Micro-motion platform device

Abstract

The utility model provides a micro-motion platform device. The micro-motion platform device comprises a base; the bearing assembly is movably arranged on the base, and the bearing assembly is provided with a micro-motion seat; the ejector pin assembly is arranged in the circumferential direction of the bearing assembly, the ejector pin assembly and the bearing assembly are arranged in a spaced mode, the ejector pin assembly comprises an ejector pin base, a plurality of ejector pins arranged on the ejector pin base and a driving part arranged on the base, and the ejector pins are distributed in the circumferential direction of the micro-motion base at intervals; the output end of the driving piece is in driving connection with the ejector pin base and used for driving the ejector pin base to move relative to the base in the Z-axis direction. According to the technical scheme provided by the utility model, the problems that a micro-motion platform device in the prior art is easy to cause overheating of a motor, complicated stroke design and influence on the whole mechanism and performance are solved.

Description

Technical Field

[0001] This utility model relates to the field of micro-motion stage technology, and more specifically, to a micro-motion platform device. Background Technology

[0002] In semiconductor manufacturing and inspection equipment, silicon wafer support motion platforms are widely used. In some applications, stress testing of the wafer is required, which typically necessitates lifting the wafer to a certain height to perform specific inspection operations. To achieve wafer lifting, existing technologies usually integrate the ejector pin assembly within the support assembly of the microstage, allowing the ejector pin to move vertically and contact the wafer. However, this integrated design has the following problems:

[0003] 1. The integrated installation of the ejector pin assembly and the load-bearing assembly of the micro stage increases the driving mass of the micro stage. The increase in driving mass not only requires the motor to have higher power to overcome the additional load, but also increases the risk of motor overheating under high-frequency motion or high load conditions, which may affect the stability and lifespan of the micro stage.

[0004] 2. Under stress testing conditions, a larger vertical stroke needs to be designed to meet the requirements of the ejector pin action. This not only increases the complexity of the stroke design, but also places higher demands on the precision control of the micro-motion stage, because a larger stroke may introduce additional mechanical errors.

[0005] 3. The drive mechanism of the ejector pin occupies a large space. The drive mechanism of the ejector pin integrated in the support assembly also requires sufficient space to accommodate the moving parts. This will increase the volume of the support assembly, thereby affecting the overall mechanism and performance of the micro-motion stage. Utility Model Content

[0006] The main objective of this invention is to provide a micro-motion platform device to solve the problems of motor overheating, complex stroke design, and impact on the overall mechanism and performance of existing micro-motion platform devices.

[0007] To achieve the above objectives, this utility model provides a micro-motion platform device, comprising: a base; a support component movably disposed on the base, the support component having a micro-motion seat; and a ejector pin assembly disposed along the circumference of the support component, the ejector pin assembly being spaced apart from the support component, the ejector pin assembly comprising: an ejector pin seat, a plurality of ejector pins disposed on the ejector pin seat, and a driving member disposed on the base, the plurality of ejector pins being spaced apart along the circumference of the micro-motion seat, the output end of the driving member being drivenly connected to the ejector pin seat and used to drive the ejector pin seat to move relative to the base along the Z-axis direction.

[0008] Furthermore, the ejector assembly also includes a guide and a slider. The slider is slidably disposed on the guide along the Z-axis direction. The guide is provided on one of the base and the ejector seat, and the slider is provided on the other of the base and the ejector seat.

[0009] Furthermore, the ejector assembly also includes a first detector, which includes a first reader and a first reader. The first reader is used to read displacement or position information provided by the first reader. One of the first reader and the first reader is disposed on the base, and the other of the first reader and the first reader is disposed on the ejector seat.

[0010] Furthermore, the ejector pin has a gas channel, and at least one adsorption hole is provided at the end of the ejector pin opposite to the ejector pin seat. The adsorption hole is connected to the gas channel, which is configured to be connected to a vacuum system for generating and maintaining negative pressure.

[0011] Furthermore, the base has an installation space, and the micro-motion seat is movably disposed within the installation space; the bearing assembly further includes: a rotary drive member disposed on the micro-motion seat, the rotary drive member being used to drive the object to be carried to move in the Rz direction; at least three Z-axis drive members, spaced apart around the Z-axis on the base, each Z-axis drive member having a drive end that moves along the Z-axis direction, each drive end being connected to the micro-motion seat; at least three flexible guide members, spaced apart around the Z-axis, one end of each flexible guide member being connected to the micro-motion seat, and the other end of each flexible guide member being connected to the base, so that the micro-motion seat moves relative to the base in at least one of the Z-axis direction, the Rx direction, and the Ry direction.

