Silicon wafer platform positioning device

Abstract

The utility model relates to the field of silicon wafer platform positioning, in particular to a silicon wafer platform positioning device, which comprises a bottom plate, an adjusting device, a top plate and a silicon wafer platform, the plurality of adjusting devices are fixed between the top plate and the bottom plate in a circumferential array and used for adjusting the height of the top plate, and the top plate is provided with a silicon wafer platform used for placing silicon wafers; the adjusting device comprises a base, an adjusting seat is arranged above the base, a spring pull rod is arranged on the base, one end of the spring pull rod is arranged in the adjusting seat, a spring is arranged on the periphery of the spring pull rod and used for pulling the adjusting seat to the base, and an adjusting screw is arranged on the adjusting seat and used for roughly adjusting the height of the top plate. A piezoelectric ceramic motor is further arranged in the base, the output end of the piezoelectric ceramic motor is connected with the bottom end of the adjusting screw, and the piezoelectric ceramic motor is used for finely adjusting the height of the top plate.

Description

Technical Field

[0001] This utility model relates to the field of silicon wafer platform positioning, and specifically to a silicon wafer platform positioning device. Background Technology

[0002] The silicon wafer positioning platform or worktable is a key part of a traditional photolithography system. The conventional setup of the silicon wafer positioning device is to position the platform by setting several adjustment points around the platform where the silicon wafer is placed. The height of the adjustment points is usually determined by the combination of screws and set screws. The screws are pulled down and the set screws are pushed up, ensuring that both the screws and set screws have sufficient preload. The height of the adjustment point is determined by the extension length of the set screws.

[0003] However, this conventional silicon wafer positioning device is only suitable for applications with low precision. When the set screw rotates in the threaded hole, it will be subject to friction between the threads. This friction will cause crawling and discontinuous rotational motion. In addition, there is a gap between the external thread of the set screw and the threaded hole. This gap will disappear under the action of preload, resulting in a lower height after the preload is applied, thus leading to lower precision. Utility Model Content

[0004] The purpose of this invention is to provide a silicon wafer platform positioning device that uses an adjusting screw as the upward lifting component, a spring as the downward pulling component, an adjusting screw as the coarse adjustment component, and a piezoelectric ceramic motor as the fine adjustment component, which helps to improve positioning accuracy and reduce adjustment workload.

[0005] To achieve the above objectives, this utility model provides the following technical solution:

[0006] A silicon wafer platform positioning device includes: a base plate, adjusting devices, a top plate, and a silicon wafer platform; a plurality of the adjusting devices are fixed in a circular array between the top plate and the base plate for adjusting the height of the top plate, and the top plate is provided with a silicon wafer platform for placing silicon wafers;

[0007] The adjustment device includes a base, an adjustment seat is provided on the top of the base, a spring rod is provided on the base, one end of the spring rod is provided inside the adjustment seat, and a spring is provided around the spring rod to pull the adjustment seat toward the base. An adjustment screw is provided on the adjustment seat for coarse adjustment of the top plate height. A piezoelectric ceramic motor is also provided inside the base, and the output end of the piezoelectric ceramic motor is connected to the bottom end of the adjustment screw for fine adjustment of the top plate height.

[0008] Preferably, the base is further provided with a motor fixing plate for clamping the piezoelectric ceramic motor.

[0009] Preferably, in order to protect the piezoelectric ceramic motor from damage by the adjusting screw, a contact block is also provided between the output end of the piezoelectric ceramic motor and the bottom end of the adjusting screw.

[0010] Preferably, the adjusting seat includes a first connecting part, a second connecting part, and a third connecting part. The first connecting part and the third connecting part are respectively disposed on both sides of the second connecting part. The first connecting part is used to accommodate one end of the spring rod, the second connecting part is used to set the adjusting screw, and the third connecting part is used to engage and fix with the base.

[0011] Preferably, the first connecting part and the second connecting part are connected by a first thin sheet, and the second connecting part and the third connecting part are connected by a second thin sheet.

[0012] Preferably, the second connecting part is provided with a threaded hole for accommodating the adjusting screw, and a locking nut is provided outside the adjusting screw.

