Quartz boat and diffusion furnace

Abstract

The utility model relates to a quartz boat and a diffusion furnace, the quartz boat is used for loading silicon wafers, the quartz boat comprises a frame body, the frame body extends along a first direction, and two ends of the frame body along the first direction are also provided with reinforcing structures; the discharging unit comprises a bearing assembly and a limiting assembly, the bearing assembly is installed on the frame body in the second direction so as to bear the silicon wafers, and the second direction is perpendicular to the first direction; the limiting assembly is installed on the frame body in the second direction, the limiting assembly and the bearing assembly are matched to form at least one containing space, and the silicon wafer is contained and limited in the at least one containing space; the frame body is further provided with an air hole assembly so that air can penetrate through the frame body in the second direction. The frame body comprises a first side plate, a second side plate, a third side plate and a fourth side plate which are sequentially connected. According to the utility model, silicon wafers can be conveniently inserted, the overall structural strength is high, the silicon wafers are not easy to break, and the working efficiency can be effectively improved.

Description

Technical Field

[0001] This utility model relates to the field of solar cell production technology, and in particular to a quartz boat and diffusion furnace. Background Technology

[0002] In the manufacturing of solar cells, integrated circuits, and optoelectronic devices, diffusion furnaces are key pieces of equipment. They are primarily used to diffuse dopants (such as boron and phosphorus) onto the surface of silicon wafers at high temperatures. Specifically, diffusion furnaces are used for processes such as doping, oxidation, and annealing to alter the electrical properties of the silicon wafers. Quartz boats are crucial components of the diffusion furnace, primarily used to support and transport the silicon wafers, ensuring their stability and purity during high-temperature processes. Furthermore, quartz boats can withstand the high temperatures (typically exceeding 1000°C) of the diffusion furnace and are chemically stable, not reacting with dopants or the silicon wafers, thus preventing contamination and ensuring process purity. Additionally, quartz boats possess good thermal stability with a low coefficient of thermal expansion, reducing deformation caused by temperature changes and ensuring the stability of the silicon wafers during transport. In existing technologies, the structure of a quartz boat typically includes a frame and a combination of multiple smaller boats, each mounted on the frame.

[0003] The drawback of the existing technology is that each time an automated operation is performed, the small boats need to be moved away one by one from the boat frame, which wastes time and reduces work efficiency to a certain extent. In addition, due to the split structure, the structural strength is not high. During the operation, the boat frame is prone to breakage because it needs to enter and exit the diffusion furnace multiple times and move the small boats multiple times. Utility Model Content

[0004] Therefore, the technical problem to be solved by this utility model is to overcome the shortcomings of the prior art and provide a quartz boat and diffusion furnace. Compared with the existing quartz boat structure, it can facilitate the insertion of silicon wafers, has higher overall structural strength, is not easy to break, and can effectively improve work efficiency.

[0005] To solve the above-mentioned technical problems, this utility model provides a quartz boat for loading silicon wafers, comprising,

[0006] A frame extending along a first direction, wherein the frame is further provided with reinforcing structures at both ends along the first direction;

[0007] The unloading unit includes a support component and a limiting component. The support component is mounted on the frame along a second direction perpendicular to the first direction to support the silicon wafer. The limiting component is mounted on the frame along the second direction and cooperates with the support component to form at least one receiving space. The silicon wafer is received and limited in at least one receiving space.

[0008] In one embodiment of this utility model, the frame is further provided with a ventilation hole assembly so that air can pass through the frame in the second direction.

[0009] In one embodiment of the present invention, the frame includes a first side plate, a second side plate, a third side plate and a fourth side plate connected in sequence. The first side plate and the third side plate are disposed opposite to each other and both extend along the first direction. The second side plate and the fourth side plate are disposed opposite to each other and both extend along the second direction.

[0010] In one embodiment of the present invention, the reinforcing structure includes a first reinforcing rib and a second reinforcing rib. The first reinforcing rib is disposed on the side of the second side plate opposite to the fourth side plate, and the second reinforcing rib is disposed on the side of the fourth side plate opposite to the second side plate.

[0011] In one embodiment of the present invention, the vent assembly includes at least one first through hole disposed on the first side plate and at least one second through hole disposed on the third side plate, wherein the first through hole and the second through hole are disposed opposite to each other.

