Single crystal furnace water cooling device and single crystal furnace

Abstract

The utility model discloses a single crystal furnace water cooling device and a single crystal furnace, and belongs to the technical field of monocrystalline silicon preparation. The single crystal furnace water cooling device comprises an outer guide cylinder; the water cooling screen is arranged in the outer guide cylinder, and an accommodating cavity is formed between the water cooling screen and the outer guide cylinder; the heat preservation and insulation layer is arranged in the containing cavity; the adapter ring is arranged in the outer guide cylinder, is connected between the outer guide cylinder and the water-cooling screen and comprises a ring body and a flange, the flange is outwards folded relative to the ring body, the bottom of the ring body is in sealing fit with the bottom of the outer guide cylinder, the water-cooling screen is supported on the flange, and the water-cooling screen is arranged between the ring body and the water-cooling screen. And the bottom is in sealing fit with the top of the flange. Through the arrangement of the adapter ring, a traditional inner guide cylinder is omitted, the heat preservation and insulation layers can directly make contact with the water cooling screen, the number of layers of the heat preservation and insulation layers is increased, heat loss of a thermal field is remarkably reduced, and therefore the longitudinal temperature gradient in the thermal field is increased, and the growth quality of a crystal bar is improved.

Description

Technical Field

[0001] This application belongs to the field of single crystal silicon preparation technology, and particularly relates to a water cooling device for a single crystal furnace and a single crystal furnace. Background Technology

[0002] In the growth of monocrystalline silicon and other crystals, the monocrystalline furnace is a core piece of equipment, and its thermal field stability directly affects the quality of the crystal rod. Existing monocrystalline furnace thermal shielding systems typically consist of a water-cooled shield, an outer guide tube, an inner guide tube, a guide tube support ring, and multiple layers of soft felt. The soft felt is usually installed with a longitudinal gradient to insulate heat and maintain a temperature gradient at the liquid surface. However, due to the limited space between the inner and outer guide tubes, the insulation effect of the soft felt is insufficient, easily leading to heat loss from the thermal field and an inadequate longitudinal temperature gradient, thus affecting the quality of the crystal rod growth. Utility Model Content

[0003] This application aims to address at least one of the technical problems existing in the prior art. To this end, this application proposes a water-cooling device for a single crystal furnace and a single crystal furnace, which increases the longitudinal temperature gradient in the thermal field and improves the growth quality of the crystal rod.

[0004] In a first aspect, this application provides a water-cooling device for a single crystal furnace, comprising:

[0005] External guide tube;

[0006] A water-cooled screen is disposed inside the outer guide tube, and a receiving cavity is formed between the water-cooled screen and the outer guide tube;

[0007] A thermal insulation layer is provided in the receiving cavity;

[0008] An adapter ring is disposed inside the outer guide tube and connects the outer guide tube and the water-cooled screen. The adapter ring includes a ring body and a flange. The flange is folded outward relative to the ring body. The bottom of the ring body is sealed to the bottom of the outer guide tube. The water-cooled screen is supported by the flange, and the bottom of the water-cooled screen is sealed to the top of the flange.

[0009] According to the single crystal furnace water cooling device of this application, the traditional inner guide tube structure is eliminated by setting the aforementioned adapter ring. The thermal insulation layer can directly contact the water cooling screen, increasing the number of thermal insulation layers and significantly reducing heat loss from the thermal field. This increases the longitudinal temperature gradient in the thermal field, improving the growth quality of the crystal rod. Combined with the sealed fit between the adapter ring, the outer guide tube, and the water cooling screen, the risk of thermal insulation layer displacement and leakage during production is effectively reduced, thereby reducing the adverse effects on the subsequent crystal formation of the crystal rod and further improving the quality of the crystal rod. In addition, no modifications are required to the structure of the water cooling screen, reducing machining processes and costs. At the same time, the contact area between the adapter ring and the water cooling screen is increased, improving support stability and thus enhancing the structural stability and reliability of the entire single crystal furnace water cooling device.

[0010] According to one embodiment of this application, the flange includes a first segment and a second segment. The first segment is bent and connected between the ring body and the second segment. The second segment protrudes upward relative to the first segment to form a first groove. At least a portion of the water-cooled screen is installed in the first groove, and the lower surface of the water-cooled screen is sealed to the bottom wall of the first groove.

