Gas regulation and control assembly and processing equipment

Abstract

The utility model provides a gas regulation and control assembly and processing equipment, relates to the field of semiconductor or photovoltaic material processing, and solves the technical problems that a traditional nitrogen dilution tank is relatively large in size, relatively high in cost, relatively long in installation time and easy to leak. The gas regulation and control assembly comprises a ventilation plate, the ventilation plate is provided with a first gas channel, and the first gas channel is provided with a gas inlet, a gas outlet and at least one first installation opening; the at least one gas adjusting element extends into the first gas channel through the first mounting opening; the first connector is connected with the gas adjusting element and the ventilation plate in a sealed mode. The first gas channel is formed in the ventilation plate, each gas adjusting element can be connected with the ventilation plate only through one first connector, the using number of the first connectors is reduced, the cost is reduced, the gas adjusting and controlling assembly does not need to use a gas pipe to connect the adjacent gas adjusting elements, and the gas adjusting and controlling assembly is convenient to use. The volume is small, the installation is simple, the installation time is saved, and the leakage risk is reduced.

Description

Gas control components and processing equipment Technical Field

[0001] This application relates to the field of semiconductor or photovoltaic material processing, specifically to a gas regulation component and processing equipment. Background Technology

[0002] In the semiconductor or photovoltaic material processing field, coating, etching, passivation, and other processes typically involve the following steps: First, the product is placed in a reaction chamber, then the chamber is evacuated to a vacuum, and finally, a high-purity process gas is introduced to react with the product, thus completing the processing. However, these process gases generally do not react completely, producing waste gases such as associated gases and residual tail gases, which pose certain hazards (e.g., some gases are flammable and explosive). Therefore, during the waste gas discharge process, for the safety of equipment and personnel, a large amount of inert gas needs to be introduced to reduce the concentration of the waste gas and thus mitigate safety risks.

[0003] In related technologies, nitrogen is typically introduced into the reaction chamber through a nitrogen dilution chamber to reduce the concentration of exhaust gas. However, traditional nitrogen dilution chambers usually include multiple gas regulating elements (such as speed control valves, pressure regulating valves, flow meters, etc.), which are connected by multiple gas pipes and connectors. Therefore, traditional nitrogen dilution chambers require a large number of connectors, resulting in large size, high cost, long installation time, and a tendency to leak. Summary of the Invention

[0004] To address the aforementioned technical problems, this application is proposed. Embodiments of this application provide a gas control component and processing equipment.

[0005] In a first aspect, one embodiment of this application provides a gas control assembly, comprising: a vent plate having a first gas channel having an inlet, an outlet, and at least one first mounting port, the inlet being capable of receiving protective gas and the outlet being capable of communicating with the reaction chamber of a furnace tube to deliver protective gas to the reaction chamber; at least one gas regulating element extending into the first gas channel through the first mounting port to regulate the flow rate and / or pressure of the protective gas; and at least one first connector sealingly connecting the gas regulating element and the vent plate.

[0006] In some embodiments, the vent plate has at least one first groove and at least one first threaded portion, and the first connector has at least one second threaded portion; wherein, the gas control assembly further includes: at least one first sealing ring, the first sealing ring being at least partially disposed in the first groove and located between the vent plate and the first connector; at least one first screw connector, the first screw connector being screwed to the first threaded portion and the second threaded portion.

[0007] In some embodiments, the gas regulating element includes: a first on / off control valve, which is hermetically connected to a vent plate via a first connector, and extends into a first gas passage through a first mounting port, and is configured to control the on / off of a protective gas.

[0008] In some embodiments, the number of first mounting ports is multiple, the number of first connectors is multiple, and the gas regulating element further includes: at least one flow regulating valve, which is hermetically connected to the vent plate through the first connector, and extends into the first gas passage through the first mounting port, and is configured to regulate the flow rate of the protective gas.

