Single crystal silicon rod drawing structure and single crystal furnace

Abstract

The utility model relates to the technical field of single crystal furnaces, in particular to a single crystal silicon rod drawing structure and a single crystal furnace, the single crystal silicon rod drawing structure comprises a furnace body; the mounting cylinder is arranged at the lower part of the furnace body; the base is arranged in the furnace body, and a crucible of the single crystal furnace is mounted on the base; and the driving assembly is installed on the installation cylinder, and the driving assembly is connected with the base and used for driving the base to rotate in a reciprocating mode. According to the single crystal silicon rod drawing structure and the single crystal furnace, the problem that the interior of a crucible of an existing single crystal furnace is heated unevenly can be solved.

Description

Technical Field

[0001] This application relates to the field of single crystal furnace technology, and in particular to a single crystal silicon rod pulling structure and a single crystal furnace. Background Technology

[0002] Monocrystalline silicon is an excellent semiconductor material and an important component of crystal materials. It is at the forefront of new material development and its main uses are as a semiconductor material and for solar photovoltaic power generation and heating.

[0003] Monocrystalline silicon is pulled in a monocrystalline furnace. The heat transfer components of existing monocrystalline furnaces can at least partially contact the monocrystalline silicon rod to quickly transfer the heat of the monocrystalline silicon rod to the heat transfer components through contact conduction. This increases the longitudinal temperature gradient of the monocrystalline silicon rod, increases the crystal growth rate of the monocrystalline silicon rod, thereby increasing the pulling efficiency of the monocrystalline silicon rod and reducing the production cost of the monocrystalline silicon rod.

[0004] However, existing single crystal furnaces still have shortcomings in the convection control of the melt, resulting in uneven heating inside the crucible, which in turn affects the pulling effect of single crystal silicon rods. Utility Model Content

[0005] In view of this, the purpose of this application is to provide a single-crystal silicon rod pulling structure and a single-crystal furnace to solve the problem of uneven heating inside the crucible of existing single-crystal furnaces.

[0006] According to a first aspect of the present invention, a single-crystal silicon rod pulling structure is provided, wherein the single-crystal silicon rod pulling structure includes: a furnace body; a mounting cylinder disposed at the lower part of the furnace body; a base disposed within the furnace body, wherein the crucible of the single-crystal furnace is mounted on the base; and a driving assembly mounted on the mounting cylinder, wherein the driving assembly is connected to the base and is used to drive the base to reciprocate.

[0007] Preferably, the drive assembly includes: a rotating rod, the top end of which is connected to the bottom of the base, and a transmission gear is provided at the bottom end of the rotating rod; and a motor, which is installed inside the mounting cylinder, and the motor drives the transmission gear to reciprocate through the transmission assembly.

[0008] Preferably, the transmission assembly includes: a rotating disk, which is connected to the motor for transmission, the rotating disk having an internal gear ring formed thereon, wherein the transmission gear rotates in a first direction when the transmission gear meshes with the internal gear ring; and a gear disk, which is connected to the motor for transmission, the gear disk having an external gear ring formed thereon, wherein the transmission gear rotates in a second direction when the transmission gear meshes with the external gear ring.

[0009] Preferably, the outer periphery of the rotating disk has a raised edge, the internal gear ring is formed on the inner side of the raised edge, and the gear disk is mounted on the upper surface of the rotating disk.

[0010] Preferably, the rotating disk rotates synchronously with the gear disk, and both the internal gear ring and the external gear ring are half gear rings, with the internal gear ring and the external gear ring meshing with the transmission gear in turn.

[0011] Preferably, the bottom of the rotating disk is provided with an arc-shaped limiting block, and a plurality of the arc-shaped limiting blocks are arranged at intervals along the circumferential direction. The bottom plate of the mounting cylinder is provided with an annular groove, and the arc-shaped limiting blocks can cooperate with the annular groove.

[0012] Preferably, the single-crystal silicon rod pulling structure further includes a resistance heating ring, which is installed on the inner wall of the furnace body and sleeved on the outer periphery of the crucible.

