Tool for adsorbing small particles during measurement of interferometer

Abstract

The utility model relates to the technical field of high-precision sucker measurement, in particular to a tool for adsorbing tiny particles during interferometer measurement, which comprises a fixed seat, a magnet layer is connected to the inner side of the fixed seat in a magnetic attraction manner, and a sealing ring positioned in the fixed seat is fixedly connected to the bottom end of the magnet layer. The contact part of the cleaning head and the vacuum chuck is made of marble materials, the hardness of the marble materials is far higher than that of traditional cleaning tools (brushes, rubber and the like), the marble materials are not prone to being scratched and falling off, meanwhile, the hardness of the marble materials is lower than that of ceramic materials, and the surfaces of convex points cannot be scratched during cleaning; a wider cleaning area (especially corners and gaps) can be covered, the blind area of single-point cleaning is reduced, each loop corresponds to an independent negative pressure airflow path, and the situation that the overall adsorption force is reduced due to local blockage can be avoided; and meanwhile, a plurality of adsorption holes are regularly distributed in each annular groove, so that more tiny particles (0.1-5 microns) can be adsorbed under the condition of ensuring negative pressure.

Description

Technical Field

[0001] This utility model relates to the field of high-precision suction cup measurement technology, specifically a tool for adsorbing tiny particles during interferometer measurement. Background Technology

[0002] An interferometer is a precision optical instrument that uses the principle of light interference for measurement. When measuring the flatness and parallelism of the surface of a high-precision vacuum chuck used to fix semiconductors, the high accuracy requirements necessitate ensuring that the surface of the high-precision vacuum chuck is free of tiny particles (0.1~5 micrometers) or dirt to avoid interfering with the measurement results.

[0003] Traditional purging methods and chemical cleaning agents have low efficiency in removing tiny particles (0.1~5 micrometers) from complex surface geometries (such as bump arrays). Furthermore, when mechanically contacting the surface, traditional brushes or rubber are too soft and easily scratched by the sharp sides of the bumps, causing the bristles to fall off and causing secondary contamination to the vacuum suction cup. Therefore, a tool for adsorbing tiny particles during interferometer measurement is proposed to address the above problems. Utility Model Content

[0004] The purpose of this invention is to provide a tool for adsorbing tiny particles during interferometer measurements, in order to solve the problems mentioned in the background art.

[0005] To achieve the above objectives, this utility model provides the following technical solution:

[0006] A tool for adsorbing tiny particles during interferometer measurement includes a fixed base. A magnet layer is magnetically connected to the inner side of the fixed base. A sealing ring is fixedly connected to the bottom end of the magnet layer inside the fixed base. A cleaning head is fixedly connected to the bottom end of the sealing ring. A marble layer is fixedly connected to the bottom end of the cleaning head. The bottom end of the cleaning head has an array of uniformly arranged suction holes. A collection chamber is fixedly connected to the outer side of the fixed base. A symmetrically arranged limiting groove is formed at the top of the collection chamber. Each set of limiting grooves contains a first limiting block. A conductive metal mesh is fixedly connected between the first limiting blocks. Each set of limiting grooves contains a second limiting block located above the first limiting blocks. A HEPA fiberglass layer is fixedly connected between the second limiting blocks. A small ultrasonic vibration device is fixedly connected between the conductive metal mesh and the HEPA fiberglass layer. A fixed shell located above the HEPA fiberglass layer is threadedly connected to the inside of the collection chamber. A vacuum fan is fixedly connected to the inner side of the fixed shell. A protective mesh is fixedly connected to the inner side of the fixed shell above the vacuum fan.

[0007] Preferably, the cleaning head adopts a multi-ring groove structure, and each ring groove of the cleaning head has several uniformly distributed suction holes.

[0008] Preferably, the top of the fixing seat has three sets of through grooves that penetrate the fixing seat, and the positions of the through grooves in the fixing seat correspond one-to-one with the positions of the annular grooves on the cleaning head.

[0009] Preferably, the sealing ring is annular in shape, the shape of the sealing ring matches the inner shape of the fixing seat, and the diameter of the sealing ring matches the inner diameter of the fixing seat.

[0010] Preferably, the sealing ring and the fixing groove in the fixing seat are a set, and there are three sets of sealing rings and fixing seats, which are arranged in a spaced manner between the fixing seat and the cleaning head.

