Vacuum sputtering coating equipment

Abstract

The utility model belongs to the technical field of vacuum sputter coating, and discloses vacuum sputter coating equipment. The vacuum sputtering coating equipment comprises a cavity, a support assembly, a plurality of telescopic pipes and a driving mechanism, the cavity is provided with a closed vacuum cavity, the support assembly is arranged in the cavity in a sliding mode along the X axis, a plurality of sputtering sources are placed on the support assembly, the telescopic pipes extend along the X axis, the length of the telescopic pipes is telescopic, the telescopic pipes are hollow to form channels, and the driving mechanism is arranged on the support assembly. The two ends of the telescopic pipe are in sealed connection with the support assembly and the side wall of the cavity respectively, a through hole is formed in the side wall of the cavity, the channel communicates with the outside of the cavity through the through hole, the driving mechanism comprises a driving part and a pull rope assembly, the pull rope assembly is fixedly connected with the output end of the driving part, and the pull rope assembly penetrates into the telescopic pipe through the channel to be connected with the support assembly. The output end of the driving part moves along the X axis and can drive the pull rope assembly to pull the support assembly to slide left and right along the X axis. The sealing performance of the vacuum cavity can be guaranteed, and air pressure fluctuation is small.

Description

A vacuum sputtering coating equipment Technical Field

[0001] This utility model relates to the field of vacuum sputtering coating technology, and in particular to a vacuum sputtering coating device. Background Technology

[0002] Vacuum sputtering is a technique that uses high-energy particles to bombard a stationary target, sputtering out atoms or molecules from its surface and depositing them onto a substrate (such as silicon wafers or glass) to form a thin film. The deposition process must be carried out in a vacuum chamber to reduce interference from gas molecules, prevent energy loss due to collisions between target atoms and the gas, prevent oxidation or contamination of the sputtering source or substrate, and ensure the purity of the thin film.

[0003] To improve the uniformity of the coating, the sputtering source is usually made to move in a straight line within a vacuum chamber. In the prior art, conventional drive and transmission components are usually set up in the vacuum chamber to drive the sputtering source. However, the conventional transmission components carry lubricating oil, which can contaminate the vacuum chamber and cause the film to become contaminated. Furthermore, the movement process causes changes in the gas volume within the vacuum chamber, resulting in pressure fluctuations that interfere with the coating process.

[0004] Therefore, there is a need to provide a vacuum sputtering coating equipment to solve the above problems. Summary of the Invention

[0005] The purpose of this invention is to provide a vacuum sputtering coating equipment with a simple structure, which can ensure the airtightness of the vacuum chamber and has small pressure fluctuations, thus meeting the requirements for high-quality coating.

[0006] To achieve this objective, the present invention adopts the following technical solution:

[0007] A vacuum sputtering coating apparatus, comprising:

[0008] The cavity has a sealed vacuum chamber;

[0009] A support assembly is slidably disposed in the cavity along the X-axis, and several sputtering sources are placed on the support assembly;

[0010] Multiple telescopic tubes extend along the X-axis and are telescopically adjustable in length. The interior of each telescopic tube is hollow to form a channel. Both ends of each telescopic tube are respectively sealed to the side wall of the support assembly and the cavity. The side wall of the cavity has a through hole, and the channel communicates with the outside of the cavity through the through hole.

[0011] The driving mechanism includes a driving component and a pull rope assembly. The pull rope assembly is fixedly connected to the output end of the driving component, and the pull rope assembly passes through the channel into the telescopic tube to connect with the bracket assembly. The output end of the driving component can move along the X-axis to drive the pull rope assembly to pull the bracket assembly to slide left and right along the X-axis.

[0012] Preferably, the support assembly includes a support body and a fixed base. The fixed base is disposed on the support body. At least one telescopic tube is sealed and connected to both sides of the fixed base along the X-axis. The two free ends of the pull rope assembly are respectively inserted into the two telescopic tubes and fixedly connected to both sides of the fixed base along the X-axis. The driving member is arranged at intervals with the support assembly along the Y-axis direction. The pull rope assembly is fixedly connected to the output end of the driving member.

