High-precision indirect alignment mechanism

Abstract

The utility model discloses a high-precision indirect alignment mechanism, which relates to the technical field of chip production and comprises a lower bottom plate, a lower alignment platform component and a manipulator are mounted on the lower bottom plate, and a lower platform X-axis conveying mechanism is mounted between the lower bottom plate and the lower alignment platform component; supporting stand columns are fixedly installed on the lower bottom plate, an upper supporting plate is fixedly installed at the upper ends of the supporting stand columns, an upper alignment platform assembly is installed on the bottom side of the upper supporting plate, and an upper platform X-axis conveying mechanism is installed between the upper supporting plate and the upper alignment platform assembly. The lower bottom plate and the upper supporting plate are each provided with a feeding lens assembly and an alignment lens assembly. The positions of the feeding lens assembly, the alignment lens assembly and the alignment platform assembly can be adjusted through the control system, so that the visual inspection system can obtain an optimal position image, accurate feeding and accurate alignment fitting are achieved, the high-degree-of-freedom design is achieved, the device is suitable for glass and crystal grains of various sizes, and the production efficiency is improved. And the centering alignment of the materials and the alignment and attachment of various positions are realized.

Description

TECHNICAL FIELD

[0001] The utility model relates to chip production technical field especially is related to a high accuracy indirect alignment mechanism. BACKGROUND

[0002] Chips play a vital role in electronic products, especially in terms of operation and calculation. The structure of the chip is complex and delicate, and its manufacturing process involves multiple complex links, among which the alignment and bonding of glass and wafer is a crucial link, which not only involves the protection of the wafer, but also involves positioning, precision and efficiency in the processing process. Therefore, the research on high-precision alignment mechanism is of great significance to the production of chips.

[0003] The existing technologies for the study of alignment mechanism at present include the following:

[0004] 1. About: an automatic alignment and bonding machine (announcement number: CN221008036U), a positioning mechanism and a laminator (announcement number: CN220894689U), a vacuum laminator with positioning function (announcement number: CN218675574U); among the above-mentioned existing technologies, the automatic positioning is realized by rotating the threaded rod to drive the push plate to move inward, which is only suitable for the alignment and bonding in the production process of screen, and the pure mechanical alignment method is easily affected by the machining error and assembly error of parts;

[0005] 2. About the paper published by the author Yang Zixia: design and research of alignment platform in touch screen laminating equipment (online publication date: 2020.08.25), which is based on the principle of visual alignment system in touch screen laminating equipment, and analyzes the advantages and disadvantages of XYθ and UVW two kinds of alignment platform, verifies the feasibility and correctness of the design of alignment platform, which is only suitable for the alignment and bonding in the production process of touch screen;

[0006] 3. About an alignment laminator for display processing (announcement number: CN219997774U) in the existing patent, which is provided with a threaded rod, a linear guide and an electric push rod on the upper surface, so that the upper surface has the movement ability in XYZ three directions, and the lower surface can rotate to realize the alignment and bonding of display panel, which cannot realize automatic alignment and needs to rely on manual observation of position, and is only suitable for the alignment and bonding in the production process of display screen;

[0007] 4. About a CG alignment mechanism for liquid crystal module full laminator (announcement number: CN220121106U) in the existing patent, which can only be used for the alignment and bonding in the production process of liquid crystal module, and has small application scope;

[0008] 5. Regarding a paper box alignment and bonding machine in an existing patent (publication number: CN219727329U), its mechanism focuses on production efficiency, does not set alignment accuracy, and is only for the alignment and bonding of paper boxes and cardboard with adhesive paper.

[0009] 6. Regarding the high-precision automatic flip-moving alignment mechanism in the existing patent (publication number: CN2586703Y), its mechanism is only for bonding acousto-optic devices;

[0010] 7. The paper published by author Tang Yonglong discloses: Research on key technologies for high-precision assembly and accurate alignment of micro-devices. It studies the detection accuracy problem, feature extraction and recognition technology, calibration technology and overall technology of high-precision coaxial optical alignment detection.

[0011] 8. Regarding the high-precision substrate pre-alignment mechanism disclosed by the author Dong Tongshe in the journal, it introduces the design concept, mechanism composition, working principle and accuracy analysis of the high-precision substrate pre-alignment mechanism;

[0012] 9. Regarding a high-precision alignment device for wafer lithography (publication number: CN112230525A) in the prior art, it uses a tapered mechanism on the upper and lower outer surfaces to achieve the purpose of wafer stage alignment. This method can adjust the spatial limitations, but the positional accuracy is overly dependent on the placement accuracy of the previous step.

[0013] In summary, most alignment mechanisms are purely mechanical alignment structures, which are applicable to a limited range of product specifications, have non-adjustable alignment positions, and are easily affected by the machining and assembly precision of the parts. Therefore, there is an urgent need to design an alignment and bonding mechanism with high applicability, high alignment precision, and adjustable alignment position to solve the above problems. Utility Model Content

[0014] To overcome the shortcomings mentioned above, this utility model provides a technical solution that can solve the above problems.

[0015] A high-precision indirect alignment mechanism includes a lower base plate, on which a lower alignment platform assembly and a robot arm are mounted, and a lower platform X-axis conveying mechanism is installed between the lower base plate and the lower alignment platform assembly.

[0016] A number of support columns are fixedly installed on the lower base plate, and an upper support plate is fixedly installed on the upper end of the support columns. An upper alignment platform assembly is installed on the bottom side of the upper support plate. An upper platform X-axis conveying mechanism is installed between the upper support plate and the upper alignment platform assembly. The robot arm picks up and puts materials between the lower alignment platform assembly and the upper alignment platform assembly.

