Physical vapor deposition vacuum chamber structure

Abstract

The utility model discloses a physical vapor deposition vacuum chamber structure which comprises a deposition machine shell, a sputtering assembly is installed in the middle of the top end of the inner wall of the deposition machine shell, the top end of one side of the deposition machine shell is fixedly communicated with an air inlet pipeline, and the bottom end of the other side of the deposition machine shell is fixedly communicated with a vacuum assembly. The two sides of the inner wall of the deposition machine shell are both rotationally connected with fixing assemblies, a target shooting assembly is fixedly installed at the bottom end of the inner wall of the deposition machine shell, the sputtering assembly comprises a rotating shaft and a sputtering table, the bottom end of the rotating shaft is fixedly connected with the top end of the sputtering table, and a sputtering piece is fixedly installed at the bottom end of the sputtering table. By arranging the fixing assembly, the clamping air cylinder pushes the movable block from one side, the movable block pushes the clamping plates from the two sides to conduct angular deflection relative to the clamping frame, the two clamping plates are matched with each other to conduct clamping and fixing from the two sides of a product, the servo motor drives the fixing assembly to rotate, multi-angle film covering operation of the product is conveniently completed, and practicability is high.

Description

A physical vapor deposition vacuum chamber structure Technical Field

[0001] This utility model relates to the field of physical vapor deposition vacuum chamber technology, specifically a physical vapor deposition vacuum chamber structure. Background Technology

[0002] Physical vapor deposition (PVD) is a very common surface treatment technique that forms a thin film by evaporating or sputtering material onto a substrate surface. This method is widely used in modern industry, especially in electronics, optics, and metal processing. In short, PVD converts solid materials into gases, which are then condensed and deposited onto the target object to form a very thin film. All of this is done in a vacuum environment, ensuring that the deposition process is not affected by impurities in the air. It produces extremely high film quality, and the relatively low temperature during deposition minimizes thermal damage to the substrate, making it particularly suitable for materials with poor heat resistance and temperature sensitivity. The deposited film has high density, strong adhesion, and excellent surface smoothness and uniformity. It acts like an invisible protective umbrella, completely enveloping the substrate and preventing corrosion from the external environment.

[0003] However, traditional physical vapor deposition vacuum chambers have the following drawbacks:

[0004] Traditional physical vapor deposition vacuum chambers can only perform coating operations on products from a single direction, which cannot meet the needs of multi-sided coating of products and has low practicality. Summary of the Invention

[0005] The purpose of this invention is to provide a physical vapor deposition vacuum chamber structure to solve the problem mentioned in the background art that traditional physical vapor deposition vacuum chambers can only perform coating operations on products from a single direction, which cannot meet the needs of multi-sided coating of products and has low practicality.

[0006] To achieve the above objectives, this utility model provides the following technical solution: a physical vapor deposition vacuum chamber structure, comprising a deposition housing, a sputtering assembly installed at the middle of the top of the inner wall of the deposition housing, an air inlet pipe fixedly connected to the top of one side of the deposition housing, a vacuum assembly fixedly connected to the bottom of the other side of the deposition housing, fixed assemblies rotatably connected to both sides of the inner wall of the deposition housing, a target sputtering assembly fixedly installed at the bottom of the inner wall of the deposition housing, the sputtering assembly comprising a rotating shaft and a sputtering stage, the bottom of the rotating shaft being fixedly connected to the top of the sputtering stage, a sputtering element fixedly installed at the bottom of the sputtering stage, the target sputtering assembly comprising two vertical plates and a target stage, a lead screw rotatably connected between the two vertical plates, a displacement block slidably connected to the middle of the lead screw and the deposition housing, the top of the displacement block being fixedly connected to the bottom of the target stage, and a target element fixedly installed at the top of the target stage.

