Transmission mechanism and coating equipment

Abstract

The utility model relates to the technical field of coating, in particular to a transmission mechanism and coating equipment. The transmission mechanism provided by the utility model is connected with a vacuum chamber, and comprises a rotating shaft and a driving assembly; the rotating shaft is sequentially sleeved with magnetic fluid and a sealing piece, the magnetic fluid is used for being connected with the cavity wall of the vacuum cavity, and the sealing piece is located at the end, away from the vacuum cavity, of the magnetic fluid; the driving assembly is arranged on the rotating shaft and can drive the sealing piece to move towards the magnetic fluid in the axial direction of the rotating shaft so that the sealing piece can seal the connecting position of the magnetic fluid and the rotating shaft. According to the transmission mechanism provided by the embodiment of the invention, the sealing element and the driving assembly are additionally arranged, so that the air leakage position can be blocked, and the problem of air leakage of the vacuum device caused by liquid leakage between the sealing seat and the rotating shaft can be quickly solved.

Description

Transmission mechanism and coating equipment Technical Field

[0001] This disclosure relates to the field of photovoltaic cell coating equipment technology, and in particular to a transmission mechanism and coating equipment. Background Technology

[0002] In the rapid development of modern industry, magnetohydrodynamics (MHDs), with their unique rheological properties, are widely used in high-precision fields such as precision machinery, semiconductor manufacturing, and aerospace. MHDs utilize the property that magnetohydrodynamic fluids can maintain a specific shape and position under the influence of a magnetic field to achieve dynamic sealing of components such as rotating shafts.

[0003] In a vacuum device, a magnetohydrodynamic (MHD) rotating shaft passes through the vacuum device and connects to a rotating device in the air. The vacuum device has a through hole through which the MHD rotating shaft connects to a mechanism inside the vacuum device. The MHD rotating shaft and the through hole need to be sealed to ensure that the vacuum environment is isolated from the outside space.

[0004] In related technologies, a sealing seat is provided around the magnetofluid rotating shaft. The magnetization of the magnetofluid inside the sealing seat seals the sealing seat and the magnetofluid rotating shaft, thereby isolating the vacuum chamber from the air. However, after prolonged use, leakage may occur between the sealing seat and the magnetofluid rotating shaft, resulting in air leakage around the rotating shaft. Summary of the Invention

[0005] This disclosure provides a transmission mechanism and a coating equipment to at least solve the above-mentioned technical problems existing in the prior art.

[0006] The first aspect of this disclosure provides a transmission mechanism connected to a vacuum chamber, the transmission mechanism comprising:

[0007] A rotating shaft, on which a magnetic fluid and a sealing element are sequentially fitted, the magnetic fluid being used to connect with the chamber wall of a vacuum chamber, and the sealing element being located at the end of the magnetic fluid away from the connection to the vacuum chamber;

[0008] A drive assembly is disposed on the rotating shaft. The drive assembly can drive the seal to move along the axial direction of the rotating shaft toward the magnetofluid, so that the seal seals the connection between the magnetofluid and the rotating shaft.

[0009] Furthermore, the magnetic fluid includes a limiting portion, and the seal is disposed between the limiting portion and the rotating shaft.

[0010] Furthermore, the drive component includes a moving part and a drive part;

[0011] The driving component and the moving component are disposed on the rotating axis.

[0012] Along the axial direction of the rotation axis, the moving member is located between the driving member and the sealing member;

[0013] The driving member is used to drive the moving member to move along the axial direction of the rotating shaft toward the magnetofluid, so as to push the sealing member to seal the connection between the magnetofluid and the rotating shaft.

[0014] Furthermore, the moving part has a guide slope at one end facing the driving part;

[0015] The driving component includes a boss that abuts against the guide slope, and the driving component includes a threaded portion that is threadedly engaged with the rotating shaft.

[0016] When the boss moves toward the axis of the rotating shaft, the boss pushes the moving member to move toward the magnetic fluid along the axial direction of the rotating shaft and pushes the sealing member to seal the connection between the magnetic fluid and the rotating shaft.

[0017] Furthermore, the moving member has a clearance portion at one end facing the sealing member, the clearance portion being used to avoid the limiting portion, so that a stroke is formed between the clearance portion and the limiting portion for the moving member to push the sealing member to move.

