Heat preservation floor for high-precision area of clean workshop

Abstract

The utility model discloses a heat preservation floor for a high-precision area of a clean workshop. The mode that a high-precision area raised floor is combined with a high-precision area heat preservation building floor is adopted. The raised floor is an anti-static aluminum alloy movable floor, the clean room raised floor generally comprises a plurality of supporting mechanisms, a plurality of cross beams and a plurality of plates, the supporting mechanisms are fixedly installed on the ground, the cross beams are installed at the ends, away from the bottom face, of the supporting mechanisms through fasteners, and the plates are installed on the sides, away from the supporting mechanisms, of the cross beams. The edge of the side, facing the cross beam, of the plate abuts against the side, facing the plate, of the cross beam. The thermal insulation floor comprises the following components: a PVC block material; a rubber and plastic thermal insulation material; one layer of epoxy thin rubber material; d6-150 bidirectional steel bars are arranged in the C30 fine aggregate concrete and are leveled while being beaten, and the surface is ground flat after the strength reaches the standard. The thermal insulation materials are sequentially arranged from top to bottom as follows: a PVC block material; a rubber and plastic thermal insulation material; one layer of epoxy thin rubber material; and D6-150 bidirectional steel bars are arranged in the C30 fine aggregate concrete with the thickness of 50.

Description

TECHNICAL FIELD

[0001] The utility model discloses a clean plant high-precision area heat preservation ground belongs to clean plant building field, and specifically relates to a clean plant high-precision area heat preservation ground. BACKGROUND

[0002] With the development of science and technology and the change of industrial products, clean technology at home and abroad is developing continuously. The production of microelectronic products represented by integrated circuit chip manufacturing has proposed strict clean environment and large area, large volume and high input requirements, and the line width of integrated circuits has developed from microns to nanometers. In large electronic semiconductor production plants, to ensure the normal operation of process equipment in the clean production area, stable temperature and humidity control is one of the necessary conditions.

[0003] For large space and temperature control precision requirements, the clean area ground can adopt epoxy floor, PVC floor, cement self-leveling, etc. However, for some high-precision process areas with high temperature control precision requirements (within ±0.02℃), the ground loses heat, which easily causes unstable temperature parameter control and large up-down fluctuation deviation. It has been proved that the temperature control effect of ordinary clean floor is poor.

[0004] The raised floor is also the most commonly used type in clean rooms, which has the function of preventing static electricity in addition to the conventional hardness. At the same time, it has good fireproof and moisture-proof performance, which can improve the service life of space use. Moreover, it has strong decontamination ability, which facilitates cleaning the ground. However, the single raised floor is still difficult to meet the temperature control requirements in the high-precision area with high temperature control requirements. CONTENT OF THE UTILITY MODEL

[0005] Therefore, in order to solve the above problems, the utility model provides a clean plant high-precision area heat preservation ground, which combines the high-precision area raised floor with the high-precision area heat preservation floor to solve the problem of large temperature control precision deviation in the process production area of the prior art.

[0006] The utility model is implemented in the following manner, a clean plant high-precision area heat preservation ground is constructed, which is characterized in that the high-precision area raised floor is combined with the high-precision area heat preservation floor (first, epoxy thin glue + 50 thick rubber heat preservation belt non-combustible aluminum foil are arranged on the structural floor, and then the raised floor is arranged to realize the combination);

[0007] The raised floor is an anti-static aluminum alloy movable floor, and the clean room raised floor usually includes a plurality of support mechanisms, a plurality of crossbeams and a plurality of plate blocks. The support mechanisms are fixedly installed on the ground, the crossbeams are installed at one end of the support mechanisms away from the bottom surface through fasteners, and the plate blocks are installed on the side of the crossbeams away from the support mechanisms, and the edge of the plate blocks on the side facing the crossbeams abuts against the side of the crossbeams facing the plate blocks.

[0008] The insulated flooring consists of the following: PVC blocks; rubber and plastic insulation material; one layer of epoxy resin; and C30 fine aggregate concrete reinforced with D6mm @150mm bidirectional steel bars, which are poured and smoothed as they are poured, and the surface is ground smooth after the strength meets the standard.

