Valve and vacuum system

Abstract

The utility model provides a valve and a vacuum system. The valve comprises a valve body, a valve plate and a first heater. A cavity is formed in the valve body; the valve body is provided with a first valve port communicating the cavity with the outside of the valve body. The valve plate is movably arranged in the cavity and is configured to movably open or close the first valve port; the first heater is arranged on the outer surface of the valve body and is configured to transfer heat to the valve body through contact with the outer surface of the valve body. According to the valve, the first heater is arranged outside the valve body of the valve to heat the whole valve, and the uniformity of the whole temperature of the valve can be improved. Therefore, the probability of occurrence of phenomena such as condensation and accumulation is greatly reduced, and finally, related process products can better meet the process requirements. And particularly, the semiconductor product can better meet the process requirements.

Description

Technical Field

[0001] This application relates to the field of vacuum technology, and more specifically, to a valve and a vacuum system. Background Technology

[0002] In most manufacturing processes, the preparation process usually produces high-temperature products, and the corresponding manufacturing equipment usually involves working chambers, medium pipelines, and valves used to shut off and open the medium pipelines.

[0003] Taking semiconductor fabrication as an example, it is usually carried out in a vacuum chamber, and valves are typically installed on the gas pipeline connecting the vacuum chamber and the vacuum pump. During the fabrication process, high-temperature products are easily generated and flow through the valves. In this case, due to the temperature difference between the valve and the high-temperature products, the high-temperature products are prone to condensation and accumulation inside the valve at room temperature, which is detrimental to the formation of high-temperature products and results in the final semiconductor failing to meet requirements.

[0004] In other words, most valves currently available cannot meet the relevant process requirements when dealing with processes that generate and flow high-temperature products, resulting in the final products that do not meet the process requirements. Utility Model Content

[0005] The purpose of this application is to provide a valve and vacuum system that, by installing a heater outside the valve body to heat the entire valve, can improve the uniformity of the overall temperature of the valve, thereby significantly reducing the probability of condensation, accumulation and other phenomena, and ultimately enabling the related process products to better meet process requirements.

[0006] In a first aspect, this application provides a valve, including a valve body, a valve plate, and a first heater; the valve body has a cavity inside; the valve body is provided with a first valve port communicating with the cavity and the outside of the valve body; the valve plate is movably disposed within the cavity and configured to open or close the first valve port by means of movement; the first heater is disposed on the outer surface of the valve body and configured to transfer heat to the valve body through contact with the outer surface of the valve body.

[0007] The aforementioned valve, by incorporating a first heater outside the valve body to heat the entire valve, improves the uniformity of its overall temperature. This significantly reduces the probability of condensation and buildup, ultimately enabling related process products to better meet process requirements. This is particularly beneficial for semiconductor products.

[0008] In conjunction with the first aspect, optionally, the valve further includes a telescopic sleeve and a second heater; the valve body is also provided with a second valve port; one end of the telescopic sleeve is connected to the valve plate, and the other end of the telescopic sleeve is connected to the first inner wall of the chamber; wherein, the first inner wall of the chamber is the part of the inner wall of the chamber opposite to the first valve port; the second valve port is provided on the side wall of the valve body; wherein, the side wall of the valve body is a part whose cross-section is parallel to the telescopic direction of the telescopic sleeve; the telescopic sleeve is configured to be stretched or compressed under the action of the valve plate, and to cover the second valve port in the stretched state; the second heater is provided inside the chamber and configured to transfer heat to the valve body.

[0009] The aforementioned valve, by installing a second heater inside the valve body cavity, combined with the first heater installed on the outer surface of the valve body, achieves simultaneous heating of the valve body from both the inside and outside by the first and second heaters, respectively. This further improves the overall temperature uniformity of the valve. Consequently, it significantly reduces the probability of condensation and accumulation, ultimately enabling the relevant process products to better meet process requirements.

[0010] In conjunction with the first aspect, optionally, the retractable sleeve is fitted over the second heater.