[0011] According to one embodiment of this application, the inner wall of the second segment is sealed to the outer wall of the water-cooled screen.

[0012] According to one embodiment of this application, the flange is spaced apart from the outer guide tube.

[0013] According to one embodiment of this application, a second groove is formed at the bottom of the outer guide tube, at least a portion of the ring is installed in the second groove, and the lower surface of the ring is sealed to the bottom wall of the second groove.

[0014] According to one embodiment of this application, the outer wall of the ring body is in a sealing fit with the side wall of the second groove.

[0015] According to one embodiment of this application, the ring body is provided with a downwardly protruding extension section, the extension section is disposed in the central hole at the bottom of the outer guide tube, and the outer side wall of the extension section is sealed to the hole wall of the central hole.

[0016] According to one embodiment of this application, the outer wall of the ring is inclined inward from top to bottom.

[0017] According to one embodiment of this application, the thermal insulation layer comprises multiple layers of thermal insulation felt wrapped sequentially from the inside to the outside, and at least two of the thermal insulation felts have different densities and / or materials.

[0018] Secondly, this application provides a single crystal furnace, which includes:

[0019] Water-cooled device for single crystal furnace as described in any of the above schemes.

[0020] According to the single crystal furnace of this application, the traditional inner guide tube structure is eliminated by setting up the water cooling device of the single crystal furnace. The heat insulation layer can directly contact the water cooling screen, increasing the number of heat insulation layers and significantly reducing heat loss in the thermal field. This increases the longitudinal temperature gradient in the thermal field and improves the growth quality of the crystal rod. Combined with the sealed fit between the adapter ring, the outer guide tube, and the water cooling screen, the risk of displacement and leakage of the heat insulation layer during production is effectively reduced, thereby reducing the adverse effects on the crystal formation of the crystal rod in the later stage and further improving the quality of the crystal rod. In addition, no modifications are required to the structure of the water cooling screen, reducing machining processes and costs. At the same time, the contact area between the adapter ring and the water cooling screen is increased, improving the support stability, thereby improving the structural stability and reliability of the entire single crystal furnace water cooling device.

[0021] Additional aspects and advantages of this application will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of this application. Attached Figure Description

[0022] The above and / or additional aspects and advantages of this application will become apparent and readily understood from the description of the embodiments taken in conjunction with the following drawings, in which:

[0023] Figure 1 This is a cross-sectional view of the single crystal furnace water cooling device provided in the embodiments of this application;

[0024] Figure 2 This is one of the structural schematic diagrams of the adapter ring provided in the embodiments of this application;

[0025] Figure 3 This is the second schematic diagram of the adapter ring provided in the embodiments of this application;

[0026] Figure 4 This is a cross-sectional view of the external guide tube provided in the embodiment of this application.

[0027] Figure label:

[0028] Single crystal furnace water cooling device 10;

[0029] Outer guide tube 11, second groove 111, center hole 112;

[0030] Water-cooled screen 12;

[0031] Receiving cavity 13;

[0032] Adapter ring 14, ring body 141, extension section 1411, flange 142, first section 1421, second section 1422, first groove 1423. Detailed Implementation

[0033] The embodiments of this application are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this application, and should not be construed as limiting this application.

[0034] This application discloses a water-cooling device 10 for a single crystal furnace.

[0035] The following is for reference. Figures 1-4 Describes a single crystal furnace water cooling apparatus 10 according to an embodiment of this application.

[0036] In some embodiments, such as Figure 1 As shown, the single crystal furnace water cooling device 10 includes: an outer guide tube 11, a water cooling screen 12, a heat insulation layer, and a transition ring 14.

[0037] The water-cooled screen 12 is disposed inside the outer guide tube 11, and a receiving cavity 13 is formed between the water-cooled screen 12 and the outer guide tube 11; a heat insulation layer is disposed in the receiving cavity 13; a transition ring 14 is disposed inside the outer guide tube 11, and the transition ring 14 is connected between the outer guide tube 11 and the water-cooled screen 12, and the transition ring 14 includes a ring body 141 and a flange 142. The flange 142 is folded outward relative to the ring body 141, the bottom of the ring body 141 is sealed with the bottom of the outer guide tube 11, the water-cooled screen 12 is supported on the flange 142, and the bottom of the water-cooled screen 12 is sealed with the top of the flange 142.

