Chemical vapor infiltration reactor convenient for continuously conveying silane

Abstract

The utility model discloses a chemical vapor infiltration reactor convenient for continuously conveying silane. The chemical vapor infiltration reactor comprises a reactor body, the conveying assembly comprises a mounting pipe which is fixedly inserted into the bottom of the device body, and a plurality of groups of mounting cavities are formed in the mounting pipe; the device comprises a plurality of mounting cavities, a plurality of groups of heating pipes and a plurality of groups of heating pipes, the plurality of groups of heating pipes are arranged in the mounting cavities in a one-to-one correspondence manner, fixed pipes are coaxially inserted into the heating pipes, and spiral heating sheets are arranged on the circumferential surfaces of the fixed pipes. The problem of local overheating or insufficient heating possibly caused by centralized heating is avoided, a spiral channel formed by the spiral heating pieces enables silane to make full contact with a heating component, the retention time is prolonged, it is guaranteed that the silane is evenly heated in the heating cavity and preheated, the situation that the internal temperature is reduced after the silane enters the device body is avoided, and the service life of the device is prolonged. A stable reaction environment in the reactor body is maintained, and the reaction stability and the product quality are guaranteed.

Description

Chemical vapor permeation reactor for easy continuous delivery of silane Technical Field

[0001] This invention relates to the field of chemical vapor permeation technology, and more particularly to a chemical vapor permeation reactor that facilitates continuous delivery of silane. Background Technology

[0002] Chemical vapor infiltration (CVI) is a method that densifies materials by decomposing and condensing one or more hydrocarbon gaseous compounds at high temperatures and then depositing the carbon inside a porous medium. It is a newly developed technology for preparing inorganic materials and is also known as chemical vapor deposition.

[0003] In chemical vapor infiltration (CVI) reactions, the reactor interior typically needs to be maintained at a specific high temperature to promote the decomposition and reaction of silanes, thereby achieving material deposition and infiltration. If unheated silanes are directly introduced into the reactor, the internal temperature will drop sharply. Temperature fluctuations will adversely affect the reaction rate, product quality, and uniformity. Therefore, a CVI reactor that facilitates continuous silane delivery is proposed to address this problem. Summary of the Invention

[0004] This utility model addresses the shortcomings of existing technologies by providing the following technical solution:

[0005] Chemical vapor permeation reactors that facilitate continuous delivery of silane include:

[0006] body;

[0007] A conveying assembly, the conveying assembly including a mounting tube fixedly inserted into the bottom of the device body, the mounting tube being provided with multiple sets of mounting cavities;

[0008] Multiple sets of heating tubes are arranged one-to-one in the mounting cavity. A fixing tube is coaxially inserted into each heating tube. A spiral heating plate is provided on the circumferential surface of the fixing tube. A heating wire is provided in the cavity of the spiral heating plate. The inner wall of the heating tube and the outer wall of the fixing tube cooperate to form a heating cavity. The spiral heating plate forms a spiral channel in the heating cavity.

[0009] As an improvement to the above technical solution, the top of the heating tube is integrally formed with a threaded tube, and a placement cavity adapted to the threaded tube is provided inside the mounting tube and located at the top of the mounting cavity. The threaded tube is threadedly inserted into the placement cavity.

[0010] As an improvement to the above technical solution, the top and bottom of the mounting tube are provided with communicating cavities that communicate with multiple sets of mounting cavities, and the bottom of the mounting tube is threaded with a sealing cap, and the bottom of the sealing cap is fixedly inserted with an air inlet pipe.

[0011] As an improvement to the above technical solution, a driving block is fixedly sleeved on the surface of the mounting tube and located at the bottom of the mounting cavity, and the surface of the driving block is provided with anti-slip texture.

[0012] As an improvement to the above technical solution, multiple sets of heating tubes are arranged in a matrix or in a circle inside the mounting tube.

