Rotating cathode magnetic bar adjusting mechanism

Abstract

The utility model discloses a rotating cathode magnetic bar adjusting mechanism which comprises a plurality of online adjusting assemblies installed between a shell assembly and a magnetic field assembly. The multiple online adjusting assemblies are installed between the shell assembly and the magnetic field assembly at intervals in the length direction. And each on-line adjusting assembly is independently controlled and can independently adjust the magnetic field assembly in the area. According to the rotating cathode magnetic bar adjusting mechanism, under the condition that magnetron sputtering equipment is not stopped, a micro motor in a corresponding area is controlled to work through a program, the micro motor drives a threaded sleeve to rotate, and a threaded rod in threaded connection with the threaded sleeve moves along the central axis, so that a deformation mounting plate in the area is driven to deform; therefore, the distance between the magnetic block on the area deformation mounting plate and the target material is adjusted, and the purpose of on-line adjustment of the magnetic field is achieved. Compared with an existing rotating cathode magnetic bar product, the adjusting precision is higher, online adjustment can be achieved, waste of the target material is reduced, and the adjusting time is shortened.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of rotating cathode magnetic field adjustment, particularly relates to a rotating cathode magnetic rod adjusting mechanism. BACKGROUND

[0002] At present, the uniformity requirement of film layer in the film coating industry is higher and higher, and the repeatability precision requirement of magnetic field adjustment for long-term stability is higher and higher. Although the uniformity of process gas, the uniformity of electric field and other factors of the film coating equipment restrict the uniformity of thin film deposition, the most critical factor is the uniformity of the magnetic field of the magnetic rod. Therefore, the rotating cathode magnetic rod not only requires very good magnetic field uniformity in the initial state of use, but also needs to continuously adjust the magnetic field strength in the continuous film coating process to ensure the continuity and uniformity of thin film deposition.

[0003] Although the existing rotating cathode magnetic rod product has set an adjustment point to adjust the distance between the magnetic rod and the target material at this point to realize the change of the magnetic field strength on the surface of the target material, the adjustment mode is mostly to adjust the distance by increasing or decreasing the gasket as disclosed in patent No. CN115537748B. The disadvantages of this adjustment mode are as follows: 1. The minimum adjustment distance is the thickness of a gasket each time. When the adjustment distance is less than the thickness, it is difficult to achieve effective and accurate adjustment; 2. Each adjustment needs to disassemble the magnetic rod and adjust the number of gaskets by manual operation, which requires higher requirements for the operator; 3. Since this adjustment mode is not online adjustment, the adjustment result needs to be obtained after installation into the magnetron sputtering device for testing each time, so this mode not only causes time-consuming and high cost in the adjustment process, but also causes a large amount of target material to be wasted in testing, thereby causing high adjustment cost. UTILITY MODEL CONTENTS

[0004] The utility model aims at providing a rotating cathode magnetic rod adjusting mechanism to solve the problem that the existing rotating cathode magnetic rod product cannot realize online adjustment of the magnetic field.

[0005] To solve the above technical problems, the utility model provides a rotating cathode magnetic rod adjusting mechanism, which comprises a plurality of online adjustment components installed between a shell assembly and a magnetic field assembly.

[0006] The plurality of online adjustment components are installed between the shell assembly and the magnetic field assembly along the length direction; and each online adjustment component is individually controlled and can individually adjust the magnetic field assembly in the region.

[0007] Preferably, the online adjusting assembly comprises a micro motor and a linkage; the micro motor is fixedly installed in the shell assembly through a motor support, one end of the linkage is connected with the micro motor, and the other end is connected with the magnetic field assembly through a mounting block; under the action of the micro motor, the magnetic field assembly is driven to move by the linkage, so that the distance between the magnetic rod in the region and the target material is adjusted.

[0008] Preferably, the linkage comprises a threaded sleeve and a threaded rod, one end of the threaded rod is fixedly connected with the magnetic field assembly through a mounting block, and the other end is inserted into the threaded sleeve and is in threaded connection with the threaded sleeve.

[0009] Preferably, the threaded sleeve and the micro motor are connected through a transmission gear set, under the driving of the micro motor, the threaded sleeve is driven to rotate, so that the threaded rod in threaded connection with the threaded sleeve drives the magnetic field assembly to move along the central axis.

