Chemical delivery system

Abstract

The utility model provides a chemical conveying system which is suitable for conveying high-purity chemicals and comprises a first conveying subsystem, a second conveying subsystem, a switching branch, a detection unit, a cleaning unit and a control unit. The first conveying subsystem and the second conveying subsystem are arranged in parallel, the first conveying subsystem is directly connected with the first supply point, and the second conveying subsystem is directly connected with the second supply point; the switching branch is connected between the first conveying subsystem and the second conveying subsystem and used for enabling the second conveying subsystem to be indirectly connected with a first supply point through the switching branch so as to convey chemicals when the cleaning unit cleans the first conveying subsystem, or used for enabling the second conveying subsystem to be indirectly connected with a second supply point through the switching branch so as to convey chemicals when the cleaning unit cleans the second conveying subsystem. Chemicals can be delivered by indirectly connecting the first delivery subsystem to the second supply point via the switching branch; in this way, cleaning of the conveying system is completed under the condition that supply of chemicals is not interrupted.

Description

Technical Field

[0001] This application relates to the field of chemical delivery systems, and more specifically, to a high-purity chemical delivery system. Background Technology

[0002] In modern industrial production, the transport of high-purity chemicals is a crucial component of many key process steps. These chemicals typically have extremely high purity requirements; even minute impurities can severely impact product quality and performance. Therefore, high-purity chemical transport systems must ensure chemical purity and prevent the introduction of impurities. Furthermore, due to the special properties of high-purity chemicals, transport equipment requires regular cleaning to prevent chemical residues from remaining in the equipment, which could affect its lifespan and stability.

[0003] Existing high-purity chemical delivery systems typically employ traditional manual cleaning methods, which involve disassembling the equipment and manually cleaning it after shutdown. This method has at least the following drawbacks: First, cleaning requires shutdown and disassembly, leading to production interruptions and wasted time, thus impacting production efficiency. Second, this manual cleaning method requires specialized cleaning equipment and personnel, making it difficult to monitor and control the cleaning effect. It lacks intelligent management and adjustment mechanisms, failing to ensure consistent and reliable cleaning results. Furthermore, the operation is complex and time-consuming, increasing production costs. Summary of the Invention

[0004] The purpose of this application is to provide a chemical delivery system that enables the cleaning of chemical delivery equipment within the system without interrupting production.

[0005] Therefore, this application proposes a chemical delivery system suitable for the delivery of high-purity chemicals, including a first delivery subsystem A, a second delivery subsystem B, a switching branch, a detection unit, a cleaning unit, and a control unit;

[0006] The first conveying subsystem A and the second conveying subsystem B are connected in parallel. The first conveying subsystem A is directly connected to the first supply point 112, and the second conveying subsystem B is directly connected to the second supply point 212.

[0007] The detection unit is used to monitor the characteristic data of the fluids flowing in the first delivery subsystem (A) and the second delivery subsystem (B), the characteristic data including at least one of concentration and impurity metal ion content;

[0008] The cleaning unit is used to perform cleaning operations on the first conveying subsystem A and / or the second conveying subsystem B;

[0009] The switching branch is connected between the first conveying subsystem A and the second conveying subsystem B. It is used to enable the second conveying subsystem B to be indirectly connected to the first supply point 112 via the switching branch to convey chemicals when the cleaning unit performs cleaning operations on the first conveying subsystem A. Alternatively, it is used to enable the first conveying subsystem A to be indirectly connected to the second supply point 212 via the switching branch to convey chemicals when the cleaning unit performs cleaning operations on the second conveying subsystem B.

[0010] The control unit is electrically connected to the first conveying subsystem (A), the second conveying subsystem (B), the switching branch, the detection unit, and the cleaning unit.

[0011] Furthermore, the first conveying subsystem A includes a first pneumatic diaphragm valve 102, a second pneumatic diaphragm valve 103, a first metering pump 106, a third pneumatic diaphragm valve 110, and a fourth pneumatic diaphragm valve 111, which are connected in series in the first conveying pipeline.

[0012] The second delivery subsystem B includes a fifth pneumatic diaphragm valve 202, a sixth pneumatic diaphragm valve 203, a second metering pump 206, a seventh pneumatic diaphragm valve 210, and an eighth pneumatic diaphragm valve 211, which are connected in series in the second delivery pipeline.

[0013] The detection unit includes a first concentration meter 107 and a first electrochemical sensor 108 disposed at the outlet of the first metering pump 106, and a second concentration meter 207 and a second electrochemical sensor 208 disposed at the outlet of the second metering pump 206.

[0014] Furthermore, one end of the switching branch is connected between the third pneumatic diaphragm valve 110 and the fourth pneumatic diaphragm valve 111, and the other end is connected between the seventh pneumatic diaphragm valve 210 and the eighth pneumatic diaphragm valve 211; a twenty-third pneumatic diaphragm valve 502 is provided on the switching branch.

[0015] Furthermore, the cleaning unit includes: a detection branch, a waste liquid collection branch, a cleaning agent supply branch, a cleaning agent circulation and recovery branch, and a purging branch;

[0016] The detection branch is used to detect chemical samples from the first delivery line and / or the second delivery line;

[0017] The waste liquid collection branch is used to recover waste liquid from the first delivery pipeline and / or the second delivery pipeline, the waste liquid including chemical residues and cleaning agent residues;

[0018] The cleaning agent supply branch and the cleaning agent circulation and recovery branch work together to enable the cleaning agent to circulate in the first delivery pipeline and / or the second delivery pipeline.

[0019] The purging branch is used to introduce high-pressure nitrogen into the first delivery pipeline and / or the second delivery pipeline.

[0020] Furthermore, one end of the detection branch is connected between the first metering pump 106 and the third pneumatic diaphragm valve 110, and the other end is connected between the second metering pump 206 and the seventh pneumatic diaphragm valve 210; the detection branch is sequentially provided with a seventeenth pneumatic diaphragm valve 506, a spectrometer 507, and an eighteenth pneumatic diaphragm valve 503; wherein, the spectrometer 507 is disposed between the seventeenth pneumatic diaphragm valve 506 and the eighteenth pneumatic diaphragm valve 503.

[0021] Furthermore, one end of the waste liquid collection branch is connected between the second pneumatic diaphragm valve 103 and the first metering pump 106, and the other end is connected between the sixth pneumatic diaphragm valve 203 and the second metering pump 206; the waste liquid collection branch is provided with a thirteenth pneumatic diaphragm valve 602, a fourteenth pneumatic diaphragm valve 603 and a waste liquid collector 601; the waste liquid collector 601 is located between the thirteenth pneumatic diaphragm valve 602 and the fourteenth pneumatic diaphragm valve 603.