[0012] Furthermore, the bearing assembly also includes a second detector, which includes a second reader and a second reader; the second reader is used to read displacement or position information provided by the second reader, wherein one of the second reader and the second reader is disposed on the micro-motion seat, and the other of the second reader and the second reader is disposed on the rotary drive component.

[0013] Furthermore, the flexible guide is made of any one of the following materials: spring steel, alloy steel, beryllium bronze, and titanium alloy.

[0014] Furthermore, there are three flexible guides, which are arranged symmetrically about the Z-axis.

[0015] Furthermore, the support assembly also includes at least three position detection components, which are correspondingly arranged with at least three Z-axis drive components. The position detection components are used to detect the position of the micro-motion seat in the Z-axis direction.

[0016] Furthermore, the supporting assembly also includes: a rotary motor, mounted on a micro-motion seat; a guide member, including an inner ring and an outer ring located on the outer periphery of the inner ring; and a rotary drive member, rotatably mounted on the micro-motion seat about the Z-axis. The output end of the rotary motor is drivenly connected to the rotary drive member. The inner ring is rotatably mounted relative to the outer ring, the inner ring is connected to the micro-motion seat, and the outer ring is connected to the rotary drive member.

[0017] By applying the technical solution of this utility model, the ejector assembly and the carrier assembly are set separately, and the ejector assembly is set in the circumference of the carrier assembly. On the one hand, the driving mass of the carrier assembly can be reduced, which can not only reduce the power consumption of the motor, but also reduce the risk of motor overheating, thereby improving the stability and life of the micro-motion platform device. On the other hand, the stroke design difficulty can be reduced, thereby simplifying the design complexity and improving the design accuracy. Furthermore, there is no need to reserve space inside the micro-motion seat, thereby reducing the volume of the carrier assembly, and thus optimizing the overall structure and performance of the micro-motion platform device. Attached Figure Description

[0018] The accompanying drawings, which form part of this application, are used to provide a further understanding of the present invention. The illustrative embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an undue limitation of the present invention. In the drawings:

[0019] Figure 1 A schematic diagram of the structure of an embodiment of the micro-motion platform device of this utility model is shown;

[0020] Figure 2 It shows Figure 1 A cross-sectional view of the micro-motion platform device;

[0021] Figure 3 It shows Figure 1 A schematic diagram of the ejector pin assembly of the micro-motion platform device.

[0022] The above figures include the following reference numerals:

[0023] 10. Base; 21. Rotary drive component; 22. Micro-motion seat; 23. Drive component; 24. Flexible guide component; 25. Position detection component; 26. Rotary motor; 27. Guide component; 31. Ejector seat; 32. Ejector; 33. Drive component; 34. Guide component; 35. Sliding component; 36. First read-out component; 37. Gas channel; 38. Second read-out component; 39. Second read-out component. Detailed Implementation

[0024] It should be noted that, unless otherwise specified, the embodiments and features described in this application can be combined with each other. The present invention will now be described in detail with reference to the accompanying drawings and embodiments.

[0025] It should be noted that in the embodiments of this utility model, the Z-axis direction is vertical, and the Z-axis, X-axis and Y-axis are set at an angle to each other.

[0026] like Figures 1 to 3 As shown, an embodiment of this utility model provides a micro-motion platform device. The micro-motion platform device includes: a base 10; a support component movably disposed on the base 10, the support component having a micro-motion seat 22; and a ejector pin assembly disposed along the circumference of the support component, the ejector pin assembly being spaced apart from the support component, the ejector pin assembly including: an ejector pin seat 31, a plurality of ejector pins 32 disposed on the ejector pin seat 31, and a driving member 33 disposed on the base 10, the plurality of ejector pins 32 being distributed spaced apart along the circumference of the micro-motion seat 22, the output end of the driving member 33 being drivenly connected to the ejector pin seat 31 and used to drive the ejector pin seat 31 to move relative to the base 10 along the Z-axis direction.

