Thermal insulation layer device of thermal deformation resistant flange of polycrystalline furnace

Abstract

The utility model relates to the technical field of thermal insulation structures, and discloses a thermal insulation layer device of a thermal deformation resistant flange of a polycrystalline furnace, which comprises a flange plate, the top of the flange plate is fixedly connected with a thermal insulation layer shell, the top of the thermal insulation layer shell is fixedly connected with a sealing gasket, and the bottom of the sealing gasket is fixedly connected with an aluminum foil thermal insulation layer. The inner wall of the sealing gasket is in threaded connection with a bolt, and a heat insulation assembly is arranged at the bottom of the aluminum foil heat insulation layer. According to the utility model, the sealing gasket and the heat insulation layer shell are firmly fixed above the flange plate through the fixation of the bolt, so that the stability and the sealing performance of the whole device are ensured, heat is transferred to the aluminum foil heat insulation layer in the working process of equipment, and the aluminum foil heat insulation layer is made of an aluminum foil air bubble film material; the high-temperature-resistant heat-insulating film has excellent heat insulating performance and efficient heat reflecting capacity, a large amount of heat radiation can be effectively reflected, the durability of equipment is improved, and it is ensured that the device can continuously and stably work in a high-temperature environment.

Description

Technical Field

[0001] This utility model relates to the field of thermal insulation structure technology, and in particular to a thermal insulation layer device for a polycrystalline furnace anti-thermal deformation flange. Background Technology

[0002] Polycrystalline furnaces need to operate in a high-temperature environment for a long time during silicon wafer production. As an important component for connection and sealing, the flange plays a supporting, connecting and heat conduction role in the polycrystalline furnace. Prolonged exposure to high temperatures can cause thermal deformation of the flange and its connecting components, affecting the stability and service life of the equipment. To address this issue, heat insulation devices are usually used to reduce heat conduction and protect the flange and other related components from high-temperature damage.

[0003] Existing flange insulation devices mainly use multiple layers of insulation materials to reduce heat conduction and protect the flange and surrounding equipment from high temperatures. During operation, through heat reflection and isolation, multi-layer insulation, heat dispersion and slow transfer, sealing and protection, the insulation device can effectively isolate heat conduction in high-temperature environments, prevent thermal deformation and material aging, thereby extending the service life of equipment and improving work efficiency.

[0004] While existing flange insulation materials possess certain insulation properties, their insulation effectiveness is limited, especially in high-temperature environments. This leads to uneven heat conduction and heat loss, making it difficult to effectively block heat transfer to the flange. Consequently, the flange and its connecting components undergo thermal deformation, affecting the stability and service life of the equipment. Therefore, a thermal insulation device for polycrystalline furnace anti-thermal deformation flanges is proposed to address these issues. Utility Model Content

[0005] To overcome the above deficiencies, this utility model provides a heat insulation layer device for a polycrystalline furnace heat-resistant deformation flange, aiming to improve the poor heat insulation effect of the heat insulation layer device of the flange in the prior art.

[0006] To achieve the above objectives, the present invention adopts the following technical solution:

[0007] 1. A heat insulation layer device for a polycrystalline furnace heat-resistant deformation flange, comprising a flange, a heat insulation layer shell fixedly connected to the top of the flange, a sealing gasket fixedly connected to the top of the heat insulation layer shell, an aluminum foil heat insulation layer fixedly connected to the bottom of the sealing gasket, a bolt threaded to the inner wall of the sealing gasket, and a heat insulation component provided at the bottom of the aluminum foil heat insulation layer;

[0008] As a further description of the above technical solution:

[0009] The heat insulation component includes an asbestos heat insulation layer, a nano heat insulation layer fixedly connected to the bottom of the asbestos heat insulation layer, a graphite heat insulation layer fixedly connected to the bottom of the nano heat insulation layer, and a ceramic heat insulation layer fixedly connected to the bottom of the graphite heat insulation layer.

[0010] As a further description of the above technical solution:

[0011] The outer wall of the bolt is threaded to the inner wall of the flange, and the bottom of the aluminum foil insulation layer is fixedly connected to the top of the asbestos insulation layer.

[0012] As a further description of the above technical solution:

[0013] The aluminum foil insulation layer is made of aluminum foil bubble film material, and the asbestos insulation layer is made of asbestos material;

[0014] As a further description of the above technical solution:

[0015] The nano-insulation layer is made of nano-insulation board, and the graphite insulation layer is made of graphite sheet.

[0016] As a further description of the above technical solution:

[0017] The ceramic insulation layer is made of ceramic fiber material, and the inner wall of the aluminum foil insulation layer is threaded to the outer wall of the bolt.