[0022] Furthermore, one end of the cleaning agent supply branch is connected between the first pneumatic diaphragm valve 102 and the second pneumatic diaphragm valve 103, and the other end is connected between the fifth pneumatic diaphragm valve 202 and the sixth pneumatic diaphragm valve 203; the cleaning agent supply branch is provided with an eleventh pneumatic diaphragm valve 301, a twelfth pneumatic diaphragm valve 305, and a cleaning agent circulation tank 302; the cleaning agent circulation tank 302 is located between the eleventh pneumatic diaphragm valve 301 and the twelfth pneumatic diaphragm valve 305;

[0023] One end of the cleaning agent circulation and recovery branch is connected between the outlet of the first metering pump 106 and the third pneumatic diaphragm valve 110, and the other end is connected between the outlet of the second metering pump 206 and the seventh pneumatic diaphragm valve 210; a nineteenth pneumatic diaphragm valve 304 and a twentieth pneumatic diaphragm valve 306 are sequentially arranged on the cleaning agent circulation and recovery branch; the pipeline between the nineteenth pneumatic diaphragm valve 304 and the twentieth pneumatic diaphragm valve 306 is also connected to the cleaning agent circulation tank 302;

[0024] The eleventh pneumatic diaphragm valve 301 is linked with the nineteenth pneumatic diaphragm valve 304; the twelfth pneumatic diaphragm valve 305 is linked with the twentieth pneumatic diaphragm valve 306.

[0025] Further, the purging branch includes a first purging branch and a second purging branch; the first purging branch is connected in parallel with the cleaning agent supply branch; one end of the first purging branch is connected between the first pneumatic diaphragm valve 102 and the second pneumatic diaphragm valve 103, and the other end is connected between the fifth pneumatic diaphragm valve 202 and the sixth pneumatic diaphragm valve 203; a fifteenth pneumatic diaphragm valve 404 and a sixteenth pneumatic diaphragm valve 405 are sequentially arranged on the first purging branch; the pipeline between the fifteenth pneumatic diaphragm valve 404 and the sixteenth pneumatic diaphragm valve 405 is connected to the high-pressure nitrogen supply device 401;

[0026] The second purging branch is connected in parallel with the cleaning agent circulation and recovery branch; one end of the second purging branch is connected between the first metering pump 106 and the third pneumatic diaphragm valve 110, and the other end is connected between the second metering pump 206 and the seventh pneumatic diaphragm valve 210; the second purging branch is sequentially provided with a twenty-first pneumatic diaphragm valve 504 and a twenty-second pneumatic diaphragm valve 505, and the pipeline between the twenty-first pneumatic diaphragm valve 504 and the twenty-second pneumatic diaphragm valve 505 is connected to the air duct 501;

[0027] The fifteenth pneumatic diaphragm valve 404 is linked with the twenty-first pneumatic diaphragm valve 504; the sixteenth pneumatic diaphragm valve 405 is linked with the twenty-second pneumatic diaphragm valve 505.

[0028] Furthermore, the first pneumatic diaphragm valve 102 and the fifth pneumatic diaphragm valve 202 are respectively used to connect or disconnect the first delivery pipeline and the second delivery pipeline from the liquid storage container;

[0029] The fourth pneumatic diaphragm valve 111 is used to connect or disconnect any delivery pipeline from the first supply point 112; the eighth pneumatic diaphragm valve 211 is used to connect or disconnect any delivery pipeline from the second supply point 212.

[0030] The second pneumatic diaphragm valve 103 is used to regulate the flow rate of the chemicals in the first delivery pipeline; the sixth pneumatic diaphragm valve 203 is used to regulate the flow rate of the chemicals in the second delivery pipeline;

[0031] The third pneumatic diaphragm valve 110 is used to prevent chemicals transported by the second transport pipeline from flowing into the first transport pipeline via the switching branch during the cleaning of the first transport pipeline; the seventh pneumatic diaphragm valve 210 is used to prevent chemicals transported by the first transport pipeline from flowing into the second transport pipeline via the switching branch during the cleaning of the second transport pipeline.

[0032] Furthermore, the control unit is used to receive monitoring data fed back by each concentration meter and each electrochemical sensor in the detection unit; the control unit is also used to switch the opening or closing state of each pneumatic diaphragm valve in the first delivery subsystem A, the second delivery subsystem B, the switching branch, and the cleaning unit, or to adjust the opening degree of each pneumatic diaphragm valve.

[0033] The chemical conveying system of this application enables the cleaning of chemical conveying equipment in the chemical conveying system without interrupting production. The cleaning process can be controlled and monitored in real time to ensure the consistency and reliability of the cleaning effect, avoid introducing new impurities during the cleaning process, ensure the purity of chemicals, and improve production efficiency. Attached Figure Description

[0034] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this application and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0035] Figure 1 A schematic diagram of the chemical delivery system provided in this application;

[0036] Figure label:

[0037] A - First conveying subsystem; B - Second conveying subsystem;

[0038] 101-First liquid storage container; 102-First pneumatic diaphragm valve; 103-Second pneumatic diaphragm valve; 104-First flow meter; 105-First thermometer; 106-First metering pump; 107-First concentration meter; 108-First electrochemical sensor; 109-First pressure gauge; 110-Third pneumatic diaphragm valve; 111-Fourth pneumatic diaphragm valve; 112-First supply point;

[0039] 201-Second liquid storage container; 202-Fifth pneumatic diaphragm valve; 203-Sixth pneumatic diaphragm valve; 204-Second flow meter; 205-Second thermometer; 206-Second metering pump; 207-Second concentration meter; 208-Second electrochemical sensor; 209-Second pressure gauge; 210-Seventh pneumatic diaphragm valve; 211-Eighth pneumatic diaphragm valve; 212-Second supply point;

[0040] 401-High-pressure nitrogen supply equipment; 402-Ninth pneumatic diaphragm valve; 403-Tenth pneumatic diaphragm valve;

[0041] 503 - Eighteenth pneumatic diaphragm valve; 506 - Seventeenth pneumatic diaphragm valve; 507 - Spectrometer;

[0042] 601-Waste liquid collector; 602-Thirteenth pneumatic diaphragm valve; 603-Fourteenth pneumatic diaphragm valve;

[0043] 301-Eleventh pneumatic diaphragm valve; 302 Cleaning agent circulation tank; 305-Twelfth pneumatic diaphragm valve;

[0044] 304 - Nineteenth pneumatic diaphragm valve; 306 - Twentieth pneumatic diaphragm valve;

[0045] 404-Fifteenth pneumatic diaphragm valve; 405-Sixteenth pneumatic diaphragm valve;

[0046] 501 - Air duct 501; 21st pneumatic diaphragm valve 504, 22nd pneumatic diaphragm valve 505

[0047] 502-Twenty-third pneumatic diaphragm valve. Detailed Implementation

[0048] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. The components of the embodiments of this application described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0049] Therefore, the following detailed description of the embodiments of this application provided in the accompanying drawings is not intended to limit the scope of the claimed application, but merely to illustrate selected embodiments of the application. All other embodiments obtained by those skilled in the art based on the embodiments of this application without inventive effort are within the scope of protection of this application.