[0013] Preferably, the pull rope assembly includes two pull ropes, each pull rope having a free end and a fixed end. The fixed end is fixedly connected to the output end of the drive member, and the free end passes through a telescopic tube and is fixedly connected to the fixed seat on one side along the X-axis.

[0014] Preferably, the drive mechanism further includes a mounting component, the mounting component comprising:

[0015] A fixing plate is fixedly disposed at the output end of the driving component;

[0016] The mounting component has a threaded section extending along the X-axis, the mounting component is threadedly connected to the fixing plate, and the fixed end of the pull rope is fixedly connected to the mounting component.

[0017] A nut is threaded onto the threaded section and abuts against the fixing plate. Rotating the nut can drive the mounting component to move along the X-axis.

[0018] Preferably, the mounting component has a mounting ring, and the fixed end of the pull rope has a hanging ring, which is attached to the mounting ring.

[0019] Preferably, the vacuum sputtering coating equipment further includes:

[0020] A guide assembly is disposed within the vacuum cavity, and the guide assembly is used to guide the movement of the support assembly.

[0021] Preferably, the guide assembly includes a slidingly fitted guide rail and a guide block, the guide rail extending along the X-axis, and one of the bracket assembly and the cavity is provided with the guide rail, while the other is provided with the guide block.

[0022] Preferably, the vacuum sputtering coating equipment further includes:

[0023] Mounting bracket, wherein the cavity and the driving component are spaced apart along the Y-axis on the mounting bracket;

[0024] The guide wheel assembly is provided on both sides of the mounting frame along the X-axis. The guide wheel assembly includes a plurality of guide wheels arranged at intervals along the Y-axis, and the guide wheels provide support and guidance for the pull rope assembly.

[0025] Preferably, the guide wheel assembly further includes a mounting plate, on which a plurality of the guide wheels are disposed, and the mounting plate is adjustablely disposed on the mounting frame along the Y-axis.

[0026] Preferably, the guide wheel is adjustablely positioned on the mounting plate along the Y-axis.

[0027] The beneficial effects of this utility model are:

[0028] This vacuum sputtering coating equipment includes a cavity, a support assembly, multiple telescopic tubes, and a drive mechanism. The cavity has a sealed vacuum chamber. The support assembly is slidably disposed within the cavity along the X-axis. Several sputtering sources are placed on the support assembly. The multiple telescopic tubes extend along the X-axis and are telescopically adjustable in length. The telescopic tubes are hollow inside to form a channel. Both ends of the telescopic tubes are sealed and connected to the side walls of the support assembly and the cavity, respectively. The side walls of the cavity have through holes, and the channel communicates with the outside of the cavity through the through holes. The drive mechanism includes a drive component and a pull rope assembly. The pull rope assembly is fixedly connected to the output end of the drive component, and the pull rope assembly passes through the channel into the telescopic tube to connect with the support assembly. The output end of the drive component moves along the X-axis, which can drive the pull rope assembly to pull the support assembly to slide left and right along the X-axis.

[0029] The cavity has a sealed vacuum chamber to provide a vacuum environment for coating; the support assembly is used to place the sputtering source; the telescopic tube extends along the X-axis and is adjustable in length, with both ends sealed to the support assembly and the side wall of the cavity, respectively. The through holes in the side wall of the cavity allow the channel of the telescopic tube to communicate with the outside; the drive unit is used to provide power, and the pull rope assembly is used to transmit power. When the output end of the drive unit moves along the X-axis, it will pull the pull rope assembly. Since the pull rope assembly passes through the channel into the telescopic tube and is connected to the support assembly, the movement of the pull rope assembly will drive the support assembly to slide left and right along the X-axis. The sliding of the support assembly will drive the sputtering source placed on it to move, thereby realizing the movement of the sputtering source along the X-axis in the vacuum chamber and improving the coating uniformity.