[0013] Preferably, the single-crystal silicon rod pulling structure further includes a heat insulation seat, which is installed at the bottom of the furnace body. The motor and the transmission assembly are located at the lower part of the heat insulation seat, and the heat insulation seat has a through hole for the rotating rod to pass through.

[0014] Preferably, the mounting cylinder is formed as a cylindrical cylinder, and the mounting cylinder is sleeved on the outside of the heat insulation seat, which is sleeved on the bottom end of the furnace body.

[0015] According to a second aspect of the present invention, a single crystal furnace is provided, wherein the single crystal furnace includes the single crystal silicon rod pulling structure as described above.

[0016] This invention relates to a single-crystal silicon rod pulling structure and a single-crystal furnace. The base is disposed within the furnace body, and the crucible is mounted on the base. A drive assembly is connected to the base and drives the base to reciprocate, thereby driving the crucible to reciprocate. This improves the convection effect of the melt inside the crucible, resulting in more uniform heating. This effectively solves the problem of uneven heating inside the crucible in existing single-crystal furnaces.

[0017] To make the above-mentioned objectives, features and advantages of this application more apparent and understandable, preferred embodiments are described below in detail with reference to the accompanying drawings. Attached Figure Description

[0018] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this application and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0019] Figure 1 This is a schematic diagram of the single-crystal silicon rod pulling structure according to the present invention.

[0020] Figure 2 This is a schematic diagram of a portion of the structure of the single-crystal silicon rod pulling structure according to this utility model.

[0021] Figure 3 This is a schematic diagram of another part of the structure of the single crystal silicon rod pulling structure according to this utility model.

[0022] Reference numerals in the attached drawings: 1-furnace body; 2-mounting cylinder; 20-annular groove; 3-crucible; 4-base; 5-rotating rod; 50-transmission gear; 6-motor; 7-rotating disk; 70-internal gear ring; 71-arc-shaped limiting block; 8-gear disk; 80-external gear ring; 9-heat insulation seat; 10-resistance heating ring. Detailed Implementation

[0023] The following detailed embodiments are provided to help the reader gain a comprehensive understanding of the methods, apparatus, and / or systems described herein. However, various changes, modifications, and equivalents of the methods, apparatus, and / or systems described herein will be apparent after understanding the disclosure of this application. For example, the order of operations described herein is merely illustrative and is not limited to the order set forth herein; changes that will be apparent after understanding the disclosure of this application are possible, except for operations that must occur in a specific order. Furthermore, for clarity and brevity, descriptions of features known in the art may be omitted.

[0024] The features described herein may be implemented in different forms and should not be construed as being limited to the examples described herein. Rather, the examples described herein have been provided merely to illustrate some of the many feasible ways of implementing the methods, apparatus, and / or systems described herein that will be apparent upon understanding the disclosure of this application.

[0025] Throughout the specification, when an element (such as a layer, region, or substrate) is described as being "on" another element, "connected to" another element, "bonded to" another element, "on" another element, or "covering" another element, it may be directly "on" another element, "connected to" another element, "bonded to" another element, "on" another element, or "covering" another element, or there may be one or more other elements in between. In contrast, when an element is described as being "directly on" another element, "directly connected to" another element, "directly bonded to" another element, "directly on" another element, or "directly covering" another element, there may be no other elements in between.

[0026] As used herein, the term “and / or” includes any one of the relevant items listed and any combination of any two or more items.

[0027] Although terms such as “first,” “second,” and “third” may be used herein to describe individual components, assemblies, regions, layers, or parts, these components, assemblies, regions, layers, or parts are not limited by these terms. Rather, these terms are used only to distinguish one component, assembly, region, layer, or part from another. Therefore, without departing from the teachings of the examples described herein, the first component, assembly, region, layer, or part referred to as the second component, assembly, region, layer, or part may also be referred to as the second component, assembly, region, layer, or part.