[0007] Preferably, both fixing components include a length shell and a length rod. One end of the length shell is slidably connected to one end of the length rod, and a clamping platform is fixedly installed at the other end of the length rod. A clamping frame is fixedly installed on one side of the clamping platform. Clamping plates are rotatably connected to both ends of one side of the clamping frame. Anti-slip pads are fixedly installed on the opposite sides of the two clamping plates. Connecting springs are fixedly installed on the opposite sides of the two clamping plates. The sides of the two connecting springs away from the clamping plates are fixedly connected to the side of the clamping frame facing each other. A clamping cylinder is fixedly installed in the middle of one side of the clamping platform. A movable block is fixedly installed on the movable end of the clamping cylinder. Both clamping plates are slidably connected to the movable block. The ends of the two length shells away from the length rod are rotatably connected to the deposition machine housing. A servo motor that drives the length rod to rotate is fixedly installed in the middle of one side of the deposition machine housing. The clamping cylinder performs telescopic movement. The clamping cylinder pushes the movable block from one side. The movable block pushes the clamping plates from both sides to deflect the angle relative to the clamping frame. The two clamping plates cooperate to clamp and fix the product from both sides. After the servo motor is powered on, it starts and drives the length shell to rotate, adjusting the angle of the product.

[0008] Preferably, a motor body for driving the lead screw to rotate is fixedly installed on the surface of the deposition housing. The bottom ends of the two vertical plates are fixedly connected to the deposition housing. After the motor body is powered on, it starts and drives the lead screw to rotate. The thread on the surface of the lead screw matches the thread on the inner wall of the displacement block. The displacement block is limited by the deposition housing, which matches its shape and size. Therefore, the displacement block slides along the lead screw to adjust the position of the target.

[0009] Preferably, a motor frame is fixedly installed at the middle of the top of the deposition housing, and a stepper motor is fixedly installed at the top of the motor frame. The output end of the stepper motor is fixedly connected to the end of the rotating shaft that is directly opposite to it. The bottom end of the motor frame is fixedly connected to the deposition housing. When the stepper motor is powered on, it starts and drives the rotating shaft to rotate, thereby adjusting the direction of the sputtered component.

[0010] Preferably, the top end of the rotating shaft is rotatably connected to the deposition housing, and a magnetic fluid sealing block is sleeved on the outer side of the connection between the rotating shaft and the deposition housing. The establishment of the magnetic fluid sealing block improves the sealing performance of the sputtering assembly installation.

[0011] Preferably, a temperature sensor extending into the interior is fixedly installed on one side of the top of the deposition housing, and a pressure sensor extending into the interior is fixedly installed on the other side of the top of the deposition housing. The temperature sensor senses the temperature inside the deposition housing in real time, and the pressure sensor senses the pressure inside the deposition housing in real time.

[0012] Preferably, the vacuum assembly includes a vacuum pump and an extraction pipe. The inlet of the vacuum pump is fixedly connected to one end of the extraction pipe, and the outlet of the vacuum pump is fixedly connected to a delivery pipe extending to the outside. The end of the extraction pipe away from the vacuum pump is fixedly connected to the side of the deposition chamber facing it. The front of the deposition chamber has a sealing door. After the vacuum pump is powered on, it starts and extracts gas from the deposition chamber through the extraction pipe. The extracted gas is then delivered to the outside through the delivery pipe.

[0013] Compared with the prior art, the beneficial effects of this utility model are: by setting a fixing component, the clamping cylinder pushes the movable block from one side, and the movable block pushes the clamping plate from both sides to deflect the angle relative to the clamping frame. The two clamping plates cooperate with each other to clamp and fix the product from both sides. The servo motor drives the fixing component to rotate, which makes it easy for the product to complete multi-angle film coating operations and has high practicality. Attached Figure Description

[0014] Figure 1 is a side view of this utility model;

[0015] Figure 2 is a cross-sectional view of this utility model;

[0016] Figure 3 is a side view of the fixing component of this utility model;

[0017] Figure 4 is a perspective view of the target firing assembly of this utility model.

