IPA drying equipment with separation structure

Abstract

The utility model discloses IPA drying equipment with a separation structure. The IPA drying equipment comprises a drying box, the IPA steam conveying assembly comprises an IPA steam conveying pipeline and a shunting pipeline which are communicated with each other, an annular pipeline communicated with the shunting pipeline, and a first nozzle spirally communicated with the annular pipeline; the partition assembly comprises a first partition plate and a second partition plate which are parallel, and a vertical rod perpendicular to the first partition plate, and a supporting ring is arranged in the second partition plate; the adjusting assembly for changing the position of the wafer workpiece comprises an electric push rod fixed to the first partition plate through a screw, a fixing frame, a driving motor installed in the fixing frame, a limiting block fixedly connected with an output shaft of the driving motor, and a rotating disc. The internal space of the drying box is separated through the designed separation assembly, the first separation plate and the second separation plate, IPA steam in different spaces can dry the front face and the back face of a workpiece correspondingly, IPA steam sprayed out of the first nozzle dries the front face of the workpiece, and IPA steam sprayed out of the second nozzle dries the back face of the workpiece.

Description

Technical Field

[0001] This utility model belongs to the field of drying equipment technology, specifically relating to an IPA drying equipment with a partition structure. Background Technology

[0002] In the semiconductor industry or solar cell manufacturing, drying of wafers or solar cell workpieces is necessary, and IPA drying equipment is a commonly used type of rinsing and drying machinery. The IPA drying principle utilizes the surface tension gradient between IPA vapor and water. When IPA vapor comes into contact with water on the workpiece surface, the low surface tension of IPA creates a tension gradient on the water surface, causing the water to flow along this gradient and eventually detach from the workpiece surface, achieving a drying effect. It is mainly used in the rinsing and drying processes of wafers or workpieces in the optics / optoelectronics, semiconductor, and solar cell industries.

[0003] When using the IPA steam drying method to dry wafer workpieces, the wafers are usually placed on a workpiece tray and then put into the drying equipment. Generally, the front side of the wafer is dried, and the back side of the wafer workpiece facing the workpiece tray cannot be dried sufficiently, which has its shortcomings.

[0004] Existing IPA steam drying methods for drying wafer workpieces have the problem that they cannot dry both sides of the wafer simultaneously. To address this, this application proposes an IPA drying device with a separation structure. Utility Model Content

[0005] The purpose of this invention is to provide an IPA drying device with a partition structure to solve the problem mentioned in the background art of not having a design for simultaneous drying of both sides of the wafer workpiece.

[0006] To achieve the above objectives, this utility model provides the following technical solution: an IPA drying device with a partition structure, comprising...

[0007] Drying oven;

[0008] IPA steam delivery assembly includes a connected IPA steam delivery pipe and a branch pipe, an annular pipe connected to the branch pipe, and a first nozzle connected to the annular pipe by a spiral.

[0009] The partition assembly includes a parallel first partition and a second partition, and a vertical post perpendicular to the first partition, wherein a support ring is provided inside the second partition;

[0010] The adjustment assembly for changing the position of the wafer workpiece includes an electric push rod fixed to the first partition by screws, a fixed frame, a drive motor installed inside the fixed frame, a limiting block fixedly connected to the output shaft of the drive motor, and a rotating disk;

[0011] The IPA steam circulation assembly includes a circulating fan installed inside the drying chamber, a discharge pipe connected to the outlet of the circulating fan, an arc-shaped pipe connected to the discharge pipe, a second nozzle spirally connected to the arc-shaped pipe, a connecting pipe connected to the inlet of the circulating fan, and a first air inlet and a second air inlet connected to the connecting pipe.

[0012] Preferably, the first partition and the second partition divide the internal space of the drying oven into equipment area A, lower drying area B and upper drying area C.

[0013] Preferably, the diversion pipe is an inverted "Y"-shaped structure with one end forked, and both the top end of the diversion pipe and the bottom end of the fork are bent.

[0014] Preferably, the bottom surface of the rotating disk is tangent to the surface of the support ring, and the surface of the second partition plate has a concave movable cavity, in which the support ring is located.

[0015] Preferably, the rotating disk has an installation groove, and the center of the bottom surface of the rotating disk has a square groove that mates with the limiting block.