[0011] The aforementioned valve optimizes the spatial layout within the valve body chamber by attaching a retractable sleeve to the second heater. Furthermore, by attaching the retractable sleeve to the second heater, the second heater can directly heat the retractable sleeve through contact. This allows the first and second heaters to directly heat the valve body and the retractable sleeve within the valve body, respectively, further improving the overall temperature uniformity of the valve and significantly reducing the probability of condensation and accumulation. This better meets the process requirements of related products, especially semiconductor products.

[0012] In conjunction with the first aspect, optionally, the second heater has a spiral heating section; the spiral heating section is coiled within the retractable sleeve along the inner surface of the retractable sleeve.

[0013] The aforementioned valve, by equipping the second heater with a spiral heating element that coils along the inner surface of the telescopic sleeve, increases the contact area between the second heater and the telescopic sleeve, thereby improving the efficiency of heat transfer from the second heater to the telescopic sleeve. This, in turn, further improves the overall temperature uniformity of the valve, significantly reducing the probability of condensation and accumulation, ultimately enabling the related process products to better meet process requirements. Furthermore, the spiral structure of the spiral heating element allows it to compress and stretch synchronously with the telescopic sleeve, ensuring that the contact area between the second heater and the telescopic sleeve remains unchanged.

[0014] In conjunction with the first aspect, optionally, the valve body is cylindrical and has a side surface; the first heater has a heating surface; the heating surface surrounds and is attached to the side surface of the valve body.

[0015] The aforementioned valve, by adapting the heating surface of the first heater to the side of the cylindrical valve body, increases the contact area between the first heater and the valve body, thereby improving the efficiency of heat transfer from the first heater to the valve body. This, in turn, further improves the overall temperature uniformity of the valve, significantly reduces the probability of condensation and accumulation, and ultimately enables the related process products to better meet process requirements.

[0016] In conjunction with the first aspect, optionally, the side of the valve body is composed of a first side and a second side; the first heater includes a first heating part and a second heating part; the heating surface includes a first heating surface located on the first heating part and a second heating surface located on the second heating part; the first heating surface is attached to the first side, and the second heating surface is attached to the second side.

[0017] The aforementioned valve, by dividing the heating surface of the first heater into a first heating surface and a second heating surface, allows for separate installation of the first and second heating surfaces onto the valve body during the process of attaching the heating surfaces to the side of the valve body. This avoids the various difficulties encountered when directly fitting the entire heating surface onto the valve body when there are protruding components on the valve body. This improves the efficiency of heat transfer from the first heater to the valve body and enhances the ease of valve assembly and disassembly.

[0018] In conjunction with the first aspect, optionally, the first heater further includes a fastener; the fastener secures the first heating part and the second heating part to the side of the valve body by sleeve and tightening the first heating part and the second heating part.

[0019] The aforementioned valve simplifies the installation process by using fasteners that tighten the first and second heating parts to secure them to the valve body. This simplifies the assembly and disassembly of the first heater and the valve body, making the installation and disassembly of the valve more convenient. Consequently, this further improves the ease of valve assembly and disassembly.

[0020] In conjunction with the first aspect, optionally, the valve further includes a piston assembly, an elastic element, and a connector; the piston assembly includes a cylinder and a piston rod, and is disposed at the end of the valve body away from the valve port; one end of the connector is connected to the piston rod, and the other end of the connector is connected to the valve plate; the piston assembly is configured to drive the valve plate away from the valve port through the connector to open the valve port; the elastic element is connected to the connector and configured to drive the valve plate closer to the valve port through the connector to close the valve port.

[0021] The aforementioned valve opens the first valve port by driving the valve plate away from it via a piston assembly, and closes it by driving the valve plate closer to it via an elastic element. This design eliminates the need for the piston assembly during the closure of the first valve port, thus reducing energy consumption. Furthermore, after the elastic element drives the valve plate closer to and closes the first valve port, it provides a long-term and stable sealing force, improving the valve's sealing stability without consuming excessive energy.

