Vacuum chamber

Abstract

The utility model discloses a vacuum cabin which comprises a cabin body, a vacuum pump, a cabin door and a sealing mechanism, the vacuum pump is arranged on the cabin body, the cabin door is hinged to the cabin body, and the sealing mechanism is arranged on the cabin door; the sealing mechanism comprises a handle, a rotating rod, a baffle and a blocking piece, the rotating rod is rotationally arranged on the cabin door, the baffle is arranged on the cabin body, the handle is arranged at one end of the rotating rod, and the blocking piece is arranged at the other end of the rotating rod. The technical problem to be solved by the utility model is to provide a vacuum cabin, so that a pressure sensor can provide a stable sealing effect when a cabin door is opened or closed according to requirements.

Description

Technical Field

[0001] This utility model relates to the technical field of vacuum chamber sealing, specifically to a vacuum chamber. Background Technology

[0002] Vacuum chambers have wide applications in numerous fields, such as spacecraft component testing in the aerospace industry, material performance research in vacuum environments in materials science, and semiconductor manufacturing in the electronics industry. In these applications, vacuum chambers need to create and maintain specific vacuum environments to meet the requirements of experiments, production, or testing. This places extremely high demands on the sealing performance of the vacuum chamber; even the slightest leak can cause the vacuum level to fall short of the expected standard, thus affecting the accuracy and reliability of related work.

[0003] The hatch is a critical component for sealing a vacuum chamber. When the hatch is closed, if the sealing structure malfunctions and fails to seal effectively, air will leak into the vacuum chamber, causing a drop in vacuum levels. Conversely, when the hatch is open, if the sealing structure fails—for example, if it adheres to the chamber body or becomes mechanically jammed—it will affect the normal opening of the hatch and may even damage the hatch or the entire vacuum chamber structure. This is unacceptable for applications requiring precise control of the vacuum environment. Utility Model Content

[0004] The technical problem to be solved by this utility model is to provide a vacuum chamber that can provide a stable sealing effect when the chamber door is open or closed as needed.

[0005] This utility model achieves its invention objective by adopting the following technical solution:

[0006] A vacuum chamber includes a chamber body, a vacuum pump, a chamber door, and a sealing mechanism. The vacuum pump is mounted on the chamber body, the chamber door is hinged to the chamber body, and the sealing mechanism is mounted on the chamber door.

[0007] The sealing mechanism includes a handle, a rotating rod, a baffle, and a baffle plate. The rotating rod is rotatably mounted on the hatch, the baffle plate is mounted on the cabin body, the handle is mounted at one end of the rotating rod, and the baffle plate is mounted at the other end of the rotating rod.

[0008] As a further limitation of this technical solution, the sealing mechanism also includes a connecting plate, a transmission plate, a rotating shaft, and an intermediate component. Multiple connecting plates, transmission plates, rotating shafts, and baffles are provided. One end of the transmission plate is disposed on the rotating rod. The connecting plate is rotatably disposed on the hatch. One end of the connecting plate is hinged to the intermediate component. The bottom end of the intermediate component is rotatably disposed on the hatch. The rotating shaft is disposed on the connecting plate. The baffle is rotatably disposed on the hatch. One end of the baffle has a rotating groove, and the rotating shaft slides within the rotating groove.

[0009] As a further limitation of this technical solution, the sealing mechanism also includes a sealing gasket, which is disposed on the hatch.

[0010] As a further limitation of this technical solution, the sealing mechanism also includes a gravity rod, which is disposed on the transmission plate.

[0011] As a further limitation of this technical solution, the cabin is also equipped with a controller and a pressure sensor, and the controller is electrically connected to the pressure sensor.

[0012] As a further limitation of this technical solution, the sealing mechanism also includes a pressure sensor, which is disposed on the baffle.

[0013] As a further limitation of this technical solution, the sealing mechanism also includes a signal sensor, which is disposed on the gravity rod.

[0014] Compared with the prior art, the advantages and positive effects of this utility model are:

[0015] 1. Facilitates the opening and closing of the hatch:

[0016] The sealing mechanism is designed so that the transmission plate can be rotated by turning the handle, which in turn drives the entire connecting rod to rotate, enabling the hatch to open and close quickly and improving the hatch's opening and closing efficiency.

[0017] 2. Improved sealing stability:

[0018] The sealing mechanism is equipped with multiple baffles, which can simultaneously press against the baffle plate, allowing the hatch to fit more evenly and tightly against the cabin body, reducing the risk of leakage, and making the hatch sealing more uniform and improving the sealing effect.