[0017] The lower bottom plate and the upper support plate are both provided with a feeding lens assembly and a positioning lens assembly, and the feeding lens assemblies and the positioning lens assemblies on the upper and lower sides are arranged in a one-to-one correspondence.

[0018] Further, the lower positioning platform assembly comprises a lower platform bottom plate, a lower platform rotating mechanism, a lower platform Y-axis conveying mechanism, a lower platform middle plate and a lower vacuum platform group.

[0019] The lower platform X-axis conveying mechanism drives the lower platform bottom plate to slide back and forth along the X-axis direction, the lower platform Y-axis conveying mechanism is fixedly installed on the middle part of the upper side of the lower platform bottom plate, and the lower platform Y-axis conveying mechanism drives the lower platform middle plate to move along the Y-axis direction.

[0020] The lower platform rotating mechanism is provided with two, and the two lower platform rotating mechanisms are both fixedly installed on the lower platform bottom plate, the bottom of the lower platform middle plate is rotatably and fittingly installed on the lower platform bottom plate, and the two lower platform rotating mechanisms drive the lower platform middle part to rotate on the lower platform bottom plate when operating.

[0021] Further, the upper positioning platform assembly comprises an upper platform bottom plate, an upper platform support vertical plate, a strip-shaped UV curing lamp and an upper vacuum platform group.

[0022] The upper platform X-axis conveying mechanism drives the upper platform bottom plate to move along the X-axis direction, the upper platform support vertical plate is provided with at least two, the upper vacuum platform group is fixedly installed on the bottom side of the upper platform bottom plate through the at least two upper platform support vertical plates, the strip-shaped UV curing lamp is fixedly installed on the upper side of the upper vacuum platform group, and the strip-shaped UV curing lamp is arranged to irradiate the upper vacuum platform group.

[0023] Further, the upper vacuum platform group and the lower vacuum platform group are the same in structure, and both comprise a positioning vacuum support plate, a positioning vacuum plate and a vacuum suction nozzle, the positioning vacuum plate is installed on the upper positioning platform assembly and the lower positioning platform assembly through the positioning vacuum support plate, one or more suction nozzle holes are formed on the positioning vacuum plate, and one or more vacuum suction nozzles are arranged and fixedly installed in the suction nozzle holes in a one-to-one correspondence.

[0024] Further, the positioning vacuum support plate is provided with target glass clamps fixedly installed on both sides, and the target glass clamps are flush with the positioning vacuum plate.

[0025] Further, the positioning vacuum plate of the upper vacuum platform group is formed with a strip-shaped through groove, and the strip-shaped UV curing lamp irradiates the material piece through the strip-shaped through groove.

[0026] Further, the positioning vacuum plate is formed with a plurality of air holes located outside the suction nozzle holes.

[0027] Further, the first lifting mechanism is fixedly installed on the middle plate of the lower platform, and drives the vacuum suction nozzle in the lower vacuum platform group to move up and down.

[0028] Further, the feeding lens assembly comprises a feeding X-axis conveying mechanism, a feeding Y-axis conveying mechanism, a lens support, a third lifting mechanism, a first lens clamp and a feeding lens.

[0029] The feeding X-axis conveying mechanism of the feeding lens assembly is fixedly installed on the lower bottom plate and the upper support plate respectively, the feeding X-axis conveying mechanism drives the feeding Y-axis conveying mechanism to move along the X-axis direction, the feeding Y-axis conveying mechanism drives the lens support to move along the Y-axis direction, the third lifting mechanism is fixedly installed on the lens support, the third lifting mechanism drives the first lens clamp to move up and down, and the feeding lens is fixedly installed on the first lens clamp.

[0030] Further, the alignment lens assembly comprises an alignment X-axis conveying mechanism, an alignment Y-axis conveying mechanism, a fourth lifting mechanism, a support seat, a support block, a second lens clamp and an alignment lens.

[0031] The support seat of the alignment lens assembly is fixedly installed on the lower bottom plate and the upper support plate respectively, the alignment X-axis conveying mechanism is fixedly installed on the support seat, the alignment X-axis conveying mechanism drives the alignment Y-axis conveying mechanism to move along the X-axis direction, the alignment Y-axis conveying mechanism drives the support block to move along the Y-axis direction, the fourth lifting mechanism is fixedly installed on the support block, the fourth lifting mechanism drives the second lens clamp to move up and down, and the alignment lens is fixedly installed in the second lens clamp.

[0032] Compared with the prior art, the feeding lens assembly, the alignment lens assembly and the alignment platform assembly can be adjusted through the control system, so that the vision detection system can obtain the best position image, precise feeding and precise alignment and bonding are realized, and due to the high degree of freedom design, the glass and the crystal grain of various sizes can be applied, in addition to the center alignment of the material piece, various position alignment and bonding can be performed.

[0033] Additional aspects and advantages of the present application will be given in part in the following description, some will become apparent from the following description, or will be learned by practice of the present application. BRIEF DESCRIPTION OF DRAWINGS

[0034] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings needed to be used in the embodiments or prior art description. Obviously, the drawings in the following description are only some embodiments of the present application, and for those skilled in the art, other drawings can also be obtained from these drawings without creative labor.

[0035] Figure 1 is a structural schematic diagram of the lower alignment platform assembly.

[0036] Figure 2 is a structural schematic diagram of the lower alignment platform assembly.

[0037] Figure 3 is a structural schematic diagram of the upper alignment platform assembly.

[0038] Figure 4 is a structural schematic diagram of the upper alignment platform assembly.

