Exposure machine conveying platform with double-station alternate exposure

Abstract

The utility model discloses an exposure machine conveying platform with a double-station alternate exposure function, which relates to the technical field of exposure machines and comprises a support frame arranged on a support plate and fixedly connected with the support plate; the supporting column is fixedly connected with the supporting frame; the supporting cover is fixedly connected with the supporting column; the moving mechanism is arranged on the supporting frame and is used for moving an exposure object; the clamping mechanism is arranged on the moving mechanism and is used for clamping and fixing an exposure object; the rubber pad is used for protecting the clamped object; the clamping plate is arranged on the rubber pad and is fixedly connected with the rubber pad; by arranging the moving mechanism, cross moving exposure of an exposure object is realized, and the use efficiency of the exposure machine is improved; by arranging the clamping mechanism, the exposure objects with different sizes can be clamped and fixed, so that the exposure machine is more flexible in use.

Description

Technical Field

[0001] This utility model relates to the field of exposure machine technology, and in particular to an exposure machine conveying platform with dual-station alternating exposure. Background Technology

[0002] An exposure machine, or simply "exposure machine," is a device that uses optical projection and photolithography to transfer designed patterns onto photoresist (photosensitive adhesive). It plays a crucial role in semiconductor manufacturing, precisely projecting circuit patterns onto the silicon wafer surface to provide pattern positioning for subsequent etching, ion implantation, and other process steps. The exposure machine's transport platform refers to the mechanical equipment used to transport and position materials within the exposure machine. Exposure machine transport platforms typically employ high-precision motion control technology to ensure accurate movement and positioning of materials during the exposure process.

[0003] In existing exposure machine transport platforms, the size of the substrate stage used is mostly fixed. However, the size of the substrate used in different scenarios is different. This means that different substrate stages are required for different substrates, which is troublesome and affects the operation of the exposure machine. Therefore, this needs to be improved. Utility Model Content

[0004] In view of the shortcomings of the existing technology, the purpose of this utility model is to provide an exposure machine conveyor platform with dual-station alternating exposure, which aims to solve the technical problem that the exposure machine conveyor platform is not conducive to fixing substrates of different sizes.

[0005] To achieve the above objectives, the present invention adopts the following technical solution:

[0006] An exposure machine conveyor platform with dual-station alternating exposure includes a support plate and a support frame, wherein the support frame is fixedly connected to the support plate; and further includes:

[0007] A support frame is mounted on the support plate and fixedly connected to the support plate;

[0008] The support column is fixedly connected to the support frame;

[0009] The support cover is fixedly connected to the support column;

[0010] A moving mechanism, mounted on the support frame, is used to move the object to be exposed;

[0011] A clamping mechanism, disposed on the moving mechanism, is used to clamp and fix the exposed object;

[0012] Rubber pads are used to protect the objects being held.

[0013] A clamping plate is disposed on the rubber pad and is fixedly connected to the rubber pad.

[0014] Preferably, the moving mechanism includes:

[0015] A movable frame is mounted on the support frame and fixedly connected to the support frame.

[0016] A movable motor is fixedly connected to the movable frame;

[0017] The movable shaft is fixedly connected to the output end of the movable motor and rotatably connected to the support frame.

[0018] A sliding component is disposed on the support plate.

[0019] Preferably, the sliding component includes:

[0020] A sliding groove is formed on the support plate;

[0021] There are two sliding blocks, which are evenly arranged in the sliding groove, slidably connected to the sliding groove, and threadedly connected to the moving shaft.

[0022] Preferably, the clamping mechanism includes:

[0023] A clamping frame is disposed on the sliding block and fixedly connected to the sliding block;

[0024] A clamping motor is fixedly connected to the clamping frame;

[0025] The clamping block is fixedly connected to the clamping frame;

[0026] The clamping shaft is fixedly connected to the output end of the clamping motor and rotatably connected to the clamping block;

[0027] A clamping disc is fixedly connected to the clamping shaft;

[0028] A rotating component is disposed on the clamping plate.

