Metal ion adsorption device with full-pipeline heat preservation function

Abstract

The utility model provides a metal ion adsorption device with a full-pipeline heat preservation function. The metal ion adsorption device comprises an adjustable adsorption liquid pipeline and an adsorption column assembly, wherein the adjustable adsorption liquid pipeline is subjected to heat preservation by full-pipeline heat preservation equipment; the full-pipeline heat preservation equipment comprises a control heat preservation box and a heating sleeve which are connected with a constant-temperature area control unit. The adjustable adsorption liquid pipeline and the adsorption column assembly are both arranged in the control heat preservation box, and the heating sleeve is arranged on the outer side of the adsorption column assembly; a mixed liquid valve, an infusion pump, a pressure gauge, a one-way valve, an unloading valve and a pipeline switching valve group are arranged at the adjustable adsorption liquid pipeline; the adsorption column assembly comprises an adsorption column group consisting of a plurality of adsorption columns and a connecting piece with a sieve plate; according to the utility model, the precipitation of a polymer monomer can be controlled by carrying out intelligent heat preservation control on a whole pipeline aiming at a polymer monomer solution, metal ions in the solution can be efficiently and selectively adsorbed, the service life of the filter element can be prolonged, and the device is environment-friendly.

Description

Technical Field

[0001] This utility model relates to adsorption devices, and more particularly to a metal ion adsorption device with full pipeline insulation. Background Technology

[0002] Due to the critical requirements of precision fields such as semiconductor manufacturing, electronic-grade chemicals necessitate strict control over the concentration of metal ions. Metal ions (such as sodium, potassium, and iron) can induce leakage currents in semiconductor devices, leading to short circuits or device failure. For example, residual metal ions on the silicon wafer surface can damage the insulation of the oxide layer, causing a decline in integrated circuit performance or even failure. Especially in nanoscale processes, metal ions can diffuse into the silicon crystal under high-temperature conditions, forming defects. Even trace amounts of metal impurities can alter the threshold voltage of transistors, significantly reducing chip yield. Furthermore, because semiconductor cleaning and etching processes are highly sensitive to the purity of chemical reagents, metal ions can catalyze unintended chemical reactions. As process nodes advance towards 3nm and below, metal ion concentrations need to reach ppb (parts per billion) or even ppt (parts per trillion) levels to meet the manufacturing requirements of high-density integrated circuits.

[0003] Photoresist is primarily used in the photolithography process of chip manufacturing, accounting for 30% of chip manufacturing costs and is one of the most critical materials in semiconductor chip manufacturing. The core of semiconductor-grade photoresist is the ultra-high purity photoresist resin solid monomer, but it contains various strongly chelated metal ions such as hydroxyl and carboxyl groups, presenting a technical bottleneck due to the difficulty in deeply removing these metal ions. When metal ions are present in the photoresist resin solid monomer, they react with photosensitizers and polymers, affecting the development accuracy of the photoresist. Simultaneously, metal ion contamination alters the rheological properties of the photoresist, leading to uneven coating thickness and even catalyzing the decomposition of the photoresist resin. This, in turn, causes deformation of the resist layer after drying or exposure, resulting in pattern collapse or film cracking, affecting the forming accuracy of the three-dimensional structure and directly impacting the yield of advanced process chips below 28nm. Furthermore, contaminants such as copper ions can transfer to the wafer surface during the etching process, reducing the threshold voltage stability of transistors and causing chip malfunction.

[0004] There are many ways to remove metal ions from chemical reagents, including using semi-permeable membranes and adsorption materials. However, in the purification process of photoresist resins, since the resin is a polymer, when removing metal ions from polymer monomers using adsorption or filtration, it is often necessary to dissolve the polymer monomers in a solvent. However, polymer monomers have low solubility and require high temperatures to prevent precipitation. Older metal ion adsorption devices rarely considered temperature changes in the solution within the pipeline, making them prone to clogging by precipitated polymer monomers during use, significantly impacting the lifespan of various filter cartridges.

[0005] This utility model proposes a solution to the above-mentioned problems. Utility Model Content

[0006] This invention proposes a metal ion adsorption device with full pipeline insulation. It can control the precipitation of polymer monomers in polymer monomer solutions by intelligently controlling the temperature of the entire pipeline, efficiently and selectively adsorbing metal ions in the solution, extending the service life of the filter cartridge, and being environmentally friendly.

[0007] The present invention adopts the following technical solution.