[0018] In the diagram: 1. Deposition chamber; 2. Servo motor; 3. Inlet pipe; 4. Sealing door; 5. Temperature sensor; 6. Sputtering assembly; 61. Motor frame; 62. Stepper motor; 63. Shaft; 64. Magnetohydrodynamic sealing block; 65. Sputtering stage; 66. Sputtered component; 7. Pressure sensor; 8. Vacuum assembly; 81. Extraction pipe; 82. Vacuum pump; 83. Delivery pipe; 9. Target assembly; 91. Motor body; 92. Vertical plate; 93. Displacement block; 94. Lead screw; 95. Target stage; 96. Target component; 10. Fixing assembly; 101. Length shell; 102. Length rod; 103. Clamping stage; 104. Clamping frame; 105. Clamping plate; 106. Anti-slip pad; 107. Movable block; 108. Connecting spring; 109. Clamping cylinder. Detailed Implementation

[0019] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention.

[0020] Please refer to Figures 1-4. This utility model provides a physical vapor deposition vacuum chamber structure, including a deposition housing 1. A sputtering assembly 6 is installed in the middle of the top of the inner wall of the deposition housing 1. An air inlet pipe 3 is fixedly connected to the top of one side of the deposition housing 1. A vacuum assembly 8 is fixedly connected to the bottom of the other side of the deposition housing 1. Fixing assemblies 10 are rotatably connected to both sides of the inner wall of the deposition housing 1. A target sputtering assembly 9 is fixedly installed at the bottom of the inner wall of the deposition housing 1. The sputtering assembly 6 includes a rotating shaft 63 and a sputtering stage 65. The bottom of the rotating shaft 63 is fixedly connected to the top of the sputtering stage 65. A sputtering element 66 is fixedly installed at the bottom of the sputtering stage 65. The target sputtering assembly 9 includes two vertical plates 92 and a target stage 95. A lead screw 94 is rotatably connected between the two vertical plates 92. A displacement block 93 that is slidably connected to the deposition housing 1 is threaded in the middle of the lead screw 94. The top of the displacement block 93 is fixedly connected to the bottom of the target stage 95. A target element 96 is fixedly installed at the top of the target stage 95.

[0021] Both fixing components 10 include a length shell 101 and a length rod 102. One end of the length shell 101 is slidably connected to one end of the length rod 102. A clamping platform 103 is fixedly installed at the other end of the length rod 102. A clamping frame 104 is fixedly installed on one side of the clamping platform 103. Clamping plates 105 are rotatably connected to both ends of one side of the clamping frame 104. Anti-slip pads 106 are fixedly installed on the opposite sides of the two clamping plates 105. Connecting springs 108 are fixedly installed on the opposite sides of the two clamping plates 105. The sides of the two connecting springs 108 away from the clamping plates 105 are fixedly connected to the side of the clamping frame 104 facing each other. A clamping cylinder 109 is fixedly installed in the middle of one side of the clamping platform 103. A movable block 107 is fixedly installed on the movable end of cylinder 109. Both clamping plates 105 are slidably connected to the movable block 107. The ends of the two length shells 101 away from the length rod 102 are rotatably connected to the deposition machine housing 1. A servo motor 2 that drives the rotation of the length rod 102 is fixedly installed in the middle of one side of the deposition machine housing 1. The clamping cylinder 109 performs telescopic movement. The clamping cylinder 109 pushes the movable block 107 from one side. The movable block 107 pushes the clamping plates 105 from both sides to deflect the angle relative to the clamping frame 104. The two clamping plates 105 cooperate to clamp and fix the product from both sides. After the servo motor 2 is powered on, it starts and drives the length shell 101 to rotate, adjusting the angle of the product.