[0039] Figure 5 is a structural schematic diagram of the alignment lens assembly.

[0040] Figure 6 is a structural schematic diagram of the upper vacuum platform group.

[0041] Figure 7 is a structural schematic diagram of the lower vacuum platform group. Figure 6

[0042] Figure 8 is a structural schematic diagram of the lower vacuum platform group.

[0043] Figure 9 is a structural schematic diagram of the lower vacuum platform group. Figure 8

[0044] Figure 10 is a structural schematic diagram of the lower vacuum platform group.

[0045] Figure 11 is a structural schematic diagram of the lower vacuum platform group. Figure 9

[0046] is a structural schematic diagram of the lower vacuum platform group. Figure 12

[0047] Figure 13 is a structural schematic diagram of the lower vacuum platform group. Figure 12

[0048] Figure 14 is a structural schematic diagram of the lower vacuum platform group. Figure 12

[0049] ​​​​​As shown in the figure: 1, the lower bottom plate; 2, the lower alignment platform assembly; 21, the lower platform bottom plate; 22, the lower platform rotating mechanism; 23, the lower platform Y-axis conveying mechanism; 24, the lower platform middle plate; 25, the lower vacuum platform group; 3, the mechanical arm; 4, the lower platform X-axis conveying mechanism; 5, the supporting column; 6, the upper supporting plate; 7, the upper alignment platform assembly; 71, the upper platform bottom plate; 72, the upper platform supporting vertical plate; 73, the strip-shaped UV curing lamp; 74, the upper vacuum platform group; 8, the upper platform X-axis conveying mechanism; 9, the feeding lens assembly; 91, the feeding X-axis conveying mechanism; 92, the feeding Y-axis conveying mechanism; 93, the lens support; 94, the third lifting mechanism; 95, the first lens clamp; 96, the feeding lens; 10, the alignment lens assembly; 101, the alignment X-axis conveying mechanism; 102, the alignment Y-axis conveying mechanism; 103, the fourth lifting mechanism; 104, the supporting seat; 105, the supporting block; 106, the second lens clamp; 107, the alignment lens; 11, the alignment vacuum supporting plate; 12, the alignment vacuum plate; 13, the vacuum nozzle; 14, the nozzle hole; 15, the target glass clamp; 16, the air hole; 17, the first lifting mechanism; 18, the second lifting mechanism; 19, the strip-shaped through groove. DETAILED DESCRIPTION

[0050] The technical solutions of the present application will be clearly and completely described below with reference to the drawings. Obviously, the described embodiments are only some of the embodiments of the present application, not all of the embodiments.

[0051] The components of the embodiments of the present application generally described and shown in the accompanying drawings can be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of the present application provided in the accompanying drawings is not intended to limit the scope of the claimed application, but only represents selected embodiments of the present application.

[0052] Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor are within the scope of protection of the present application.

[0053] In the description of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and therefore cannot be understood as indicating or implying that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application. In addition, the terms "first", "second", "third" are only for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0054] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0055] Example 1, as Figures 1-14 As shown, a high-precision indirect alignment mechanism of this utility model includes a lower base plate 1, on which a lower alignment platform assembly 2 and a robot arm 3 are mounted, and a lower platform X-axis conveying mechanism 4 is installed between the lower base plate 1 and the lower alignment platform assembly 2.

[0056] A plurality of support columns 5 are fixedly installed on the lower base plate 1. An upper support plate 6 is fixedly installed on the upper end of the plurality of support columns 5. An upper alignment platform assembly 7 is installed on the bottom side of the upper support plate 6. An upper platform X-axis conveying mechanism 8 is installed between the upper support plate 6 and the upper alignment platform assembly 7. The robot arm 3 picks up and puts materials between the lower alignment platform assembly 2 and the upper alignment platform assembly 7.

[0057] The lower base plate 1 and the upper support plate 6 are each equipped with a loading lens assembly 9 and a positioning lens assembly 10, and the loading lens assembly 9 and the positioning lens assembly 10 on the upper and lower sides are arranged in a vertically corresponding manner.

[0058] Furthermore: the lower alignment platform assembly 2 includes a lower platform base plate 21, a lower platform rotation mechanism 22, a lower platform Y-axis conveying mechanism 23, a lower platform middle plate 24, and a lower vacuum platform assembly 25;

[0059] The lower platform X-axis conveying mechanism 4 drives the lower platform base plate 21 to slide back and forth along the X-axis direction, and the lower platform Y-axis conveying mechanism 23 is fixedly installed in the middle of the upper side of the lower platform base plate 21, and the lower platform Y-axis conveying mechanism 23 drives the lower platform middle plate 24 to move along the Y-axis direction.

[0060] There are two lower platform rotating mechanisms 22, and both lower platform rotating mechanisms 22 are fixedly installed on the lower platform base plate 21. The bottom of the lower platform middle plate 24 is rotatably installed on the lower platform base plate 21. When the two lower platform rotating mechanisms 22 are in operation, they drive the middle part of the lower platform to rotate on the lower platform base plate 21.

[0061] Furthermore: the upper alignment platform assembly 7 includes an upper platform base plate 71, an upper platform support plate 72, a strip UV curing lamp 73, and an upper vacuum platform assembly 74;

[0062] The upper platform X-axis conveying mechanism 8 drives the upper platform bottom plate 71 to move along the X-axis direction. The upper platform support stand 72 is provided with at least two. The upper vacuum platform group 74 is fixedly installed on the bottom side of the upper platform bottom plate 71 through the at least two upper platform support stands 72. The strip-shaped UV curing lamp 73 is fixedly installed on the upper side of the upper vacuum platform group 74, and the strip-shaped UV curing lamp 73 is arranged to irradiate the upper vacuum platform group 74.