[0012] In one embodiment of the present invention, the support assembly includes at least one support body, and both ends of the at least one support body are mounted on the first side plate and the third side plate.

[0013] In one embodiment of the present invention, each of the supports is provided with a mounting groove at intervals, the spacing between two adjacent mounting grooves is equal, the silicon wafer can be placed in the mounting groove, and the edge of each mounting groove is chamfered.

[0014] In one embodiment of the present invention, the limiting component includes a plurality of limiting rods, the two ends of the plurality of limiting rods are mounted on the first side plate and the third side plate, the plurality of limiting rods are spaced apart along the first direction, and two adjacent limiting rods can limit the silicon wafer in the first direction.

[0015] In one embodiment of this utility model, each of the limiting rods is provided with a plurality of limiting grooves at intervals.

[0016] This utility model also provides a diffusion furnace, including at least one quartz boat as described above, wherein at least one of the quartz boats is housed within the diffusion furnace.

[0017] The above-mentioned technical solution of this utility model has the following advantages compared with the prior art:

[0018] The quartz boat described in this utility model is equipped with a frame and a feeding unit. Reinforcing structures are provided at both ends of the frame along a first direction to increase the structural strength of the quartz boat. The feeding unit includes a support component and a limiting component. The limiting components are respectively disposed on both sides of the support component along the first direction. The support component is used to support silicon wafers, and the limiting components can limit the silicon wafers in the first direction, thereby preventing the silicon wafers from shifting during the movement of the quartz boat and ensuring the stability of the silicon wafers. Compared with existing quartz boat structures, the quartz boat of this utility model has a compact overall structure and facilitates the insertion of silicon wafers. The reinforced structure design also enhances the structural strength of the quartz boat, making it less prone to breakage, thereby extending the service life of the quartz boat and effectively improving work efficiency. Attached Figure Description

[0019] To make the content of this utility model easier to understand, the present utility model will be further described in detail below with reference to specific embodiments and accompanying drawings.

[0020] Figure 1 This is a schematic diagram of the structure of a quartz boat equipped with multiple silicon wafers according to a preferred embodiment of the present invention.

[0021] Figure 2 This is a schematic diagram of the overall structure of the quartz boat according to a preferred embodiment of the present invention.

[0022] Figure 3 yes Figure 2 A magnified view of the local structure.

[0023] Figure 4 This is a first-view structural schematic diagram of a partial structure of a quartz boat according to a preferred embodiment of the present invention.

[0024] Figure 5 This is a second-view structural schematic diagram of a partial structure of a quartz boat according to a preferred embodiment of the present invention.

[0025] Explanation of reference numerals in the accompanying drawings: 10, silicon wafer; 1, frame; 11, first side plate; 110, first through hole; 12, second side plate; 13, third side plate; 130, second through hole; 14, fourth side plate; 21, first reinforcing rib; 22, second reinforcing rib; 30, support body; 301, mounting groove; 40, limiting rod; 401, limiting groove; 50, gripping part. Detailed Implementation

[0026] The present invention will be further described below with reference to the accompanying drawings and specific embodiments, so that those skilled in the art can better understand and implement the present invention. However, the embodiments are not intended to limit the present invention. Example

[0027] Reference Figures 1 to 5 As shown, this utility model discloses a quartz boat for loading silicon wafers 10 to facilitate the transport of silicon wafers 10.

[0028] The quartz boat includes a frame 1 that extends along a first direction; the frame 1 is also provided with reinforcing structures at both ends along the first direction to enhance the structural strength of the frame 1.

[0029] The quartz boat also includes a feeding unit, which includes a support component and a limiting component. The support component is installed on the frame 1 along a second direction to support the silicon wafer 10. The second direction is perpendicular to the first direction.

[0030] The limiting component is installed on the frame 1 along the second direction. The limiting component and the supporting component cooperate with each other to form at least one receiving space. The silicon wafer 10 can be received and limited in at least one of the receiving spaces.

[0031] Of course, the number of storage spaces can be adjusted according to actual needs.