[0009] In some embodiments, at least two flow regulating valves are provided; wherein each flow regulating valve includes: a first flow regulating valve, which is hermetically connected to a vent plate via a first connector and extends into a first gas passage through a first mounting port, configured to regulate the flow rate of the protective gas to a preset maximum flow rate; and a second flow regulating valve, disposed between the first flow regulating valve and the outlet, which is hermetically connected to the vent plate via a first connector and extends into the first gas passage through a first mounting port, configured to regulate the flow rate of the protective gas to a preset process flow rate, wherein the preset process flow rate is less than the preset maximum flow rate; wherein the vent plate further has a second gas passage. The gas control assembly further includes: a second gas passage having at least one second mounting port; a first end of the second gas passage communicating with a first connecting position of the first gas passage; a second end of the second gas passage communicating with a second connecting position of the first gas passage; the first connecting position being located between a first flow regulating valve and a second flow regulating valve; the second connecting position being located between the second flow regulating valve and the gas outlet; a first on / off control valve being located between the first connecting position and the second connecting position; and a second on / off control valve extending into the second gas passage through the second mounting port and configured to control the on / off of the protective gas in the second gas passage; and a second connector sealingly connecting the second on / off control valve and the vent plate.

[0010] In some embodiments, the second flow regulating valve is also capable of measuring the flow rate of the protective gas, and the second flow regulating valve is disposed between the first communication position and the second communication position; or, the gas control assembly further includes: a third connector; a flow meter, the flow meter being hermetically connected to the vent plate via the third connector, the flow meter being disposed between the second flow regulating valve and the gas outlet, and the flow meter extending into the first gas passage via the first mounting port; or, the flow meter is connected to the gas outlet and the reaction chamber, and the flow meter is configured to measure the flow rate of the protective gas.

[0011] In some embodiments, the gas regulating element further includes: a pressure regulating valve disposed between the gas inlet and the gas regulating element, the pressure regulating valve being hermetically connected to the vent plate via a first connector, and the pressure regulating valve extending into the first gas passage via a first mounting port, configured to regulate the pressure of the protective gas; and / or, the gas regulating component further includes: a pressure gauge communicating with the pressure regulating valve, configured to measure the pressure of the protective gas.

[0012] In some embodiments, the vent plate has multiple first gas channels, multiple second gas channels, multiple gas regulating elements, multiple flow meters, multiple first connectors, multiple second connectors, and multiple third connectors; wherein each first gas channel is correspondingly configured with at least one gas regulating element and a flow meter, the gas regulating element corresponding to each first gas channel extends into each first gas channel through a first mounting port and is sealed to the vent plate through a first connector to regulate the flow rate and / or pressure of the protective gas in each first gas channel, the flow meter corresponding to each first gas channel is sealed to the vent plate through a third connector, and the flow meter corresponding to each first gas channel is disposed between the second flow regulating valve and the outlet of each first gas channel and extends into each first gas channel through the first mounting port, or each The flow meter corresponding to the first gas channel is connected to the outlet and reaction chamber of each first gas channel. The flow meter corresponding to each first gas channel is configured to measure the flow rate of the protective gas in each first gas channel. The outlet of each first gas channel is connected to the reaction chamber of a furnace tube. And / or, each second gas channel is correspondingly provided with each first gas channel, a second on / off control valve, and a second connector. The first end of each second gas channel is connected to the first connection position of the corresponding first gas channel, and the second end of each second gas channel is connected to the second connection position of the corresponding first gas channel. The second on / off control valve corresponding to each second gas channel extends into each second gas channel through the second mounting port and is sealed to the vent plate through the second connector to control the on / off of the protective gas in each second gas channel.

[0013] In some embodiments, the vent plate is made of aluminum.

[0014] Secondly, one embodiment of this application provides a processing apparatus, comprising: at least one furnace tube having a reaction chamber configured to contain a product; a gas supply device configured to provide a protective gas; and a gas control component according to any of the first aspects, wherein the inlet of a first gas channel of the gas control component is connected to the gas supply device, the outlet of the first gas channel is connected to the reaction chamber, and the gas control component is configured to adjust the flow rate and / or pressure of the protective gas.

