Quick separation device for preventing card of unloading conveyor and machine table

Abstract

The utility model discloses a rapid separation device for preventing cards of an unloading conveyor. The rapid separation device comprises a conveying module used for conveying wafers; the power supply module is used for providing required electric energy for the transmission module; the monitoring module is composed of a position sensor and a signal processor, the position sensor is used for generating an electric signal and transmitting the electric signal to the signal processor when monitoring that the transmission module is abnormal, and the signal processor converts the electric signal into a trigger signal; and the control module is used for receiving the trigger signal sent by the signal processor, cutting off a circuit between the servo card and the transmission module and controlling the power supply module to supply power to the transmission module, and the control module is in communication connection with the transmission module, the power supply module and the monitoring module and is set to control on-off and operation of a machine table. According to the utility model, the rapid separation device is additionally arranged, and the wafer is prevented from being damaged due to retention through instant response and protection, so that the number of scrapped wafers is reduced, the production cost is reduced, and the downtime of equipment caused by abnormal transmission can be reduced.

Description

Technical Field

[0001] This utility model relates to the field of wafer transfer, and in particular to a device and machine for preventing the rapid departure of unloading conveyor cards. Background Technology

[0002] Due to their complexity, the transport mechanisms of atmospheric pressure chemical vapor deposition (APCVD) equipment are prone to frequent malfunctions, which are a major cause of product scrap. Among these malfunctions, those of the unload shuttle pose the highest risk, potentially resulting in the scrapping of up to 12 wafers. As the number of machines increases, the probability of transport mechanism malfunctions also rises. To reduce the occurrence of such malfunctions, there is an urgent need to develop a rapid removal device to prevent cards from leaving the unload shuttle.

[0003] In view of this, improvements are proposed to the existing technology. Utility Model Content

[0004] To enable the machine to remove wafers in case of conveyor malfunctions, this invention proposes a rapid removal device to prevent unloading conveyor cards. Based on the original machine, this invention detects the wafer's dwell time on the conveyor belt and determines whether an malfunction has occurred. If an malfunction is detected, the rapid removal device disconnects the line connection between the servo card and the drive module, and directly supplies power to the drive module, pulling the wafer to a safe position to avoid further malfunctions or damage.

[0005] According to one aspect of the present invention, a device for preventing the rapid departure of cards from an unloading conveyor is provided, comprising:

[0006] The transport module is used to transport wafers.

[0007] The power module is used to provide the necessary electrical energy to the transmission module;

[0008] The monitoring module comprises a position sensor and a signal processor. The position sensor monitors whether the transmission module malfunctions, generates an electrical signal, and transmits it to the signal processor. The signal processor converts the electrical signal into a trigger signal.

[0009] The control module is communicatively connected to the transmission module, power supply module, and monitoring module, and is configured to control the switching and operation of the machine based on the trigger signal.

[0010] According to one embodiment of the present invention, the conveying module includes a conveyor belt and a drive motor for driving the conveyor belt.

[0011] According to one embodiment of the present invention, the position sensor includes a first position sensor and a second position sensor, which are disposed at both ends of the machine platform near the unloading conveyor.

[0012] According to one embodiment of the present invention, a first position sensor is disposed at the point where the unloading conveyor starts running.

[0013] According to one embodiment of the present invention, the quick-departure device further includes an alarm module, which is used to issue an alarm signal when the transmission module malfunctions.

[0014] According to one embodiment of the present invention, the alarm signal includes a light signal and / or a sound signal and / or a machine display signal.

[0015] According to one embodiment of the present invention, the monitoring module further includes a vibration sensor and / or a temperature sensor.

[0016] According to one embodiment of the present invention, the position sensor includes a Hall sensor and / or a proximity switch and / or a photoelectric sensor.

[0017] According to one embodiment of the present invention, the distance between the first position sensor and the second position sensor is 200~400mm.

[0018] According to another aspect of the present invention, a machine tool is provided, which includes the device for preventing the rapid departure of unloading conveyor cards as described in any of the above technical solutions.

[0019] By adopting the above technical solutions, this utility model has the following advantages compared with the prior art: Based on the original machine platform, this utility model detects the dwell time of the wafer on the conveyor belt and determines whether an abnormality occurs. If an abnormality is detected, the quick-release device is activated to disconnect the line connection between the servo card and the drive module. The quick-release device directly supplies power to the drive module and pulls the wafer to a safe position to avoid further failures or damage. Attached Figure Description

[0020] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some implementation examples of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0021] Figure 1 A schematic diagram of a device for preventing the rapid departure of unloading conveyor cards according to an exemplary embodiment of the present invention is shown;

[0022] Figure 2A schematic diagram of a conveyor belt for a device to prevent the rapid departure of unloading conveyor cards according to an exemplary embodiment of the present invention is shown;

[0023] Figure 3 A schematic diagram of a position sensor for a device for preventing the rapid departure of unloading conveyor cards according to an exemplary embodiment of the present invention is shown.