[0028] For ease of description, spatial relation terms such as “above,” “upper,” “below,” and “lower” are used herein to describe the relationship between one element and another, as shown in the accompanying drawings. Such spatial relation terms are intended to include not only the orientation depicted in the drawings but also different orientations of the device during use or operation. For example, if the device in the drawings is flipped, an element described as being “above” or “upper” relative to another element will subsequently be “below” or “lower” relative to that other element. Therefore, the term “above” includes both “above” and “below” orientations depending on the spatial orientation of the device. The device may also be positioned in other ways (e.g., rotated 90 degrees or in other orientations), and the spatial relation terms used herein will be interpreted accordingly.

[0029] The terminology used herein is for the purpose of describing various examples only and is not intended to limit the examples. Unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. The terms “comprising,” “including,” and “having” enumerate the stated features, quantities, operations, components, elements, and / or combinations thereof, but do not exclude the presence or addition of one or more other features, quantities, operations, components, elements, and / or combinations thereof.

[0030] Variations in the shapes shown in the accompanying drawings may occur due to manufacturing techniques and / or tolerances. Therefore, the examples described herein are not limited to the specific shapes shown in the accompanying drawings, but include changes in shape that may occur during manufacturing.

[0031] The features of the examples described herein can be combined in various ways that will be apparent upon understanding the disclosure of this application. Furthermore, although the examples described herein have a wide variety of constructions, other constructions are possible, as will be apparent upon understanding the disclosure of this application.

[0032] like Figures 1 to 3 As shown, according to the first aspect of the present invention, a single crystal silicon rod pulling structure is provided, which includes a furnace body 1, a mounting cylinder 2, a base 4, and a driving assembly.

[0033] In the following description, reference will be made to Figures 1 to 3 The specific structure of the above-mentioned components and their connection relationships in the monocrystalline silicon rod pulling structure are described in detail.

[0034] like Figures 1 to 3 As shown in the embodiment, an mounting cylinder 2 can be provided at the lower part of the furnace body 1, and a base 4 can be provided inside the furnace body 1. The crucible 3 of the single crystal furnace can be mounted on the base 4. A drive assembly can be mounted on the mounting cylinder 2. The drive assembly is connected to the base 4 and is used to drive the base 4 to reciprocate. When the base 4 rotates, the crucible 3 will reciprocate synchronously with the base 4, which can improve the convection effect of the melt inside the crucible 3 and make the heating inside the crucible 3 more uniform.

[0035] Preferred, such as Figures 1 to 3 As shown, in this embodiment, the furnace body 1 can cover the outside of the crucible 3, and the bottom of the crucible 3 can be fixed to the top surface of the base 4. Preferably, the base 4 can be a circular tray. The driving assembly can include a rotating rod 5 and a motor 6. The top end of the rotating rod 5 can be fixedly connected to the bottom of the base 4, so that the base 4 can rotate synchronously with the rotating rod 5. A transmission gear 50 can be fixedly provided at the bottom end of the rotating rod 5, so that the transmission gear 50 rotates synchronously with the rotating rod 5. The motor 6 can be installed inside the mounting cylinder 2, and the motor 6 can drive the transmission gear 50 to reciprocate through the transmission assembly, thereby driving the crucible 3 to reciprocate, so as to ensure uniform heating inside the crucible 3.

[0036] Preferred, such as Figures 1 to 3As shown, in this embodiment, the mounting cylinder 2 can be a cylindrical cylinder, and the mounting cylinder 2 can be fitted onto the bottom end of the furnace body 1. The motor 6 and the transmission assembly can be installed inside the mounting cylinder 2. The transmission assembly can include a rotating disk 7 and a gear disk 8. The rotating disk 7 can be driven by the motor 6, allowing the motor 6 to drive the rotating disk 7 to rotate. The rotating disk 7 can partially form an internal gear ring 70. The transmission gear 50 can mesh with the internal gear ring 70. When the transmission gear 50 meshes with the internal gear ring 70, the rotating disk 7 can drive the transmission gear 50 to rotate in a first direction. The gear disk 8 can be driven by the motor 6, allowing the motor 6 to drive the gear disk 8 to rotate. The gear disk 8 can partially form an external gear ring 80, and the transmission gear 50 can mesh with the external gear ring 80. When the transmission gear 50 meshes with the external gear ring 80, the gear disk 8 can drive the transmission gear 50 to rotate in a second direction. The second direction is the opposite direction of the first direction (e.g., the first direction is clockwise, and the second direction is counterclockwise). This configuration ensures that the transmission gear 50 rotates in the opposite direction when meshing with the gear disk 8 and the rotating disk 7, thereby enabling the reciprocating rotation of the transmission gear 50 and the crucible 3 to reciprocate.

