Overturning jig for double-face machining
By designing a flipping fixture for double-sided processing, the spray head can be quickly and stably flipped using a rotating shaft and a limiting structure. This solves the problem of positional offset in double-sided processing of the spray head and improves processing efficiency and accuracy.
Patent Information
- Application Number
- CN202520578419.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-03-31
- Publication Date
- 2026-03-06
- Estimated Expiration
- 2035-03-31
AI Technical Summary
Existing technology requires manual flipping during the double-sided processing of the spray head, which leads to position and angle offsets, affecting the microporous structure and product quality.
A flipping fixture for double-sided processing was designed. The spray head fixing component and the bottom frame are connected by a rotating shaft to realize the rapid switching and stable flipping of the spray head. The position and angle consistency of the spray head during the flipping process are ensured by the use of limit blocks and limit groove structures.
It improves the efficiency and precision of double-sided processing of spray heads, reduces operational complexity, ensures processing consistency and accuracy, and avoids errors caused by positional offset.
Smart Images
Figure CN223971230U_ABST
Abstract
Description
Technical Field
[0001] This utility model belongs to the field of machining fixture technology, and in particular relates to a flipping fixture for double-sided machining. Background Technology
[0002] Currently, the spray head is a core component in semiconductor dry etching equipment, directly affecting process accuracy and product quality. It is a key component in the gas distribution process of the process. The surface of the spray head is densely covered with micropores. Through a precisely designed channel structure and gas path, special process gases need to pass through thousands of tiny holes and be uniformly deposited on the wafer surface. The film layer in different areas of the wafer must ensure high uniformity and consistency. Among them, the structural types of micropores in the spray head are mainly divided into through holes, stepped holes, and flared holes. Except for straight holes, stepped holes all need to be processed on both sides. In the current technology, when processing both sides, the spray head needs to be manually flipped, which causes the position and angle of the spray head to shift relative to the reference of the previous side. This makes it impossible for the centers of the processed holes on both sides of the spray head to be aligned, which seriously affects the micropore structure and product quality.
[0003] To solve the above-mentioned technical problems, this utility model designs a flipping fixture for double-sided processing. Utility Model Content
[0004] To solve the above problems, this utility model provides the following technical solution: a flipping fixture for double-sided processing, including a base frame and a spray head fixing member. The base frame has a first protrusion and a second protrusion arranged opposite to each other. The first protrusion has a first through hole, and the second protrusion has a second through hole. The spray head fixing member has a rotating shaft, and the two ends of the rotating shaft pass through the first through hole and the second through hole, respectively, so that the spray head fixing member can rotate relative to the base frame between a first position and a second position around the rotating shaft. In the first position, the first surface of the spray head fixing member is in contact with the base frame, and in the second position, the second surface of the spray head fixing member is in contact with the base frame.
[0005] Based on the above technical solution, the spray head fixing component is provided with a mounting hole, a first limiting block and a second limiting block. The first limiting block and the second limiting block are arranged opposite to each other on the first and second surfaces of the spray head fixing component, and the first limiting block and the second limiting block fix the spray head in the mounting hole.
[0006] Furthermore, there are multiple first limiting blocks and multiple second limiting blocks, which are evenly distributed circumferentially around the edge of the mounting hole.
[0007] Based on the above technical solution, the spray head fixing component is provided with multiple limiting grooves, and the first limiting block and the second limiting block are disposed in the limiting grooves so that the first limiting block and the second limiting block abut against the spray head.
[0008] Furthermore, the first limiting block and the second limiting block are provided with limiting holes, and the bottom wall of the limiting groove is provided with limiting mating holes. The limiting holes and the limiting mating holes are fixed to the first limiting block and the second limiting block in the limiting groove by a fastener passing through them.
[0009] Based on the above technical solution, the first and second surfaces of the spray head fixing component are provided with mounting grooves, the through hole is provided in the bottom wall of the mounting groove, and the side wall of the mounting groove is provided with chamfers.
[0010] Based on the above technical solution, the spray head fixing component is provided with a first through hole, which penetrates the first and second surfaces of the spray head fixing component to discharge cutting fluid.
[0011] Optionally, there may be multiple first through holes, which are evenly distributed around the spray head.
