Multi-angle moving grinding device for gallium oxide substrate

Abstract

The utility model discloses a multi-angle moving polishing device for a gallium oxide substrate, relates to the technical field of gallium oxide substrate polishing, and aims to solve the problems that an existing polishing device has limitation in streamline type moving polishing and the overall polishing efficiency needs to be improved. A plurality of polishing bases are fixedly connected to the outer surface of the belt conveyor, linear modules are arranged on the two symmetrical sides of the belt conveyor correspondingly, electric telescopic rods are fixedly connected to the moving ends of the linear modules, bases are fixedly connected to the telescopic ends of the electric telescopic rods, and rotating bases are rotationally connected to the upper ends of the bases. The symmetrical side surfaces of the rotating base are each fixedly connected with a grinding arm, and grinding discs are arranged at the two ends of each grinding arm. And the effects of streamline type movable grinding operation and high grinding efficiency are achieved.

Description

Technical Field

[0001] This utility model relates to the field of gallium oxide substrate polishing technology, and in particular to a multi-angle moving polishing device for gallium oxide substrates. Background Technology

[0002] Gallium oxide substrates are a fundamental material used in the manufacture of semiconductor devices. They are sheet-like or block-shaped substrate materials with gallium oxide as the main component, providing support for the growth of other semiconductor thin films or the fabrication of device structures. The processing and manufacturing of gallium oxide substrates requires multiple steps, including a polishing process, which is accomplished using polishing equipment.

[0003] Existing grinding equipment has limitations in performing continuous mobile grinding, and the overall grinding efficiency needs to be improved. Utility Model Content

[0004] The purpose of this invention is to provide a multi-angle moving polishing device for gallium oxide substrates, which can perform continuous moving polishing operations and has high polishing efficiency.

[0005] To achieve the above objectives, the present invention provides the following technical solution:

[0006] A multi-angle moving polishing device for gallium oxide substrates includes a belt conveyor. Multiple polishing seats are fixedly connected to the outer surface of the belt conveyor. A linear module is respectively arranged on both symmetrical sides of the belt conveyor. An electric telescopic rod is fixedly connected to the moving end of the linear module. A base is fixedly connected to the telescopic end of the electric telescopic rod, and a rotating seat is rotatably connected to the upper end of the base. A polishing arm is fixedly connected to the symmetrical side surface of the rotating seat. A polishing disc is arranged at both ends of the polishing arm.

[0007] By adopting the above technical solution, continuous grinding operations can be performed, resulting in high grinding efficiency.

[0008] Furthermore, a first motor is fixedly installed on the upper end of the rotating base, and one end of the rotating shaft of the first motor is fixedly connected to the end face of the base.

[0009] By adopting the above technical solution, the rotating seat can be effectively driven to rotate.

[0010] Furthermore, one end of the grinding arm is provided with a mounting hole, and a second motor is fixedly installed inside the mounting hole. One end of the rotating shaft of the second motor is fixedly connected to a linkage shaft, and the grinding disc is fixedly installed at one end of the linkage shaft.

[0011] By adopting the above technical solution, a second motor can be used to drive the grinding disc to rotate.

[0012] Furthermore, multiple limiting telescopic rods are fixedly connected to the moving end face of the linear module, and the other end of the limiting telescopic rods is fixedly connected to the end face of the base.

[0013] By adopting the above technical solutions, the stability between various structures can be effectively improved.

[0014] Furthermore, a cleaning water tank is provided on one side of the linear module.

[0015] By adopting the above technical solution, the used grinding disc can be cleaned, thereby improving the grinding accuracy in the next round.

[0016] Furthermore, a limiting placement groove is provided on the upper surface of the grinding base.

[0017] By adopting the above technical solution, the raw materials can be placed stably.

