Composite target material clamp

Abstract

The utility model provides a composite target material clamp. The composite target material clamp comprises at least three fan-shaped clamping jaws with the same central angles and the same circle center positions. Arc-shaped grooves and screw holes are formed in the fan-shaped clamping jaws; at least two arc-shaped steps are arranged at the circle center of each fan-shaped clamping jaw; the outer diameter of the arc-shaped groove is larger than that of the arc-shaped step. The composite target material clamp is simple in structure and convenient to use, the large-size target material can be clamped for cooling surface repairing treatment, the small-size target material can also be clamped for finish machining treatment, materials for preparing the small-size target material clamp are saved, and the use efficiency of the target material clamp is improved.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing technology, and in particular to a composite target fixture. Background Technology

[0002] With the rapid development of the semiconductor industry, the demand for coating materials, as crucial materials in the manufacture of semiconductor electronic devices, is increasing daily. Target materials, as an important coating material, have wide applications in integrated circuits, flat panel displays, solar energy, and optical devices. The preparation of target materials requires the use of fixtures for clamping and fixing, as well as operations such as cooling surface repair and finishing.

[0003] CN104369113A discloses a target blasting fixture and a target blasting method. The target blasting fixture includes: a target chuck with a first groove for accommodating a target; a cover plate located on the sputtering area of ​​the target for protecting the sputtering area; and two or more connectors, each connector including a first end and a second end. The first end can be fixed to the target chuck outside the first groove, and the second end can be fixed to the cover plate. Each connector is spaced from the blasting area of ​​the target. When the target blasting fixture is used to blast the target area, it can protect the sputtering area of ​​the target, achieve precise blasting of the target area, ensure accurate positioning of the blasting area, and guarantee that the size and precision of the blasting area meet the requirements.

[0004] CN214199930U discloses a target assembly size inspection fixture. The main structure of the fixture is a flat plate with a groove. The groove consists of a central circular groove and two extending grooves respectively disposed at both radial ends of the central circular groove. The overlapping portions of the central circular groove and the extending grooves are directly connected to form a single groove. The mounting surface of the back plate in the target assembly is placed downwards in the groove. Through its simple structural design, the inspection fixture can quickly inspect whether the outer diameter of the back plate in the target assembly is qualified, avoiding inaccurate inspection problems caused by local deformation, and ensuring the accuracy of back plate diameter inspection and product qualification rate. The groove design facilitates the placement and removal of the target assembly, simplifying the target assembly inspection operation. The inspection fixture has a simple structure and is unlikely to damage the target assembly.

[0005] CN211465027U discloses a flexible clamp on a metal target sawing machine, including a housing, several clamping devices, a gear disk, and gear holes. The gear disk is located inside the housing, and a gear shaft is provided at the central axis of the gear disk. The clamping devices are evenly distributed around the circumference and are fitted into the end face of the housing. Each clamping device includes a flexible component located on the outer end face of the housing and a fixing device located on the inner end face of the housing. The upper top surface of the fixing device has several protrusions that mesh with the gear disk. The lower bottom surface of the fixing device has a groove. Slides are provided on the left and right sides of the fixing device. The flexible component has a protruding part on the side near the housing, which corresponds to the groove. The end of the flexible component facing the gear disk has an arc-shaped port. This flexible clamp on a metal target sawing machine can solve the problem of scratches and damage to targets with low hardness during processing, thereby improving the product qualification rate.

[0006] However, the aforementioned target clamps have limited functionality. If different products are clamped, the clamps need to be changed frequently, increasing the risk of product scrap. Utility Model Content

[0007] In view of the problems existing in the prior art, this utility model provides a composite target clamp that uses arc-shaped grooves and arc-shaped steps to firmly clamp targets of different sizes, thereby improving the efficiency of the clamp and solving the problem of reduced target quality or even scrapping caused by frequent clamp replacement when clamping different target products.

[0008] To achieve this objective, the present invention adopts the following technical solution:

[0009] This utility model provides a composite target clamp, which includes at least three fan-shaped claws with the same central angle and the same center position; each fan-shaped claw is provided with an arc-shaped groove and a screw hole; at least two arc-shaped steps are provided at the center of each fan-shaped claw; the outer diameter of the arc-shaped groove is larger than the outer diameter of the arc-shaped step.