[0038] The outer guide tube 11 serves as the main support structure of the thermal field. Its inner wall is connected to the crystal growth environment, while its outer wall is isolated from the external environment. It is used to guide airflow and maintain the stability of the thermal field.

[0039] The outer guide tube 11 can be made of materials such as graphite or metal alloys, and this application does not limit it.

[0040] The outer guide tube 11 can be designed as a cone or a cylinder. The inner wall of the outer guide tube 11 is smooth to reduce the impact on the airflow of the hot field. At the same time, the outer wall of the outer guide tube 11 can be provided with heat dissipation fins or coatings as needed to enhance the heat dissipation effect. This application does not limit this.

[0041] The guide tube is fitted outside the water-cooled screen 12, which is used to absorb heat through water cooling to reduce heat loss in the thermal field. The water-cooled screen 12 can be a double-layered hollow structure or a double-layered or multi-layered hollow structure, with cooling water circulating inside to lower the temperature.

[0042] As an example, the water-cooled screen 12 may include a screen body and a reflective structure. The screen body may adopt a double-wall design, with a hollow cavity formed between the inner wall and the outer wall for the flow of cooling water. The reflective structure may be set in the outer wall to reflect the thermal radiation of the thermal field back to the thermal field to improve the thermal utilization efficiency.

[0043] An annular cavity 13 is formed between the water-cooled screen 12 and the outer guide tube 11. The cavity 13 is filled with a thermal insulation layer, which may include, but is not limited to, carbon fiber soft felt, ceramic fiber felt or aerogel felt, etc. This application does not limit it.

[0044] The adapter ring 14 is sealed between the bottom of the water-cooled screen 12 and the bottom of the outer guide tube 11, and is used to cover the bottom of the receiving cavity 13 to prevent the thermal insulation layer from shifting. Specifically, the adapter ring 14 includes a ring body 141 for sealing with the outer guide tube 11 and a flange 142 for sealing with the water-cooled screen 12. The supporting surface of the flange 142 for the water-cooled screen 12 can be, but is not limited to, a horizontal plane, an inclined plane, or an arc surface, etc., and this application does not limit it in this regard.

[0045] The adapter ring 14 can be made of materials such as graphite or metal alloys, and this application does not limit it to such materials.

[0046] It should be noted that a sealing structure can be provided on the top of the outer guide tube 11 and the top of the water-cooled screen 12 to achieve a top seal of the receiving cavity 13. The sealing structure can be a solid felt or other sealing materials, etc., and this application embodiment does not limit this.

[0047] In related technologies, some water-cooling devices achieve a sealed connection between the water-cooling screen and the adapter ring by forming a groove on the inner bottom of the water-cooling screen and engaging this groove with the adapter ring. However, this structure has the following drawbacks: First, it requires modification of the existing water-cooling screen, resulting in complex processing procedures and increased processing costs; second, the connection between the adapter ring and the water-cooling screen is narrow and the contact area is small, making it difficult to stably and reliably support the water-cooling screen.

[0048] Understandably, on the one hand, by adopting the adapter ring 14, this application eliminates the original inner guide tube structure, thus significantly increasing the space of the receiving cavity 13. It can be fully wrapped with the thermal insulation layer according to the process standards, and the number of thermal insulation layers can be increased on the existing basis. The water-cooled screen 12 is in direct contact with the thermal insulation layer, which significantly reduces the heat loss of the thermal field, thereby improving the thermal insulation effect. This increases the longitudinal temperature gradient in the thermal field, which can better achieve the effect of increasing the pulling speed, thereby improving the quality and efficiency of single crystal growth. On the other hand, since the ring body 141 of the adapter ring 14 is sealed to the outer guide tube 11, and the flange 142 of the adapter ring 14 is sealed to the water-cooled screen 12, the risk of leakage of the heat insulation layer in the accommodating cavity 13 is significantly reduced. During the operation of the single crystal furnace, especially when the outer guide tube 11 is raised or lowered during the feeding operation, the adapter ring 14 can effectively reduce the probability of the heat insulation layer flying around due to vibration, thereby reducing the adverse effects on the crystal formation of the crystal rod in the later stage, maintaining the smooth progress of the production process, and thus improving the quality of the crystal rod. On the other hand, this application does not require any modification to the structure of the existing water-cooled screen 12. It directly utilizes the flange 142 of the adapter ring 14 to achieve support and sealing with the water-cooled screen 12. This greatly simplifies the processing procedure and reduces the time and cost consumption during the processing. At the same time, the flange 142 design also increases the support area with the water-cooled screen 12, so that the water-cooled screen 12 can be installed more stably in the outer guide tube 11, improving the structural stability and reliability of the entire single crystal furnace water-cooling device 10 and reducing failures and maintenance costs caused by structural instability.