[0010] Preferably, the transmission gear set comprises a bevel gear and a bevel gear plate in meshing connection; the bevel gear plate is sleeved and installed on the threaded sleeve, and the bevel gear is sleeved and installed on the output shaft of the micro motor, and the bevel gear, the bevel gear plate and the threaded sleeve connected with the bevel gear plate are driven to rotate by the micro motor.

[0011] Preferably, the threaded rod is movably inserted into the mounting block and connected with the mounting block through a penetrating pin; and the mounting block is fixedly connected with the magnetic field assembly through a plurality of locking bolts.

[0012] Compared with the prior art, the beneficial effects of the utility model are:

[0013] The rotating cathode magnetic rod adjusting mechanism of the utility model realizes the purpose of online adjustment of the magnetic field under the condition that the magnetron sputtering equipment does not stop working, the threaded sleeve is driven to rotate by the micro motor, the threaded rod in threaded connection with the threaded sleeve moves along the central axis, the deformed mounting plate in the region is deformed, the distance between the magnetic block on the deformed mounting plate in the region and the target material is adjusted, and the adjusting precision is higher, the online adjustment can be realized, the waste of the target material is reduced, and the adjusting time is reduced. BRIEF DESCRIPTION OF DRAWINGS

[0014] Figure 1 It is a structure schematic view of the rotating cathode adopting the magnetic rod adjusting mechanism provided by the utility model;

[0015] Figure 2 It is a side view of the rotating cathode of the magnetic rod adjusting mechanism provided by the utility model;

[0016] Figure 3It is the structural schematic view of the magnetic rod adjusting mechanism provided by the utility model.

[0017] Figure 4 It is the sectional view of the magnetic rod adjusting mechanism provided by the utility model.

[0018] In the figure: 1, shell assembly; 2, magnetic field assembly; 3, online adjusting assembly; 31, micro motor; 32, linkage; 33, motor support; 34, mounting block; 35, transmission gear set; 36, bolt; 37, locking bolt; 321, threaded sleeve; 322, threaded rod; 351, bevel gear; 352, bevel gear plate. DETAILED DESCRIPTION

[0019] The utility model makes further detailed description in combination with the drawings and specific embodiments. The advantages and features of the utility model will be more clear according to the following description and claims. It should be noted that the drawings all adopt very simplified form and all use non-precise proportion, only to facilitate, clear and assist the purpose of describing the embodiment of the utility model.

[0020] In the description of the utility model, it needs to be understood that the orientation or positional relationship indicated by the terms "center", "longitudinal", "transverse", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer" and the like is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the utility model and simplifying the description, and therefore cannot be understood as indicating or implying that the indicated device or element must have a particular orientation, a particular orientation and operation, and therefore cannot be understood as a limitation on the utility model.

[0021] In the description of the utility model, it needs to be understood that, unless otherwise explicitly specified and limited, the terms "mounting", "connection", "connection" should be understood broadly, for example, it can be fixed connection, or detachable connection, or integrally connected, it can be mechanical connection, or electrical connection, it can be directly connected, or indirectly connected through intermediate medium, it can be the communication inside two elements. For ordinary skilled in the art, the specific meaning of the above terms in the utility model can be understood through specific circumstances. EMBODIMENT

[0022] The utility model provides a kind of rotating cathode magnetic rod adjusting mechanism, please refer to Figures 1-2 , including multiple online adjusting assembly 3 installed between shell assembly 1 and magnetic field assembly 2;Multiple online adjusting assembly 3 is installed between the shell assembly 1 and the magnetic field assembly 2 along the length direction interval;And each online adjusting assembly 3 is individually controlled, and the magnetic field assembly 2 of this area can be individually adjusted.

[0023] Specifically, please refer to Figure 3 and Figure 4 The online adjustment assembly 3 comprises a micro motor 31 and a linkage 32; the micro motor 31 is fixedly installed in the shell assembly 1 through a motor support 33, one end of the linkage 32 is connected with the micro motor 31, and the other end is connected with the magnetic field assembly 2 through a mounting block 34; under the action of the micro motor 31, the magnetic field assembly 2 is driven to move by the linkage 32, so as to adjust the distance between the magnetic rod in the region and the target material.

[0024] Further, the linkage 32 comprises a threaded sleeve 321 and a threaded rod 322; one end of the threaded rod 322 is fixedly connected with the magnetic field assembly 2 through the mounting block 34, and the other end is inserted into the threaded sleeve 321 and is threadedly connected with the threaded sleeve 321.