[0050] In the description of this application, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product is in use. They are used only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application. In addition, the terms "first," "second," and "third," etc., are used only to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0051] Furthermore, terms such as "horizontal" and "vertical" do not imply that components must be absolutely horizontal or suspended, but rather that they can be slightly tilted. For example, "horizontal" simply means that its direction is more horizontal than "vertical," and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0052] In the description of this application, it should also be noted that, unless otherwise expressly specified and limited, the terms "set up," "install," "connect," and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0053] The following is combined Figure 1 This application describes the composition of a high-purity chemical delivery system according to embodiments of the present application.

[0054] Reference Figure 1 This embodiment provides a chemical delivery system, particularly a high-purity chemical delivery system suitable for delivering high-purity chemicals. The chemical delivery system includes: a first delivery subsystem A, a second delivery subsystem B, a switching branch, a detection unit, a cleaning unit, and a control unit (not shown). The first delivery subsystem A and the second delivery subsystem B are connected in parallel. The cleaning unit can be used to clean the first delivery subsystem A and / or the second delivery subsystem B. The switching branch is connected between the first delivery subsystem A and the second delivery subsystem B, so that while the cleaning unit is cleaning one of the two systems, chemicals can be delivered to the target supply point through the other system, achieving mutual backup and enabling cleaning of the delivery pipeline without interrupting the chemical supply.

[0055] Specifically, the first delivery subsystem A includes a first pneumatic diaphragm valve 102, a second pneumatic diaphragm valve 103, a first metering pump 106, a third pneumatic diaphragm valve 110, and a fourth pneumatic diaphragm valve 111, which are connected in series in the first delivery pipeline. The first delivery subsystem A also includes a first liquid storage container 101, connected upstream of the first pneumatic diaphragm valve 102, for storing and supplying the high-purity chemicals to be delivered. The first delivery pipeline ultimately connects to a first supply point 112, for supplying the high-purity chemicals to the first supply point 112. This first supply point 112 is located downstream of the first delivery pipeline.

[0056] The second delivery subsystem B includes a fifth pneumatic diaphragm valve 202, a sixth pneumatic diaphragm valve 203, a second metering pump 206, a seventh pneumatic diaphragm valve 210, and an eighth pneumatic diaphragm valve 211, which are connected in series in the second delivery pipeline. The second delivery subsystem B also includes a second storage container 201, connected upstream of the fifth pneumatic diaphragm valve 202, for storing and supplying the high-purity chemicals to be delivered. The second delivery pipeline ultimately connects to a second supply point 212 for supplying high-purity chemicals to the second supply point 212. This second supply point 212 is located downstream of the second delivery pipeline. In this application, upstream specifically refers to the front side along the chemical flow direction during the chemical delivery process; downstream refers to the rear side along the chemical flow direction during the chemical delivery process.

[0057] In some alternative embodiments, the first liquid storage container 101 and the second liquid storage container 201 may be the same container.

[0058] The first pneumatic diaphragm valve 102 is used to connect or disconnect the first delivery pipeline from the first liquid storage container 101. The fourth pneumatic diaphragm valve 111 is used to connect or disconnect any delivery pipeline from the first supply point 112. The second pneumatic diaphragm valve 103 can regulate the flow rate of chemicals in the first delivery pipeline. The third pneumatic diaphragm valve 110 is used to prevent chemicals delivered by the second delivery pipeline from flowing into the first delivery pipeline via the switching branch during cleaning of the first delivery pipeline.

[0059] The fifth pneumatic diaphragm valve 202 is used to connect or disconnect the second delivery line from the second storage container 201. The eighth pneumatic diaphragm valve 211 is used to connect or disconnect any delivery line from the second supply point 212. The sixth pneumatic diaphragm valve 203 can regulate the flow rate of chemicals in the second delivery line. The seventh pneumatic diaphragm valve 210 is used to prevent chemicals delivered by the first delivery line from flowing into the second delivery line via the switching branch during cleaning of the second delivery line.

[0060] Furthermore, one end of the aforementioned switching branch is connected between the third pneumatic diaphragm valve 110 and the fourth pneumatic diaphragm valve 111, and the other end is connected between the seventh pneumatic diaphragm valve 210 and the eighth pneumatic diaphragm valve 211. A twenty-third pneumatic diaphragm valve 502 is installed on this switching branch. When the twenty-third pneumatic diaphragm valve 502 is open, high-purity chemicals can be supplied to the second supply point 212 via the first delivery subsystem A; similarly, high-purity chemicals can also be supplied to the first supply point 112 via the second delivery subsystem B. For example, if the first delivery subsystem A needs cleaning but needs to supply chemicals to the first supply point 112, the third pneumatic diaphragm valve 110 is closed, the twenty-third pneumatic diaphragm valve 502 is opened, and high-purity chemicals are supplied to the first supply point 112 via the second delivery subsystem B. Alternatively, if the demand for chemicals at the first supply point 112 increases and the supply demand cannot be met by the first conveying subsystem A alone, the twenty-third pneumatic diaphragm valve 502 is opened, allowing both the first conveying subsystem A and the second conveying subsystem B to simultaneously supply chemicals to the first supply point 112, thereby meeting the demand for high-flow-rate chemicals. In this way, by setting up a switching branch, the first conveying subsystem A and the second conveying subsystem act as backups for each other.

[0061] In order to monitor the flow rate and temperature of the chemical liquid at the outlet of the second pneumatic diaphragm valve 103, a first flow meter 104 and a first thermometer 105 are installed between the second pneumatic diaphragm valve 103 and the first metering pump 106.

[0062] Furthermore, the detection unit includes a first concentration meter 107, a first electrochemical sensor 108, and a first pressure gauge 109 disposed at the outlet of the first metering pump 106. The first concentration meter 107 is used to monitor the concentration of chemicals in the pipeline at the outlet of the first metering pump 106 in real time. The first electrochemical sensor 108 is used to monitor in real time whether the chemicals in the pipeline at the outlet of the first metering pump 106 contain metal ion impurities. The first pressure gauge 109 is used to monitor the pressure in the pipeline at the outlet of the first metering pump 106.