[0013] The beneficial effects of this utility model are:

[0014] By diverting silane into multiple sets of heating tubes, a more uniform heating effect is achieved, avoiding the problems of local overheating or underheating that may be caused by concentrated heating. The spiral channel formed by the spiral heating plate allows the silane to fully contact the heating components, increasing the residence time and ensuring that the silane is uniformly heated in the heating chamber. Preheating the silane prevents it from lowering the internal temperature after entering the vessel, maintaining a stable reaction environment inside the vessel, and ensuring the stability of the reaction and the quality of the product. Attached Figure Description

[0015] Figure 1 is a front view of the overall structure of this utility model;

[0016] Figure 2 is a structural schematic diagram of the conveying assembly of this utility model;

[0017] Figure 3 is a cross-sectional view of the installation tube of this utility model;

[0018] Figure 4 is a cross-sectional view of the heating tube of this utility model;

[0019] Figure 5 is a schematic diagram of the structure of the heating wire of this utility model.

[0020] Reference numerals: 10, body; 20, conveying assembly; 21, sealing cover; 22, air inlet pipe; 23, connecting cavity; 24, mounting cavity; 241, placement cavity; 25, mounting tube; 30, heating tube; 31, driving block; 32, spiral heating plate; 33, fixing tube; 34, threaded tube; 35, heating wire. Detailed Implementation

[0021] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present utility model and are not intended to limit the present utility model.

[0022] Chemical vapor permeation reactors that facilitate continuous delivery of silane include:

[0023] Body 10;

[0024] The conveying assembly 20 includes a mounting tube 25 fixedly inserted into the bottom of the device body 10, and the mounting tube 25 is provided with multiple sets of mounting cavities 24.

[0025] Multiple sets of heating tubes 30 are arranged one-to-one in the mounting cavity 24. A fixing tube 33 is coaxially inserted into the heating tube 30. A spiral heating plate 32 is provided on the circumferential surface of the fixing tube 33. A heating wire 35 is provided in the cavity of the spiral heating plate 32. The inner wall of the heating tube 30 and the outer wall of the fixing tube 33 cooperate to form a heating cavity. The spiral heating plate 32 forms a spiral channel in the heating cavity.

[0026] Specifically, when silane needs to be transported, the heating tube 30 is installed in the mounting cavity 24. After the silane enters the mounting tube 25 through the external pipe, it is diverted into multiple sets of heating tubes 30, improving the overall heating uniformity and greatly shortening the time required for the silane to reach the predetermined temperature. The heating wire 35 in the heating tube 30 is energized and heats up. The heat is transferred in the heating cavity through the spiral heating plate 32. Since the spiral heating plate 32 forms a spiral channel in the heating cavity, the silane will flow along the spiral channel when it flows through the heating cavity. In the spiral channel, the silane can fully contact the spiral heating plate 32 heated by the heating wire 35, thus receiving uniform heating. The spiral structure increases the residence time of the silane in the heating cavity, allowing the silane to absorb enough heat and achieve preheating, so as to avoid lowering the internal temperature of the device 10 after entering. The wire used to supply power to the heating wire 35 can be installed through the fixing tube 33.

[0027] Referring to Figures 2 and 3 in one embodiment, the top of the heating tube 30 is integrally formed with a threaded tube 34. The mounting tube 25 is connected to the top of the mounting cavity 24 with a placement cavity 241 that is adapted to the threaded tube 34. The threaded tube 34 is threadedly inserted into the placement cavity 241. The operator needs to movably insert the heating tube 30 into the mounting tube 25, then align the threaded tube 34 with the placement cavity 241, and rotate the heating tube 30 to make the threaded tube 34 threadedly inserted into the placement cavity 241, so as to achieve quick installation or disassembly and quick replacement of the faulty heating tube 30.