[0010] The composite target clamp of this invention features an arc-shaped groove for placing and clamping large-sized targets, and an arc-shaped step for placing and clamping small-sized targets. This saves material used in the manufacture of specialized small-sized target clamps and avoids the problem of reduced target quality or even scrap due to frequent clamp changes when switching targets. The composite target clamp is fixed to the machine tool via screw holes, clamping and securing the target to be held. It can clamp large-sized targets for cooling surface repair and small-sized targets for precision machining. The fan-shaped jaws have at least two arc-shaped steps at their center, allowing for the clamping of small-sized targets of different diameters, as well as targets with different diameters on the front and back sides, thus improving the utilization rate of the composite target clamp.

[0011] The composite target clamp of this utility model includes at least three fan-shaped claws with the same central angle and the same center position, such as 3, 4, 5, 6, 7 or 8, etc.

[0012] The center of the fan-shaped claw is provided with at least two arc-shaped steps, such as two, three, four, five, six, seven, or eight steps.

[0013] Preferably, the outer edges of at least three fan-shaped claws in the composite target clamp have the same diameter and form a circle together.

[0014] Preferably, each sector-shaped claw has at least two screw holes, such as two, three, four, or five, and the at least two screw holes on each sector-shaped claw are distributed radially. Specifically, at least one screw hole passes through the arc-shaped groove, while the other screw holes are located between the arc-shaped groove and the arc-shaped step.

[0015] Preferably, the distance between the two screw holes is 3 to 4 mm, for example, it can be 3 mm, 3.1 mm, 3.2 mm, 3.5 mm, 3.7 mm, 3.8 mm or 4 mm, but it is not limited to the listed values. Other unlisted values ​​within this range are also applicable.

[0016] The present invention preferably has at least two screw holes on each fan-shaped claw, with at least one screw hole passing through the arc-shaped groove and the other screw holes located between the arc-shaped groove and the arc-shaped step. This can effectively fix large-sized targets and prevent them from shifting during machine tool clamping, thus avoiding damage to the targets and affecting their quality.

[0017] Preferably, positioning rulers are provided on both sides of the screw hole.

[0018] Preferably, the positioning ruler extends inward from the outer edge of the fan-shaped claw, and the positioning rulers on both sides of the screw hole on each fan-shaped claw are arranged in parallel, with the positioning rulers tangent to the edge of the screw hole.

[0019] Preferably, the outer diameter of the fan-shaped claw is 430-450mm, for example, it can be 430mm, 433mm, 435mm, 440mm, 445mm, 448mm or 450mm, but it is not limited to the listed values. Other unlisted values ​​within this range are also applicable.

[0020] Preferably, the arc-shaped groove is located 34 to 54 mm from the outer edge of the fan-shaped claw, for example, it can be 34 mm, 35 mm, 40 mm, 43 mm, 45 mm, 50 mm or 54 mm, but it is not limited to the listed values. Other unlisted values ​​within this range are also applicable.

[0021] Preferably, the width of the arc-shaped groove is 4 to 8 mm, for example, it can be 4 mm, 4.5 mm, 5 mm, 5.5 mm, 6 mm, 7 mm or 8 mm, but it is not limited to the listed values. Other unlisted values ​​within this range are also applicable.

[0022] Preferably, the depth of the arc-shaped groove is 7.5 to 8 mm, for example, it can be 7.5 mm, 7.55 mm, 7.6 mm, 7.7 mm, 7.75 mm, 7.8 mm or 8 mm, but it is not limited to the listed values. Other unlisted values ​​within this range are also applicable.

[0023] The dimensions of the arc-shaped groove in this invention are matched with the dimensions of the edge of the large-sized circular target. The large-sized circular target is placed in the arc-shaped groove, and the fan-shaped jaws with the same central angle and the same central position are squeezed by the machine tool to clamp the large-sized circular target.