[0008] A metal ion adsorption device with full pipeline insulation includes an adjustable adsorption liquid pipeline insulated by a full pipeline insulation device and an adsorption column assembly with a sieve plate connection port; the full pipeline insulation device includes a control insulation box (2) connected to a constant temperature zone control unit (1) and a heating jacket (3); the adjustable adsorption liquid pipeline and the adsorption column assembly are both located inside the control insulation box, and the heating jacket is located outside the adsorption column assembly;

[0009] The adjustable adsorption liquid pipeline is equipped with a mixing liquid valve (4), a delivery pump (5), a pressure gauge (6), a check valve (7), an unloading valve (8), and a pipeline switching valve group;

[0010] The adsorption column assembly includes an adsorption column group (10) consisting of several adsorption columns and a connector (11) with a sieve plate.

[0011] The adjustable adsorption liquid pipeline includes a storage tank (12) placed on a magnetic stirring device (13). The storage tank is connected to a delivery pump (5) via a mixing liquid valve (4) to mix the raw material liquid in different storage tanks as required by the process.

[0012] The adjustable adsorption liquid pipeline detects the pipeline system pressure through the pump post pressure gauge (6) and the pipeline system temperature through the constant temperature zone control unit (1) at the pipeline.

[0013] The adsorption column assembly (10) is connected to the storage tank (14) and the detection port (15) via a connector (11) with a sieve plate. The storage tank (14) is connected to the outlet (16).

[0014] The full pipeline insulation equipment uses a constant temperature zone control unit (1) to detect the temperature of the liquid flowing through the pipeline, and the jacket of the heating jacket (3) wraps the storage tank (12) and the adsorption column group (10) to precisely control the temperature of the tank and the column.

[0015] The temperature of the insulation box (2) is controlled and automatically adjusted by the constant temperature zone control unit (1).

[0016] The adsorption column assembly with sieve plate connection port includes an adsorption column assembly (10) containing two or more adsorption columns. The multiple adsorption columns are connected in series or in parallel. Both ends of the adsorption column are connected to the adjustable adsorption liquid pipeline through the connector (11) with sieve plate.

[0017] The pipeline switching valve group includes valve assembly 1 (9-1), valve assembly 2 (9-2), and valve assembly 3 (9-3), which are used to control single-stage adsorption, multi-stage series adsorption, or parallel adsorption of the adsorption column group; the adsorption column group includes adsorption column A and adsorption column B.

[0018] When adjusting the adsorption liquid and controlling the single-stage adsorption, multi-stage series adsorption, or parallel adsorption of the adsorption column group, the adjustable adsorption liquid pipeline controls whether adsorption column A and adsorption column B are used in parallel, or only adsorption column A or adsorption column B is used, through valve combination number 1 in the pipeline switching valve group; and controls whether adsorption column B is used after adsorption column A is used, through valve combination number 2.

[0019] When the equipment needs to replace the adsorption column assembly (10), the pipeline is kept closed by shutting down valve assembly number 3. By using the above-mentioned pipeline switching valve assembly, it is possible to control the use of adsorption column assemblies A and B in series or in combination, or to use only adsorption columns A / B.

[0020] The detection port (15) is controlled by the detection port valve (17), which is connected to the detection knob (18) and controlled by the knob outside the device;

[0021] The outlet (16) is controlled by the outlet valve (19), which is connected to the outlet knob (20) and controlled by a knob outside the device;

[0022] When the metal ion adsorption device is turned on or a new batch of materials enters, the detection knob is switched to control the valve so that the adsorbed material is discharged from the detection port for testing. Until the metal ion concentration of the material meets the expectations, the detection knob is used to control the valve to switch so that the adsorbed material product enters the storage tank (14) through the outlet for collection.

[0023] After the product collection is complete, remove the sealed storage tank for other operations; if the valve is switched by the outlet knob at this time, there is no need to remove the storage tank, and the product will be discharged from the outlet for filling.

[0024] The connector with the sieve plate has an internal thread for threaded connection with the outer shell of the adsorption column, which has an external thread; the connector has a protrusion with a sealing rubber ring for riveting and sealing with the adsorption column with a corresponding recess.

[0025] The sieve plate inside the connector is a replaceable component, which is replaced according to the particle size of the adsorbent packing.

[0026] The aspect ratio of the adsorption column is 1:1 to 18:1.

[0027] In the adjustable adsorption liquid pipeline, the pipeline area in contact with the material is a PFA pipeline or a PTFE pipeline.