[0024] Explanation of reference numerals in the attached figures:

[0025] 1. Unloading conveyor; 2. First position sensor; 3. Second position sensor. Detailed Implementation

[0026] The following detailed description of the embodiments is used to exemplify the principles of the present invention, but should not be used to limit the scope of the present invention. The present invention can be implemented in many different forms and is not limited to the specific embodiments disclosed herein, but includes all technical solutions falling within the scope of the claims.

[0027] These embodiments are provided to make this disclosure thorough and complete, and to fully express the scope of the invention to those skilled in the art. It should be noted that, unless otherwise specifically stated, the relative arrangement of components and steps, material composition, numerical expressions, and values ​​set forth in these embodiments should be interpreted as merely exemplary and not as limiting.

[0028] It should be noted that, in the description of this utility model, unless otherwise stated, "a plurality of" means two or more; the terms "upper," "lower," "left," "right," "inner," and "outer," etc., indicating orientation or positional relationships, are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. When the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0029] It should also be noted that, in the description of this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in this utility model depending on the specific circumstances. When a specific device is described as being located between a first device and a second device, an intermediary device may or may not be present between the specific device and the first or second device.

[0030] All terms used in this invention have the same meaning as understood by one of ordinary skill in the art, unless otherwise specifically defined. It should also be understood that terms defined in general dictionaries should be interpreted as having meanings consistent with their meanings in the context of the relevant art, and not as idealized or highly formalized, unless explicitly defined herein.

[0031] Techniques, methods, and equipment known to those skilled in the art may not be discussed in detail, but where appropriate, such techniques, methods, and equipment should be considered part of the specification.

[0032] like Figure 1 As shown, this utility model provides a device for preventing the rapid departure of a card from an unloading conveyor 1. It includes a conveying module for conveying wafers; a power supply module for providing the necessary electrical energy to the conveying module; a monitoring module consisting of a position sensor and a signal processor. The position sensor generates an electrical signal and transmits it to the signal processor when an abnormality is detected in the conveying module. The signal processor converts the electrical signal into a trigger signal. A control module receives the trigger signal from the signal processor, disconnects the circuit between the servo card and the conveying module, and controls the power supply module to supply power to the conveying module. The control module is communicatively connected to the conveying module, the power supply module, and the monitoring module, and is configured to control the switching and operation of the machine.

[0033] like Figure 2 As shown, in some embodiments, the conveying module includes a conveyor belt and a drive motor for driving the conveyor belt. Wafer cards are prone to occur during the conveyor belt transport process and... Figure 2 During the lateral movement on the right side, which is the tail of the conveyor belt.

[0034] Based on the above embodiments, the position sensor includes a first position sensor 2 and a second position sensor 3, which are disposed at both ends of the machine platform near the unloading conveyor 1.

[0035] like Figure 3 As shown, in some embodiments, the first position sensor 2 is located at the start of operation of the unloading conveyor 1. At the start of operation of the unloading conveyor 1, the first position sensor 2 acquires the wafer position and determines whether an abnormality has occurred. Figure 3 The right side of the middle section is where the unloading conveyor 1 starts running, and the arrow indicates the running direction of the unloading conveyor 1.

[0036] Building upon the above embodiments, the rapid departure device also includes an alarm module, which issues an alarm signal when an abnormality is detected in the conveyor module. The alarm module can monitor the operating status of the conveyor module in real time, and will immediately issue an alarm signal once an abnormality is detected. This timely early warning mechanism helps operators quickly identify and handle faults, preventing further escalation and avoiding greater impact on production.

[0037] In some embodiments, alarm signals include light signals and / or sound signals and / or machine display signals. Combining light, sound and machine display signals can form a multi-level and multi-dimensional information transmission method, which not only improves the efficiency of information transmission, but also increases the redundancy of information and reduces the risk of false alarms or missed alarms caused by the failure of a single signal method.

[0038] Based on the above embodiments, the monitoring module also includes a vibration sensor and / or a temperature sensor. The vibration sensor can monitor the vibration of the wafer during the transport process in real time.

[0039] Excessive vibration during wafer transport can damage the wafer or reduce its positioning accuracy. Vibration sensors can detect and address vibration anomalies promptly, ensuring the stability of wafer transport.

[0040] Temperature sensors are used to monitor temperature changes during wafer transport. If the temperature is too high or too low during wafer transport and processing, it may affect the wafer's performance and quality. Temperature sensors allow for real-time monitoring of the ambient temperature of the wafer, enabling appropriate adjustments to ensure safe wafer transport.

[0041] Vibration and temperature sensors can monitor the operating status of the wafer transfer system in real time. Once an abnormality is detected, an alarm can be issued immediately to help operators find and deal with the fault in a timely manner, and avoid the fault from escalating or causing greater losses.

[0042] In some embodiments, the position sensor includes a Hall sensor and / or a proximity switch and / or a photoelectric sensor. By combining Hall sensors, proximity switches, and photoelectric sensors, a high-precision, high-stability, and high-reliability position detection system can be constructed, providing accurate position information and control commands for wafer position detection.