[0022] A motor body 91 for driving the lead screw 94 to rotate is fixedly installed on the surface of the deposition housing 1. The bottom ends of the two vertical plates 92 are fixedly connected to the deposition housing 1. When the motor body 91 is powered on, it starts and drives the lead screw 94 to rotate. The thread on the surface of the lead screw 94 matches the thread on the inner wall of the displacement block 93. The displacement block 93 is limited by the deposition housing 1, which matches its shape and size. Therefore, the displacement block 93 slides along the lead screw 94 to adjust the position of the target 96.

[0023] A motor frame 61 is fixedly installed at the middle of the top of the deposition housing 1. A stepper motor 62 is fixedly installed at the top of the motor frame 61. The output end of the stepper motor 62 is fixedly connected to the end of the rotating shaft 63 that is directly opposite to it. The bottom end of the motor frame 61 is fixedly connected to the deposition housing 1. When the stepper motor 62 is powered on, it starts and drives the rotating shaft 63 to rotate, thereby adjusting the direction of the sputtered component 66.

[0024] The top end of the rotating shaft 63 is rotatably connected to the deposition housing 1. A magnetic fluid sealing block 64 is sleeved on the outside of the connection between the rotating shaft 63 and the deposition housing 1. The establishment of the magnetic fluid sealing block 64 improves the sealing performance of the sputtering assembly 6.

[0025] A temperature sensor 5 extending into the interior is fixedly installed on one side of the top of the deposition housing 1, and a pressure sensor 7 extending into the interior is fixedly installed on the other side of the top of the deposition housing 1. The temperature sensor 5 senses the temperature inside the deposition housing 1 in real time, and the pressure sensor 7 senses the pressure inside the deposition housing 1 in real time.

[0026] The vacuum assembly 8 includes a vacuum pump 82 and an extraction pipe 81. The air inlet of the vacuum pump 82 is fixedly connected to one end of the extraction pipe 81, and the air outlet of the vacuum pump 82 is fixedly connected to a delivery pipe 83 extending to the outside. The end of the extraction pipe 81 away from the vacuum pump 82 is fixedly connected to the side of the deposition housing 1 facing it. The front of the deposition housing 1 is connected to a sealing door 4. After the vacuum pump 82 is powered on, it starts and extracts the gas inside the deposition housing 1 through the extraction pipe 81. The extracted gas is delivered to the outside through the delivery pipe 83.

[0027] In this embodiment, during use: gas is injected into the deposition chamber 1 through the inlet pipe 3. The user opens the sealing door 4 and places the product in the fixing assembly 10. The clamping cylinder 109 extends and retracts, pushing the movable block 107 from one side. The movable block 107 pushes the clamping plates 105 from both sides, causing them to deflect relative to the clamping frame 104. The two clamping plates 105 cooperate to clamp and fix the product from both sides. The servo motor 2 starts after being powered on, driving the length shell 101 to rotate and adjust the angle of the product. The vacuum pump 82 starts after being powered on. The air pump 82 extracts gas from the deposition chamber 1 through the extraction pipe 81. The extracted gas is then transported to the outside through the delivery pipe 83. The stepper motor 62 is started after being powered on, and the stepper motor 62 drives the rotating shaft 63 to rotate, adjusting the direction of the sputtered part 66. The motor body 91 is started after being powered on, and the motor body 91 drives the lead screw 94 to rotate. The thread on the surface of the lead screw 94 matches the thread on the inner wall of the displacement block 93. The displacement block 93 is limited by the deposition chamber 1, which matches its shape and size. Therefore, the displacement block 93 slides along the lead screw 94 to adjust the position of the target part 96.