[0063] Further, the upper vacuum platform group 74 and the lower vacuum platform group 25 are the same in structure, and each includes the alignment vacuum support plate 11, the alignment vacuum plate 12, and the vacuum suction nozzle 13. The alignment vacuum plate 12 is installed on the upper alignment platform assembly 7 and the lower alignment platform assembly 2 through the alignment vacuum support plate 11. One or more suction nozzle holes 14 are formed on the alignment vacuum plate 12. The vacuum suction nozzle 13 is provided with one or more, and the vacuum suction nozzle 13 is fixedly installed in the suction nozzle hole 14 one by one.

[0064] Further, the target glass clamp 15 is fixedly installed on both sides of the alignment vacuum support plate 11, and the target glass clamp 15 is flush with the alignment vacuum plate 12.

[0065] Further, the strip-shaped through groove 19 is formed on the alignment vacuum plate 12 of the upper vacuum platform group 74. The strip-shaped UV curing lamp 73 irradiates the workpiece through the strip-shaped through groove 19.

[0066] Further, a plurality of air holes 16 are formed on the alignment vacuum plate 12, and the air holes 16 are located on the outer side of the suction nozzle hole 14.

[0067] Further, the first lifting mechanism 17 is fixedly installed on the lower platform middle plate 24, and drives the vacuum suction nozzle 13 in the lower vacuum platform group 25 to move up and down. The second lifting mechanism 18 is fixedly installed on the side edge of the upper platform support stand 72 of the upper alignment platform assembly 7, and drives the vacuum suction nozzle 13 in the upper vacuum platform group 74 to move up and down.

[0068] Further, the feeding lens assembly 9 includes a feeding X-axis conveying mechanism 91, a feeding Y-axis conveying mechanism 92, a lens support 93, a third lifting mechanism 94, a first lens clamp 95, and a feeding lens 96.

[0069] The feeding X-axis conveying mechanism 91 of the feeding lens assembly 9 on the upper side and the lower side is fixedly installed on the lower bottom plate 1 and the upper support plate 6, respectively. The feeding X-axis conveying mechanism 91 drives the feeding Y-axis conveying mechanism 92 to move along the X-axis direction. The feeding Y-axis conveying mechanism 92 drives the lens support 93 to move along the Y-axis direction. The third lifting mechanism 94 is fixedly installed on the lens support 93, and drives the first lens clamp 95 to move up and down. The feeding lens 96 is fixedly installed on the first lens clamp 95.

[0070] Further, the alignment lens assembly 10 comprises an alignment X-axis conveying mechanism 101, an alignment Y-axis conveying mechanism 102, a fourth lifting mechanism 103, a support seat 104, a support block 105, a second lens holder 106 and an alignment lens 107.

[0071] The support seat 104 on the alignment lens assembly 10 on the upper and lower sides is respectively fixedly installed on the lower bottom plate 1 and the upper support plate 6, the alignment X-axis conveying mechanism 101 is fixedly installed on the support seat 104, the alignment X-axis conveying mechanism 101 drives the alignment Y-axis conveying mechanism 102 to move along the X-axis direction, the alignment Y-axis conveying mechanism 102 drives the support block 105 to move along the Y-axis direction, the fourth lifting mechanism 103 is fixedly installed on the support block 105, the fourth lifting mechanism 103 drives the second lens holder 106 to move up and down, and the alignment lens 107 is fixedly installed in the second lens holder 106.

[0072] In the second embodiment, as shown in FIG. 2, the alignment lens assembly 10 is arranged on the upper support plate 6 of the upper support plate 6 and the lower bottom plate 1. Figures 1-14As shown, the utility model discloses a high-precision indirect alignment mechanism, including lower bottom plate 1, manipulator 3, lower alignment platform subassembly 2, upper alignment platform subassembly 7, feeding lens subassembly 9, alignment lens subassembly 10, support column 5, upper support plate 6, upper vacuum platform group 74 and lower vacuum platform group 25, upper support plate 6 is fixed with lower bottom plate 1 through four support columns 5, manipulator 3 is fixed above lower bottom plate 1 by bolt, and is responsible for taking and discharging, lower alignment platform subassembly 2 is connected with lower bottom plate 1 through guide rail, and is driven using lower platform X axle conveying mechanism 4, lets lower alignment platform subassembly 2 can move along x direction, and it still is arranged with multiple activity mechanism inside, lets lower vacuum platform group 25 have x, y, z three direction displacement and the function of rotating around z axle, upper alignment platform subassembly 7 is connected with upper support plate 6 through guide rail, and is driven using upper platform X axle conveying mechanism 8, so that upper vacuum platform group 74 has x direction displacement function, the feeding lens subassembly 9 is provided with x, y, z three direction guide rails, so that feeding lens 96 has x, y, z three direction displacement function, and the feeding lens subassembly 9 has four in all, wherein two are fixed on lower bottom plate 1, when feeding, feeding lens 96 is located directly below upper alignment platform subassembly 7, is used for observing the position between material piece and vacuum suction nozzle 13 when feeding upper alignment platform subassembly 7, and two are fixed on upper support plate 6, when feeding lower alignment platform subassembly 2, feeding lens 96 is located directly above lower alignment platform subassembly 2, is used for observing the position between material piece and vacuum suction nozzle 13 when feeding lower alignment platform subassembly 2, alignment lens subassembly 10 is provided with x, y, z three direction guide rails, so that alignment lens 107 has x, y, z three direction displacement function, and alignment lens subassembly 10 has four in all, wherein two are fixed on lower bottom plate 1, when alignment, alignment lens 107 is located below target glass fixture 15, two alignment lenses 107 are respectively aligned with two target glass fixtures 15 of lower alignment platform subassembly 2, are used for observing the position of alignment lower alignment platform subassembly 2, and two alignment lenses 107 are fixed on upper support plate 6, when alignment upper alignment platform subassembly 7, alignment lens 107 is located above target glass fixture 15, two alignment lenses 107 are respectively aligned with two target glass fixtures 15 of upper alignment platform subassembly 7, are used for observing the position of alignment upper alignment platform subassembly 7.

