Silicon carbide paddle device and diffusion furnace

Abstract

The utility model relates to a silicon carbide paddle device and a diffusion furnace, comprising a support paddle used for bearing a material to be processed; the sealing mounting unit comprises a paddle sleeve assembly and a connecting assembly, and the furnace door is provided with a through hole through which the supporting paddle can pass; one end of the supporting paddle is located on the first side of the furnace door, the other end of the supporting paddle penetrates through the through hole and is contained in the paddle sleeve assembly, and the paddle sleeve assembly is in floating connection with the second side of the furnace door; and the paddle sleeve assembly is elastically connected with the furnace door through the connecting assembly. The sealing device can effectively improve the sealing effect of the furnace door of the diffusion furnace, and due to the arrangement of the paddle sleeve assembly and the connecting assembly, the requirement for floating of the furnace door in multiple directions can be met, elastic telescopic redundancy in the multiple directions can be provided, and therefore the deformation quantity of the furnace door caused by temperature changes can be effectively compensated, and the good buffering and protecting effects are achieved; the overall structural strength is effectively improved, so that the product quality is ensured, and the production efficiency can be improved.

Description

Technical Field

[0001] This utility model relates to the field of high-temperature diffusion technology, and in particular to a silicon carbide paddle device and diffusion furnace. Background Technology

[0002] With increasing environmental awareness, the demand for the development and utilization of renewable energy is also growing. Solar energy, as a renewable energy source, can be used for photovoltaic power generation and solar thermal power generation, and silicon solar cells are one of the important optoelectronic products utilizing solar energy resources. In the production process of silicon solar cells, silicon wafers need to be processed through a high-temperature diffusion process to form a good PN junction on the wafer. This process requires a high-temperature diffusion furnace. The silicon wafer is placed on a quartz boat, and a silicon carbide paddle is used to fix and support the quartz boat, thereby moving the boat in and out of the diffusion furnace to process the silicon wafer. Silicon carbide paddles have many characteristics: they can withstand high-temperature environments, are not easily deformed or damaged, are suitable for use in high-temperature diffusion furnaces, and have high mechanical strength, capable of withstanding the weight and mechanical stress of materials inside the furnace, ensuring the stability and efficiency of furnace operation. In existing technologies, a corrugated pipe structure is usually installed outside the furnace door, working in conjunction with the silicon carbide paddle to achieve a certain degree of vibration reduction and sealing.

[0003] However, the shortcomings of the existing technology are that the corrugated pipe structure is prone to deformation after being heated, resulting in poor sealing effect when the furnace door and silicon carbide slurry are fitted together. Furthermore, the corrugated pipe structure alone is not strong enough as a vibration damping mechanism, and the vibration damping effect is not ideal. This affects the processing effect of the high-temperature diffusion process to a certain extent, impacts product quality, and reduces production efficiency. Utility Model Content

[0004] Therefore, the technical problem to be solved by this utility model is to overcome the shortcomings of the prior art and provide a silicon carbide slurry device and diffusion furnace, which can effectively improve the sealing effect of the furnace door and has elastic expansion and contraction redundancy in multiple directions, thereby compensating for the deformation of the furnace door caused by temperature changes, effectively improving structural strength, effectively ensuring product quality, and improving production efficiency.

[0005] To solve the above-mentioned technical problems, this utility model provides a silicon carbide slurry device, which is installed in the furnace door of a diffusion furnace, including,

[0006] Support paddles are used to support the materials to be processed;

[0007] A sealing installation unit includes a paddle sleeve assembly and a connecting assembly. The furnace door has a through hole that can accommodate the passage of the support paddle. One end of the support paddle is located on a first side of the furnace door, and the other end of the support paddle passes through the through hole and is received in the paddle sleeve assembly. The paddle sleeve assembly is floatingly connected to a second side of the furnace door. The paddle sleeve assembly is elastically connected to the furnace door through the connecting assembly.

[0008] In one embodiment of the present invention, the connecting assembly includes a fixed base, an angle adjusting member, and a first buffer structure. The fixed base is movably connected to the paddle sleeve assembly through the angle adjusting member, and the fixed base is connected to the furnace door through the first buffer structure.

[0009] In one embodiment of this utility model, the first buffer structure includes a connecting rod, a linear bearing, a ball bearing, and a first buffer spring. One end of the connecting rod is connected to the fixed seat through the linear bearing, and the other end of the connecting rod is connected to the furnace door through the ball bearing. The first buffer spring is sleeved on the connecting rod.

[0010] In one embodiment of the present invention, the propeller sleeve assembly includes a propeller sleeve body and a bellows structure. The propeller sleeve body has a receiving cavity and an opening at one end along its length. The support propeller is received in the receiving cavity through the opening. One end of the bellows structure is connected to the furnace door, and the other end of the bellows structure is connected to the opening.