[0049] The single crystal furnace water cooling device 10 provided in this application embodiment eliminates the traditional inner guide tube structure through the setting of the aforementioned adapter ring 14. The thermal insulation layer can directly contact the water cooling screen 12, increasing the number of thermal insulation layers and significantly reducing heat loss in the thermal field. This increases the longitudinal temperature gradient in the thermal field, improving the growth quality of the crystal rod. Combined with the sealed fit between the adapter ring 14, the outer guide tube 11, and the water cooling screen 12, the risk of displacement and leakage of the thermal insulation layer during production is effectively reduced, thereby reducing the adverse effects on the subsequent crystal formation of the crystal rod and further improving the quality of the crystal rod. In addition, no modifications are required to the structure of the water cooling screen 12, reducing machining processes and costs. At the same time, the contact area between the adapter ring 14 and the water cooling screen 12 is increased, improving support stability and thus enhancing the structural stability and reliability of the entire single crystal furnace water cooling device 10.

[0050] In some embodiments, such as Figures 1-3As shown, the flange 142 includes a first segment 1421 and a second segment 1422. The first segment 1421 is bent and connected between the ring body 141 and the second segment 1422. The second segment 1422 is convex upward relative to the first segment 1421 to form a first groove 1423. At least a portion of the water-cooled screen 12 is installed in the first groove 1423, and the lower surface of the water-cooled screen 12 is sealed to the bottom wall of the first groove 1423.

[0051] In this embodiment, such as Figures 1-3 As shown, the first segment 1421 is connected to the top of the ring 141, and the first segment 1421 is folded outward radially relative to the ring 141. The upper surface of the first segment 1421 can form the bottom wall of the first groove 1423 to stably and reliably support the water-cooled screen 12 above. The lower surface of the water-cooled screen 12 is in contact with the bottom wall of the first groove 1423 to achieve a seal. Under the blocking of the sealed interface, the heat insulation layer is difficult to leak into the interior from between the water-cooled screen 12 and the adapter ring 14. The second segment 1422 is convex upward relative to the upper surface of the first segment 1421 to form an annular baffle structure. The inner wall of the second segment 1422 can form the side wall of the first groove 1423. In this way, the sealed interface between the water-cooled screen 12 and the first segment 1421 can be blocked on the outside. On the basis of the sealed fit between the water-cooled screen 12 and the first segment 1421, the penetration of the heat insulation layer is further reduced.

[0052] In some embodiments, the height of the second segment 1422 can be 5mm to 8mm.

[0053] Specifically, the height of the second segment 1422 can be 5mm, 5.5mm, 5.847mm, 6mm, 7.89mm, 8mm or other values ​​between 5mm and 8mm, and this application embodiment does not limit this.

[0054] The single crystal furnace water cooling device 10 provided in this application embodiment, through the above-mentioned first segment 1421, second segment 1422 and first groove 1423, the first segment 1421 fits with the water cooling screen 12, realizing the sealing fit between the bottom of the water cooling screen 12 and the top of the flange 142. The second segment 1422 blocks the sealing interface in the circumferential direction, effectively preventing the heat insulation layer from seeping into the interior of the hot field through the sealing interface, thereby reducing the contamination of the crystal rod and improving the purity and quality of the crystal rod. In addition, the structure of the first groove 1423 plays a guiding and limiting role in the installation position of the water cooling screen 12, maintaining the coaxiality of the water cooling screen 12 and the outer guide tube 11, reducing the risk of uneven hot field caused by assembly deviation, thereby improving the reliability and stability of the single crystal furnace water cooling device 10.

[0055] In some embodiments, such as Figure 1 As shown, the inner wall of the second section 1422 is sealed to the outer wall of the water-cooled screen 12.