[0030] Compared with existing technologies, this invention, by incorporating a telescopic tube, ensures the airtightness of the vacuum chamber while allowing the pull rope assembly to connect to the support assembly placed inside the vacuum chamber. This transmits the power generated by the drive component located outside the vacuum chamber, avoiding the lubricating oil contamination problem associated with traditional drive and transmission components located within the vacuum chamber, thus ensuring the cleanliness of the coating. The telescopic tube has a hollow interior forming a channel through which the pull rope assembly passes to connect with the support assembly, minimizing the impact on the gas volume within the vacuum chamber during drive and reducing pressure fluctuations. This invention's vacuum sputtering coating equipment, through the cooperation of the drive mechanism and the telescopic tube, achieves the drive of the support assembly. Its simple structure ensures the airtightness of the vacuum chamber and minimizes pressure fluctuations, meeting the requirements for high-quality coating. Attached Figure Description

[0031] Figure 1 is a schematic diagram of the vacuum sputtering coating equipment provided by this utility model;

[0032] Figure 2 is a magnified view of part A in Figure 1;

[0033] Figure 3 is an enlarged cross-sectional view of point B in Figure 1;

[0034] Figure 4 is a structural schematic diagram of the fixing base provided by this utility model.

[0035] In the picture:

[0036] 1. Cavity; 11. Vacuum cavity;

[0037] 2. Bracket assembly; 21. Bracket body; 22. Mounting base;

[0038] 3. Sputtering source;

[0039] 4. Telescopic pipe;

[0040] 5. Drive mechanism; 51. Drive component; 522. Pull rope; 5221. Hanging ring; 53. Mounting assembly; 531. Fixing plate; 532. Mounting component; 5321. Threaded section; 5322. Mounting ring; 533. Nut;

[0041] 6. Guiding components;

[0042] 7. Mounting bracket;

[0043] 8. Guide wheel assembly; 81. Guide wheel; 82. Mounting plate. Detailed Implementation

[0044] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present invention and not intended to limit it. Furthermore, it should be noted that, for ease of description, the accompanying drawings show only the parts relevant to the present invention, not the entire structure.

[0045] In the description of this utility model, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0046] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0047] In the description of this embodiment, the terms "upper," "lower," "right," etc., refer to the orientation or positional relationship shown in the accompanying drawings. They are used only for ease of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. In addition, the terms "first" and "second" are only used for distinction in description and have no special meaning.

[0048] To improve the uniformity of the coating, the sputtering source is usually made to move in a straight line within a vacuum chamber. In the prior art, conventional drive and transmission components are usually set up in the vacuum chamber to drive the sputtering source. However, the conventional transmission components carry lubricating oil, which can contaminate the vacuum chamber and cause the film to become contaminated. Furthermore, the movement process causes changes in the gas volume within the vacuum chamber, resulting in pressure fluctuations that interfere with the coating process.

[0049] To address the aforementioned issues, as shown in Figures 1-4, this embodiment provides a vacuum sputtering coating apparatus. This vacuum sputtering coating apparatus includes a cavity 1, a support assembly 2, multiple telescopic tubes 4, and a drive mechanism 5. The cavity 1 has a sealed vacuum chamber 11. The support assembly 2 is slidably disposed within the cavity 1 along the X-axis. Several sputtering sources 3 are placed on the support assembly 2. The multiple telescopic tubes 4 extend along the X-axis and are telescopically adjustable in length. The telescopic tubes 4 are hollow to form a channel. Both ends of the telescopic tubes 4 are sealed to the side walls of the support assembly 2 and the cavity 1, respectively. The side walls of the cavity 1 have through holes, and the channel communicates with the outside of the cavity 1 through the through holes. The drive mechanism 5 includes a drive element 51 and a pull rope assembly. The pull rope assembly is fixedly connected to the output end of the drive element 51, and the pull rope assembly passes through the channel into the telescopic tubes 4 to connect with the support assembly 2. The output end of the drive element 51 moves along the X-axis, which can drive the pull rope assembly to pull the support assembly 2 to slide left and right along the X-axis.