[0022] In conjunction with the first aspect, optionally, the elastic element is disposed within the cylinder body; one end of the elastic element is connected to the end of the connecting member away from the valve plate, and the other end of the elastic element is connected to the inner wall of the cylinder body away from the valve body.

[0023] The aforementioned valve, by placing the elastic element inside the cylinder of the piston assembly, avoids excessive occupation of the valve body cavity space and also avoids interference between the elastic element and the second heater.

[0024] In a second aspect, this application provides a vacuum system including a vacuum pump, a vacuum chamber, and a valve as described in the first aspect.

[0025] The vacuum system described above has the same beneficial effects as the valve provided in the first aspect or any alternative embodiment of the first aspect, which will not be elaborated here.

[0026] In summary, the valve and vacuum system provided in this application, by installing a first heater on the outside of the valve body to heat the entire valve, significantly reduces the probability of condensation and accumulation, ultimately enabling related process products to better meet process requirements. This is especially true for semiconductor products. By installing a second heater inside the valve body cavity, combined with the first heater on the outer surface of the valve body, the valve body is heated simultaneously from both the inside and outside by the first and second heaters, further improving the uniformity of the overall valve temperature. This further significantly reduces the probability of condensation and accumulation. By equipping the second heater with a spiral heating element that coils along the inner surface of the retractable sleeve, the contact area between the second heater and the retractable sleeve is increased, thereby improving the efficiency of heat transfer from the second heater to the retractable sleeve. Furthermore, by adapting the heating surface of the first heater to the side of the cylindrical valve body, the contact area between the first heater and the valve body is increased, further improving the efficiency of heat transfer from the first heater to the valve body. By fastening the first heating part and the second heating part to the valve body with fasteners that are tightened in a clamping manner, the installation method between the first heating part, the second heating part and the valve body is simplified, thereby making the disassembly and assembly of the first heater and the valve body more convenient. Attached Figure Description

[0027] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this application and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0028] Figure 1 A cross-sectional view of the valve provided in an embodiment of this application;

[0029] Figure 2 A perspective view of the second heater in the valve provided in an embodiment of this application;

[0030] Figure 3 This is a perspective view of the first heater in the valve provided in an embodiment of this application.

[0031] Icons: 100, Valve; 110, Valve body; 111, First valve port; 112, Second valve port; 120, Valve plate; 130, First heater; 131, First heating part; 1311, First heating surface; 132, Second heating part; 1321, Second heating surface; 133, Fastener; 140, Telescopic sleeve; 150, Second heater; 151, Spiral heating part; 160, Cylinder; 170, Piston rod; 180, Elastic element; 190, Connector. Detailed Implementation

[0032] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. The components of the embodiments of this application described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0033] Therefore, the following detailed description of the embodiments of this application provided in the accompanying drawings is not intended to limit the scope of the claimed application, but merely to illustrate selected embodiments of the application. All other embodiments obtained by those skilled in the art based on the embodiments of this application without inventive effort are within the scope of protection of this application.

[0034] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0035] In the description of this application, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the utility model product is in use. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application. In addition, the terms "first," "second," and "third," etc., are only used to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0036] Furthermore, terms such as "horizontal" and "vertical" do not imply that components must be absolutely horizontal or suspended, but rather that they can be slightly tilted. For example, "horizontal" simply means that its direction is more horizontal than "vertical," and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0037] In the description of this application, it should also be noted that, unless otherwise expressly specified and limited, the terms "set up," "install," "connect," and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0038] Please refer to Figure 1 , Figure 1 This is a cross-sectional view of the valve 100 provided in an embodiment of this application. The valve 100 provided in this embodiment may include a valve body 110, a valve plate 120, and a first heater 130. The valve body 110 may have a chamber inside. A first valve port 111 communicating with the chamber and the outside of the valve body 110 may be provided on the valve body 110. The valve 100 may be movably disposed within the chamber and may be configured to open or close the first valve port 111 by moving it. The first heater 130 may be disposed on the outer surface of the valve body 110 and may be configured to transfer heat to the valve body 110 through contact with the outer surface of the valve body 110.

