PVD (Physical Vapor Deposition) carrier plate cleaning device

Abstract

The utility model relates to the technical field of photovoltaic panel production equipment, in particular to a PVD (Physical Vapor Deposition) carrier plate cleaning device. The PVD carrier plate cleaning device comprises a conveying mechanism, a machine frame and a suction module, the suction module comprises a dust suction box and a driving mechanism, a dust suction opening of the dust suction box faces the conveying mechanism, and the driving mechanism is arranged on the machine frame and connected with the dust suction box. The driving mechanism is used for driving the dust collection box to reciprocate in the direction perpendicular to the conveying direction of the conveying mechanism. During use, the driving mechanism can drive the dust collection box to reciprocate in the direction perpendicular to the conveying direction of the conveying mechanism, so that a dust collection opening of the dust collection box can cover the whole area of the PVD carrier plate, comprehensive cleaning of the surface of the carrier plate is achieved, and the surface of a silicon wafer is not prone to being contaminated by dust; according to the design, the technical limitation that the cleaning range of a traditional fixed dust collection device is limited is broken through, and the coverage range and the cleaning efficiency of the PVD carrier plate cleaning device are remarkably improved.

Description

Technical Field

[0001] This utility model relates to the technical field of photovoltaic panel production equipment, and in particular to a PVD carrier cleaning device. Background Technology

[0002] PVD (Physical Vapor Deposition) substrates play a crucial role in semiconductor manufacturing processes, primarily functioning to precisely transport silicon wafers within the processing area for various machining operations. In on-line production processes, the interaction between the silicon wafer and the PVD substrate can lead to scratching and vibration phenomena. These actions not only affect the stability of the silicon wafer but also impact the production of silicon powder, coating particles, and other components.

[0003] Dust and particles generated by scratching and shaking gradually accumulate on the surface of silicon wafers. This accumulation not only reduces the appearance quality of the silicon wafers but may also cause scratches on the surface, adversely affecting the electrical properties of the wafers. In severe cases, it can lead to the scrapping of the wafers, resulting in increased production costs and reduced production efficiency.

[0004] To address this issue, the carrier board and silicon wafers need to be cleaned regularly during the manufacturing process to remove accumulated particles and dust. Existing PVD carrier board cleaning devices can only vacuum fixed areas, resulting in some areas not being able to absorb dust, and the vacuuming is not thorough enough, leaving a small amount of dust and particles still on the surface of the silicon wafer. Utility Model Content

[0005] The purpose of this invention is to provide a PVD carrier cleaning device to reduce dust on the carrier.

[0006] To solve the above-mentioned technical problems, this utility model provides a PVD carrier plate cleaning device.

[0007] The PVD carrier cleaning device of this utility model includes:

[0008] Conveying mechanism;

[0009] A frame spans across the top of the conveying mechanism;

[0010] The suction module includes a dust collection box and a drive mechanism. The dust collection box has a suction port facing the conveying mechanism. The drive mechanism is mounted on the frame and connected to the dust collection box. The drive mechanism is used to drive the dust collection box to reciprocate in a direction perpendicular to the conveying direction of the conveying mechanism.

[0011] Furthermore, the frame is provided with a guide elongated hole that penetrates the frame and extends along the reciprocating movement direction of the dust collection box. The suction module also includes a suction rigid tube that penetrates the guide elongated hole. The suction rigid tube is fixedly connected to the dust collection box, and the drive mechanism drives the dust collection box to reciprocate through the suction rigid tube.

[0012] Furthermore, the frame includes a support platform and support legs, the support legs are respectively located on both sides of the conveying mechanism, and the two ends of the support platform are respectively fixedly connected to the support legs so that the support platform is located above the conveying mechanism, and the guide elongated hole is provided on the support platform.

[0013] Furthermore, the suction module also includes a vacuum cleaner and a suction hose, one end of which is connected to the vacuum cleaner and the other end of which is connected to the suction tube.

[0014] Furthermore, the driving mechanism is a crank-slider mechanism.

[0015] Furthermore, the drive mechanism includes a motor, an output shaft, a rotating component, and a connecting rod. The motor drives the rotating component to rotate through the output shaft. One end of the connecting rod is connected to the rotating component, and the other end is connected to the dust collection box through a bearing.

[0016] Furthermore, the rotating component is an eccentric wheel.

[0017] Furthermore, the drive mechanism also includes a reducer assembly, through which the motor drives the rotating component to rotate.

[0018] Furthermore, the reducer assembly includes a drive gear and a follower gear, the diameter of which is larger than that of the drive gear. The motor drives the follower gear to rotate via the drive gear, and the follower gear drives the rotating component to rotate.