[0028] The adsorption column assembly is filled with one or more of the following adsorbents: resin, activated carbon, and molecular sieve;

[0029] The impurities removed by the adsorption column include one or more of the following: metallic impurities such as chromium, lithium, sodium, potassium, calcium, magnesium, aluminum, copper, iron, manganese, nickel, barium, beryllium, bismuth, cadmium, cobalt, gallium, lead, antimony, tin, strontium, titanium, thallium, vanadium, and zinc, as well as non-metallic impurities such as boron and arsenic.

[0030] The storage tank is placed on the magnetic stirring device and connected to the infusion pump through the mixing valve. The infusion pump can be set with a flow rate. The system pressure is detected by the pressure gauge after the pump, the temperature is detected by the constant temperature zone control unit, and the pipeline switching valve group controls whether the material is adsorbed in a single stage, in series or in parallel. It also controls whether the material is discharged from the detection port, enters the storage tank or is discharged from the outlet.

[0031] The detection port is controlled by a detection port valve, which is connected to a detection knob. When in use, the detection knob is turned outside the chamber to switch the pipeline to the detection port for discharge or to the storage tank for product collection. The outlet is controlled by an outlet valve, which is connected to an outlet knob. When in use, the outlet knob is turned outside the chamber to directly discharge the product, or the outlet is closed and the product is accumulated in the storage tank to reach the required volume before being discharged.

[0032] This invention targets polymer monomer solutions and controls the precipitation of polymer monomers through intelligent temperature control of the entire pipeline. It efficiently and selectively adsorbs metal ions in the solution, extends the service life of the filter element, and is environmentally friendly. Attached Figure Description

[0033] The present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments:

[0034] Appendix Figure 1 This is a schematic diagram of the structure of a metal ion adsorption device with full pipeline insulation according to an embodiment of the present invention;

[0035] Appendix Figure 2 This is a schematic diagram of the structure of an adsorption column assembly with a sieve plate connection port according to an embodiment of the present invention (the adsorption column has external threads, and the sieve plate connector has internal threads, thereby connecting the adsorption column assembly).

[0036] In the diagram: 1-Constant temperature zone control unit, 2-Control insulation box, 3-Heating jacket, 4-Liquid mixing valve, 5-Infusion pump, 6-Pressure gauge, 7-Check valve, 8-Unloading valve, 9-Pipeline switching valve assembly, 10-Adsorption column assembly, 11-Connector with sieve plate, 12-Storage tank, 13-Magnetic stirring device, 14-Storage tank, 15-Detection port, 16-Outlet, 17-Detection port valve, 18-Detection knob, 19-Outlet valve, 20-Outlet knob; 21-Sealing rubber ring, 22-Sieve plate;

[0037] 9-1, Valve assembly number 1; 9-2, Valve assembly number 2; 9-3, Valve assembly number 3. Detailed Implementation

[0038] The present invention will now be described in further detail with reference to the accompanying drawings of the embodiments thereof, and the technical solutions of the embodiments thereof will be clearly and completely described. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0039] As shown in the figure, a metal ion adsorption device with full pipeline insulation includes an adjustable adsorption liquid pipeline insulated by a full pipeline insulation device and an adsorption column assembly with a sieve plate connection port; the full pipeline insulation device includes a control insulation box 2 connected to a constant temperature zone control unit 1 and a heating jacket 3; the adjustable adsorption liquid pipeline and the adsorption column assembly are both located inside the control insulation box, and the heating jacket is located outside the adsorption column assembly.

[0040] The adjustable adsorption liquid pipeline is equipped with a mixing liquid valve 4, a delivery pump 5, a pressure gauge 6, a check valve 7, an unloading valve 8, and a pipeline switching valve group.

[0041] The adsorption column assembly includes an adsorption column group 10 consisting of several adsorption columns and a connector 11 with a sieve plate.

[0042] The adjustable adsorption liquid pipeline includes a storage tank 12 placed on a magnetic stirring device 13. The storage tank is connected to a liquid pump 5 through a mixing liquid valve 4 to mix the raw material liquid in different storage tanks as needed in the process.

[0043] The adjustable adsorption liquid pipeline detects the pipeline system pressure through the pump post-pump pressure gauge 6 and the pipeline system temperature through the constant temperature zone control unit 1 at the pipeline.

[0044] The adsorption column assembly 10 is connected to the storage tank 14 and the detection port 15 via a connector 11 with a sieve plate. The storage tank 14 is connected to the outlet 16.

