High-frequency high-performance radio frequency probe card transferring auxiliary device

Abstract

The utility model discloses a high-frequency high-performance radio frequency probe card transfer auxiliary device which comprises a guide rail and a fixing frame installed in the guide rail, a sliding block is arranged in the fixing frame, a fixing disc is arranged on the lower side of the sliding block, and a plurality of mini vacuum pumps are arranged on the outer wall of the upper end of the fixing disc at equal intervals. Adsorption heads are fixedly connected to the outer walls of the lower ends of the multiple mini vacuum pumps, filter screens are arranged in the multiple adsorption heads to intercept dust and impurities generated when the mini vacuum pumps suck air, and by installing the filter screens, when the adsorption heads pump out air between the adsorption heads and the probe card through the mini vacuum pumps for adsorption and fixation, the air between the adsorption heads and the probe card is sucked out through the mini vacuum pumps; dust, particles and other impurities in air can be effectively intercepted through the filter screen, the foreign matters are prevented from entering the adsorption system, so that the surfaces of the adsorption head and the probe card are protected, the accuracy of subsequent operation is ensured, meanwhile, the situation that the mini vacuum pump and the adsorption head are blocked is avoided, and the adsorption capacity and the stability are improved.

Description

Technical Field

[0001] This utility model belongs to the technical field of probe card transfer, specifically relating to a high-frequency, high-performance radio frequency probe card transfer auxiliary device. Background Technology

[0002] The high-frequency, high-performance RF probe card transfer auxiliary device is designed to improve the efficiency and accuracy of RF probe card movement during testing and calibration, so as to facilitate accurate transfer of probe cards between the test bench and the storage area.

[0003] However, if dust accumulates in the suction cup area when the probe card is moved by being sucked in by the vacuum suction cup, the suction cup will not be able to hold the probe card tightly, which will increase the chance of the probe card falling during transfer. Utility Model Content

[0004] The purpose of this invention is to provide a high-frequency, high-performance radio frequency probe card transfer auxiliary device to solve the problem mentioned in the background art that if dust clogs the suction cup area, the vacuum suction cup will not be able to adhere tightly when sucking in the probe card.

[0005] To achieve the above objectives, this utility model provides the following technical solution: a high-frequency, high-performance radio frequency probe card transfer auxiliary device, comprising a guide rail and a fixing frame installed inside the guide rail;

[0006] The mounting bracket is equipped with a slider inside;

[0007] A fixing plate is provided on the lower side of the slider;

[0008] Multiple mini vacuum pumps are equidistantly arranged on the upper outer wall of the fixed disk, and an adsorption head is fixedly connected to the lower outer wall of each of the multiple mini vacuum pumps.

[0009] Each of the adsorption heads is equipped with a filter to intercept dust and impurities during the intake process of the mini vacuum pump.

[0010] Preferably, the adsorption head is provided with a weight plate inside, and a limit block is fixedly connected to the circular outer wall of the weight plate.

[0011] Preferably, the circular inner wall of the adsorption head is provided with slide rails near the left and right sides to restrict and guide the movement of the limiting block.

[0012] Preferably, the lower outer wall of the drop plate has a through-hole for gas circulation.

[0013] Preferably, a threaded rod is fixedly connected inside the guide rail, and a fixed shaft that engages with the threaded rod is provided inside the fixing frame.

[0014] Preferably, a limiting shaft is provided inside the guide rail and at the lower end of the threaded rod to limit the position of the threaded rod, and a limiting rod passing through the fixing frame is fixedly connected between the inner walls of the upper and lower ends of the guide rail to limit the direction of the fixing frame.

[0015] Preferably, a drive motor is fixedly connected to the upper outer wall of the guide rail to drive the threaded rod to rotate, and the drive motor is electrically connected to an external power source.

[0016] Preferably, the inner walls at both ends of the slider are provided with locking teeth, and the inner walls at both ends of the fixing frame are provided with driving gears that mesh with the locking teeth, so as to drive the slider to move laterally.

[0017] Preferably, a base is fixedly connected to the lower outer wall of the guide rail, and a retainer is provided between the slider and the fixed plate to limit the position of the fixed plate.

[0018] Compared with the prior art, this utility model provides a high-frequency, high-performance radio frequency probe card transfer auxiliary device, which has the following beneficial effects:

[0019] By installing a filter, when the adsorption head is pumped out by the mini vacuum pump to remove air between the adsorption head and the probe card for adsorption and fixation, the filter can effectively intercept dust, particles and other impurities in the air, preventing these foreign objects from entering the adsorption system. This protects the surface of the adsorption head and the probe card, ensuring the accuracy of subsequent operations, while also preventing the mini vacuum pump and adsorption head from becoming clogged, thereby improving the adsorption force and stability. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of the structure of a high-frequency, high-performance radio frequency probe card transfer auxiliary device according to the present invention.

[0021] Figure 2 This is a partial structural schematic diagram of the frontal cross-section of the mini vacuum pump area of ​​this utility model.

[0022] Figure 3 This is a partial structural schematic diagram of the guide rail area in front view.