[0019] 3. Install a gravity bar on the transmission plate:

[0020] When the hatch is open, the gravity bar is vertically upward, and the gravity is concentrated on the transmission plate. When the hatch is closed, the gravity bar is horizontal, and the gravity bar acts on the transmission plate, reducing the possibility of the transmission plate itself rotating, making the hatch sealing more stable.

[0021] 4. Remote monitoring and alarm:

[0022] When the hatch is closed, the controller can monitor the pressure inside the hatch, and the pressure sensors on each baffle can detect the air pressure inside the hatch in real time, as well as whether each side of the hatch is properly sealed to the hatch body. At the same time, when the hatch is closed, the pressure sensors can detect whether each side of the hatch is properly closed, which improves the reliability of the seal. Attached Figure Description

[0023] The accompanying drawings, which are included to provide a further understanding of this application and form part of this application, illustrate exemplary embodiments and are used to explain this application, but do not constitute an undue limitation of this application. Obviously, the drawings described below are merely some embodiments of this utility model, and those skilled in the art can obtain other drawings based on these drawings without creative effort. In the drawings:

[0024] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0025] Figure 2 This is a schematic diagram of the hatch opening state of this utility model;

[0026] Figure 3 This is a schematic diagram of the first state of the hatch of this utility model;

[0027] Figure 4 This is a schematic diagram of the second state of the hatch of this utility model;

[0028] Figure 5 This is a schematic diagram of the other side of the baffle structure of this utility model.

[0029] In the diagram: 100, cabin; 200, vacuum pump; 300, hatch; 400, sealing mechanism; 401, handle; 402, rotating rod; 403, baffle; 404, baffle plate; 405, connecting plate; 406, transmission plate; 407, rotating shaft; 408, rotating groove; 409, intermediate component; 410, sealing gasket; 411, gravity rod; 412, controller; 413, air pressure sensor; 414, pressure sensor; 415, signal sensor. Detailed Implementation

[0030] The following will refer to the appendix in the embodiments of this utility model. Figures 1-5The technical solutions in the embodiments of this utility model are clearly and completely described herein. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0031] It should be noted that the directional terms such as left, right, up, down, front, and back in the embodiments of this utility model are only relative concepts or are based on the normal use state of the product, i.e., the direction of the product's movement, and should not be considered as limiting.

[0032] When a component is described as "located on" or "set on" another component, it can be on the other component or may be interposed with the component. When a component is described as "connected to" another component, it can be directly connected to the other component or may be interposed with the component.

[0033] Example: A vacuum chamber includes a chamber body 100, a vacuum pump 200, a chamber door 300, and a sealing mechanism 400. The vacuum pump 200 is mounted on the chamber body 100, the chamber door 300 is hinged to the chamber body 100, and the sealing mechanism 400 is mounted on the chamber door 300.

[0034] The sealing mechanism 400 includes a handle 401, a rotating rod 402, a baffle 403, a baffle plate 404, a connecting plate 405, a transmission plate 406, a rotating shaft 407, and an intermediate component 409. The rotating rod 402 is rotatably mounted on the hatch 300, the baffle 403 is mounted on the cabin 100, the handle 401 is mounted on one end of the rotating rod 402, and the baffle plate 404 is mounted on the other end of the rotating rod 402.

[0035] Multiple connecting plates 405, transmission plates 406, rotating shafts 407, baffles 404, and intermediate components 409 are provided. One end of the transmission plate 406 is mounted on the rotating rod 402. The connecting plates 405 are rotatably mounted on the hatch 300. One end of two adjacent connecting plates 405 is respectively hinged to the same intermediate component 409. The bottom end of the intermediate component 409 is rotatably mounted on the hatch 300. The rotating shaft 407 is mounted on the connecting plate 405. The baffles 404 are rotatably mounted on the hatch 300. One end of the baffles 404 has a rotating groove 408, and the rotating shaft 407 slides within the rotating groove 408.

[0036] Through the connecting plate 405, transmission plate 406, and rotating shaft 407, when the hatch 300 is turned to close, the handle 401 is turned to rotate the transmission plate 406, which in turn drives the overall connecting plate 405 to rotate through the intermediate part 409, thereby realizing the rapid opening and closing of the hatch 300 and improving the opening and closing efficiency of the hatch 300. Multiple baffles 404 can simultaneously abut against the baffle 403, so that the hatch 300 can fit more evenly and tightly with the cabin 100 around its perimeter, reducing the risk of leakage and making the sealing of the hatch 300 more uniform and improving the sealing effect.

[0037] In some embodiments, the sealing mechanism 400 further includes a sealing gasket 410 disposed on the hatch 300.

