Cleaning auxiliary device for MASK cleaning machine

By designing a clamping and flipping mechanism for the mask cleaning machine's cleaning auxiliary device, the problems of mask clamping damage and low cleaning efficiency have been solved, achieving uniform force distribution and efficient cleaning of the mask.

CN224087409UActive Publication Date: 2026-04-07JIANGSU CORINTHIAN ELECTRONICS CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-04-25
Publication Date
2026-04-07

AI Technical Summary

Technical Problem

Traditional mask cleaning machines are prone to damage when clamping the mask, and have low cleaning efficiency, requiring the mask to be flipped over and cleaned separately on both sides.

Method used

A cleaning auxiliary device was designed, which includes a clamping mechanism, a shock-absorbing mechanism, a flipping mechanism, and a conveyor belt. The clamping mechanism buffers the clamping force, and the flipping mechanism realizes the automatic flipping of the mask and the conveyor belt conveying, ensuring that the mask is evenly stressed and cleaned efficiently.

Benefits of technology

It effectively avoids damage to the photomask, improves cleaning efficiency, and achieves comprehensive cleaning of the photomask.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model relates to the technical field of MASK cleaning machines, and discloses a cleaning auxiliary device for a MASK cleaning machine, which comprises a conveying table, a driving mechanism is fixedly mounted on one side of the outer surface of the conveying table, a conveying belt is sleeved on the surface of the driving mechanism, a support frame A is fixedly mounted on one side of the top surface of the conveying belt, and a support frame B is fixedly mounted on the other side of the top surface of the conveying belt. A supporting frame B is fixedly installed on the other side of the top face of the conveying belt, a turnover mechanism is fixedly installed on one side of the supporting frame A, and an air cylinder A is fixedly arranged on one side of the turnover mechanism. According to the auxiliary cleaning device for the MASK cleaning machine, through the arrangement of the clamping mechanism and the cushioning mechanism, an air cylinder A and an air cylinder B are opened correspondingly, a clamping frame is driven to clamp the two sides of a MASK mask plate, the auxiliary cleaning device is matched with the MASK mask plates of different sizes, and during clamping, cushioning springs and dampers are matched to buffer the clamping force, so that the MASK mask plate can be evenly and slowly stressed, and the clamping effect is improved; and damage and rupture of the MASK mask caused by sudden clamping force are avoided.
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Description

TECHNICAL FIELD

[0001] The utility model relates to MASK cleaning machine technical field especially relates to a kind of cleaning auxiliary device for MASK cleaning machine. BACKGROUND

[0002] Mask is an important component of organic light emitting diode display technology evaporation process, and the cleanliness of Mask will seriously affect product yield, and Mask is a reusable component, so whether it can be cleaned before use is very important.MASK cleaning machine is a cleaning equipment specially used for cleaning Mask.

[0003] The traditional MASK cleaning machine, when clamping the Mask, lacks a buffer device, which can easily cause excessive clamping force on the MASK, resulting in damage or breakage.In addition, during cleaning, one side is usually cleaned first, then removed and flipped to clean the other side, which is low in efficiency.

[0004] Therefore, a cleaning auxiliary device for MASK cleaning machine is proposed. SUMMARY

[0005] (I) Technical problem solved

[0006] The utility model aims at providing a kind of cleaning auxiliary device for MASK cleaning machine, to solve the problem of excessive clamping force on the MASK during clamping, which can cause damage or breakage, and the low efficiency of cleaning one side first, then removing and flipping to clean the other side.

[0007] (II) Technical solution

[0008] To achieve the above purpose, the utility model is realized by the following technical scheme: a kind of cleaning auxiliary device for MASK cleaning machine, including conveying table, the outer surface of the conveying table one side is fixedly installed with drive mechanism, the surface of the drive mechanism is sleeved with conveying belt, the top surface of the conveying belt one side is fixedly installed with A support frame, the top surface of the conveying belt other side is fixedly installed with B support frame, the one side of the A support frame is fixedly installed with turnover mechanism, the one side of the turnover mechanism is fixedly provided with A cylinder, the one side of the B support frame is rotatably provided with B cylinder, the output end of A cylinder and B cylinder is fixedly provided with buffer mechanism, the one side of the buffer mechanism is fixedly provided with clamping frame, the top surface of the clamping frame is fixedly provided with clamping mechanism, the top surface of the conveying table is fixedly installed with MASK cleaning machine main body.

