Reaction furnace with gravity tensioning roller for CVD (Chemical Vapor Deposition) method
By employing a belt conveyor and gravity tension roller design in the CVD process, the problem of discontinuous carbon nanotube growth substrate was solved, enabling continuous production and efficient discharge of carbon nanotubes. This simplified the equipment structure, reduced energy consumption, and improved production safety.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-02-24
- Publication Date
- 2026-04-07
AI Technical Summary
In existing CVD methods, the growth substrate of carbon nanotubes is discontinuous, resulting in low production capacity. Traditional tensioning devices have complex structures and poor sealing, making it difficult to achieve unmanned, automated, continuous production.
The system employs a belt conveyor, including a drive roller, a driven roller, and a gravity tension roller. It utilizes a stainless steel belt as a base to achieve continuous production and tensions the belt using the gravity tension roller, simplifying the structure and ensuring sealing.
It enables continuous production of carbon nanotubes, reduces energy consumption, simplifies equipment structure, improves production efficiency and sealing, and ensures safe and reliable operation.
Smart Images

Figure CN224091996U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the technical field of production equipment for chemical vapor deposition (CVD), specifically a reaction furnace with gravity tension rollers in the CVD process. Background Technology
[0002] In existing chemical vapor deposition methods, the substrates used to generate deposits are discontinuous in horizontal reactors. For example, carbon nanotubes generated in horizontal reactors in CVD are deposited in containers made of substrate materials such as quartz boats or stainless steel boxes. These containers are arranged one by one in the horizontal furnace and are not interconnected, making it particularly difficult to remove the carbon nanotubes attached to the inner wall of the container.
[0003] Currently, the addition of catalysts and the discharge of carbon nanotubes both require cooling to room temperature before manual operation. This not only increases energy consumption significantly, but also makes it difficult to achieve unmanned automated continuous production under such high-temperature conditions, thus greatly limiting production capacity.
[0004] Carbon nanotubes and carbon nanotube fibers, as emerging cutting-edge materials, have attracted widespread attention and research from the scientific and industrial communities due to their unique physical and chemical properties and broad application potential. Currently, there are three methods worldwide for preparing carbon nanotube fibers using carbon nanotubes: wet spinning, carbon nanotube array spinning, and floating catalytic spinning. Among these, carbon nanotube array spinning produces the highest purity carbon nanotube fibers, but due to the discontinuous and small area of its substrate container, continuous production is not possible, resulting in low production capacity and particularly high prices. In other words, the current technological bottleneck is that the area of the carbon nanotube growth substrate provided by the traditional structure is limited and the operation is intermittent.
[0005] Traditional tensioning devices achieve tension by adjusting the shaft in the passive roller. However, the movement of the shaft in the passive roller can cause sealing problems inside and outside the reactor, which are particularly difficult to handle. Moreover, traditional tensioning devices have complex structures and high manufacturing costs.
[0006] In conclusion, it is urgent to find a solution that can provide an unrestricted growth substrate area for carbon nanotubes and enable continuous production. Utility Model Content
[0007] In view of the problems existing in the prior art, the purpose of this utility model is to provide a reaction furnace with gravity tension rollers in the CVD process to solve the problems mentioned in the background art.
[0008] To achieve the above objectives, this utility model provides the following technical solution: The horizontal reactor 1 used for continuous production via chemical vapor deposition includes a belt conveyor 2 and a furnace body 3. The belt conveyor 2 installed in the furnace body 3 includes a belt 2A and rollers 4. The belt 2A is the substrate for the CVD-prepared deposits. The belt 2A is surrounded by rollers 4. Rollers 4 include an active roller 41, a passive roller 42, and a gravity tensioning roller 43. The furnace body 3 includes an initial section 5, a reaction section 7, and a discharge section 8. The chemical reaction products grow on the belt 2A in the reaction section 7 and are discharged in the discharge section 8. The active roller 41 and the passive roller 42 are respectively installed in the discharge section 8 and the initial section 5. The gravity tensioning roller 43 rides on the belt 2A to tension the belt 2A.
[0009] As a further embodiment of this utility model: the reactor 1 includes a reactor for preparing carbon nanotubes; the belt 2A includes a stainless steel belt, which is composed of an upper belt 2A1 and a lower belt 2A2.
[0010] As a further embodiment of this utility model: the active roller 41 is installed on the discharge section 8, which is fixed relative to the ground, and the passive roller 42 is installed on the initial section 5, which is slidable relative to the ground.
[0011] As a further embodiment of this utility model: the gravity tensioning roller 43 sits on top of the lower belt 2A2 in the initial section 5.