[0015] The gas control component and processing equipment proposed in this application form a first gas channel inside the vent plate, allowing each gas control element to be connected to the vent plate via only one first connector. Compared to the traditional nitrogen dilution box where each gas control element needs to be connected to other elements at both ends via connectors, this saves on the number of first connectors used, reducing costs. Furthermore, the gas control component provided in this application does not require the use of gas pipes to connect adjacent gas control elements, resulting in a smaller size, simpler installation, reduced installation time, and lower leakage risk. Attached Figure Description

[0016] The above and other objects, features, and advantages of this application will become more apparent from the more detailed description of the embodiments of this application in conjunction with the accompanying drawings. The drawings are provided to further illustrate the embodiments of this application and form part of the specification. They are used together with the embodiments of this application to explain this application and do not constitute a limitation thereof. In the drawings, the same reference numerals generally represent the same components or steps.

[0017] Figure 1 shows a schematic diagram of the structure of a gas control component provided in an exemplary embodiment of this application.

[0018] Figure 2 shows a schematic diagram of the internal structure of a gas control component provided in an exemplary embodiment of this application.

[0019] Figure 3 is a bottom view of a gas control component provided in an exemplary embodiment of this application.

[0020] Figure 4 is a schematic diagram of a single gas control component provided in an exemplary embodiment of this application.

[0021] Figure 5 shows a side view of a gas control component provided in an exemplary embodiment of this application.

[0022] Figure label:

[0023] 100. Gas control assembly; 101. Vent plate; 1011. First gas passage; 10111. Inlet; 10112. Outlet; 10113. First mounting port; 1012. Second gas passage; 10121. Second mounting port; 102. Gas regulating element; 1021. First on / off control valve; 1022. Flow regulating valve; 10221. First flow regulating valve; 10222. Second flow regulating valve; 1023. Pressure regulating valve; 103. Second on / off control valve; 104. Flow meter; 105. Fourth connector; 106. Pressure gauge; 107. First connector; 108. Second connector; 109. Third connector; 200. Processing equipment; 201. Furnace tube; 202. Gas supply device. Detailed Implementation

[0024] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0025] Figure 1 is a schematic diagram of the structure of a gas control component provided in an exemplary embodiment of this application; Figure 2 is a schematic diagram of the internal structure of a gas control component provided in an exemplary embodiment of this application; Figure 3 is a bottom view of a gas control component provided in an exemplary embodiment of this application; Figure 4 is a schematic diagram of a single gas control component provided in an exemplary embodiment of this application; and Figure 5 is a side view of a gas control component provided in an exemplary embodiment of this application.

[0026] As shown in Figures 1 to 5, this application embodiment provides a gas control assembly 100, which includes: a vent plate 101, at least one gas regulating element 102, and at least one first connector 107. The vent plate 101 has a first gas channel 1011, which has an inlet 10111, an outlet 10112, and at least one first mounting port 10113. The inlet 10111 can receive protective gas, and the outlet 10112 can communicate with the reaction chamber of the furnace tube 201 to deliver protective gas to the reaction chamber. The gas regulating element 102 extends into the first gas channel 1011 through the first mounting port 10113 to regulate the flow rate and / or pressure of the protective gas. The first connector 107 provides a sealed connection between the gas regulating element 102 and the vent plate 101.

[0027] For example, the protective gas is an inert gas.

[0028] For example, the protective gas is nitrogen or argon.

[0029] For example, the gas regulating element 102 includes at least one of the following: a pressure regulating valve, a two-way valve, a throttle valve, a solenoid valve, and a speed regulating valve.

[0030] For example, the first connector 107 is a double compression fitting connector.

[0031] In the above embodiments, by forming a first gas channel 1011 inside the vent plate 101, each gas regulating element 102 can be connected to the vent plate 101 through only one first connector 107. Compared with the traditional nitrogen dilution box, where both ends of each gas regulating element need to be connected to other elements through connectors, the number of first connectors 107 used is reduced, thus reducing costs. Furthermore, the gas regulating component 100 provided in this application embodiment does not require the use of gas pipes to connect adjacent gas regulating elements 102, resulting in a smaller size (saving approximately 30% of installation manpower), simpler installation, reduced installation time (saving approximately 50% of installation time compared to the traditional nitrogen dilution box), and reduced leakage risk.

