Anti-scraping magnetron sputtering target core

Abstract

The utility model discloses an anti-scraping magnetron sputtering target core, which is mounted in a cylindrical target barrel and is characterized by comprising a magnetic bar component, water chambers are fixedly mounted on two sides of the magnetic bar component, and the magnetic bar component is cooled by a cooling medium circularly flowing in the water chambers; a plurality of anti-scraping blocks are further arranged on the outer side of the magnetic bar assembly, the anti-scraping blocks are evenly distributed on the two sides of the magnetic bar assembly, and the anti-scraping blocks protrude out of the outer edge of the water chamber. The anti-scraping block is made of a flexible material, so that when the magnetic bar assembly is installed in the target cylinder along the central axis, the anti-scraping block is in contact with the inner wall of the target cylinder, and damage to the target cylinder is avoided. According to the target core, the flexible anti-scraping blocks are additionally arranged on the original magnetic bar assembly and the water chamber, the anti-scraping blocks are ensured to protrude out of the outer edge of the water chamber, and when the magnetic bar assembly and the target cylinder are repeatedly disassembled and assembled along the central axis, the anti-scraping blocks are in contact with the inner wall of the target cylinder, and damage to the target cylinder is avoided.

Description

Technical Field

[0001] This utility model relates to the field of vacuum coating technology, and in particular to a scratch-resistant magnetron sputtering target core. Background Technology

[0002] Sputtering is a process in which particles (ions or neutral atoms or molecules) with a certain energy bombard the surface of a target material under vacuum conditions, so that the atoms or molecules near the surface of the target material gain enough energy to eventually escape from the target material surface and be deposited on the substrate.

[0003] Magnetron sputtering increases the sputtering rate by introducing a magnetic field onto the target cathode surface and using the magnetic field to confine charged particles.

[0004] Common cylindrical magnetron sputtering targets are constructed by shaping the target material into a hollow cylinder with a target core (magnetic rod) inside. Adjusting the magnetic field or changing the target material requires repeated disassembly and reassembly of the target core and target cylinder. Since both are made of metal, although there is a gap between them, scratches are inevitable, causing damage to the inside of the target cylinder and ultimately affecting the magnetron sputtering effect. Utility Model Content

[0005] The purpose of this invention is to provide a scratch-resistant magnetron sputtering target core to solve the problem of damage to the inside of the target cylinder caused by scratching during repeated disassembly and installation of the target core and the target cylinder.

[0006] To solve the above technical problems, this utility model provides a scratch-resistant magnetron sputtering target core, which is installed inside a cylindrical target cylinder. The core is characterized by including a magnetic rod assembly, with water chambers fixedly installed on both sides of the magnetic rod assembly, and the magnetic rod assembly is cooled by a cooling medium circulating in the water chambers.

[0007] The magnetic rod assembly is also provided with a plurality of anti-scratch blocks on its outer side. The anti-scratch blocks are evenly distributed on both sides of the magnetic rod assembly, and the anti-scratch blocks protrude from the outer edge of the water chamber.

[0008] The anti-scratch block is made of a flexible material, so that when the magnetic rod assembly is installed inside the target cylinder along the central axis, the anti-scratch block contacts the inner wall of the target cylinder, thus avoiding damage to it.

[0009] Preferably, there are multiple anti-scratch blocks, which are arranged symmetrically or asymmetrically on both sides of the magnetic rod assembly.

[0010] Preferably, the square tube of the magnetic rod assembly is machined with mounting steps on both sides for positioning and mounting the water chambers on both sides.

[0011] Preferably, the water chamber includes a mating surface, a mounting surface, and an arc-shaped outer edge. The mating surface contacts the side of the square tube, while the mounting surface contacts the mounting step.

[0012] Preferably, the anti-scratch block is installed on the mounting surface of the water chamber by fasteners and protrudes from the arc-shaped outer edge of the water chamber.

[0013] Preferably, the anti-scratch block is a flexible block with a trapezoidal cross-section.

[0014] Compared with the prior art, the beneficial effects of this utility model are:

[0015] This invention adds a flexible anti-scratch block to the original magnetic rod assembly and water chamber, ensuring that the anti-scratch block protrudes from the outer edge of the water chamber. When the magnetic rod assembly is repeatedly disassembled and installed with the target cylinder along the central axis, the anti-scratch block contacts the inner wall of the target cylinder, thus preventing damage to it. Attached Figure Description

[0016] Figure 1 This is a schematic diagram showing the connection between the scratch-resistant magnetron sputtering target core and the target barrel provided by this utility model;

[0017] Figure 2 This is a schematic diagram of the structure of the scratch-resistant magnetron sputtering target core provided by this utility model;

[0018] Figure 3 This is a side cross-sectional view of the scratch-resistant magnetron sputtering target core provided by this utility model;

[0019] Figure 4 This is a schematic diagram of the structure of the anti-scratch magnetron sputtering target core square tube provided by this utility model;

[0020] Figure 5 This is a schematic diagram showing the connection between the anti-scratch magnetron sputtering target core water chamber and the anti-scratch block provided by this utility model.

