Temporary storage maintenance equipment for mask plate

Abstract

The utility model relates to the technical field of mask plate processing equipment, in particular to mask plate temporary storage and maintenance equipment. Comprising a constant-temperature cooling device for performing constant-temperature treatment on mask plate bodies, a manipulator for grabbing or placing the mask plate bodies, a temporary storage mechanism for storing the mask plate bodies and detecting the temperature of each mask plate body in real time, and a detection device for performing film detection on the mask plate bodies, when the mechanical arm places the mask plate body on the temporary storage mechanism, the mask plate body is marked as a first working procedure, a second working procedure or a third working procedure; the mechanical arm recognizes the mask plate body in the first working procedure, the second working procedure or the third working procedure and then grabs the corresponding mask plate body; the mask plate body can be conveniently and accurately transferred, so that the mask plate body can keep stable precision during thin film detection, the influence on the mask plate body during thin film detection is effectively reduced, and the detection accuracy and reliability are improved.

Description

Technical Field

[0001] This utility model relates to the technical field of mask plate processing equipment, and in particular to a mask plate temporary storage and maintenance device. Background Technology

[0002] A photomask is a high-precision metal plate used in processes such as photolithography or vapor deposition, on which tiny patterns or circuits can be fabricated. Photomask inspection refers to the process of testing the quality and performance of a photomask, mainly including inspecting its pattern, dimensions, defects, and alignment. The purpose of photomask inspection is to ensure the accuracy and reliability of the photomask and avoid defects or errors in photolithography or vapor deposition processes.

[0003] Masks are typically subjected to constant temperature control before thin film testing. In a constant temperature environment, the mask needs to achieve a certain temperature stability. In a constant temperature environment, the mask will generate thermal stress due to temperature changes. If thin film testing is performed immediately, these thermal stresses may cause slight deformation of the mask during the testing process, which may lead to misjudgment of the mask during testing, thus affecting the accuracy of the test results. Utility Model Content

[0004] This invention addresses the shortcomings of existing technologies by providing a mask plate temporary storage and maintenance device. This device facilitates the accurate transfer of the mask plate body, enabling the mask plate body to maintain stable accuracy during thin film detection. It effectively reduces the impact on the mask plate body during thin film detection, thereby improving detection accuracy and reliability.

[0005] To solve the above-mentioned technical problems, the present invention adopts the following technical solution:

[0006] This utility model provides a mask plate temporary storage and maintenance device, including a constant temperature cooling device for constant temperature treatment of the mask plate body, a robot arm for gripping or placing the mask plate body, a temporary storage mechanism for storing the mask plate bodies and detecting the temperature of each mask plate body in real time, and a detection device for performing thin film detection on the mask plate body. When the robot arm places the mask plate body in the temporary storage mechanism, it marks the mask plate body as a first process, a second process, or a third process. The robot arm first identifies the mask plate body in the first process, the second process, or the third process, and then grips the corresponding mask plate body.

[0007] When the mask body needs to be subjected to constant temperature treatment, the robot arm loads the mask body marked as the first process into the constant temperature cooling device, which performs constant temperature treatment on the mask body marked as the first process. The robot arm identifies and removes the mask body marked as the first process and subjected to constant temperature treatment from the constant temperature cooling device, marks the corresponding mask body as the second process, and places the mask body marked as the second process into the temporary storage mechanism. The temporary storage mechanism performs temperature detection on the mask body marked as the second process to determine whether its temperature is within the specified range.

[0008] When film testing is required on the mask body, the robot arm grabs the mask body marked as the second process whose temperature meets the specified range and places it into the testing device. The testing device performs film testing on the mask body marked as the second process. The robot arm identifies and removes the mask body marked as the second process and after film testing from the testing device, marks the corresponding mask body as the third process, and places the mask body marked as the third process into the temporary storage mechanism.

[0009] When it is necessary to retrieve the mask body marked as the third process, the robot arm identifies and retrieves the mask body marked as the third process from the temporary storage mechanism and transfers it to the external equipment.

[0010] The beneficial effects of this utility model are:

[0011] The robotic arm can quickly grasp the mask body that accurately corresponds to the processing step, improving the efficiency of mask body picking and placing, facilitating accurate transfer of the mask body, and enabling the robotic arm to smoothly grasp the mask body after thermal stress relief. The mask body can maintain stable accuracy during thin film inspection, effectively reducing the impact on the mask body during thin film inspection, improving inspection accuracy, and smoothly achieving constant temperature treatment and thin film inspection of the mask body. The mask body can reach a more stable state before inspection, thereby improving the accuracy and reliability of inspection. Attached Figure Description

[0012] Figure 1 This is a schematic diagram of the structure of the mask plate temporary storage and maintenance equipment.

[0013] Figure 2 This is a schematic diagram of the three-dimensional structure of the detection device.

[0014] Figure 3 This is a schematic diagram of a three-dimensional structure with detection components and a capture camera.

[0015] Figure 4 This is an exploded view of the load-bearing components, thin-film testing components, reflectors, and backlight source.

[0016] Figure 5 This is a three-dimensional structural diagram of the flipping mechanism.

[0017] Figure 6 This is a schematic diagram of the connection structure between the rotating unit and the gripper cylinder.

[0018] Figure 7 This is a three-dimensional structural diagram of the temporary storage mechanism.

[0019] Figure 8 This is a three-dimensional structural diagram of a constant temperature cooling device.

[0020] Figure 9 This is a cross-sectional view of the sealing plate.

[0021] Figure 10 This is a schematic diagram of the three-dimensional structure of the box.

[0022] Figure 11 This is a structural cross-sectional view of the first splicing panel.