[0018] Furthermore, the transmission mechanism also includes: a drive shaft;

[0019] The end of the rotating shaft is provided with a mounting hole, and the transmission shaft is disposed in the mounting hole;

[0020] The rotating shaft has a first pin hole and a second pin hole that penetrate the wall of the mounting hole. The transmission shaft has a third pin hole. The two ends of the third pin hole are aligned with the first pin hole and the second pin hole. A pin passes through the third pin hole and the two ends of the pin are located in the first pin hole and the second pin hole, respectively.

[0021] Furthermore, the rotating shaft is provided with a threaded hole, which communicates with the first pin hole, and the diameter of the threaded hole is smaller than the diameter of the first pin hole.

[0022] Furthermore, the transmission mechanism also includes a first coupling and a second coupling, the first coupling being connected to the rotating shaft and the second coupling being connected to the transmission shaft, the first coupling and the second coupling being connected by fasteners.

[0023] Furthermore, a ratchet bearing is provided at the end of the rotating shaft away from the transmission shaft.

[0024] The second aspect of this disclosure provides a coating apparatus including a plurality of the transmission mechanisms described in the first aspect.

[0025] The technical solution provided in this disclosure has the following advantages compared with the prior art:

[0026] The transmission mechanism provided in this embodiment is connected to a vacuum chamber. The transmission mechanism includes a rotating shaft and a drive assembly. A magnetic fluid and a sealing element are sequentially mounted on the rotating shaft. The magnetic fluid connects to the chamber wall of the vacuum chamber, and the sealing element is located at the end of the magnetic fluid away from the vacuum chamber. The drive assembly can drive the sealing element to move axially toward the magnetic fluid along the rotating shaft, thereby sealing the connection between the magnetic fluid and the rotating shaft. When magnetic fluid leakage occurs between the magnetic fluid and the rotating shaft, the drive assembly moves the sealing element toward the magnetic fluid, sealing the connection between the magnetic fluid and the rotating shaft. This prevents air from outside the vacuum chamber from entering the vacuum chamber through the circumference of the rotating shaft. The transmission mechanism provided in this embodiment, by adding a drive assembly and a sealing element to plug the leak, can quickly solve the problem of air leakage in the vacuum device caused by leakage between the magnetic fluid and the rotating shaft.

[0027] It should be understood that the description in this section is not intended to identify key or essential features of the embodiments of this disclosure, nor is it intended to limit the scope of this disclosure. Other features of this disclosure will become readily apparent from the following description. Attached Figure Description

[0028] The above and other objects, features, and advantages of this disclosure will become readily apparent from the following detailed description of exemplary embodiments, taken in conjunction with the accompanying drawings. Several embodiments of this disclosure are illustrated in the drawings by way of example and not limitation, in which:

[0029] In the accompanying drawings, the same or corresponding reference numerals indicate the same or corresponding parts.

[0030] Figure 1 shows a schematic diagram of the transmission mechanism provided in an embodiment of this disclosure;

[0031] Figure 2 shows a cross-sectional view of the transmission mechanism provided in an embodiment of this disclosure;

[0032] Figure 3 is an enlarged view of point a in Figure 2.

[0033] The following are the labels in the diagram: 1. Rotating shaft; 10. Mounting hole; 11. First pin hole; 12. Second pin hole; 13. Threaded hole; 14. Ratchet bearing; 2. Magnetofluid; 21. Limiting part; 3. Seal; 400. Drive assembly; 4. Moving part; 41. Guide slope; 42. Clearance part; 5. Drive component; 51. Boss; 6. Transmission shaft; 61. Third pin hole; 62. Synchronous pulley shaft; 7. Pin; 81. First coupling; 82. Second coupling; 83. Fastener; 9. Chamber wall. Detailed Implementation

[0034] To make the objectives, features, and advantages of this disclosure more apparent and understandable, the technical solutions in the embodiments of this disclosure will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this disclosure, and not all of them. All other embodiments obtained by those skilled in the art based on the embodiments of this disclosure without creative effort are within the scope of protection of this disclosure.

[0035] Figure 1 shows a schematic diagram of the transmission mechanism provided in an embodiment of the present disclosure; Figure 2 shows a cross-sectional schematic diagram of the transmission mechanism provided in an embodiment of the present disclosure; Figure 3 is an enlarged view of point a in Figure 2.