[0024] Preferably, the outer diameter of the first-level arc-shaped step is 67 to 67.3 mm, for example, it can be 67 mm, 67.05 mm, 67.1 mm, 67.15 mm, 67.2 mm, 67.25 mm or 67.3 mm, but it is not limited to the listed values. Other unlisted values ​​within this range are also applicable.

[0025] Preferably, the height of the first arc-shaped step is 4 to 4.5 mm, for example, it can be 4 mm, 4.1 mm, 4.2 mm, 4.25 mm, 4.3 mm, 4.4 mm or 4.5 mm, but it is not limited to the listed values. Other unlisted values ​​within this range are also applicable.

[0026] Preferably, the outer diameter of the second-stage curved step is 80–80.3 mm, for example, it can be 80 mm, 80.1 mm, 80.15 mm, 80.18 mm, 80.2 mm, 80.25 mm, or 80.3 mm, but is not limited to the listed values; other unlisted values ​​within this range are also applicable.

[0027] The height of the second-level curved step is 5 to 5.5 mm, for example, it can be 5 mm, 5.1 mm, 5.2 mm, 5.25 mm, 5.3 mm, 5.4 mm or 5.5 mm, but it is not limited to the listed values. Other unlisted values ​​within this range are also applicable.

[0028] In this invention, the arc-shaped step at the center of the fan-shaped chuck is formed into a circular area by the extrusion of the machine tool, thereby achieving the clamping of small-sized circular targets. The outer diameter, height, and number of steps of the arc-shaped step can also be reasonably set according to actual needs, so as to achieve the clamping of targets of various sizes.

[0029] The method of using the composite target clamp of this utility model includes: clamping a large-size target or clamping a small-size target;

[0030] The method for clamping large-size targets specifically includes:

[0031] Place the large target material in the arc-shaped groove of the composite target material fixture, pass the fixing screw through the screw hole, fix it to the appropriate position by the positioning ruler, tighten the screw, and clamp the large target material on the machine tool spindle. Use the machine tool to make the composite target material fixture clamp the large target material.

[0032] The method for clamping small-sized targets specifically includes:

[0033] Place the small target material on the curved step of the composite target material fixture of appropriate size, and use a machine tool to clamp the small target material with the composite target material fixture.

[0034] Compared with the prior art, the present invention has at least the following beneficial effects:

[0035] The composite target clamp provided by this utility model has a simple structure and a simple method of use. It can not only clamp large-sized targets for cooling surface repair, but also clamp small-sized targets for precision machining. It saves materials for preparing small-sized target clamps and improves the efficiency of target clamp use. At the same time, it avoids the problem of reduced target product quality or even scrapping caused by frequent clamping of different target products. Attached Figure Description

[0036] Figure 1 This is a front view of the composite target fixture in Embodiment 1 of this utility model.

[0037] Figure 2 This is a side view of the composite target fixture in Embodiment 1 of this utility model.

[0038] Figure 3 This is an assembly diagram of the composite target clamp holding a large-sized target in Embodiment 1 of this utility model.

[0039] Figure 4 This is an enlarged schematic diagram of the assembly of a composite target clamp holding a small-sized target in Embodiment 1 of this utility model.

[0040] In the diagram: 1-fan-shaped claw; 2-arc-shaped groove; 3-arc-shaped step; 4-screw hole; 5-positioning ruler; 6-large target material; 7-small target material. Detailed Implementation

[0041] The technical solution of this utility model will be further described below with reference to the accompanying drawings and specific embodiments.

[0042] The present invention will now be described in further detail. However, the examples described below are merely simplified examples of the present invention and do not represent or limit the scope of protection of the present invention. The scope of protection of the present invention shall be determined by the claims.

[0043] It should be understood that in the description of this utility model, the terms "center," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used solely for the convenience of describing this utility model and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. Furthermore, the terms "first," "second," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, features defined with "first," "second," etc., may explicitly or implicitly include one or more of that feature. In the description of this utility model, unless otherwise stated, "a plurality of" means two or more.