[0032] In some embodiments, the vent plate 101 has at least one first groove and at least one first threaded portion, and the first connector 107 has at least one second threaded portion. The gas control assembly 100 further includes at least one first sealing ring and at least one first threaded member. The first sealing ring is at least partially disposed in the first groove and is located between the vent plate 101 and the first connector 107. The first threaded member is screwed to the first threaded portion and the second threaded portion.

[0033] For example, the vent plate 101 has at least one first threaded hole, and the first threaded portion is the thread within the first threaded hole. The first connector 107 has at least one second threaded hole, and the second threaded portion is the thread within the second threaded hole.

[0034] For example, the first threaded component is a screw or bolt.

[0035] In traditional nitrogen dilution chambers, the connection methods between connectors and components (including gas pipes, gas regulating elements, and measuring devices) are relatively complex, requiring a specific number of turns using a torque wrench. Operators need professional training to correctly connect different connectors and components. However, the connection structure provided in the above embodiment is simpler, allowing operators to correctly connect the vent plate 101 and the first connector 107 without requiring specialized training.

[0036] In some embodiments, as shown in Figures 2 and 4, the gas regulating element 102 includes a first on / off control valve 1021. The first on / off control valve 1021 is hermetically connected to the vent plate 101 via a first connector 107, and extends into the first gas passage 1011 via a first mounting port 10113, and is configured to control the on / off of the protective gas.

[0037] For example, the first on / off control valve 1021 can be a two-way valve or a solenoid valve.

[0038] Traditional nitrogen dilution tanks lack components to control the flow of nitrogen. Once the equipment is started, nitrogen continuously flows from the dilution tank into the reaction chamber, even when no related processes are being performed on the reactor. This results in resource waste and increased production costs. In the above embodiment, however, by incorporating a first on / off control valve 1021, the flow of protective gas can be controlled. This allows for the supply of protective gas according to equipment requirements, reducing resource waste (saving approximately 60% of protective gas usage) and lowering production costs.

[0039] In some embodiments, as shown in Figures 2 and 4, there are multiple first mounting ports 10113 and multiple first connectors 107. The gas regulating element 102 further includes at least one flow regulating valve 1022. The flow regulating valve 1022 is hermetically connected to the vent plate 101 through the first connector 107, and the flow regulating valve 1022 extends into the first gas passage 1011 through the first mounting port 10113, and is configured to regulate the flow rate of the protective gas.

[0040] For example, the flow regulating valve 1022 can be a throttle valve or a speed regulating valve.

[0041] In the above embodiments, the flow rate of the protective gas can be precisely controlled by setting the flow regulating valve 1022, thereby meeting the needs of different processes.

[0042] In some embodiments, as shown in Figures 2, 4, and 5, there are at least two flow regulating valves 1022. Each flow regulating valve 1022 includes a first flow regulating valve 10221 and a second flow regulating valve 10222. The first flow regulating valve 10221 is hermetically connected to the vent plate 101 via a first connector 107, and extends into the first gas passage 1011 through a first mounting port 10113, configured to regulate the flow rate of the protective gas to a preset maximum flow rate. The second flow regulating valve 10222 is disposed between the first flow regulating valve 10221 and the outlet 10112, hermetically connected to the vent plate 101 via the first connector 107, and extends into the first gas passage 1011 through the first mounting port 10113, configured to regulate the flow rate of the protective gas to a preset process flow rate, which is less than the preset maximum flow rate. The vent plate 101 further includes a second gas passage 1012, which has at least one second mounting port 10121. The first end of the second gas passage 1012 is connected to a first communication position (point A in Figure 4) of the first gas passage 1011, and the second end of the second gas passage 1012 is connected to a second communication position (point B in Figure 4) of the first gas passage 1011. The first communication position is located between the first flow regulating valve 10221 and the second flow regulating valve 10222, and the second communication position is located between the second flow regulating valve 10222 and the outlet 10112. A first on / off control valve 1021 is located between the first and second communication positions. The gas control assembly 100 also includes a second on / off control valve 103 and a second connector 108. The second on / off control valve 103 extends into the second gas passage 1012 through the second mounting port 10121 and is configured to control the on / off state of the protective gas within the second gas passage 1012. The second connector 108 provides a sealed connection between the second on / off control valve 103 and the vent plate 101.