[0038] In some embodiments, the sealing mechanism 400 further includes a gravity rod 411, which is disposed on the transmission plate 406. When the hatch 300 is normally open, the gravity rod 411 is vertically upward, and gravity is concentrated on the transmission plate 406. When the hatch 300 is closed, the gravity rod 411 is horizontal, and the gravity rod 411 acts on the transmission plate 406, reducing the possibility of the transmission plate 406 itself rotating, thus making the hatch 300 seal more stably.

[0039] In some embodiments, the cabin 100 is also provided with a controller 412 and a pressure sensor 413, and the controller 412 is electrically connected to the pressure sensor 413.

[0040] In some embodiments, the sealing mechanism 400 further includes a pressure sensor 414 disposed on the baffle 404.

[0041] In some embodiments, the sealing mechanism 400 further includes a signal sensor 415 disposed on the gravity bar 411.

[0042] The working principle of this embodiment is as follows: During use, rotating the handle 401 causes the transmission plate 406 to rotate, which in turn drives the overall connecting rod to rotate, thereby realizing the rapid opening and closing of the hatch 300 and improving the opening and closing efficiency of the hatch 300; the sealing mechanism 400 is provided with multiple baffles 404, which can simultaneously abut against the baffle 403, so that the hatch 300 can fit more evenly and tightly against the cabin body 100, reducing the risk of leakage, and at the same time making the hatch 300's sealing performance more uniform and improving the sealing effect; in the normal open state of the hatch 300, the gravity rod 411 is vertically upward, and the gravity is concentrated on the transmission plate 406. When the hatch 300 is open, the gravity rod 411 is vertically upward, and the gravity is concentrated on the transmission plate 406. When hatch 300 is closed, gravity rod 411 is horizontally positioned, acting on transmission plate 406, reducing the possibility of transmission plate 406 rotating on its own, making the sealing of hatch 300 more stable. When hatch 300 is closed, the controller 412 can monitor the pressure inside the cabin 100, and the pressure sensor 414 on each baffle 404 can detect the air pressure inside the cabin 100 in real time, as well as whether the seal between each side of hatch 300 and cabin 100 is in place. At the same time, when hatch 300 is closed, the pressure sensor 414 can detect whether each side of hatch 300 is closed well, improving the reliability of the seal.

[0043] The above-disclosed embodiments are merely specific examples of this utility model. However, this utility model is not limited thereto, and any variations that can be conceived by those skilled in the art should fall within the protection scope of this utility model.

Claims

1. A vacuum chamber, characterized by: The utility model provides a vacuum chamber, including cabin (100), vacuum pump (200), hatch (300) and sealing mechanism (400), vacuum pump (200) sets up on cabin (100), hatch (300) hinged setting is in cabin (100), sealing mechanism (400) sets up on hatch (300), The sealing mechanism (400) includes a handle (401), a rotating rod (402), a baffle (403), and a baffle piece (404), the rotating rod (402) is rotatably arranged on the hatch (300), the baffle (403) is arranged on the cabin (100), the handle (401) is arranged on one end of the rotating rod (402), and the baffle piece (404) is arranged on the other end of the rotating rod (402).

2. A vacuum chamber according to claim 1, characterised in that: The sealing mechanism (400) further includes a connecting plate (405), a transmission plate (406), a rotating shaft (407), and an intermediate piece (409), the connecting plate (405), the transmission plate (406), the rotating shaft (407), the baffle piece (404), and the intermediate piece (409) are all provided with a plurality of, one end of the transmission plate (406) is arranged on the rotating rod (402), the connecting plate (405) is rotatably arranged on the hatch (300), the connecting plate (405) is hinged to the intermediate piece (409), the bottom end of the intermediate piece (409) is rotatably arranged on the hatch (300), the rotating shaft (407) is arranged on the connecting plate (405), the baffle piece (404) is rotatably arranged on the hatch (300), one end of the baffle piece (404) is provided with a rotating groove (408), and the rotating shaft (407) slides in the rotating groove (408).

3. A vacuum chamber according to claim 1, characterized in that: The sealing mechanism (400) further includes a sealing gasket (410), and the sealing gasket (410) is arranged on the hatch (300).

4. A vacuum chamber according to claim 2, characterized in that: The sealing mechanism (400) further includes a gravity rod (411), and the gravity rod (411) is arranged on the transmission plate (406).

5. A vacuum chamber according to claim 4, characterised in that: The cabin (100) is further provided with a controller (412) and an air pressure sensor (413), and the controller (412) is electrically connected with the air pressure sensor (413).

6. A vacuum chamber according to claim 5, characterised in that: The sealing mechanism (400) further includes a pressure sensor (414), and the pressure sensor (414) is arranged on the baffle piece (404).

7. A vacuum chamber as claimed in claim 4, characterized in that: The sealing mechanism (400) further includes a signal sensor (415), and the signal sensor (415) is arranged on the gravity rod (411).

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