[0027] In the above technical solution, the ejector assembly and the carrier assembly are set separately, and the ejector assembly is set in the circumference of the carrier assembly. On the one hand, the driving mass of the carrier assembly can be reduced, which can not only reduce the power consumption of the motor, but also reduce the risk of motor overheating, thereby improving the stability and life of the micro-motion platform device. On the other hand, the stroke design difficulty can be reduced, thereby simplifying the design complexity and improving the design accuracy. Furthermore, there is no need to reserve space inside the micro-motion seat 22, thereby reducing the volume of the carrier assembly, and thus optimizing the overall structure and performance of the micro-motion platform device.

[0028] Furthermore, during stress testing, since the ejector pin assembly and the load-bearing assembly are set up separately and do not interfere with each other, even if the wafer cannot be adsorbed, the integrated lifting ejector pin can still have high stability and coplanarity.

[0029] Furthermore, separating the ejector pin assembly and the carrier assembly can avoid the risk of pipelines being difficult to decouple.

[0030] Specifically, such as Figure 1 As shown in the embodiment of this utility model, the ejector pin base 31 includes multiple connected arc-shaped structures, each arc-shaped structure protruding away from the base 10, and each arc-shaped structure has an ejector pin 32 at its end. Around the Z-axis, the base includes multiple connected long sides, each long side having a recessed portion. The multiple recessed portions correspondingly avoid multiple ejector pins 32, thus reducing the distance requirement between ejector pins 32, thereby adapting to the support of wafers with diameter requirements.

[0031] Specifically, such as Figure 1As shown, in this embodiment of the present invention, two adjacent long sides are connected by a short side to form a polygonal structure for the base 10. The base 10 has a cavity with a polygonal cross-section, and the micro-motion seat 22 can be adapted to the polygonal cavity of the base 10. Preferably, the cross-section of the base 10 is hexagonal, and the cross-section of the micro-motion seat 22 is also hexagonal. Both the cross-sections of the base 10 and the micro-motion seat 22 are perpendicular to the Z-axis direction.

[0032] Preferably, in the embodiments of this utility model, the driving component 33 is a flat voice coil motor.

[0033] like Figure 3 As shown in the embodiment of the present invention, the ejector pin assembly further includes a guide 34 and a slider 35. The slider 35 is slidably disposed on the guide 34 along the Z-axis direction. The guide 34 is provided on one of the base 10 and the ejector pin seat 31, and the slider 35 is provided on the other of the base 10 and the ejector pin seat 31.

[0034] Through the above configuration, the sliding fit between the guide 34 and the slider 35 ensures the linearity and stability of the ejector pin 31 moving along the Z-axis under the action of the drive 33, effectively preventing the ejector pin 31 from tilting or shaking during the movement, thereby ensuring the accuracy and reliability of the ejector pin 32 in supporting the wafer.

[0035] Preferably, in an embodiment of the present invention, the base 10 is provided with a guide 34 and the ejector pin seat 31 is provided with a slider 35; wherein, the slider 35 is a slider and the guide 34 is a slide rail.

[0036] like Figure 1 As shown in the embodiment of this utility model, the ejector pin assembly further includes a first detector, which includes a first reader and a first reader 36. The first reader is used to read displacement or position information provided by the first reader 36. One of the first reader and the first reader is disposed on the base 10, and the other of the first reader and the first reader is disposed on the ejector pin seat 31.

[0037] In the above technical solution, the first detector consists of a first reader and a first reader 36. The first reader reads the displacement or position information provided by the first reader 36 in real time, achieving precise monitoring of the movement of the ejector pin 31 relative to the base 10 along the Z-axis, thus meeting the needs of different functional operating conditions. Specifically, the first reader and the first reader 36 are respectively disposed on the base 10 and the ejector pin 31, ensuring the real-time nature and accuracy of the detection information and avoiding detection errors caused by mechanical wear or structural deformation of the supporting components, thereby ensuring high repeatability and stability of the ejector pin assembly's operation.

[0038] Preferably, in an embodiment of the present invention, the first reading element is a linear grating ruler reading head, and the first read element 36 is a linear grating ruler strip. The linear grating ruler reading head reads the changes in the spacing between the grating lines on the linear grating ruler strip, and can measure the moving distance with high precision.

[0039] Preferably, in an embodiment of the present invention, the micro-motion platform device further includes a controller, and the first reading element and the driving element 33 are both signal connected to the controller. In this way, after the first reading element reads the data of the first read element, it can feed back to the controller, and then the controller sends a control signal to the driving element 33 to control the driving element 33 to drive the pin seat 31 to move relative to the base 10 along the Z-axis direction.