[0039] Valve 100 is typically used to cut off or open the flow of a medium. In the open state, the medium can flow from one side of valve 100 into the chamber within valve body 110, then out of the chamber, and finally to the other side of valve 100. Therefore, those skilled in the art can provide a second valve port 112 on valve body 110, where the first valve port 111 and the second valve port 112 can serve as the inlet for the medium flowing into the chamber and the outlet for the medium flowing out of the chamber, respectively. In the case where valve 100 is used in a vacuum system, the medium can be a gas. The movable direction of valve plate 120 can be... Figure 1 The up and down directions in the middle.

[0040] The first heater 130 can be an electric heater, which may specifically include a heating element, a power cord, and thermocouple wires. The heating element can serve as the core component for converting electrical energy into heat energy, and it can be directly disposed on the outer surface of the valve body 110, transferring heat to the valve body 110 through contact. Furthermore, the valve body 110 can be made of a material with good thermal conductivity, such as steel or alloys.

[0041] In the above implementation process, by providing a first heater 130 outside the valve body 110 of the valve 100 to heat the entire valve 100, the overall temperature uniformity of the valve 100 can be improved. This significantly reduces the probability of condensation, accumulation, and other phenomena, ultimately enabling related process products to better meet process requirements. In particular, it enables semiconductor products to better meet process requirements.

[0042] Please continue to refer to Figure 1In some optional embodiments, valve 100 may further include a telescopic sleeve 140 and a second heater 150. A second valve port 112 may also be provided on valve body 110. One end of the telescopic sleeve 140 may be connected to valve plate 120, and the other end of the telescopic sleeve 140 may be connected to the first inner wall of the chamber. The first inner wall of the chamber may be the portion of the inner wall of the chamber opposite to the first valve port 111. The second valve port 112 may be located on the side wall of valve body 110. The side wall of valve body 110 may have a cross-section parallel to the telescopic direction of the telescopic sleeve 140. The telescopic sleeve 140 may be configured to stretch or compress under the action of valve plate 120, and to cover the second valve port 112 in the stretched state. The second heater 150 may be located within the chamber and may be configured to transfer heat to valve body 110.

[0043] The retractable sleeve 140 can specifically be a bellows. The second valve port 112 in this embodiment can be substantially the same as the second valve port 112 described in the previous embodiments. Figure 1 For example, the first valve port 111 can be located at the bottom of the valve body 110, and the second valve port 112 can be located on the right side of the valve body 110. The orientation of the first valve port 111 and the second valve port 112 can be approximately perpendicular.

[0044] The extendable sleeve 140 can be aligned with the orientation of the first valve port 111. When the valve 100 moves to a position close to the edge of the first valve port 111, sealing the first valve port 111, the extendable sleeve 140 can be in a stretched state. Considering the relationship between the second valve port 112 and the first valve port 111, the stretched extendable sleeve 140 can cover the first valve port 111 to close the second valve port 112. Conversely, the extendable sleeve 140 can be in a compressed state, which can cover the second valve port 112 to open it.

[0045] The second heater 150 can also be an electric heater and can have a similar structure to the second heater 150. Specifically, the component disposed within the chamber can be a part of the second heater 150 that converts electrical energy into heat energy. This component can be disposed on the inner wall of the chamber or inside the telescopic sleeve 140.

[0046] In the above implementation process, by adding a second heater 150 inside the valve body 110 cavity, combined with the first heater 130 on the outer surface of the valve body 110, the valve body 110 is heated simultaneously from both the inside and outside by the first heater 130 and the second heater 150, respectively, further improving the overall temperature uniformity of the valve 100. This significantly reduces the probability of condensation and accumulation, ultimately enabling the relevant process products to better meet process requirements.

[0047] Please continue to refer to Figure 1 In some alternative embodiments, the retractable sleeve 140 may be fitted over the second heater 150.