[0023] Figure 12 This is a structural cross-sectional view of the second splicing panel.

[0024] Figure 13 This is a structural cross-sectional view of the third splicing plate.

[0025] Figure 14 This is a schematic diagram of the exploded structure of the second splicing plate.

[0026] Figure 15 This is a schematic diagram of the exploded structure of the first splicing panel.

[0027] Figure 16 This is a schematic diagram of the exploded structure of the third splicing plate.

[0028] Figure 17 This is an exploded view of the enclosure and the thermostatic drive mechanism.

[0029] Figure 18 This is a schematic diagram of the exploded structure of a thermostatic opening and closing module.

[0030] Figure 19 This is a schematic diagram of the structure when the thermostatic opening and closing frame, thermostatic drive unit, and sealing plate are located inside the thermostatic cover.

[0031] Figure 20 This is a schematic diagram of the exploded structure of a device with a sealing plate, a thermostatic opening and closing frame, a thermostatic drive unit, and a thermostatic cover.

[0032] 01. Mask plate body;

[0033] 010. Constant temperature cooling device; 020. Robotic arm;

[0034] 030. Temporary storage facility; 040. Detection device;

[0035] 1. Housing; 101. Mounting cavity; 110. First inlet; 120. First outlet;

[0036] 11. First splicing plate; 111. First splicing channel; 1111. First flow section; 1112. First flow guide section;

[0037] 1101. First motherboard; 1102. First mounting plate;

[0038] 12. Second splicing plate; 121. Second splicing channel; 1211. Second flow section; 1212. Second flow guide section;

[0039] 1201, Second motherboard; 1202, Second mounting plate;

[0040] 13. Third splicing plate; 131. Third splicing channel; 1311. Third flow section; 1312. Third flow guide section;

[0041] 1301, Third motherboard; 1302, Third mounting plate;

[0042] 14. Multi-way directional valve;

[0043] 2. Sealing plate; 200. Second channel; 2001. Sealed flow section; 2002. Sealed guide section; 210. Second inlet; 220. Second outlet;

[0044] 201. Sealed mainboard; 202. Sealed mounting plate;

[0045] 21. Sealing ring;

[0046] 3. Temperature sensor; 4. Thermostatic drive mechanism;

[0047] 41. Constant temperature lifting unit; 42. Constant temperature opening and closing module;

[0048] 421. Thermostatic opening and closing frame; 4211. Sealing fan; 422. Thermostatic drive unit;

[0049] 423. Thermostatic hood; 4231. Sealed dust exhaust pipe;

[0050] 51. Testing frame; 52. Adjustment platform;

[0051] 53. Load-bearing components;

[0052] 531. Support frame; 532. Supporting component;

[0053] 5321, First bonding part; 5322, Second bonding part;

[0054] 54. Detection components;

[0055] 541. First support rod; 542. Second support rod;

[0056] 543. Thin-film inspection component; 544. Reflector; 545. Backlight source;

[0057] 55. Capture the camera;

[0058] 6. Flipping mechanism;

[0059] 61. Lifting module; 62. Rotating unit;

[0060] 63. Gripper cylinder; 631. First gripper; 632. Second gripper;

[0061] 71. Temporary storage rack; 72. Temporary storage plate; 73. Temporary storage support;

[0062] 701. Fiber optic sensor; 702. Thermistor. Detailed Implementation

[0063] To facilitate understanding by those skilled in the art, the present invention will be further described below in conjunction with embodiments and accompanying drawings. Specific embodiments of the present invention will be described below. It should be noted that, in order to provide a concise description of these embodiments, this specification cannot provide a detailed description of all features of the actual embodiments.

[0064] refer to Figures 1 to 20As shown, this utility model provides a mask plate temporary storage and maintenance device, including a constant temperature cooling device 010 for constant temperature treatment of the mask plate body 01, a robot arm 020 for gripping or placing the mask plate body 01, a temporary storage mechanism 030 for storing the mask plate bodies 01 and detecting the temperature of each mask plate body 01 in real time, and a detection device 040 for performing thin film detection on the mask plate bodies 01. When the robot arm 020 places the mask plate body 01 in the temporary storage mechanism 030, it marks the mask plate body 01 as a first process, a second process, or a third process. The robot arm 020 first identifies the mask plate body 01 in the first process, the second process, or the third process, and then grips the corresponding mask plate body 01. The temporary storage mechanism 030 can smoothly place the mask plate bodies 01 before constant temperature treatment, after constant temperature treatment, and after thin film detection, and the robot arm 020 can quickly grip... The mask body 01, which accurately corresponds to the processing step, improves the efficiency of picking up and placing the mask body 01. Furthermore, the mask body 01 before, after, and after thin film inspection of the temperature control process is marked accordingly, preventing the robot arm 020 from confusing mask bodies 01 from different processes during gripping or placement, thus facilitating accurate transfer of the mask body 01. The robot arm 020 is equipped with a vision recognition system that captures images of the mask body 01 through a lens adapted to the vision recognition system and marks the mask body 01 using image processing algorithms to distinguish between mask bodies 01 in the first, second, or third process. Marking the mask body 01 using a vision recognition system is a relatively conventional existing technology and will not be elaborated upon. This allows the robot arm 020 to quickly grasp the mask body 01 that accurately corresponds to the processing step, further improving the efficiency of picking up and placing the mask body 01.