[0028] In one embodiment, referring to Figures 2 and 3, the top and bottom of the mounting tube 25 are provided with connecting cavities 23 that communicate with multiple sets of mounting cavities 24. The bottom of the mounting tube 25 is threaded with a sealing cap 21, and the bottom of the sealing cap 21 is fixedly inserted with an air inlet pipe 22. Silane is connected to the air inlet pipe 22 through an external pipe. Silane gas flows from the air inlet pipe 22 into the connecting cavity 23 at the bottom of the mounting tube 25, and enters each heating tube 30 through the connecting cavity 23 at the bottom. The connecting cavity 23 at the bottom serves to evenly distribute the silane gas to the multiple heating tubes 30, so that each heating tube 30 can receive an appropriate amount of silane for heating treatment. After being heated by the heating tubes 30, the silane gas flows out of the mounting tube 25 from the connecting cavity 23 at the top of the mounting tube 25, and then enters the device body 10 to participate in the chemical vapor permeation reaction. The connecting cavity 23 at the top also serves to collect and transport the silane gas.

[0029] In one embodiment, referring to FIG2, a drive block 31 is fixedly sleeved on the surface of the mounting tube 25 and at the bottom of the mounting cavity 24. The surface of the drive block 31 is provided with anti-slip texture. The mounting tube 25 is rotated by hand or by using a tool to clamp the drive block 31, thereby making it easier to connect or separate the heating tube 30 from the mounting tube 25. The anti-slip texture increases the friction of the surface of the drive block 31.

[0030] In one embodiment, multiple sets of heating tubes 30 are arranged in a matrix or in a circle within the mounting tube 25. This arrangement helps the silane to be distributed more evenly to each heating tube 30 within the mounting tube 25 and optimizes the space utilization within the mounting tube 25, making the arrangement of the heating tubes 30 more compact. Within the limited space of the mounting tube 25, a greater number of heating tubes 30 can be arranged, thereby improving the heating and processing capacity of the silane.

[0031] The above embodiments are only used to illustrate the technical solutions of the present invention, and are not intended to limit it.

Claims

1. A chemical vapor permeation reactor for facilitating continuous delivery of silane, characterized in that, include: The device body (10) and the conveying assembly (20) include a mounting tube (25) fixedly inserted into the bottom of the device body (10), and multiple mounting cavities (24) are provided inside the mounting tube (25); multiple heating tubes (30) are arranged one-to-one in the mounting cavities (24), and a fixing tube (33) is coaxially inserted into the heating tube (30). A spiral heating plate (32) is provided on the circumferential surface of the fixing tube (33), and a heating wire (35) is provided in the cavity of the spiral heating plate (32). The inner wall of the heating tube (30) and the outer wall of the fixing tube (33) cooperate to form a heating cavity, and the spiral heating plate (32) forms a spiral channel in the heating cavity.

2. The chemical vapor permeation reactor for facilitating continuous silane delivery according to claim 1, characterized in that: The top of the heating tube (30) is integrally formed with a threaded tube (34), and the mounting tube (25) is connected to the top of the mounting cavity (24) with a placement cavity (241) adapted to the threaded tube (34). The threaded tube (34) is threadedly inserted into the placement cavity (241).

3. The chemical vapor permeation reactor for facilitating continuous silane delivery according to claim 1, characterized in that: The top and bottom of the mounting tube (25) are provided with a connecting cavity (23) that communicates with multiple sets of mounting cavities (24). The bottom of the mounting tube (25) is threaded with a sealing cap (21), and the bottom of the sealing cap (21) is fixedly inserted with an air inlet pipe (22).

4. The chemical vapor permeation reactor for facilitating continuous silane delivery according to claim 1, characterized in that: The surface of the mounting tube (25) and the bottom of the mounting cavity (24) are fixedly fitted with a driving block (31), and the surface of the driving block (31) is provided with anti-slip texture.

5. The chemical vapor permeation reactor for facilitating continuous silane delivery according to claim 1, characterized in that: Multiple sets of heating tubes (30) are arranged in a matrix or in a circle inside the mounting tube (25).

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