[0048] In other words, the core component in the second heater 150 that converts electrical energy into heat energy can be housed within the retractable sleeve 140.

[0049] In the above implementation process, by attaching the retractable sleeve 140 to the second heater 150, the spatial layout within the valve body 110 chamber is optimized. Furthermore, by attaching the retractable sleeve 140 to the second heater 150, the second heater 150 can directly heat the retractable sleeve 140 through contact. This achieves direct heating of the valve body 110 and the retractable sleeve 140 within the valve body 110 by the first heater 130 and the second heater 150 respectively, further improving the overall temperature uniformity of the valve 100 and significantly reducing the probability of condensation and accumulation, thus better meeting the process requirements of related products, especially semiconductor products.

[0050] Please combine Figure 1 Reference Figure 2 , Figure 2 This is a perspective view of the first heater 130 in the valve 100 provided in this application embodiment. In some alternative embodiments, the second heater 150 may have a spiral heating section 151. The spiral heating section 151 may be coiled within the telescopic sleeve 140 along the inner surface of the telescopic sleeve 140.

[0051] The second heater 150 may specifically be a spiral MI cable heater, which may also include corresponding power lines and thermocouple wires. The thermocouple wires are used to connect thermocouples to provide feedback on the target temperature after heating.

[0052] The spiral heating part 151 can be spiral-shaped and can be attached to the inner surface of the telescopic sleeve 140 for spiraling.

[0053] In the above implementation process, by configuring a spiral heating part 151 for the second heater 150 and having it coiled along the inner surface of the telescopic sleeve 140, the contact area between the second heater 150 and the telescopic sleeve 140 is increased, thereby improving the efficiency of heat transfer from the second heater 150 to the telescopic sleeve 140. This correspondingly improves the overall temperature uniformity of the valve 100, significantly reduces the probability of condensation and accumulation, and ultimately enables the relevant process products to better meet process requirements. Furthermore, the spiral structure of the spiral heating part 151 allows it to compress and stretch synchronously with the compression and stretching of the telescopic sleeve 140, ensuring that the contact area between the second heater 150 and the telescopic sleeve 140 remains unchanged.

[0054] Please continue to refer to Figure 1 and Figure 2 In some alternative embodiments, the valve body 110 may be cylindrical and may have sides. The first heater 130 may have a heating surface. The heating surface may surround and be attached to the side of the valve body 110.

[0055] For example, the valve body 110 may be generally cylindrical, and correspondingly, the heating surface of the first heater 130 may be in the shape of a cylindrical side surface and may be fitted onto the valve body 110.

[0056] In the above-described process, by adapting the heating surface of the first heater 130 to the side of the cylindrical valve body 110, the contact area between the first heater 130 and the valve body 110 is increased, thereby improving the efficiency of heat transfer from the first heater 130 to the valve body 110. This, in turn, further improves the overall temperature uniformity of the valve 100, significantly reduces the probability of condensation and accumulation, and ultimately enables the relevant process products to better meet process requirements.

[0057] Please combine Figure 1 Reference Figure 3 , Figure 3 This is a perspective view of the second heater 150 in the valve 100 provided in this application embodiment. In some optional embodiments, the side of the valve body 110 may be composed of a first side and a second side. The first heater 130 may include a first heating part 131 and a second heating part 132. The heating surface may include a first heating surface 1311 located on the first heating part 131 and a second heating surface 1321 located on the second heating part 132. The first heating surface 1311 may be attached to the first side, and the second heating surface 1321 may be attached to the second side.

[0058] In other words, the heating surface, which is shaped like the side of a cylinder, can be divided into two semi-circular surfaces, namely the first heating surface 1311 and the second heating surface 1321.

[0059] It is worth mentioning that, with Figure 1 For example, the second valve port 112 shown in the figure protrudes beyond the cylinder corresponding to the valve body 110. Therefore, corresponding clearance parts are pre-set on the first heating surface 1311 and / or the second heating surface 1321 to avoid interference with the second valve port 112 when the first heating part 131 and the second heating part 132 are attached to the side of the valve body 110.

