Polycrystalline silicon rod heating device
By combining microwave heating and thermal radiation devices in a two-stage heating method, the problems of uneven heating and low efficiency of polycrystalline silicon rods are solved, achieving a highly efficient and reliable heating effect for polycrystalline silicon rods.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-11-06
- Publication Date
- 2026-04-03
AI Technical Summary
Existing polycrystalline silicon water quenching machines suffer from uneven heating, low efficiency, and inaccurate temperature control, which affect the water quenching effect.
The polycrystalline silicon rod is heated in two stages using a combination of microwave heating and thermal radiation devices. First, it is heated to 300°C by microwave, and then heated to a high temperature by thermal radiation. The heating is achieved through a combination of reflectors and heating tubes, and is controlled in real time by temperature and oxygen content sensors.
It enables rapid and uniform heating of polycrystalline silicon rods, improves heating efficiency and energy utilization, is easy to operate, and avoids adverse phenomena such as oxidation.
Smart Images
Figure CN224077599U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of polycrystalline silicon technology, specifically to a polycrystalline silicon rod heating device. Background Technology
[0002] Polycrystalline silicon is a cylindrical product that needs to be crushed into rods and blocks of different sizes and then packaged into bags, a process that requires extremely high purity. Water quenching is a common method for crushing polycrystalline silicon rods; however, existing water quenching machines have been found to have problems such as uneven heating, low efficiency, and inaccurate temperature control, which affect the quenching effect. Summary of the Invention
[0003] The purpose of this invention is to overcome the shortcomings of the prior art and provide a polycrystalline silicon rod heating device with high heating efficiency, high energy utilization rate and convenient operation.
[0004] To achieve the above objectives, the technical solution adopted by this utility model is as follows:
[0005] A polycrystalline silicon rod heating device, the device comprising: a microwave heating device 1, a thermal radiation device 3, a support roller 14, a gear 16, and a rack and pinion track 17;
[0006] One end of the device is a microwave heating device 1, and a thermal radiation device 3 is provided at one end of the microwave heating device 1. The microwave heating device 1 and the thermal radiation device 3 are connected to each other.
[0007] The bottom of the chamber is provided with a rack and pinion track 17 that runs through the chamber. A gear 16 is provided on the rack and pinion track 17 to connect and support the roller 14. The gear 16 is fixed to the support roller 14. When the gear 16 passes through the rack and pinion track 17, it drives the support roller 14 to rotate, thereby driving the silicon rod 6 to rotate.
[0008] Furthermore, the rack and pinion track 17 is arranged in two parallel sections.
[0009] Furthermore, the microwave heating device 1 has several microwave heating modules 2 installed inside its inner cavity.
[0010] Furthermore, the heat radiation device 3 includes, from the inside out, a heating tube 5, a reflector 4, and a heat insulation layer 18;
[0011] Several heating pipes 5 are arranged around the chamber of the thermal radiation device 3, and several reflectors 4 are evenly arranged on the outside of the heating pipes 5. An insulation layer 18 is arranged on the back side of the reflectors 4.
[0012] Furthermore, the reflective surface of the reflector 4 faces the cavity of the thermal radiation device 3.
[0013] Furthermore, a water-cooled wall is provided on the outside of the insulation layer 18, and a cooling water inlet pipe 10 is provided on the water-cooled wall, which is connected to the cooling water main pipeline 11; a heat insulation layer is also provided on the outside of the water-cooled wall.
[0014] Furthermore, the heating tube 5 is a graphite wire heating tube, a carbon fiber heating tube, or a tungsten rhenium wire heating tube;
[0015] The reflector 4 is made of silicon carbide, silver-plated film, metal composite material, or polycrystalline silicon.
[0016] Furthermore, the thermal radiation device 3 is equipped with several temperature sensors and oxygen content sensors.
[0017] The temperature sensor and oxygen content sensor are connected to the temperature detection instrument 8;
[0018] The oxygen content sensor is connected to the oxygen content detection instrument 7 to prevent insufficient oxygen content caused by excessive inert gas.
[0019] Furthermore, the radiation device 3 is equipped with an inert gas inlet pipe 13, which is connected to the inert gas inlet main pipeline 12.