[0045] The aforementioned full-pipeline insulation equipment uses a constant temperature zone control unit 1 to detect the temperature of the liquid flowing through the pipeline, and a heating jacket 3 to wrap the storage tank 12 and the adsorption column group 10 to precisely control and heat the tank and column.

[0046] The temperature of the insulation box 2 is controlled and automatically adjusted by the constant temperature zone control unit 1.

[0047] The adsorption column assembly with sieve plate connection port includes an adsorption column assembly 10 containing two or more adsorption columns. The multiple adsorption columns are connected in series or in parallel. Both ends of the adsorption column are connected to an adjustable adsorption liquid pipeline through a connector 11 with a sieve plate.

[0048] The pipeline switching valve group includes valve assembly 9-1 (number 1), valve assembly 9-2 (number 2), and valve assembly 9-3 (number 3), which are used to control single-stage adsorption, multi-stage series adsorption, or parallel adsorption of the adsorption column group; the adsorption column group includes adsorption column A and adsorption column B.

[0049] When adjusting the adsorption liquid and controlling the single-stage adsorption, multi-stage series adsorption, or parallel adsorption of the adsorption column group, the adjustable adsorption liquid pipeline controls whether adsorption column A and adsorption column B are used in parallel, or only adsorption column A or adsorption column B is used, through valve combination number 1 in the pipeline switching valve group; and controls whether adsorption column B is used after adsorption column A is used, through valve combination number 2.

[0050] When the equipment needs to replace adsorption column group 10, the pipeline is kept closed by shutting down valve group number 3. By using the above-mentioned pipeline switching valve group, it is possible to control the use of adsorption column groups A and B in series or in combination, or to use only adsorption columns A / B.

[0051] The detection port 15 is controlled by the detection port valve 17, which is connected to the detection knob 18 and controlled by an external knob.

[0052] Outlet 16 is controlled by outlet valve 19, which is connected to outlet knob 20 and controlled by an external knob.

[0053] When the metal ion adsorption device is started or a new batch of material is introduced, the detection knob is switched to control the valve so that the material that has been adsorbed is discharged from the detection port for testing. Until the metal ion concentration of the material meets the expectation, the detection knob is then used to control the valve to switch so that the material that has been adsorbed enters the storage tank 14 for collection through the outlet.

[0054] After the product collection is complete, remove the sealed storage tank for other operations; if the valve is switched by the outlet knob at this time, there is no need to remove the storage tank, and the product will be discharged from the outlet for filling.

[0055] The connector with the sieve plate has an internal thread for threaded connection with the outer shell of the adsorption column, which has an external thread; the connector has a protrusion with a sealing rubber ring 21 for riveting and sealing with the adsorption column with a corresponding recess.

[0056] The sieve plate 22 inside the connector is a replaceable part, which is replaced according to the particle size of the adsorbent packing.

[0057] The aspect ratio of the adsorption column is 1:1 to 18:1.

[0058] In the adjustable adsorption liquid pipeline, the pipeline area in contact with the material is a PFA pipeline or a PTFE pipeline.

[0059] The adsorption column assembly is filled with one or more of the following adsorbents: resin, activated carbon, and molecular sieve;

[0060] The impurities removed by the adsorption column include one or more of the following: metallic impurities such as chromium, lithium, sodium, potassium, calcium, magnesium, aluminum, copper, iron, manganese, nickel, barium, beryllium, bismuth, cadmium, cobalt, gallium, lead, antimony, tin, strontium, titanium, thallium, vanadium, and zinc, as well as non-metallic impurities such as boron and arsenic.

[0061] The storage tank is placed on the magnetic stirring device and connected to the infusion pump through the mixing valve. The infusion pump can be set with a flow rate. The system pressure is detected by the pressure gauge after the pump, the temperature is detected by the constant temperature zone control unit, and the pipeline switching valve group controls whether the material is adsorbed in a single stage, in series or in parallel. It also controls whether the material is discharged from the detection port, enters the storage tank or is discharged from the outlet.

[0062] The detection port is controlled by a detection port valve, which is connected to a detection knob. When in use, the detection knob is turned outside the chamber to switch the pipeline to the detection port for discharge or to the storage tank for product collection. The outlet is controlled by an outlet valve, which is connected to an outlet knob. When in use, the outlet knob is turned outside the chamber to directly discharge the product, or the outlet is closed and the product is accumulated in the storage tank to reach the required volume before being discharged.

[0063] In this example, the device uses liquid feeding. Solid feed should be fully dissolved in the storage tank before the device is started to feed.