[0056] In this embodiment, such as Figure 1 As shown, when the upper surface of the first segment 1421 is fitted with the lower surface of the water-cooled screen 12 to achieve a seal, the inner wall of the second segment 1422 is also fitted with the outer wall of the water-cooled screen 12 to achieve a further seal. Since the upper surface of the first segment 1421 forms the bottom wall of the first groove 1423 and the inner wall of the second segment 1422 forms the side wall of the first groove 1423, the upper surface of the first segment 1421 and the inner wall of the second segment 1422 are in close contact. The thermal insulation layer needs to be continuously drilled through the sealing interface between the second segment 1422 and the water-cooled screen 12 and the sealing interface between the first segment 1421 and the water-cooled screen 12 in order to enter the interior of the thermal field. Under these circumstances, it is difficult for the thermal insulation layer to leak out from the connection between the adapter ring 14 and the water-cooled screen 12.

[0057] The single crystal furnace water cooling device 10 provided in this application embodiment, through the structural design of the inner sidewall of the second section 1422 and the outer sidewall of the water cooling screen 12 sealingly engaging, achieves double sealing protection of the bottom combined sidewall based on the sealing engagement of the upper surface of the first section 1421 and the lower surface of the water cooling screen 12. This further increases the sealing area between the adapter ring 14 and the water cooling screen 12, extends the leakage path of the heat insulation layer, thereby greatly reducing the risk of the heat insulation layer scattering and seeping into the interior of the thermal field and contaminating the crystal rod. At the same time, it makes the bottom of the water cooling screen 12 tightly embedded in the first groove 1423, further enhancing the limiting and guiding effect of the first groove 1423 of the adapter ring 14 on the water cooling screen 12.

[0058] In some embodiments, such as Figure 1 As shown, the flange 142 and the outer guide tube 11 are spaced apart.

[0059] Understandably, on the one hand, during the operation of the single crystal furnace, the water-cooled screen 12 is at a low temperature, while the outer guide tube 11 is close to the high-temperature hot zone. If the flange 142 is in direct contact or tightly connected to the outer guide tube 11, heat will be conducted from the outer guide tube 11 to the water-cooled screen 12 through the adapter ring 14, causing a local temperature drop in the outer guide tube 11. This may affect the uniformity of the temperature distribution in the hot zone and may also cause the water-cooled screen 12 to absorb additional heat, reducing cooling efficiency and increasing energy consumption. When the flange 142 and the outer guide tube 11 are spaced apart, the heat conduction path can be significantly reduced, allowing the outer guide tube 11 to maintain high-temperature stability while maintaining the efficient heat dissipation of the water-cooled screen 12. On the other hand, the outer guide tube 11 and the water-cooled screen 12 have different coefficients of thermal expansion. At high temperatures, uneven expansion may generate stress. If the flange 142 is rigidly connected to the outer guide tube 11, it may easily cause the adapter ring 14 to deform or the water-cooled screen 12 to shift under force, affecting the sealing performance. With the flange 142 and the outer guide tube 11 spaced apart, thermal expansion buffer space is provided for the flange 142 and the outer guide tube 11, reducing mechanical interference and extending the service life of the components.

[0060] In some embodiments, such as Figure 1 and Figure 4 As shown, a second groove 111 is formed at the bottom of the outer guide tube 11, at least a portion of the ring body 141 is installed in the second groove 111, and the lower surface of the ring body 141 is sealed to the bottom wall of the second groove 111.

[0061] In this embodiment, such as Figure 1 and Figure 4 As shown, an annular second groove 111 is formed on the inner bottom of the outer guide tube 11. At least a portion of the bottom of the ring body 141 is located within the second groove 111. During assembly, the adapter ring 14 can be quickly assembled into position with the outer guide tube 11 by following the indication of the second groove 111. After installation, the second groove 111 can limit the excessive displacement of the adapter ring 14. Furthermore, the lower surface of the ring body 141 is in contact with the bottom wall of the second groove 111 to achieve a seal. With the blocking of the sealed interface, the heat insulation layer is unlikely to leak out from between the outer guide tube 11 and the adapter ring 14 into the single crystal furnace water cooling device 10.