[0073] Further, a plurality of square perforations are formed on the upper support plate 6 and the lower bottom plate 1, facilitating the installation of the z-direction driving assembly of the upper and lower alignment platform subassemblies 2 and the feeding lens subassembly 9 and the alignment lens subassembly 10.

[0074] Further, two vacuum grooves are arranged on the material taking clamp of the manipulator 3, and the vacuum grooves are communicated with the air duct arranged in the manipulator 3, so as to achieve the adsorption and fixing effect on the material piece when the manipulator 3 takes the material, thereby improving the stability and accuracy of material taking.

[0075] Furthermore, the lower alignment platform assembly 2 is equipped with multiple sets of motor-driven slide rails, enabling the lower vacuum platform assembly 25 to move in the x, y, and z directions and rotate around the z-axis.

[0076] Furthermore, the top of the upper alignment platform assembly 7 is provided with a set of motor-driven slide rails, which enables the upper vacuum platform assembly 74 to have displacement function in the x-direction.

[0077] Furthermore, the alignment platform assembly consists of an alignment vacuum support plate 11, an alignment vacuum plate 12, two vacuum nozzles 13 of different sizes, and a target glass clamp 15. The alignment vacuum plate 12 around the vacuum nozzles 13 has a certain number of air holes 16, which lead to the inner groove of the alignment vacuum support plate 11. Air pipes are connected to the side of the alignment vacuum support plate 11, so that the alignment vacuum plate 12 can adsorb and fix the material.

[0078] Furthermore, the vacuum nozzle 13 is mounted on an internal slide rail driven by a motor and has a displacement function in the z-direction.

[0079] Furthermore, the loading lens assembly 9 has displacement functions in the x, y, and z directions, and its loading lens 96 is aligned with the vacuum nozzle 13 to observe the position of the robot arm 3 during loading.

[0080] Furthermore, the alignment lens assembly 10 has displacement functions in the x, y, and z directions, and its alignment lens 107 is aligned with the target glass clamp 15 for observing the position of the target glass clamp 15 during alignment.

[0081] Example 3, as Figure 1 As shown, this utility model discloses a high-precision indirect alignment mechanism, including a lower base plate 1, a robotic arm 3, a lower alignment platform assembly 2, an upper alignment platform assembly 7, a loading lens assembly 9, an alignment lens assembly 10, a support column 5, an upper support plate 6, an upper vacuum platform assembly 74, and a lower vacuum platform assembly 25. The base plate provides support for the entire alignment mechanism. The upper support plate 6 is fixed above the lower base plate 1 by the support column 5. The upper support plate 6 provides support for the upper alignment platform assembly 7, the two loading lens assemblies 9, and the two alignment lens assemblies 10. The lower alignment platform assembly 2 is fixed on the lower base plate 1 and can move from the alignment position in the x-direction to the loading position. The upper alignment platform assembly 7 can move from the alignment position in the -x-direction to the loading position. The robotic arm 3 is fixed on the lower base plate 1 and can load and remove the fitted parts from the alignment platform.

[0082] like Figure 2As shown, the lower alignment platform assembly 2 moves in the X-axis direction by the lower platform X-axis conveying mechanism 4, and includes a lower platform bottom plate 21, a lower platform rotating mechanism 22, a lower platform Y-axis conveying mechanism 23, a first lifting mechanism 17, a lower platform middle plate 24 and a lower vacuum platform group 25.

[0083] The lower platform X-axis conveying mechanism 4 is composed of two sets of guide rails, lead screws and servo motors. The guide rails are fixed on the lower bottom plate 1 by bolts, and the sliding blocks are installed on the guide rails in sliding fit. The sliding blocks are fixed with the lower platform bottom plate 21. When the servo motors rotate, the lower platform bottom plate 21 moves along the X-axis direction through the cooperation of the lead screws and the sliding blocks.

[0084] The lower platform rotating mechanism 22 is composed of two sets of lead screw seats, two sets of lead screws and two servo motors. The lead screw seats and the servo motors are installed on the lower platform bottom plate 21. The top rods are arranged on the lead screws and connected with the lower platform middle plate 24, and are arranged on both sides of the lower platform middle plate 24 respectively. The rotation of the two servo motors can make the lower platform middle plate 24 rotate around the z-axis.

[0085] The lower platform Y-axis conveying mechanism 23 is composed of a cylinder and three UVW platforms. The top rod is connected with the cylinder, and the top rod is connected with the middle UVW platform. The cylinder is fixed on the lower platform bottom plate 21. The upper UVW platform is fixed with the lower platform middle plate 24, which provides Y-direction support and three degrees of freedom. The extension and retraction of the top rod driven by the cylinder can make the lower platform middle plate 24 move along the Y-axis direction.