[0011] Compared with the prior art, the beneficial effects of this utility model are:

[0012] 1. In this utility model, the cleaning head, marble layer, suction hole, collection chamber, conductive metal mesh, HEPA fiberglass layer, and suction fan are all designed with marble as the contact part between the cleaning head and the vacuum suction cup. Marble is much harder than traditional cleaning tools (brushes, rubber, etc.), making it less prone to scratches and detachment. At the same time, it is less hard than ceramic materials, preventing scratches on raised surfaces during cleaning. The multi-ring grooved cleaning head can cover a wider cleaning area (especially corners and crevices), reducing blind spots in single-point cleaning. Each annular channel corresponds to an independent negative pressure airflow path, which can avoid local blockages that lead to a decrease in overall adsorption force. At the same time, each annular groove has many adsorption pores regularly distributed, which can adsorb more tiny particles (0.1~5 micrometers) while ensuring negative pressure. This solves the problem of low removal efficiency of tiny particles (0.1~5 micrometers) on complex surface geometries (such as convex dot arrays) by traditional blowing methods and chemical cleaning agents. In addition, traditional brushes or rubber are too soft when mechanically contacted and are easily scratched by the relatively sharp sides of the convex dots, causing the bristles to fall off and causing secondary pollution to the vacuum suction cup.

[0013] 2. In this utility model, the protective net can protect the vacuum fan and prevent operator finger injuries. The small ultrasonic vibration device can automatically clean debris and tiny particles (0.1~5 micrometers) on the conductive metal mesh and HEPA glass fiber layer. The first and second limiting blocks, guided by the limiting groove, can remove the conductive metal mesh and HEPA glass fiber layer to clean the debris and tiny particles (0.1~5 micrometers) that have been removed. Attached Figure Description

[0014] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0015] Figure 2This is a detailed structural diagram of the present invention;

[0016] Figure 3 This is a detailed structural diagram of the present invention viewed from below;

[0017] Figure 4 This is a cross-sectional structural diagram of the present invention.

[0018] In the diagram: 1. Fixing base; 2. Magnet layer; 3. Sealing ring; 4. Cleaning head; 5. Marble layer; 6. Dust suction hole; 7. Collection chamber; 8. Limiting groove; 9. First limiting block; 10. Conductive metal mesh; 11. Second limiting block; 12. HEPA fiberglass layer; 13. Small ultrasonic vibration device; 14. Fixing shell; 15. Dust suction fan; 16. Protective net. Detailed Implementation

[0019] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0020] It should be noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the exemplary embodiments according to this application. As used herein, the singular form is intended to include the plural form as well, unless the context clearly indicates otherwise. Furthermore, it should be understood that when the terms "comprising" and / or "including" are used in this specification, they indicate the presence of features, steps, operations, devices, components, and / or combinations thereof.

[0021] Furthermore, it should be noted that the use of terms such as "first" and "second" to define components is merely for the purpose of distinguishing the corresponding components. Unless otherwise stated, the above terms have no special meaning and therefore should not be construed as limiting the scope of protection of this invention.

[0022] Please see Figure 1-4 This utility model provides a technical solution:

[0023] A tool for adsorbing tiny particles during interferometer measurement includes a base 1, a magnet layer 2 magnetically connected to the inner side of the base 1, a sealing ring 3 fixedly connected to the bottom end of the magnet layer 2 inside the base 1, a cleaning head 4 fixedly connected to the bottom end of the sealing ring 3, a marble layer 5 fixedly connected to the bottom end of the cleaning head 4, and dust suction holes 6 evenly arranged in an array at the bottom end of the cleaning head 4. A collection chamber 7 is fixedly connected to the outer side of the base 1, and a symmetrically arranged limiting groove 8 is provided at the top of the collection chamber 7. Each set of limiting grooves 8 has a first limiting block 9 inside, and the first limiting blocks 9 are positioned between each other. A conductive metal mesh 10 is fixedly connected. A second limiting block 11 located above the first limiting block 9 is provided on the inner side of a set of limiting grooves 8. A HEPA glass fiber layer 12 is fixedly connected between the set of second limiting blocks 11. A small ultrasonic vibration device 13 is fixedly connected between the conductive metal mesh 10 and the HEPA glass fiber layer 12. A fixed shell 14 located above the HEPA glass fiber layer 12 is threadedly connected to the inside of the collection chamber 7. A vacuum fan 15 is fixedly connected to the inner side of the fixed shell 14. A protective net 16 located above the vacuum fan 15 is fixedly connected to the inner side of the fixed shell 14.

[0024] The cleaning head 4 adopts a multi-ring groove structure. Each ring groove of the cleaning head 4 has several evenly distributed suction holes 6. The three sets of multi-ring grooves, each corresponding to an independent negative pressure airflow path, prevent local blockages that could reduce overall suction power. Each ring groove has many regularly distributed suction holes, allowing for the adsorption of more microparticles (0.1~5 microns) while maintaining negative pressure. The top of the fixing base 1 has three sets of through grooves penetrating the fixing base 1. The positions of the through grooves in the fixing base 1 correspond one-to-one with the positions of the ring grooves on the cleaning head 4. Through these through grooves, the airflow is drawn in a circular pattern... The groove and the vacuum fan 15 are connected to ensure the suction power of each annular groove; the sealing ring 3 is circular in shape, and the shape of the sealing ring 3 matches the inner shape of the fixing seat 1. The diameter of the sealing ring 3 matches the inner diameter of the fixing seat 1, which improves the sealing effect between the cleaning head 4 and the fixing seat 1, thereby ensuring the suction power of the vacuum fan 15; the sealing ring 3 and the fixing groove in the fixing seat 1 are a group, and there are three groups of sealing rings 3 and fixing seat 1, which are arranged in a spaced manner between the fixing seat 1 and the cleaning head 4. The three groups of sealing rings 3 independently seal each group of three annular grooves to ensure suction power.