[0062] The single crystal furnace water cooling device 10 provided in this application embodiment achieves a sealed fit between the bottom of the ring 141 and the bottom of the outer guide cylinder 11 through a structural design in which the lower surface of the ring 141 is sealed to the bottom of the outer guide cylinder 11. The sealing interface can physically block the escape path of the heat insulation layer and confine the heat insulation layer within the receiving cavity 13, thereby reducing contamination of the crystal rod and improving the purity and quality of the crystal rod. Furthermore, the second groove 111 plays a guiding and limiting role in the installation position of the adapter ring 14, maintaining the coaxiality of the adapter ring 14 and the outer guide cylinder 11, reducing the risk of uneven thermal field caused by assembly deviation, thereby improving the reliability and stability of the single crystal furnace water cooling device 10.

[0063] In some embodiments, such as Figure 1 and Figure 4 As shown, the outer wall of the ring 141 is sealed to the side wall of the second groove 111.

[0064] In this embodiment, such as Figure 1 and Figure 4 As shown, when the lower surface of the ring 141 is fitted with the bottom wall of the second groove 111 to achieve a seal, the outer wall of the ring 141 is also fitted with the side wall of the second groove 111 to achieve a further seal. The thermal insulation layer needs to be continuously drilled through the sealing interface between the outer wall of the ring 141 and the water-cooled screen 12 and the sealing interface between the lower surface of the ring 141 and the water-cooled screen 12 before it can leak out of the single crystal furnace water-cooling device 10. In this case, it is difficult for the thermal insulation layer to leak out from the connection between the adapter ring 14 and the outer guide tube 11.

[0065] The single crystal furnace water cooling device 10 provided in this application embodiment, through the structural design of the outer wall of the ring 141 and the side wall of the second groove 111 sealingly engaging, achieves double sealing protection of the bottom combined with the side wall, based on the sealing engagement between the lower surface of the ring 141 and the bottom wall of the second groove 111. This further increases the sealing area between the transition ring 14 and the outer guide tube 11, extends the leakage path of the heat insulation layer, thereby greatly reducing the risk of the heat insulation layer leaking into the thermal field environment and contaminating the crystal rod. At the same time, it makes the bottom of the ring 141 tightly embedded in the second groove 111, further enhancing the limiting and guiding effect of the second groove 111 of the outer guide tube 11 on the transition ring 14.

[0066] In some embodiments, such as Figures 1-4 As shown, the ring body 141 has a downwardly protruding extension section 1411, which is located in the central hole 112 at the bottom of the outer guide tube 11, and the outer side wall of the extension section 1411 is sealed to the hole wall of the central hole 112.

[0067] In this embodiment, such as Figures 1-4 As shown, the bottom of the outer guide tube 11 has a central hole 112 for the crystal rod to pass through. The central hole 112 extends vertically through the outer guide tube 11. Based on the sealed fit between the bottom wall and the side wall of the ring body 141 and the second groove 111, the ring body 141 also has an additional annular extension section 1411 protruding downward. The extension section 1411 is entirely housed in the central hole 112, and the outer side wall of the extension section 1411 fits against the hole wall of the central hole 112 to achieve a seal. In this case, there are three continuous sealing interfaces between the bottom of the ring 141 and the bottom of the outer guide tube 11. The heat insulation layer needs to pass through the sealing interface between the ring 141 and the side wall of the second groove 111 of the water-cooled screen 12, the sealing interface between the ring 141 and the bottom wall of the second groove 111 of the water-cooled screen 12, and the sealing interface between the extension section 1411 of the ring 141 and the water-cooled screen 12 in order to leak out of the single crystal furnace water-cooling device 10, so that the escape path of the heat insulation layer is maximized.

[0068] The single crystal furnace water cooling device 10 provided in this application embodiment, through the setting of the above-mentioned extension section 1411, combined with the structural design of the outer wall of the extension section 1411 and the hole wall of the central hole 112 sealingly cooperating, maximizes the sealing area of ​​the transition ring 14 and the outer guide tube 11, and maximizes the extension of the escape path of the heat insulation layer, thereby minimizing the risk of the heat insulation layer leaking into the thermal field environment and contaminating the crystal rod, which is beneficial to improving the growth quality and production efficiency of the crystal rod.

[0069] In some embodiments, such as Figure 1 As shown, the outer wall of the ring 141 is inclined inward from top to bottom.