[0044] It should be noted that, in the description of this utility model, unless otherwise explicitly specified and limited, the terms "set," "connected," and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0045] Example 1

[0046] This embodiment provides a composite target fixture, the front view of which is shown below. Figure 1 As shown, the side view is as follows Figure 2 As shown.

[0047] The composite target clamp includes three fan-shaped claws 1 with the same central angle and the same center position; each fan-shaped claw 1 is provided with an arc-shaped groove 2 and a screw hole 4; the center of each fan-shaped claw 1 is provided with two arc-shaped steps 3; the outer diameter of the arc-shaped groove 2 is larger than the outer diameter of the arc-shaped step 3.

[0048] The outer edges of the three fan-shaped claws 1 in the composite target clamp have the same diameter and form a circle together;

[0049] Each sector claw 1 has two screw holes 4; and the two screw holes on each sector claw 1 are distributed radially; one screw hole 4 passes through the arc-shaped groove, and the other screw hole 4 is located between the arc-shaped groove 2 and the arc-shaped step 3; the distance between the two screw holes 4 is 3.5mm.

[0050] Positioning rulers 5 are respectively provided on both sides of the screw hole 4. The positioning rulers 5 extend inward from the outer edge of the fan-shaped claw 1, and the positioning rulers 5 on both sides of the screw hole 4 on each fan-shaped claw 1 are arranged in parallel, and the positioning rulers 5 are tangent to the edge of the screw hole 4.

[0051] The outer diameter of the sector-shaped chuck 1 is 440 mm.

[0052] The arc-shaped groove 2 is located 40mm from the outer edge of the fan-shaped claw. The width of the arc-shaped groove is 5mm. The depth of the arc-shaped groove 2 is 7.8mm.

[0053] The outer diameter of the first curved step is 67mm, and the height of the first curved step is 4mm.

[0054] The outer diameter of the second-level curved step is 80mm, and the height of the second-level curved step is 5mm.

[0055] This embodiment also provides a method for using the above-mentioned composite target clamp, and an assembly diagram for clamping large-size targets is shown below. Figure 3 As shown; the method specifically includes:

[0056] Place the large-size target material 6 in the arc-shaped groove 2 of the fan-shaped claw 1 of the composite target material fixture, pass the fixing screw through the screw hole 4, fix it to the appropriate position by the positioning ruler 5, tighten the screw, and clamp the large-size target material 6 on the machine tool spindle. Use the machine tool to make the composite target material fixture clamp the large-size target material 6.

[0057] An enlarged schematic diagram of the assembly for clamping small-sized targets is shown below. Figure 4 As shown; the method specifically includes:

[0058] Place the small target material 7 on the arc-shaped step 3 of the composite target material fixture of appropriate size, and use a machine tool to clamp the small target material 7 with the composite target material fixture.

[0059] Example 2

[0060] This embodiment provides a composite target clamp, which includes four fan-shaped claws with the same central angle and the same center position; each fan-shaped claw is provided with an arc-shaped groove and a screw hole; the center of each fan-shaped claw is provided with two arc-shaped steps; the outer diameter of the arc-shaped groove is larger than the outer diameter of the arc-shaped step.

[0061] The outer edges of the four fan-shaped claws in the composite target clamp have the same diameter and form a circle together;

[0062] Each sector-shaped claw has two screw holes, and the two screw holes on each sector-shaped claw are distributed radially; the first screw hole passes through the arc-shaped groove, and the second screw hole is located between the arc-shaped groove and the arc-shaped step; the distance between the two screw holes is 3mm.

[0063] Positioning rulers are provided on both sides of the screw hole. The positioning rulers extend inward from the outer edge of the fan-shaped claw, and the positioning rulers on both sides of the screw hole on each fan-shaped claw are arranged parallel to each other, and the positioning rulers are tangent to the edge of the screw hole.

[0064] The outer diameter of the fan-shaped chuck is 430 mm.

[0065] The arc-shaped groove is located 54mm from the outer edge of the fan-shaped claw. The width of the arc-shaped groove is 4mm. The depth of the arc-shaped groove is 8mm.

[0066] The outer diameter of the first curved step is 67.3 mm. The height of the first curved step is 4.5 mm.