[0064] The raw materials are put into the storage tank (12), which is heated by the heating jacket (3) and placed on the magnetic stirring device (13) for stirring. After dissolving, they are pumped out at a constant flow rate by the infusion pump (5) and enter the adsorption column group (10) through the connector with sieve plate (11) for adsorption of metal ions. The adsorbed product is first guided to the detection port (15) for testing. After meeting the requirements, the detection knob (18) controls the detection port valve (17) to input into the storage tank (14). After the product processing is completed, the outlet knob (20) controls the outlet valve (19) to discharge the qualified product from the outlet (16).

[0065] Example 1:

[0066] The solid monomer was added to a 500 ml PFA storage tank and heated and stirred to dissolve. The heating and holding temperature was 65℃. The dissolved monomer was then fed into an adsorption column containing A15 resin adsorbent with a volume of 20.4 ml, a column length of 260 mm, and an inner diameter of 20 mm at a flow rate of 0.1 ml / min for adsorption of metal ions. The monomer solution after adsorption was completed was transferred to a 500 ml PFA storage tank for insulated storage. After the material adsorption was completed, the monomer solution was crystallized and solid-liquid separation was performed. The separated monomer was then dried in an infrared dryer to obtain a solid monomer with metal ion concentration <20 ppb.

[0067] 0.2g of the purified solid monomer was diluted 100 times with ultrapure water and the metal ions in the purified solid monomer were detected by ICP-MS. The concentrations of some metal ions are shown in Table 1.

[0068]

[0069] Example 2:

[0070] The solid monomer was added to a 500 ml PFA storage tank and heated and stirred to dissolve. The heating and holding temperature was 65℃. The dissolved monomer was then fed into an adsorption column containing A15 resin adsorbent with a volume of 20.4 ml, a column length of 260 mm, and an inner diameter of 20 mm at a flow rate of 0.15 ml / min for adsorption of metal ions. The monomer solution after adsorption was completed was transferred to a 500 ml PFA storage tank for insulated storage. After the material adsorption was completed, the monomer solution was crystallized and solid-liquid separation was performed. The separated monomer was then dried in an infrared dryer to obtain a solid monomer with metal ion concentration <20 ppb.

[0071] 0.2g of the purified solid monomer was diluted 100 times with ultrapure water and the metal ions in the purified solid monomer were detected by ICP-MS. The concentrations of some metal ions are shown in Table 2.

[0072]

[0073] Example 3:

[0074] The solid monomer was dissolved by heating and stirring in a 500 ml PFA storage tank at 65°C. The dissolved monomer was then fed into an adsorption column containing A35 resin adsorbent (20.4 ml volume, 260 mm length, 20 mm inner diameter) at a flow rate of 0.1 ml / min for metal ion adsorption. The resulting monomer solution was then stored in a 500 ml PFA storage tank at a controlled temperature. After adsorption, the monomer solution was crystallized and subjected to solid-liquid separation. The separated monomer was dried in an infrared dryer to obtain a solid monomer with metal ion concentrations <20 ppb. 0.2 g of the purified solid monomer was diluted 100 times with ultrapure water, and the metal ion concentrations in the purified solid monomer were detected by ICP-MS. The concentrations of some metal ions are shown in Table 3.

[0075]

[0076] Example 4:

[0077] The solid monomer was added to a 500 ml PFA storage tank and heated and stirred to dissolve. The heating and holding temperature was 65℃. The dissolved monomer was then fed into an adsorption column containing A35 resin adsorbent with a volume of 20.4 ml, a column length of 260 mm, and an inner diameter of 20 mm at a flow rate of 0.15 ml / min for adsorption of metal ions. The monomer solution after adsorption was completed was transferred to a 500 ml PFA storage tank for insulated storage. After the material adsorption was completed, the monomer solution was crystallized and solid-liquid separation was performed. The separated monomer was then dried in an infrared dryer to obtain a solid monomer with metal ion concentration <20 ppb.

[0078] 0.2g of the purified solid monomer was diluted 100 times with ultrapure water and the metal ions in the purified solid monomer were detected by ICP-MS. The concentrations of some metal ions are shown in Table 4.

[0079] .