[0043] For example, in the direction from the air inlet 10111 to the air outlet 10112, a second flow regulating valve 10222 and a first on / off control valve 1021 are sequentially arranged between the first connecting position and the second connecting position, or the first on / off control valve 1021 and the second flow regulating valve 10222.

[0044] For example, the second on / off control valve 103 can be a two-way valve or a solenoid valve.

[0045] For example, the second connector 108 is a double compression fitting connector.

[0046] Exemplarily, the vent plate 101 has at least one second groove and at least one third threaded portion, and the second connector 108 has at least one fourth threaded portion. The gas control assembly 100 further includes at least one second sealing ring and at least one second threaded member. The second sealing ring is at least partially disposed in the second groove and is located between the vent plate 101 and the second connector 108. The second threaded member is screwed onto the third and fourth threaded portions.

[0047] For example, the vent plate 101 has at least one third threaded hole, the third thread being a thread within the third threaded hole. The second connector 108 has at least one fourth threaded hole, the fourth thread being a thread within the fourth threaded hole.

[0048] For example, the second screw is a screw or bolt.

[0049] The reaction chamber is typically evacuated of waste gas using a vacuum pump. If the vacuum pump is powered off, the waste gas cannot be discharged quickly, posing a danger. In the above embodiment, with this structure, during normal process operation, the first on / off control valve 1021 is open and the second on / off control valve 103 is closed. Protective gas can enter the reaction chamber along the first gas channel 1011. The protective gas then passes through the first flow regulating valve 10221 and the second flow regulating valve 10222, ultimately entering the reaction chamber at a smaller preset process flow rate, thus saving protective gas. However, in the event of a power outage, the first on / off control valve 1021 and the second on / off control valve 103 are open. Protective gas can enter the reaction chamber along the first gas channel 1011 and the second gas channel 1012. The protective gas then passes through the first flow regulating valve 10221, ultimately entering the reaction chamber at a larger preset maximum flow rate, thereby effectively reducing the concentration of waste gas and preventing danger.

[0050] In some embodiments, as shown in Figures 2 and 4, the second flow regulating valve 10222 can also measure the flow rate of the protective gas. The second flow regulating valve 10222 is disposed between the first communication position and the second communication position. Alternatively, the gas control assembly 100 further includes a third connector 109 and a flow meter 104. The flow meter 104 is hermetically connected to the vent plate 101 through the third connector 109. The flow meter 104 is disposed between the second flow regulating valve 10222 and the outlet 10112. The flow meter 104 extends into the first gas channel 1011 through the first mounting port 10113. Alternatively, the flow meter 104 is connected to the outlet 10112 and the reaction chamber (i.e., the protective gas can flow from the outlet 10112 to the flow meter 104 and then enter the reaction chamber through the flow meter 104). The flow meter 104 is configured to measure the flow rate of the protective gas.

[0051] For example, the third connector 109 is a double ferrule connector.

[0052] Exemplarily, the vent plate 101 has at least one third groove and at least one fifth threaded portion, and the third connector 109 has at least one sixth threaded portion. The gas control assembly 100 further includes at least one third sealing ring and at least one third threaded member. The third sealing ring is at least partially disposed in the third groove and is located between the vent plate 101 and the third connector 109. The third threaded member is screwed to the fifth and sixth threaded portions.

[0053] For example, the vent plate 101 has at least one fifth threaded hole, and the fifth threaded portion is the thread within the fifth threaded hole. The third connector 109 has at least one sixth threaded hole, and the sixth threaded portion is the thread within the sixth threaded hole.

[0054] For example, the third screw is a screw or bolt.

[0055] In the above embodiments, by setting the flow meter 104, the flow rate of the protective gas to be flowed into the reaction chamber can be accurately detected.