[0050] The cavity 1 has a sealed vacuum chamber 11 to provide a vacuum environment for coating; the support assembly 2 is used to place the sputtering source 3; the telescopic tube 4 extends along the X-axis and is adjustable in length, with both ends sealed to the side walls of the support assembly 2 and the cavity 1 respectively, and the through holes in the side walls of the cavity 1 allow the channel of the telescopic tube 4 to communicate with the outside; the drive unit 51 is used to provide power, and the pull rope assembly is used to transmit power. When the output end of the drive unit 51 moves along the X-axis, it will pull the pull rope assembly. Since the pull rope assembly passes through the channel into the telescopic tube 4 and is connected to the support assembly 2, the movement of the pull rope assembly will drive the support assembly 2 to slide left and right along the X-axis. The sliding of the support assembly 2 will drive the sputtering source 3 placed on it to move, thereby realizing the movement of the sputtering source 3 along the X-axis in the vacuum chamber 11, improving the coating uniformity.

[0051] Compared with existing technologies, this embodiment, by setting up a telescopic tube 4, ensures the airtightness of the vacuum chamber 11 while allowing the pull rope assembly to connect to the support assembly 2 placed inside the vacuum chamber 11. This transmits the power generated by the drive component 51 located outside the vacuum chamber 11, avoiding the lubricating oil contamination problem caused by traditional drive and transmission components placed in the vacuum chamber 11, thus ensuring the cleanliness of the coating. The telescopic tube 4 has a hollow interior forming a channel through which the pull rope assembly passes to connect with the support assembly 2, minimizing the impact on the gas volume inside the vacuum chamber 11 during the drive process and reducing pressure fluctuations. The vacuum sputtering coating equipment of this embodiment achieves the drive of the support assembly 2 through the cooperation of the drive mechanism 5 and the telescopic tube 4. It has a simple structure, ensures the airtightness of the vacuum chamber 11 of the cavity 1, and has small pressure fluctuations, meeting the requirements of high-quality coating.

[0052] It should be noted that the telescopic pipe 4 in this embodiment is a corrugated pipe. Corrugated pipes have excellent flexibility and extensibility, as well as good sealing performance. They are lightweight, easy to transport and install, and can be quickly installed through flanges.

[0053] Specifically, as shown in Figures 1, 3, and 4, the support assembly 2 includes a support body 21 and a fixing seat 22. The fixing seat 22 is disposed on the support body 21, and at least one telescopic tube 4 is sealed and connected to both sides of the fixing seat 22 along the X-axis. The two free ends of the pull rope assembly are respectively inserted into the two telescopic tubes 4 and fixedly connected to the fixing seat 22 along both sides of the X-axis. The driving component 51 is arranged at intervals with the support assembly 2 along the Y-axis direction, and the pull rope assembly is fixedly connected to the output end of the driving component 51.

[0054] It is understood that the two free ends of the pull rope assembly are fixedly connected to the two ends of the fixed base 22 along the X-axis, and the pull rope assembly is connected to the output end of the drive component 51, which is spaced apart from the bracket assembly 2 along the Y-axis. At this time, the pull rope assembly is equivalent to forming a ring structure with its ends connected. The drive component 51 and the bracket assembly 2 are both fixed on this ring structure. When the drive component 51 moves to the left along the X-axis, the free end of the pull rope assembly on the right side of the fixed base 22 is pulled to the right, thereby driving the bracket body 21 to move to the right along the X-axis. It can also be understood that when the drive component 51 moves to the left along the X-axis, this ring structure rotates clockwise, and the bracket assembly 2 moves to the right along the X-axis. When the output end of the drive component 51 moves to the right along the X-axis, the free end of the pull rope assembly on the left side of the fixed base 22 is pulled to the left, thereby driving the bracket body 21 to move to the left along the X-axis. It can also be understood that when the output end of the drive component 51 moves to the right along the X-axis, this ring structure rotates counterclockwise, and the bracket assembly 2 moves to the left along the X-axis. With this design, a flexible pull rope assembly can be used to drive the support assembly 2 to move to the left and right along the X-axis using only one drive component 51, so as to realize the left and right sliding of the sputtering source 3 on the X-axis. The structure is simple and the cost is low.

[0055] It should be noted that the driving component 51 in this embodiment is a slide motor. In other embodiments, it can also be a cylinder, a lead screw motor, etc. Any driving structure in the prior art can be used as the driving component 51 in this embodiment, and this embodiment does not limit it.