[0018] As a further description of the above technical solution:

[0019] The inner wall of the asbestos insulation layer and the inner wall of the nano-insulation layer are threadedly connected to the outer wall of the bolt, and the inner wall of the graphite insulation layer and the inner wall of the ceramic insulation layer are threadedly connected to the outer wall of the bolt.

[0020] This utility model has the following beneficial effects:

[0021] 1. In this utility model, the sealing gasket and the outer shell of the insulation layer are firmly fixed to the top of the flange by bolts, ensuring the stability and sealing of the entire device. During the operation of the equipment, heat is transferred to the aluminum foil insulation layer. The aluminum foil insulation layer uses aluminum foil bubble film material, which has excellent thermal insulation performance and efficient heat reflection capability. The reflective effect of aluminum foil can effectively reflect away a large amount of heat radiation, reduce the entry of heat, thereby protecting the internal structure from the effects of excessively high temperatures, improving the durability of the equipment, and effectively extending its service life, ensuring that the device can work continuously and stably in high-temperature environments.

[0022] 2. In this utility model, when the remaining heat is transferred to the asbestos insulation layer, which is made of asbestos material, it can insulate some of the heat and provide a buffer for the device. The remaining heat is transferred to the nano insulation layer, which can significantly reduce the thickness of the heat layer and make the heat insulation device smaller. The nano insulation layer continues to transfer the remaining heat to the graphite insulation layer. The graphite insulation layer can make the surface heat distribution uniform and eliminate local overheating. The graphite insulation layer transfers the unabsorbed heat to the ceramic insulation layer. The ceramic can isolate the heat and prevent the heat from being excessively conducted to the connecting parts, which would damage the connecting parts. Attached Figure Description

[0023] Figure 1 This is a three-dimensional schematic diagram of the heat insulation layer device for the polycrystalline furnace heat-resistant deformation flange proposed in this utility model.

[0024] Figure 2 This is a schematic diagram of the bolt structure of the heat insulation layer device for the polycrystalline furnace heat-resistant deformation flange proposed in this utility model.

[0025] Figure 3 This is a schematic diagram of the structure of the heat insulation layer shell of the heat insulation layer device for the polycrystalline furnace heat-resistant deformation flange proposed in this utility model.

[0026] Figure 4 for Figure 3 Enlarged view of point A in the middle.

[0027] Legend:

[0028] 1. Flange; 2. Insulation layer shell; 3. Sealing gasket; 4. Bolt; 5. Aluminum foil insulation layer; 6. Asbestos insulation layer; 7. Nano insulation layer; 8. Graphite insulation layer; 9. Ceramic insulation layer. Detailed Implementation

[0029] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0030] Reference Figure 1 , Figure 3 and Figure 4This utility model provides an embodiment of a heat insulation layer device for a polycrystalline furnace heat-resistant deformation flange, comprising a flange 1. The flange 1 serves as a basic connecting component, undertaking the fixed connection with subsequent components to ensure the stability of the device. A heat insulation layer shell 2 is fixedly connected to the top of the flange 1, the main function of which is to form a closed heat insulation space, reduce heat conduction, and protect the flange 1 and its surrounding equipment from high temperatures. A sealing gasket 3 is fixedly connected to the top of the heat insulation layer shell 2, the sealing gasket 3 serving a sealing function to prevent heat leakage and ensure the airtightness of the flange connection, avoiding media leakage or external contamination. An aluminum foil heat insulation layer 5 is fixedly connected to the bottom of the sealing gasket 3. The material of the aluminum foil heat insulation layer 5 is aluminum foil bubble film, which has excellent heat reflection capability and can reflect most of the heat, reducing the conduction of heat energy to the connection part of the flange 1. Bolts 4 are threadedly connected to the inner wall of the sealing gasket 3, the bolts 4 providing additional tightening force to ensure that the sealing gasket 3 and the aluminum foil heat insulation layer 5 are tightly fitted, increasing the stability and sealing effect of the device. A heat insulation component is provided at the bottom of the aluminum foil heat insulation layer 5.