[0009] As a further embodiment of this utility model, the flipping mechanism includes a servo motor A, a gear A, and a gear B. The servo motor A is fixedly installed on one side of the support frame A, the gear A is fixedly installed at the output end of the servo motor A, and the bottom of the gear B meshes with the gear A. Both the gear A and the gear B are rotatably connected to the support frame A. The flipping mechanism is used to flip the mask.

[0010] As a further embodiment of this utility model, the shock-absorbing mechanism includes a shock-absorbing spring and a damper. The shock-absorbing spring is fixedly installed at the output ends of cylinders A and B, and the damper is sleeved inside the shock-absorbing spring. The other ends of the shock-absorbing spring and the damper are fixedly connected to the clamping frame. The shock-absorbing mechanism is used to buffer the clamping force of cylinders A and B.

[0011] As a further embodiment of this utility model, the clamping mechanism includes a hydraulic rod and a clamping plate. The hydraulic rod is fixedly installed on the top surface of the clamping frame, and the clamping plate is fixedly disposed at the output end of the hydraulic rod. The clamping mechanism is used to clamp the MASK mask.

[0012] As a further embodiment of this utility model, the driving mechanism includes a B servo motor and a driving roller. The B servo motor is fixedly installed on one side of the outer surface of the conveyor table, and one end of the driving roller is fixedly connected to the output end of the B servo motor. The B servo motor is used to drive the driving roller to rotate.

[0013] As a further embodiment of this utility model, a driven roller is sleeved on the other side of the inside of the conveyor belt. Both the driving roller and the driven roller are rotatably disposed on the inner side wall of the conveyor table, and the driving roller is used to drive the conveyor belt to rotate.

[0014] As a further embodiment of this utility model, protective pads are fixedly provided on the surfaces of both the clamping plate and the clamping frame. The protective pads are made of silicone and are used to protect the MASK mask.

[0015] (III) Beneficial Effects

[0016] This utility model provides a cleaning auxiliary device for a mask cleaning machine, which has the following beneficial effects:

[0017] 1. The mask cleaning machine uses a cleaning auxiliary device. Through the setting of clamping mechanism and shock absorption mechanism, cylinders A and B are opened respectively, which drive the clamping frame to clamp the two sides of the mask. It is suitable for mask of different sizes. During clamping, the shock absorption spring and damper work together to buffer the clamping force, so that the mask can be subjected to force evenly and slowly, avoiding damage and breakage of the mask due to sudden clamping force.

[0018] 2. This mask cleaning machine uses a cleaning auxiliary device. Through the setting of a flipping mechanism and a conveyor belt, servo motor B drives the drive roller to rotate, which in turn drives the conveyor belt to rotate, transporting the mask into the main body of the mask cleaning machine for cleaning. During cleaning, servo motor A drives gear A to rotate, which in turn drives gear B to rotate, causing the mask to flip accordingly. This facilitates the main body of the mask cleaning machine to clean different sides of the mask, resulting in comprehensive cleaning and high efficiency. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0020] Figure 2 This is a schematic diagram of the conveyor belt structure of this utility model;

[0021] Figure 3 This is a schematic diagram of the clamping mechanism of this utility model;

[0022] Figure 4 This is a schematic diagram of the shock absorption mechanism of this utility model;

[0023] Figure 5 This is a schematic diagram of the conveyor platform structure of this utility model.

[0024] In the diagram: 1. Conveyor table; 2. Drive mechanism; 201. Servo motor B; 202. Drive roller; 3. Conveyor belt; 4. Support frame A; 5. Support frame B; 6. Tilting mechanism; 601. Servo motor A; 602. Gear A; 603. Gear B; 7. Cylinder A; 8. Cylinder B; 9. Shock absorption mechanism; 901. Shock absorption spring; 902. Damper; 10. Clamping frame; 11. Clamping mechanism; 1101. Hydraulic rod; 1102. Clamping plate; 12. Main body of MASK cleaning machine; 13. Protective pad. Detailed Implementation

[0025] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of the present utility model without creative effort are within the scope of protection of the present utility model.