[0025] Workflow: When using an interferometer to measure and adsorb tiny particles, the entire device is externally powered. Marble layer 5 is attached to the surface of a high-precision suction cup. Driven by a vacuum fan 15, the cleaning head 4 cleans the protrusions on the surface of the high-precision vacuum suction cup. Through three sets of annular grooves, tiny particles (0.1~5 micrometers) are simultaneously drawn in through suction holes 6. These particles (0.1~5 micrometers) enter the collection chamber 7 through the three annular grooves and the through-slot in the mounting base 1. They undergo first-layer filtration through a conductive metal mesh 10 to prevent electrostatic dust accumulation, and then through a second HEPA fiberglass layer 12, filtering particles ≥0.3 μm, achieving an efficiency of up to [missing information]. 99.9% of the separated clean air is discharged through the vacuum fan 15. After vacuuming, the cleaning head 4 can be magnetically removed and removed through the magnet layer 2 and the sealing ring 3. The small ultrasonic vibration device 13 is used to vibrate down the tiny particles (0.1~5 microns) on the conductive metal mesh 10 and the HEPA glass fiber layer 12. The fixed shell 14 can be rotated to remove the fixed shell 14 and the vacuum fan 15. Under the guidance of the limiting groove 8, the first limiting block 9 and the second limiting block 11, the conductive metal mesh 10 and the HEPA glass fiber layer 12 are removed respectively. After rinsing with clean water and drying, the tiny particles (0.1~5 microns) in the collection chamber 7 can be poured out for cleaning.

[0026] Contents not described in detail in this specification are existing technologies known to those skilled in the art. Standard parts used in this invention can all be purchased commercially, and irregularly shaped parts can be custom-made according to the description and drawings. The specific connection methods for each part all employ conventional methods such as bolts, rivets, and welding, which are already mature technologies. The machinery, parts, and equipment all use conventional models from the prior art, and the circuit connections also employ conventional connection methods from the prior art, which will not be detailed here.

[0027] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A tool for adsorbing small particles during interferometric measurements, comprising a holder (1), characterised in that: A magnet layer (2) is magnetically connected to the inner side of the fixing base (1). A sealing ring (3) located inside the fixing base (1) is fixedly connected to the bottom end of the magnet layer (2). A cleaning head (4) is fixedly connected to the bottom end of the sealing ring (3). A marble layer (5) is fixedly connected to the bottom end of the cleaning head (4). A dust suction hole (6) is evenly arranged in an array at the bottom end of the cleaning head (4). A collection chamber (7) is fixedly connected to the outer side of the fixing base (1). A limiting groove (8) is symmetrically arranged at the top end of the collection chamber (7). A first limiting block (9) is provided inside each set of the limiting grooves (8). A conductive metal mesh is fixedly connected between the first limiting blocks (9). (10) A second limiting block (11) is provided on the inner side of a set of limiting grooves (8) above the first limiting block (9). A HEPA glass fiber layer (12) is fixedly connected between a set of second limiting blocks (11). A small ultrasonic vibration device (13) is fixedly connected between the conductive metal mesh (10) and the HEPA glass fiber layer (12). A fixed shell (14) is threadedly connected to the inside of the collection chamber (7) above the HEPA glass fiber layer (12). A vacuum fan (15) is fixedly connected to the inner side of the fixed shell (14). A protective net (16) is fixedly connected to the inner side of the fixed shell (14) above the vacuum fan (15).

2. A tool for adsorbing minute particles during measurement by an interferometer according to claim 1, characterized by: The cleaning head (4) adopts a multi-ring groove structure, and each ring groove of the cleaning head (4) has several uniformly distributed suction holes (6).

3. A tool for adsorbing minute particles during measurement by an interferometer according to claim 2, characterized in that: The top of the fixed seat (1) is provided with three sets of through grooves that penetrate the fixed seat (1). The positions of the through grooves in the fixed seat (1) correspond one-to-one with the positions of the annular grooves on the cleaning head (4).

4. The tool for adsorbing fine particles during measurement of an interferometer according to claim 1, characterized by: The sealing ring (3) is circular in shape, and the shape of the sealing ring (3) matches the inner shape of the fixing seat (1). The diameter of the sealing ring (3) matches the inner diameter of the fixing seat (1).

5. The tool for adsorbing minute particles during measurement of an interferometer according to claim 1, characterized by: The sealing ring (3) and the fixing groove in the fixing seat (1) are a set. There are three sets of sealing ring (3) and fixing seat (1), which are arranged in a spaced manner between the fixing seat (1) and the cleaning head (4).

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