[0031] Reference Figures 2 to 4 The thermal insulation component includes an asbestos insulation layer 6, which is made of asbestos material. This material has good high-temperature resistance and thermal insulation performance, effectively blocking the conduction of high temperatures and protecting the equipment from external heat sources. A nano-insulation layer 7 is fixedly connected to the bottom of the asbestos insulation layer 6. The nano-insulation layer 7 is made of nano-insulation board material. Nanomaterials have super thermal insulation capabilities, which can greatly reduce heat conduction and improve the overall thermal insulation performance. A graphite insulation layer 8 is fixedly connected to the bottom of the nano-insulation layer 7. The graphite insulation layer 8 is made of graphite sheet material. Graphite has extremely high thermal conductivity, but in this structure, the graphite sheet provides an additional heat conduction path to achieve uniform heat distribution in the multi-layer structure and enhance the thermal insulation effect. A ceramic insulation layer 9 is fixedly connected to the bottom of the graphite insulation layer 8. The ceramic insulation layer 9 is made of ceramic fiber material, which has excellent high-temperature resistance and thermal insulation performance, effectively absorbing and isolating residual heat and preventing heat from being transferred downwards to the flange 1 and the equipment.

[0032] Working principle: The sealing gasket 3 and the heat insulation shell 2 can be fixed above the flange 1 by the bolt 4. When the device is working, it is subjected to heat transfer and can transfer the heat to the aluminum foil heat insulation layer 5. The aluminum foil heat insulation layer 5 is made of aluminum foil bubble film material, which is composed of double-sided aluminum foil and a polyethylene bubble layer in the middle. It has good insulation and heat reflection functions, and isolates a large amount of heat radiation. The remaining heat is transferred to the asbestos heat insulation layer 6. The asbestos heat insulation layer 6 is made of asbestos material. Asbestos has high tensile strength, high flexibility, chemical resistance and thermal corrosion resistance, which can isolate some heat and provide a buffer for the device.

[0033] The remaining heat is transferred to the nano-insulation layer 7, which is made of nano-insulation board, significantly reducing the thickness of the heat layer and miniaturizing the insulation device. The nano-insulation layer 7 then transfers the remaining heat to the graphite insulation layer 8, which conducts heat quickly in the horizontal direction, ensuring uniform heat distribution on the surface and eliminating local overheating. The graphite insulation layer 8 transfers the unabsorbed heat to the ceramic insulation layer 9, which is lightweight, high-temperature resistant, has good thermal stability, and low thermal conductivity, maximizing heat isolation and preventing excessive heat conduction to the connecting components, thus avoiding damage to the connecting components.

[0034] Finally, it should be noted that the above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A heat insulation layer device for a polycrystalline furnace heat-resistant deformation flange, comprising a flange (1), characterized in that: The top of the flange (1) is fixedly connected to the heat insulation shell (2), the top of the heat insulation shell (2) is fixedly connected to the sealing gasket (3), the bottom of the sealing gasket (3) is fixedly connected to the aluminum foil heat insulation layer (5), the inner wall of the sealing gasket (3) is threaded with bolts (4), and the bottom of the aluminum foil heat insulation layer (5) is provided with a heat insulation component.

2. The heat insulation layer device for the polycrystalline furnace heat-resistant deformation flange according to claim 1, characterized in that: The heat insulation component includes an asbestos heat insulation layer (6), a nano heat insulation layer (7) is fixedly connected to the bottom of the asbestos heat insulation layer (6), a graphite heat insulation layer (8) is fixedly connected to the bottom of the nano heat insulation layer (7), and a ceramic heat insulation layer (9) is fixedly connected to the bottom of the graphite heat insulation layer (8).

3. The heat insulation layer device for the polycrystalline furnace heat-resistant deformation flange according to claim 2, characterized in that: The outer wall of the bolt (4) is threaded to the inner wall of the flange (1), and the bottom of the aluminum foil insulation layer (5) is fixedly connected to the top of the asbestos insulation layer (6).

4. The heat insulation layer device for the polycrystalline furnace heat-resistant deformation flange according to claim 2, characterized in that: The aluminum foil insulation layer (5) is made of aluminum foil bubble film material, and the asbestos insulation layer (6) is made of asbestos material.

5. The heat insulation layer device for the polycrystalline furnace heat-resistant deformation flange according to claim 2, characterized in that: The nano-insulation layer (7) is made of nano-insulation board, and the graphite insulation layer (8) is made of graphite sheet.

6. The heat insulation layer device for the polycrystalline furnace heat-resistant deformation flange according to claim 2, characterized in that: The ceramic insulation layer (9) is made of ceramic fiber material, and the inner wall of the aluminum foil insulation layer (5) is threaded to the outer wall of the bolt (4).

7. The heat insulation layer device for the polycrystalline furnace heat-resistant deformation flange according to claim 2, characterized in that: The inner wall of the asbestos insulation layer (6) and the inner wall of the nano insulation layer (7) are threadedly connected to the outer wall of the bolt (4), and the inner wall of the graphite insulation layer (8) and the inner wall of the ceramic insulation layer (9) are threadedly connected to the outer wall of the bolt (4).

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