[0012] In summary, compared with the prior art, this utility model provides a solution for continuous production due to its unique structure using a belt as a substrate. The specific advantages are as follows: 1) Since the belt in the conveyor runs continuously, the substrate area in the CVD method is not limited; 2) Because the conveyor belt is planar, the discharge and cleaning of carbon nanotubes are particularly easy; 3) Low energy consumption; 4) The tensioning device has a simple structure, good sealing performance, and safe and reliable operation. Attached Figure Description
[0013] Figure 1 It is a structural schematic diagram of the belt conveyor 2 and the furnace body 3 that make up the horizontal reactor 1; it is also a structural schematic diagram of the belt 2A and roller 4 that make up the belt conveyor 2; it is also a structural schematic diagram of the active roller 41, passive roller 42 and gravity tension roller 43 that make up the roller 4; it is also a structural schematic diagram of the initial section 5, reaction section 7 and discharge section 8 that make up the furnace body 3; and it is also a structural schematic diagram of the upper belt 2A1 and lower belt 2A2 that make up the belt 2A.
[0014] Figure 2 yes Figure 1 AA section view;
[0015] Figure 3 yes Figure 1 BB section view;
[0016] Figure 4 This is a schematic diagram of a structure in which the active roller 41 is installed on the discharge section 8, which is fixed relative to the ground, and the passive roller 42 is installed on the initial section 5, which slides relative to the ground; it is also a schematic diagram of a structure in which the gravity tension roller 43 rides on top of the lower belt 2A2 in the initial section 5.
[0017] Figure 5 This is a schematic diagram of a structure in which the active roller 41 is installed on the discharge section 8, which slides relative to the ground, and the passive roller 42 is installed on the initial section 5, which is stationary relative to the ground.
[0018] Figure 6 This is a schematic diagram of the structure of the integral furnace body 3.
[0019] 1. Reactor; 2. Belt conveyor; 2A belt; 2A1 upper belt; 2A2 lower belt; 3. Furnace body; 4. Roller; 41 active roller; 42 passive roller; 43 gravity tension roller; 5. Initial section; 7. Reaction section; 8. Discharge section. Detailed Implementation
[0020] The technical solutions of the present utility model will be described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of the present utility model without creative effort are within the protection scope of the present utility model.
[0021] Please see Figures 1-6 In this embodiment of the present invention, the horizontal reactor 1 used for continuous production by chemical vapor deposition includes a belt conveyor 2 and a furnace body 3. The belt conveyor 2 installed in the furnace body 3 includes a belt 2A and rollers 4. The belt 2A is the substrate for the deposits prepared by the CVD method. The belt 2A is surrounded by rollers 4. The rollers 4 include an active roller 41, a passive roller 42, and a gravity tensioning roller 43. The furnace body 3 includes an initial section 5, a reaction section 7, and a discharge section 8. The chemical reaction products grow on the belt 2A in the reaction section 7 and are discharged in the discharge section 8. The active roller 41 and the passive roller 42 are respectively installed in the discharge section 8 and the initial section 5. The gravity tensioning roller 43 rides on the belt 2A to tension the belt 2A.
[0022] It should be noted that the passive roller 42 and the active roller 41 can also be installed in the discharge section 8 and the initial section 5, respectively.
[0023] The reactor 1 includes a reactor for preparing carbon nanotubes; the belt 2A includes a stainless steel belt, which is composed of an upper belt 2A1 and a lower belt 2A2.
[0024] The active roller 41 is installed on the discharge section 8, which is fixed relative to the ground, and the passive roller 42 is installed on the initial section 5, which is slidable relative to the ground.
[0025] The gravity tensioning roller 43 sits on top of the lower belt 2A2 in the initial section 5.
[0026] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "front," and "rear," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. In this utility model, it should also be noted that the terms "installation" and "connection" should be interpreted broadly. For example, they can refer to fixed connection, detachable connection, integral molding connection, mechanical connection, or indirect connection through an intermediate medium. The specific meaning of the terms in this utility model can be understood according to the specific circumstances.
[0027] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.
Claims
1. A reactor with gravity tension rollers for use in CVD processes, characterized in that: The horizontal reactor (1) for continuous production using chemical vapor deposition includes a belt conveyor (2) and a furnace body (3). The belt conveyor (2) installed in the furnace body (3) includes a belt (2A) and rollers (4). The belt (2A) is the substrate for the CVD-prepared deposits. The belt (2A) is wrapped with rollers (4). The rollers (4) include an active roller (41), a passive roller (42), and a gravity tensioning roller (43). The furnace body (3) includes an initial section (5), a reaction section (7), and a discharge section (8). The chemical reaction products grow on the belt (2A) in the reaction section (7) and are discharged in the discharge section (8). The active roller (41) and the passive roller (42) are installed in the discharge section (8) and the initial section (5), respectively. The gravity tensioning roller (43) rides on the belt (2A) to tension the belt (2A).
2. A reaction furnace with gravity tension rollers in a CVD process according to claim 1, characterized in that... The reactor (1) includes a reactor for preparing carbon nanotubes; the belt (2A) includes a stainless steel belt, which consists of an upper belt (2A1) and a lower belt (2A2).
3. A reaction furnace with gravity tension rollers in a CVD process according to claim 2, characterized in that... The active roller (41) is installed on the discharge section (8) which is fixed relative to the ground, and the passive roller (42) is installed on the initial section (5) which is slidable relative to the ground.
4. A reaction furnace with gravity tension rollers in a CVD process according to claim 3, characterized in that: The gravity tension roller (43) rides on top of the lower belt (2A2) in the initial section (5).