[0013] The beneficial effects of this utility model are:

[0014] 1) This application uses an adjusting screw as the upward lifting component and a spring as the downward pulling component. It also uses an adjusting screw as the coarse adjustment component and a piezoelectric ceramic motor as the fine adjustment component. Compared with the combination of screw and set screw, this application is more conducive to improving positioning accuracy.

[0015] 2) Coarse adjustment is achieved by using an adjusting screw. The height can be adjusted by simply turning the adjusting screw, which is suitable for a wide range of adjustments. The requirements for the machining accuracy of each mating part are not high, which can save costs. At the same time, a piezoelectric ceramic motor is used as a fine adjustment component, which makes up for the shortcomings of the adjusting screw in terms of height adjustment accuracy. Furthermore, the piezoelectric ceramic motor can work directly in a vacuum environment, which is beneficial for working with an electron scanning microscope.

[0016] 3) The adjustment seat of this application includes a first connecting part, a second connecting part and a third connecting part. The first connecting part and the second connecting part are connected by a first thin plate, and the second connecting part and the third connecting part are connected by a second thin plate. The arrangement of the first thin plate and the second thin plate reduces the mechanical properties of the material, so that the adjustment seat is elastic at the first thin plate and the second thin plate. When the height of one of the multiple adjustment devices changes, the elastic deformation of the first thin plate can quickly adjust the angle to achieve the function of cooperating with the other adjustment devices. The elastic deformation of the second thin plate can quickly adjust the relative position of the adjustment seat and the base. Attached Figure Description

[0017] The accompanying drawings are provided to further illustrate the present invention and form part of the specification. They are used together with the embodiments of the present invention to explain the present invention, but do not constitute a limitation thereof. In the drawings:

[0018] Figure 1 This is a three-dimensional structural schematic diagram of the present invention;

[0019] Figure 2 This is a three-dimensional structural diagram of the adjusting device of this utility model;

[0020] Figure 3 This is an exploded view of the adjusting device of this utility model;

[0021] Figure 4 This is the formal drawing of the adjustment device of this utility model;

[0022] Figure 5 It is along Figure 4 A cross-sectional view along line AA in the middle;

[0023] Figure 6 yes Figure 5 A sectional view of the adjusting seat in a sectional view;

[0024] The markings in the diagram are as follows: 1 is the base plate, 2 is the adjustment device, 3 is the top plate, 4 is the silicon wafer platform, 5 is the silicon wafer, 21 is the base, 22 is the adjustment seat, 23 is the piezoelectric ceramic motor, 24 is the adjustment screw, 25 is the lock nut, 26 is the motor mounting plate, 27 is the spring, 28 is the spring rod, 29 is the contact block, 221 is the first thin sheet, 222 is the second thin sheet, 223 is the threaded hole, 224 is the first connecting part, 225 is the second connecting part, and 226 is the third connecting part. Detailed Implementation

[0025] like Figure 1-6 The silicon wafer platform positioning device shown includes: a base plate 1, an adjustment device 2, a top plate 3, and a silicon wafer platform 4.

[0026] Multiple adjustment devices 2 are fixed in a circular array between the top plate 1 and the bottom plate 3 to adjust the height of the top plate 3. A silicon wafer platform 4 for placing silicon wafers 5 is provided on the top plate 3.

[0027] The adjustment device 2 includes a base 21, an adjustment seat 22 is provided above the base 21, a spring rod 28 is provided on the base 21, one end of the spring rod 28 is provided inside the adjustment seat 22, and a spring 27 is provided around the spring rod 28 to pull the adjustment seat 22 toward the base 21. An adjustment screw 24 is provided on the adjustment seat 22 for coarse adjustment of the height of the top plate 3. A piezoelectric ceramic motor 23 is also provided inside the base 21 and is fixed to the base 21 by screws. A motor fixing plate 26 is also provided on the base 21 for clamping the piezoelectric ceramic motor 23 and is also fixed to the base 21 by screws. The output end of the piezoelectric ceramic motor 23 is connected to the bottom end of the adjustment screw 24 for fine adjustment of the height of the top plate 3.