[0060] In the above implementation process, by dividing the heating surface of the first heater 130 into a first heating surface 1311 and a second heating surface 1321, the first heating surface 1311 and the second heating surface 1321 can be installed on the valve body 110 separately during the process of attaching the heating surface to the side of the valve body 110. This avoids the various difficulties encountered when directly fitting the entire heating surface onto the valve body 110 when there are related protruding parts on the valve body 110. This improves the efficiency of heat transfer from the first heater 130 to the valve body 110 and enhances the ease of assembly and disassembly of the valve 100.

[0061] Please continue to refer to Figure 3 In some alternative embodiments, the first heater 130 may further include a fastener 133. The fastener 133 can secure the first heating part 131 and the second heating part 132 to the side of the valve body 110 by sleeve and tightening them.

[0062] The aforementioned fastener 133 can specifically be a clamp. A clamp typically includes a ring-shaped fastening part and a bolt. When the ring-shaped fastening part is fitted onto the target to be fastened, the fastening part can be tightened around the target by adjusting the bolt.

[0063] In the above implementation process, the first heating part 131 and the second heating part 132, which are attached to the valve body 110, are fastened by fasteners 133 using a tightening method. This simplifies the installation method between the first heating part 131, the second heating part 132, and the valve body 110, making the disassembly and assembly of the first heater 130 and the valve body 110 more convenient. Consequently, the ease of disassembly and assembly of the valve 100 is further improved.

[0064] Please continue to refer to Figure 1In some alternative embodiments, valve 100 may further include a piston assembly, an elastic element 180, and a connector 190. The piston assembly may include a cylinder 160 and a piston rod 170, and may be located at the end of valve body 110 away from the valve port. One end of connector 190 may be connected to piston rod 170, and the other end of connector 190 may be connected to valve plate 120. The piston assembly may be configured to drive valve plate 120 away from the valve port via connector 190 to open the valve port. The elastic element 180 may be connected to connector 190 and may be configured to drive valve plate 120 closer to the valve port via connector 190 to close the valve port.

[0065] by Figure 1 For example, when the first valve port 111 is located below the valve body 110, the piston assembly can be located above the valve body 110. The piston rod 170 is movably disposed within the cylinder 160 and can move under the action of a medium such as gas. The piston rod 170 can drive the valve 100 to move via the connecting member 190. The connecting member 190 can be a valve stem. In this embodiment, the piston assembly can be used only to drive the valve plate 120 upward to open the valve port. The downward movement of the valve plate 120 to close the valve port can be driven by the elastic member 180. The elastic member 180 can be a spring. In this case, the elastic member 180 can be disposed within the cavity of the valve body 110, with its two ends connected to the valve 100 and the inner wall of the cavity, respectively; the elastic member 180 can also be disposed within the cylinder 160 of the piston assembly, with its two ends connected to the inner wall of the cylinder 160 and the piston rod 170, respectively.

[0066] In the above implementation process, the first valve port 111 can be opened by driving the valve plate 120 away from the first valve port 111 through the piston assembly, and closed by driving the valve plate 120 towards the first valve port 111 through the elastic member 180. This allows the valve port 111 to be closed without relying on the piston assembly, thereby reducing energy consumption. Furthermore, after the elastic member 180 drives the valve plate 120 towards the first valve port 111 and closes the first valve port 111, the elastic member 180 can provide a long-term and stable sealing force, improving the sealing stability of the valve 100 without consuming excessive energy.

[0067] Please continue to refer to Figure 1 In some alternative embodiments, the elastic element 180 may be disposed within the cylinder body 160. One end of the elastic element 180 may be connected to the end of the connector 190 away from the valve plate 120, and the other end of the elastic element 180 may be connected to the inner wall of the cylinder body 160 away from the valve body 110.