[0065] In practical applications, when the mask body 01 needs to undergo temperature control, the robot arm 020 loads the mask body 01 marked as the first process into the temperature control cooling device 010, which then controls the temperature of the mask body 01 marked as the first process. The robot arm 020 identifies and removes the mask body 01 marked as the first process and after temperature control from the temperature control cooling device 010, marks the corresponding mask body 01 as the second process, and places the mask body 01 marked as the second process into the temporary storage mechanism 030. The temporary storage mechanism 030 performs temperature detection on the mask body 01 marked as the second process to determine whether its temperature is within the specified range, thus achieving temperature control of the mask body 01. The temperature-controlled mask body 01 is then marked and temporarily stored for real-time monitoring. The temperature of the mask body 01 also facilitates the robot arm 020 to accurately grasp the mask body 01 corresponding to the mark, improving the transfer efficiency of the mask body 01. The robot arm 020 can first place the mask body 01, which has undergone constant temperature treatment, in the temporary storage mechanism 030. The temporary storage mechanism 030 monitors the temperature of the mask body 01 in real time. When the temperature of the mask body 01 reaches the specified temperature, the thermal stress of the mask body 01 is eliminated. The robot arm 020 can then smoothly grasp the mask body 01 after the thermal stress has been eliminated, so that the mask body 01 can maintain stable accuracy during film detection, effectively reducing the impact on the mask body 01 during film detection, improving detection accuracy, and successfully realizing constant temperature treatment and film detection of the mask. The mask body 01 can reach a more stable state before detection, thereby improving the accuracy and reliability of detection.

[0066] When film detection is required on the mask body 01, the robot arm 020 grasps the mask body 01 marked as the second process whose temperature meets the specified range and places it into the detection device 040. The detection device 040 performs film detection on the mask body 01 marked as the second process. The robot arm 020 identifies and removes the mask body 01 marked as the second process and after film detection from the detection device 040, marks the corresponding mask body 01 as the third process, and places the mask body 01 marked as the third process into the temporary storage mechanism 030. This realizes film detection on the mask body 01 and marks and temporarily stores the mask body 01 after film detection, which facilitates real-time detection of the temperature of the mask body 01 and also facilitates the robot arm 020 to accurately grasp the mask body 01 corresponding to the mark, thereby improving the transfer efficiency of the mask body 01.

[0067] When it is necessary to retrieve the mask body 01 marked as the third process, the robot arm 020 identifies and retrieves the mask body 01 marked as the third process from the temporary storage mechanism 030, and transfers it to the external equipment, so as to facilitate the rapid transfer of the mask body 01.

[0068] refer to Figure 2 As shown, in this embodiment, the detection device 040 includes a detection frame 51, an adjustment platform 52 mounted on the detection frame 51, a support component 53 and a detection component 54 drivenly connected to the adjustment platform 52. The adjustment platform 52 is used to drive the support component 53 to rotate and move along the X-axis or Y-axis. The support component 53 is used to position the mask plate body 01. The detection component 54 is used to perform thin film detection on the mask plate body 01. In practical applications, the adjustment platform 52 includes an XY-axis slide and a rotary platform. The rotary platform is drivenly connected to the XY-axis slide to smoothly realize the rotation of the support component 53 and... Moving along the X-axis or Y-axis, when film detection is required on the mask body 01, the adjusting platform 52 adjusts the position and angle of the carrier component 53 so that the placement position of the mask body 01 corresponds accurately to the position of the carrier component 53. The robot arm 020 places the mask body 01 marked as the second process on the temporary storage mechanism 030 onto the carrier component 53. The adjusting platform 52 drives the carrier component 53 and the mask body 01 to rotate, so that the detection component 54 can perform film detection on the mask body 01 at any angle, which can completely detect the film on the mask body 01 and improve the reliability of the detection.

[0069] refer to Figure 2 As shown, in this embodiment, the supporting component 53 includes a supporting frame 531 drivenly connected to the adjustment platform 52 and several supporting members 532 installed on the supporting frame 531. The supporting member 532 is provided with a first fitting part 5321 and a second fitting part 5322. The first fitting part 5321 and the second fitting part 5322 form a notch that matches the corner of the circumferential direction of the mask plate body 01. The first fitting part 5321 and the second fitting part 5322 respectively abut against two adjacent sides of the mask plate body 01. The detection device 040 also includes several capturing cameras 55. The capturing cameras 55 correspond one-to-one with the supporting members 532. The capturing cameras 55 are used to acquire the position and angle information of the notch.

[0070] refer to Figure 2 As shown, in practical applications, when the carrier component 53 needs to position the mask body 01, the adjustment platform 52 adjusts the position and angle of the carrier component 53 according to the information obtained by the capture camera 55, so that the placement position of the mask body 01 corresponds accurately with the position of the carrier component 53. The robot arm 020 places the mask body 01 marked as the second process on the temporary storage mechanism 030 onto the carrier component 53, so that the first bonding part 5321 and the second bonding part 5322 stably support the mask body 01. Specifically, the gap between the first bonding part 5321 and the second bonding part 5322 and the mask body 01 gradually decreases from top to bottom, which is conducive to smoothly guiding the mask body 01 into the carrier component 532 and facilitating the rapid positioning of the mask body 01.

[0071] refer to Figure 3 , 4 As shown, in this embodiment, the detection component 54 includes a first support rod 541 and a second support rod 542 connected to the detection frame 51, a thin film detection element 543 and a reflector 544 respectively installed on the first support rod 541 and the second support rod 542, and a backlight source 545 installed on the support frame 531. The thin film detection element 543 corresponds to the reflector 544. When the mask plate body 01 is positioned on the support component 53, it is located above the backlight source so that the backlight source can smoothly provide supplementary lighting to the mask plate body 01. In practical applications, when it is necessary to inspect the mask plate body... The mask body 01 is used for thin film inspection. The mask body 01 is positioned on the support component 53. The backlight allows the pattern, defects and deviations on the mask to be imaged smoothly onto the reflector 544. The thin film inspection component 543 illuminates the reflector 544 to directly observe the pattern, defects and deviations on the mask body 01. The adjustment platform 52 drives the support component 53 and the mask body 01 to rotate, changing the observation angle of the mask body 01, thereby completely observing the pattern, defects and deviations on the mask body 01, ensuring the accuracy of the inspection results and improving the reliability of the inspection.