[0056] In some embodiments, the pull rope assembly is a single pull rope 522, with the two ends of the pull rope 522 being free ends. After the two free ends are fixedly connected to the fixing base 22, the pull rope assembly forms a ring structure. Then, the corresponding part of the pull rope assembly is fixedly connected to the output end of the drive member 51. The pull rope assembly and the output end of the drive member 51 can be connected by bonding or by using other fasteners.

[0057] In this embodiment, as shown in Figure 1, the pull rope assembly specifically includes two pull ropes 522, each with a free end and a fixed end. The fixed end of the pull rope 522 is fixedly connected to the output end of the drive component 51, and the free end of the pull rope 522 passes through a telescopic tube 4 and is fixedly connected to one side of the fixed base 22 along the X-axis. After the free ends and fixed ends of the two pull ropes 522 are connected to the fixed base 22 and the output end of the drive component 51 respectively, they can form the aforementioned ring structure. Compared with setting the pull rope assembly as a single pull rope 522, this configuration is more convenient to install, and it is easier and faster to connect the end of the pull rope 522 to the output end of the drive component 51. When one pull rope 522 fails, only one pull rope 522 needs to be disassembled for replacement or adjustment, resulting in higher maintenance efficiency.

[0058] It should be noted that the pull rope 522 includes, but is not limited to, steel wire, timing belt, and chain, and can be selected according to actual needs. This embodiment does not limit it.

[0059] Specifically, as shown in Figures 1 and 2, the pull rope assembly also includes an installation component 53. The installation component 53 includes a fixing plate 531, an installation member 532, and a nut 533. The fixing plate 531 is fixedly disposed at the output end of the drive member 51. The installation member 532 has a threaded section 5321 extending along the X-axis. The installation member 532 is threadedly connected to the fixing plate 531. The fixed end of the pull rope 522 is fixedly connected to the installation member 532. The nut 533 is threadedly connected to the threaded section 5321 and abuts against the fixing plate 531. Rotating the nut 533 can drive the installation member 532 to move along the X-axis. Mounting component 532 is threadedly connected to fixed plate 531. The fixed end of pull rope 522 is fixedly connected to mounting component 532, so that pull rope 522 is fixed to the output end of drive component 51. Nut 533 is threadedly connected to the fixed end of mounting component 532 and abuts against fixed plate 531. When nut 533 is rotated, nut 533 moves along threaded section 5321 towards fixed plate 531. However, because nut 533 abuts against fixed plate 531, mounting component 532 is pulled and moves along X-axis, thus tensioning pull rope 522. When nut 533 is rotated in the opposite direction, pull rope 522 is relaxed. By rotating nut 533 to drive mounting component 532 to move along X-axis, the tension of pull rope 522 can be adjusted, ensuring that pull rope 522 maintains appropriate tension, reducing the risk of failure due to slack or excessive tightness of pull rope 522, and improving the stability and reliability of transmission.

[0060] Specifically, as shown in Figures 1 and 2, the mounting component 532 has a mounting ring 5322, and the fixed end of the pull rope 522 has a hanging ring 5221, which is hung on the mounting ring 5322. The cooperative arrangement of the hanging ring 5221 and the mounting ring 5322 simplifies the installation and removal of the pull rope 522. Simply hooking the hanging ring 5221 into or removing the mounting ring 5322 allows the pull rope 522 to be installed or removed from the mounting component 5322 without the need for complicated tools or cumbersome operating procedures, resulting in high installation and maintenance efficiency.

[0061] In this embodiment, as shown in Figure 3, the free end of the pull rope 522 is threaded, and the fixing seat 22 is also threaded on both sides along the X-axis. The free end of the pull rope 522 is threadedly connected to the fixing seat 22. Installation and disassembly are simple and convenient, and the threaded connection has high strength, making it less prone to loosening under vibration or external impact, and exhibiting good stability.