[0063] Similarly, in order to monitor the flow rate and temperature of the chemical liquid at the outlet of the sixth pneumatic diaphragm valve 203, a second flow meter 204 and a second thermometer 205 are installed between the sixth pneumatic diaphragm valve 203 and the second metering pump 206.

[0064] Furthermore, the detection unit also includes a second concentration meter 207, a second electrochemical sensor 208, and a second pressure gauge 209, all disposed at the outlet of the second metering pump 206. The second concentration meter 207 is used to monitor the concentration of chemicals in the pipeline at the outlet of the second metering pump 206 in real time. The second electrochemical sensor 208 is used to monitor in real time whether the chemicals in the pipeline at the outlet of the second metering pump 206 contain metal ion impurities. The second pressure gauge 209 is used to monitor the pressure in the pipeline at the outlet of the second metering pump 206.

[0065] The first supply point 112 and the second supply point 212 mentioned above can be the same location on the chemical application equipment or they can be different locations. The chemical delivery system of this embodiment controls the opening and closing of each pneumatic diaphragm valve in each delivery pipeline and the output power of the metering pump to supply high-purity chemicals to the chemical application equipment at fixed points and in fixed quantities.

[0066] The first liquid storage container 101 and the second liquid storage container 201 mentioned above can be medium-sized bulk containers. Once the stored chemicals are used up, these medium-sized bulk containers can be directly replaced. If cleaning is required, these medium-sized bulk containers will be cleaned separately after replacement. Furthermore, the connecting pipes between the first liquid storage container 101 and the first pneumatic diaphragm valve 102, and between the second liquid storage container 201 and the second pneumatic diaphragm valve 202, can be corrugated hoses, which can be replaced along with the first liquid storage container 101 and the second liquid storage container 201.

[0067] The chemical delivery system also includes a high-pressure nitrogen supply branch. One end of this branch is connected to the air inlet at the top of the first liquid storage container 101, and the other end is connected to the air inlet at the top of the second liquid storage container 201. A ninth pneumatic diaphragm valve 402 and a tenth pneumatic diaphragm valve 403 are sequentially installed on this branch. The pipeline between the ninth and tenth pneumatic diaphragm valves 402 and 403 is connected to the high-pressure nitrogen supply device 401. The nitrogen supplied by the high-pressure nitrogen supply device 401 not only has a pressure higher than atmospheric pressure but also has high purity and will not react with the chemical solution. For example, when the ninth pneumatic diaphragm valve 402 is in the open state, high-pressure nitrogen from the high-pressure nitrogen supply device 401 is introduced into the first liquid storage container 101, giving the chemical liquid in the first liquid storage container 101 a downward high pressure. In this way, the chemical liquid can flow smoothly out from the discharge pipe (not shown) inserted into the first liquid storage container 101 and enter the connecting pipe connected to the first liquid storage container 101 and the first pneumatic diaphragm valve 102.

[0068] Furthermore, the cleaning unit in this embodiment includes a detection branch, a waste liquid collection branch, a cleaning agent supply branch, a cleaning agent recycling branch, and a purging branch. The aforementioned detection branch, waste liquid collection branch, cleaning agent supply branch, cleaning agent recycling branch, and purging branch are all connected between the first conveying subsystem A and the second conveying subsystem B, and are used to clean the first conveying subsystem A and / or the second conveying subsystem B.

[0069] The system includes a detection branch for quantitative analysis of chemical samples from the first and / or second delivery lines. A waste collection branch for recovering waste liquid from the first and / or second delivery lines, including residual chemicals and cleaning agents. A cleaning agent supply branch works in conjunction with a cleaning agent recycling branch to ensure the cleaning agent circulates within the first and / or second delivery lines. A purging branch for introducing high-pressure nitrogen gas into the first and / or second delivery lines.

[0070] The cleaning unit of this embodiment can clean the first conveying subsystem A and the second conveying subsystem B simultaneously, or it can clean a single conveying subsystem, so that the two conveying subsystems can be used in a standby manner. Next, each branch in the cleaning unit will be described in detail.

[0071] Specifically, one end of the aforementioned detection branch is connected between the first metering pump 106 and the third pneumatic diaphragm valve 110, and the other end is connected between the second metering pump 206 and the seventh pneumatic diaphragm valve 210. The detection branch is sequentially equipped with a seventeenth pneumatic diaphragm valve 506, a spectrometer 507, and an eighteenth pneumatic diaphragm valve 503, with the spectrometer 507 positioned between the seventeenth and eighteenth pneumatic diaphragm valves 506 and 503. When the concentration data collected by the first concentration meter 107 and the second concentration meter 207 are abnormal, and / or the first electrochemical sensor 108 and the second electrochemical sensor 208 detect abnormal levels of impurity metal ions in the chemical, quantitative analysis of the chemical samples from the first and / or second delivery pipelines is performed through this detection branch. For example, when the first electrochemical sensor 108 detects an abnormal content of impurity metal ions in the chemicals transported through the first delivery pipeline, the seventeenth pneumatic diaphragm valve 506 is opened, introducing the chemical sample from the first delivery pipeline into the spectrometer 507. Similarly, when the second electrochemical sensor 208 detects an abnormal content of impurity metal ions in the chemicals transported through the second delivery pipeline, the eighteenth pneumatic diaphragm valve 503 is opened, introducing the chemical sample from the second delivery pipeline into the spectrometer 507.

[0072] Furthermore, one end of the aforementioned waste liquid collection branch is connected between the second pneumatic diaphragm valve 103 and the first metering pump 106, and the other end is connected between the sixth pneumatic diaphragm valve 203 and the second metering pump 206. This waste liquid collection branch is equipped with a thirteenth pneumatic diaphragm valve 602, a fourteenth pneumatic diaphragm valve 603, and a waste liquid collector 601. The waste liquid collector 601 is located between the thirteenth pneumatic diaphragm valve 602 and the fourteenth pneumatic diaphragm valve 603. When the spectrometer 507 analyzes that the content of impurity metal ions in the chemical sample exceeds a predetermined value, the residual chemicals in the first delivery pipeline and / or the second delivery pipeline are discharged through this waste liquid collection branch to facilitate cleaning of the corresponding delivery pipelines and the pneumatic diaphragm valves and metering pumps installed on them. For example, when the spectrometer 507 analyzes that the content of impurity metal ions in the chemical sample from the first delivery line exceeds a predetermined value, the first pneumatic diaphragm valve 102 in the first delivery subsystem A is closed, and the thirteenth pneumatic diaphragm valve 602 is opened to collect the residual chemicals in the first delivery line into the waste liquid collector 601. Similarly, when the spectrometer 507 analyzes that the content of impurity metal ions in the chemical sample from the second delivery line exceeds a predetermined value, the fifth pneumatic diaphragm valve 202 in the second delivery subsystem B is closed, and the fourteenth pneumatic diaphragm valve 603 is opened to collect the residual chemicals in the second delivery line into the waste liquid collector 601.