[0025] Moreover, the threaded sleeve 321 is connected with the micro motor 31 through a transmission gear set 35; under the driving of the micro motor 31, the threaded sleeve 321 is driven to rotate, so that the threaded rod 322 which is threadedly connected with the threaded sleeve 321 drives the magnetic field assembly 2 to move along the central axis.

[0026] Specifically, the transmission gear set 35 comprises a bevel gear 351 and a bevel gear plate 352 which are engagedly connected; the bevel gear plate 352 is sleeved and installed on the threaded sleeve 321, and the bevel gear 351 is sleeved and installed on the output shaft of the micro motor 31; the bevel gear 351, the bevel gear plate 352 and the threaded sleeve 321 which is connected with the bevel gear plate 352 are driven to rotate by the micro motor 31.

[0027] Further, the threaded rod 322 is movably inserted into the mounting block 34 and is connected with the mounting block 34 through a penetrating pin 36; and the mounting block 34 is fixedly connected with the magnetic field assembly 2 through a plurality of locking bolts 37.

[0028] The rotating cathode magnetic rod adjustment mechanism of the utility model under the condition that the magnetron sputtering equipment does not stop, through the program control corresponding area micro motor work, micro motor drives the threaded sleeve to rotate, and makes with its threaded connection the threaded rod moves along the central axis, thereby drives the deformation of the deformation mounting plate in the region, to adjust the distance between the magnetic block on the deformation mounting plate in the region and the target material, to realize the purpose of online adjustment of the magnetic field. Compared with the existing rotating cathode magnetic rod product, the adjustment precision is higher, and online adjustment can be realized, the waste of target material is reduced, and the adjustment time is reduced.

[0029] The above description is only a description of the preferred embodiment of the utility model, and does not limit the scope of the utility model in any way. Any modification or modification of the utility model made by a person skilled in the art according to the above disclosure is within the protection scope of the claims.

Claims

1. A rotating cathode magnet rod adjustment mechanism, characterized by, The on-line adjusting assembly (3) is arranged between the shell assembly (1) and the magnetic field assembly (2). The on-line adjusting assembly (3) is arranged between the shell assembly (1) and the magnetic field assembly (2). The on-line adjusting assembly (3) comprises a micro motor (31) and a linkage (32), the micro motor (31) is fixedly arranged in the shell assembly (1) through a motor support (33), one end of the linkage (32) is connected with the micro motor (31), and the other end is connected with the magnetic field assembly (2) through a mounting block (34); under the action of the micro motor (31), the magnetic field assembly (2) is driven to move by the linkage (32), so that the distance between the magnetic rod and the target material in the region is adjusted.

2. A magnetic rod adjustment mechanism for a rotary cathode as defined in claim 1, wherein The linkage (32) comprises a threaded sleeve (321) and a threaded rod (322), one end of the threaded rod (322) is fixedly connected with the magnetic field assembly (2) through the mounting block (34), the other end is inserted into the threaded sleeve (321) and is threadedly connected with the threaded sleeve (321).

3. A magnetic rod adjustment mechanism for a rotary cathode as defined in claim 2, wherein The threaded sleeve (321) and the micro motor (31) are connected through a transmission gear set (35), under the driving of the micro motor (31), the threaded sleeve (321) is driven to rotate, so that the threaded rod (322) which is threadedly connected with the threaded sleeve (321) drives the magnetic field assembly (2) to move along the central axis.

4. A magnetic rod adjustment mechanism for a rotary cathode as defined in claim 3, wherein The transmission gear set (35) comprises a bevel gear (351) and a bevel gear plate (352) which are engagedly connected; the bevel gear plate (352) is sleeved and arranged on the threaded sleeve (321), and the bevel gear (351) is sleeved and arranged on the output shaft of the micro motor (31), the bevel gear (351), the bevel gear plate (352) and the threaded sleeve (321) connected with the bevel gear plate (352) are driven to rotate by the micro motor (31).

5. A magnetic rod adjustment mechanism for a rotary cathode as defined in claim 3, wherein The threaded rod (322) is movably inserted into the mounting block (34) and connected with the mounting block (34) through a penetrating pin (36); and the mounting block (34) is fixedly connected with the magnetic field assembly (2) through a plurality of locking bolts (37).

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