[0019] Furthermore, the frame is provided with a receiving cavity, and the rotating member and the connecting rod are located in the receiving cavity.

[0020] Compared with the prior art, the present invention has at least the following beneficial effects:

[0021] In use, the drive mechanism can drive the dust collection box to reciprocate in a direction perpendicular to the conveying direction of the conveying mechanism, so that the dust collection port of the dust collection box can cover the entire area of ​​the PVD carrier, achieving comprehensive cleaning of the carrier surface. The silicon wafer surface is not easily contaminated with dust. This design of the present application breaks through the technical limitation of the limited cleaning range of traditional fixed dust collection devices, and significantly improves the coverage and cleaning efficiency of the PVD carrier cleaning device. Attached Figure Description

[0022] Figure 1 This is a schematic diagram of the PVD carrier plate cleaning device in one embodiment of the present invention;

[0023] Figure 2 For the present utility model Figure 1 A schematic diagram of the PVD carrier cleaning device after partial cross-section;

[0024] Figure 3 for Figure 2 A magnified view of point A in the image.

[0025] Figure label:

[0026] 1. Conveying mechanism; 2. Frame; 3. PVD carrier plate; 4. Dust collection box; 5. Dust collection nozzle; 6. Guide elongated hole; 7. Suction tube; 8. Limiting slider; 9. Vacuum cleaner; 10. Suction hose; 11. Motor; 12. Rotating component; 13. Connecting rod; 14. Bearing; 15. Drive gear; 16. Follower gear; 17. Reducer housing. Detailed Implementation

[0027] The PVD carrier cleaning device of this utility model will now be described with reference to the schematic diagrams, which illustrate preferred embodiments of this utility model. It should be understood that those skilled in the art can modify the utility model described herein while still achieving its advantageous effects. Therefore, the following description should be understood as being of general knowledge to those skilled in the art and is not intended to limit the utility model.

[0028] The serial numbers assigned to components in this document, such as "first," "second," etc., are merely for distinguishing the described objects and have no sequential or technical meaning. The terms "connection" and "linkage" used in this application, unless otherwise specified, include both direct and indirect connections (linkages). In the description of this utility model, it should be understood that the terms "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," and "counterclockwise," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used solely for the convenience of describing this utility model and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0029] In this utility model, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0030] In this application, unless otherwise expressly specified and limited, the term "connection" should be interpreted broadly. For example, "connection" can be a fixed connection, a detachable connection, or an integral part; it can be a direct connection or an indirect connection through an intermediate medium. Furthermore, the term "electrical connection" can be a direct electrical connection or an indirect electrical connection through an intermediate medium.

[0031] The present invention will be described more specifically by way of example in the following paragraphs with reference to the accompanying drawings. The advantages and features of the present invention will become clearer from the following description and claims. It should be noted that the drawings are in a very simplified form and use non-precise proportions, and are only used to facilitate and clarify the illustration of the embodiments of the present invention.

[0032] The following is in conjunction with the instruction manual appendix. Figure 1 To be continued Figure 3 This paper introduces the PVD carrier cleaning device of this utility model.

[0033] In one embodiment, such as Figure 1 and Figure 2 As shown, the PVD carrier plate 3 cleaning device includes a conveying mechanism 1, a frame 2, and a suction module.

[0034] The conveying mechanism 1 is used to convey materials. Specifically, a PVD carrier plate 3 can be placed on the conveying mechanism 1, and silicon wafers can be placed on the PVD carrier plate 3. The conveying mechanism 1 moves the PVD carrier plate 3 and the silicon wafers on it to below the suction module, where the suction module removes the dust from the PVD carrier plate 3. In this embodiment, the conveying mechanism 1 is a belt conveyor or a roller conveyor.

[0035] The frame 2 spans above the conveying mechanism 1. The suction module includes a dust collection box 4 and a drive mechanism. The dust collection box 4 is provided with multiple suction nozzles 5 for dust collection. The suction port of the dust collection box 4 faces the conveying mechanism 1. The drive mechanism is mounted on the frame 2 and connected to the dust collection box 4. The drive mechanism is used to drive the dust collection box 4 to reciprocate in a direction perpendicular to the conveying direction of the conveying mechanism 1.

[0036] In use, the drive mechanism can drive the dust collection box 4 to reciprocate in a direction perpendicular to the conveying direction of the conveying mechanism 1, so that the dust collection port of the dust collection box 4 can cover the entire area of ​​the PVD carrier 3, achieving comprehensive cleaning of the carrier surface. The silicon wafer surface is not easily contaminated with dust. This design of the present application breaks through the technical limitation of the limited cleaning range of traditional fixed dust collection devices, and significantly improves the coverage and cleaning efficiency of the PVD carrier 3 cleaning device.