[0032] Therefore, it can be seen that the quartz boat protected by this utility model is provided with a frame and a feeding unit. The frame is provided with reinforcing structures at both ends along the first direction to increase the structural strength of the quartz boat. The feeding unit includes a supporting component and a limiting component. The limiting components are respectively provided on both sides of the supporting component along the first direction. The supporting component is used to support the silicon wafer, and the limiting component can limit the silicon wafer in the first direction, thereby preventing the silicon wafer from shifting during the movement of the quartz boat and ensuring the stability of the silicon wafer. Compared with the existing quartz boat structure, the quartz boat of this utility model has a compact overall structure and facilitates the insertion of silicon wafers. The design of the reinforcing structure can also enhance the structural strength of the quartz boat, making it less prone to breakage, thereby extending the service life of the quartz boat and effectively improving work efficiency.

[0033] As a preferred embodiment, in order to ensure the uniformity of airflow when the silicon wafer 10 is processed in the quartz boat, facilitate the airflow to pass along the surface of the silicon wafer 10, and ensure the stability of product quality, the frame 1 is also provided with a vent assembly so that air can pass through the frame 1 in the second direction.

[0034] Furthermore, the frame 1 includes a first side plate 11, a second side plate 12, a third side plate 13, and a fourth side plate 14 connected in sequence. The first side plate 11 and the third side plate 13 are disposed opposite to each other and extend along the first direction. The second side plate 12 and the fourth side plate 14 are disposed opposite to each other and extend along the second direction.

[0035] In a preferred embodiment, the reinforcing structure includes a first reinforcing rib 21 and a second reinforcing rib 22. The first reinforcing rib 21 is disposed on the side of the second side plate 12 opposite to the fourth side plate 14. The second reinforcing rib 22 is disposed on the side of the fourth side plate 14 opposite to the second side plate 12.

[0036] In detail, the ventilation hole assembly includes at least one first through hole 110 disposed on the first side plate 11 and at least one second through hole 130 disposed on the third side plate 130. The first through hole 110 and the second through hole 130 are disposed opposite to each other. This arrangement facilitates airflow to pass through the frame 1 in the second direction.

[0037] It should be noted that when there are multiple receiving spaces, each receiving space is provided with the vent assembly. Specifically, multiple first through holes 110 are spaced apart along the first direction on the first side plate 11; correspondingly, multiple second through holes 130 are spaced apart along the first direction on the third side plate 13.

[0038] Preferably, the projections of the plurality of first through holes 110 and the plurality of second through holes 130 along the second direction overlap to maximize the airflow and thus ensure the processing effect of the silicon wafer 10 in the quartz boat.

[0039] In addition, the ventilation hole assembly can effectively reduce the overall weight of the quartz boat, thereby facilitating operation to a certain extent and reducing the burden on operators when moving the boat.

[0040] In a preferred embodiment, the support assembly includes at least one support body 30, with both ends of the at least one support body 30 respectively mounted on the first side plate 11 and the third side plate 13.

[0041] In one preferred embodiment, the support 30 is a cylindrical structure; preferably, the support 30 is a cylinder.

[0042] In a preferred embodiment, each support 30 is provided with a plurality of mounting slots 301 spaced apart. The spacing between two adjacent mounting slots is equal, and the silicon wafer 10 can be placed in the mounting slot 301. When there are multiple silicon wafers 10, the multiple silicon wafers 10 are arranged in an array along the first direction on the support 30.

[0043] To improve the smoothness of placing the silicon wafer 10 into the mounting groove 301 and to avoid scratches on the surface of the silicon wafer 10, each mounting groove 301 has a chamfered edge.

[0044] In a preferred embodiment, the limiting component includes a plurality of limiting rods 40, with the two ends of the plurality of limiting rods 40 respectively mounted on the first side plate 11 and the third side plate 13. The plurality of limiting rods 40 are spaced apart along the first direction, and two adjacent limiting rods 40 can limit the silicon wafer 10 in the first direction.

[0045] In a preferred embodiment, each of the limiting rods 40 is provided with a plurality of limiting grooves 401 at intervals. It should be noted that the spacing between two adjacent limiting grooves 401 is also set to be equal, and the limiting grooves 401 and the mounting grooves 301 are opposite to each other along the first direction to ensure that the silicon wafer 10 can be simultaneously embedded in the mounting grooves 301 and the limiting grooves 401.

[0046] To facilitate the movement of the quartz boat by operators, the quartz boat is also provided with a gripping part 50. There are two gripping parts 50, one of which is installed on the second side plate 12 and the other is installed on the fourth side plate 14.