[0086] The first lifting mechanism 17 is composed of an electric cylinder and four guide rails. The extension rod of the electric cylinder is connected with the lower vacuum platform group 25 through the lower platform bottom plate 21. The guide rails are arranged along the z direction. The sliding blocks are installed on the guide rails in sliding fit. The sliding blocks are fixed with the lower platform middle plate 24. The guide rails are installed on the support plate below the lower vacuum platform group 25. The electric cylinder can make the lower vacuum platform group 25 move along the z direction. The lower platform middle plate 24 moves along the X direction and the Y direction.

[0087] As shown in Figure 3 The X-axis position of the upper alignment platform assembly 7 is controlled and driven by the upper platform X-axis conveying mechanism 8, which includes an upper platform bottom plate 71, an upper platform support vertical plate 72, a strip-shaped UV curing lamp 73 and an upper vacuum platform group 74.

[0088] The upper platform X-axis conveyor is mainly composed of two sets of guide rails, a screw rod and a servo motor. The guide rails are fixed on the upper support plate 6 through bolts. A sliding block is installed on the guide rails in a sliding fit. The sliding block is fixed with the upper platform bottom plate 71. The upper vacuum platform group 74 is fixed with the upper platform bottom plate 71 through the upper platform support stand 72. The motor rotates to move the upper platform bottom plate 71 along the X-axis direction. The strip-shaped UV curing lamp 73 is installed on the alignment vacuum support plate 11. The ultraviolet light emitted by the strip-shaped UV curing lamp 73 can irradiate the glass material through the strip-shaped through slot 19.

[0089] As shown in Figure 6 , Figure 7 , Figure 8 , Figure 9 , the upper vacuum platform group 74 and the lower vacuum platform group 25 have the same structure, both including an alignment vacuum support plate 11, an alignment vacuum plate 12, a vacuum nozzle 13 and a target glass clamp 15. The alignment vacuum support plate 11 is provided with a gas hole 16 from the side surface to the bonding surface. The bonding surface is the surface where the alignment vacuum support plate 11 and the alignment vacuum plate 12 are combined with each other. The bonding surface is also provided with a groove connected with the gas hole 16. The alignment vacuum plate 12 is fixed with the alignment vacuum support plate 11 through bolts. The gas hole 16 is just corresponding to the groove, so as to form a vacuum channel for adsorbing the glass material and achieve the purpose of fixing the glass material. The target glass clamp 15 is installed on the alignment vacuum support plate 11 with high installation position precision, which plays a role in fixing the glass material. The vacuum nozzle 13 is controlled to extend and retract by the second lifting mechanism 18 installed on the upper platform support stand 72.

[0090] As shown in Figure 4 , the upper feeding lens assembly 9 includes an upper feeding X-axis conveying mechanism 91, an upper feeding Y-axis conveying mechanism 92, a third lifting mechanism 94, a lens support 93, a first lens clamp 95 and an upper feeding lens 96.

[0091] The upper feeding X-axis conveying mechanism 91 is mainly composed of a bottom support plate, a screw rod, a motor and a sliding plate. The bottom support plate is fixed on the lower bottom plate 1 or the upper support plate 6. The upper feeding Y-axis conveying mechanism 92 is installed above the sliding plate. The upper feeding Y-axis conveying mechanism 92 drives the lens support 93 to move. The third lifting mechanism 94 is installed on the side surface of the lens support 93 and drives the first lens clamp 95 to lift. The upper feeding lens 96 is fixed in the first lens clamp 95. Therefore, the precise movement of the upper feeding lens 96 along the X-axis, Y-axis and Z-axis directions can be realized by controlling the motors.

[0092] As shown in Figure 5As shown, the alignment lens assembly 10 comprises an alignment X-axis conveying mechanism 101, an alignment Y-axis conveying mechanism 102, a fourth lifting mechanism 103, a support seat 104, a support block 105, a second lens holder 106 and an alignment lens 107; the support seat 104 is fixed on the lower bottom plate 1 or the upper support plate 6 through bolts, the alignment X-axis conveying mechanism 101 is fixed on the support seat 104, the alignment X-axis conveying mechanism 101 drives the alignment Y-axis conveying mechanism 102 to move along the X-axis direction, the alignment Y-axis conveying mechanism 102 drives the support block 105 to move along the Y-axis direction, the fourth lifting mechanism 103 is fixedly installed on the side surface of the support block 105, the fourth lifting mechanism 103 drives the second lens holder 106 to move up and down, and the alignment lens 107 is fixedly installed in the second lens holder 106, so that the alignment lens 107 can be precisely moved along the X-axis, the Y-axis and the Z-axis directions by controlling the motors.

[0093] As shown in Figure 10 , Figure 11 When alignment is carried out, the lower alignment platform assembly 2 and the upper alignment platform assembly 7 are moved to the alignment positions along the x direction, at this time, the alignment lens 107 on the lower bottom plate 1 is aligned with the target glass clamp 15 of the upper alignment platform assembly 7, the alignment lens 107 on the upper support plate 6 is aligned with the target glass clamp 15 of the lower alignment platform assembly 2, and the lens position of the alignment lens 107 can be adjusted by controlling the movement of the motors in the X-axis, Y-axis and Z-axis directions, so that the optimal alignment observation position is achieved.

[0094] As shown in Figure 12 , Figure 13 , Figure 14 When feeding is carried out, the lower alignment platform assembly 2 is moved to the corresponding feeding position along the x direction, and the upper alignment platform assembly 7 is moved to the corresponding feeding position along the -X direction, at this time, the two feeding lenses 96 fixed on the lower bottom plate 1 are aligned with the large and small vacuum nozzles 13 of the upper alignment platform assembly 7 respectively, and the two feeding lenses 96 fixed on the upper support plate 6 are aligned with the large and small vacuum nozzles 13 of the lower alignment platform assembly 2 respectively, and the lens position of the feeding lens 96 can be adjusted by controlling the movement of the motors in the X-axis, Y-axis and Z-axis directions, so that the optimal feeding observation position is achieved.