[0043] Based on the above embodiments, the distance between the first position sensor 2 and the second position sensor 3 is 200~400mm. Specifically, the diameter of an 8-inch wafer is 200mm, and the distance to be moved is greater than the diameter of a wafer, but it cannot be too long, otherwise it may collide with the other side. Preferably, the distance between the first position sensor 2 and the second position sensor 3 is 300mm.

[0044] In some embodiments, the control module includes a PLC control interface, which includes functions for obtaining card delay, move-to-position delay, move delay, and lateral movement timeout delay duration.

[0045] Among them, the card delay time is the dwell time of the wafer on the unloading conveyor 1 as detected by the first position sensor 2; the movement to position delay time is the time after the unloading conveyor 1 is dragged to the second position sensor 3 when the quick-release device is started and continues to move; the movement delay time is the longest time that the unloading conveyor 1 is dragged when the quick-release device is started, which is also the longest time that the drive motor works; the lateral movement timeout delay time is the interval between the wafer's movement from the first position sensor 2 to the second position sensor 3.

[0046] Explanation of the working logic of the rapid separation device:

[0047] When the card delay time exceeds the set value, it means that the wafer is staying on the unloading conveyor 1, which may cause a card to be stuck, and the fast separation device will start working.

[0048] If the transverse timeout exceeds the set value, it indicates that the wafer has not been pulled to a safe position, which may cause a jam, and the quick-release device will start working.

[0049] This utility model also provides a machine tool, which includes the device for preventing the rapid departure of unloading conveyor cards as described in any of the above technical solutions.

[0050] This invention, based on the original machine platform, can monitor the wafer dwell time on the conveyor belt in real time. Once the system detects that the wafer dwell time exceeds a preset safety threshold, it immediately triggers anomaly judgment logic to determine whether there is a conveyor belt malfunction or wafer jamming, thus making an accurate judgment. After confirming the anomaly, the system will alarm and quickly activate the built-in quick-release device. The quick-release device quickly and effectively disconnects the conventional line connection between the servo card and the drive module, preventing the fault from further expanding or affecting other normally operating components. Immediately afterwards, the quick-release device will use its own power supply to directly power the drive module. The conversion process is rapid and smooth, ensuring the continuity of the wafer processing process. After receiving direct power, the drive module will immediately respond to the command of the quick-release device, quickly and safely pulling the stranded wafer to a preset safe position. This position is usually an area far away from the main area of ​​the production line, which is convenient for subsequent inspection and processing, thereby effectively avoiding further failures, damage, or even potential impacts on the entire production line that may be caused by prolonged wafer dwell time or improper handling. This design improves the speed and accuracy of abnormal response during wafer processing, and also effectively ensures the safety of wafers and production equipment, reducing production interruptions and losses caused by malfunctions.

[0051] Those skilled in the art should understand that the discussion of any of the above embodiments is merely exemplary and is not intended to imply that the scope of the present invention (including the claims) is limited to these examples. Within the framework of the present invention, technical features of the above embodiments or different embodiments can also be combined, and many other variations of different aspects of the present invention exist, which are not provided in the details for the sake of brevity. Therefore, any omissions, modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A device for preventing the rapid departure of cards from an unloading conveyor, characterized in that, include: The transfer module is used to transfer wafers; A power module, which provides the necessary electrical energy to the transmission module; The monitoring module consists of a position sensor and a signal processor. The position sensor monitors whether the transmission module is malfunctioning, generates an electrical signal, and transmits it to the signal processor. The signal processor converts the electrical signal into a trigger signal. as well as The control module is communicatively connected to the transmission module, power supply module and monitoring module, and is configured to control the machine's switching and operation based on the trigger signal.

2. The device for preventing the rapid departure of unloading conveyor cards according to claim 1, characterized in that, The conveying module includes a conveyor belt and a drive motor for driving the conveyor belt.

3. The device for preventing the rapid departure of unloading conveyor cards according to claim 1, characterized in that, The position sensor includes a first position sensor and a second position sensor, which are disposed at both ends of the machine platform near the unloading conveyor.

4. The device for preventing the rapid departure of unloading conveyor cards according to claim 3, characterized in that, The first position sensor is located at the point where the unloading conveyor starts running.

5. The device for preventing the rapid departure of unloading conveyor cards according to claim 1, characterized in that, The rapid departure device also includes an alarm module, which is used to issue an alarm signal when the transmission module malfunctions.

6. The device for preventing the rapid departure of unloading conveyor cards according to claim 5, characterized in that, The alarm signals include light signals and / or sound signals and / or machine display signals.

7. The device for preventing the rapid departure of unloading conveyor cards according to claim 1, characterized in that, The monitoring module also includes a vibration sensor and / or a temperature sensor.

8. The device for preventing the rapid departure of unloading conveyor cards according to claim 1, characterized in that, The position sensor includes a Hall sensor and / or a proximity switch and / or a photoelectric sensor.

9. The device for preventing the rapid departure of unloading conveyor cards according to claim 3, characterized in that, The distance between the first position sensor and the second position sensor is 200~400mm.

10. A machine tool, characterized in that, Includes the device for preventing the rapid departure of unloading conveyor cards as described in any one of claims 1-9.

Images