[0016] Preferably, the arc-shaped tube is parallel to the second partition plate, the arc-shaped tube is in the shape of a circular arc pipe, the second nozzle is in an inclined state, and a support plate for supporting the circular pipe is fixedly connected to the inner wall of the drying box.

[0017] Preferably, the IPA steam delivery path at the top of the drying chamber is an IPA steam delivery pipe, a branch pipe, a circular pipe, and a first nozzle, while the IPA steam delivery path at the bottom of the drying chamber is a first air inlet, a second air inlet, a connecting pipe, a circulating fan, an exhaust pipe, an arc-shaped pipe, and a second nozzle.

[0018] Compared with the prior art, the beneficial effects of this utility model are:

[0019] 1. In this utility model, the internal space of the drying chamber is divided by the designed partition components, the first partition and the second partition, which facilitates the drying of the front and back of the workpiece by IPA steam in different spaces, the IPA steam ejected from the first nozzle dries the front of the workpiece, and the IPA steam ejected from the second nozzle dries the back of the workpiece.

[0020] 2. In this utility model, the rotating disk rotates under the drive of the drive motor through the designed adjustment component, which can change the angle of the workpiece and thus steam dry its different positions.

[0021] 3. In this utility model, the designed IPA steam circulation component, under the action of the circulating fan, can circulate the IPA steam sprayed from the second nozzle, thereby achieving the effect of continuously drying the back of the workpiece. Attached Figure Description

[0022] Figure 1 This is a schematic diagram of the structure of this utility model;

[0023] Figure 2 This is a three-dimensional structural diagram of the second partition of this utility model;

[0024] Figure 3 This is a top view of the rotating disk of this utility model.

[0025] Figure 4 This is a cross-sectional view of the rotating disk of this utility model.

[0026] Figure 5 This is a top view of the arc-shaped tube of this utility model.

[0027] In the diagram: 1. Drying oven; 5. Electric actuator; 6. Fixing frame; 7. Drive motor; 8. Rotary disc; 11. Support plate; 21. IPA steam delivery pipe; 22. Diversion pipe; 23. Circular pipe; 24. First nozzle; 31. First partition; 32. Upright; 33. Second partition; 34. Support ring; 41. Circulating fan; 42. Discharge pipe; 43. Arc-shaped pipe; 44. Second nozzle; 45. Connecting pipe; 46. First air inlet; 47. Second air inlet; 71. Limiting block; 81. Mounting slot. Detailed Implementation

[0028] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0029] Please see Figures 1 to 5 This utility model provides a technical solution: an IPA drying device with a partition structure, including a drying chamber 1. Figure 1 and Figure 2In this context, A represents a wafer workpiece, which is placed inside the drying chamber 1 during drying. The IPA steam delivery assembly includes a connected IPA steam delivery pipe 21 and a branch pipe 22, an annular pipe 23 connected to the branch pipe 22, and a first nozzle 24 connected to the annular pipe 23 via a spiral connection. During the drying of workpiece A, the IPA steam delivery pipe 21 works in conjunction with other external equipment that provides IPA steam. The IPA steam delivery pipe 21 delivers IPA steam, which is ejected along the path of the IPA steam delivery pipe 21, the branch pipe 22, the annular pipe 23, and the first nozzle 24. The IPA steam ejected from the first nozzle 24 interacts with the rotating disk. The surface of workpiece A on the 8th part comes into contact with moisture, achieving the purpose of removing moisture and drying; the separating component includes a parallel first partition 31 and second partition 33, and a vertical rod 32 perpendicular to the first partition 31. The second partition 33 is provided with a support ring 34. The vertical rod 32 is fixed to the first partition 31 and the second partition 33 by screws. The first partition 31 and the second partition 33 are fixed to the drying chamber 1 by screws. The first partition 31 and the second partition 33 separate the internal space of the drying chamber 1, which facilitates the contact of IPA vapor with both sides of workpiece A; the adjusting component for changing the position of the wafer workpiece includes an electric push rod 5 fixed to the first partition 31 by screws, a fixing frame 6, and a mounting... The fixed frame 6 contains a drive motor 7, a limiting block 71 fixedly connected to the output shaft of the drive motor 7, and a rotating disk 8. When the electric push rod 5 is activated and extends, the fixed frame 6 moves upward, causing the rotating disk 8 to leave the interior of the second partition 33, facilitating the removal and placement of the rotating disk 8. The drive motor 7 operates, driving the rotating disk 8 to rotate, thereby changing the position of the workpiece A on it, thus drying different parts of its surface. The IPA steam circulation assembly includes a circulating fan 41 installed inside the drying chamber 1, an exhaust pipe 42 connected to the outlet of the circulating fan 41, an arc-shaped pipe 43 connected to the exhaust pipe 42, and a first... Two nozzles 44, a connecting pipe 45 connected to the air inlet of the circulating fan 41, a first air inlet 46 and a second air inlet 47 connected to the connecting pipe 45, the circulating fan 41 and the drying box 1 are fixed by screws. When the circulating fan 41 is running, the IPA vapor sprayed from the first nozzle 24 enters the connecting pipe 45 from the first air inlet 46, and then sprays out along the path of the circulating fan 41, the discharge pipe 42, the arc pipe 43 and the second nozzle 44, which can dry the back of the workpiece A. The IPA vapor sprayed from the second nozzle 44 enters the connecting pipe 45 from the second air inlet 47, and is then circulated and discharged by the circulating fan 41, thus achieving the effect of drying the back of the workpiece A.