[0029] Preferably, the rotating component includes:

[0030] The first rotating shaft has multiple shafts, and the multiple first rotating shafts are evenly arranged on the clamping plate and fixedly connected to the clamping plate;

[0031] A rotating plate is rotatably connected to the first rotating shaft;

[0032] The second rotating shaft is disposed on the rotating plate and is rotatably connected to the rotating plate;

[0033] A transmission component is disposed on the clamping block.

[0034] Preferably, the transmission component includes:

[0035] A transmission groove is formed on the clamping block;

[0036] The transmission block is disposed in the transmission groove, slidably connected to the transmission groove, fixedly connected to the second rotating shaft, and also fixedly connected to the clamping plate.

[0037] Preferably, a clamping post is fixedly provided on the clamping block for supporting and placing the object to be exposed.

[0038] In summary, due to the adoption of the above technical solution, the beneficial effects of this utility model are:

[0039] By setting up a moving mechanism, the exposure of objects can be cross-moved, improving the efficiency of the exposure machine; by setting up a clamping mechanism, objects of different sizes can be clamped and fixed, making the exposure machine more flexible in use. Attached Figure Description

[0040] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0041] Figure 1 A three-dimensional structural schematic diagram of an exposure machine transport platform with dual-station alternating exposure is shown.

[0042] Figure 2 A three-dimensional cross-sectional view of an exposure machine transport platform with dual-station alternating exposure is shown.

[0043] Figure 3 An exploded three-dimensional view of an exposure machine transport platform with dual-station alternating exposure is shown.

[0044] Figure 4 An exploded view of the moving mechanism of an exposure machine transport platform with dual-station alternating exposure is shown.

[0045] Figure 5 An exploded view of the clamping mechanism of an exposure machine transport platform with dual-station alternating exposure is shown.

[0046] Legend:

[0047] 1. Support plate; 2. Support frame; 3. Support bracket; 4. Support column; 5. Support cover; 6. Rubber pad; 7. Clamping plate; 8. Moving frame; 9. Moving motor; 10. Moving shaft; 11. Sliding groove; 12. Sliding block; 13. Clamping frame; 14. Clamping motor; 15. Clamping block; 16. Clamping shaft; 17. Clamping disc; 18. First rotating shaft; 19. Rotating plate; 20. Second rotating shaft; 21. Transmission groove; 22. Transmission block; 23. Clamping column. Detailed Implementation

[0048] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of the present utility model.

[0049] In the description of this utility model, it should be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0050] It should be noted that when a component is described as "fixed to" another component, it can be directly on the other component or may have a component in between. When a component is considered "connected to" another component, it can be directly connected to the other component or may have a component in between. When a component is considered "set on" another component, it can be directly set on the other component or may have a component in between. The terms "vertical," "horizontal," "left," "right," and similar expressions used in this document are for illustrative purposes only.

[0051] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, "a plurality of" means two or more, unless otherwise explicitly specified.

[0052] Reference Figures 1 to 5 The present invention provides a further description of an embodiment of an exposure machine conveying platform with dual-station alternating exposure.

[0053] An exposure machine conveying platform with dual-station alternating exposure includes a support plate 1 and a support frame 2, with the support frame 2 fixedly connected to the support plate 1; it also includes: a support frame 3, disposed on the support plate 1 and fixedly connected to the support plate 1; a support column 4, fixedly connected to the support frame 3; a support cover 5, fixedly connected to the support column 4; a moving mechanism, disposed on the support frame 2, for moving the exposed object; a clamping mechanism, disposed on the moving mechanism, for clamping and fixing the exposed object; a rubber pad 6, for protecting the clamped object; and a clamping plate 7, disposed on the rubber pad 6 and fixedly connected to the rubber pad 6.