[0036] Referring to Figures 1, 2, and 3, the transmission mechanism provided in this embodiment is connected to a vacuum chamber. The transmission mechanism includes a rotating shaft 1 and a drive assembly 400. A magnetic fluid 2 and a sealing element 3 are sequentially mounted on the rotating shaft 1. The magnetic fluid 2 is used to connect with the chamber wall 9 of the vacuum chamber, and the sealing element 3 is located at the end of the magnetic fluid away from the vacuum chamber. The drive assembly 400 can drive the sealing element 3 to move along the axial direction of the rotating shaft 1 toward the magnetic fluid 2, so that the sealing element 3 seals the connection between the magnetic fluid 2 and the rotating shaft 1.

[0037] Optionally, the magnetofluid 2 includes a sealing seat, which is used to install and fix components such as permanent magnets and magnetic poles, while providing a space for the magnetofluid to be contained, and is connected to the chamber wall 9 of the vacuum chamber, playing a dual role of support and sealing.

[0038] When magnetic fluid leakage occurs between the magnetic fluid 2 and the rotating shaft 1, causing air leakage in the sealed chamber around the rotating shaft 1, the drive assembly 400 moves the sealing element 3 towards the magnetic fluid 2. The sealing element 3 abuts against both the magnetic fluid 2 and the rotating shaft 1, sealing the space between them and preventing air from outside the vacuum chamber from entering through the rotating shaft 1. The transmission mechanism provided in this embodiment, by adding the drive assembly 400 and the sealing element 3 to plug the leak, can quickly solve the problem of air leakage in the vacuum device caused by leakage between the magnetic fluid 2 and the rotating shaft 1. The transmission mechanism provided in this embodiment has a simple structure, reducing maintenance time and costs.

[0039] In other words, when magnetic fluid leakage occurs between the magnetic fluid 2 and the rotating shaft 1, causing air leakage in the vacuum chamber, the drive assembly 400 moves the sealing element 3 (such as a sealing ring) towards the magnetic fluid 2. The sealing element 3 seals the magnetic fluid 2 and the rotating shaft 1, thus preventing air from outside the vacuum chamber from entering the vacuum chamber through the circumference of the rotating shaft 1. This quickly and effectively solves the air leakage problem caused by magnetic fluid leakage. The transmission mechanism mainly consists of the rotating shaft 1, the magnetic fluid 2, the sealing element 3, and the drive assembly 400. The overall structure is simple, and this simple structural design reduces potential failure points caused by complex structures, lowering the probability of equipment failure. Due to its simple structure, this embodiment can quickly seal the vacuum chamber by pushing the sealing element 3 through the drive assembly 400 when magnetic fluid leakage occurs, without the need for complex maintenance operations and replacement of a large number of parts, thereby reducing the time and cost of maintenance.

[0040] In this embodiment, the sealing element 3 can be a sealing ring, which can be made of rubber or other elastic materials. A cavity can be formed between the magnetic fluid 2 and the rotating shaft 1. The magnetic fluid is disposed in the cavity, which can seal the through hole on the chamber wall 9 of the rotating shaft 1. When magnetic fluid leakage occurs between the magnetic fluid 2 and the rotating shaft 1, causing air leakage in the sealed chamber, the drive assembly 400 can push the sealing ring to seal the magnetic fluid 2 and the rotating shaft 1, thereby preventing air from outside the vacuum chamber from entering the vacuum chamber through the circumference of the rotating shaft 1.

[0041] Optionally, a threaded sleeve is provided on the outside of the rotating shaft 1, and the seal 3 is fixedly connected to the threaded sleeve. The drive assembly 400 includes a motor or a manual knob, which drives the threaded sleeve to rotate through gears or couplings, so that the seal 3 moves axially.

[0042] Optionally, the drive assembly 400 includes a wedge and a push rod, with a motor or cylinder pushing the wedge to move laterally and the inclined surface of the wedge forcing the seal 3 to move axially.

[0043] Optionally, the drive assembly 400 is a hydraulic cylinder, with the cylinder body fixed to the outside of the rotating shaft 1 and the piston connected to the seal 3. When hydraulic oil is injected, the piston pushes the seal 3 to move axially.

