Grinding disc cleaning device
By designing an adjustable bracket and a grinding disc cleaning device with multiple grooves, the problem of low cleaning efficiency of XY-type grinding discs is solved, achieving efficient cleaning and enhanced applicability.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-05-20
- Publication Date
- 2026-04-14
AI Technical Summary
In the existing technology, the XY type grinding disc has low cleaning efficiency, long cleaning time, and requires a large amount of water to rinse, which affects production efficiency and cost.
Design a grinding disc cleaning device including an adjustable bracket, grooves, and a handle. The device cleans the grooves of the grinding disc simultaneously with multiple grooves, and the grooves can be replaced according to the number and size of the grooves. Combined with an adjustable bracket structure, it can adapt to grinding discs of different specifications.
It improves the cleaning efficiency of the grinding disc, reduces cleaning time, lowers water consumption, and enhances the applicability of the cleaning device.
Smart Images
Figure CN224115947U_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of semiconductor technology, and more specifically, to a grinding disc cleaning device. Background Technology
[0002] In related fields, the grinding discs used in surface grinding equipment typically have grooved shapes such as XY type (square), concentric circles, and radial lines to ensure smooth flow of grinding fluid, uniform distribution of grinding fluid, and timely removal of waste generated during the grinding process, thus ensuring processing quality and efficiency.
[0003] For XY-type grinding discs, due to their narrow groove width and numerous channels, processing waste easily accumulates in the grooves after processing, affecting the substrate processing quality. To address this issue, each groove is typically cleaned individually using a steel ruler or scraper, followed by high-pressure water rinsing of the disc surface and grooves. However, this method is inefficient, time-consuming, and requires a large amount of water, impacting production efficiency and costs.
[0004] Therefore, how to improve the cleaning efficiency of the grinding disc has become a technical problem that urgently needs to be solved by those skilled in the art. Utility Model Content
[0005] In view of this, the purpose of this application is to provide a grinding disc cleaning device to improve the cleaning efficiency of the grinding disc.
[0006] To achieve the above objectives, this application provides the following technical solution:
[0007] A grinding disc cleaning device, comprising:
[0008] An adjusting bracket, the adjusting bracket comprising two support frames, the two support frames being movable toward each other or toward each other;
[0009] The groove teeth are multiple in number, each groove tooth is used to extend into the corresponding groove of the grinding disc to clean each groove, and each groove tooth is detachably connected between the two support frames.
[0010] The handle is detachably attached to the adjustment bracket.
[0011] Optionally, in the above-mentioned grinding disc cleaning device, the support frame includes a first connecting portion and a second connecting portion disposed perpendicular to the first connecting portion;
[0012] Each of the slotted teeth is located between the first connecting portions of the two support frames, and the second connecting portions of the two support frames are movably connected.
[0013] Optionally, in the above-described grinding disc cleaning device, the handle includes a connecting end and a gripping end, the connecting end being used to connect to the second connecting portion of the two support frames.
[0014] Optionally, in the above-mentioned grinding disc cleaning device, the second connecting parts of the two support frames are respectively provided with strip holes, the connecting end of the handle can move along the strip holes, and the strip holes of the two second connecting parts at least partially overlap, so that when the second connecting parts of the two support frames are stacked, the connecting end of the handle can pass through the strip holes of the two second connecting parts in sequence and be connected and fixed with the first fastener.
[0015] Optionally, in the above-described grinding disc cleaning device, the length of the second connecting portion is greater than the length of the first connecting portion, and the lengths of the first connecting portions of the two support frames are unequal.
[0016] Optionally, in the above-mentioned grinding disc cleaning device, the groove teeth include a tooth plate and a connecting block perpendicularly connected to the tooth plate, and one of the connecting blocks of two adjacent groove teeth is provided with a protrusion, and the other is provided with a groove that is inserted and connected to the protrusion.
[0017] Optionally, in the above-mentioned grinding disc cleaning device, each of the two support frames is provided with a mounting hole that connects to the protrusion on the connecting block of the groove tooth.