[0054] Reference Figure 4 In a preferred embodiment, the moving mechanism includes: a moving frame 8, which is disposed on the support frame 2 and fixedly connected to the support frame 2; a moving motor 9, which is fixedly connected to the moving frame 8; a moving shaft 10, which is fixedly connected to the output end of the moving motor 9 and rotatably connected to the support frame 2; and a sliding component, which is disposed on the support plate 1.

[0055] This configuration ensures that when the mobile motor 9 is running, it drives the mobile shaft 10, which is fixedly connected to the output end of the mobile motor 9, to rotate, thereby driving the sliding components to move.

[0056] Reference Figure 3 and Figure 4 In a preferred embodiment, the sliding component includes: a sliding groove 11, which is formed on the support plate 1; and two sliding blocks 12, which are evenly arranged in the sliding groove 11, slidably connected to the sliding groove 11, and threadedly connected to the moving shaft 10.

[0057] This configuration allows the sliding block 12, which is threadedly connected to the moving shaft 10, to rotate, causing the sliding block 12 to slide within the sliding groove 11, thereby moving the object to be exposed. When the object to be exposed moves directly below the support cover 5, the object is exposed. While the object is being exposed, the next object to be exposed can be clamped and fixed, thus enabling alternating exposure of the objects and improving the operating efficiency of the exposure machine.

[0058] Reference Figure 5 In a preferred embodiment, the clamping mechanism includes: a clamping frame 13, disposed on the sliding block 12 and fixedly connected to the sliding block 12; a clamping motor 14, fixedly connected to the clamping frame 13; a clamping block 15, fixedly connected to the clamping frame 13; a clamping shaft 16, fixedly connected to the output end of the clamping motor 14 and rotatably connected to the clamping block 15; a clamping disk 17, fixedly connected to the clamping shaft 16; and a rotating component disposed on the clamping disk 17.

[0059] This configuration ensures that when the clamping motor 14 is running, it drives the clamping shaft 16, which is fixedly connected to the output end of the clamping motor 14, to rotate, causing the clamping disk 17, which is fixedly connected to the clamping shaft 16, to rotate, thereby driving the rotating components to run.

[0060] Reference Figure 5 In a preferred embodiment, the rotating component includes: a plurality of first rotating shafts 18, which are evenly arranged on the clamping disk 17 and fixedly connected to the clamping disk 17; a rotating plate 19, which is rotatably connected to the first rotating shafts 18; a second rotating shaft 20, which is arranged on the rotating plate 19 and rotatably connected to the rotating plate 19; and a transmission component, which is arranged on the clamping block 15.

[0061] This configuration allows the rotating plate 19, which is rotatably connected to the first rotating shaft 18, to rotate and drive the transmission components.

[0062] Reference Figure 5 In a preferred embodiment, the transmission component includes: a transmission groove 21, which is formed on the clamping block 15; and a transmission block 22, which is disposed in the transmission groove 21, slidably connected to the transmission groove 21, fixedly connected to the second rotating shaft 20, and also fixedly connected to the clamping plate 7.

[0063] Reference Figure 5 In a preferred embodiment, a clamping post 23 is fixedly provided on the clamping block 15 for supporting and placing the exposed object.

[0064] This configuration allows the transmission block 22, which is fixedly connected to the second rotating shaft 20, to slide within the transmission groove 21. This causes the clamping plate 7, which is fixedly connected to the transmission block 22, to move towards the clamping post 23. This causes the rubber pad 6, which is fixedly connected to the clamping plate 7, to move until the rubber pad 6 contacts the surface of the object to be exposed, thereby clamping and fixing the object to be exposed.

[0065] Working principle: In use, the object to be exposed is first placed on the clamping post 23, and then the clamping motor 14 is started, which drives the clamping shaft 16 fixedly connected to the output end of the clamping motor 14 to rotate, so that the clamping disk 17 fixedly connected to the clamping shaft 16 rotates, thereby driving the rotating plate 19 fixedly connected to the first rotating shaft 18 to rotate, so that the transmission block 22 fixedly connected to the second rotating shaft 20 slides in the transmission groove 21, driving the clamping plate 7 fixedly connected to the transmission block 22 to move closer to the clamping post 23, so that the rubber pad 6 fixedly connected to the clamping plate 7 moves until the rubber pad 6 contacts the surface of the object to be exposed, thereby achieving the clamping and fixing of the object to be exposed.