[0012] Furthermore, the bottom frame is provided with multiple limiting protrusions on its periphery, which are used to engage with the machining center to limit the bottom frame to the machining center.
[0013] Furthermore, the bottom frame is provided with a plurality of second through holes along the thickness direction, and a fastener passes through the second through holes to the machining center to fix the bottom frame to the machining center.
[0014] Compared with related technologies, the beneficial effects of this utility model are as follows:
[0015] This invention connects the spray head fixing component to the base frame via a rotating shaft, allowing the component to quickly switch between a first and a second position. This enables continuous processing of both sides of the spray head, reducing disassembly and reinstallation time and improving processing efficiency. Furthermore, the precise fit between the rotating shaft and the through hole ensures the spray head fixing component maintains a stable position and angle during rotation, guaranteeing consistency and accuracy in processing both sides and avoiding processing errors caused by positional shifts. In addition, the design of the rotating fixture allows operators to complete the processing of both sides of the spray head with a simple rotating motion, eliminating the need for complex adjustments or additional tools, simplifying the operation process and reducing operational difficulty. Attached Figure Description
[0016] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only one embodiment of this utility model. For those skilled in the art, other embodiments can be derived from the provided drawings without creative effort.
[0017] Figure 1 This is a schematic diagram of the structure of a flipping fixture provided by this utility model;
[0018] Figure 2 This is a schematic diagram of another flipping fixture provided by this utility model;
[0019] Figure 3 This utility model provides Figure 2 A schematic diagram of the cross-sectional structure along the AA direction shown in the figure;
[0020] Figure 4 This utility model provides Figure 3 The enlarged structural diagram of part A shown in the figure.
[0021] In the diagram: 1. Base frame; 11. First protrusion; 111. First through hole; 12. Second protrusion; 121. Second through hole; 13. Limiting protrusion; 14. Second through hole; 2. Spray head fixing component; 20. Rotating shaft; 21. First surface; 22. Second surface; 23. Mounting hole; 24. First limiting block; 25. Second limiting block; 251. Limiting hole; 26. Limiting groove; 261. Limiting mating hole; 262. Fastener; 27. Mounting groove; 28. First through hole. Detailed Implementation
[0022] The present invention will be further described below with reference to the accompanying drawings and examples:
[0023] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this utility model, and should not be construed as limiting this utility model.
[0024] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.
[0025] In the description of this utility model, it should be understood that the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.
[0026] Combination Figure 1-4 As shown, this embodiment of the present disclosure provides a flipping fixture for double-sided processing, including a base frame 1 and a spray head fixing member 2. The base frame 1 has a first protrusion 11 and a second protrusion 12 arranged opposite to each other. The first protrusion 11 has a first through hole 111, and the second protrusion 12 has a second through hole 121. The spray head fixing member 2 has a rotating shaft 20. The two ends of the rotating shaft 20 pass through the first through hole 111 and the second through hole 121, respectively, so that the spray head fixing member 2 can rotate relative to the base frame 1 around the rotating shaft 20 between a first position and a second position. In the first position, the first surface 21 of the spray head fixing member 2 is in contact with the base frame 1, and in the second position, the second surface 22 of the spray head fixing member 2 is in contact with the base frame 1.
[0027] The flipping fixture for double-sided processing provided in this embodiment allows the spray head fixing member 2 to be rotatably connected to the base frame 1 via a rotating shaft 20. This enables the spray head fixing member 2 to quickly switch between a first position and a second position, allowing continuous processing of both sides of the spray head. This reduces disassembly and reinstallation time, improving processing efficiency. Furthermore, through the precise fit between the rotating shaft 20 and the through hole, the spray head fixing member 2 maintains a stable position and angle during flipping, ensuring consistency and accuracy during processing on both sides and avoiding processing errors caused by positional offset. In addition, the design of the flipping fixture allows operators to complete the processing of both sides of the spray head with a simple flipping action, eliminating the need for complex adjustments or additional tools, simplifying the operation process and reducing operational difficulty.
[0028] like Figure 1 As shown, based on the above technical solution, the spray head fixing component 2 is provided with a mounting hole 23, a first limiting block 24 and a second limiting block 25. The first limiting block 24 and the second limiting block 25 are arranged opposite to each other on the first surface 21 and the second surface 22 of the spray head fixing component 2. The first limiting block 24 and the second limiting block 25 fix the spray head in the mounting hole 23.