[0018] Optionally, in the above-described grinding disc cleaning device, the protrusions on at least two of the connecting blocks of the groove teeth have threaded portions, and the mounting holes are threaded holes that engage with the threaded portions; or,
[0019] The protrusions on at least two of the connecting blocks with the grooved teeth have threaded portions, and the mounting holes are open holes through which the threaded portions can be passed to connect the threaded portions to the second fastener.
[0020] Optionally, in the above-described abrasive disc cleaning device, the thickness of the toothed plate is less than the width of the groove; and / or,
[0021] The width of the toothed plate is not less than the depth of the groove.
[0022] Optionally, in the above-mentioned grinding disc cleaning device, the adjusting bracket, the groove teeth, and the handle are all made of stainless steel; and / or,
[0023] The outer surfaces of the adjustment bracket, the groove teeth, and the handle are provided with an anti-corrosion coating.
[0024] The grinding disc cleaning device provided in this application, through multiple grooves arranged between two support frames, can simultaneously clean all grooves of the grinding disc. A handle for easy cleaning is provided on the adjusting bracket, allowing the adjustment bracket to be pushed by gripping the handle, thus enabling the multiple grooves to clean each groove of the grinding disc simultaneously. Furthermore, the grooves can be replaced according to the number and size of the grooves on the grinding disc. As can be seen from the above example, the grinding disc cleaning device provided in this application can simultaneously clean all grooves of the grinding disc through multiple grooves arranged between two support frames. Compared to the traditional method of cleaning each groove individually, this improves the cleaning efficiency of the grinding disc. In addition, the ability to replace the grooves according to the number and size of the grooves on the grinding disc enhances the applicability of the grinding disc cleaning device.
[0025] The technical features mentioned above, those to be mentioned below, and those shown individually in the accompanying drawings can be combined arbitrarily, provided that the combined technical features are not contradictory. All feasible combinations of features are the technical content explicitly described herein. Any one of the multiple sub-features contained in the same statement can be applied independently, without necessarily being applied together with other sub-features. Attached Figure Description
[0026] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of this application. For those skilled in the art, other drawings can be obtained based on the provided drawings without creative effort.
[0027] Figure 1 This is a schematic diagram of the structure of the grinding disc cleaning device provided in the embodiments of this application;
[0028] Figure 2 A schematic diagram of the tooth structure provided in the embodiments of this application. Figure 1 ;
[0029] Figure 3 A schematic diagram of the tooth structure provided in the embodiments of this application. Figure 2 ;
[0030] Figure 4 A schematic diagram of the tooth structure provided in the embodiments of this application. Figure 3 ;
[0031] Figure 5 This is a schematic diagram of the support frame provided in an embodiment of this application;
[0032] Figure 6 This is a schematic diagram of the handle provided in an embodiment of this application.
[0033] Wherein, 10 is an adjustment bracket, 11 is a support frame, 111 is a first connecting part, 1111 is a mounting hole, 112 is a second connecting part, 1121 is a strip hole, 20 is a groove, 21 is a toothed plate, 22 is a connecting block, 23 is a protrusion, 231 is a threaded part, 24 is a groove, 25 is a first groove, 26 is a second groove, 27 is a third groove, 30 is a handle, 31 is a connecting end, 32 is a gripping end, 40 is a first fastener, and 50 is a second fastener. Detailed Implementation
[0034] The core of this application is to provide a grinding disc cleaning device to improve the cleaning efficiency of the grinding disc.
[0035] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.
[0036] In related fields, especially in the semiconductor industry's substrate processing, the grinding discs used in surface grinding equipment typically have grooved shapes such as XY type (square), concentric circles, and radial lines to ensure smooth flow and uniform distribution of the grinding slurry, and to promptly remove waste generated during the grinding process, thus ensuring processing quality and efficiency.
[0037] For XY-type grinding discs, due to their narrow groove width and numerous channels, processing waste easily accumulates in the grooves after processing, affecting the substrate processing quality. To address this issue, each groove is typically cleaned individually using a steel ruler or scraper, followed by high-pressure water rinsing of the disc surface and grooves. However, this method is inefficient, time-consuming, and requires a large amount of water, impacting production efficiency and costs.