[0067] The outer diameter of the second-level curved step is 80.3 mm, and the height of the second-level curved step is 5.5 mm.

[0068] Example 3

[0069] This embodiment provides a composite target clamp, which includes three fan-shaped claws with the same central angle and the same center position; each fan-shaped claw is provided with an arc-shaped groove and a screw hole; the center of each fan-shaped claw is provided with two arc-shaped steps; the outer diameter of the arc-shaped groove is larger than the outer diameter of the arc-shaped step.

[0070] The outer edges of the three fan-shaped claws in the composite target clamp have the same diameter and form a circle together;

[0071] Each sector-shaped claw has 3 screw holes, and the 3 screw holes on each sector-shaped claw are distributed radially; the first screw hole passes through the arc-shaped groove, and the second and third screw holes are located between the arc-shaped groove and the arc-shaped step; the distance between two adjacent screw holes is 3mm.

[0072] Positioning rulers are provided on both sides of the screw hole. The positioning rulers extend inward from the outer edge of the fan-shaped claw, and the positioning rulers on both sides of the screw hole on each fan-shaped claw are arranged parallel to each other, and the positioning rulers are tangent to the edge of the screw hole.

[0073] The outer diameter of the fan-shaped claw is 450mm.

[0074] The arc-shaped groove is located 34mm from the outer edge of the fan-shaped claw. The width of the arc-shaped groove is 8mm. The depth of the arc-shaped groove is 7.5mm.

[0075] The outer diameter of the first curved step is 67.2 mm. The height of the first curved step is 4.2 mm.

[0076] The outer diameter of the second-level curved step is 80.1 mm, and the height of the second-level curved step is 5.2 mm.

[0077] Example 4

[0078] This embodiment provides a composite target clamp, which includes three fan-shaped claws with the same central angle and the same center position; each fan-shaped claw is provided with an arc-shaped groove and a screw hole; the center of each fan-shaped claw is provided with two arc-shaped steps; the outer diameter of the arc-shaped groove is larger than the outer diameter of the arc-shaped step.

[0079] The outer edges of the three fan-shaped claws in the composite target clamp have the same diameter and form a circle together;

[0080] Each sector-shaped claw has two screw holes, and the two screw holes on each sector-shaped claw are distributed radially; the first screw hole passes through the arc-shaped groove, and the second screw hole is located between the arc-shaped groove and the arc-shaped step; the distance between the two screw holes is 3.3mm.

[0081] Positioning rulers are provided on both sides of the screw hole. The positioning rulers extend inward from the outer edge of the fan-shaped claw, and the positioning rulers on both sides of the screw hole on each fan-shaped claw are arranged parallel to each other, and the positioning rulers are tangent to the edge of the screw hole.

[0082] The outer diameter of the fan-shaped claw is 433 mm.

[0083] The arc-shaped groove is located 35mm from the outer edge of the fan-shaped claw. The width of the arc-shaped groove is 5.5mm. The depth of the arc-shaped groove is 7.6mm.

[0084] The outer diameter of the first curved step is 67.1 mm. The height of the first curved step is 4.4 mm.

[0085] The outer diameter of the second-level curved step is 80.2 mm, and the height of the second-level curved step is 5.1 mm.

[0086] Comparative Example 1

[0087] This comparative example provides a target clamp, which includes four fan-shaped claws with the same central angle and the same center position. Each fan-shaped claw is provided with an arc-shaped groove and screw holes. Each fan-shaped claw has two screw holes, and the two screw holes on each fan-shaped claw are distributed radially. The first screw hole passes through the arc-shaped groove, and the second screw hole is located between the arc-shaped groove and the center of the fan-shaped claw. The distance between the two screw holes is 3 mm.

[0088] Positioning rulers are provided on both sides of the screw hole. The positioning rulers extend inward from the outer edge of the fan-shaped claw, and the positioning rulers on both sides of the screw hole on each fan-shaped claw are arranged parallel to each other, and the positioning rulers are tangent to the edge of the screw hole.

[0089] The outer diameter of the fan-shaped chuck is 430 mm.