[0044] In some specific embodiments, the magnetic fluid 2 includes a limiting part 21, and a sealing member 3 is disposed between the limiting part 21 and the rotating shaft 1. When magnetic fluid leakage occurs between the magnetic fluid 2 and the rotating shaft 1, causing air leakage in the sealed chamber, the drive assembly 400 pushes the sealing member 3. Under the compression of the limiting part 21 and the drive assembly 400, the sealing member 3 can seal the magnetic fluid 2 and the rotating shaft 1. The limiting part 21 can be a tapered inclined surface. Under the compression of the limiting part 21 and the drive assembly 400, the contact area between the sealing member 3 and the limiting part 21 can be increased, thereby improving the sealing performance between the magnetic fluid 2 and the rotating shaft 1.

[0045] In some specific embodiments, the drive assembly 400 includes a movable member 4 and a drive member 5; the drive member 5 is disposed on the rotating shaft 1; the movable member 4 is disposed on the rotating shaft 1, and along the axial direction of the rotating shaft 1, the movable member 4 is located between the drive member 5 and the seal 3; the drive member 5 is used to drive the movable member 4 to move the movable member 4 toward the magnetic fluid 2 along the axial direction of the rotating shaft 1, so as to push the seal 3 to seal the connection between the magnetic fluid 2 and the rotating shaft 1. When magnetic fluid leakage occurs between the magnetic fluid 2 and the rotating shaft 1, causing air leakage in the sealed chamber, the drive member 5 can drive the movable member 4, the movable member 4 pushes the seal 3, and the seal 3 can seal the magnetic fluid 2 and the rotating shaft 1 under the compression of the limiting part 21 and the movable member 4.

[0046] The movable component 4 can be a slider or a compression ring. When the movable component 4 is a compression ring, it is sleeved on the rotating shaft 1. Preferably, in this embodiment, the movable component 4 is annular. The annular movable component 4 can apply uniform pressure to the seal 3, so that the seal 3 fits against the limiting part 21 and the rotating shaft 1, thereby improving the sealing performance between the magnetorheological fluid 2 and the rotating shaft 1.

[0047] Optionally, the movable component 4 is an annular slider sleeved on the rotating shaft 1, with its inner hole slidingly fitted to the outer surface of the rotating shaft 1. An axially extending guide rail can be provided on the outside of the rotating shaft 1, and the movable component 4 engages with the guide rail via protrusions and grooves to prevent circumferential rotation. The driving component 5 can be a miniature hydraulic cylinder integrated within the rotating shaft 1, with the cylinder body fixed to the rotating shaft 1 and the piston connected to the movable component 4.

[0048] In some specific embodiments, the moving member 4 has a guide slope 41 at one end facing the driving member 5; the driving member 5 includes a boss 51, which abuts against the guide slope 41, so that when the boss 51 moves, its thrust can be effectively converted into the axial moving force of the moving member 4. In other words, the guide slope 41 is inclined toward the direction closer to the magnetic fluid 2 in a direction away from the axis of rotation 1; when the boss 51 moves toward the direction closer to the axis, the moving member 4 can move toward the magnetic fluid 2.

[0049] The driving component 5 includes a threaded portion that is threadedly engaged with the rotating shaft 1. Optionally, the rotating shaft 1 has a threaded hole, and the threaded portion includes an external thread that is threadedly engaged with the rotating shaft 1. By rotating the driving component 5, the boss 51 can move towards the central axis of the rotating shaft 1, thereby controlling the magnitude and direction of the thrust exerted by the boss 51 on the moving component 4. The boss 51 pushes the moving component 4 along the axial direction of the rotating shaft 1 towards the magnetic fluid 2. This axial push ensures that the sealing component 3 is accurately pushed towards the magnetic fluid 2, achieving reliable sealing operation and preventing the sealing component 3 from shifting or misaligning during movement, which would affect the sealing effect. Specifically, when the boss 51 moves towards the axis of the rotating shaft 1, the boss 51 pushes the moving component 4 along the axial direction of the rotating shaft 1 towards the magnetic fluid 2, thereby pushing the sealing component 3 to seal the connection between the magnetic fluid 2 and the rotating shaft 1. This subjects the sealing component 3 to uniform and relatively large pressure, thereby enhancing the reliability of the seal and ensuring that air outside the vacuum chamber can be effectively prevented from entering the vacuum chamber through the circumference of the rotating shaft 1, improving the sealing performance and stability of the vacuum chamber.

[0050] Optionally, the drive member 5 can be a fastener 83 comprising a rod and a head, the rod having external threads and the head having a boss 51. Optionally, the drive member 5 can be a screw or bolt, the head of which forms the aforementioned boss 51.