[0072] refer to Figure 5 , 6 As shown, in this embodiment, the detection device 040 further includes a flipping mechanism 6. The flipping mechanism 6 includes a lifting module 61, a rotating unit 62 driven and connected to the lifting module 61, and a gripper cylinder 63 driven and connected to the rotating unit 62. The two output ends of the gripper cylinder 63 are respectively connected to a first gripper 631 and a second gripper 632 that are parallel to each other. In actual application, the lifting module 61 uses a screw motor module, hydraulic cylinder, or electric cylinder to smoothly drive the rotating unit 62 to move up and down. The rotating unit 62 uses a motor-synchronous belt combined rotating mechanism, which consists of a motor, a reducer, a synchronous pulley, a synchronous belt, and other components. The motor drives the synchronous pulley through the reducer, and the synchronous belt is connected to the synchronous pulley. The output end of the synchronous belt is connected to the gripper cylinder 63. The connection, through the transmission action of the synchronous belt, realizes the rotational movement of the gripper cylinder 63. When it is necessary to change the surface to be inspected of the mask body 01, the lifting module 61 drives the rotating unit 62 to move up and down to the required position. The gripper cylinder 63 retracts, so that the first gripper 631 and the second gripper 632 clamp the two opposite ends of the mask body 01. The lifting module 61 drives the clamped mask body 01 away from the carrier component 53. The rotating unit 62 drives the clamped mask body 01 to rotate 180°. The lifting module 61 drives the clamped mask body 01 to move closer to the carrier component 53, so that the clamped mask body 01 is positioned on the carrier component 53, which facilitates the double-sided film inspection of the mask body 01 and improves the inspection efficiency.

[0073] refer to Figure 7As shown, in this embodiment, the temporary storage mechanism 030 includes a temporary storage rack 71, several temporary storage plates 72 arranged in parallel on the temporary storage rack 71, and four temporary storage support parts 73 connected to the temporary storage plates 72. Each temporary storage support part 73 corresponds to a bottom corner of the mask plate body 01, and the temporary storage support part 73 cooperates with the bottom of the mask plate body 01. A fiber optic sensor 701 is installed on each temporary storage plate 72. The fiber optic sensor 701 is used to detect whether the mask plate body 01 is placed on the temporary storage plate. The storage plate 72 is equipped with a thermal element 702, which is used to detect the temperature of the mask body 01 placed on the corresponding storage plate 72 in real time to ensure that the temperature of the mask body 01 is within a specified range. In actual application, the robot arm 020 places the mask on the temporary support part 73, so that the temporary support part 73 respectively supports the bottom perimeter of the mask body 01. The fiber optic sensor 701 detects whether the mask body 01 is placed on the temporary support part 73. The mask body 01 is placed on the temporary storage plate 72 to facilitate the smooth handling of the mask body 01. The thermal element 702 is a thermistor. When the temperature of the mask body 01 reaches the specified range, the thermal stress of the mask body 01 is eliminated, and the robot arm 020 can smoothly grasp the mask body 01 after the thermal stress has been eliminated. The robot arm 020 can then place it into the detection device 040. The mask body 01 placed in the temporary storage mechanism 030 can be a mask body 01 that has been treated by the constant temperature cooling device 010 or a mask body 01 that has not been treated by the constant temperature cooling device 010. It can be a mask body 01 that has undergone thin film detection or a mask body 01 that has not undergone thin film detection. This means that the loading and unloading processes of the constant temperature cooling device 010 and the detection device 040 need to be completed by the robot arm 020 and the temporary storage mechanism 030. This allows for the temporary storage of mask bodies 01 under various working conditions, simplifies the handling process of the mask body 01, and facilitates the handling by the robot arm 020.

[0074] refer to Figure 8 , 14As shown, in this embodiment, the constant temperature cooling device 010 includes a housing 1 with a mounting cavity 101, a sealing plate 2, a temperature sensor 3, and a constant temperature driving mechanism 4 for driving the sealing plate 2 to close the opening of the mounting cavity 101. The mounting cavity 101 is used to place the mask plate body 01. A first channel is provided inside the housing 1 surrounding the mounting cavity 101. The housing 1 is provided with a first inlet 110 and a first outlet 120 communicating with the first channel. The temperature sensor 3 is used to detect the temperature of the mounting cavity 101. In actual application, a bracket for storing the mask plate body 01 is installed inside the mounting cavity 101. The robot arm 020 places the mask plate body 01 on the bracket. When constant temperature processing of the mask plate body 01 is required, the robot arm 020 moves the temporary storage mechanism 030. The mask body 01, designated as the first process, is placed inside the mounting cavity 101. The constant temperature drive mechanism 4 drives the sealing plate 2 to close the opening of the mounting cavity 101. Fluid is introduced through the first inlet 110, flows in the first channel and flows out along the first outlet 120. Since the first channel is arranged around the mounting cavity 101, it effectively increases the contact area of ​​the fluid, improves the heat exchange efficiency, and prevents uneven cooling. When the temperature of the mounting cavity 101 reaches the predetermined value, the mask body 01 is placed at a constant temperature, which can smoothly control the ambient temperature inside the mounting cavity 101 and help stabilize the quality of the mask body 01. After the constant temperature treatment is completed, the constant temperature drive mechanism 4 moves the sealing plate 2 away from the opening of the mounting cavity 101, and the robot arm 020 removes the mask body 01, designated as the first process, from the mounting cavity 101.