[0030] In this embodiment, the first partition 31 and the second partition 33 divide the internal space of the drying chamber 1 into equipment area A, lower drying area B and upper drying area C. A connecting groove is provided at the center of the second partition 33, which connects the lower drying area B and the upper drying area C, so as to facilitate the drying of the back side of the workpiece A on the rotating disk 8 by the IPA steam sprayed from the second nozzle 44.

[0031] In this embodiment, the diversion pipe 22 is an inverted "Y"-shaped structure with one end forked. The top end of the diversion pipe 22 and the bottom end of the fork are both bent. The IPA steam transported by the diversion pipe 22 enters the interior of the annular pipe 23 evenly.

[0032] In this embodiment, the bottom surface of the rotating disk 8 is tangent to the surface of the support ring 34. The support ring 34 supports the rotating disk 8. The friction between the rotating disk 8 and the support ring 34 is small and does not affect the rotation of the rotating disk 8. The surface of the second partition 33 has a concave movable cavity, and the support ring 34 is located in the movable cavity.

[0033] In this embodiment, the rotating disk 8 is provided with an installation groove 81, which is convenient for placing the workpiece A. A square groove that cooperates with the limiting block 71 is provided at the center of the bottom surface of the rotating disk 8. The rotating disk 8 and the limiting block 71 are separate structures, which makes it easy to pick up and put down the rotating disk 8.

[0034] In this embodiment, the arc-shaped pipe 43 is parallel to the second partition 33. The arc-shaped pipe 43 is a circular arc pipe shape. The second nozzle 44 is in an inclined state. The steam sprayed from the second nozzle 44 comes into contact with the moisture on the back of the workpiece A on the rotating disk 8, thereby achieving the purpose of drying the back of the workpiece A. A support plate 11 for supporting the circular pipe 23 is fixedly connected to the inner wall of the drying box 1. The support plate 11 supports the circular pipe 23 and provides support.

[0035] In this embodiment, the IPA steam delivery path at the top of the drying chamber 1 is IPA steam delivery pipe 21, diversion pipe 22, annular pipe 23, and first nozzle 24. The IPA steam ejected from the first nozzle 24 dries the front of workpiece A. The IPA steam delivery path at the bottom of the drying chamber 1 is the first air inlet 46 and the second air inlet 47, connecting pipe 45, circulating fan 41, discharge pipe 42, arc pipe 43, and second nozzle 44. The steam ejected from the second nozzle 44 dries the back of workpiece A.

[0036] Working principle and usage process of this utility model:

[0037] When drying workpiece A, workpiece A is neatly placed on the rotating disk 8, and the rotating disk 8 is placed inside the drying chamber 1. The first partition 31 and the second partition 33 separate the internal space of the drying chamber 1, which facilitates the contact between IPA vapor and both sides of workpiece A.

[0038] When the electric actuator 5 is activated and extends, the fixed frame 6 moves upward, thereby moving the rotating disk 8 away from the interior of the second partition 33, making it easier to place the rotating disk 8. Then the electric actuator 5 shortens, the fixed frame 6 and the rotating disk 8 move downward, and the support ring 34 supports the rotating disk 8. The side of the workpiece with surface A facing upward is the front, and the other side is the back.