[0038] Therefore, such as Figure 1 As shown in the figure, this application discloses a grinding disc cleaning device, including an adjusting bracket 10, groove teeth 20, and a handle 30. Multiple groove teeth 20 disposed between two support frames 11 simultaneously clean each groove of the grinding disc, improving cleaning efficiency compared to the traditional method of cleaning each groove individually. Furthermore, the groove teeth 20 can be replaced according to the number and size of the grooves in the grinding disc, enhancing the applicability of the grinding disc cleaning device.
[0039] The following will combine Figures 1 to 6 The grinding disc cleaning device disclosed in the embodiments of this application will be explained and described in detail.
[0040] Among them, such as Figure 1 As shown, the adjusting bracket 10 may include two support frames 11, which can move towards or away from each other to adjust the distance between them, thereby adapting to the grooves of grinding discs of different sizes. Simultaneously, multiple teeth 20 can be used, and each tooth 20 can extend into the corresponding groove of the grinding disc to clean each groove. Furthermore, each tooth 20 is detachably connected between the two support frames 11, allowing for replacement of the teeth 20 according to the number and size of the grooves on the grinding disc. In addition, a handle 30 is detachably connected to the adjusting bracket 10, allowing the adjusting bracket 10 to be pushed by holding the handle 30, achieving simultaneous cleaning of each groove of the grinding disc by multiple teeth 20. Compared to the traditional method of cleaning each groove individually, this improves the cleaning efficiency of the grinding disc. Furthermore, the ability to replace the teeth 20 according to the number and size of the grooves on the grinding disc enhances the applicability of the grinding disc cleaning device.
[0041] In some embodiments, such as Figure 1 and Figure 5 As shown, the support frame 11 can adopt an L-shaped structure, and the support frame 11 can include a first connecting part 111 and a second connecting part 112 arranged perpendicular to the first connecting part 111. Each groove tooth 20 can be located between the first connecting parts 111 of the two support frames 11, and the second connecting parts 112 of the two support frames 11 can be movably connected to adjust the distance between the two support frames 11, so as to adapt to the grooves of grinding discs of different sizes and specifications.
[0042] In some embodiments, such as Figure 1 and Figure 6 As shown, the handle 30 may include a connecting end 31 and a gripping end 32. The connecting end 31 can be connected to the second connecting portions 112 of the two support frames 11 to fix the handle 30 onto the adjusting bracket 10. Meanwhile, the outer surface of the gripping end 32 may be coated with an anti-slip coating or a textured surface to increase the friction between the operator's grip and the gripping end 32, preventing sweat and other substances from falling onto the gripping end 32 and causing slippage between the operator's palm and the gripping end 32.
[0043] In some embodiments, such as Figure 1 and Figure 5As shown, each of the two support frames 11 has a strip-shaped hole 1121 on its second connecting portion 112. The strip-shaped hole 1121 extends along the length of the second connecting portion 112, and the connecting end 31 of the handle 30 can move along the strip-shaped hole 1121. This allows the position of the handle 30 to be adjusted according to the distance between the two support frames 11, ensuring that the handle 30 is always held in the middle position of the adjusting bracket 10, facilitating the operator to apply pushing force to the grinding disc cleaning device. The second connecting portions 112 of the two support frames 11 overlap, and the strip-shaped holes 1121 of the two second connecting portions 112 at least partially overlap. This allows the connecting end 31 of the handle 30 to pass sequentially through the strip-shaped holes 1121 of the two second connecting portions 112 and be connected and fixed to the first fastener 40 when the second connecting portions 112 of the two support frames 11 are stacked.
[0044] In some embodiments, such as Figure 6 As shown, the connecting end 31 of the handle 30 may be provided with a threaded structure, so that the connecting end 31 of the handle 30 can pass through the strip holes 1121 of the two second connecting parts 112 in sequence and be adjusted to a suitable position, and then be threadedly connected with the first fastener 40 such as the locking nut.