[0075] refer to Figure 9 As shown, in this embodiment, the sealing plate 2 is provided with a second channel 200 corresponding to the opening of the mounting cavity 101. A second inlet 210 and a second outlet 220 are respectively provided at both ends of the second channel 200. The second outlet 220 is connected to the first inlet 110 via a pipeline. In practical applications, when constant temperature treatment of the mask plate body 01 is required, the mask plate body 01 is placed inside the mounting cavity 101, and the constant temperature driving mechanism 4 drives the sealing plate 2 to close the opening of the mounting cavity 101, so that the second channel 200 covers the opening of the mounting cavity 101. (Reference) Figure 9As shown, the fluid is introduced into the second channel 200 through the second inlet 210, and flows out through the first outlet 120 after passing through the second outlet 220, the first inlet 110, and the first channel in sequence. When the temperature of the mounting cavity 101 reaches the predetermined value, the mask plate body 01 is placed at a constant temperature, so that the fluid is introduced into the same position and flows smoothly between the first channel and the second channel 200, which makes full use of the fluid, saves resources, and avoids fluid waste. The first channel and the second channel 200 provide constant temperature control for the mask plate body 01 in all directions, which facilitates uniform cooling of the mounting cavity 101. Specifically, the second outlet 220 and the first inlet 110 are connected by a telescopic tube. When the sealing plate 2 is raised and lowered, the telescopic tube expands and contracts synchronously to ensure smooth flow of the fluid between the second outlet 220 and the first inlet 110.

[0076] refer to Figure 9 As shown, the sealing plate 2 includes a sealing main plate 201 and at least two sealing mounting plates 202 that are sealed to both ends of the sealing main plate 201. The second channel 200 includes a sealing flow section 2001 and a sealing guide section 2002. The sealing flow section 2001 is arranged parallel to the sealing main plate 201 and extends through both ends. The sealing guide section 2002 is disposed on the sealing mounting plate 202. The sealing guide section 2002 alternately connects to the same end of two adjacent sealing flow sections 2001. The second inlet 210 and the second outlet 220 are respectively provided with sealing flow sections 2001 located at both ends. In actual application, the fluid flows alternately along the sealing flow section 2001 and the sealing guide section 2002. The sealing mounting plate 202 is equipped with a fourth sealing... The fourth sealing ring seals the connection between the sealing flow section 2001 and the sealing guide section 2002, preventing fluid leakage along the gap between them. Specifically, the sealing main plate 201 and the sealing mounting plate 202 are detachably connected. When fluid leaks inside the second channel 200, the second inlet 210 and the second outlet 220 are closed, isolating the fluid passage within the second channel 200. This facilitates independent maintenance of the second channel 200. By separating the sealing main plate 201 from the sealing mounting plate 202, the fourth sealing ring, the sealing flow section 2001, or the sealing guide section 2002 at the corresponding positions can be easily replaced or repaired, ensuring the sealing performance inside the second channel 200 and extending the service life of the sealing plate 2.

[0077] refer to Figure 10As shown, in this embodiment, the housing 1 includes a first splicing plate 11, a second splicing plate 12, a third splicing plate 13, and a multi-way reversing valve 14. The first splicing plate 11 is connected to the second splicing plate 12 at both ends, and the first splicing plate 11 and the second splicing plate 12 are connected to the third splicing plate 13 at both the top and bottom ends. The inner sides of the first splicing plate 11, the second splicing plate 12, and the third splicing plate 13 form an installation cavity 101. The first splicing plate 11, the second splicing plate 12, and the third splicing plate 13 are respectively provided with a first splicing channel 111, a second splicing channel 121, and a third splicing channel 131. The first splicing channel 111, the second splicing channel 121, and the third splicing channel 131 are all connected to the multi-way reversing valve 14 at both ends. The first inlet 110 is located in the multi-way reversing valve 14, and the first outlet 120 is located in the second splicing channel 121. The first outlet 120 is equipped with a one-way valve.

[0078] In practical applications, fluid is introduced into the multi-way reversing valve 14 along the first inlet 110. When the one-way valve is closed, the fluid actually passes through the first splicing channel 111, the second splicing channel 121 and the third splicing channel 131 in sequence. After flowing out of the third splicing channel 131, it flows back into the first splicing channel 111, thereby realizing the recycling of the fluid. When the one-way valve is open, the fluid is discharged along the first outlet 120.

[0079] refer to Figure 11 As shown, the first splicing plate 11 includes a first main plate 1101 and at least two first mounting plates 1102 sealed to both ends of the first main plate 1101. The first splicing channel 111 includes a first flow section 1111 and a first guide section 1112. The first flow section 1111 is arranged parallel to the first main plate 1101 and extends through both ends. The first guide section 1112 is disposed on the first mounting plate 1102. The first guide section 1112 alternately connects to the same end of two adjacent first flow sections 1111. In practical applications, fluid alternately flows along the first flow section 1111 and the first guide section 1112. The first mounting plate 1102 is equipped with a first sealing ring, which seals the connection between the first flow section 1111 and the first guide section 1112 to prevent fluid leakage along the gap between the first flow section 1111 and the first guide section 1112. (Refer to...) Figure 15As shown, specifically, the first motherboard 1101 and the first mounting plate 1102 are detachably connected. When the fluid inside the first splicing channel 111 leaks, the two ends of the first splicing channel 111 are closed by the multi-way reversing valve 14, and the passage of the fluid inside the first splicing channel 111 is isolated, which facilitates independent maintenance of the first splicing channel 111. By separating the first motherboard 1101 from the first mounting plate 1102, the first sealing ring, the first flow part 1111, or the first flow guide part 1112 at the corresponding position can be easily replaced or repaired, which helps to ensure the sealing performance inside the first splicing channel 111 and improve the service life of the first splicing plate 11.

