Light source system and optical equipment

Abstract

The embodiment of the utility model provides a light source system and optical equipment, and relates to the technical field of optics. The light source system comprises an LED light source, a lens group, an optical fiber, a diffraction grating and an aperture diaphragm, and the lens group is used for coupling light beams emitted by the light source to obtain coupled light beams; the fiber is used for transmitting coupled beams; the diffraction grating is arranged at the output end of the optical fiber; the aperture diaphragm is provided with a small hole. The aperture diaphragm is arranged on an emergent light path of the diffraction grating, so that the light beam penetrates through the small hole, and a narrow-linewidth light beam is obtained. The LED light source is adopted and is an incoherent light source, complex decoherence design does not need to be carried out, and compared with a laser light source, the LED light source is simple, high in reliability, small in power consumption and low in price. The transmission loss can be reduced through optical fiber transmission, the anti-interference performance of optical fiber transmission is high, and the adaptability of the light source to environmental factors is improved. And the light source system can directly apply the LED light source to a high-resolution and high-sensitivity instrument.

Description

A light source system and optical device Technical Field

[0001] This utility model relates to the field of optical technology, and more specifically, to a light source system and optical device. Background Technology

[0002] The shorter the wavelength, the lower the diffraction limit, and the stronger the scattered light from tiny objects. Therefore, deep ultraviolet light sources are widely used in high-resolution or high-sensitivity optical detection instruments. This is because optical systems also have relatively high requirements for the linewidth of the light source. The narrower the linewidth, the smaller the chromatic aberration of the optical system, which is a necessary requirement for high-resolution imaging. Therefore, narrow-linewidth deep ultraviolet light sources generally use laser light sources.

[0003] While deep ultraviolet (DUV) laser sources offer excellent performance, they are technically challenging, expensive, bulky, and require stringent environmental conditions. In recent years, DUV LED products have matured, with wavelengths as low as 250nm, and are inexpensive, finding widespread application in disinfection, detection, and scientific research. However, LED light sources typically have linewidths above 10nm, making them unsuitable for direct use in high-resolution, high-sensitivity detection instruments. Summary of the Invention

[0004] This invention provides a light source system and optical device that uses an LED light source, which is simple, highly reliable, low in power consumption, and inexpensive. Furthermore, the entire light source system is small in size, highly adaptable to environmental factors, and can be directly applied to high-resolution, high-sensitivity detection instruments.

[0005] The embodiments of this utility model can be implemented as follows:

[0006] An embodiment of this utility model provides a light source system, which includes:

[0007] LED light source;

[0008] A lens group, which is used to couple the light beam emitted by the light source to obtain a coupled light beam;

[0009] Optical fiber, used to transmit the coupled beam;

[0010] A diffraction grating is disposed at the output end of the optical fiber;

[0011] An aperture stop is provided, wherein a small hole is formed on the aperture stop; the aperture stop is disposed in the output light path of the diffraction grating so that the light beam passes through the small hole to obtain a narrow linewidth light beam.

[0012] In an optional embodiment, the light source system further includes an imaging lens disposed between the diffraction grating and the aperture stop.

[0013] In an optional embodiment, the focal length of the imaging lens is adjustable; the larger the focal length of the imaging lens, the narrower the linewidth of the output beam.

[0014] In an optional embodiment, the small hole is circular in shape.

[0015] In an optional embodiment, there are multiple LED light sources, and all of the multiple LED light sources illuminate the lens group.

[0016] In an alternative implementation, the light beams produced by at least two of the LED light sources have different wavelengths.

[0017] In an optional implementation, the LED light source is a deep ultraviolet LED light source.

[0018] In an optional embodiment, the light source system further includes a collimating lens group located between the optical fiber and the diffraction grating, and the collimating lens group is disposed at the output end of the optical fiber.

[0019] In an optional embodiment, the collimating lens group includes a meniscus lens and biconvex lenses disposed on both sides of the meniscus lens.

[0020] An embodiment of this utility model also provides an optical device, including a detection instrument and a light source system as described in any of the above embodiments, wherein the light source system provides a light source for the detection instrument.