[0029] With the relative arrangement of the first limiting block 24 and the second limiting block 25, the spray head is firmly fixed in the mounting hole 23, preventing it from loosening or shifting during processing and ensuring the stability and reliability of the processing. The position of the spray head in the mounting hole 23 is precisely defined by the first limiting block 24 and the second limiting block 25, avoiding any offset or tilting of the spray head during processing, thereby improving the positioning accuracy and consistency of the processing. Since the first limiting block 24 and the second limiting block 25 are located on the first surface 21 and the second surface 22 of the spray head fixing component 2, respectively, the spray head can still be firmly fixed after being flipped, ensuring that the position and posture of the spray head remain consistent during double-sided processing, meeting the technical requirements of double-sided processing.
[0030] like Figure 1 As shown, there are multiple first limiting blocks 24 and multiple second limiting blocks 25, which are evenly distributed circumferentially around the edge of the mounting hole 23.
[0031] Multiple first limiting blocks 24 and second limiting blocks 25 are evenly distributed circumferentially, which can apply a uniform clamping force to the spray head, avoid loosening or deflection caused by uneven force at a single point, ensure that the spray head remains stable during processing, and can be adapted to spray heads of different specifications, sizes and types by adjusting the position or number of the first limiting blocks 24 and the second limiting blocks 25, thereby improving the versatility and flexibility of the fixture.
[0032] Based on the above technical solutions, such as Figure 3 and Figure 4 As shown, the spray head fixing component 2 is provided with a plurality of limiting grooves 26, and the first limiting block 24 and the second limiting block 25 are disposed in the limiting grooves 26 so that the first limiting block 24 and the second limiting block 25 both abut against the spray head.
[0033] The first limiting block 24 and the limiting block are embedded in the limiting groove 26 to form a mechanical interlocking structure, preventing the first limiting block 24 and the second limiting block 25 from loosening or shifting during processing or flipping. The limiting groove 26 physically constrains the position of the limiting block, ensuring that the contact position between the limiting block and the spray head is exactly the same each time it is clamped, eliminating human adjustment errors, and ensuring the symmetry and dimensional consistency of double-sided processing.
[0034] Specifically, the positions of the first limiting block 24 and the second limiting block 25 can be adjusted relative to the limiting groove 26, thereby adapting to different specifications and types of spray heads and expanding the applicability of the fixture.
[0035] Furthermore, such as Figure 4As shown, the first limiting block 24 and the second limiting block 25 are provided with limiting holes 251, and the bottom wall of the limiting groove 26 is provided with a limiting mating hole 261. The limiting holes 251 and the limiting mating holes 261 are fixed to the first limiting block 24 and the second limiting block 25 in the limiting groove 26 by a fastener 262 passing through them. Specifically, the limiting holes 251 and the limiting mating holes 261 can be threaded holes, fixed by bolts, or they can be through holes, fixed by pins.
[0036] Based on the above technical solutions, such as Figure 1 and Figure 3 As shown, the first surface 21 and the second surface 22 of the spray head fixing member 2 are both provided with mounting grooves 27, the through hole is provided in the bottom wall of the mounting groove 27, and the side wall of the mounting groove 27 is provided with chamfers.
[0037] The mounting slot 27 forms a chip collection space, which can hold chips or cutting fluid generated during the machining process. The chamfered structure guides the liquid to drain in a specific direction, preventing impurities or liquid from affecting the processing of the spray head.
[0038] like Figure 1 As shown, based on the above technical solution, the spray head fixing member 2 is provided with a first through hole 28, which penetrates the first surface 21 and the second surface 22 of the spray head fixing member 2 to discharge cutting fluid.
[0039] Specifically, there can be two first through holes 28, which are arranged opposite each other on both sides of the spray head. Alternatively, there can be multiple first through holes 28, which are evenly distributed around the spray head to facilitate the discharge of cutting fluid during the machining process.
[0040] Furthermore, such as Figure 1 As shown, the bottom frame 1 has multiple limiting protrusions 13 around its periphery. The limiting protrusions 13 are used to engage with the machining center to limit the bottom frame 1 to the machining center.