[0080] refer to Figure 12 As shown, the second splicing plate 12 includes a second main plate 1201 and at least two second mounting plates 1202 sealed to both ends of the second main plate 1201. The second splicing channel 121 includes a second flow section 1211 and a second guide section 1212. The second flow section 1211 is arranged parallel to the second main plate 1201 and extends through both ends. The second guide section 1212 is disposed on the second mounting plate 1202. The second guide section 1212 alternately connects to the same end of two adjacent second flow sections 1211. In practical applications, fluid alternately flows along the second flow section 1211 and the second guide section 1212. The second mounting plate 1202 is equipped with a second sealing ring, which seals the connection between the second flow section 1211 and the second guide section 1212 to prevent fluid leakage along the gap between the second flow section 1211 and the second guide section 1212. For details, refer to [reference needed]. Figure 14 As shown, the second main board 1201 and the second mounting plate 1202 are detachably connected. When the fluid inside the second splicing channel 121 leaks, the two ends of the second splicing channel 121 are closed by the multi-way reversing valve 14, and the passage of the fluid inside the second splicing channel 121 is isolated, which facilitates independent maintenance of the second splicing channel 121. By separating the second main board 1201 from the second mounting plate 1202, the second sealing ring, the second flow part 1211 or the second flow guide part 1212 at the corresponding position can be easily replaced or repaired, which helps to ensure the sealing performance inside the second splicing channel 121 and improve the service life of the second splicing plate 12.

[0081] refer to Figure 16As shown, the third splicing plate 13 includes a third main plate 1301 and at least two third mounting plates 1302 sealed to both ends of the third main plate 1301. The third splicing channel 131 includes a third flow section 1311 and a third guide section 1312. The third flow section 1311 is arranged parallel to the third main plate 1301 and extends through both ends. The third guide section 1312 is disposed on the third mounting plate 1302. The third guide section 1312 alternately connects to the same end of two adjacent third flow sections 1311. In practical applications, fluid alternately flows along the third flow section 1311 and the third guide section 1312. The third mounting plate 1302 is equipped with a third sealing ring, which seals the third flow section 1311 and the third guide section 1312. At the connection of the flow guide 1312, fluid leakage is prevented from occurring along the gap between the third flow section 1311 and the third flow guide 1312. Specifically, the third main board 1301 and the third mounting plate 1302 are detachably connected. When fluid leaks inside the third splicing channel 131, the two ends of the third splicing channel 131 are closed by the multi-way reversing valve 14, and the passage of fluid inside the third splicing channel 131 is isolated, which facilitates independent maintenance of the third splicing channel 131. The third main board 1301 and the third mounting plate 1302 can be separated to easily replace or repair the third sealing ring, the third flow section 1311 or the third flow guide 1312 at the corresponding position, which helps to ensure the sealing performance inside the third splicing channel 131 and improve the service life of the third splicing plate 13.

[0082] refer to Figure 17 As shown, in this embodiment, the constant temperature drive mechanism 4 includes a constant temperature lifting unit 41 and a constant temperature opening and closing module 42. The constant temperature lifting unit 41 is driven to connect with the constant temperature opening and closing module 42, and the constant temperature opening and closing module 42 is driven to connect with the sealing plate 2. A sealing ring 21 is provided on the side of the sealing plate 2 near the mounting cavity 101. In actual application, the constant temperature lifting unit 41 is installed on the housing 1. The constant temperature lifting unit 41 adopts a screw motor module, hydraulic cylinder or electric cylinder. When it is necessary to seal the opening of the mounting cavity 101, the constant temperature lifting unit 41 drives the constant temperature opening and closing module 42 to move upward. The constant temperature opening and closing module 42 drives the sealing plate 2 to move towards the mounting cavity 101, so that the sealing plate 2 covers the opening of the mounting cavity 101, and the sealing ring 21 abuts against the outer peripheral edge of the opening end of the mounting cavity 101. The sealing ring 21 smoothly closes the gap between the mounting cavity 101 and the sealing plate 2, enhances the sealing performance, and facilitates stable adjustment of the temperature change in the mounting cavity 101.

[0083] refer to Figure 18 , 20As shown, the thermostatic opening and closing module 42 includes a thermostatic opening and closing frame 421 and a thermostatic driving unit 422 connected to the thermostatic opening and closing frame 421. The thermostatic opening and closing frame 421 is drivenly connected to the thermostatic lifting unit 41. The sealing plate 2 is slidably connected to the thermostatic opening and closing frame 421. The thermostatic driving unit 422 is drivenly connected to the sealing plate 2. The thermostatic driving unit 422 drives the sealing plate 2 to move closer to or away from the mounting cavity 101. In practical applications, the thermostatic driving unit 422 is a cylinder, electric cylinder, or hydraulic cylinder. The thermostatic lifting unit 41 drives the thermostatic opening and closing module 42 downward. The sealing plate 2 is moved to the end away from the mounting cavity 101 by the thermostatic opening and closing module 42. Then, the mask plate body 01 is placed into the mounting cavity 101. After the mask plate body 01 is placed, the thermostatic lifting unit 41 moves the thermostatic opening and closing module 42 upward to the required position. The thermostatic opening and closing module 42 moves the sealing plate 2 into the mounting cavity 101, so that the sealing ring 21 abuts against the outer peripheral edge of the opening end of the mounting cavity 101, so that the sealing ring 21 can smoothly close the gap between the mounting cavity 101 and the sealing plate 2, and ensure the sealing performance between the sealing plate 2 and the housing 1.