[0056] In some embodiments, the gas regulating element 102 further includes a pressure regulating valve 1023. The pressure regulating valve 1023 is disposed between the air inlet 10111 and the gas regulating element 102. The pressure regulating valve 1023 is hermetically connected to the vent plate 101 via a first connector 107, and extends into the first gas passage 1011 through a first mounting port 10113, configured to regulate the pressure of the protective gas. And / or, the gas regulating assembly 100 further includes a pressure gauge 106, which is connected to the pressure regulating valve 1023 and configured to measure the pressure of the protective gas.

[0057] When the protective gas enters the first gas channel 1011 from the gas supply device 202, the gas pressure is usually high, which can easily damage components such as the pressure gauge 106 or the flow meter. In the above embodiment, by setting the pressure regulating valve 1023, the gas pressure of the protective gas can be reduced, and by setting the pressure gauge 106, the gas pressure of the protective gas can be accurately measured.

[0058] In some embodiments, as shown in Figures 2 and 3, the flow meter 104 is connected to the outlet 10112 and the reaction chamber. The gas control assembly 100 further includes at least two fourth connectors 105, one of which is connected to the inlet 10111, and the other is connected to the flow meter 104.

[0059] In some embodiments, as shown in FIG2, the vent plate 101 has a plurality of first gas channels 1011, a plurality of second gas channels 1012, a plurality of gas regulating elements 102, a plurality of flow meters 104, a plurality of first connectors 107, a plurality of second connectors 108, and a plurality of third connectors 109. Each first gas channel 1011 is correspondingly disposed with at least one gas regulating element 102 and a flow meter 104. The gas regulating element 102 corresponding to each first gas channel 1011 extends into each first gas channel 1011 through a first mounting port 10113 and is sealed to the vent plate 101 through a first connector 107 to regulate the flow rate and / or pressure of the protective gas in each first gas channel 1011. The flow meter 104 corresponding to each first gas channel 1011 is sealed to the vent plate 101 through a third connector 109. The second flow regulating valve 10222 is disposed between the second flow regulating valve 10222 and the outlet 10112 of each first gas channel 1011, and extends into each first gas channel 1011 through the first mounting port 10113. Alternatively, the flow meter 104 corresponding to each first gas channel 1011 is connected to the outlet 10112 of each first gas channel 1011 and the reaction chamber. The flow meter 104 corresponding to each first gas channel 1011 is configured to measure the flow rate of the protective gas in each first gas channel 1011. The outlet 10112 of each first gas channel 1011 is connected to the reaction chamber of a furnace tube 201. And / or, each second gas channel 1012 is correspondingly provided with each first gas channel 1011, the second on / off control valve 103, and the second connector 108. The first end of each second gas channel 1012 is connected to the first connection position of the corresponding first gas channel 1011, and the second end of each second gas channel 1012 is connected to the second connection position of the corresponding first gas channel 1011. The second on / off control valve 103 corresponding to each second gas channel 1012 extends into each second gas channel 1012 through the second mounting port 10121 and is sealed to the vent plate 101 through the second connector 108 to control the on / off of the protective gas in each second gas channel 1012.

[0060] For example, as shown in Figures 2 and 4, the vent plate 101 has six first gas channels 1011. Each first gas channel 1011 is connected to a second gas channel 1012 according to the structure described in the above embodiments. Each first gas channel 1011 is equipped with a pressure regulating valve 1023, a pressure gauge 106, a first flow regulating valve 10221, a second flow regulating valve 10222, a first on / off control valve 1021, and a second on / off control valve 103. Each second gas channel 1012 is equipped with a second on / off control valve 103.

[0061] In the above embodiments, this structure enables the gas control component 100 to simultaneously supply nitrogen to the reaction chambers of multiple reactors.

[0062] In some embodiments, the vent plate 101 is made of aluminum.

[0063] Traditional nitrogen dilution chambers typically use special materials for gas piping and connectors suitable for introducing high-purity gases, and often undergo processes such as acid washing and electrolytic polishing (EP treatment), resulting in high costs. However, in the above embodiment, by using an aluminum vent plate 101, and eliminating the need for additional acid washing and EP treatment, costs are significantly reduced.