[0041] The limiting protrusion 13 and the locking structure of the machining center form a mechanical hard limit, eliminating the risk of slight displacement of the bottom frame 1 during processing, ensuring that the relative position of the spray head fixing part 2 and the machining center always maintains high-precision alignment, and improving the consistency of machining dimensions. The multiple limiting protrusions 13 constitute a modular positioning system. Simply push the bottom frame 1 into the machining center to automatically complete the alignment and locking, eliminating the tedious leveling steps of traditional fixtures and improving processing efficiency to a certain extent.
[0042] like Figure 1 As shown, the bottom frame 1 is further provided with a plurality of second through holes 14 along the thickness direction, and a fastener 262 passes through the second through holes 14 to the machining center to fix the bottom frame 1 to the machining center.
[0043] The distributed locking structure of multiple second through holes 14 and fasteners 262 enables the base frame 1 to form a full circumferential rigid connection with the machining center, effectively suppressing machining vibration and improving machining stability. Specifically, the fasteners 262 can be bolts, which are tightened in a standardized manner using a torque wrench to ensure that the installation preload of multiple fasteners 262 is consistent and that the preload is consistent for each installation, which can improve machining accuracy to a certain extent.
[0044] The present invention has been described above by way of example, but the present invention is not limited to the specific embodiments described above. Any modifications or variations made based on the present invention shall fall within the scope of protection claimed by the present invention.
Claims
1. A flipper jig for double-sided processing, characterized by, The bottom frame is provided with a first protrusion and a second protrusion arranged oppositely, the first protrusion is provided with a first through hole, the second protrusion is respectively provided with a second through hole, the spray head fixing part is provided with a rotating shaft, the rotating shaft is respectively arranged in the first through hole and the second through hole, so that the spray head fixing part can rotate relative to the bottom frame around the rotating shaft between the first position and the second position, wherein, in the first position, the first surface of the spray head fixing part is in contact with the bottom frame, in the second position, the second surface of the spray head fixing part is in contact with the bottom frame.
2. The flipper for double-sided processing according to claim 1, wherein, The spray head fixing part is provided with a mounting hole, a first limiting block and a second limiting block, the first limiting block and the second limiting block are arranged oppositely on the first surface and the second surface of the spray head fixing part, and the first limiting block and the second limiting block fix the spray head in the mounting hole.
3. The flipper for double-sided processing according to claim 2, wherein, The number of the first limiting block and the second limiting block is multiple, and the multiple first limiting blocks and the second limiting blocks are uniformly distributed on the edge of the mounting hole.
4. The flipper for double-sided processing according to claim 2, wherein, The spray head fixing part is provided with a plurality of limiting grooves, and the first limiting block and the second limiting block are arranged in the limiting groove, so that the first limiting block and the second limiting block are in abutment with the spray head.
5. The flipper for double-sided processing according to claim 4, wherein, The first limiting block and the second limiting block are provided with a limiting hole, and the bottom wall of the limiting groove is provided with a limiting matching hole, the limiting hole and the limiting matching hole are fixed by penetrating a fastener to fix the first limiting block and the second limiting block in the limiting groove.
6. The flipper for double-sided processing according to claim 2, wherein, The first surface and the second surface of the spray head fixing part are provided with a mounting groove, the through hole is arranged in the bottom wall of the mounting groove, and the side wall of the mounting groove is provided with a chamfer.
7. The flipper jig for double-sided processing according to any one of claims 1 to 6, characterized by, The spray head fixing part is provided with a first through hole, the first through hole penetrates the first surface and the second surface of the spray head fixing part, to discharge cutting fluid.
8. The flipper for double-sided processing according to claim 7, wherein, The number of the first through hole is multiple, and the multiple first through holes are uniformly distributed around the spray head.
9. The flipper jig for double-sided processing according to any one of claims 1 to 6, characterized by, The bottom frame is provided with a plurality of limiting protrusions on the side, which is used for clamping with the machining center to limit the bottom frame in the machining center.
10. The flipper jig for double-sided processing according to any one of claims 1 to 6, characterized by, The bottom frame is provided with a plurality of second through holes in the thickness direction, and a fastener penetrates the second through hole to the machining center, to fix the bottom frame in the machining center.