[0062] In this embodiment, as shown in FIG1, the vacuum sputtering coating equipment further includes a guide component 6, which is disposed within the vacuum chamber 11. The guide component 6 is used to guide the movement of the support assembly 2. The guide component 6 ensures that the support assembly 2 can only generate displacement along the X-axis direction, so that the support assembly 2 remains stable during movement, avoiding shaking or displacement, thereby improving the uniformity and consistency of the coating.

[0063] Specifically, the guide assembly 6 includes a slidingly fitted guide rail and a guide block. The guide rail extends along the X-axis, and one of the support assembly 2 and the cavity 1 is provided with a guide rail, while the other is provided with a guide block. The sliding fit between the guide rail and the guide block has high precision, which can ensure that the support assembly 2 moves stably along the X-axis direction, avoid deviation caused by mechanical vibration or friction, and ensure the coating quality.

[0064] In some embodiments, the support assembly 2 is provided with a guide rail, and the cavity 1 is provided with a guide block. It is understood that the bottom wall of the cavity 1 is provided with a guide block. In other embodiments, the support assembly 2 is provided with a guide block, and the cavity 1 is provided with a guide rail. It is understood that the bottom wall of the cavity 1 is provided with a guide rail. The specific arrangement depends on actual needs, and this embodiment does not limit this.

[0065] Specifically, as shown in Figure 1, the vacuum sputtering coating equipment also includes a mounting frame 7 and a guide wheel assembly 8. The cavity 1 and the drive unit 51 are spaced apart along the Y-axis on the mounting frame 7. Guide wheel assemblies 8 are provided on both sides of the mounting frame 7 along the X-axis. The guide wheel assembly 8 includes several guide wheels 81 arranged spaced apart along the Y-axis. The guide wheels 81 provide support and guidance for the pull rope assembly. The guide wheel assembly 8 can guide the trajectory of the pull rope assembly and provide support for the pull rope assembly.

[0066] In this embodiment, the guide wheel assembly 8 also includes a mounting plate 82, and a plurality of guide wheels 81 are disposed on the mounting plate 82. The mounting plate 82 is adjustable along the Y-axis on the mounting frame 7. By adjusting the position of the mounting plate 82 along the Y-axis, the position of the guide wheels 81 disposed on the mounting plate 82 can be adjusted, so that the part of the pull rope assembly located inside the telescopic tube 4 is horizontal with the axis of the telescopic tube 4. This greatly reduces the possibility of contact and friction between the pull rope assembly and the inner wall of the telescopic tube 4, effectively avoiding failures such as breakage and deformation of the pull rope 522 due to wear, and ensuring the normal operation of the pull rope assembly.

[0067] In one optional embodiment, the mounting bracket 7 is provided with a waist-shaped hole, and the mounting plate 82 is provided with a first mounting hole. After the mounting plate 82 is slid to a suitable position, a first locking member is used to pass through the first mounting hole and the waist-shaped hole to fix the mounting plate 82 to the mounting bracket 7. Specifically, the first locking member can be a bolt.

[0068] In another optional embodiment, the mounting bracket 7 is provided with a plurality of second mounting holes distributed along the Y-axis, and the mounting plate 82 is provided with a third mounting hole. The mounting plate 82 is slid to a suitable position so that the third mounting hole and a second mounting hole are aligned, and a second locking member is used to pass through the second mounting hole and the third mounting hole to fix the mounting plate 82 to the mounting bracket 7. The second locking member can specifically be a bolt.

[0069] Specifically, the guide wheels 81 are adjustablely positioned on the mounting plate 82 along the Y-axis. By individually adjusting the position of each guide wheel 81, the trajectory of the pull rope assembly can be adjusted more precisely.

[0070] Obviously, the above embodiments of this utility model are merely examples for clearly illustrating the present utility model, and are not intended to limit the implementation of the present utility model. Those skilled in the art can make various obvious changes, readjustments, and substitutions without departing from the protection scope of this utility model. It is neither necessary nor possible to exhaustively describe all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this utility model should be included within the protection scope of the claims of this utility model.