[0045] In the above embodiments, the strip hole 1121 can be a hole of a certain length, such as an oblong hole or a rectangular hole, so that the connecting end 31 of the handle 30 can pass through the strip holes 1121 of the two second connecting parts 112 in sequence and move along the strip holes 1121 to adjust the position of the handle 30.
[0046] Of course, multiple adjustment holes can also be distributed at intervals along the length direction on the second connecting parts 112 of the two support frames 11, and the spacing between the adjustment holes of the second connecting parts 112 of the two support frames 11 is equal, so that when the distance between the two support frames 11 is adjusted, the adjustment holes of the second connecting parts 112 of the two support frames 11 can always be aligned, so that the connecting end 31 of the handle 30 can pass through the appropriate position adjustment holes of the two second connecting parts 112 in sequence and can be threadedly connected with the first fastener 40 such as the locking nut to realize the adjustment of the distance between the two support frames 11, thereby adapting to the grooves of grinding discs of different sizes and specifications.
[0047] In some embodiments, such as Figure 1 and Figure 5 As shown, the length of the second connecting portion 112 can be greater than the length of the first connecting portion 111 to allow for the opening of the strip-shaped hole 1121, thereby ensuring a certain adjustment range between the two support frames 11. Simultaneously, to compensate for the thickness difference when the second connecting portions 112 of the two support frames 11 are stacked, the lengths of the first connecting portions 111 of the two support frames 11 are unequal, i.e., the lengths of the first connecting portions 111 of the two support frames 11 have a length difference, so that the first connecting portions 111 of the two support frames 11 are connected and fixed to each of the slot teeth 20.
[0048] In some embodiments, such as Figures 1 to 4 As shown, the slot 20 may include a tooth plate 21 and a connecting block 22 perpendicularly connected to the tooth plate 21. One of the connecting blocks 22 of two adjacent slots 20 is provided with a protrusion 23, and the other is provided with a groove 24 that is inserted into the protrusion 23, so that the connecting blocks 22 of each slot 20 can be inserted into the groove 24 in sequence through the protrusion 23 to realize the connection between each slot 20.
[0049] In some embodiments, such as Figure 1 As shown, the connecting block 22 can be a cuboid structure, and the toothed plate 21 can be a rectangular plate, with the length of the toothed plate 21 being equal to the length of the connecting block 22. The toothed plate 21 can be welded to the middle position of one side of the connecting block 22, and as shown... Figure 2 and Figure 3 As shown, the protrusion 23 and the groove 24 can be located on the side of the connecting block 22 perpendicular to the side of the toothed plate 21, so that the connecting blocks 22 of two adjacent teeth 20 can be connected to each other. The thickness of the toothed plate 21 can be less than the width of the groove, and the thickness of the toothed plate 21 can be 2 / 3 of the width of the groove, so as to ensure that the toothed plate 21 can push the accumulated waste. The width of the toothed plate 21 should not be less than the depth of the groove, so as to ensure that the deepest part of the groove can be cleaned.
[0050] In some embodiments, such as Figure 5 As shown, the first connecting portion 111 of the two support frames 11 is provided with mounting holes 1111 that connect with the protrusions 23 on the connecting block 22 of the slotted tooth 20, so that the slotted tooth 20 located at the end can be connected to the mounting holes 1111 on the first connecting portion 111 of the support frame 11 through the protrusions 23 on the connecting block 22.
[0051] In some embodiments, such as Figure 2 and Figure 5 As shown, the protrusions 23 on the connecting blocks 22 of at least two slotted teeth 20 have threaded portions 231, that is, the protrusions 23 on the connecting blocks 22 of the slotted teeth 20 at both ends have threaded portions 231, and the mounting hole 1111 is a threaded hole that connects and mates with the threaded portions 231, so that the slotted teeth 20 at the ends can be connected and fixed by the protrusions 23 on the connecting blocks 22 and the mounting hole 1111 through threaded engagement, so as to clamp the remaining slotted teeth 20 between the two end slotted teeth 20.