[0073] Furthermore, one end of the aforementioned cleaning agent supply branch is connected between the first pneumatic diaphragm valve 102 and the second pneumatic diaphragm valve 103, and the other end is connected between the fifth pneumatic diaphragm valve 202 and the sixth pneumatic diaphragm valve 203. This cleaning agent supply branch is equipped with an eleventh pneumatic diaphragm valve 301, a twelfth pneumatic diaphragm valve 305, and a cleaning agent circulation tank 302. The cleaning agent circulation tank 302 is located between the eleventh pneumatic diaphragm valve 301 and the twelfth pneumatic diaphragm valve 305.

[0074] Furthermore, one end of the aforementioned cleaning agent circulation and recovery branch is connected between the outlet of the first metering pump 106 and the third pneumatic diaphragm valve 110, and the other end is connected between the outlet of the second metering pump 206 and the seventh pneumatic diaphragm valve 210. A nineteenth pneumatic diaphragm valve 304 and a twentieth pneumatic diaphragm valve 306 are sequentially installed on this cleaning agent circulation and recovery branch. The pipeline between the nineteenth pneumatic diaphragm valve 304 and the twentieth pneumatic diaphragm valve 306 is also connected to the aforementioned cleaning agent circulation tank 302. The eleventh pneumatic diaphragm valve 301 is linked with the nineteenth pneumatic diaphragm valve 304, and the twelfth pneumatic diaphragm valve 305 is linked with the twentieth pneumatic diaphragm valve 306.

[0075] When cleaning of the first delivery pipeline is required, with the eleventh pneumatic diaphragm valve 301 and the nineteenth pneumatic diaphragm valve 304 in the open state, the cleaning agent in the cleaning agent circulation tank 302 can enter the first delivery pipeline under the suction action of the first metering pump 106, thereby cleaning the first delivery pipeline and the second pneumatic diaphragm pump 103 and the first metering pump 106 installed on it, and then returning to the cleaning agent circulation tank 302 via the nineteenth pneumatic diaphragm valve 304. Correspondingly, when cleaning of the second delivery pipeline is required, with the twelfth pneumatic diaphragm valve 305 and the twentieth pneumatic diaphragm valve 306 in the open state, the cleaning agent in the cleaning agent circulation tank 302 can enter the second delivery pipeline under the suction action of the second metering pump 206, thereby cleaning the second delivery pipeline and the sixth pneumatic diaphragm valve 203 and the first metering pump 206 installed on it, and then returning to the cleaning agent circulation tank 302 via the twentieth pneumatic diaphragm valve 306.

[0076] The cleaning unit also includes a heating device 303. The heating device 303 is located between the nineteenth pneumatic diaphragm valve 304 and the twentieth pneumatic diaphragm valve 306 and the cleaning agent circulation tank 302. It is used to control the temperature of the cleaning agent flowing back to the cleaning agent circulation tank 302 from the first and second delivery pipelines, so as to keep the cleaning solution within the optimal operating temperature range and thus achieve a better cleaning effect.

[0077] Furthermore, the aforementioned purging branch includes a first purging branch and a second purging branch. The first purging branch is connected in parallel with the cleaning agent supply branch. One end of the first purging branch is connected between the first pneumatic diaphragm valve 102 and the second pneumatic diaphragm valve 103, and the other end is connected between the fifth pneumatic diaphragm valve 202 and the sixth pneumatic diaphragm valve 203. A fifteenth pneumatic diaphragm valve 404 and a sixteenth pneumatic diaphragm valve 405 are sequentially installed on the first purging branch. The pipeline between the fifteenth pneumatic diaphragm valve 404 and the sixteenth pneumatic diaphragm valve 405 is also connected to the aforementioned high-pressure nitrogen supply device 401.

[0078] The second purging branch is connected in parallel with the cleaning agent circulation and recovery branch. One end of the second purging branch is connected between the first metering pump 106 and the third pneumatic diaphragm valve 110, and the other end is connected between the second metering pump 206 and the seventh pneumatic diaphragm valve 210. The second purging branch is sequentially equipped with a twenty-first pneumatic diaphragm valve 504 and a twenty-second pneumatic diaphragm valve 505. The pipeline between the twenty-first and twenty-second pneumatic diaphragm valves 504 is also connected to the air duct 501. Specifically, the fifteenth pneumatic diaphragm valve 404 is linked with the twenty-first pneumatic diaphragm valve 504, and the sixteenth and twenty-second pneumatic diaphragm valves 405 are linked with the twenty-second pneumatic diaphragm valve 505.

[0079] After the first delivery pipeline is cleaned with the cleaning fluid, the fifteenth pneumatic diaphragm valve 404 and the twenty-first pneumatic diaphragm valve 504 are opened. High-pressure nitrogen gas enters the first delivery pipeline through the fifteenth pneumatic diaphragm valve 404 to purge the first delivery pipeline and its installed components, such as the second pneumatic diaphragm pump 103 and the first metering pump 106, to remove impurities and moisture from the first delivery pipeline, ensuring the pipeline is clean and dry. Similarly, after the second delivery pipeline is cleaned with the cleaning fluid, the sixteenth pneumatic diaphragm valve 405 and the twenty-second pneumatic diaphragm valve 505 are opened. High-pressure nitrogen gas enters the second delivery pipeline through the sixteenth pneumatic diaphragm valve 405 to purge the second delivery pipeline and its installed components, such as the sixth pneumatic diaphragm valve 203 and the second metering pump 206, to remove impurities and moisture from the second delivery pipeline, ensuring the pipeline is clean and dry.

[0080] Furthermore, the chemical delivery system also includes a control unit. The control unit is electrically connected to each pneumatic diaphragm valve in the chemical delivery system to control the opening or closing of each pneumatic diaphragm valve or to control the degree of its opening. The control unit is also electrically connected to the first metering pump 106 and the second metering pump 206 to control the start / stop of the first metering pump 106 and the output flow rate of the second metering pump 206, respectively.