[0095] As an embodiment of the utility model:

[0096] 1. Glass substrate loading: the lower alignment platform assembly 2 and the upper alignment platform assembly 7 are moved to the respective loading positions, the mechanical arm 3 picks up the glass substrate, and the vacuum suction of the material taking clamp is opened to hold the glass substrate. After a certain amount of UV glue is dropped on the glass substrate, the mechanical arm 3 is moved above the vacuum suction nozzle 13 of the lower alignment platform assembly 2. The vacuum suction nozzle 13 is extended to the position close to the glass substrate. The loading lens 96 fixed on the upper support plate 6 is used to determine whether the vacuum suction nozzle 13 is at the center point of the glass substrate. If not, the mechanical arm 3 is controlled to move the glass substrate to the correct position. After reaching the correct position, the vacuum of the vacuum suction nozzle 13 is opened to hold the glass substrate, and the vacuum of the material taking clamp of the mechanical arm 3 is closed. After the glass substrate is transferred to the vacuum suction nozzle 13 of the lower alignment platform assembly 2, the vacuum suction nozzle 13 is retracted until the glass substrate reaches the alignment vacuum plate 12 of the lower alignment platform assembly 2. The vacuum of the alignment vacuum plate 12 is opened to hold the glass substrate, and the vacuum of the vacuum suction nozzle 13 is closed and continues to retract to the designated position. Thus, the glass substrate loading is completed.

[0097] 2. Wafer loading: the mechanical arm 3 picks up the wafer, and the vacuum suction of the material taking clamp of the mechanical arm 3 is opened to hold the wafer. Then the mechanical arm 3 is moved above the vacuum suction nozzle 13 of the upper alignment platform assembly 7. The vacuum suction nozzle 13 is extended to the position close to the wafer. Then the loading lens 96 fixed on the lower base plate 1 is used to determine whether the vacuum suction nozzle 13 is at the center point of the wafer. If not, the mechanical arm 3 is controlled to move the wafer to the correct position. After reaching the correct position, the vacuum of the vacuum suction nozzle 13 is opened to hold the wafer. At this time, the vacuum of the material taking clamp of the mechanical arm 3 is closed. The wafer is transferred to the vacuum suction nozzle 13 of the upper alignment platform assembly 7. In the next step, the vacuum suction nozzle 13 is retracted until the wafer reaches the alignment vacuum plate 12 of the upper alignment platform assembly 7. The vacuum of the alignment vacuum plate 12 is opened to hold the glass substrate, and the vacuum of the vacuum suction nozzle 13 is closed and continues to retract to the designated position. Thus, the wafer loading is completed.

[0098] 3. Alignment and bonding: after the glass substrate and the wafer are placed, the upper and lower alignment platform assemblies 2 are moved to the alignment position. Then the two alignment lenses 107 installed on the upper support plate 6 are used to observe the target glass clamp 15 to determine whether the upper alignment platform assembly 7 reaches the designated position. If not, the motor rotation amount of the upper platform X-axis conveying mechanism 8 is controlled to move the upper alignment platform assembly 7 to the designated position. The two alignment lenses 107 installed on the lower base plate 1 are used to observe whether the lower alignment platform assembly 2 reaches the designated position. If not, the motor rotation amount of the lower platform X-axis conveying mechanism 4, the lower platform rotating mechanism 22, and the lower platform Y-axis conveying mechanism 23 is controlled to move the lower alignment platform assembly 2 to the designated position. After the upper and lower alignment platform assemblies 2 reach the correct alignment position, the lower alignment platform assembly 2 is raised to bond the surface of the glass substrate with the surface of the wafer. Then the strip-shaped UV curing lamp 73 is turned on to irradiate the glass substrate and the wafer to cure the UV glue.

[0099] 4, taking material: after curing, the alignment vacuum plate 12 of the upper alignment platform assembly 7 closes the vacuum, and the well-bonded wafer and glass substrate are sucked by the alignment vacuum plate 12 of the lower alignment platform assembly 2, then the lower alignment platform assembly 2 is lowered, and after being lowered to the set position, the vacuum suction nozzle 13 is extended to a position parallel to the alignment vacuum plate 12, the vacuum of the vacuum suction nozzle 13 is opened, the vacuum of the alignment vacuum plate 12 is closed, and the well-bonded wafer and glass substrate are sucked by the vacuum suction nozzle 13, then the vacuum suction nozzle 13 is continuously extended, and after being extended to the specified position, the upper alignment platform assembly 7 and the lower alignment platform assembly 2 are moved to the feeding position, and the mechanical hand 3 takes the well-bonded wafer and glass substrate and places them under the external strip-shaped UV curing lamp 73 for complete curing.

[0100] 5, alignment lens 107 position setting: since the upper alignment platform assembly 7 has only one degree of freedom, the position of the upper alignment platform assembly 7 is used as a reference to set an alignment position for the upper alignment platform assembly 74; when the upper alignment platform assembly 7 is at the final alignment position, the four alignment lenses 107 are aligned with the target glass clamp 15 of the upper alignment platform assembly 7, the marks on the target glass clamp 15 are made to appear in the center of the field of view of the four alignment lenses 107 by moving the alignment lenses 107, and after being determined, the positions at this time are set as the alignment positions of the four alignment lenses 107.