[0011] In one embodiment of the present invention, the paddle sleeve assembly further includes a sealing ring and a second buffer spring, wherein the sealing ring is disposed between the furnace door and the paddle sleeve body.

[0012] In one embodiment of the present invention, the bellows structure includes a bellows, a first mounting block and a second mounting block, the first mounting block and the second mounting block being disposed at both ends of the bellows, one end of the second buffer spring being disposed at the first mounting block, and the other end of the second buffer spring being disposed at the second mounting block.

[0013] In one embodiment of the present invention, the propeller sleeve assembly further includes at least one fixing screw, which is installed on the propeller sleeve body in a direction perpendicular to the supporting propeller to position the supporting propeller within the propeller sleeve body.

[0014] In one embodiment of the present invention, a heat insulation unit is further included. The heat insulation unit includes a heat insulation plate assembly and a heat insulation bag. The heat insulation plate assembly and the heat insulation bag are sequentially disposed on the support paddle and are adjacent to the first side.

[0015] In one embodiment of the present invention, the heat insulation plate assembly includes a plurality of heat insulation plates, which are spaced apart from the support paddle and are perpendicular to the extension direction of the support paddle.

[0016] This utility model also provides a diffusion furnace, including a silicon carbide paddle device as described above.

[0017] The above-mentioned technical solution of this utility model has the following advantages compared with the prior art:

[0018] This utility model discloses a silicon carbide paddle device, comprising a supporting paddle and a sealing installation unit. The supporting paddle carries the material to be processed, and the sealing installation unit includes a paddle sleeve assembly and a connecting assembly. One end of the supporting paddle is located on the first side of the diffusion furnace door, and the other end of the supporting paddle passes through the through hole and is housed in the paddle sleeve assembly. Specifically, the paddle sleeve assembly is floatingly connected to the second side of the furnace door; simultaneously, the paddle sleeve assembly is also elastically connected to the furnace door through the connecting assembly. This silicon carbide paddle device effectively improves the sealing effect of the diffusion furnace door during operation. Due to the inclusion of the paddle sleeve assembly and the connecting assembly, it allows the furnace door to float in multiple directions, providing redundant elastic expansion and contraction in multiple directions. This effectively compensates for furnace door deformation caused by temperature changes, providing good buffering and protection, effectively improving the overall structural strength, thereby ensuring product quality and increasing production efficiency. Attached Figure Description

[0019] To make the content of this utility model easier to understand, the present utility model will be further described in detail below with reference to specific embodiments and accompanying drawings.

[0020] Figure 1 This is a first-view schematic diagram of the overall structure of a preferred embodiment of the present invention.

[0021] Figure 2 This is a second-view schematic diagram of the overall structure of a preferred embodiment of the present invention.

[0022] Figure 3 This is a partial enlarged view of a preferred embodiment of the present invention.

[0023] Figure 4 This is a partial structural schematic diagram of a preferred embodiment of the present invention.

[0024] Figure 5 This is a partial structural schematic diagram of the propeller sleeve unit according to a preferred embodiment of the present invention.

[0025] Explanation of reference numerals in the accompanying drawings: 10. Furnace door; 101. Through hole; 1. Support paddle; 12. Support base; 2. Paddle sleeve assembly; 20. Paddle sleeve body; 21. Second buffer spring; 22. Bellows; 23. First mounting block; 24. Second mounting block; 25. First connecting block; 26. Second connecting block; 27. Fixing screw; 3. Connecting assembly; 30. Fixing base; 32. Connecting rod; 33. Linear bearing; 34. Ball bearing; 35. First buffer spring; 36. First angle adjusting bolt; 37. Second angle adjusting bolt; 40. Heat insulation bag; 41. Heat insulation plate. Detailed Implementation

[0026] The present invention will be further described below with reference to the accompanying drawings and specific embodiments, so that those skilled in the art can better understand and implement the present invention. However, the embodiments are not intended to limit the present invention. Example 1

[0027] Reference Figures 1 to 5 As shown, this utility model discloses a silicon carbide paddle device, which is installed in the furnace door 10 of a diffusion furnace.

[0028] The silicon carbide device includes a support paddle 1, which is used to carry the material to be processed. The material to be processed includes, but is not limited to, silicon wafers or other semiconductor devices, and may also carry a quartz boat on which silicon wafers are mounted.

[0029] The silicon carbide device also includes a sealing installation unit, which includes a paddle sleeve assembly 2 and a connecting assembly 3. The furnace door 10 is provided with a through hole 101 that can accommodate the passage of the support paddle.