[0081] The working principle of the chemical delivery system in this embodiment will be explained in detail below.

[0082] During normal chemical transport, the first transport subsystem A and the second transport subsystem B can operate independently or simultaneously. This embodiment uses the simultaneous operation of both subsystems as an example to illustrate the control process of the chemical transport system.

[0083] During normal chemical transport, only the pneumatic diaphragm valves in the first transport pipeline, the second transport pipeline, and the high-pressure nitrogen supply branch are open; all other pneumatic diaphragm valves are closed. Specifically, the ninth pneumatic diaphragm valve 402 and the tenth pneumatic diaphragm valve 403 in the high-pressure nitrogen supply branch are open. The high-pressure nitrogen supplied by the high-pressure nitrogen supply equipment 401 enters the first liquid storage container 101 and the second liquid storage container 201 through the ninth pneumatic diaphragm valve 402 and the tenth pneumatic diaphragm valve 403, respectively, to transport the high-purity chemicals from the first liquid storage container 101 and the second liquid storage container 201 to the first transport pipeline and the second transport pipeline, respectively. The first pneumatic diaphragm valve 102, the second pneumatic diaphragm valve 103, the third pneumatic diaphragm valve 110, and the fourth pneumatic diaphragm valve 111 in the first transport pipeline are all open, and the first metering pump 106 is in the active state to supply chemicals to the first supply point 112. The fifth pneumatic diaphragm valve 202, the sixth pneumatic diaphragm valve 203, the seventh pneumatic diaphragm valve 210, and the eighth pneumatic diaphragm valve 211 in the second delivery pipeline are all open, and the second metering pump is in the on state to supply chemicals to the second supply point 212.

[0084] The control unit is electrically connected to the aforementioned sensors, including the first concentration meter 107, the second concentration meter 207, the first electrochemical sensor 108, and the second electrochemical sensor 208, to receive detection data transmitted by these sensors. Specifically, the first concentration meter 107 and the second concentration meter 207 collect real-time concentration data of the chemicals in the pipelines at the outlets of the first metering pump 106 and the second metering pump 206, respectively, and transmit the detected concentration data to the control unit. The first electrochemical sensor 108 and the second electrochemical sensor 208 monitor in real-time whether the chemicals in the pipelines at the outlets of the first metering pump 106 and the second metering pump 206 contain impurity metal ions, and transmit any abnormal data regarding the detected impurity metal ion content to the control unit.

[0085] The aforementioned control unit is also used to analyze the data acquired by the aforementioned sensors, such as comparing it with historical data or with a preset threshold or a preset threshold range, or using a data model to predict the purity of chemicals, thereby determining whether the chemicals supplied to each supply point meet the requirements.

[0086] Another embodiment of this application discloses a cleaning method for a chemical delivery system. This cleaning method includes steps such as chemical anomaly detection and analysis, discharge of residual chemicals, introduction of cleaning agent for circulation cleaning, discharge of residual cleaning agent, and purging and drying.

[0087] When the concentration data collected by the first concentration meter 107 changes and / or the first electrochemical sensor 108 detects an abnormal content of impurity metal ions in the chemical, the seventeenth pneumatic diaphragm valve 506 on the detection branch is opened to introduce the chemical delivered by the first metering pump 106 into the spectrometer 507. The spectrometer 507 performs quantitative analysis on the chemical sample from the first delivery pipeline. The aforementioned metal ions include Ca+, Mg+, Fe+, Zn+, Cr+, and Ni+.

[0088] When the concentration data collected by the second concentration meter 207 changes and / or the second electrochemical sensor 208 detects an abnormal content of impurity metal ions in the chemical, the eighteenth pneumatic diaphragm valve 503 on the detection branch is opened to introduce the chemical delivered by the second metering pump 206 into the spectrometer 507. The spectrometer 507 performs quantitative analysis on the chemical sample from the second delivery pipeline.

[0089] When the spectrometer 507 analyzes that the content of impurity metal ions in the chemical sample from the first delivery pipeline exceeds a predetermined value, it disconnects the connection between the first delivery pipeline and the first storage solution 101 and the first supply point 112. That is, it closes the ninth pneumatic diaphragm valve 402 on the high-pressure nitrogen supply branch to stop the chemical from being forced into the first delivery pipeline from the first storage container 101; at the same time, it closes the first pneumatic diaphragm valve 102 and the third pneumatic diaphragm valve 110 in the first delivery pipeline to facilitate the cleaning unit to perform cleaning operations on the first delivery pipeline.

[0090] When the spectrometer 507 analyzes and finds that the content of impurity metal ions in the chemical sample from the second delivery pipeline exceeds a predetermined value, it disconnects the connection between the second delivery pipeline and the second storage solution 201 and the second supply point 212. That is, it closes the tenth pneumatic diaphragm valve 403 on the high-pressure nitrogen supply branch to stop the chemical from being forced into the second delivery pipeline from the second storage container 201; at the same time, it closes the fifth pneumatic diaphragm valve 202 and the seventh pneumatic diaphragm valve 210 in the second delivery pipeline to facilitate the cleaning unit to clean the second delivery pipeline.

[0091] Next, the operating logic of the pneumatic diaphragm valves on each branch of the cleaning unit during the cleaning operation is explained in detail.

[0092] Taking the cleaning operation of the first delivery pipeline as an example. First, the control unit sends a command to open the thirteenth pneumatic diaphragm valve 602 on the waste liquid collection branch, so as to discharge the residual high-purity chemicals in the first delivery pipeline to the waste liquid collector 601. After the residual liquid is discharged, the control unit sends a command to close the thirteenth pneumatic diaphragm valve 602. The determination of whether the residual liquid has been discharged can be accomplished by a preset time, which can be set in advance and changed. For example, assuming that the residual liquid discharge can be completed in 5 minutes, after 5 minutes since the thirteenth pneumatic diaphragm valve 602 was opened, the control unit can determine that the residual liquid has been discharged and send a command to close the thirteenth pneumatic diaphragm valve 602.

[0093] Next, the control unit sends a command to open the eleventh pneumatic diaphragm valve 301 on the cleaning agent supply branch and the nineteenth pneumatic diaphragm valve 304 on the cleaning agent circulation and recovery branch. Cleaning agent flows out from the cleaning agent circulation tank 302, cleaning the first delivery pipeline and its pneumatic diaphragm valves and metering pump. During the cleaning process, the control unit receives detection data from the first concentration meter 107 and the first electrochemical sensor 108. When the detection data from the first concentration meter 107 and the first electrochemical sensor 108 no longer change, the cleaning is considered complete, and the control unit sends a command to close the eleventh pneumatic diaphragm valve 301 on the cleaning agent supply branch and the nineteenth pneumatic diaphragm valve 304 on the cleaning agent circulation and recovery branch.