[0028] Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A physical vapour deposition vacuum chamber structure comprising a deposition enclosure (1), characterised in that: A sputtering assembly (6) is installed at the middle of the top of the inner wall of the deposition housing (1). An air inlet pipe (3) is fixedly connected to the top of one side of the deposition housing (1). A vacuum assembly (8) is fixedly connected to the bottom of the other side of the deposition housing (1). Fixed assemblies (10) are rotatably connected to both sides of the inner wall of the deposition housing (1). A target sputtering assembly (9) is fixedly installed at the bottom of the inner wall of the deposition housing (1). The sputtering assembly (6) includes a rotating shaft (63) and a sputtering stage (65). The bottom of the rotating shaft (63) is connected to the sputtering stage. The top of the sputtering platform (65) is fixedly connected, and the bottom of the sputtering platform (65) is fixedly installed with a sputtering component (66). The target assembly (9) includes two vertical plates (92) and a target platform (95). A lead screw (94) is rotatably connected between the two vertical plates (92). The middle part of the lead screw (94) is threadedly connected with a displacement block (93) that is slidably connected to the deposition housing (1). The top of the displacement block (93) is fixedly connected to the bottom of the target platform (95). The top of the target platform (95) is fixedly installed with a target component (96).

2. The physical vapor deposition vacuum chamber structure according to claim 1, characterized in that: Both of the fixing components (10) include a length shell (101) and a length rod (102). One end of the length shell (101) is slidably connected to one end of the length rod (102). A clamping platform (103) is fixedly installed at the other end of the length rod (102). A clamping frame (104) is fixedly installed on one side of the clamping platform (103). Both ends of one side of the clamping frame (104) are rotatably connected to clamping plates (105). Anti-slip pads (106) are fixedly installed on the opposite sides of the two clamping plates (105). Connecting springs (108) are fixedly installed on the opposite sides of the two clamping plates (105). The two connecting springs (108) are fixedly connected to the side of the clamping frame (104) opposite to the side of the clamping plate (105) on the side away from the clamping plate (105). A clamping cylinder (109) is fixedly installed in the middle of one side of the clamping platform (103). A movable block (107) is fixedly installed at the movable end of the clamping cylinder (109). The two clamping plates (105) are slidably connected to the movable block (107). The two length shells (101) are rotatably connected to the deposition machine housing (1) at the end away from the length rod (102). A servo motor (2) that drives the rotation of the length rod (102) is fixedly installed in the middle of one side of the deposition machine housing (1).

3. The physical vapor deposition vacuum chamber structure according to claim 1, characterized in that: The surface of the deposition housing (1) is fixedly mounted with a motor body (91) that drives the lead screw (94) to rotate, and the bottom ends of the two vertical plates (92) are fixedly connected to the deposition housing (1).

4. A physical vapor deposition vacuum chamber structure as defined in claim 1, wherein: A motor frame (61) is fixedly installed at the middle of the top of the deposition housing (1). A stepper motor (62) is fixedly installed at the top of the motor frame (61). The output end of the stepper motor (62) is fixedly connected to the end of the rotating shaft (63). The bottom end of the motor frame (61) is fixedly connected to the deposition housing (1).

5. A physical vapor deposition vacuum chamber structure as defined in claim 1, wherein: The top end of the rotating shaft (63) is rotatably connected to the deposition housing (1), and a magnetic fluid sealing block (64) is sleeved on the outside of the connection between the rotating shaft (63) and the deposition housing (1).

6. A physical vapor deposition vacuum chamber structure as defined in claim 1, wherein: A temperature sensor (5) extending into the interior is fixedly installed on one side of the top of the deposition housing (1), and a pressure sensor (7) extending into the interior is fixedly installed on the other side of the top of the deposition housing (1).

7. A physical vapor deposition vacuum chamber structure as defined in claim 1, wherein: The vacuum assembly (8) includes a vacuum pump (82) and an extraction pipe (81). The air inlet of the vacuum pump (82) is fixedly connected to one end of the extraction pipe (81). The air outlet of the vacuum pump (82) is fixedly connected to a delivery pipe (83) extending to the outside. The end of the extraction pipe (81) away from the vacuum pump (82) is fixedly connected to the side of the deposition housing (1) facing it. The front of the deposition housing (1) is connected to a sealing door (4).

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