[0040] like Figure 2 As shown in the embodiment of the present invention, the ejector pin 32 has a gas channel 37, and at least one adsorption hole is provided at the end of the ejector pin 32 opposite to the ejector pin seat 31. The adsorption hole is connected to the gas channel 37, and the gas channel 37 is configured to be connected to a vacuum system for generating and maintaining negative pressure.

[0041] In the above technical solution, the ejector pin 32 is designed with a gas channel 37 inside, and at least one adsorption hole is provided at the end away from the ejector pin seat 31. The adsorption hole is directly connected to the gas channel 37, and the ejector pin 32 can establish an effective connection with the external vacuum system, thereby forming and maintaining a stable negative pressure adsorption during wafer handover and fixation. In this way, the adsorption function of the ejector pin 32 can improve the stability and safety of the wafer during the movement process and reduce the risk of wafer displacement or damage caused by handover.

[0042] Furthermore, the ejector pin 32 has an adsorption function, which can reduce the risk of silicon wafer displacement caused by the handover. It can be controlled by an electronic method to ensure its repeatability and accuracy.

[0043] Specifically, in this embodiment of the invention, a sealing portion is provided on the side of the ejector pin 32 opposite to the ejector pin seat 31. The sealing portion is located on the outer periphery of the adsorption hole and is configured to seal with the object to be adjusted. This sealing portion prevents interference from external gases or impurities when the ejector pin 32 lifts the object to be adjusted for stress testing or other adjustment operations, ensuring a vacuum seal between the ejector pin and the object to be adjusted, thereby improving the reliability and accuracy of adsorption.

[0044] Preferably, in the embodiment of this utility model, there are three ejector pins 32. The three ejector pins 32 are fixed to the ejector pin seat 31. When making a handover, negative pressure can be applied to adsorb the test object to the end of the ejector pin 32. When performing stress testing, air can be not applied to support the three points.

[0045] like Figure 1 and Figure 2As shown in the embodiment of this utility model, the base 10 has an installation space, and the micro-motion seat 22 is movably disposed within the installation space; the bearing assembly further includes: a rotary drive member 21 disposed on the micro-motion seat 22, the rotary drive member 21 being used to drive the object to be carried to move in the Rz direction; at least three Z-axis drive members 23, spaced apart around the Z-axis on the base 10, each Z-axis drive member 23 having a drive end that moves along the Z-axis direction, each drive end being connected to the micro-motion seat 22; at least three flexible guide members 24, spaced apart around the Z-axis, one end of each flexible guide member 24 being connected to the micro-motion seat 22, and the other end of each flexible guide member 24 being connected to the base 10, so that the micro-motion seat 22 moves relative to the base 10 in at least one of the Z-axis direction, the Rx direction, and the Ry direction.

[0046] In the above technical solution, the base 10 has an internal installation space that cleverly accommodates the freely movable micro-motion seat 22. Combined with the rotary drive component 21, at least three Z-axis drive components 23, and at least three flexible guides 24, it forms a flexible load-bearing assembly. The rotary drive component 21 enables the object to be carried to rotate in the Rz direction, enhancing the versatility of the load-bearing assembly and meeting the rotation requirements in wafer inspection. The three Z-axis drive components 23 are arranged at intervals around the Z-axis. Each Z-axis drive component 23 is connected to the micro-motion seat 22 through its drive end, enabling precise displacement of the micro-motion seat 22 along the Z-axis while maintaining the horizontality and coplanarity of the micro-motion seat 22. This improves the motion stability and load-bearing accuracy of the load-bearing assembly in the Z-axis direction. Furthermore, the ingenious use of at least three flexible guides 24 not only reduces the mechanical friction and wear that may be introduced by traditional rigid guides, but also allows the micro-motion seat 22 to move along the Z-axis while rotating slightly but precisely around the X and Y axes through its unique elastic and rigid characteristics, thus achieving the leveling function. One end of the flexible guide 24 is fixedly connected to the micro-motion seat 22, and the other end is connected to the base 10. This ensures that when the micro-motion seat 22 performs multi-degree-of-freedom motion, it can avoid motion interference and leveling performance degradation caused by rigid connection, which greatly improves the stability and reliability of the load-bearing component during high-precision micro-motion and leveling motion.