[0030] One end of the support paddle 1 is located on the first side of the furnace door 10, and the other end of the support paddle 1 passes through the through hole 101 and is received in the paddle sleeve assembly 2. Specifically, the paddle sleeve assembly 2 is floatingly connected to the second side of the furnace door. The paddle sleeve assembly 2 is elastically connected to the furnace door 10 through the connecting assembly 3.

[0031] Here, the first side and the second side are defined as the two sides of the furnace door 10 along the thickness direction. Specifically, the first side of the furnace door 10 is the side adjacent to the interior of the diffusion furnace, and the second side is the side of the furnace door 10 adjacent to the external environment.

[0032] Therefore, it can be understood that the silicon carbide slurry device protected by this utility model includes a supporting slurry and a sealing installation unit. The supporting slurry is used to carry the material to be processed, and the sealing installation unit includes a slurry sleeve assembly and a connecting assembly. One end of the supporting slurry is located on the first side of the diffusion furnace door, and the other end of the supporting slurry passes through the through hole and is received in the slurry sleeve assembly. Specifically, the slurry sleeve assembly is floatingly connected to the second side of the furnace door; at the same time, the slurry sleeve assembly is also elastically connected to the furnace door through the connecting assembly. The silicon carbide slurry device of this utility model can effectively improve the sealing effect of the diffusion furnace door during operation. Due to the inclusion of the slurry sleeve assembly and the connecting assembly, it can accommodate the floating of the furnace door in multiple directions, providing elastic expansion and contraction redundancy in multiple directions. This effectively compensates for the deformation of the furnace door caused by temperature changes, providing good buffering and protection, effectively improving the overall structural strength, thereby ensuring product quality and improving production efficiency.

[0033] In detail, the support paddle 1 has a groove structure formed by recesses along the thickness direction to facilitate the placement of the material to be processed.

[0034] In a preferred embodiment, the connecting assembly 3 includes a fixed base 30, an angle adjusting member, and a first buffer structure. The fixed base 30 is movably connected to the paddle sleeve assembly 2 through the angle adjusting member, and the fixed base 30 is connected to the furnace door 10 through the first buffer structure.

[0035] In a preferred embodiment, the first buffer structure includes a connecting rod 32, a linear bearing 33, a ball bearing 34, and a first buffer spring 35. One end of the connecting rod 32 is connected to the fixed seat 30 through the linear bearing 33, and the other end of the connecting rod 32 is connected to the furnace door 10 through the ball bearing 34. The first buffer spring 35 is sleeved on the connecting rod 32.

[0036] As a preferred embodiment, in order to ensure uniform force distribution, the first buffer structure is provided in two sets.

[0037] The propeller sleeve assembly 2 includes a propeller sleeve body 20 and a bellows structure. The propeller sleeve body 20 has a receiving cavity and an opening at one end along its length. The support propeller 1 is received in the receiving cavity through the opening. One end of the bellows structure is connected to the furnace door 10, and the other end of the bellows structure is connected to the opening.

[0038] In a preferred embodiment, the paddle sleeve assembly 2 further includes a sealing ring and a second buffer spring 21, the sealing ring being disposed between the furnace door 10 and the paddle sleeve body 20.

[0039] Specifically, the bellows structure includes a bellows 22, a first mounting block 23 and a second mounting block 24. The first mounting block 23 and the second mounting block 24 are disposed at both ends of the bellows 22. One end of the second buffer spring 21 is disposed at the first mounting block 23 and the other end of the second buffer spring 21 is disposed at the second mounting block 24.

[0040] In detail, the angle adjustment component includes a first angle adjustment bolt 36 and a second angle adjustment bolt 37. The propeller sleeve assembly 2 also includes a first connecting block 25 and a second connecting block 26, which are respectively sleeved on both ends of the propeller sleeve body 20 along its length. One end of the first angle adjustment bolt 36 is installed on the fixed base 30, and the other end is installed on the first connecting block 25. One end of the second angle adjustment bolt 37 is installed on the fixed base 30, and the other end is installed on the second connecting block 26. With this configuration, the installation angle between the fixed base 30 and the propeller sleeve body 20 can be adjusted by adjusting the first angle adjustment bolt 36 and the second angle adjustment bolt 37.

[0041] In a preferred embodiment, the propeller sleeve assembly 2 further includes at least one fixing screw 27, which is installed on the propeller sleeve body 20 in a direction perpendicular to the supporting propeller 1 to position the supporting propeller 1 within the propeller sleeve body 20.

[0042] In this embodiment, two fixing screws 27 are provided, and the two fixing screws 27 are spaced apart along the length direction of the propeller sleeve body 20.