[0023] Figure 4 This is a partial structural schematic diagram of the guide rail area in front view.

[0024] Figure 5 This is a partial structural schematic diagram of the adsorption head area of ​​this utility model, viewed from the front.

[0025] In the diagram: 1. Base; 2. Guide rail; 3. Fixing frame; 4. Drive motor; 5. Fixer; 6. Mini vacuum pump; 7. Fixing plate; 8. Adsorption head; 9. Slider; 10. Clamping teeth; 11. Drive gear; 12. Limiting rod; 13. Fixing shaft; 14. Threaded rod; 15. Limiting shaft; 16. Filter screen; 17. Limiting block; 18. Drop plate; 19. Through port; 20. Slide rail. Detailed Implementation

[0026] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0027] This utility model provides, for example Figure 1-5 The high-frequency, high-performance radio frequency probe card transfer auxiliary device shown includes a guide rail 2 and a fixing frame 3 installed inside the guide rail 2.

[0028] The mounting bracket 3 has a slider 9 inside;

[0029] A fixing plate 7 is provided on the lower side of the slider 9;

[0030] Multiple mini vacuum pumps 6 are equidistantly arranged on the upper outer wall of the fixed plate 7. Adsorption heads 8 are fixedly connected to the lower outer wall of each mini vacuum pump 6. When the transfer auxiliary device is started, the operator selects the target position and activates the mini vacuum pumps 6 through the control system. The mini vacuum pumps 6 start working, extracting the air between the adsorption head 8 and the probe card to form a negative pressure. Due to the change in state, the adsorption head 8 generates adsorption force, thereby adsorbing the probe card. During the adsorption process, the fixed frame 3 can move up and down inside the guide rail 2 to drive the fixed plate 7 to move. At the same time, the slider 9 can move left and right inside the fixed frame 3. Through the up and down movement of the fixed frame 3 and the left and right movement of the slider 9, the fixed plate 7 is moved to the position of the corresponding probe card to perform precise adsorption and transfer work. After the transfer is completed and the probe card is moved to the designated position, the mini vacuum pump 6 stops working, the adsorption head 8 releases the probe card and lets it fall into the designated position, and then the transfer work of other probe cards can continue.

[0031] Each of the multiple adsorption heads 8 is equipped with a filter screen 16 to intercept dust and impurities when the mini vacuum pump 6 is drawing air. During the suction process, the filter screen 16 effectively intercepts dust and impurities in the air, preventing these substances from entering the mini vacuum pump 6 and the adsorption head 8, thereby keeping the entire system clean, reducing wear, and preventing performance degradation.

[0032] like Figure 5 As shown, the adsorption head 8 is provided with a drop plate 18 inside. The circular outer wall of the drop plate 18 is fixedly connected to a limiting block 17. The circular inner wall of the adsorption head 8 is provided with slide rails 20 near the left and right sides to restrict and guide the direction of the limiting block 17. The lower outer wall of the drop plate 18 is provided with a through-hole 19 for gas circulation.

[0033] When the mini vacuum pump 6 is working, the suction force it generates will cause the drop plate 18 to move upward, preventing the probe card from contacting the drop plate 18. When the mini vacuum pump 6 stops working, the drop plate 18 falls and is limited by the limit block 17 under the guidance of the slide rail 20, which limits the maximum falling distance of the drop plate 18. After the limit block 17 falls and collides with the lower end of the slide rail 20, the impact force of the fall will cause the dust and impurities intercepted on the filter screen 16 to vibrate and shake them out, thus completing the self-cleaning of the filter screen 16.

[0034] like Figure 3 and Figure 4 As shown, a threaded rod 14 is fixedly connected inside the guide rail 2. A fixed shaft 13 that engages with the threaded rod 14 is provided inside the fixing frame 3. A limiting shaft 15 is provided inside the guide rail 2 at the lower end of the threaded rod 14 to limit the position of the threaded rod 14. A limiting rod 12 that passes through the fixing frame 3 is fixedly connected between the inner walls of the upper and lower ends of the guide rail 2 to limit the direction of the fixing frame 3. A drive motor 4 is fixedly connected to the outer wall of the upper end of the guide rail 2 to drive the threaded rod 14 to rotate. The drive motor 4 is electrically connected to an external power source.

[0035] When the operator starts the system, external power supplies power to the drive motor 4, and the motor starts running, driving the connected threaded rod 14 to rotate. The rotation direction and speed of the threaded rod 14 can be adjusted as needed, affecting the moving speed and height of the fixed frame 3. Since the fixed shaft 13 inside the fixed frame 3 is screwed onto the threaded rod 14, the rotation of the threaded rod 14 produces linear motion, causing the fixed frame 3 to move up and down along the guide rail 2. The fixed frame 3 can be precisely adjusted to the required position. Once the fixed frame 3 reaches the target position, the operator can stop the motor, and the fixed frame 3 will remain at the required height, ready for subsequent calibration or testing operations.