[0070] It is understandable that, based on the fact that the outer wall of the ring 141 slopes inward from top to bottom, in other words, the ring 141 has an overall shape that is wider at the top and narrower at the bottom. This allows the wider top of the ring 141 to provide sufficient support for the water-cooled screen 12. Since the transition ring 14 is used to cover the bottom opening of the receiving cavity 13, i.e., the transition ring 14 serves as part of the boundary of the receiving cavity 13, compared to a straight-wall structure, the outer wall of the ring 141, which tapers inward from top to bottom, increases the bottom space of the receiving cavity 13, thereby increasing the overall volume of the receiving cavity 13 and providing more ample space for the thermal insulation layer. The number or thickness of the thermal insulation layer can be increased according to actual needs. More insulation material can create more effective thermal resistance, reducing heat loss in the thermal field, thus significantly improving the thermal insulation effect of the entire single crystal furnace water-cooling device 10. The longitudinal temperature gradient in the thermal field can be better maintained, which is beneficial for heat transfer and mass transport during the crystal growth process, thereby improving the quality and efficiency of single crystal growth.

[0071] In some embodiments, the thermal insulation layer comprises multiple layers of insulation felt wrapped sequentially from the inside out, with at least two layers of insulation felt having different densities and / or materials.

[0072] Thermal insulation felt may include, but is not limited to, ceramic fiber felt, alumina fiber felt, aerogel felt, carbon fiber felt, aluminum silicate fiber felt, or graphite hard felt, etc., and the embodiments of this application do not limit it.

[0073] As an example, in multi-layer insulation felt, the materials of any two layers of insulation felt are different.

[0074] As an example, in multi-layer insulation felt, the densities of any two layers of insulation felt are different.

[0075] As an example, in multi-layer insulation felt, the density and materials of any two layers of insulation felt are different.

[0076] Among them, "multi-layer" means two or more layers.

[0077] For example, in some embodiments, the thermal insulation layer includes six layers of insulation felt wrapped sequentially from the inside out, and two of the six layers of insulation felt have different densities and materials.

[0078] For example, in some other embodiments, the thermal insulation layer includes seven layers of insulation felt wrapped sequentially from the inside out, and four of the seven layers of insulation felt are made of different materials.

[0079] For example, in some other embodiments, the thermal insulation layer includes eight layers of insulation felt wrapped sequentially from the inside out, and three of the eight layers of insulation felt have different densities.

[0080] There are various ways to combine multi-layer thermal insulation felts. The density and materials of each layer of thermal insulation felt can be designed according to actual needs. This application will not elaborate on these aspects in the embodiments.

[0081] In actual execution, during the assembly of the single crystal furnace water cooling device 10, the water cooling screen 12 can be supported on the adapter ring 14 first, and the bottom of the water cooling screen 12 can be sealed with the flange 142 of the adapter ring 14. Then, the operator can sequentially wrap multiple layers of heat insulation felt around the water cooling screen 12 and the adapter ring 14 to form a heat insulation layer. The whole assembly consisting of the water cooling screen 12, the adapter ring 14 and the heat insulation layer is installed in the outer guide tube 11, so that the bottom of the adapter ring 14 is sealed with the bottom of the outer guide tube 11, and the water cooling screen 12, the adapter ring 14 and the outer guide tube 11 meet the coaxiality requirements, thus completing the assembly.

[0082] The single crystal furnace water cooling device 10 provided in this application embodiment, through the above-mentioned optimized multi-layer insulation felt structure of the insulation layer, the design of the multi-layer insulation felt increases the thermal resistance, effectively reduces the conduction and radiation of heat, and the insulation felt layers of different densities and / or materials can work together to improve the insulation effect, thereby significantly improving the cooling efficiency of the single crystal furnace water cooling device 10, and further improving the stability and uniformity of the thermal field, and improving the quality and purity of the crystal rod.

[0083] This application also discloses a single crystal furnace.

[0084] In some embodiments, the single crystal furnace includes a single crystal furnace water cooling device 10 as described above.

[0085] The single crystal furnace provided in this application embodiment, through the setting of the single crystal furnace water cooling device 10, eliminates the traditional inner guide tube structure, and the heat insulation layer can directly contact the water cooling screen 12, increasing the number of heat insulation layers, significantly reducing heat loss in the thermal field, thereby increasing the longitudinal temperature gradient in the thermal field, improving the growth quality of the crystal rod. Combined with the sealed cooperation between the adapter ring 14 and the outer guide tube 11 and the water cooling screen 12, the risk of displacement and leakage of the heat insulation layer during production is effectively reduced, thereby reducing the adverse effects on the crystal formation of the crystal rod in the later stage, and further improving the quality of the crystal rod. In addition, no modifications are required to the structure of the water cooling screen 12, reducing machining processes and costs, while also increasing the contact area between the adapter ring 14 and the water cooling screen 12, improving support stability, thereby improving the structural stability and reliability of the entire single crystal furnace water cooling device 10.