[0064] Based on the same concept, as shown in Figure 4, this application embodiment also provides a processing apparatus 200, which includes: at least one furnace tube 201, a gas supply device 202, and a gas control component 100 of any of the above embodiments. The furnace tube 201 has a reaction chamber configured to contain a product. The gas supply device 202 is configured to provide a protective gas. The inlet 10111 of the first gas channel 1011 of the gas control component 100 is connected to the gas supply device 202, and the outlet 10112 of the first gas channel 1011 is connected to the reaction chamber. The gas control component 100 is configured to regulate the flow rate and / or pressure of the protective gas.

[0065] The basic principles of this application have been described above with reference to specific embodiments. However, it should be noted that the advantages, benefits, and effects mentioned in this application are merely examples and not limitations, and should not be considered as essential features of each embodiment of this application. Furthermore, the specific details disclosed above are for illustrative and facilitative purposes only, and are not limitations. These details do not limit the application to the necessity of employing the aforementioned specific details for implementation.

[0066] The block diagrams of devices, apparatuses, devices, and systems involved in this application are merely illustrative examples and are not intended to require or imply that they must be connected, arranged, or configured in the manner shown in the block diagrams. As those skilled in the art will recognize, these devices, apparatuses, devices, and systems can be connected, arranged, and configured in any manner. Words such as “comprising,” “including,” “having,” etc., are open-ended terms meaning “including but not limited to,” and are used interchangeably with them. The terms “or” and “and” as used herein refer to the terms “and / or,” and are used interchangeably with them unless the context clearly indicates otherwise. The term “such as” as used herein refers to the phrase “such as but not limited to,” and is used interchangeably with it.

[0067] It should also be noted that in the apparatus, equipment, and methods of this application, the components or steps can be disassembled and / or recombined. These disassemblies and / or recombinations should be considered as equivalent solutions of this application.

[0068] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use this application. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein can be applied to other aspects without departing from the scope of this application. Therefore, this application is not intended to be limited to the aspects shown herein, but rather to be accorded the widest scope consistent with the principles and novel features disclosed herein.

[0069] The above description has been given for purposes of illustration and description. Furthermore, this description is not intended to limit the embodiments of this application to the forms disclosed herein. Although numerous exemplary aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, alterations, additions, and sub-combinations thereof.

Claims

1. A gas regulation component, characterized in that, include: A vent plate has a first gas channel, which has an inlet, an outlet, and at least one first mounting port. The inlet is capable of receiving protective gas, and the outlet is capable of communicating with the reaction chamber of the furnace tube to deliver the protective gas to the reaction chamber. At least one gas regulating element extends into the first gas channel through the first mounting port to regulate the flow rate and / or pressure of the protective gas; at least one first connector provides a hermetically sealed connection between the gas regulating element and the vent plate.

2. The gas control component according to claim 1, characterized in that, The vent plate has at least one first groove and at least one first threaded portion, and the first connector has at least one second threaded portion; wherein, the gas control assembly further includes: at least one first sealing ring, the first sealing ring being at least partially disposed in the first groove, and the first sealing ring being located between the vent plate and the first connector; at least one first screw connector, the first screw connector being screwed to the first threaded portion and the second threaded portion.

3. The gas control component according to claim 1 or 2, characterized in that, The gas regulating element includes: a first on / off control valve, which is hermetically connected to the vent plate via the first connector, and extends into the first gas channel through the first mounting port, and is configured to control the on / off of the protective gas.

4. The gas control component according to claim 3, characterized in that, The number of first mounting ports is multiple, the number of first connectors is multiple, and the gas regulating element further includes: at least one flow regulating valve, the flow regulating valve is connected to the vent plate in a sealed manner through the first connector, and the flow regulating valve extends into the first gas channel through the first mounting port and is configured to regulate the flow rate of the protective gas.