[0094] Then, the control unit sends a command to open the thirteenth pneumatic diaphragm valve 602 on the waste liquid collection branch, so as to discharge the residual cleaning agent in the first delivery pipeline into the waste liquid collector 601. Similarly, after the preset time is reached, the control unit sends a command to close the thirteenth pneumatic diaphragm valve 602 on the waste liquid collection branch.

[0095] Finally, the control unit sends a command to open the fifteenth pneumatic diaphragm valve 404 and the twenty-first pneumatic diaphragm valve 504 on the purging branch, so as to purge the first delivery pipeline and the pneumatic diaphragm valves, metering pumps and other equipment installed on it, remove the residual cleaning agent and perform a drying process.

[0096] The same steps are followed for cleaning the second delivery pipeline. The control unit sends corresponding commands to control the operation of the pneumatic diaphragm valves on each branch of the cleaning unit.

[0097] Specifically, firstly, the fourteenth pneumatic diaphragm valve 603 on the waste liquid collection branch is opened to discharge the remaining high-purity chemicals in the second delivery pipeline to the waste liquid collector 601. After the residual liquid is discharged, the fourteenth pneumatic diaphragm valve 603 is closed. Next, the twelfth pneumatic diaphragm valve 305 on the cleaning agent supply branch and the twentieth pneumatic diaphragm valve 306 on the cleaning agent circulation and recovery branch are opened, and the cleaning agent flows out from the cleaning agent circulation tank 302 to clean the second delivery pipeline and its pneumatic diaphragm valves and metering pump. During the cleaning process, when the measurement data of the second concentration meter 207 and the second electrochemical sensor 208 no longer change, the cleaning is considered to be completed, and the twelfth pneumatic diaphragm valve 305 on the cleaning agent supply branch and the twentieth pneumatic diaphragm valve 306 on the cleaning agent circulation and recovery branch are closed. Then, open the fourteenth pneumatic diaphragm valve 603 on the waste liquid collection branch to discharge the residual cleaning agent in the pipeline into the waste liquid collector 601; after the preset time is reached, close the fourteenth pneumatic diaphragm valve 603 on the waste liquid collection branch. Finally, purge the sixteenth pneumatic diaphragm valve 405 and the twenty-second pneumatic diaphragm valve 505 on the purging branch to purge the second delivery pipeline and the pneumatic diaphragm valves, metering pumps, etc. installed on it, to remove the residual cleaning agent.

[0098] The two delivery lines described above do not need to be cleaned simultaneously. The second delivery line can supply liquid normally while the first delivery line is being cleaned, or vice versa. Of course, the two delivery lines can also be cleaned at the same time.

[0099] By switching branch settings, cleaning operations on one delivery pipeline can be performed without affecting the supply of high-purity chemicals to the corresponding supply point, thus achieving continuous production. For example, when cleaning of the first delivery pipeline is required, high-purity chemicals can be supplied to the first supply point through the second delivery pipeline and the switching branch. Specifically, by closing the third pneumatic diaphragm valve 110 and opening the twenty-third pneumatic diaphragm valve 502 and the fourth pneumatic diaphragm valve 111, the second delivery pipeline can temporarily supply chemicals to the first supply point, thereby enabling automatic cleaning of the delivery equipment without interrupting production. By controlling the opening and closing of each pneumatic diaphragm valve, cleaning of different pipelines can be achieved simultaneously.

[0100] Thus, by setting up a cleaning unit, the chemical delivery system of this embodiment can be automatically cleaned. By setting up switching branches, the chemical delivery system of this embodiment can automatically clean one of the delivery pipelines without interrupting production. During the cleaning process, by monitoring the data from the concentration meter and electrochemical sensor, the consistency and reliability of the cleaning effect can be ensured. In summary, the chemical delivery system of this embodiment forms a highly efficient and stable chemical delivery network, capable of simultaneously supplying chemicals to two supply points; it can also be used as a backup when supplying chemicals to a single supply point, thereby improving the reliability of the equipment.

[0101] The above are merely preferred embodiments of this application and are not intended to limit this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. A chemical delivery system suitable for delivering high-purity chemicals, characterized in that, It includes a first conveying subsystem (A), a second conveying subsystem (B), a switching branch, a detection unit, a cleaning unit, and a control unit; The first conveying subsystem (A) and the second conveying subsystem (B) are connected in parallel. The first conveying subsystem (A) is directly connected to the first supply point (112), and the second conveying subsystem (B) is directly connected to the second supply point (212). The detection unit is used to monitor the characteristic data of the fluids flowing in the first delivery subsystem (A) and the second delivery subsystem (B), the characteristic data including at least one of concentration and impurity metal ion content; The cleaning unit is used to perform cleaning operations on the first conveying subsystem (A) and / or the second conveying subsystem (B); The switching branch is connected between the first conveying subsystem (A) and the second conveying subsystem (B), and is used to enable the second conveying subsystem (B) to be indirectly connected to the first supply point (112) to convey chemicals when the cleaning unit performs cleaning operations on the first conveying subsystem (A), or to enable the first conveying subsystem (A) to be indirectly connected to the second supply point (212) to convey chemicals when the cleaning unit performs cleaning operations on the second conveying subsystem (B); The control unit is electrically connected to the first conveying subsystem (A), the second conveying subsystem (B), the switching branch, the detection unit, and the cleaning unit.

2. The chemical delivery system according to claim 1, characterized in that, The first delivery subsystem (A) includes a first pneumatic diaphragm valve (102), a second pneumatic diaphragm valve (103), a first metering pump (106), a third pneumatic diaphragm valve (110), and a fourth pneumatic diaphragm valve (111), which are connected in series in the first delivery pipeline. The second delivery subsystem (B) includes a fifth pneumatic diaphragm valve (202), a sixth pneumatic diaphragm valve (203), a second metering pump (206), a seventh pneumatic diaphragm valve (210), and an eighth pneumatic diaphragm valve (211) connected in series in the second delivery pipeline. The detection unit includes a first concentration meter (107) and a first electrochemical sensor (108) disposed at the outlet of the first metering pump (106), and a second concentration meter (207) and a second electrochemical sensor (208) disposed at the outlet of the second metering pump (206).