[0028] In one specific embodiment, in order to protect the piezoelectric ceramic motor 23 from damage by the adjusting screw 24, a contact block 29 is also provided between the output end of the piezoelectric ceramic motor 23 and the bottom end of the adjusting screw 24.

[0029] The adjusting seat 22 includes a first connecting part 224, a second connecting part 225, and a third connecting part 226. The first connecting part 224 and the third connecting part 226 are respectively disposed on both sides of the second connecting part 225. The first connecting part 224 is used to accommodate one end of the spring rod 28, the second connecting part 225 is used to install the adjusting screw 24, and the third connecting part 226 is used to engage and fix with the base 21. The first connecting part 224 and the second connecting part 225 are connected by a first thin plate 221, and the second connecting part 225 and the third connecting part 226 are connected by a second thin plate 222. The second connecting part 225 is provided with a threaded hole 223 for accommodating the adjusting screw 24, and a locking nut 25 is provided outside the adjusting screw 24.

[0030] The base 21 of the adjusting device 2 has a through hole at the bottom for connecting with the base plate 1 by screws. The adjusting seat 22 of the adjusting device 2 also has a through hole for connecting with the top plate 3 by screws.

[0031] In one specific embodiment, the number of adjustment devices 2 is 3.

[0032] In one specific embodiment, a protrusion is also provided below the base 21 for adjusting the positioning of the device 2 on the base plate 1.

[0033] The working principle of this utility model is as follows: Tightening the adjusting screw 24 causes the adjusting screw 24 to rotate in the threaded hole 223 of the adjusting seat 22, which changes the extension length of the adjusting screw 24 in the adjusting seat 22, thereby adjusting the height of the top plate 3 and indirectly adjusting the height of the silicon wafer platform 4. Then, the height of the adjusting screw 24 is finely adjusted by the piezoelectric ceramic motor 23. When the length of the adjusting screw 24 in the adjusting seat 22 increases, the second thin plate 222 undergoes slight elastic deformation. At the same time, the spring 27 pulls the adjusting seat 22 towards the base 21 through the spring rod 28, causing the first thin plate 221 to undergo slight deformation. Since the adjusting device 2 is connected to the base plate 1 and the top plate 3, the entire device is linked together, and ultimately the height and angle of the silicon wafer 5 will change. By tightening the locking nut 25, the adjusting screw can be stopped from moving.

[0034] The above description is merely a preferred embodiment of the present utility model and is not intended to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A silicon wafer stage positioning apparatus, comprising: include: Base plate, adjustment device, top plate, and silicon wafer platform; Multiple adjustment devices are fixed in a circular array between the top plate and the bottom plate to adjust the height of the top plate, which is provided with a silicon wafer platform for placing silicon wafers. The adjustment device includes a base, an adjustment seat is provided on the top of the base, a spring rod is provided on the base, one end of the spring rod is provided inside the adjustment seat, and a spring is provided around the spring rod to pull the adjustment seat toward the base. An adjustment screw is provided on the adjustment seat for coarse adjustment of the top plate height. A piezoelectric ceramic motor is also provided inside the base, and the output end of the piezoelectric ceramic motor is connected to the bottom end of the adjustment screw for fine adjustment of the top plate height.

2. The silicon platform positioning apparatus of claim 1, wherein: The base is also provided with a motor fixing plate for clamping the piezoelectric ceramic motor.

3. The silicon platform positioning apparatus of claim 1, wherein: A contact block is also provided between the output end of the piezoelectric ceramic motor and the bottom end of the adjusting screw.

4. The silicon platform positioning apparatus of claim 1, wherein: The adjusting seat includes a first connecting part, a second connecting part, and a third connecting part. The first connecting part and the third connecting part are respectively disposed on both sides of the second connecting part. The first connecting part is used to accommodate one end of the spring rod, the second connecting part is used to set the adjusting screw, and the third connecting part is used to engage and fix with the base.

5. The silicon platform positioning apparatus of claim 4, wherein: The first connecting part and the second connecting part are connected by a first thin sheet, and the second connecting part and the third connecting part are connected by a second thin sheet.

6. The silicon platform positioning apparatus of claim 4, wherein: The second connecting part is provided with a threaded hole for accommodating the adjusting screw, and a locking nut is provided on the outside of the adjusting screw.

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