[0026] Please see Figures 1 to 5This utility model provides a technical solution: a cleaning auxiliary device for a mask cleaning machine, including a conveyor table 1, a drive mechanism 2 fixedly installed on one side of the outer surface of the conveyor table 1, a conveyor belt 3 sleeved on the surface of the drive mechanism 2, an A support frame 4 fixedly installed on one side of the top surface of the conveyor belt 3, a B support frame 5 fixedly installed on the other side of the top surface of the conveyor belt 3, and a flipping mechanism 6 fixedly installed on one side of the A support frame 4. Through the setting of the flipping mechanism 6 and the conveyor belt 3, the B servo motor 201 drives the drive roller 202 to rotate, which in turn drives the conveyor belt 3 to rotate, conveying the mask to the main body 12 of the mask cleaning machine for cleaning. During cleaning, the A servo motor 601 drives the A gear 602 to rotate, which in turn drives the B gear 603 to rotate, so that the mask follows and flips, making it convenient for the main body 12 of the mask cleaning machine to clean different sides of the mask, resulting in comprehensive cleaning and high efficiency.

[0027] A cylinder A 7 is fixedly installed on one side of the flipping mechanism 6, and a cylinder B 8 is rotatably installed on one side of the support frame B 5. A damping mechanism 9 is fixedly installed at the output end of both cylinder A 7 and cylinder B 8. A clamping frame 10 is fixedly installed on one side of the damping mechanism 9, and a clamping mechanism 11 is fixedly installed on the top surface of the clamping frame 10. By setting the clamping mechanism 11 and the damping mechanism 9, cylinder A 7 and cylinder B 8 are opened respectively, which drives the clamping frame 10 to clamp the two sides of the mask. It is suitable for mask of different sizes. During clamping, the damping spring 901 and the damper 902 work together to buffer the clamping force, so that the mask can be subjected to force evenly and slowly, avoiding damage and breakage of the mask due to sudden clamping force. A mask cleaning machine body 12 is fixedly installed in the middle of the top surface of the conveyor table 1. Electric doors are provided on both sides of the mask cleaning machine body 12 to facilitate the entry and exit of the mask.

[0028] The flipping mechanism 6 includes an A servo motor 601, an A gear 602, and a B gear 603. The A servo motor 601 is fixedly installed on one side of the A support frame 4. The A gear 602 is fixedly installed at the output end of the A servo motor 601. The bottom of the B gear 603 meshes with the A gear 602. Both the A gear 602 and the B gear 603 are rotatably connected to the A support frame 4.

[0029] The flipping mechanism 6 is designed to flip the mask, making it easier for the main body 12 of the mask cleaning machine to clean different sides of the mask.

[0030] The damping mechanism 9 includes a damping spring 901 and a damper 902. The damping spring 901 is fixedly installed at the output end of cylinder A 7 and cylinder B 8. The damper 902 is sleeved inside the damping spring 901. The other end of both the damping spring 901 and the damper 902 is fixedly connected to the clamping frame 10.

[0031] The shock absorption mechanism 9 is designed to buffer the clamping force.

[0032] The clamping mechanism 11 includes a hydraulic rod 1101 and a clamping plate 1102. The hydraulic rod 1101 is fixedly installed on the top surface of the clamping frame 10, and the clamping plate 1102 is fixedly installed at the output end of the hydraulic rod 1101.

[0033] The clamping mechanism 11 serves to clamp the mask.

[0034] The drive mechanism 2 includes a B servo motor 201 and a drive roller 202. The B servo motor 201 is fixedly installed on one side of the outer surface of the conveyor table 1, and one end of the drive roller 202 is fixedly connected to the output end of the B servo motor 201.

[0035] The drive mechanism 2 is designed to drive the conveyor belt 3 to rotate.

[0036] A driven roller is sleeved on the other side inside the conveyor belt 3. Both the drive roller 202 and the driven roller are rotatably mounted on the inner wall of the conveyor table 1.

[0037] The driven roller is designed to follow the rotation of the conveyor belt 3.

[0038] Protective pads 13 are fixedly provided on the surfaces of both the clamping plate 1102 and the clamping frame 10. The protective pads 13 are made of silicone.

[0039] The protective pad 13 serves to protect the mask.

[0040] In this invention, the working steps of the device are as follows:

[0041] First step: Open cylinders A 7 and B 8 respectively, which will drive the clamping frame 10 to clamp the two sides of the mask. It is suitable for mask of different sizes. During clamping, the shock-absorbing spring 901 and the damper 902 work together to buffer the clamping force, so that the mask can be subjected to force evenly and slowly, avoiding sudden clamping force that could damage or break the mask.