3. The chemical delivery system according to claim 2, characterized in that, One end of the switching branch is connected between the third pneumatic diaphragm valve (110) and the fourth pneumatic diaphragm valve (111), and the other end is connected between the seventh pneumatic diaphragm valve (210) and the eighth pneumatic diaphragm valve (211); a twenty-third pneumatic diaphragm valve (502) is provided on the switching branch.

4. The chemical delivery system according to claim 3, characterized in that, The cleaning unit includes: a detection branch, a waste liquid collection branch, a cleaning agent supply branch, a cleaning agent circulation and recovery branch, and a purging branch; The detection branch is used for quantitative analysis of chemical samples from the first delivery line and / or the second delivery line; The waste liquid collection branch is used to recover waste liquid from the first delivery pipeline and / or the second delivery pipeline, the waste liquid including chemical residues and cleaning agent residues; The cleaning agent supply branch and the cleaning agent circulation and recovery branch work together to enable the cleaning agent to circulate in the first delivery pipeline and / or the second delivery pipeline. The purging branch is used to introduce high-pressure nitrogen into the first delivery pipeline and / or the second delivery pipeline.

5. The chemical delivery system according to claim 4, characterized in that, One end of the detection branch is connected between the first metering pump (106) and the third pneumatic diaphragm valve (110), and the other end is connected between the second metering pump (206) and the seventh pneumatic diaphragm valve (210); the detection branch is sequentially provided with a seventeenth pneumatic diaphragm valve (506), a spectrometer (507) and an eighteenth pneumatic diaphragm valve (503); wherein, the spectrometer (507) is located between the seventeenth pneumatic diaphragm valve (506) and the eighteenth pneumatic diaphragm valve (503).

6. The chemical delivery system according to claim 5, characterized in that, One end of the waste liquid collection branch is connected between the second pneumatic diaphragm valve (103) and the first metering pump (106), and the other end is connected between the sixth pneumatic diaphragm valve (203) and the second metering pump (206); the waste liquid collection branch is provided with a thirteenth pneumatic diaphragm valve (602), a fourteenth pneumatic diaphragm valve (603) and a waste liquid collector (601); the waste liquid collector (601) is located between the thirteenth pneumatic diaphragm valve (602) and the fourteenth pneumatic diaphragm valve (603).

7. The chemical delivery system according to claim 6, characterized in that, One end of the cleaning agent supply branch is connected between the first pneumatic diaphragm valve (102) and the second pneumatic diaphragm valve (103), and the other end is connected between the fifth pneumatic diaphragm valve (202) and the sixth pneumatic diaphragm valve (203); the cleaning agent supply branch is provided with an eleventh pneumatic diaphragm valve (301), a twelfth pneumatic diaphragm valve (305), and a cleaning agent circulation tank (302); the cleaning agent circulation tank (302) is located between the eleventh pneumatic diaphragm valve (301) and the twelfth pneumatic diaphragm valve (305); One end of the cleaning agent circulation and recovery branch is connected between the outlet of the first metering pump (106) and the third pneumatic diaphragm valve (110), and the other end is connected between the outlet of the second metering pump (206) and the seventh pneumatic diaphragm valve (210); the cleaning agent circulation and recovery branch is sequentially provided with a nineteenth pneumatic diaphragm valve (304) and a twentieth pneumatic diaphragm valve (306); the pipeline between the nineteenth pneumatic diaphragm valve (304) and the twentieth pneumatic diaphragm valve (306) is also connected to the cleaning agent circulation tank (302); The eleventh pneumatic diaphragm valve (301) is linked with the nineteenth pneumatic diaphragm valve (304); the twelfth pneumatic diaphragm valve (305) is linked with the twentieth pneumatic diaphragm valve (306).

8. The chemical delivery system according to claim 7, characterized in that, The purging branch includes a first purging branch and a second purging branch; the first purging branch is connected in parallel with the cleaning agent supply branch; one end of the first purging branch is connected between the first pneumatic diaphragm valve (102) and the second pneumatic diaphragm valve (103), and the other end is connected between the fifth pneumatic diaphragm valve (202) and the sixth pneumatic diaphragm valve (203); a fifteenth pneumatic diaphragm valve (404) and a sixteenth pneumatic diaphragm valve (405) are sequentially provided on the first purging branch; the pipeline between the fifteenth pneumatic diaphragm valve (404) and the sixteenth pneumatic diaphragm valve (405) is connected to the high-pressure nitrogen supply equipment (401); The second purging branch is connected in parallel with the cleaning agent circulation and recovery branch; one end of the second purging branch is connected between the first metering pump (106) and the third pneumatic diaphragm valve (110), and the other end is connected between the second metering pump (206) and the seventh pneumatic diaphragm valve (210); the second purging branch is sequentially provided with a twenty-first pneumatic diaphragm valve (504) and a twenty-second pneumatic diaphragm valve (505), and the pipeline between the twenty-first pneumatic diaphragm valve (504) and the twenty-second pneumatic diaphragm valve (505) is connected to the air duct (501); The fifteenth pneumatic diaphragm valve (404) is linked with the twenty-first pneumatic diaphragm valve (504); the sixteenth pneumatic diaphragm valve (405) is linked with the twenty-second pneumatic diaphragm valve (505).

9. The chemical delivery system according to claim 8, characterized in that, The first pneumatic diaphragm valve (102) and the fifth pneumatic diaphragm valve (202) are respectively used to connect or disconnect the first delivery pipeline and the second delivery pipeline from the liquid storage container; The fourth pneumatic diaphragm valve (111) is used to connect or disconnect any delivery pipeline from the first supply point (112); the eighth pneumatic diaphragm valve (211) is used to connect or disconnect any delivery pipeline from the second supply point (212). The second pneumatic diaphragm valve (103) is used to regulate the flow rate of the chemicals in the first delivery pipeline; the sixth pneumatic diaphragm valve (203) is used to regulate the flow rate of the chemicals in the second delivery pipeline; The third pneumatic diaphragm valve (110) is used to prevent chemicals transported by the second delivery pipeline from flowing into the first delivery pipeline via the switching branch during the cleaning of the first delivery pipeline; the seventh pneumatic diaphragm valve (210) is used to prevent chemicals transported by the first delivery pipeline from flowing into the second delivery pipeline via the switching branch during the cleaning of the second delivery pipeline.

10. The chemical delivery system according to claim 9, characterized in that, The control unit is used to receive monitoring data fed back by each concentration meter and each electrochemical sensor in the detection unit; the control unit is also used to switch the opening or closing state of each pneumatic diaphragm valve in the first delivery subsystem (A), the second delivery subsystem (B), the switching branch, and the cleaning unit, or to adjust the opening degree of each pneumatic diaphragm valve.

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