[0021] The beneficial effects of the light source system and optical device of this utility model embodiment include, for example:

[0022] This light source system comprises an LED light source, a lens group, an optical fiber, a diffraction grating, and an aperture stop. Utilizing an LED light source, which is incoherent, eliminates the need for complex decoherence design, simplifying the entire system and reducing its size. Furthermore, LED light sources are simpler, more reliable, consume less power, and are less expensive than laser light sources. The lens group couples the emitted light beam to obtain a coupled beam. By setting up the lens group, precise beam shaping can be achieved to control the beam size and divergence angle, allowing the coupled beam to better match the optical fiber for transmission. The optical fiber is used to transmit the coupled beam. Optical fiber transmission reduces transmission loss and offers strong anti-interference capabilities, improving the light source's adaptability to environmental factors. The diffraction grating is located at the output end of the optical fiber; a small aperture is formed on the aperture stop, positioned in the output path of the diffraction grating to allow the beam to pass through the aperture, resulting in a narrow-linewidth beam. This enables the direct application of the LED light source to high-resolution, high-sensitivity instruments. Attached Figure Description

[0023] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0024] Figure 1 is a schematic diagram of the light source system provided in an embodiment of this utility model;

[0025] Figure 2 is a schematic diagram of the aperture stop provided in an embodiment of this utility model.

[0026] Icons: 1000 - Light source system; 100 - LED light source; 200 - Lens group; 300 - Fiber optic cable; 400 - Diffraction grating; 500 - Aperture stop; 510 - Pinhole; 600 - Imaging lens; 700 - Collimating lens group. Detailed Implementation

[0027] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. The components of the embodiments of this utility model described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0028] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.

[0029] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0030] In the description of this utility model, it should be noted that if terms such as "upper," "lower," "inner," or "outer" are used to indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship in which the utility model product is usually placed during use, they are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0031] Furthermore, the terms "first" and "second" are used only to distinguish descriptions and should not be interpreted as indicating or implying relative importance.

[0032] It should be noted that, where there is no conflict, the features in the embodiments of this utility model can be combined with each other.

[0033] Shorter wavelengths result in lower diffraction limits and stronger scattering of light from minute objects. Therefore, deep ultraviolet (DUV) light sources are widely used in high-resolution or high-sensitivity optical detection instruments. This is because optical systems also have high requirements for the linewidth of the light source; narrower linewidths result in less chromatic aberration, a necessary requirement for high-resolution imaging. Therefore, narrow-linewidth DUV light sources generally use laser sources. While DUV laser sources offer excellent performance, they are technically challenging, expensive, bulky, and require stringent environmental conditions. In recent years, DUV (deep ultraviolet) LED products have matured, with wavelengths as low as 250nm, and are inexpensive, widely used in disinfection, detection, and scientific research. However, the linewidth of LED light sources is generally above 10nm, making them unsuitable for direct use in high-resolution, high-sensitivity detection instruments.

[0034] Based on this, please refer to Figures 1 and 2. The light source system 1000 provided in the embodiments of this utility model can effectively solve the aforementioned technical problems. The light source system 1000 uses an LED light source 100, which is simple, highly reliable, has low power consumption, and is inexpensive. Furthermore, the entire light source system 1000 is small in size and highly adaptable to environmental factors. Moreover, the LED light source 1000 can be directly applied to high-resolution, high-sensitivity detection instruments. When applied to optical equipment, the light source system 1000 provides the necessary light source. Optical equipment equipped with this light source system 1000 has the same functions as described above, and will not be elaborated further here.

[0035] The optical equipment in this embodiment includes a testing instrument and a light source system 1000, with the light source system 1000 providing a light source for the testing instrument. The testing instrument can be an optical image measuring instrument, an optical image projector, a coordinate measuring machine, etc. Optical measurement is mainly used in modern industrial inspection, primarily to check whether the form and position tolerances and numerical aperture of products are up to standard. Major application areas include metal processing, mold making, plastics, hardware, gears, and mobile phone manufacturing. Furthermore, the optical equipment may also include a moving mechanism or other equipment, depending on the actual application.