[0018] In summary, the beneficial technical effects of this utility model are as follows:

[0019] 1. This utility model can use a belt conveyor and multiple grinding seats to drive the gallium oxide substrate to move in a continuous flow during grinding. During the movement, the grinding disc on one of the linear modules first grinds the material on one grinding seat. During the grinding process, the linear module is activated so that the grinding disc can move synchronously with the grinding seat. Then, the grinding disc on the other linear module is activated to grind the material on the next grinding seat. The linear module is moved so that the grinding disc on the linear module can move with the grinding seat. When the first grinding disc finishes grinding, the electric telescopic rod is extended to raise the position of the grinding disc. Then, the linear module is reversed so that the grinding disc can be placed back in the grinding start position for the next round of grinding. The grinding discs on the two linear modules can move alternately to achieve a continuous grinding operation with high grinding efficiency.

[0020] 2. In this invention, during the process of the grinding disc moving to the starting grinding position after grinding, the first motor is started. The first motor drives the rotating seat to rotate, thereby adjusting the position of the two grinding arms on the same rotating seat by 180 degrees. Then, during the re-grinding process, the grinding disc used in the previous round can be placed in the cleaning water tank. Then, the grinding disc is rotated to effectively clean it, avoiding residual dust from affecting the next grinding. This effectively improves the grinding accuracy, and both functionality and practicality are effectively improved. Attached Figure Description

[0021] Figure 1 This is a first-view perspective view of the three-dimensional structure of this utility model;

[0022] Figure 2This is a second perspective view of the three-dimensional structure of this utility model.

[0023] In the diagram: 1. Belt conveyor; 2. Grinding seat; 3. Linear module; 4. Electric telescopic rod; 5. Limiting telescopic rod; 6. Rotary seat; 7. Grinding arm; 8. First motor; 9. Second motor; 10. Linkage shaft; 11. Grinding disc; 12. Cleaning water tank. Detailed Implementation

[0024] The method of this utility model will be further described in detail below with reference to the accompanying drawings.

[0025] Reference Figure 1 , Figure 2 A multi-angle moving polishing device for gallium oxide substrates includes a belt conveyor 1. Multiple polishing seats 2 are fixedly connected to the outer surface of the belt conveyor 1. A linear module 3 is respectively arranged on both symmetrical sides of the belt conveyor 1. An electric telescopic rod 4 is fixedly connected to the moving end of the linear module 3. A base is fixedly connected to the telescopic end of the electric telescopic rod 4, and a rotating seat 6 is rotatably connected to the upper end of the base. A polishing arm 7 is fixedly connected to the symmetrical side surface of the rotating seat 6. A polishing disc 11 is provided at both ends of the polishing arm 7. A mounting hole is provided at one end of the polishing arm 7, and a second motor 9 is fixedly installed inside the mounting hole. A linkage shaft 10 is fixedly connected to one end of the rotating shaft of the second motor 9. The polishing disc 11 is fixedly installed at one end of the linkage shaft 10. A limit placement groove is provided on the upper surface of the polishing seat 2. Multiple limit telescopic rods 5 are fixedly connected to the moving end surface of the linear module 3, and the other end of the limit telescopic rods 5 is fixedly connected to the end face of the base. In this process, during grinding, a belt conveyor 1 and multiple grinding seats 2 drive the gallium oxide substrate to move in a continuous flow. During the movement, the grinding disc 11 on one of the linear modules 3 first grinds the material on one grinding seat 2. During the grinding process, the linear module 3 is activated so that the grinding disc 11 can move synchronously with the grinding seat 2. Then, the grinding disc 11 on another linear module 3 is activated to grind the material on the next grinding seat 2. The linear module 3 is moved so that the grinding disc 11 on the linear module 3 can move together with the grinding seat 2. When the first grinding disc 11 has finished grinding, the electric telescopic rod 4 is extended to raise the position of the grinding disc 11. Then, the linear module 3 is reversed so that the grinding disc 11 can be placed back in the grinding start position for the next round of grinding. The grinding discs 11 on the two linear modules 3 can move alternately to achieve a continuous grinding operation with high grinding efficiency.