[0037] In one embodiment, in order to precisely guide and stably control the movement of the dust collection box 4, the frame 2 is provided with a guide elongated hole 6 that penetrates the frame 2 and extends along the reciprocating movement direction of the dust collection box 4. The suction module also includes a suction rigid tube 7 that penetrates the guide elongated hole 6. The suction rigid tube 7 is fitted with two limiting sliders 8, which constrain the suction rigid tube 7 in the guide elongated hole 6 to prevent the suction rigid tube 7 from detaching from the guide elongated hole 6. The suction rigid tube 7 is fixedly connected to the dust collection box 4, and the drive mechanism drives the dust collection box 4 to reciprocate through the suction rigid tube 7.

[0038] The guide elongated hole 6 is a rectangular elongated hole. The suction rigid tube 7 can be made of different materials, such as stainless steel, aluminum alloy, or composite materials, to meet different requirements for mechanical strength and corrosion resistance. In terms of connection method, the suction rigid tube 7 can be fixed to the dust collection box 4 by bolts, welding, or clips to ensure stability during movement.

[0039] The drive mechanism moves the dust collection box 4 through the suction tube 7, so that the suction port can evenly sweep across the surface of the PVD carrier plate 3, which significantly improves the suction accuracy and coverage. This design not only reduces cleaning dead corners, but also simplifies the mechanism transmission method and improves the reliability of the device.

[0040] In one embodiment, in order to stably fix the suction module, the frame 2 includes a support platform and two support legs, the two support legs being located on both sides of the conveying mechanism 1 respectively, and the two ends of the support platform being fixedly connected to the two support legs so that the support platform is located above the conveying mechanism 1, and the guide elongated hole 6 is provided on the support platform.

[0041] Specifically, the support legs can be made of high-strength aluminum alloy and are securely connected to the support platform via bolts to improve the structural strength and vibration resistance of the frame 2. In practice, the length of the support platform can be customized according to the width of the conveying mechanism 1. Furthermore, the height of the support legs can also be adjusted to accommodate conveying mechanisms 1 of different heights.

[0042] The support platform can be made of profiles, and its cross-section can be rectangular or square. The support legs can be connected to the support platform by bolts, and a positioning pin is set at the connection to ensure the accuracy and stability of the connection.

[0043] In one embodiment, to make the movement of the dust collection box 4 more flexible, the suction module also includes a vacuum cleaner 9 and a suction hose 10. One end of the suction hose 10 is connected to the vacuum cleaner 9, and the other end is connected to the suction rigid tube 7. The vacuum cleaner 9 provides suction as a power source, and the suction hose 10 connects the vacuum cleaner 9 and the suction rigid tube 7 to form a flexible suction channel.

[0044] Specifically, the suction hose 10 is made of a flexible material, such as polyurethane or silicone, to ensure good flexibility and abrasion resistance.

[0045] In one embodiment, the drive mechanism for achieving the reciprocating movement of the dustbin 4 is a crank-slider mechanism. This crank-slider mechanism converts rotational motion into reciprocating linear motion, allowing the dustbin 4 to cover a larger cleaning area, thereby improving cleaning efficiency and uniformity. In other embodiments, the drive mechanism can also be an electric actuator or a hydraulic actuator.

[0046] Furthermore, such as Figure 2 and Figure 3 As shown, the driving mechanism includes a motor 11, an output shaft, a rotating component 12, and a connecting rod 13. The motor 11 drives the rotating component 12 to rotate via the output shaft. One end of the connecting rod 13 is connected to the rotating component 12, and the other end is connected to the dust collection box 4 via a bearing 14. Preferably, the motor 11 is a servo motor 11. The motor 11 serves as a power source, transmitting rotational motion to the rotating component 12 via the output shaft. The rotating component 12 is connected to one end of the connecting rod 13, and the other end of the connecting rod 13 is connected to the suction tube 7 on the dust collection box 4, forming a motion conversion mechanism. When the motor 11 operates, it drives the rotating component 12 to rotate via the output shaft. The rotational motion of the rotating component 12 is converted into the reciprocating linear motion of the dust collection box 4 via the connecting rod 13. In other embodiments, the motor 11 can also be a stepper motor 11.

[0047] Motor 11 can be selected from models with different power and speed to meet different cleaning needs. For example, for a larger area or a heavier dustbin 4, a more powerful motor 11 can be selected to provide sufficient driving force.

[0048] Preferably, the rotating component 12 is an eccentric wheel, and the design of the eccentric wheel allows for control of the movement amplitude of the dust collection box 4 by adjusting the eccentricity. In other embodiments, the rotating component 12 can also be a cam or a swing arm. The material of the rotating component 12 can be a wear-resistant alloy to extend its service life.