[0047] Furthermore, by setting at least three flexible guides 24, i.e. using a flexible decoupling method, wear of joint parts can be avoided. This can greatly reduce mechanical friction while ensuring the linearity of small displacements and leveling.

[0048] like Figure 1As shown in the embodiment of this utility model, the bearing component further includes a second detector, which includes a second reader 38 and a second reader 39. The second reader 38 is used to read the displacement or position information provided by the second reader 39. One of the second reader 38 and the second reader 39 is disposed on the micro-motion seat 22, and the other is disposed on the rotary drive component 21. In this embodiment, the second reader 38 is disposed on the micro-motion seat 22, and the second reader is disposed on the rotary drive component 21.

[0049] In the above technical solution, the second detector consists of a second reader 38 and a second reader 39. By accurately reading the displacement or position information provided by the second reader 39, real-time monitoring and feedback of the movement of the rotary drive component 21 relative to the micro-motion seat 22 in the Rz direction can be achieved. In a specific structure, one of the second reader 38 and the second reader 39 is fixed to the micro-motion seat 22, while the other is mounted on the rotary drive component 21. This configuration ensures that no matter how the rotary drive component 21 rotates in the Rz direction, the second reader 38 can accurately acquire its position information, thereby monitoring and adjusting the accuracy of the rotational motion.

[0050] Preferably, in an embodiment of the present invention, the second reading element 38 is a rotating grating ruler reading head, and the second read element 39 is a rotating grating ruler strip. The rotating grating ruler reading head reads the changes in the spacing between the grating lines on the rotating grating ruler strip, which can measure the moving distance with high precision.

[0051] Preferably, in the embodiments of this utility model, the flexible guide 24 is made of any one of the following materials: spring steel, alloy steel, beryllium bronze, and titanium alloy. All of these materials possess excellent elasticity and stiffness characteristics, ensuring that the micro-motion seat 22 achieves high-precision leveling and positioning when moving along the Z-axis and rotating around the X and Y axes, while effectively absorbing and reducing vibrations during movement, preventing motion interference and error accumulation caused by rigid connections. For example, spring steel has good elastic recovery capability, providing stable guidance while reducing mechanical wear; alloy steel maintains high strength while possessing excellent fatigue resistance, ensuring that the flexible guide 24 maintains long-term reliability and consistency during high-frequency micro-motion leveling movements; beryllium bronze not only has a high elastic modulus but also excellent corrosion resistance and conductivity, making it suitable for applications requiring operation in harsh environments or under electromagnetic interference; titanium alloy, with its lightweight, high strength, and corrosion resistance, improves the load capacity and motion stability of the micro-motion stage, lowers the center of gravity of the overall structure, and enhances the coordinated motion performance of the multi-axis system. Therefore, by carefully selecting the material of the flexible guide 24, not only is high-precision displacement of the micro-motion seat 22 in the Z-axis direction achieved, but also the rotational leveling action in the Rx and Ry directions is made smoother and more stable.

[0052] Preferably, such as Figure 1 As shown in the embodiment of this utility model, there are three flexible guide members 24, which are arranged symmetrically about the Z-axis. By arranging the three flexible guide members 24 in a symmetrical manner, not only is the vertical stability of the micro-motion seat 22 ensured when moving along the Z-axis, but also a uniform force distribution is achieved during rotational leveling around the X and Y axes. This avoids tilting and vibration caused by unilateral or asymmetrical forces, thereby ensuring the accuracy and reliability of the load-bearing component when performing multi-degree-of-freedom motion.

[0053] like Figure 2 As shown in the embodiment of this utility model, the bearing component further includes at least three position detection components 25, which are correspondingly arranged with at least three Z-axis driving components 23. The position detection components 25 are used to detect the position of the micro-motion seat 22 in the Z-axis direction.

[0054] In the above technical solution, each position detection component 25 corresponds to a Z-axis drive component 23, which can accurately detect the vertical displacement of the micro-motion seat 22 along the Z-axis direction, ensuring vertical accuracy and repeatability when carrying precision devices such as wafers. In this way, not only is the vertical motion performance of the carrier component in the Z-axis direction optimized, but also the flexible pose adjustment of the micro-motion seat 22 in three-dimensional space is realized through the coordinated control of the rotational motion in the Rz direction and the leveling motion in the Rx and Ry directions, thus meeting the high precision and multi-functional requirements of the carrier platform in semiconductor wafer inspection.