[0090] The arc-shaped groove is located 54mm from the outer edge of the fan-shaped claw. The width of the arc-shaped groove is 4mm. The depth of the arc-shaped groove is 8mm.

[0091] The target clamp in this comparative example does not have an arc-shaped step, so it can only clamp large-sized targets and cannot clamp small-sized targets with smaller diameters, thus its purpose is limited.

[0092] Comparative Example 2

[0093] This comparative example provides a target clamp, which includes four fan-shaped claws with the same central angle and the same center position; the center of each fan-shaped claw is provided with two arc-shaped steps.

[0094] The outer diameter of the first curved step is 67.3 mm. The height of the first curved step is 4.5 mm.

[0095] The outer diameter of the second-level curved step is 80.3 mm, and the height of the second-level curved step is 5.5 mm.

[0096] The target clamp in this comparative example does not have an arc-shaped groove, and the outer diameter of the arc-shaped step is small. It can only clamp small-sized targets and cannot clamp large-sized targets with larger diameters, thus limiting its application.

[0097] In summary, the composite target clamp provided by this utility model has a simple structure and a convenient method of use. It can not only clamp large-sized targets for cooling surface repair, but also clamp small-sized targets for precision machining. This saves materials used in the preparation of small-sized target clamps and improves the efficiency of target clamp usage. At the same time, it avoids the problem of reduced target product quality or even scrapping caused by frequent clamp replacements when clamping different target products.

[0098] The applicant declares that the detailed structural features of this utility model are illustrated through the above embodiments, but this utility model is not limited to the above detailed structural features, that is, it does not mean that this utility model must rely on the above detailed structural features to be implemented. Those skilled in the art should understand that any improvements to this utility model, equivalent substitutions of selected components, additions of auxiliary components, and selection of specific methods, etc., all fall within the protection and disclosure scope of this utility model.

[0099] The preferred embodiments of the present invention have been described in detail above. However, the present invention is not limited to the specific details of the above embodiments. Within the scope of the technical concept of the present invention, various simple modifications can be made to the technical solution of the present invention, and these simple modifications all fall within the protection scope of the present invention.

Claims

1. A composite target clamp, characterized in that, The composite target clamp includes at least three fan-shaped claws with the same central angle and center position; each fan-shaped claw is provided with an arc-shaped groove and screw holes; at least two arc-shaped steps are provided at the center of each fan-shaped claw; the outer diameter of the arc-shaped groove is larger than the outer diameter of the arc-shaped step; each fan-shaped claw has at least two screw holes; and the at least two screw holes on each fan-shaped claw are distributed radially; the center-to-center distance between two screw holes is 3~4mm. At least one screw hole is provided to pass through the arc-shaped groove, and the other screw holes are provided between the arc-shaped groove and the arc-shaped step; Positioning rulers are provided on both sides of the screw hole; The positioning ruler extends inward from the outer edge of the fan-shaped claw, and the positioning rulers on both sides of the screw hole on each fan-shaped claw are arranged in parallel, with the positioning rulers tangent to the edge of the screw hole.

2. The composite target fixture according to claim 1, characterized in that, The outer edges of at least three fan-shaped claws in the composite target clamp have the same diameter and form a circle.

3. The composite target fixture according to claim 1, characterized in that, The outer diameter of the fan-shaped chuck is 430~450mm.

4. The composite target fixture according to claim 1, characterized in that, The arc-shaped groove is located 34-54 mm from the outer edge of the fan-shaped claw.

5. The composite target fixture according to claim 1, characterized in that, The width of the arc-shaped groove is 4~8mm.

6. The composite target fixture according to claim 1, characterized in that, The depth of the arc-shaped groove is 7.5~8mm.

7. The composite target fixture according to claim 1, characterized in that, The outer diameter of the first-level curved step is 67~67.3mm.

8. The composite target fixture according to claim 1, characterized in that, The height of the first curved step is 4~4.5mm.

9. The composite target fixture according to claim 1, characterized in that, The outer diameter of the second-level curved step is 80~80.3mm, and the height of the second-level curved step is 5~5.5mm.

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