[0043] In a preferred embodiment, in order to avoid excessive heat baking the furnace door 10 and its structure when the support paddle 1 is extracted from the diffusion furnace, and to extend the service life of the equipment, the present invention also includes a heat insulation unit. The heat insulation unit includes a heat insulation plate assembly and a heat insulation package 40. The heat insulation plate assembly and the heat insulation package 40 are sequentially arranged on the support paddle 1 and located on the side of the furnace door 10 adjacent to the interior of the diffusion furnace.

[0044] In detail, the support paddle 1 is also provided with a support base 12 to facilitate the installation of the heat insulation plate assembly.

[0045] Specifically, the heat insulation plate assembly includes a plurality of heat insulation plates 41, which are spaced apart on the support paddle 1 and are perpendicular to the extending direction of the support paddle 1. The support base 12 has a plurality of slots evenly spaced apart, into which the plurality of heat insulation plates 41 are respectively inserted. Example 2

[0046] This utility model also discloses a diffusion furnace, including the silicon carbide paddle device described in Embodiment 1.

[0047] The silicon carbide slurry device is installed at the furnace door of the diffusion furnace.

[0048] In the description of this utility model, it should be understood that the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, "a plurality of" means two or more, unless otherwise explicitly specified.

[0049] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. For those skilled in the art, the specific meaning of the above terms in this utility model can be understood according to the specific circumstances.

[0050] Obviously, the above embodiments are merely illustrative examples for clear explanation and are not intended to limit the implementation. Those skilled in the art will recognize that other variations or modifications can be made based on the above description. It is neither necessary nor possible to exhaustively list all possible implementations here. However, obvious variations or modifications derived therefrom are still within the protection scope of this invention.

Claims

1. A silicon carbide slurry device, assembled in the furnace door of a diffusion furnace, characterized in that: include, Support paddles are used to support the materials to be processed; A sealing installation unit includes a paddle sleeve assembly and a connecting assembly. The furnace door has a through hole that can accommodate the passage of the support paddle. One end of the support paddle is located on a first side of the furnace door, and the other end of the support paddle passes through the through hole and is received in the paddle sleeve assembly. The paddle sleeve assembly is floatingly connected to a second side of the furnace door. The paddle sleeve assembly is elastically connected to the furnace door through the connecting assembly.

2. The silicon carbide propeller device according to claim 1, characterized in that: The connecting assembly includes a fixed base, an angle adjusting member, and a first buffer structure. The fixed base is movably connected to the paddle sleeve assembly through the angle adjusting member, and the fixed base is connected to the furnace door through the first buffer structure.

3. The silicon carbide propeller device according to claim 2, characterized in that: The first buffer structure includes a connecting rod, a linear bearing, a ball bearing, and a first buffer spring. One end of the connecting rod is connected to the fixed seat through the linear bearing, and the other end of the connecting rod is connected to the furnace door through the ball bearing. The first buffer spring is sleeved on the connecting rod.

4. The silicon carbide propeller device according to claim 1, characterized in that: The propeller sleeve assembly includes a propeller sleeve body and a bellows structure. The propeller sleeve body has a receiving cavity and an opening at one end along its length. The support propeller is received in the receiving cavity through the opening. One end of the bellows structure is connected to the furnace door, and the other end of the bellows structure is connected to the opening.

5. A silicon carbide propeller device according to claim 4, characterized in that: The paddle sleeve assembly also includes a sealing ring and a second buffer spring, with the sealing ring disposed between the furnace door and the paddle sleeve body.

6. A silicon carbide propeller device according to claim 5, characterized in that: The bellows structure includes a bellows, a first mounting block, and a second mounting block. The first mounting block and the second mounting block are disposed at both ends of the bellows. One end of the second buffer spring is disposed at the first mounting block, and the other end of the second buffer spring is disposed at the second mounting block.

7. A silicon carbide propeller device according to claim 4, characterized in that: The propeller sleeve assembly further includes at least one fixing screw, which is installed on the propeller sleeve body in a direction perpendicular to the supporting propeller to position the supporting propeller within the propeller sleeve body.

8. A silicon carbide propeller device according to any one of claims 1-7, characterized in that: It also includes a heat insulation unit, which includes a heat insulation plate assembly and a heat insulation bag. The heat insulation plate assembly and the heat insulation bag are sequentially disposed on the support paddle and are adjacent to the first side.

9. A silicon carbide propeller device according to claim 8, characterized in that: The heat insulation plate assembly includes multiple heat insulation plates, which are spaced apart on the support paddle and are perpendicular to the extension direction of the support paddle.

10. A diffusion furnace, characterized in that: Includes a silicon carbide propeller device as described in any one of claims 1-9.

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