process is simpler, which can reduce manufacturing costs.

[0035] Examples 3 and 4, refer to Figure 3-4 The difference from Embodiment 1 or Embodiment 2 is that the fixing member 1 further includes a reinforcing rib 14; the reinforcing rib 14 is disposed on the fixing base 13 to support the first fixing unit 11 or the second fixing unit 12, thereby improving the strength and rigidity of the first fixing unit 11 or the second fixing unit 12, so as to improve the stability of the first fixing unit 11 and the second fixing unit 12 and prevent the photomask from shaking in the photomask box.

[0036] like Figure 5-6 The image shows a photomask box, comprising: a fixing member 1, a positioning member 3, a cover 4, and a box body 5; the accommodating space of the cover 4 and the box body 5 is used to store the photomask 2; the fixing member 1 and the positioning member 3 are disposed at the corners of the cover 4 and the box body 5; the fixing member 1 is used to support and fix the photomask 2; the positioning member 3 is used to position the photomask; wherein the fixing members 1 are staggered at different corners of the cover 4 and the box body 5.

[0037] Furthermore, the photomask box also includes a mounting post, on which the mounting base 13 of the fixing member 1 is mounted.

[0038] Furthermore, the mounting base 13 can be installed on the mounting post in both forward and reverse orientations. When the mounting base 13 is installed in the forward orientation on the mounting post, the first fixing unit 11 of the fixing member 1 fixes and supports the photomask 2; when the mounting base 13 is installed in the reverse orientation on the mounting post, the second fixing unit 12 of the fixing member 1 fixes and supports the photomask 2.

[0039] Furthermore, there are 8 fixing members 1 and 16 positioning members 3. One fixing member 1 is located at each corner of the cover 4 and the box 5, and two positioning members 3 are located at each corner of the cover 4 and the box 5. The fixing member 1 is positioned between two positioning members 3. In use, when the cover 4 and the box 5 are closed, the fixing members 1 support and fix the photomask 2. The two staggered fixing members 1 located at corresponding corners of the cover 4 and the box 5 exert force on different sides of the same corner of the photomask 2. The positioning members 2 located at each corner of the cover 4 and the box 5 position the sides of each corner of the photomask 2, fixing the photomask 2 inside the photomask box and preventing damage caused by shaking or displacement during transportation or handling.

[0040] Furthermore, the photomask box also includes: markers; the markers are disposed on the surface of the photomask box and are used to mark whether the mounting direction of the mounting base 13 is positive or negative. In this embodiment, the mounting direction of the mounting base 13 is marked by the number of markers.

[0041] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0042] The embodiments described above are merely illustrative of several implementations of this utility model, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of this utility model patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this utility model, and these all fall within the protection scope of this utility model. Therefore, the protection scope of this utility model patent should be determined by the appended claims.

Claims

1. A fixing component (1) for a photomask box, characterized in that, include: The device comprises a first fixing unit (11), a second fixing unit (12), and a mounting base (13). The mounting base (13) and the second fixing unit (12) are both connected to the first fixing unit (11). The mounting base (13) is used to fix the first fixing unit (11) and the second fixing unit (12) inside the photomask box. The mounting base (13) has two installation methods: forward installation and reverse installation. When the mounting base (13) is installed forward, the first fixing unit provides support and fixation for the photomask (2). When the mounting base (13) is installed in reverse, the second fixing unit provides support and fixation for the photomask.

2. The fastener (1) according to claim 1, characterized in that, The first fixing unit (11) is a single-sided fixing unit, providing a support surface for the photomask (2); the second fixing unit (12) is a multi-sided fixing unit, providing multiple support surfaces for the photomask (2).

3. The fastener according to claim 1, characterized in that, The first fixing unit (11) is an inclined body; one end of the inclined body is connected to the second fixing unit, and the other end is connected to the mounting base (13).

4. The fastener (1) according to any one of claims 1-3, characterized in that, The second fixing unit (12) is an S-shaped elastic body. One end of the S-shaped elastic body is connected to one end of the first fixing unit (11), and the other end is a barb.

5. The fastener (1) according to claim 4, characterized in that, One end of the barb body contacts the upper or lower surface of the photomask (2) as a first support surface (121), and the side of the other end of the barb body contacts the side of the photomask (2) as a second support surface (122).

6. The fastener according to any one of claims 1-3, characterized in that, The second fixing unit (12) is a C-shaped elastomer, with the two ends of the opening of the C-shaped elastomer serving as the first support surface (121) and the second support surface (122) respectively, and the middle section of the C-shaped elastomer is connected to the first fixing unit (11).

7. The fastener (1) according to claim 6, characterized in that, The C-shaped elastomer opening is longer at the end near the mounting base (13) than at the end away from the mounting base (13), and is used to contact the upper or lower surface of the photomask (2) and serve as a first support surface (121); the C-shaped elastomer opening at the end away from the mounting base (13) is used to contact the side of the photomask (2) and serve as a second support surface (122).

8. The fastener (1) according to any one of claims 1-3, characterized in that, The fastener (1) further includes a reinforcing rib (14); the reinforcing rib (14) is disposed on the mounting base (13) and is used to support the first fixing unit (11) or the second fixing unit (12).

9. A photomask box, characterized in that, include: The fixing member (1), positioning member (3), cover (4), and box (5) as described in any one of claims 1-8; the accommodating space of the cover (4) and the box (5) is used to store the photomask (2); the fixing member (1) and the positioning member (3) are disposed at the corners of the cover (4) and the box (5); the fixing member (1) is used to support and fix the photomask (2); the positioning member (3) is used to position the photomask; wherein the fixing members (1) at the corresponding corners of the cover (4) and the box (5) are staggered.

10. The photomask box according to claim 8, characterized in that, Also includes: Mounting post and marker; the mounting base (13) of the fastener (1) is mounted on the mounting post, and the mounting base (13) can be mounted on the mounting post in either the forward or reverse direction; the marker is set on the surface of the photomask box to mark the mounting direction of the mounting base (13).

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