[0051] In some specific embodiments, the end of the moving member 4 facing the seal 3 is provided with a clearance portion 42. The clearance portion 42 is located on the surface of the moving member 4 facing the seal 3 and is used to avoid the limiting portion 21, so that a stroke is formed between the clearance portion 42 and the limiting portion 21 for the moving member 4 to push the seal 3. The limiting portion 21 may form an obstruction in the path of the moving member 4 pushing the seal 3. Providing the clearance portion 42 allows the moving member 4 to bypass the limiting portion 21 when moving towards the magnetofluid 2 and pushing the seal 3, avoiding collision or interference with the limiting portion 21. In this way, the moving member 4 can move smoothly along the axial direction of the rotation axis 1, effectively transmitting the driving force to the seal 3, ensuring that the seal 3 can be accurately pushed towards the magnetofluid 2 to achieve the sealing function. Optionally, the clearance portion 42 can be a conical inclined surface.

[0052] In some specific embodiments, the transmission mechanism further includes a transmission shaft 6; the end of the rotating shaft 1 is provided with a mounting hole 10, and the transmission shaft 6 is disposed in the mounting hole 10; the rotating shaft 1 is provided with a first pin hole 11 and a second pin hole 12 penetrating the wall of the mounting hole 10, and the transmission shaft 6 is provided with a third pin hole 61, the two ends of the third pin hole 61 being aligned with the first pin hole 11 and the second pin hole 12, and a pin 7 passing through the third pin hole 61 with its two ends located in the first pin hole 11 and the second pin hole 12 respectively. When the transmission mechanism is working, the transmission shaft 6 needs to transmit power to the rotating shaft 1 to drive other components located in the vacuum chamber. By having the pin 7 simultaneously passing through the first pin hole 11 and the second pin hole 12 of the rotating shaft 1 and the third pin hole 61 of the transmission shaft 6, a firm connection is formed between the rotating shaft 1 and the transmission shaft 6, which can effectively transmit torque and ensure the normal operation of the transmission mechanism.

[0053] Optionally, the rotating shaft 1 is provided with a bearing for fixing the drive shaft 6.

[0054] In some specific embodiments, the rotating shaft 1 is provided with a threaded hole 13, which communicates with the first pin hole 11. The diameter of the threaded hole 13 is smaller than the diameter of the first pin hole 11. During equipment maintenance, if it is necessary to disassemble the drive shaft 6, the drive member 5 can be screwed into the threaded hole 13. The end of the drive member 5 away from the boss 51 can push out the pin 7. Without damaging other components, the pin 7 can be operated quickly, reducing maintenance difficulty, improving maintenance efficiency, and reducing equipment downtime.

[0055] Optionally, when magnetic fluid leakage occurs between the magnetic fluid 2 and the rotating shaft 1, causing air leakage in the sealed chamber, the power is disconnected to stop the drive shaft 6 from rotating. The pin 7 can be pushed out by the rotating drive component 5, thereby removing the pin 7 outside the chamber and quickly separating the drive shaft 6 from the rotating shaft 1. After separation, the rotating shaft 1 is disengaged from the drive, facilitating sealing between the magnetic fluid 2 and the rotating shaft 1 outside the chamber.

[0056] Traditional vacuum equipment transmission mechanisms lack rapid repair capabilities. When leakage occurs in the magnetron sputtering system, air from outside the vacuum chamber enters the vacuum chamber through the area around the rotating shaft 1, causing leakage and preventing the equipment from meeting production and process requirements. The conventional approach is to immediately shut down the system and replace the transmission mechanism, resulting in a lengthy recovery time, especially for magnetron sputtering equipment where a single incident can last over 10 hours. This embodiment solves the problem of prolonged downtime. In this embodiment, by tightening the drive component 5 on the outer side of the moving part 4 on the rotating shaft 1, the drive component 5 simultaneously compresses the sealing ring 3, sealing the area around the rotating shaft 1. Simultaneously, the drive component 5 pushes out the pin 7 from the rotating shaft 1, which can then be removed using pliers or similar tools. After the pin 7 is removed, the rotating shaft 1 disengages from the transmission shaft 6, completing the repair. With the transmission shaft 6 no longer operating, the leaking transmission mechanism stops, and the rotating shaft 1 within it ceases rotation. Other transmission mechanisms within the vacuum equipment can continue operating, reducing repair time and costs, minimizing overall equipment downtime, and increasing production capacity.