[0086] The terms "first," "second," etc., used in the specification and claims of this application are used to distinguish similar objects and not to describe a specific order or sequence. It should be understood that such use of data can be interchanged where appropriate so that embodiments of this application can be implemented in orders other than those illustrated or described herein, and the objects distinguished by "first," "second," etc., are generally of the same class and the number of objects is not limited; for example, a first object can be one or more. Furthermore, in the specification and claims, "and / or" indicates at least one of the connected objects, and the character " / " generally indicates that the preceding and following objects are in an "or" relationship.

[0087] In the description of this application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "axial", "radial", "circumferential", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0088] In the description of this application, "first feature" and "second feature" may include one or more of the features.

[0089] In the description of this application, "multiple" means two or more.

[0090] In the description of this application, the first feature being "above" or "below" the second feature may include the first and second features being in direct contact, or the first and second features being in contact through another feature between them.

[0091] In the description of this application, the terms "above," "over," and "on top" for the first feature and the second feature include the first feature being directly above or diagonally above the second feature, or simply indicate that the first feature is at a higher horizontal level than the second feature.

[0092] Other configurations of the embodiments of this application, such as ... and ..., and operations, are known to those skilled in the art and will not be described in detail here.

[0093] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "illustrative embodiment," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of this application. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0094] Although embodiments of this application have been shown and described, those skilled in the art will understand that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of this application, the scope of which is defined by the claims and their equivalents.

Claims

1. A water-cooling device for a single crystal furnace, characterized in that, include: External guide tube; A water-cooled screen is disposed inside the outer guide tube, and a receiving cavity is formed between the water-cooled screen and the outer guide tube; A thermal insulation layer is provided in the receiving cavity; An adapter ring is disposed inside the outer guide tube and connects the outer guide tube and the water-cooled screen. The adapter ring includes a ring body and a flange. The flange is folded outward relative to the ring body. The bottom of the ring body is sealed to the bottom of the outer guide tube. The water-cooled screen is supported by the flange, and the bottom of the water-cooled screen is sealed to the top of the flange.

2. The single crystal furnace water-cooling device according to claim 1, characterized in that, The flange includes a first section and a second section. The first section is bent and connected between the ring body and the second section. The second section protrudes upward relative to the first section to form a first groove. At least a portion of the water-cooled screen is installed in the first groove, and the lower surface of the water-cooled screen is sealed to the bottom wall of the first groove.

3. The single crystal furnace water cooling device according to claim 2, characterized in that, The inner wall of the second section is sealed to the outer wall of the water-cooled screen.

4. The water-cooling device for a single crystal furnace according to claim 1, characterized in that, The flanges are spaced apart from the outer guide tube.

5. The water-cooling device for a single crystal furnace according to any one of claims 1-4, characterized in that, The bottom of the outer guide tube forms a second groove, at least a portion of the ring is installed in the second groove, and the lower surface of the ring is sealed to the bottom wall of the second groove.

6. The single crystal furnace water-cooling device according to claim 5, characterized in that, The outer wall of the ring body is sealed to the side wall of the second groove.

7. The water-cooling device for a single crystal furnace according to claim 5, characterized in that, The ring body has a downward protruding extension section, which is located in the central hole at the bottom of the outer guide tube, and the outer wall of the extension section is sealed to the wall of the central hole.

8. The water-cooling apparatus for a single crystal furnace according to any one of claims 1-4, characterized in that, The outer wall of the ring is inclined inward from top to bottom.

9. The water-cooling device for a single crystal furnace according to any one of claims 1-4, characterized in that, The thermal insulation layer comprises multiple layers of thermal insulation felt wrapped sequentially from the inside out, with at least two layers of thermal insulation felt having different densities and / or materials.

10. A single crystal furnace, characterized in that, include: The water-cooling device for a single crystal furnace as described in any one of claims 1-9.

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