[0101] The embodiment is not limited in shape, material, structure, etc. of the utility model in any form, any simple modification, equivalent change and modification made according to the technical essence of the utility model to the above embodiment are within the protection scope of the technical scheme of the utility model.

Claims

1. A high-precision indirect alignment mechanism, comprising a lower base plate, characterized in that: a lower alignment platform assembly and a mechanical hand are mounted on the lower base plate, and a lower platform X-axis conveying mechanism is mounted between the lower base plate and the lower alignment platform assembly; a plurality of support columns are fixedly mounted on the lower base plate, upper ends of the plurality of support columns are fixedly mounted with an upper support plate, a lower side of the upper support plate is mounted with an upper alignment platform assembly, an upper platform X-axis conveying mechanism is mounted between the upper support plate and the upper alignment platform assembly, and the mechanical hand takes and places workpieces between the lower alignment platform assembly and the upper alignment platform assembly; a feeding lens assembly and an alignment lens assembly are mounted on the lower base plate and the upper support plate, and the feeding lens assemblies and the alignment lens assemblies on the upper and lower sides are arranged in a one-to-one correspondence. The lower alignment platform assembly comprises a lower platform base plate, a lower platform rotating mechanism, a lower platform Y-axis conveying mechanism, a lower platform middle plate and a lower vacuum platform group. The lower platform X-axis conveying mechanism drives the lower platform base plate to slide back and forth along the X-axis direction, the lower platform Y-axis conveying mechanism is fixedly mounted on the middle part of the upper side of the lower platform base plate, and the lower platform Y-axis conveying mechanism drives the lower platform middle plate to move along the Y-axis direction. The lower platform rotating mechanism is provided with two, and the two lower platform rotating mechanisms are fixedly mounted on the lower platform base plate, the bottom of the lower platform middle plate is rotatably and fittingly mounted on the lower platform base plate, and the two lower platform rotating mechanisms drive the lower platform middle part to rotate on the lower platform base plate when operating.

2. A high precision indirect alignment mechanism according to claim 1, characterized in that: The upper alignment platform assembly comprises an upper platform base plate, an upper platform support stand, a strip-shaped UV curing lamp and an upper vacuum platform group. The upper platform X-axis conveying mechanism drives the upper platform base plate to move along the X-axis direction, the upper platform support stand is provided with at least two, the upper vacuum platform group is fixedly mounted on the bottom side of the upper platform base plate through the at least two upper platform support stands, the strip-shaped UV curing lamp is fixedly mounted on the upper side of the upper vacuum platform group, and the strip-shaped UV curing lamp is arranged to irradiate the upper vacuum platform group. The upper vacuum platform group and the lower vacuum platform group are the same in structure, and each comprises an alignment vacuum support plate, an alignment vacuum plate and a vacuum suction nozzle.

3. A high precision indirect alignment mechanism according to claim 2, characterized in that: Target glass clamps are fixedly mounted on both sides of the alignment vacuum support plate, and the target glass clamps are flush with the alignment vacuum plate. The alignment vacuum plate of the upper vacuum platform group is formed with a strip-shaped through groove, and the strip-shaped UV curing lamp irradiates the workpiece through the strip-shaped through groove.

4. A high precision indirect alignment mechanism according to claim 3, characterized in that: The alignment vacuum plate is formed with a plurality of air holes located outside the suction holes.

5. A high precision indirect alignment mechanism according to claim 4, characterized in that: A first lifting mechanism is fixedly mounted on the lower platform middle plate, and drives the vacuum suction nozzles in the lower vacuum platform group to move up and down; a second lifting mechanism is fixedly mounted on the side edge of the upper platform support stand of the upper alignment platform assembly, and drives the vacuum suction nozzles in the upper vacuum platform group to move up and down.

6. A high precision indirect alignment mechanism according to either one of claims 4 or 5, characterized in that: ​ 7. A high precision indirect alignment mechanism according to any one of claims 4 or 5, characterized in that: ​ 8. A high precision indirect alignment mechanism according to claim 4, characterized in that: ​ 9. A high precision indirect alignment mechanism according to claim 1, characterized in that: The feeding lens assembly comprises a feeding X-axis conveying mechanism, a feeding Y-axis conveying mechanism, a lens support, a third lifting mechanism, a first lens clamp and a feeding lens; The feeding X-axis conveying mechanisms of the feeding lens assemblies on the upper and lower sides are fixedly installed on the lower bottom plate and the upper support plate respectively, the feeding X-axis conveying mechanisms drive the feeding Y-axis conveying mechanisms to move along the X-axis direction, the feeding Y-axis conveying mechanisms drive the lens supports to move along the Y-axis direction, the third lifting mechanisms are fixedly installed on the lens supports, the third lifting mechanisms drive the first lens clamps to move up and down, and the feeding lenses are fixedly installed on the first lens clamps.

10. A high precision indirect alignment mechanism as claimed in claim 1, characterized in that: The alignment lens assembly comprises an alignment X-axis conveying mechanism, an alignment Y-axis conveying mechanism, a fourth lifting mechanism, a support seat, a support block, a second lens clamp and an alignment lens; The support seats of the alignment lens assemblies on the upper and lower sides are fixedly installed on the lower bottom plate and the upper support plate respectively, the alignment X-axis conveying mechanism is fixedly installed on the support seat, the alignment X-axis conveying mechanism drives the alignment Y-axis conveying mechanism to move along the X-axis direction, the alignment Y-axis conveying mechanism drives the support block to move along the Y-axis direction, the fourth lifting mechanism is fixedly installed on the support block, the fourth lifting mechanism drives the second lens clamp to move up and down, and the alignment lens is fixedly installed in the second lens clamp.

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