[0020] Furthermore, a clamp 15 is provided between two adjacent support rollers 14 on the same side;
[0021] The supporting roller 14 is made of silicon nitride.
[0022] This invention provides a polycrystalline silicon rod heating device that employs a two-stage heating process for rapid and uniform heating. The first stage utilizes microwave heating, with microwave heating modules (microwave pulse devices) installed on the top and sides of the device. Microwave heating is fast, quickly heating the polycrystalline silicon rod to approximately 300°C. Heating from three directions (top and sides) reduces heating time. The second stage employs thermal radiation heating using heating tubes, which can reach higher temperatures. Reflective mirrors are evenly arranged on the inner wall of the device, closely adhering to the inner wall. During heating, the heating tubes surround the silicon rod, reflecting light and heat energy for secondary heating, improving the heating effect and reducing energy consumption. The heating tubes provide semi-enclosed arc heating from the top and sides, ensuring more uniform heating of the polycrystalline silicon rod on three sides. Furthermore, the rotating motion of the silicon rod as it passes through the chamber further enhances its comprehensive heating. Several temperature and oxygen content sensors are installed within the second-stage thermal radiation device. Real-time temperature and oxygen content data are fed back to the temperature and oxygen content detection instruments, and ultimately to the controller. The controller adjusts the heating time and temperature of the graphite filaments based on the feedback temperature. The controller also adjusts the amount of inert gas injected based on the feedback oxygen content, effectively preventing oxidation of the polycrystalline silicon rod during heating.
[0023] This utility model provides a polycrystalline silicon rod heating device, in which the polycrystalline silicon rod is supported by four support rollers (two support rollers on each side are fixed with stainless steel clamps to prevent the silicon rod from falling off due to changes in the distance between silicon nitride). Gears are installed around the support rollers. When the gears pass through the rack and pinion track, they are driven to rotate. The gears drive the support rollers to rotate, and the support rollers drive the silicon rod to rotate, so that the silicon rod rotates during heating and can be heated more evenly.
[0024] This utility model provides a polycrystalline silicon rod heating device, in which a water-cooled wall is provided around the heat radiation device, and the outer layer of the water-cooled wall uses heat insulation products such as aerogel to prevent the high temperature from affecting the indoor environment.
[0025] Compared with the prior art, the advantages of the polycrystalline silicon rod heating device provided by this utility model are:
[0026] (1) High heating efficiency.
[0027] (2) High energy efficiency.
[0028] (3) Easy to operate. Attached Figure Description
[0029] Figure 1 This is a schematic diagram of the structure of a polycrystalline silicon rod heating device provided by this utility model.
[0030] Figure 2 yes Figure 1 Enlarged diagram of the location.
[0031] In the diagram: 1 is a microwave heating device, 2 is a microwave heating module, 3 is a thermal radiation device, 4 is a reflector, 5 is a heating tube, 6 is a polycrystalline silicon rod, 7 is an oxygen content detector, 8 is a temperature detector, 9 is a controller, 10 is a cooling water inlet pipe, 11 is a cooling water main pipeline, 12 is an inert gas inlet main pipeline, 13 is an inert gas inlet pipe, 14 is a support roller, 15 is a clamp, 16 is a gear, 17 is a rack and pinion track, and 18 is an insulation layer. Detailed Implementation
[0032] To enable those skilled in the art to better understand the technical solution of this utility model, the following embodiments provide a more detailed description of this utility model. These embodiments are only used to illustrate the utility model and are not intended to limit the scope of this utility model.
[0033] A polycrystalline silicon rod heating device includes: a microwave heating device 1, a thermal radiation device 3, a support roller 14, a gear 16, and a rack and pinion track 17; one end of the device is the microwave heating device 1, and the thermal radiation device 3 is provided at one end of the microwave heating device 1; the microwave heating device 1 and the thermal radiation device 3 are connected to each other in a cavity; the bottom of the cavity is provided with a rack and pinion track 17 that penetrates the cavity, and the rack and pinion track 17 is provided with a gear 16 that matches and connects to the support roller 14.
[0034] Furthermore, the rack and pinion track 17 is arranged in two parallel sections.
[0035] Furthermore, the microwave heating device 1 has several microwave heating modules 2 installed inside its inner cavity.