[0037] Specifically, such as Figure 2 and Figure 3 As shown, in this embodiment, the rotating disk 7 can rotate synchronously with the gear disk 8, meaning the motor 6 can be connected to both the rotating disk 7 and the gear disk 8 simultaneously, allowing them to rotate in the same direction. The transmission gear 50 can be positioned between the rotating disk 7 and the gear disk 8, enabling it to mesh with both. Both the internal gear ring 70 and the external gear ring 80 can be half-gear rings, meaning the central angles of the internal gear ring 70 and external gear ring 80 are both 180°. The internal gear ring 70 and external gear ring 80 can be staggered, allowing them to mesh with the transmission gear 50 alternately. This arrangement ensures that, with the motor 6 rotating in the same direction, the transmission gear 50 rotates in the opposite direction when meshing with the internal gear ring 70.

[0038] Furthermore, preferably, such as Figure 2 and Figure 3 As shown, in this embodiment, the outer periphery of the rotating disk 7 may have an upwardly protruding convex edge, and the internal gear ring 70 may be formed on the inner side surface (i.e., the side surface near the center) of the convex edge. The gear disk 8 may be coaxially arranged with the rotating disk 7, and the gear disk 8 may be mounted on the upper surface of the rotating disk 7. The motor 6 may be mounted on top of the gear disk 8, and the motor 6 synchronously drives the rotating disk 7 and the gear disk 8. The motor 6 may be fixed to the inner wall of the mounting cylinder 2 by a bracket (not shown).

[0039] In addition, preferred, such as Figure 2 and Figure 3 As shown in the embodiment, an arc-shaped limiting block 71 can be provided at the bottom of the rotating disk 7. Multiple arc-shaped limiting blocks 71 can be provided, and they can be spaced apart along the circumference. An annular groove 20 can be provided on the bottom plate of the mounting cylinder 2. The arc-shaped limiting block 71 can cooperate with the annular groove 20, allowing the rotating disk 7 to be rotatably connected to the mounting cylinder 2. This ensures that the rotating disk 7 remains stable during rotation.

[0040] Preferred, such as Figures 1 to 3 As shown, in this embodiment, the single-crystal silicon rod pulling structure may further include a resistance heating ring 10. The resistance heating ring 10 can be fixedly installed on the inner wall of the furnace body 1. The resistance heating ring 10 is sleeved on the outer periphery of the crucible 3 for heating the crucible 3. The motor 6 can drive the crucible 3 to reciprocate relative to the resistance heating ring 10 to ensure uniform heating of the interior of the crucible 3.

[0041] Further optimized, such as Figures 1 to 3 As shown, in this embodiment, the single-crystal silicon rod pulling structure may further include a heat insulation seat 9. Specifically, the heat insulation seat 9 may be sleeved and fixed to the bottom end of the furnace body 1, and the mounting cylinder 2 may be sleeved and fixed to the outside of the heat insulation seat 9. The heat insulation seat 9 is used to insulate the furnace body 1 from the heat. The motor 6 and the transmission assembly may be located at the lower part of the heat insulation seat 9, thereby preventing the motor 6 and the transmission assembly from overheating. A circular through hole may also be provided in the center of the heat insulation seat 9, through which the rotating rod 5 passes to support the crucible 3.

[0042] Furthermore, according to a second aspect of the present invention, a single crystal furnace is provided, the single crystal furnace comprising the single crystal silicon rod pulling structure as described above.