[0084] refer to Figure 18 , 19 As shown in Figure 20, the thermostatic opening and closing module 42 also includes a thermostatic cover 423 connected to the thermostatic opening and closing frame 421. The thermostatic opening and closing frame 421, the thermostatic driving unit 422, and the sealing plate 2 are located inside the thermostatic cover 423. At least two sealing fans 4211 are installed on the side of the thermostatic opening and closing frame 421 away from the sealing plate 2. The bottom pipe of the thermostatic cover 423 is connected to a sealing dust exhaust pipe 4231. The sealing fans 4211 are used for negative pressure adsorption between the thermostatic cover 423, the thermostatic opening and closing frame 421, and the sealing plate 2. Dust is discharged along the sealed dust exhaust pipe 4231. In actual application, when the sealing plate 2 is removed from the installation cavity 101, the sealing fan 4211 is started. The sealing fan 4211 adsorbs the dust between the constant temperature cover 423, the constant temperature opening and closing frame 421 and the sealing plate 2 through negative pressure and discharges it along the sealed dust exhaust pipe 4231. This facilitates cleaning the dust between the constant temperature cover 423, the constant temperature opening and closing frame 421 and the sealing plate 2, and ensures that the sealing plate 2 and the installation cavity 101 are in a clean and tidy working environment, thereby improving the processing quality of the mask plate body 01.

[0085] The above description is merely a preferred embodiment of the present utility model and is not intended to limit the present utility model in any way. Although the present utility model has been disclosed above with reference to a preferred embodiment, it is not intended to limit the present utility model. Any person skilled in the art can make some changes or modifications to the above-disclosed technical content to create equivalent embodiments without departing from the scope of the present utility model. Any simple modifications, equivalent changes, and modifications made to the above embodiments based on the present utility model without departing from the scope of the present utility model shall fall within the scope of the present utility model.

Claims

1. A mask temporary storage and maintenance apparatus, characterized by, The device includes a constant temperature cooling device (010) for constant temperature treatment of the mask body (01), a robot arm (020) for gripping or placing the mask body (01), a temporary storage mechanism (030) for storing the mask body (01) and detecting the temperature of each mask body (01) in real time, and a detection device (040) for performing thin film detection on the mask body (01). When the robot arm (020) places the mask body (01) in the temporary storage mechanism (030), it marks the mask body (01) as a first process, a second process, or a third process. The robot arm (020) first identifies the mask body (01) in the first process, the second process, or the third process, and then grips the corresponding mask body (01).

2. The reticle temporary storage and maintenance apparatus of claim 1, wherein, The detection device (040) includes a detection frame (51), an adjustment platform (52) mounted on the detection frame (51), a support component (53) drivenly connected to the adjustment platform (52), and a detection component (54). The adjustment platform (52) is used to drive the support component (53) to rotate and move along the X-axis or Y-axis. The support component (53) is used to position the mask body (01). The detection component (54) is used to perform thin film detection on the mask body (01).

3. The reticle temporary storage and maintenance apparatus of claim 2, wherein, The support assembly (53) includes a support frame (531) drivenly connected to the adjustment platform (52) and several support members (532) installed on the support frame (531). The support member (532) is provided with a first fitting part (5321) and a second fitting part (5322). A notch is formed between the first fitting part (5321) and the second fitting part (5322) to cooperate with the corner of the circumferential direction of the mask body (01). The first fitting part (5321) and the second fitting part (5322) respectively abut against two adjacent sides of the mask body (01). The detection device (040) also includes several capture cameras (55), each of which corresponds to a carrier (532). The capture cameras (55) are used to acquire the position and angle information of the notch.

4. The reticle temporary storage and maintenance apparatus of claim 2, wherein, The detection assembly (54) includes a first support rod (541) and a second support rod (542) connected to the detection frame (51), a thin film detection element (543) and a reflector (544) respectively installed on the first support rod (541) and the second support rod (542), and a backlight source (545) installed on the support frame (531). The thin film detection element (543) corresponds to the reflector (544). When the mask plate body (01) is positioned on the support assembly (53), it is located above the backlight source so that the backlight source can smoothly provide supplementary light to the mask plate body (01).

5. The reticle temporary storage and maintenance apparatus of claim 1, wherein, The detection device (040) further includes a flipping mechanism (6), which includes a lifting module (61), a rotating unit (62) driven and connected to the lifting module (61), and a gripper cylinder (63) driven and connected to the rotating unit (62). The two output ends of the gripper cylinder (63) are respectively connected to a first gripper (631) and a second gripper (632) that are parallel to each other.

6. The reticle temporary storage and maintenance apparatus of claim 1, wherein, The temporary storage mechanism (030) includes a temporary storage rack (71), several temporary storage plates (72) installed side by side on the temporary storage rack (71), and several temporary storage support parts (73) connected to the temporary storage plates (72). Each temporary storage support part (73) corresponds to a bottom corner of the mask body (01). The temporary storage support part (73) cooperates with the bottom of the mask body (01). The temporary storage plate (72) is equipped with an optical fiber sensor (701). The optical fiber sensor (701) is used to detect whether the mask body (01) is placed on the temporary storage plate (72). The temporary storage plate (72) is equipped with a thermal element (702). The thermal element (702) is used to detect the temperature of the mask body (01) placed on the corresponding temporary storage plate (72) in real time to ensure that the temperature of the mask body (01) is within a specified range.