[0055] Specifically, in the embodiments of this utility model, the position detection component 25 includes a third reading component and a third reading component. The third reading component is disposed on the base 10, and the third reading component is disposed on the micro-motion seat 22. Both the third reading component and the Z-axis drive component 23 are connected to the controller signal. In this way, after the third reading component reads the data of the third reading component, it can feed back to the controller. Then, the controller sends a control signal to the Z-axis drive component 23 through a decoupling algorithm to control the Z-axis drive component 23 to drive the micro-motion seat 22 to move relative to the base 10 along the Z-axis direction, thereby enabling the micro-motion seat 22 to complete the functions of tilt posture adjustment and vertical movement.

[0056] Preferably, in an embodiment of the present invention, the third reading element is a linear grating ruler reading head, and the third read element is a linear grating ruler strip. The linear grating ruler reading head reads the changes in the spacing between the grating lines on the linear grating ruler strip, enabling high-precision measurement of the moving distance.

[0057] like Figure 2As shown in the embodiment of this utility model, the supporting component further includes: a rotary motor 26, which is disposed on the micro-motion seat 22; a guide member 27, which includes an inner ring member and an outer ring member located on the outer periphery of the inner ring member; and a rotary drive member 21, which is rotatably disposed on the micro-motion seat 22 about the Z-axis. The output end of the rotary motor 26 is drivenly connected to the rotary drive member 21. The inner ring member is rotatably disposed relative to the outer ring member. The inner ring member is connected to the micro-motion seat 22, and the outer ring member is connected to the rotary drive member 21.

[0058] With the above configuration, the rotary motor 26 directly drives the rotary drive component 21, achieving rapid and stable rotation in the Rz direction through precise power output. This provides an efficient and stable power source for angle adjustment during wafer inspection, thus avoiding transmission errors and delays that may occur with traditional gear or belt drives, and improving the accuracy and response speed of the rotary motion. The guide component 27 consists of an inner ring and an outer ring. The relative rotatability of the inner and outer rings ensures the degree of freedom of the rotary drive component 21 when rotating around the Z-axis. At the same time, the mechanical decoupling and precise positioning of the two are achieved through the connection between the inner ring and the micro-motion seat 22, and the outer ring and the rotary drive component 21. This not only reduces friction and vibration during rotation, but also ensures the stability and accuracy of the micro-motion seat 22 when performing Rz rotation.

[0059] Preferably, in an embodiment of the present invention, the micro-motion platform device further includes a controller, and the second reading element 38 and the rotary motor 26 are both signal-connected to the controller. In this way, after the second reading element reads the data of the second read element, it can feed back to the controller, and then the controller sends a control signal to the rotary motor 26 to control the rotary motor 26 to drive the rotary drive component 21 to rotate around the Z-axis relative to the micro-motion seat 22.

[0060] Preferably, in an embodiment of the present invention, the guide member 27 can be a bearing.

[0061] It should be noted that in the embodiments of this utility model, the rotation drive component 21 is used to adjust the posture and position of the object to be carried.

[0062] It should be noted that in the embodiments of this utility model, the Z-axis is the rotation axis of the rotation drive component 21.

[0063] It should be noted that the micro-motion platform device of this utility model is a four-degree-of-freedom motion stage, and more specifically relates to a motion stage that carries a wafer in four degrees of freedom directions (Z, Rx, Ry, and Rz), and has a mechanism for raising and lowering ejector pins, which can provide a support stage for wafer inspection and functional testing.

[0064] It should be noted that in the embodiments of this utility model, the micro-motion platform device has a flat overall layout and a low center of gravity, which can demonstrate its advantages in multi-axis systems.

[0065] As can be seen from the above description, the above embodiments of this utility model achieve the following technical effects: the ejector assembly and the carrier assembly are set separately, and the ejector assembly is set in the circumference of the carrier assembly. On the one hand, the driving mass of the carrier assembly can be reduced, which can not only reduce the power consumption of the motor, but also reduce the risk of motor overheating, thereby improving the stability and life of the micro-motion platform device; on the other hand, the difficulty of stroke design can be reduced, thereby simplifying the design complexity and improving the design accuracy; furthermore, there is no need to reserve space inside the micro-motion seat, thereby reducing the volume of the carrier assembly, and thus optimizing the overall structure and performance of the micro-motion platform device.