[0043] During use, the switch door on furnace body 1 can be opened first, and polycrystalline silicon can be placed inside crucible 3, then the switch door can be closed. Power can then be switched on, and the resistance heating ring 10 inside furnace body 1 can be activated to heat and melt the polycrystalline silicon inside crucible 3. Simultaneously, motor 6 drives rotating disk 7 and gear disk 8 to rotate synchronously. When the inner gear ring 70 meshes with the transmission gear 50, motor 6 drives rotating rod 5 to rotate forward, thereby rotating crucible 3 and improving the convection effect of the melt. When the inner gear ring 70 disengages from the transmission gear 50, the outer gear ring 80 meshes with the transmission gear 50, thereby driving the transmission gear 50 to rotate in reverse, driving crucible 3 to rotate in reverse. Through the effect of reciprocating rotation, the convection effect of the melt inside crucible 3 can be further improved, making the interior of crucible 3 heated evenly.

[0044] Finally, it should be noted that the above-described embodiments are merely specific implementations of this application, used to illustrate the technical solutions of this application, and not to limit them. The protection scope of this application is not limited thereto. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that any person skilled in the art can still modify or easily conceive of changes to the technical solutions described in the foregoing embodiments, or make equivalent substitutions for some of the technical features, within the technical scope disclosed in this application. Such modifications, changes, or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of this application, and should all be covered within the protection scope of this application. Therefore, the protection scope of this application should be determined by the protection scope of the claims.

Claims

1. A single-crystal silicon rod pulling structure, disposed in a single-crystal furnace, characterized in that, The single-crystal silicon rod pulling structure includes: Furnace body; An installation cylinder is located at the lower part of the furnace body; A base is disposed within the furnace body, and the crucible of the single crystal furnace is mounted on the base; and A drive assembly is installed in the mounting cylinder and connected to the base for driving the base to reciprocate.

2. The single crystal silicon rod pulling configuration of claim 1, wherein The driving component includes: A rotating rod, the top end of which is connected to the bottom of the base, and a transmission gear is provided at the bottom end of the rotating rod; and An electric motor is installed inside the mounting cylinder, and the electric motor drives the transmission gear to reciprocate through a transmission assembly.

3. The single crystal silicon rod pulling configuration of claim 2, wherein The transmission assembly includes: A rotating disk, connected to the motor for transmission, has a portion of its rotating disk forming an internal gear ring. When the transmission gear meshes with the internal gear ring, the transmission gear rotates in a first direction; and A gear disk is connected to the motor for transmission. The gear disk has an external gear ring. When the transmission gear meshes with the external gear ring, the transmission gear rotates in a second direction.

4. The single crystal silicon rod pulling configuration of claim 3 wherein, The outer periphery of the rotating disk has a raised edge, the internal gear ring is formed on the inner side of the raised edge, and the gear disk is mounted on the upper surface of the rotating disk.

5. The single crystal silicon rod pulling configuration of claim 4, wherein The rotating disk rotates synchronously with the gear disk. Both the internal gear ring and the external gear ring are half gear rings, and the internal gear ring and the external gear ring alternately mesh with the transmission gear.

6. The single crystal silicon rod pulling configuration of claim 4, wherein The bottom of the rotating disk is provided with an arc-shaped limiting block, and multiple arc-shaped limiting blocks are arranged at intervals along the circumference. The bottom plate of the mounting cylinder is provided with an annular groove, and the arc-shaped limiting blocks can cooperate with the annular groove.

7. The single crystal silicon rod drawing structure of claim 2, wherein The single-crystal silicon rod pulling structure also includes a resistance heating ring, which is installed on the inner wall of the furnace body and sleeved on the outer periphery of the crucible.

8. The single crystal silicon rod drawing structure of claim 7, wherein The single-crystal silicon rod pulling structure also includes a heat insulation seat, which is installed at the bottom of the furnace body. The motor and the transmission assembly are located at the lower part of the heat insulation seat, and the heat insulation seat has a through hole for the rotating rod to pass through.

9. The single crystal silicon rod drawing structure of claim 8, wherein The mounting cylinder is formed into a cylindrical tube, and the mounting cylinder is sleeved on the outside of the heat insulation seat, which is sleeved on the bottom end of the furnace body.

10. A single crystal furnace characterized by comprising: The single crystal furnace includes the single crystal silicon rod pulling structure according to any one of claims 1 to 9.

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