[0036] Furthermore, the heat radiation device 3 includes, from the inside out, a heating tube 5, a reflector 4, and a heat insulation layer 18; a number of heating tubes 5 are arranged around the chamber of the heat radiation device 3 in a semi-circular manner, a number of reflectors 4 are evenly arranged on the outside of the heating tubes 5, and a heat insulation layer 18 is arranged on the back side of the reflectors 4.
[0037] Furthermore, the reflective surface of the reflector 4 faces the cavity of the thermal radiation device 3.
[0038] Furthermore, a water-cooled wall is provided on the outer side of the insulation layer 18, and a cooling water inlet pipe 10 is provided on the water-cooled wall, which is connected to the cooling water main pipeline 11.
[0039] Furthermore, the heating tube 5 is a graphite wire heating tube, a carbon fiber heating tube, or a tungsten rhenium wire heating tube; the reflector 4 is made of silicon carbide, a silver-plated film, a metal composite material, or polycrystalline silicon.
[0040] Furthermore, the thermal radiation device 3 is equipped with several temperature sensors and oxygen content sensors; the temperature sensors and oxygen content sensors are connected to the temperature detection instrument 8; and the oxygen content sensor is connected to the oxygen content detection instrument 7.
[0041] Furthermore, the radiation device 3 is equipped with an inert gas inlet pipe 13, which is connected to the inert gas inlet main pipeline 12; the inert gas is helium, neon, krypton, xenon, or radon.
[0042] Furthermore, a clamp 15 is provided between two adjacent support rollers 14 on the same side;
[0043] The supporting roller 14 is made of silicon nitride. Example
[0044] A polycrystalline silicon rod heating device includes: a microwave heating device 1, a thermal radiation device 3, a support roller 14, a gear 16, and a rack and pinion track 17. One end of the device is the microwave heating device 1, and the thermal radiation device 3 is located at one end of the microwave heating device 1. The microwave heating device 1 and the thermal radiation device 3 have interconnected chambers. A rack and pinion track 17 is provided at the bottom of the chamber, penetrating the chamber. Gears 16, matching the support roller 14, are mounted on the rack and pinion track 17. Two rack and pinion tracks 17 are arranged in parallel. Several microwave heating modules 2 are arranged within the inner chamber of the microwave heating device 1.
[0045] The heat radiation device 3 includes, from the inside out, a heating tube 5, a reflector 4 and an insulation layer 18; a number of heating tubes 5 are arranged around the chamber of the heat radiation device 3 in a semi-circular manner, a number of reflectors 4 are evenly arranged on the outside of the heating tubes 5, and an insulation layer 18 is arranged on the back side of the reflectors 4.
[0046] The reflector 4 has its reflective surface facing the cavity of the thermal radiation device 3. The heating tube 5 is a graphite filament heating tube; the reflector 4 is made of silicon carbide. A clamp 15 is provided between two adjacent support rollers 14 on the same side; the support rollers 14 are made of silicon nitride. Example
[0047] A polycrystalline silicon rod heating device includes: a microwave heating device 1, a thermal radiation device 3, a support roller 14, a gear 16, and a rack and pinion track 17; one end of the device is the microwave heating device 1, and the thermal radiation device 3 is provided at one end of the microwave heating device 1; the microwave heating device 1 and the thermal radiation device 3 are connected to each other in a cavity; the bottom of the cavity is provided with a rack and pinion track 17 that penetrates the cavity, and the rack and pinion track 17 is provided with a gear 16 that matches and connects to the support roller 14.
[0048] The rack and pinion tracks 17 are arranged in two parallel configurations. Several microwave heating modules 2 are installed within the inner cavity of the microwave heating device 1. The thermal radiation device 3, from the inside out, includes heating tubes 5, reflectors 4, and an insulation layer 18. Several heating tubes 5 are arranged semi-circularly around the cavity of the thermal radiation device 3. Several reflectors 4 are evenly arranged outside the heating tubes 5, and the insulation layer 18 is installed on the back side of the reflectors 4. The reflective surfaces of the reflectors 4 face the cavity of the thermal radiation device 3. A water-cooled wall is installed outside the insulation layer 18, and a cooling water inlet pipe 10 is installed on the water-cooled wall, which is connected to the main cooling water pipeline 11.