[0036] Figure 1 is a schematic diagram of the light source system 1000 provided in an embodiment of the present invention; Figure 2 is a schematic diagram of the aperture stop 500 provided in an embodiment of the present invention. As shown in Figures 1 and 2, the light source system 1000 in this embodiment includes an LED light source 100, a lens group 200, an optical fiber 300, a diffraction grating 400, and an aperture stop 500. The lens group 200 is used to couple the light beam emitted by the light source to obtain a coupled light beam; the optical fiber 300 is used to transmit the coupled light beam; the diffraction grating 400 is disposed at the output end of the optical fiber 300. A small hole 510 is opened on the aperture stop 500; the aperture stop 500 is disposed in the output light path of the diffraction grating 400 so that the light beam passes through the small hole 510 and exits to obtain a narrow linewidth light beam. The use of an LED light source, which is an incoherent light source, eliminates the need for complex decoherence design, simplifies the entire light source system 1000, and reduces the size of the light source system 1000. Furthermore, the LED light source 100 is simpler, more reliable, consumes less power, and is cheaper than the laser light source. By setting up the lens group 200, the beam can be precisely shaped to control its size and divergence angle, allowing the coupled beam to better match the fiber optic cable 300 for transmission. Transmission through the fiber optic cable 300 reduces transmission loss and provides strong anti-interference capabilities, improving the light source's adaptability to environmental factors. Specifically, it exhibits low sensitivity to temperature, humidity, and vibration. By incorporating the diffraction grating 400 and the aperture stop 500, this light source system 1000 allows the LED light source 100 to be directly applied to high-resolution, high-sensitivity instruments.

[0037] Referring to Figure 1, the light source system 1000 in this embodiment also includes an imaging lens 600, which is disposed between the diffraction grating 400 and the aperture stop 500. Because the diffraction grating 400 has a beam-splitting function, different wavelengths of light have different diffraction angles. By setting an imaging lens 600, the fiber core end face of the output end of the optical fiber 300 can be imaged. Since different wavelengths of light have different diffraction angles, they will be imaged at different spatial positions. At this time, an aperture stop 500 is set on the output path of the imaging lens 600, and the small hole 510 on the aperture stop 500 is aligned with the image of a certain wavelength. Then, the beam output from the small hole 510 is a narrow-linewidth beam after diffraction and beam splitting. Furthermore, the focal length of the imaging lens 600 in this embodiment is adjustable; the larger the focal length of the imaging lens 600, the narrower the linewidth of the output beam. The focal length of the imaging lens 600 is determined according to the usage and is not limited here.

[0038] Please refer to Figure 1. The light emitted from the optical fiber 300 diverges at a certain angle. Therefore, the light source system 1000 in this embodiment also includes a collimating lens group 700. The collimating lens group 700 is located between the optical fiber 300 and the diffraction grating 400, and is positioned at the output end of the optical fiber 300. By setting the collimating lens group 700, the light beam emitted from the output end of the optical fiber 300 is collimated and projected onto the diffraction grating 400. Specifically, the collimating lens group 700 includes a meniscus lens and biconvex lenses positioned on both sides of the meniscus lens. Of course, the collimating lens group 700 may also include an adjustment mechanism, which is used to fine-tune the position and angle of each component of the collimating lens group 700. Since there may be errors in the processing and assembly of optical components, the adjustment mechanism can finely adjust the lens to achieve the best collimation effect. For example, the front-to-back position and tilt angle of the lens can be adjusted to ensure that the light can accurately pass through the lens group 200 and be collimated. The structure of the collimating lens group 700 is not limited here; it should be determined based on actual usage requirements.

[0039] Specifically, in this embodiment, the size of the pinhole 510 on the aperture stop 500 is slightly larger than the imaging aperture. Referring to Figure 2, the pinhole 510 in this embodiment is circular. Designing the pinhole 510 as circular reduces aberrations. When the pinhole 510 is circular, light is distributed more evenly after passing through it, reducing distortion and blurring during imaging, thereby improving image quality. Furthermore, the circular pinhole 510 design allows light to pass through the aperture stop more evenly, reducing diffraction effects and improving image sharpness and contrast. The circular pinhole 510 also better utilizes light, reducing light loss and improving light energy utilization. Of course, the pinhole 510 can also be designed as a triangle, square, or rectangle, depending on the actual application, and is not limited here.

[0040] To improve the overall brightness and uniformity of the light source system 1000, this embodiment uses multiple LED light sources 100, all of which illuminate the lens group 200. The number of LED light sources 100 can be one, two, three, four, etc., and is not limited here. The light emitted by the individual or multiple LED light sources 100, or multiple LED light sources combined, is coupled into the optical fiber 300 through the lens group 200. Because different wavelengths of light have different diffraction angles, the wavelengths of the light beams produced by at least two LED light sources 100 in this embodiment are different. Alternatively, the wavelengths of the light beams produced by multiple LED light sources 100 can all be different or all the same. The light source system 1000 determines which wavelength of light beam to use for illumination based on the specific detection conditions.