Claims

1. A vacuum sputtering coating apparatus, characterized in that, include: A cavity (1) has a sealed vacuum chamber (11); a support assembly (2) is slidably disposed in the cavity (1) along the X-axis, and several sputtering sources (3) are placed on the support assembly (2); multiple telescopic tubes (4) extend along the X-axis and are telescopically oriented, the interior of the telescopic tubes (4) is hollow to form a channel, the two ends of the telescopic tubes (4) are respectively sealed to the side walls of the support assembly (2) and the cavity (1), the side walls of the cavity (1) are provided with through holes, and the channel communicates with the outside of the cavity (1) through the through holes; a drive mechanism (5) includes a drive member (51) and a pull rope assembly, the pull rope assembly is fixedly connected to the output end of the drive member (51), and the pull rope assembly passes through the channel into the telescopic tube (4) to connect with the support assembly (2), the output end of the drive member (51) can drive the pull rope assembly to pull the support assembly (2) to slide left and right along the X-axis.

2. The vacuum sputtering coating equipment according to claim 1, characterized in that, The bracket assembly (2) includes a bracket body (21) and a fixing seat (22). The fixing seat (22) is disposed on the bracket body (21). At least one telescopic tube (4) is sealed and connected to both sides of the fixing seat (22) along the X-axis. The two free ends of the pull rope assembly are respectively inserted into the two telescopic tubes (4) and fixedly connected to both sides of the fixing seat (22) along the X-axis. The driving member (51) is arranged at intervals with the bracket assembly (2) along the Y-axis direction. The pull rope assembly is fixedly connected to the output end of the driving member (51).

3. The vacuum sputtering coating equipment according to claim 2, characterized in that, The pull rope assembly includes two pull ropes (522), each pull rope (522) having a free end and a fixed end. The fixed end is fixedly connected to the output end of the drive member (51), and the free end passes through a telescopic tube (4) and is fixedly connected to the fixed seat (22) on one side along the X-axis.

4. The vacuum sputtering coating equipment according to claim 3, characterized in that, The drive mechanism (5) further includes a mounting assembly (53), which includes: a fixing plate (531) fixedly disposed at the output end of the drive member (51); a mounting member (532) having a threaded segment (5321) extending along the X-axis, the mounting member (532) being threadedly connected to the fixing plate (531), the fixed end of the pull rope (522) being fixedly connected to the mounting member (532); and a nut (533) threadedly connected to the threaded segment (5321) and abutting against the fixing plate (531), rotating the nut (533) can drive the mounting member (532) to move along the X-axis.

5. The vacuum sputtering coating equipment according to claim 4, characterized in that, The mounting component (532) has a mounting ring (5322), and the fixed end of the pull rope (522) has a hanging ring (5221), which is hung on the mounting ring (5322).

6. The vacuum sputtering coating equipment according to claim 1, characterized in that, The vacuum sputtering coating equipment further includes a guide assembly (6) disposed in the vacuum chamber (11), the guide assembly (6) being used to provide guidance for the movement of the support assembly (2).

7. The vacuum sputtering coating equipment according to claim 6, characterized in that, The guide assembly (6) includes a slidingly fitted guide rail and a guide block. The guide rail extends along the X-axis. One of the bracket assembly (2) and the cavity (1) is provided with the guide rail, and the other is provided with the guide block.

8. The vacuum sputtering coating apparatus according to any one of claims 1-7, characterized in that, The vacuum sputtering coating equipment further includes: a mounting frame (7), wherein the cavity (1) and the drive unit (51) are spaced apart along the Y-axis on the mounting frame (7); and a guide wheel assembly (8), wherein the guide wheel assembly (8) is provided on both sides of the mounting frame (7) along the X-axis, and the guide wheel assembly (8) includes a plurality of guide wheels (81) spaced apart along the Y-axis, and the guide wheels (81) provide support and guidance for the pull rope assembly.

9. The vacuum sputtering coating equipment according to claim 8, characterized in that, The guide wheel assembly (8) also includes a mounting plate (82), on which a plurality of guide wheels (81) are disposed. The mounting plate (82) is adjustable along the Y-axis on the mounting frame (7).

10. The vacuum sputtering coating equipment according to claim 9, characterized in that, The guide wheel (81) is adjustablely positioned on the mounting plate (82) along the Y-axis.

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