[0052] In some embodiments, such as Figure 1 , Figure 2 and Figure 5As shown, the mounting hole 1111 on the first connecting part 111 of the support frame 11 can also be a light hole that can pass through the threaded part 231, so that the end slotted teeth 20 can pass through the mounting hole 1111 through the protrusion 23 on the connecting block 22, and be fixed by the threaded connection of the second fastener 50 such as the lock nut with the threaded part 231, so as to clamp the remaining slotted teeth 20 between the two end slotted teeth 20.
[0053] In some embodiments, such as Figure 1 As shown, the slot 20 may include two first slots 25 located at its ends, a plurality of second slots 26, and a third slot 27. The connecting block 22 of the first slot 25 has a protrusion 23 with a threaded portion 231 on one side to engage with the mounting hole 1111 on the first connecting portion 111 of the support frame 11. A groove 24 is formed on the side of the connecting block 22 of the first slot 25 opposite to the protrusion 23 to connect with the second slot 26 or the third slot 27. The connecting block 22 of the second slot 26 also has a protrusion 23 on one side to connect with an adjacent second slot 26 or first slot 25. A groove 24 is formed on the side of the connecting block 22 of the second slot 26 opposite to the protrusion 23 to connect with an adjacent second slot 26 or third slot 27. The connecting block 22 of the third groove 27 has protrusions 23 on both sides, so that the third groove 27 can serve as an intermediate conversion structure, allowing each groove 20 to be connected between the mounting holes 1111 on the first connecting part 111 of the two support frames 11 through the engagement of the protrusions 23 and the grooves 24. It should be noted that the third groove 27 can be located at any position between the two first grooves 25, which is not limited here. Of course, grooves 24 can be provided on opposite sides of the third tooth 27, and protrusions 23 that cooperate with the grooves 24 can be provided on the first connecting part 111 of the support frame 11. In this way, each tooth 20 can be connected between the protrusions 23 and the grooves 24 through the cooperation of the protrusions 23 and the grooves 24. Alternatively, a protrusion 23 can be provided on the first connecting part 111 of one support frame 11, and a groove 24 can be provided on the first connecting part 111 of the other support frame 11. In this way, the third tooth 27 can be omitted, and each tooth 20 can be connected between the first connecting parts 111 of the two support frames 11 through the cooperation of the protrusions 23 and the grooves 24.
[0054] In the above embodiments, the protrusion 23 may have a cylindrical structure, and the groove 24 is adapted to the protrusion 23, that is, the groove 24 has the same shape and size as the protrusion 23 to ensure that the protrusion 23 can be inserted into the groove 24. Of course, the shape of the protrusion 23 and the groove 24 is not limited to the above-described structural shape, as long as the protrusion 23 and the groove 24 have the same shape and size to meet the installation requirements, which is not limited here.
[0055] In some embodiments, such as Figure 1 As shown, the adjusting bracket 10, the slotted teeth 20, and the handle 30 can all be made of stainless steel, such as 304 or 316L, but not limited to the types mentioned above, to prevent rust formation. Alternatively, a Teflon or other anti-corrosion coating can be applied to the outer surfaces of the adjusting bracket 10, the slotted teeth 20, and the handle 30 to prevent chemical corrosion and avoid impacting the processing environment. It should be noted that Teflon is a fluoropolymer coating based on polytetrafluoroethylene (PTFE) resin, possessing good corrosion resistance and long-term wear resistance.
[0056] The grinding disc cleaning device disclosed in this application can simultaneously clean each groove of the grinding disc using multiple teeth 20 disposed between two support frames 11. A handle 30 for easy cleaning is provided on the adjusting bracket 10, allowing the adjusting bracket 10 to be pushed by holding the handle 30, thus enabling the multiple teeth 20 to clean each groove of the grinding disc simultaneously. Furthermore, the teeth 20 can be replaced according to the number and size of the grooves on the grinding disc.