[0042] The second step: The B servo motor 201 drives the drive roller 202 to rotate, which in turn drives the conveyor belt 3 to rotate, transporting the MASK mask into the MASK cleaning machine body 12 for cleaning.

[0043] The third step: During cleaning, servo motor A 601 drives gear A 602 to rotate, which in turn drives gear B 603 to rotate, causing the mask to rotate accordingly. This allows the main body 12 of the mask cleaning machine to clean different surfaces of the mask, resulting in thorough cleaning and high efficiency.

[0044] It should be noted that the device structure and accompanying drawings of this utility model mainly describe the principle of this utility model. In terms of the technical aspects of this design principle, the setting of the power mechanism, power supply system and control system of the device is not fully described. However, under the premise that those skilled in the art understand the principle of the above utility model, the specific structure of its power mechanism, power supply system and control system can be clearly understood. The control method in the application document is automatic control through a controller. The control circuit of the controller can be implemented by those skilled in the art through simple programming.

[0045] All standard parts used can be purchased from the market, and can be customized according to the instructions and drawings. The specific connection methods of each part adopt conventional methods such as bolts, rivets, and welding that are mature in the existing technology. The machinery, parts and equipment adopt conventional models in the existing technology, and the structure and principle of the components known to those skilled in the art can be known by those skilled in the art through technical manuals or conventional experimental methods.

[0046] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A cleaning auxiliary device for a mask cleaning machine, comprising a conveyor table (1), characterized in that: A drive mechanism (2) is fixedly installed on one side of the outer surface of the conveyor platform (1). A conveyor belt (3) is sleeved on the surface of the drive mechanism (2). An A support frame (4) is fixedly installed on one side of the top surface of the conveyor belt (3). A B support frame (5) is fixedly installed on the other side of the top surface of the conveyor belt (3). A flipping mechanism (6) is fixedly installed on one side of the A support frame (4). An A cylinder (7) is fixedly installed on one side of the flipping mechanism (6). A B cylinder (8) is rotatably installed on one side of the B support frame (5). A shock-absorbing mechanism (9) is fixedly installed at the output end of both the A cylinder (7) and the B cylinder (8). A clamping frame (10) is fixedly installed on one side of the shock-absorbing mechanism (9). A clamping mechanism (11) is fixedly installed on the top surface of the clamping frame (10). A MASK cleaning machine body (12) is fixedly installed in the middle of the top surface of the conveyor platform (1).

2. The cleaning auxiliary device for a mask cleaning machine according to claim 1, characterized in that: The flipping mechanism (6) includes an A servo motor (601), an A gear (602), and a B gear (603). The A servo motor (601) is fixedly installed on one side of the A support frame (4). The A gear (602) is fixedly installed at the output end of the A servo motor (601). The bottom of the B gear (603) meshes with the A gear (602). Both the A gear (602) and the B gear (603) are rotatably connected to the A support frame (4).

3. The cleaning auxiliary device for a mask cleaning machine according to claim 1, characterized in that: The damping mechanism (9) includes a damping spring (901) and a damper (902). The damping spring (901) is fixedly installed at the output end of cylinder A (7) and cylinder B (8). The damper (902) is sleeved inside the damping spring (901). The other end of the damping spring (901) and the damper (902) are fixedly connected to the clamping frame (10).

4. The cleaning auxiliary device for a mask cleaning machine according to claim 1, characterized in that: The clamping mechanism (11) includes a hydraulic rod (1101) and a clamping plate (1102). The hydraulic rod (1101) is fixedly installed on the top surface of the clamping frame (10), and the clamping plate (1102) is fixedly installed at the output end of the hydraulic rod (1101).

5. The cleaning auxiliary device for a mask cleaning machine according to claim 1, characterized in that: The drive mechanism (2) includes a B servo motor (201) and a drive roller (202). The B servo motor (201) is fixedly installed on one side of the outer surface of the conveyor table (1), and one end of the drive roller (202) is fixedly connected to the output end of the B servo motor (201).

6. The cleaning auxiliary device for a mask cleaning machine according to claim 5, characterized in that: A driven roller is sleeved on the other side inside the conveyor belt (3), and both the drive roller (202) and the driven roller are rotatably mounted on the inner wall of the conveyor table (1).

7. The cleaning auxiliary device for a mask cleaning machine according to claim 4, characterized in that: The surfaces of the clamping plate (1102) and the clamping frame (10) are both fixedly provided with protective pads (13), and the protective pads (13) are made of silicone.