[0039] The IPA steam delivery path is IPA steam delivery pipe 21, branch pipe 22, annular pipe 23, and first nozzle 24. The IPA steam ejected from the first nozzle 24 dries the front side of workpiece A.

[0040] The drive motor 7 runs, and the drive motor 7 drives the rotating disk 8 to rotate, thereby changing the position of the workpiece A on it, so as to facilitate drying different positions on its surface.

[0041] When the circulating fan 41 is running, the IPA vapor ejected from the first nozzle 24 enters the connecting pipe 45 from the first air inlet 46, and then is ejected along the path of the circulating fan 41, the discharge pipe 42, the arc pipe 43, and the second nozzle 44, which can dry the back of the workpiece A.

[0042] In addition, the IPA vapor ejected from the second nozzle 44 enters the connecting pipe 45 through the second air inlet 47 and is then circulated and discharged by the circulating fan 41, achieving the effect of drying the back side of workpiece A.

[0043] In summary: This application has a design for simultaneously drying both sides of a wafer workpiece. The first partition 31 and the second partition 33 divide the internal space of the drying chamber 1. The IPA steam ejected from the first nozzle 24 dries the front side of the workpiece A, and the IPA steam ejected from the second nozzle 44 dries the back side of the workpiece A.

[0044] Although embodiments of the present invention have been shown and described (see the detailed description above), it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. An IPA drying apparatus with a partition structure, characterized by: include Drying oven (1); IPA steam delivery assembly includes a connected IPA steam delivery pipe (21) and a branch pipe (22), an annular pipe (23) connected to the branch pipe (22), and a first nozzle (24) connected to the annular pipe (23) by a spiral. The partition assembly includes a parallel first partition (31) and a second partition (33), and a vertical post (32) perpendicular to the first partition (31). The second partition (33) is provided with a support ring (34). The adjustment assembly for changing the position of the wafer workpiece includes an electric push rod (5) fixed to the first partition (31) by screws, a fixed frame (6), a drive motor (7) installed inside the fixed frame (6), a limiting block (71) fixedly connected to the output shaft of the drive motor (7), and a rotating disk (8). The IPA steam circulation assembly includes a circulating fan (41) installed inside the drying chamber (1), an exhaust pipe (42) connected to the outlet of the circulating fan (41), an arc-shaped pipe (43) connected to the exhaust pipe (42), a second nozzle (44) spirally connected to the arc-shaped pipe (43), a connecting pipe (45) connected to the inlet of the circulating fan (41), a first inlet (46) connected to the connecting pipe (45), and a second inlet (47).

2. The IPA drying apparatus with a separation structure according to claim 1, characterized in that: The first partition (31) and the second partition (33) divide the internal space of the drying oven (1) into equipment area A, lower drying area B and upper drying area C.

3. The IPA drying apparatus with a separation structure according to claim 1, characterized in that: The diversion pipe (22) is an inverted "Y"-shaped structure with one end forked. The top end of the diversion pipe (22) and the bottom end of the fork are both bent.

4. The IPA drying apparatus with a separation structure according to claim 1, characterized in that: The bottom surface of the rotating disk (8) is tangent to the surface of the support ring (34), and the surface of the second partition (33) has a concave movable cavity, in which the support ring (34) is located.

5. The IPA drying apparatus with a separation structure according to claim 1, characterized in that: The rotating disk (8) has an installation groove (81) and a square groove that cooperates with the limiting block (71) is provided at the center of the bottom surface of the rotating disk (8).

6. The IPA drying apparatus with a separation structure according to claim 1, characterized in that: The arc-shaped tube (43) is parallel to the second partition (33). The arc-shaped tube (43) is in the shape of a circular arc pipe. The second nozzle (44) is in an inclined state. A support plate (11) for supporting the circular pipe (23) is fixedly connected to the inner wall of the drying box (1).

7. The IPA drying apparatus with a separation structure according to claim 1, characterized in that: The IPA steam delivery path at the top of the drying chamber (1) is an IPA steam delivery pipe (21), a branch pipe (22), a circular pipe (23), and a first nozzle (24). The IPA steam delivery path at the bottom of the drying chamber (1) is a first air inlet (46), a second air inlet (47), a connecting pipe (45), a circulating fan (41), an exhaust pipe (42), an arc-shaped pipe (43), and a second nozzle (44).

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