[0057] In some specific embodiments, the transmission mechanism further includes a first coupling 81 and a second coupling 82. The first coupling 81 is connected to the rotating shaft 1, and the second coupling 82 is connected to the transmission shaft 6. The first coupling 81 and the second coupling 82 are connected by a fastener 83. The fastener 83 can be a bolt, screw, or screw, etc.

[0058] When magnetofluid leakage occurs between the magnetofluid 2 and the rotating shaft 1, causing air leakage in the sealed chamber, disconnect the power supply to stop the bearing from rotating. Disconnect the fastener 83 between the first coupling 81 and the second coupling 82, breaking the engagement between them. Tighten the drive component 5 on the outside of the moving part 4 on the rotating shaft 1. As the drive component 5 tightens, the moving part 4 compresses the seal 3, sealing the rotating shaft 1. Simultaneously, the drive component 5 pushes the pin 7 out of the rotating shaft 1. The pin 7 can then be removed using pliers or similar tools. After the pin 7 is removed, the rotating shaft 1 disengages from the drive shaft 6, and the repair is complete.

[0059] Optionally, the rotating shaft 1 is provided with a first key, and a first coupling 81 is installed on the outside of the first key. The first coupling 81 is sleeved on one end of the rotating shaft 1, and the two are engaged with the first keyway through the first key.

[0060] The drive shaft 6 is equipped with a second key, and a second coupling 82 is mounted on the outside of the second key. The second coupling 82 and the drive shaft 6 are engaged by the second key and the second keyway. High-strength keyes can be used to withstand shear stress.

[0061] In some specific embodiments, a ratchet bearing 14 is provided at the end of the rotating shaft 1 away from the transmission shaft 6. A synchronous pulley shaft 62 is provided on the transmission shaft 6, and the gear end of the synchronous pulley shaft 62 is connected to a motor or a belt. During transmission, the belt drives the synchronous pulley shaft 62 to rotate, the synchronous pulley shaft 62 drives the rotating shaft 1 to rotate, and the rotating shaft 1 drives the ratchet bearing 14 in the vacuum chamber to rotate.

[0062] When a leak occurs, and the rotating shaft 1 disengages from the transmission shaft 6, the rotating shaft 1 in the leaking transmission mechanism can stop rotating. At this time, the ratchet bearing 14 in the vacuum chamber can follow the transmission of the rotating shaft in other transmission mechanisms and act as a driven wheel, without affecting the transmission within the vacuum chamber. For example, the ratchet bearing 14 can act as a driven wheel, thus reducing resistance to the carriers and other equipment transported within the chamber.

[0063] Optionally, the coating equipment or other vacuum equipment has several sequentially arranged transmission mechanisms, which can be two, three, or more. The coating equipment or other vacuum equipment contains several ratchet bearings 14 within these transmission mechanisms. These ratchet bearings 14 are arranged sequentially, and they hold components such as trays or blank plates that need to be coated. The trays or blank plates can be conveyed across the multiple ratchet bearings 14. Under normal conditions, the drive shaft 6 drives the rotating shaft 1 to rotate, which in turn drives the ratchet bearings 14 to rotate, allowing the ratchet bearings 14 to convey the trays or blank plates.

[0064] In a leaking transmission mechanism, after repair, the transmission shaft 6 and the rotating shaft 1 are disconnected. The rotating shaft 1, after repair, is fixed to the magnetofluid 2 and does not rotate. The ratchet bearing 14 located within the vacuum chamber can rotate. This repaired transmission mechanism is no longer used for transmission. The rotating shaft 1 no longer rotates, but the ratchet bearing 14 on the repaired transmission mechanism can rotate. When transporting whiteboards or trays, the whiteboards or trays will not obstruct the transport of the whiteboards or trays, or the resistance will be reduced, thus not affecting the transport of the whiteboards or trays within the vacuum chamber, reducing downtime of the entire equipment, and increasing production capacity.

[0065] The coating equipment provided in this disclosure includes several transmission mechanisms provided in this disclosure. The number of transmission mechanisms in the coating equipment can be two, three, or more. Since the coating equipment provided in this disclosure and the transmission mechanisms provided in this disclosure have the same advantages, they will not be described again here.