[0009] The insulation materials are arranged from top to bottom as follows: PVC blocks; rubber and plastic insulation material; one layer of epoxy resin; 50mm thick C30 fine aggregate concrete reinforced with D6mm@150mm bidirectional steel bars. The insulation material is laid on the reinforced concrete floor slab.

[0010] Furthermore, the support mechanism includes a base plate, which is fixedly mounted on a plane by fasteners so that several support mechanisms are arranged in an array at equal intervals. An adjustable support rod is provided on the side of the base plate away from the plane, and a support top plate is provided at the end of the adjustable support rod away from the base plate.

[0011] Furthermore, all crossbeams are located at the top support plate, and adjacent support mechanisms are connected by crossbeams.

[0012] Furthermore, each panel is installed on the side of the crossbeam away from the support structure, and the edges of the panels overlap the crossbeam.

[0013] Furthermore; the ventilation rate of the raised floor is 17% or 30%;

[0014] The center point load of the raised floor is 3000 kgf / 6.45 cm. 2 ≤2 mm;

[0015] The raised floor measures 600mm x 600mm.

[0016] RH=800 or 2530 mm.

[0017] Furthermore; the PVC block thickness is 2 mm;

[0018] The rubber and plastic insulation material is 50 mm thick.

[0019] The present invention has the following advantages: This application provides a method for the insulation floor of the high precision area of ​​a cleanroom, which is achieved by combining the high precision area raised floor with the high precision area insulation floor. Its advantages are (1) It effectively prevents the indoor temperature from being lost from the ground, and can meet the temperature control requirements of the high precision process area (within ±0.02℃) in conjunction with the HVAC profession; (2) The temperature loss in the cleanroom is small, avoiding the waste of heat resources and making it more energy-efficient. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of the raised floor implementation in this application;

[0021] Figure 2 This is a schematic diagram of the implementation of the thermal insulation floor in this application;

[0022] Figure 3 This is a schematic diagram of the base assembly;

[0023] Figure 4 This is a schematic diagram of the base plate;

[0024] Figure 5 This is a schematic diagram of a metal gasket;

[0025] Figure 6 This is a schematic diagram of an octagonal top panel. Detailed Implementation

[0026] The following will be combined with the appendix Figures 1-6 This utility model will be described in detail, and the technical solutions in the embodiments of this utility model will be clearly and completely described. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of this utility model.

[0027] This utility model provides a high-precision insulation floor for a cleanroom, such as... Figures 1-2 As shown; the specific implementation is as follows: a combination of raised floor in the high-precision zone and insulated floor in the high-precision zone is adopted.

[0028] like Figure 1 As shown, the construction method for raised floors is as follows:

[0029] The raised floor is an anti-static aluminum alloy raised floor, consisting of 2mm thick PVC rolls or tiles, an aluminum alloy base layer, and a raised floor support system. The base material is Grade A, and the surface veneer is Grade B1.

[0030] Specifically, a cleanroom raised floor typically consists of several support structures, several beams, and several panels. The support structures are fixedly installed on the ground, the beams are fastened to the end of the support structure away from the bottom surface, and the panels are installed on the side of the beam away from the support structure. The edge of the panel facing the beam abuts against the side of the beam facing the panel.

[0031] Several supporting mechanisms 1-2, such as Figures 3-6 As shown; the support mechanism includes a base plate, which is fixedly installed on a plane by fasteners so that several support mechanisms are arranged in an array at equal intervals. An adjustable support rod is provided on the side of the base plate away from the plane, and a support top plate is provided at the end of the adjustable support rod away from the base plate.

[0032] Several crossbeams 1-3 are provided at the top support plate, and adjacent support mechanisms are connected by crossbeams.

[0033] Several panels 1-1 are installed on the side of the crossbeam away from the support structure, and the edges of the panels overlap the crossbeam.

[0034] A buffer structure is installed between the supporting top plate and the crossbeam to separate the crossbeam from the supporting top plate.