[0047] In this way, the operator can move the quartz boat using the grip 50; preferably, the end of the grip 50 is set to an ergonomic arc shape, and the two grips 50 are symmetrical to each other.

[0048] As a preferred embodiment, in order to facilitate the processing and manufacturing of the quartz boat, improve the structural strength of the frame 1, and reduce the number of parts, the frame 1 is designed as a single piece.

[0049] In one embodiment of this solution, reference is made to Figures 1 to 5 As shown, the quartz boat has six receiving spaces. Specifically, each receiving space consists of two spaced-apart support bodies 30 and two opposing limit rods 40. The limit rods 40 are positioned near the top of the frame 1 along the height direction, and the support bodies 30 are positioned near the bottom of the frame 1 along the height direction. Example

[0050] This utility model also discloses a diffusion furnace, which includes at least one quartz boat as described in Embodiment 1, and at least one of the quartz boats is housed within the diffusion furnace.

[0051] In detail, the quartz boat is compatible with the diffusion furnace to ensure that the silicon wafers are heated evenly in the diffusion furnace, thus ensuring the consistency of the process effect. In addition, from an overall perspective, the quartz boat is compatible with the transmission equipment of the automation system to realize the automatic loading and unloading of silicon wafers. Furthermore, the quartz boat needs to be maintained regularly to avoid the accumulation of impurities, which would affect the quality of the product.

[0052] In the description of this utility model, it should be understood that the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, "a plurality of" means two or more, unless otherwise explicitly specified.

[0053] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. For those skilled in the art, the specific meaning of the above terms in this utility model can be understood according to the specific circumstances.

[0054] Obviously, the above embodiments are merely illustrative examples for clear explanation and are not intended to limit the implementation. Those skilled in the art will recognize that other variations or modifications can be made based on the above description. It is neither necessary nor possible to exhaustively list all possible implementations here. However, obvious variations or modifications derived therefrom are still within the protection scope of this invention.

Claims

1. A quartz boat for loading a silicon wafer, characterized by: The rack body is provided with a reinforcing structure at both ends along the first direction. The feeding unit comprises a supporting assembly and a limiting assembly, the supporting assembly is installed on the rack body along the second direction to support the silicon wafer, the second direction is perpendicular to the first direction; the limiting assembly is installed on the rack body along the second direction, the limiting assembly cooperates with the supporting assembly to form at least one receiving space, the silicon wafer is received and limited in the at least one receiving space. The rack body is further provided with a vent hole assembly to enable air to pass through the rack body along the second direction.

2. The quartz boat of claim 1, wherein: The rack body comprises a first side plate, a second side plate, a third side plate and a fourth side plate connected in sequence, the first side plate and the third side plate are oppositely arranged and both extend along the first direction, the second side plate and the fourth side plate are oppositely arranged and both extend along the second direction.

3. The quartz boat of claim 2, wherein: The reinforcing structure comprises a first reinforcing rib and a second reinforcing rib, the first reinforcing rib is arranged on the second side plate opposite to the fourth side plate, and the second reinforcing rib is arranged on the fourth side plate opposite to the second side plate.

4. The quartz boat of claim 3, wherein: The vent hole assembly comprises at least one first through hole arranged on the first side plate and at least one second through hole arranged on the third side plate, the first through hole and the second through hole are oppositely arranged.

5. The quartz boat of claim 3, wherein: The supporting assembly comprises at least one support body, both ends of the at least one support body are installed on the first side plate and the third side plate.

6. The quartz boat of claim 3, wherein: Each support body is provided with an installation slot at intervals, the interval of adjacent two installation slots is equal, the silicon wafer can be placed in the installation slot, and the edge of each installation slot is chamfered.

7. A quartz boat as claimed in claim 6, characterized in that: The limiting assembly comprises a plurality of limiting rods, both ends of the plurality of limiting rods are installed on the first side plate and the third side plate, the plurality of limiting rods are arranged at intervals along the first direction, and adjacent two limiting rods can limit the silicon wafer in the first direction.

8. The quartz boat of claim 3, wherein: Each limiting rod is provided with a plurality of limiting grooves at intervals.

9. The quartz boat of claim 8, wherein: The quartz boat comprises at least one quartz boat as claimed in any one of claims 1-9, and the at least one quartz boat is received in the diffusion furnace.

10. A diffusion furnace characterized by: ​

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