Claims

1. A metal ion adsorption device with full pipeline insulation, characterized in that: It includes an adjustable adsorption liquid pipeline insulated with a full pipeline insulation device and an adsorption column assembly with a sieve plate connection port; the full pipeline insulation device includes a control insulation box (2) connected to the constant temperature zone control unit (1) and a heating jacket (3); the adjustable adsorption liquid pipeline and the adsorption column assembly are both located inside the control insulation box, and the heating jacket is located outside the adsorption column assembly. The adjustable adsorption liquid pipeline is equipped with a mixing liquid valve (4), a delivery pump (5), a pressure gauge (6), a check valve (7), an unloading valve (8), and a pipeline switching valve group; The adsorption column assembly includes an adsorption column group (10) consisting of several adsorption columns and a connector (11) with a sieve plate.

2. The metal ion adsorption device with full pipeline insulation according to claim 1, characterized in that: The adjustable adsorption liquid pipeline includes a storage tank (12) placed on a magnetic stirring device (13). The storage tank is connected to a delivery pump (5) via a mixing liquid valve (4) to mix the raw material liquid in different storage tanks as required by the process. The adjustable adsorption liquid pipeline detects the pipeline system pressure through the pump post pressure gauge (6) and the pipeline system temperature through the constant temperature zone control unit (1) at the pipeline. The adsorption column assembly (10) is connected to the storage tank (14) and the detection port (15) via a connector (11) with a sieve plate. The storage tank (14) is connected to the outlet (16).

3. The metal ion adsorption device with full pipeline insulation according to claim 2, characterized in that: The full pipeline insulation equipment uses a constant temperature zone control unit (1) to detect the temperature of the liquid flowing through the pipeline, and the jacket of the heating jacket (3) wraps the storage tank (12) and the adsorption column group (10) to precisely control the temperature of the tank and the column. The temperature of the insulation box (2) is controlled and automatically adjusted by the constant temperature zone control unit (1).

4. A metal ion adsorption device with full pipeline insulation according to claim 2, characterized in that: The adsorption column assembly with sieve plate connection port includes an adsorption column assembly (10) containing two or more adsorption columns. The multiple adsorption columns are connected in series or in parallel. Both ends of the adsorption column are connected to the adjustable adsorption liquid pipeline through the connector (11) with sieve plate.

5. A metal ion adsorption device with full pipeline insulation according to claim 4, characterized in that: The pipeline switching valve group includes valve assembly 1 (9-1), valve assembly 2 (9-2), and valve assembly 3 (9-3), which are used to control single-stage adsorption, multi-stage series adsorption, or parallel adsorption of the adsorption column group; the adsorption column group includes adsorption column A and adsorption column B. When adjusting the adsorption liquid and controlling the single-stage adsorption, multi-stage series adsorption, or parallel adsorption of the adsorption column group, the adjustable adsorption liquid pipeline controls whether adsorption column A and adsorption column B are used in parallel, or only adsorption column A or adsorption column B is used, through valve combination number 1 in the pipeline switching valve group; and controls whether adsorption column B is used after adsorption column A is used, through valve combination number 2. When the equipment needs to replace the adsorption column assembly (10), the pipeline is kept closed by closing valve assembly number 3.

6. A metal ion adsorption device with full pipeline insulation according to claim 4, characterized in that: The detection port (15) is controlled by the detection port valve (17), which is connected to the detection knob (18) and controlled by the knob outside the device; The outlet (16) is controlled by the outlet valve (19), which is connected to the outlet knob (20) and controlled by a knob outside the device; When the metal ion adsorption device is turned on or a new batch of materials enters, the detection knob is switched to control the valve so that the adsorbed material is discharged from the detection port for testing. Until the metal ion concentration of the material meets the expectations, the detection knob is used to control the valve to switch so that the adsorbed material product enters the storage tank (14) through the outlet for collection. If the valve is switched using the outlet knob, the product will be discharged from the outlet for filling.

7. A metal ion adsorption device with full pipeline insulation according to claim 4, characterized in that: The connector with the sieve plate has an internal thread for threaded connection with the outer shell of the adsorption column, which has an external thread; the connector has a protrusion with a sealing rubber ring for riveting and sealing with the adsorption column with a corresponding recess.

8. A metal ion adsorption device with full pipeline insulation according to claim 7, characterized in that: The sieve plate inside the connector is a replaceable component, which is replaced according to the particle size of the adsorbent packing.

9. A metal ion adsorption device with full pipeline insulation according to claim 4, characterized in that: The aspect ratio of the adsorption column is 1:1 to 18:

1.

10. A metal ion adsorption device with full pipeline insulation according to claim 4, characterized in that: In the adjustable adsorption liquid pipeline, the pipeline area in contact with the material is a PFA pipeline or a PTFE pipeline.

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