[0066] It should be understood that the various forms of processes shown above can be used to reorder, add, or delete steps. For example, the steps described in this invention disclosure can be executed in parallel, sequentially, or in different orders, as long as the desired result of the technical solution disclosed in this embodiment can be achieved, and this is not limited herein.

[0067] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this disclosure, "a plurality of" means two or more, unless otherwise explicitly specified.

[0068] The above are merely specific embodiments of this disclosure, but the scope of protection of this disclosure is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the scope of the technology disclosed in this disclosure should be included within the scope of protection of this disclosure. Therefore, the scope of protection of this disclosure should be determined by the scope of the claims.

Claims

1. A transmission mechanism connected to a vacuum chamber, characterized in that, include: A rotating shaft (1) is provided with a magnetic fluid (2) and a sealing element (3) sequentially mounted on it. The magnetic fluid (2) is used to connect with the chamber wall (9) of the vacuum chamber, and the sealing element (3) is located at the end of the magnetic fluid away from the vacuum chamber. A driving assembly (400) is provided on the rotating shaft (1). The driving assembly (400) can drive the sealing element (3) to move along the axial direction of the rotating shaft (1) toward the magnetic fluid (2) so that the sealing element (3) seals the connection between the magnetic fluid (2) and the rotating shaft (1).

2. The transmission mechanism according to claim 1, characterized in that, The magnetic fluid (2) includes a limiting part (21), and the sealing member (3) is disposed between the limiting part (21) and the rotating shaft (1).

3. The transmission mechanism according to claim 2, characterized in that, The drive assembly (400) includes a movable member (4) and a drive member (5); the drive member (5) and the movable member (4) are disposed on the rotating shaft (1) along the axial direction of the rotating shaft (1), and the movable member (4) is located between the drive member (5) and the seal (3); the drive member (5) is used to drive the movable member (4) to move along the axial direction of the rotating shaft (1) toward the magnetic fluid (2) to push the seal (3) to seal the connection between the magnetic fluid (2) and the rotating shaft (1).

4. The transmission mechanism according to claim 3, characterized in that, The moving part (4) has a guide slope (41) at one end facing the driving part (5); the driving part (5) includes a boss (51) that abuts against the guide slope (41); the driving part (5) includes a threaded part that is threadedly engaged with the rotating shaft (1); when the boss (51) moves toward the axis of the rotating shaft (1), the boss (51) pushes the moving part (4) to move toward the magnetic fluid (2) along the axial direction of the rotating shaft (1) to push the sealing part (3) to seal the connection between the magnetic fluid (2) and the rotating shaft (1).

5. The transmission mechanism according to claim 3, characterized in that, The movable member (4) has a clearance portion (42) at one end facing the seal (3). The clearance portion (42) is used to avoid the limiting portion (21) so that a stroke is formed between the clearance portion (42) and the limiting portion (21) for the movable member (4) to push the seal (3) to move.

6. The transmission mechanism according to claim 4, characterized in that, Also includes: A drive shaft (6); the end of the rotating shaft (1) is provided with a mounting hole (10), and the drive shaft (6) is disposed in the mounting hole (10); the rotating shaft (1) is provided with a first pin hole (11) and a second pin hole (12) penetrating the hole wall of the mounting hole (10), and the drive shaft (6) is provided with a third pin hole (61). The two ends of the third pin hole (61) are aligned with the first pin hole (11) and the second pin hole (12), and a pin (7) is disposed in the third pin hole (61) and the two ends of the pin (7) are respectively located in the first pin hole (11) and the second pin hole (12).

7. The transmission mechanism according to claim 6, characterized in that, The rotating shaft (1) is provided with a threaded hole (13), which is connected to the first pin hole (11). The diameter of the threaded hole (13) is smaller than the diameter of the first pin hole (11).

8. The transmission mechanism according to claim 6, characterized in that, It also includes a first coupling (81) and a second coupling (82), the first coupling (81) being connected to the rotating shaft (1), and the second coupling (82) being connected to the transmission shaft (6), the first coupling (81) and the second coupling (82) being connected by fasteners (83).

9. The transmission mechanism according to claim 6, characterized in that, The rotating shaft (1) is provided with a ratchet bearing (14) at the end away from the transmission shaft (6).

10. A coating apparatus, characterized in that, It includes several transmission mechanisms as described in any one of claims 1 to 9.

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