[0049] The heating tube 5 is a tungsten-rhenium wire heating tube; the reflector 4 is made of silver-plated film. The thermal radiation device 3 is equipped with several temperature sensors and oxygen content sensors; these sensors are connected to a temperature detection instrument 8; the oxygen content sensor is connected to an oxygen content detection instrument 7. The radiation device 3 is equipped with an inert gas inlet pipe 13, which is connected to an inert gas main inlet pipeline 12; the inert gas is neon. A clamp 15 is provided between two adjacent support rollers 14 on the same side; the support rollers 14 are made of silicon nitride.
[0050] The preferred embodiments of the present invention have been described in detail above. However, the present invention is not limited to the specific details of the above embodiments. Within the scope of the technical concept of the present invention, various modifications can be made to the technical solution of the present invention, and these simple modifications all fall within the protection scope of the present invention.
[0051] It should also be noted that the various specific technical features and steps described in the above specific embodiments can be combined in any suitable way without contradiction. In order to avoid unnecessary repetition, this utility model will not describe the various possible combinations separately.
[0052] Furthermore, various different embodiments of this utility model can be combined in any way, as long as they do not violate the spirit of this utility model, they should also be regarded as the content disclosed by this utility model.
Claims
1. A polycrystalline silicon rod heating apparatus, characterized by, The device comprises a microwave heating device (1), a heat radiation device (3), a supporting roller (14), a gear (16) and a rack track (17). One end of the device is the microwave heating device (1), one end of the microwave heating device (1) is provided with the heat radiation device (3), and the interiors of the microwave heating device (1) and the heat radiation device (3) are provided with a communicating chamber. The bottom of the chamber is provided with a rack track (17) penetrating through the chamber, and the rack track (17) is provided with a gear (16) matched therewith and connected with the supporting roller (14).
2. A polycrystalline silicon rod heating apparatus as claimed in claim 1, wherein: The rack track (17) is two parallel tracks.
3. A polycrystalline silicon rod heating apparatus as claimed in claim 1, wherein: The microwave heating device (1) is provided with a plurality of microwave heating modules (2) in the chamber.
4. A polycrystalline silicon rod heating apparatus as claimed in claim 1, wherein: The heat radiation device (3) comprises a heating pipe (5), a reflector (4) and a heat preservation layer (18) from inside to outside. A plurality of heating pipes (5) are arranged around the chamber of the heat radiation device (3) in a semi-encircling manner, a plurality of reflectors (4) are uniformly arranged on the outside of the heating pipes (5), and the back side of the reflector (4) is provided with a heat preservation layer (18).
5. A polycrystalline silicon rod heating apparatus as claimed in claim 4, wherein: The reflecting surface of the reflector (4) faces the chamber of the heat radiation device (3).
6. A polycrystalline silicon rod heating apparatus as claimed in claim 4, wherein: The outside of the heat preservation layer (18) is provided with a water-cooled wall, and a cooling water inlet pipe (10) is arranged on the water-cooled wall and connected with a cooling water main line (11).
7. A polycrystalline silicon rod heating apparatus as claimed in claim 4, wherein: The heating pipe (5) is a graphite wire heating pipe, a carbon fiber heating pipe or a tungsten-rhenium wire heating pipe. The material of the reflector (4) is silicon carbide, silver-coated film, metal composite material or polycrystalline silicon.
8. A polycrystalline silicon rod heating apparatus as claimed in claim 1, wherein: A plurality of temperature sensors and oxygen content sensors are arranged in the heat radiation device (3). The temperature sensors and the oxygen content sensors are connected with a temperature detection instrument (8). The oxygen content sensors are connected with an oxygen content detection instrument (7).
9. A polycrystalline silicon rod heating apparatus as claimed in claim 1, wherein: The heat radiation device (3) is provided with an inert gas inlet pipe (13) connected with an inert gas inlet main line (12).
10. A polycrystalline silicon rod heating apparatus as claimed in claim 1, wherein: A clamping device (15) is arranged between two adjacent supporting rollers (14) on the rack track (17). The material of the supporting roller (14) is silicon nitride.