[0041] Because shorter wavelengths result in lower diffraction limits and stronger light scattering from tiny objects, deep ultraviolet (DUV) light sources are widely used in high-resolution or high-sensitivity optical detection instruments. In this embodiment, the LED light source 100 is a DUV LED light source 100. Of course, the LED light source 100 can also be a visible light or infrared light source, depending on the specific optical equipment used, and is not limited here.

[0042] According to the light source system 1000 provided in this embodiment, the working principle of the light source system 1000 is as follows:

[0043] The light emitted by the LED light source 100 is coupled into the optical fiber 300 through the lens group 200. After transmission through the optical fiber 300, the light beam exits at the output end of the optical fiber 300, passes through the collimating lens group 700 to be collimated, and then is projected onto the diffraction grating 400. The beam, after being split by the diffraction grating 400, passes through the imaging lens 600. Then, the aperture 510 on the aperture stop 500 is aligned with the beam of a certain wavelength emitted from the imaging lens 600, and the beam is output through the aperture 510, thus obtaining a narrow linewidth beam.

[0044] In summary, the light source system 1000 includes an LED light source 100, a lens group 200, an optical fiber 300, a diffraction grating 400, and an aperture stop 500. The lens group 200 couples the light beam emitted by the light source to obtain a coupled beam; the optical fiber 300 transmits the coupled beam; the diffraction grating 400 is disposed at the output end of the optical fiber 300; the aperture stop 500 has a small hole 510; the aperture stop 500 is disposed in the output light path of the diffraction grating 400 so that the light beam passes through the small hole 510 to obtain a narrow linewidth beam. Using an LED light source, which is an incoherent light source, eliminates the need for complex decoherence design, simplifying the entire light source system 1000 and reducing its size. Furthermore, the LED light source 100 is simpler, more reliable, consumes less power, and is less expensive than a laser light source. By setting up the lens group 200, the beam can be finely shaped to control its size and divergence angle, allowing the coupled beam to better match the fiber optic cable 300 for transmission within it. Transmission via the fiber optic cable 300 reduces transmission loss and provides strong anti-interference capabilities, improving the light source's adaptability to environmental factors. By incorporating the diffraction grating 400 and aperture stop 500, this light source system 1000 allows the LED light source 100 to be directly applied to high-resolution, high-sensitivity instruments.

[0045] The above description is only a specific embodiment of this utility model, but the protection scope of this utility model is not limited thereto. Any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in this utility model should be included within the protection scope of this utility model.

Claims

1. A light source system, characterized in that, include: LED light source (100); lens group (200), the lens group (200) is used to couple the light beam emitted by the light source to obtain a coupled light beam; An optical fiber (300) is used to transmit the coupled beam; a diffraction grating (400) is disposed at the output end of the optical fiber (300); an aperture stop (500) is provided with a small hole (510); the aperture stop (500) is disposed in the output optical path of the diffraction grating (400) so that the beam passes through the small hole (510) and exits to obtain a beam with a narrow linewidth.

2. The light source system according to claim 1, characterized in that, The light source system (1000) further includes an imaging lens (600), which is disposed between the diffraction grating (400) and the aperture stop (500).

3. The light source system according to claim 2, characterized in that, The focal length of the imaging lens (600) is adjustable; the larger the focal length of the imaging lens (600), the narrower the linewidth of the output beam.

4. The light source system according to claim 1, characterized in that, The small hole (510) is circular in shape.

5. The light source system according to claim 1, characterized in that, There are multiple LED light sources (100), and all of the multiple LED light sources (100) illuminate the lens group (200).

6. The light source system according to claim 5, characterized in that, The wavelengths of the light beams produced by at least two of the LED light sources (100) are different.

7. The light source system according to claim 1, characterized in that, The LED light source (100) is a deep ultraviolet LED light source (100).

8. The light source system according to claim 1, characterized in that, The light source system (1000) further includes a collimating lens group (700), which is located between the optical fiber (300) and the diffraction grating (400), and the collimating lens group (700) is located at the output end of the optical fiber (300).

9. The light source system according to claim 8, characterized in that, The collimating lens group (700) includes a meniscus lens and biconvex lenses disposed on both sides of the meniscus lens.

10. An optical device, characterized in that, The invention includes a detection instrument and a light source system (1000) as described in any one of claims 1-9, wherein the light source system (1000) provides a light source for the detection instrument.

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