[0026] Reference Figure 1A first motor 8 is fixedly installed on the upper end of the rotating base 6. One end of the rotating shaft of the first motor 8 is fixedly connected to the end face of the base. A cleaning water tank 12 is provided on one side of the linear module 3. During the process of the grinding disc 11 moving to the starting grinding position after grinding, the first motor 8 is started. The first motor 8 drives the rotating base 6 to rotate, thereby adjusting the two grinding arms 7 on the same rotating base 6 by 180 degrees. Then, during the re-grinding process, the grinding disc 11 used in the previous round can be placed in the cleaning water tank 12. Then, the grinding disc 11 is rotated so that it can be effectively cleaned, avoiding residual dust from affecting the next grinding. This effectively improves the grinding accuracy, and both functionality and practicality are effectively improved.

[0027] Working Principle: In use, the device is first installed in the designated location. Then, the belt conveyor 1 and multiple polishing seats 2 drive the gallium oxide substrate in a continuous flow. During the movement, the polishing disc 11 on one of the linear modules 3 polishes the material on one polishing seat 2. During polishing, the linear module 3 is activated, allowing the polishing disc 11 to move synchronously with the polishing seat 2. Next, the polishing disc 11 on another linear module 3 is activated to polish the material on the next polishing seat 2. The linear module 3 is moved, allowing the polishing disc 11 on it to move along with the polishing seat 2. After the first polishing disc 11 completes polishing, the electric telescopic rod 4 extends, allowing the polishing disc 11 to... The position is raised, and then the linear module 3 is reversed, so that the grinding disc 11 can be placed back in the grinding start position for the next round of grinding operation. The grinding discs 11 on the two linear modules 3 can move their positions alternately to realize a continuous grinding operation. During the process of the grinding disc 11 moving back to the starting grinding position after grinding, the first motor 8 is started. The first motor 8 drives the rotating seat 6 to rotate, thereby adjusting the position of the two grinding arms 7 on the same rotating seat 6 by 180 degrees. Then, during the re-grinding process, the grinding disc 11 used in the previous round can be placed in the cleaning water tank 12. Then, the grinding disc 11 is rotated to effectively clean the grinding disc 11, avoiding residual dust from affecting the next grinding and effectively improving the grinding accuracy.

[0028] The specific real-time examples described herein are preferred real-time examples of this utility model and are not intended to limit the scope of protection of this utility model. Therefore, all equivalent changes made to the structure, shape, and principle of this utility model should be included within the scope of protection of this utility model.

Claims

1. A multi-angle moving polishing device for gallium oxide substrate, comprising a belt conveyor (1), characterized in that: The outer surface of the belt conveyor (1) is fixedly connected with a plurality of polishing seats (2), and the symmetrical two sides of the belt conveyor (1) are respectively provided with a linear module (3), the moving end of the linear module (3) is fixedly connected with an electric telescopic rod (4), the telescopic end of the electric telescopic rod (4) is fixedly connected with a base, and the upper end of the base is rotatably connected with a rotating seat (6), the symmetrical side surfaces of the rotating seat (6) are respectively fixedly connected with a polishing arm (7), and the two end positions of the polishing arm (7) are provided with polishing discs (11).

2. The multi-angle moving polishing device for gallium oxide substrate according to claim 1, characterized in that: The upper end of the rotating seat (6) is fixedly connected with a first motor (8), and one end of the rotating shaft of the first motor (8) is fixedly connected with the end surface of the base.

3. The multi-angle moving polishing device for gallium oxide substrate according to claim 1, characterized in that: One end of the polishing arm (7) is provided with a mounting hole, and the second motor (9) is fixedly installed in the mounting hole, one end of the rotating shaft of the second motor (9) is fixedly connected with a linkage shaft (10), and the polishing disc (11) is fixedly installed at one end of the linkage shaft (10).

4. The multi-angle moving polishing device for gallium oxide substrate according to claim 1, characterized in that: The moving end surface of the linear module (3) is fixedly connected with a plurality of limiting telescopic rods (5), and the other end of the limiting telescopic rod (5) is fixedly connected with the end surface of the base.

5. The multi-angle moving polishing device for gallium oxide substrate according to claim 1, characterized in that: One side of the linear module (3) is provided with a cleaning water tank (12).

6. The multi-angle moving polishing apparatus for gallium oxide substrate according to claim 1, characterized by: The upper end surface of the polishing seat (2) is provided with a limiting placing groove.

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