[0057] The grinding disc cleaning device disclosed in this application can simultaneously clean each groove of the grinding disc by means of multiple teeth 20 disposed between two support frames 11. Compared with the traditional method of cleaning each groove one by one, it can improve the cleaning efficiency of the grinding disc. In addition, the teeth 20 can be replaced according to the number and size of the grooves of the grinding disc, which improves the applicability of the grinding disc cleaning device.
[0058] The terms "first" and "second," etc., in the specification, claims, and accompanying drawings of this application are used to distinguish different objects, not to describe a specific order. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover non-exclusive inclusion. For example, a process, method, system, product, or apparatus that includes a series of steps or units may include steps or units not listed, but rather not listed.
[0059] The above description of the disclosed embodiments enables those skilled in the art to make or use this application. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of this application. Therefore, this application is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims
1. A grinding disc cleaning device, characterized in that, include: Adjustable bracket (10), the adjustable bracket (10) includes two support frames (11), the two support frames (11) can move toward each other or toward each other; The groove (20) is multiple, and each groove (20) is used to extend into the corresponding groove of the grinding disc to clean each groove. Each groove (20) is detachably connected between the two support frames (11). The handle (30) is detachably connected to the adjustment bracket (10).
2. The grinding disc cleaning device according to claim 1, characterized in that, The support frame (11) includes a first connecting part (111) and a second connecting part (112) arranged perpendicularly to the first connecting part (111). Each of the slots (20) is located between the first connecting portions (111) of the two support frames (11), and the second connecting portions (112) of the two support frames (11) are movably connected.
3. The grinding disc cleaning device according to claim 2, characterized in that, The handle (30) includes a connecting end (31) and a gripping end (32), the connecting end (31) being used to connect to the second connecting part (112) of the two support frames (11).
4. The grinding disc cleaning device according to claim 3, characterized in that, The second connecting parts (112) of the two support frames (11) are respectively provided with strip holes (1121). The connecting end (31) of the handle (30) can move along the strip holes (1121), and the strip holes (1121) of the two second connecting parts (112) at least partially overlap, so that when the second connecting parts (112) of the two support frames (11) are stacked, the connecting end (31) of the handle (30) can pass through the strip holes (1121) of the two second connecting parts (112) in sequence and be connected and fixed with the first fastener (40).
5. The grinding disc cleaning device according to claim 4, characterized in that, The length of the second connecting part (112) is greater than the length of the first connecting part (111), and the lengths of the first connecting parts (111) of the two support frames (11) are not equal.
6. The grinding disc cleaning device according to claim 1, characterized in that, The slotted tooth (20) includes a tooth plate (21) and a connecting block (22) perpendicularly connected to the tooth plate (21). One of the connecting blocks (22) of two adjacent slotted teeth (20) is provided with a protrusion (23), and the other is provided with a groove (24) that is inserted and connected to the protrusion (23).
7. The grinding disc cleaning device according to claim 6, characterized in that, The two support frames (11) are respectively provided with mounting holes (1111) that connect to the protrusions (23) on the connecting block (22) of the slotted tooth (20).
8. The grinding disc cleaning device according to claim 7, characterized in that, The protrusions (23) on the connecting blocks (22) of at least two of the said slotted teeth (20) have threaded portions (231), and the mounting holes (1111) are threaded holes that mate with the threaded portions (231); or, The protrusions (23) on the connecting blocks (22) of at least two of the grooves (20) have threaded portions (231), and the mounting holes (1111) are open holes through which the threaded portions (231) can pass, so that the threaded portions (231) can be connected to the second fastener (50).
9. The grinding disc cleaning device according to claim 6, characterized in that, The thickness of the toothed plate (21) is less than the width of the groove; and / or, The width of the toothed plate (21) is not less than the depth of the groove.
10. The grinding disc cleaning device according to any one of claims 1 to 9, characterized in that, The adjusting bracket (10), the slotted teeth (20), and the handle (30) are all made of stainless steel; and / or, The outer surfaces of the adjustment bracket (10), the groove (20), and the handle (30) are provided with an anti-corrosion coating.