7. The reticle temporary storage and maintenance apparatus of claim 1, wherein, The constant temperature cooling device (010) includes a box (1) with a mounting cavity (101), a sealing plate (2), a temperature sensor (3), and a constant temperature driving mechanism (4) for driving the sealing plate (2) to close the opening of the mounting cavity (101). The mounting cavity (101) is used to place the mask plate body (01). The box (1) is provided with a first channel surrounding the mounting cavity (101). The box (1) is provided with a first inlet (110) and a first outlet (120) communicating with the first channel. The temperature sensor (3) is used to detect the temperature of the mounting cavity (101).

8. The reticle temporary storage and maintenance apparatus of claim 7, wherein, The sealing plate (2) is provided with a second channel (200) corresponding to the opening of the mounting cavity (101). The second channel (200) is provided with a second inlet (210) and a second outlet (220) at both ends. The second outlet (220) is connected to the first inlet (110) pipeline. The sealing plate (2) includes a sealing main plate (201) and at least two sealing mounting plates (202) that are sealed to both ends of the sealing main plate (201). The second channel (200) includes a sealing flow section (2001) and a sealing guide section (2002). The sealing flow section (2001) is arranged parallel to the sealing main plate (201) and extends through both ends. The sealing guide section (2002) is arranged on the sealing mounting plate (202). The sealing guide section (2002) alternately connects to the same end of two adjacent sealing flow sections (2001). The second inlet (210) and the second outlet (220) are respectively provided with sealing flow sections (2001) located at both ends.

9. The reticle temporary storage and maintenance apparatus of claim 7, wherein, The housing (1) includes a first splicing plate (11), a second splicing plate (12), a third splicing plate (13), and a multi-way reversing valve (14). The first splicing plate (11) is connected to the second splicing plate (12) at both ends, and the first splicing plate (11) and the second splicing plate (12) are connected to the third splicing plate (13) at both the top and bottom ends. The inner sides of the first splicing plate (11), the second splicing plate (12), and the third splicing plate (13) form an installation cavity (101). The first splicing plate (11), the second splicing plate (12), and the third splicing plate (13) form an installation cavity (101). The plate (12) and the third splicing plate (13) are respectively provided with a first splicing channel (111), a second splicing channel (121) and a third splicing channel (131). The first splicing channel (111), the second splicing channel (121) and the third splicing channel (131) are all connected to a multi-way reversing valve (14) at both ends. The first inlet (110) is located in the multi-way reversing valve (14), and the first outlet (120) is located in the second splicing channel (121). A check valve is installed in the first outlet (120). When the one-way valve is closed, the fluid flows into the multi-way reversing valve (14) along the first inlet (110) and circulates sequentially between the first splicing channel (111), the second splicing channel (121) and the third splicing channel (131). When the one-way valve is open, the fluid is discharged along the first outlet (120). The first splicing plate (11) includes a first main board (1101) and at least two first mounting plates (1102) sealed and connected to both ends of the first main board (1101). The first splicing channel (111) includes a first flow section (1111) and a first guide section (1112). The first flow section (1111) is arranged parallel to the first main board (1101) and extends through both ends. The first guide section (1112) is disposed on the first mounting plate (1102). The first guide section (1112) alternately connects the same end of two adjacent first flow sections (1111). The second splicing plate (12) includes a second main board (1201) and at least two second mounting plates (1202) sealed and connected to both ends of the second main board (1201). The second splicing channel (121) includes a second flow section (1211) and a second guide section (1212). The second flow section (1211) is arranged parallel to the second main board (1201) and extends through both ends. The second guide section (1212) is arranged on the second mounting plate (1202). The second guide section (1212) alternately connects the same end of two adjacent second flow sections (1211). The third splicing plate (13) includes a third main board (1301) and at least two third mounting plates (1302) sealed and connected to both ends of the third main board (1301). The third splicing channel (131) includes a third flow section (1311) and a third guide section (1312). The third flow section (1311) is arranged parallel to the third main board (1301) and extends through both ends. The third guide section (1312) is arranged on the third mounting plate (1302). The third guide section (1312) alternately connects the same end of two adjacent third flow sections (1311).

10. The reticle temporary storage and maintenance apparatus of claim 9, wherein, The constant temperature drive mechanism (4) includes a constant temperature lifting unit (41) and a constant temperature opening and closing module (42). The constant temperature lifting unit (41) is driven to the constant temperature opening and closing module (42). The constant temperature opening and closing module (42) is driven to the sealing plate (2). A sealing ring (21) is provided on the side of the sealing plate (2) near the mounting cavity (101). The thermostatic opening and closing module (42) includes a thermostatic opening and closing frame (421) and a thermostatic driving unit (422) connected to the thermostatic opening and closing frame (421). The thermostatic opening and closing frame (421) is driven to connect with the thermostatic lifting unit (41). The sealing plate (2) is slidably connected to the thermostatic opening and closing frame (421). The thermostatic driving unit (422) is driven to connect with the sealing plate (2). The thermostatic driving unit (422) drives the sealing plate (2) to move closer to or away from the mounting cavity (101). The thermostatic opening and closing module (42) also includes a thermostatic cover (423) connected to the thermostatic opening and closing frame (421). The thermostatic opening and closing frame (421), the thermostatic drive unit (422) and the sealing plate (2) are located inside the thermostatic cover (423). At least two sealing fans (4211) are installed on the side of the thermostatic opening and closing frame (421) away from the sealing plate (2). The bottom pipe of the thermostatic cover (423) is connected to a sealing dust exhaust pipe (4231). The sealing fan (4211) is used to adsorb dust between the constant temperature cover (423), the constant temperature opening and closing frame (421) and the sealing plate (2) under negative pressure and discharge it along the sealed dust discharge pipe (4231).

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