[0021] In the diagram: 1. Magnetic rod assembly; 101. Square tube; 102. Mounting step; 2. Water chamber; 201. Fitting surface; 202. Mounting surface; 203. Arc-shaped outer edge; 3. Anti-scratch block; 100. Target tube. Detailed Implementation

[0022] The present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments. The advantages and features of the present invention will become clearer from the following description and claims. It should be noted that the drawings are all in a very simplified form and use non-precise proportions, and are only used to facilitate and clarify the illustration of the embodiments of the present invention.

[0023] In the description of this utility model, it should be understood that the terms "center", "longitudinal", "lateral", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", and "outer" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0024] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances. Example

[0025] This invention provides a scratch-resistant magnetron sputtering target core, such as... Figure 1 As shown, it is installed inside the cylindrical target tube 100; for details, please refer to [link / reference]. Figure 2 and Figure 3 It includes a magnetic rod assembly 1, with water chambers 2 fixedly installed on both sides of the magnetic rod assembly 1. The magnetic rod assembly 1 is cooled by a cooling medium circulating in the water chambers 2. A plurality of anti-scratch blocks 3 are also provided on the outer side of the magnetic rod assembly 1. The anti-scratch blocks 3 are evenly distributed on both sides of the magnetic rod assembly 1, and the anti-scratch blocks 3 protrude from the outer edge of the water chambers 2. The anti-scratch blocks 3 are made of flexible material, so that when the magnetic rod assembly 1 is installed inside the target cylinder 100 along the central axis, the anti-scratch blocks 3 contact the inner wall of the target cylinder 100, avoiding damage to it.

[0026] Furthermore, there are multiple anti-scratch blocks 3, which are symmetrically or asymmetrically spaced on both sides of the magnetic rod assembly 1; and the square tube 101 of the magnetic rod assembly 1 has mounting steps 102 on both sides for positioning and mounting the water chambers 2 on both sides.

[0027] Furthermore, the water chamber 2 includes a mating surface 201, a mounting surface 202, and an arc-shaped outer edge 203. The mating surface 201 contacts the side of the square tube 101, while the mounting surface 202 contacts the mounting step 102. The anti-scratch block 3 is installed on the mounting surface 202 of the water chamber 2 by fasteners and protrudes from the arc-shaped outer edge 203 of the water chamber 2.

[0028] In one embodiment, the anti-scratch block 3 is a flexible block with a trapezoidal cross-section.

[0029] The technical solution of this utility model is to add a flexible anti-scratching block to the original magnetic rod assembly and water chamber, and ensure that the anti-scratching block protrudes from the outer edge of the water chamber. When the magnetic rod assembly is repeatedly disassembled and installed with the target cylinder along the central axis, the anti-scratching block comes into contact with the inner wall of the target cylinder, thus avoiding damage to it.

[0030] The above description is only a description of the preferred embodiment of the present utility model and is not intended to limit the scope of the present utility model in any way. Any changes or modifications made by those skilled in the art based on the above disclosure shall fall within the protection scope of the claims.

Claims

1. A scratch-resistant magnetron sputter target core mounted inside a cylindrical target cylinder (100), characterized in that Including magnetic rod assembly (1), water chamber (2) is fixedly installed on both sides of the magnetic rod assembly (1), and the magnetic rod assembly (1) is cooled by the cooling medium circulating in the water chamber (2); The outer side of the magnetic rod assembly (1) is also provided with a plurality of scratch prevention blocks (3), the two sides of the magnetic rod assembly (1) are provided with the scratch prevention blocks (3), and the scratch prevention blocks (3) protrude from the outer edge of the water chamber (2); The scratch prevention blocks (3) are made of flexible material, so that when the magnetic rod assembly (1) is installed inside the target cylinder (100) along the central axis, the scratch prevention blocks (3) are in contact with the inner wall of the target cylinder (100), avoiding damage to it.

2. A sputter target core for a magnetic sputter target according to claim 1, characterized in that The scratch prevention blocks (3) are multiple, and are symmetrically or asymmetrically arranged on both sides of the magnetic rod assembly (1).

3. A sputter target core for a magnetic sputter target according to claim 1, wherein The square tube (101) of the magnetic rod assembly (1) is processed with a mounting step (102) on both sides, which is used for positioning and mounting the water chamber (2) on both sides.

4. A sputter target core for a sputter target for a magnetron sputter coating system according to claim 3, characterized in that The water chamber (2) includes a fitting surface (201), a mounting surface (202) and an arc-shaped outer edge (203), the fitting surface (201) is in contact with the side surface of the square tube (101), and the mounting surface (202) is in contact with the mounting step (102).

5. A sputter target core for a magnetic sputter target according to claim 4, characterized in that The scratch prevention blocks (3) are installed on the mounting surface (202) of the water chamber (2) through fasteners, and protrude from the arc-shaped outer edge (203) of the water chamber (2).

6. A sputter target core for a magnetic sputter target according to claim 5, characterized in that The scratch prevention blocks (3) are flexible blocks with trapezoidal cross section.

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