[0066] Next, the moving motor 9 is started, which drives the moving shaft 10, which is fixedly connected to the output end of the moving motor 9, to rotate. This causes the sliding block 12, which is threadedly connected to the moving shaft 10, to rotate and slide within the sliding groove 11, thereby moving the object to be exposed. When the object to be exposed moves directly below the support cover 5, the object is exposed. While the object is being exposed, the next object to be exposed can be clamped and fixed, thus achieving alternating exposure of the objects and improving the operating efficiency of the exposure machine.

[0067] The above description of the embodiments enables those skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. An exposure machine conveying platform with double-station alternating exposure, comprising a support plate (1) and a support frame (2), wherein the support frame (2) is fixedly connected with the support plate (1); characterized in that, Also includes: A support frame (3) is mounted on the support plate (1) and is fixedly connected to the support plate (1); The support column (4) is fixedly connected to the support frame (3); The support cover (5) is fixedly connected to the support column (4); A moving mechanism, disposed on the support frame (2), is used to move the exposed object; A clamping mechanism, disposed on the moving mechanism, is used to clamp and fix the exposed object; Rubber pad (6) is used to protect the clamped object; A clamping plate (7) is disposed on the rubber pad (6) and is fixedly connected to the rubber pad (6).

2. The exposure machine transport platform with double-station alternate exposure according to claim 1, characterized in that, The mobile mechanism includes: A movable frame (8) is disposed on the support frame (2) and fixedly connected to the support frame (2); The movable motor (9) is fixedly connected to the movable frame (8); The movable shaft (10) is fixedly connected to the output end of the movable motor (9) and rotatably connected to the support frame (2); A sliding component is disposed on the support plate (1).

3. The exposure machine transport platform with double-station alternate exposure according to claim 2, characterized in that, The sliding component includes: A sliding groove (11) is formed on the support plate (1); There are two sliding blocks (12), and the two sliding blocks (12) are evenly arranged in the sliding groove (11), are slidably connected to the sliding groove (11), and are threadedly connected to the moving shaft (10).

4. The exposure machine transport platform with double-station alternate exposure according to claim 3, characterized in that, The clamping mechanism includes: A clamping frame (13) is disposed on the sliding block (12) and is fixedly connected to the sliding block (12); The clamping motor (14) is fixedly connected to the clamping frame (13); The clamping block (15) is fixedly connected to the clamping frame (13); The clamping shaft (16) is fixedly connected to the output end of the clamping motor (14) and rotatably connected to the clamping block (15); The clamping disc (17) is fixedly connected to the clamping shaft (16); A rotating component is disposed on the clamping plate (17).

5. The exposure machine conveyor platform with dual-station alternating exposure as described in claim 4, characterized in that, The rotating component includes: The first rotating shaft (18) has multiple shafts, and the multiple first rotating shafts (18) are evenly arranged on the clamping plate (17) and fixedly connected to the clamping plate (17); Rotating plate (19) is rotatably connected to the first rotating shaft (18); The second rotating shaft (20) is disposed on the rotating plate (19) and is rotatably connected to the rotating plate (19); The transmission component is disposed on the clamping block (15).

6. The transport platform of an exposure machine with double work stations for alternate exposure according to claim 5, characterized in that, The transmission component includes: A transmission groove (21) is formed on the clamping block (15); The transmission block (22) is disposed in the transmission groove (21), is slidably connected to the transmission groove (21), is fixedly connected to the second rotating shaft (20), and is also fixedly connected to the clamping plate (7).

7. The transport platform of claim 6, wherein, A clamping post (23) is fixedly provided on the clamping block (15) for supporting and placing the exposed object.

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