5. The gas control component according to claim 4, characterized in that, The number of flow regulating valves is at least two; wherein, the flow regulating valve includes: a first flow regulating valve, which is hermetically connected to the vent plate via the first connector, and extends into the first gas channel through the first mounting port, configured to regulate the flow rate of the protective gas to a preset maximum flow rate; a second flow regulating valve, disposed between the first flow regulating valve and the gas outlet, which is hermetically connected to the vent plate via the first connector, and extends into the first gas channel through the first mounting port, configured to regulate the flow rate of the protective gas to a preset process flow rate, the preset process flow rate being less than the preset maximum flow rate; wherein, the vent plate also has a second gas channel, the... The second gas passage has at least one second mounting port. The first end of the second gas passage is connected to the first communication position of the first gas passage, and the second end of the second gas passage is connected to the second communication position of the first gas passage. The first communication position is located between the first flow regulating valve and the second flow regulating valve, and the second communication position is located between the second flow regulating valve and the gas outlet. The first on / off control valve is located between the first communication position and the second communication position. The gas control assembly further includes: a second on / off control valve, which extends into the second gas passage through the second mounting port and is configured to control the on / off of the protective gas in the second gas passage; and a second connector, which provides a hermetically sealed connection between the second on / off control valve and the vent plate.

6. The gas control component according to claim 5, characterized in that, The second flow regulating valve can also measure the flow rate of the protective gas. The second flow regulating valve is located between the first communication position and the second communication position. Alternatively, the gas control assembly further includes: a third connector; a flow meter, the flow meter being hermetically connected to the vent plate through the third connector, the flow meter being located between the second flow regulating valve and the gas outlet, and the flow meter extending into the first gas channel through the first mounting port; or, the flow meter is connected to the gas outlet and the reaction chamber, and the flow meter is configured to measure the flow rate of the protective gas.

7. The gas control component according to claim 1 or 2, characterized in that, The gas regulating element further includes: a pressure regulating valve disposed between the air inlet and the gas regulating element, the pressure regulating valve being hermetically connected to the vent plate through the first connector, and the pressure regulating valve extending into the first gas channel through the first mounting port, configured to regulate the pressure of the protective gas; and / or, the gas regulating component further includes: a pressure gauge communicating with the pressure regulating valve, configured to measure the pressure of the protective gas.

8. The gas control component according to claim 6, characterized in that, The vent plate has multiple first gas channels, multiple second gas channels, multiple gas regulating elements, multiple flow meters, multiple first connectors, multiple second connectors, and multiple third connectors; wherein, each first gas channel is correspondingly provided with at least one gas regulating element and one flow meter, the gas regulating element corresponding to each first gas channel extends into each first gas channel through the first mounting port and is sealed to the vent plate through the first connector to regulate the flow rate and / or pressure of the protective gas in each first gas channel, the flow meter corresponding to each first gas channel is sealed to the vent plate through the third connector, and the flow meter corresponding to each first gas channel is disposed between the second flow regulating valve and the outlet of each first gas channel, and extends into each first gas channel through the first mounting port, or, each first... The flow meter corresponding to each gas channel is connected to the outlet and the reaction chamber of each first gas channel. The flow meter corresponding to each first gas channel is configured to measure the flow rate of the protective gas in each first gas channel. The outlet of each first gas channel is connected to the reaction chamber of a furnace tube. And / or, each second gas channel is correspondingly provided with each first gas channel, the second on / off control valve, and the second connector. The first end of each second gas channel is connected to the first connection position of the corresponding first gas channel, and the second end of each second gas channel is connected to the second connection position of the corresponding first gas channel. The second on / off control valve corresponding to each second gas channel extends into each second gas channel through the second mounting port and is sealed to the vent plate through the second connector to control the on / off of the protective gas in each second gas channel.

9. The gas control component according to claim 1 or 2, characterized in that, The ventilation plate is made of aluminum.

10. A processing device, characterized in that, include: At least one furnace tube having a reaction chamber configured to contain products; a gas supply device configured to provide a protective gas. The gas control component according to any one of claims 1 to 9, wherein the inlet of the first gas channel of the gas control component is connected to the gas supply device, the outlet of the first gas channel is connected to the reaction chamber, and the gas control component is configured to adjust the flow rate and / or pressure of the protective gas.

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