[0066] The above description is merely a preferred embodiment of this utility model and is not intended to limit the utility model. Various modifications and variations can be made to this utility model by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A micro-motion platform device, characterized in that, include: Base (10); A support assembly is movably mounted on the base (10), the support assembly having a micro-motion seat (22); The ejector assembly is arranged circumferentially along the support assembly and spaced apart from the support assembly. The ejector assembly includes: an ejector seat (31), a plurality of ejector pins (32) arranged on the ejector seat (31), and a drive member (33) arranged on the base (10). The plurality of ejector pins (32) are distributed circumferentially along the micro-motion seat (22). The output end of the drive member (33) is drivenly connected to the ejector seat (31) and is used to drive the ejector seat (31) to move relative to the base (10) along the Z-axis direction.

2. The micro-motion platform device according to claim 1, characterized in that, The ejector assembly further includes a guide (34) and a slider (35). The slider (35) is slidably disposed on the guide (34) along the Z-axis direction. The guide (34) is provided on one of the base (10) and the ejector seat (31), and the slider (35) is provided on the other of the base (10) and the ejector seat (31).

3. The micro-motion platform device according to claim 1, characterized in that, The ejector assembly further includes a first detector, which includes a first reader and a first reader (36). The first reader is used to read displacement or position information provided by the first reader (36). One of the first reader and the first reader is disposed on the base (10), and the other of the first reader and the first reader is disposed on the ejector seat (31).

4. The micro-motion platform device according to claim 1, characterized in that, The ejector pin (32) has a gas channel (37), and at least one adsorption hole is provided at one end of the ejector pin (32) opposite to the ejector pin seat (31). The adsorption hole communicates with the gas channel (37), and the gas channel (37) is configured to be connected to a vacuum system for generating and maintaining negative pressure.

5. The micro-motion platform device according to any one of claims 1 to 4, characterized in that, The base (10) has an installation space, and the micro-motion seat (22) is movably disposed within the installation space; The carrier component also includes: A rotary drive component (21) is disposed on the micro-motion seat (22), and the rotary drive component (21) is used to drive the object to be carried to move in the Rz direction; At least three Z-axis drive components (23) are spaced apart on the base (10) around the Z-axis. Each Z-axis drive component (23) has a drive end that moves along the Z-axis direction and is connected to the micro-motion seat (22). At least three flexible guides (24) are spaced apart around the Z-axis. One end of each flexible guide (24) is connected to the micro-motion seat (22), and the other end of each flexible guide (24) is connected to the base (10), so that the micro-motion seat (22) moves relative to the base (10) in at least one of the Z-axis direction, the Rx direction, and the Ry direction.

6. The micro-motion platform device according to claim 5, characterized in that, The carrier component further includes a second detector, which includes a second reader (38) and a second reader (39); The second reader (38) is used to read displacement or position information provided by the second reader (39), wherein one of the second reader (38) and the second reader (39) is disposed on the micro-motion seat (22), and the other of the second reader (38) and the second reader (39) is disposed on the rotary drive member (21).

7. The micro-motion platform device according to claim 5, characterized in that, The flexible guide (24) is made of any one of the following materials: spring steel, alloy steel, beryllium bronze, and titanium alloy.

8. The micro-motion platform device according to claim 5, characterized in that, There are three flexible guides (24), and the three flexible guides (24) are arranged in a centrally symmetrical manner about the Z-axis.

9. The micro-motion platform device according to claim 5, characterized in that, The bearing assembly further includes at least three position detection components (25), which are correspondingly arranged with at least three Z-axis drive components (23). The position detection components (25) are used to detect the position of the micro-motion seat (22) in the Z-axis direction.

10. The micro-motion platform device according to claim 5, characterized in that, The carrier component also includes: A rotary motor (26) is mounted on the micro-motion seat (22); The guide member (27) includes an inner ring and an outer ring located on the outer periphery of the inner ring; the rotary drive member (21) is rotatably mounted on the micro-motion seat (22) about the Z-axis, and the output end of the rotary motor (26) is drivenly connected to the rotary drive member (21). The inner ring is rotatably mounted relative to the outer ring, the inner ring is connected to the micro-motion seat (22), and the outer ring is connected to the rotary drive member (21).

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