[0035] Preferably, the ventilation rate of the raised floor is 17% or 30%;

[0036] Preferably, the center point load of the raised floor is 3000 kgf / 6.45 cm. 2 ≤2 mm;

[0037] Preferably, the raised floor dimensions are 600mm*600mm;

[0038] Preferably, RH = 800 or 2530 mm;

[0039] Please refer to the attached document for information on raised floors. Figure 1 .

[0040] like Figure 2 As shown, the insulated floor includes the following: PVC blocks 2-1; rubber and plastic insulation material 2-2; one layer of epoxy resin 2-3; C30 fine stone concrete reinforced with D6mm@150mm bidirectional steel bars 2-4, which are poured and smoothed as they are poured, and the surface is ground smooth after the strength meets the standard.

[0041] Preferably, the positional relationship of the insulation materials from top to bottom is as follows: PVC block 2-1; rubber and plastic insulation material 2-2; epoxy resin 2-3; 50mm thick C30 fine aggregate concrete reinforced with D6mm@150mm bidirectional steel bars 2-4. The insulation materials are laid on the reinforced concrete floor slab.

[0042] Preferably, the PVC block thickness is 2 mm;

[0043] Preferably, the rubber and plastic insulation thickness is 50 mm;

[0044] Preferably, the C30 fine aggregate concrete is reinforced with D6mm@150 bidirectional steel bars with a thickness of 50 mm.

[0045] Please refer to the attached document for insulation materials. Figure 2 .

[0046] The above description of the disclosed embodiments enables those skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A type of thermal insulation floor for high-precision areas in cleanrooms, characterized in that; A combination of raised floor in the high-precision zone and insulated floor in the high-precision zone is adopted; The raised floor is an anti-static aluminum alloy raised floor. The cleanroom raised floor includes several support mechanisms (1-2), several crossbeams (1-3), and several panels (1-1). The support mechanisms (1-2) are fixedly installed on the ground. The crossbeams (1-3) are installed on the end of the support mechanism (1-2) away from the bottom surface by fasteners. The panels (1-1) are installed on the side of the crossbeams (1-3) away from the support mechanism. The edge of the panel (1-1) facing the crossbeam (1-3) abuts against the side of the crossbeam facing the panel. The insulated floor consists of the following: PVC blocks (2-1); rubber and plastic insulation material (2-2); one layer of epoxy resin (2-3); and C30 fine aggregate concrete reinforced with D6mm@150mm bidirectional steel bars (2-4), which is poured and smoothed as it is poured, and the surface is ground smooth after the strength meets the standard. The positional relationship of each insulation material from top to bottom is as follows: PVC blocks (2-1); rubber and plastic insulation material (2-2); one layer of epoxy resin (2-3); 50mm thick C30 fine aggregate concrete reinforced with D6mm@150mm bidirectional steel bars (2-4); and insulation material (2-2) laid on the reinforced concrete floor slab.

2. The heat-insulating floor for high-precision areas of a cleanroom according to claim 1, characterized in that; The support mechanism (1-2) includes a base plate, which is fixedly installed on a plane by fasteners so that a number of support mechanisms (1-2) are arranged in an array at equal intervals. An adjustable support rod is provided on the side of the base plate away from the plane, and a support top plate is provided on the end of the adjustable support rod away from the base plate.

3. The thermal insulation floor for high-precision areas of a cleanroom according to claim 1, characterized in that; The crossbeams (1-3) are all located at the top support plate, and adjacent support mechanisms are connected by the crossbeams.

4. The heat-insulating floor for high-precision areas of a cleanroom according to claim 1, characterized in that; Each panel (1-1) is installed on the side of the crossbeam away from the support mechanism, and the edges of the panels overlap the crossbeam.

5. The thermal insulation floor for high-precision areas of a cleanroom according to claim 1, characterized in that... ； The ventilation rate of the raised floor is 17% or 30%; The center point load of the raised floor is 3000 kgf / 6.45 cm. 2 ≤2 mm; The raised floor measures 600mm x 600mm. RH=800 or 2530mm.

6. The thermal insulation floor for high-precision areas of a cleanroom according to claim 1, characterized in that... ； The PVC block (2-1) is 2mm thick; The thickness of the rubber and plastic insulation material (2-2) is 50mm.

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