[0049] By adjusting the speed of motor 11, the movement frequency of dust collection box 4 can be controlled, thereby adapting to different cleaning requirements.

[0050] In one embodiment, as shown in the figure, the support platform of the frame 2 includes an upper cover plate and a lower cover plate, which together form a receiving cavity. The rotating component 12 and the connecting rod 13 are located within the receiving cavity. The receiving cavity provides a confined space for the moving components such as the rotating component 12 and the connecting rod 13, reducing interference between components and making them less susceptible to interference from the external environment. This not only improves the operating efficiency of the equipment but also reduces the probability of failure. Simultaneously, it optimizes the overall layout, making space utilization more rational and facilitating maintenance and operation.

[0051] In one embodiment, to enable the rotating component 12 to rotate at a more suitable speed, thereby causing the dustbin 4 to reciprocate at a suitable speed, the drive mechanism further includes a reducer assembly. The motor 11 drives the rotating component 12 to rotate via the reducer assembly. The reducer assembly reduces the output speed of the motor 11, allowing the rotating component 12 to rotate at a more suitable speed, thus achieving precise control over the movement speed of the dustbin 4.

[0052] Specifically, the reducer assembly includes a drive gear 15 and a follower gear 16. The diameter of the follower gear 16 is larger than the diameter of the drive gear 15. The motor 11 drives the follower gear 16 to rotate via the drive gear 15, and the follower gear 16 drives the rotating component 12 to rotate. A reducer housing 17 is provided on the upper cover plate of the frame 2. The drive gear 15 and the follower gear 16 are disposed in the reducer housing 17, and the motor 11 is fixed to the outer surface of the reducer housing 17.

[0053] The cooperation of the driving gear 15 and the follower gear 16 achieves the effect of reducing rotational speed and increasing torque. This allows the rotating component 12 to drive the dustbin 4 to reciprocate at a more stable speed, reducing vibration and noise during operation. The reducer assembly provides smooth power transmission, enabling precise control of the movement trajectory and speed of the dustbin 4.

[0054] Obviously, those skilled in the art can make various modifications and variations to this utility model without departing from its spirit and scope. Therefore, if these modifications and variations fall within the scope of the claims of this utility model and their equivalents, this utility model also intends to include these modifications and variations.

Claims

1. A PVD carrier cleaning device, characterized in that, include: Conveying mechanism; A frame spans across the top of the conveying mechanism; The suction module includes a dust collection box and a drive mechanism. The dust collection box has a suction port facing the conveying mechanism. The drive mechanism is mounted on the frame and connected to the dust collection box. The drive mechanism is used to drive the dust collection box to reciprocate in a direction perpendicular to the conveying direction of the conveying mechanism.

2. The PVD carrier cleaning device according to claim 1, characterized in that, The frame is provided with a guide elongated hole that penetrates the frame and extends along the reciprocating movement direction of the dust collection box. The suction module also includes a suction rigid tube that penetrates the guide elongated hole. The suction rigid tube is fixedly connected to the dust collection box, and the drive mechanism drives the dust collection box to reciprocate through the suction rigid tube.

3. The PVD carrier cleaning device according to claim 2, characterized in that, The frame includes a support platform and support legs. The support legs are located on both sides of the conveying mechanism. The two ends of the support platform are fixedly connected to the support legs so that the support platform is located above the conveying mechanism. The guide elongated hole is provided on the support platform.

4. The PVD carrier cleaning device according to claim 2, characterized in that, The suction module also includes a vacuum cleaner and a suction hose, one end of which is connected to the vacuum cleaner and the other end of which is connected to the suction tube.

5. The PVD carrier cleaning device according to claim 1, characterized in that, The driving mechanism is a crank-slider mechanism.

6. The PVD carrier cleaning device according to claim 5, characterized in that, The drive mechanism includes a motor, an output shaft, a rotating component, and a connecting rod. The motor drives the rotating component to rotate through the output shaft. One end of the connecting rod is connected to the rotating component, and the other end is connected to the dust collection box through a bearing.

7. The PVD carrier cleaning device according to claim 6, characterized in that, The rotating component is an eccentric wheel.

8. The PVD carrier cleaning device according to claim 6, characterized in that, The drive mechanism also includes a reducer assembly, through which the motor drives the rotating component to rotate.

9. The PVD carrier cleaning device according to claim 8, characterized in that, The reducer assembly includes a drive gear and a follower gear. The diameter of the follower gear is larger than that of the drive gear. The motor drives the follower gear to rotate through the drive gear, and the follower gear drives the rotating component to rotate.

10. The PVD carrier cleaning device according to claim 6, characterized in that, The frame is provided with a receiving cavity, and the rotating component and the connecting rod are located in the receiving cavity.

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