[0036] like Figure 3 As shown, the inner walls of both the front and rear ends of the slider 9 are provided with locking teeth 10, and the inner walls of both the front and rear ends of the fixing frame 3 are provided with drive gears 11 that mesh with the locking teeth 10, so as to drive the slider 9 to move laterally.

[0037] During operation, the external power supply powers the drive gear 11, which then rotates and engages with the locking teeth 10 of the slider 9. Through the clockwise and counterclockwise rotation of the gear, the slider 9 is pushed to move laterally.

[0038] like Figure 1 As shown, a base 1 is fixedly connected to the lower outer wall of the guide rail 2, and a retainer 5 is provided between the slider 9 and the fixed plate 7 to limit the position of the fixed plate 7.

[0039] The retainer 5 restricts the relative position of the fixed plate 7, ensuring that the position of the fixed plate 7 does not change during the movement of the slider 9 and the fixing frame 3, thereby enhancing the stability of the device.

[0040] The implementation principle of this embodiment is as follows: When the transfer auxiliary device is started, the operator selects the target position and activates the mini vacuum pump 6 through the control system. The mini vacuum pump 6 starts working, extracting the air between the adsorption head 8 and the probe card to form a negative pressure. Due to the change in state, the adsorption head 8 generates adsorption force, thereby adsorbing the probe card. During the adsorption process, the fixing frame 3 can move up and down inside the guide rail 2 to drive the fixing disk 7 to move. At the same time, the slider 9 can move left and right inside the fixing frame 3. Through the up and down movement of the fixing frame 3 and the left and right movement of the slider 9, the fixing disk 7 is moved to the position of the corresponding probe card for precise adsorption and transfer. After the transfer is completed and the probe card is moved to the designated position, the mini vacuum pump 6 stops working, the adsorption head 8 releases the probe card, and it falls into the designated position. Then, the transfer of other probe cards can continue. During the suction process, the filter screen 16 effectively intercepts dust and impurities in the air, preventing these substances from entering the mini vacuum pump 6 and the adsorption head 8, thereby keeping the entire system clean, reducing wear, and preventing performance degradation.

[0041] Finally, it should be noted that the above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A high-frequency, high-performance radio frequency probe card transfer auxiliary device, comprising a guide rail (2) and a fixing frame (3) installed inside the guide rail (2). The fixing frame (3) is provided with a slider (9) inside; A fixing plate (7) is provided on the lower side of the slider (9). Multiple mini vacuum pumps (6) are equidistantly arranged on the upper outer wall of the fixed disk (7), and an adsorption head (8) is fixedly connected to the lower outer wall of each of the multiple mini vacuum pumps (6). Its features are: Each of the adsorption heads (8) is equipped with a filter (16) to intercept dust and impurities when the mini vacuum pump (6) is drawing air.

2. The high-frequency, high-performance radio frequency probe card transfer auxiliary device according to claim 1, characterized in that: The adsorption head (8) is provided with a drop plate (18) inside, and a limit block (17) is fixedly connected to the circular outer wall of the drop plate (18).

3. The high-frequency, high-performance radio frequency probe card transfer auxiliary device according to claim 1, characterized in that: The circular inner wall of the adsorption head (8) is provided with slide rails (20) near the left and right sides respectively, so as to restrict and guide the direction of the limiting block (17).

4. The high-frequency, high-performance radio frequency probe card transfer auxiliary device according to claim 2, characterized in that: The lower end of the drop plate (18) has an opening (19) that runs vertically through it to allow gas to circulate.

5. The high-frequency, high-performance radio frequency probe card transfer auxiliary device according to claim 1, characterized in that: The guide rail (2) is internally fixedly connected to a threaded rod (14), and the fixing frame (3) is internally provided with a fixing shaft (13) that is screwed into the threaded rod (14).

6. The high-frequency, high-performance radio frequency probe card transfer auxiliary device according to claim 1, characterized in that: A limiting shaft (15) is provided inside the guide rail (2) and at the lower end of the threaded rod (14) to limit the position of the threaded rod (14). A limiting rod (12) that passes through the fixing frame (3) is fixedly connected between the inner walls of the upper and lower ends of the guide rail (2) to limit the direction of the fixing frame (3).

7. The high-frequency, high-performance radio frequency probe card transfer auxiliary device according to claim 1, characterized in that: A drive motor (4) is fixedly connected to the upper outer wall of the guide rail (2) to drive the threaded rod (14) to rotate. The drive motor (4) is electrically connected to an external power source.

8. The high-frequency, high-performance radio frequency probe card transfer auxiliary device according to claim 1, characterized in that: The inner walls of the front and rear ends of the slider (9) are provided with locking teeth (10), and the inner walls of the front and rear ends of the fixing frame (3) are provided with driving gears (11) that mesh with the locking teeth (10) to drive the slider (9) to move laterally.

9. The high-frequency, high-performance radio frequency probe card transfer auxiliary device according to claim 1, characterized in that: The lower outer wall of the guide rail (2) is fixedly connected to the base (1), and a retainer (5) is provided between the slider (9) and the fixed plate (7) to limit the position of the fixed plate (7).

Images