[0068] As described in the preceding embodiments, the elastic element 180 can be disposed within the cylinder body 160 of the race assembly. One end of the elastic element 180 can be connected to the connector 190, and the other end of the elastic element 180 can be connected to... Figure 1 The top of the inner wall of the 160-inch cylinder block is connected.

[0069] In the above implementation process, by setting the elastic element 180 inside the cylinder 160 of the piston assembly, excessive occupation of the inner cavity space of the valve body 110 is avoided, and interference between the elastic element 180 and the second heater 150 is also avoided.

[0070] Based on the same concept, embodiments of this application provide a vacuum system that may include a vacuum pump, a vacuum chamber, and the valve 100 described above.

[0071] The vacuum chamber may include a chamber shell, on which a valve 100 is provided.

[0072] The above implementation process is the same as that of valve 100 described above, and will not be repeated here.

[0073] In summary, the valve 100 and vacuum system provided in the various embodiments of this application, by providing a first heater 130 outside the valve body 110 of the valve 100 to heat the entire valve 100, significantly reduce the probability of condensation and accumulation, ultimately enabling related process products to better meet process requirements. This is especially true for semiconductor products. By further providing a second heater 150 inside the cavity of the valve body 110, combined with the first heater 130 on the outer surface of the valve body 110, the first heater 130 and the second heater 150 simultaneously heat the valve body 110 from both the inside and outside, further improving the uniformity of the overall temperature of the valve 100. This further significantly reduces the probability of condensation and accumulation. By equipping the second heater 150 with a spiral heating part 151 that coils along the inner surface of the telescopic sleeve 140, the contact area between the second heater 150 and the telescopic sleeve 140 is increased, thereby improving the efficiency of heat transfer from the second heater 150 to the telescopic sleeve 140. Similarly, by adapting the heating surface of the first heater 130 to the side of the cylindrical valve body 110, the contact area between the first heater 130 and the valve body 110 is increased, further improving the efficiency of heat transfer from the first heater 130 to the valve body 110. By fastening the first heating part 131 and the second heating part 132 to the valve body 110 with fasteners 133 using a tightening method, the installation method between the first heating part 131, the second heating part 132, and the valve body 110 is simplified, making the assembly and disassembly of the first heater 130 and the valve body 110 more convenient.

[0074] The above description is merely a preferred embodiment of this application and is not intended to limit this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. A valve, characterized in that, Includes valve body, valve plate and first heater; The valve body has an internal chamber; The valve body is provided with a first valve port that connects the chamber to the outside of the valve body; The valve plate is movably disposed within the chamber and configured to open or close the first valve port by means of movement; The first heater is disposed on the outer surface of the valve body and configured to transfer heat to the valve body through contact with the outer surface of the valve body; The valve also includes a second heater; The second heater is disposed within the chamber and configured to transfer heat to the valve body.

2. The valve according to claim 1, characterized in that, The valve also includes a retractable sleeve; The valve body is also provided with a second valve port; One end of the telescopic sleeve is connected to the valve plate, and the other end of the telescopic sleeve is connected to the first inner wall of the chamber; wherein, the first inner wall of the chamber is the part of the inner wall of the chamber opposite to the first valve port; The second valve port is disposed on the side wall of the valve body; wherein, the side wall of the valve body is a portion whose cross-section is parallel to the telescopic direction of the telescopic sleeve; The retractable sleeve is configured to be stretched or compressed under the action of the valve plate, and to cover the second valve port in the stretched state.

3. The valve according to claim 2, characterized in that, The retractable sleeve is fitted onto the second heater.

4. The valve according to claim 3, characterized in that, The second heater has a spiral heating section; The spiral heating element is coiled along the inner surface of the retractable sleeve within the retractable sleeve.

5. The valve according to claim 1, characterized in that, The valve body is cylindrical and has a side surface; The first heater has a heating surface; The heating surface surrounds and adheres to the side of the valve body.

6. The valve according to claim 5, characterized in that, The side of the valve body is composed of a first side and a second side; The first heater includes a first heating section and a second heating section; The heating surface includes a first heating surface located on the first heating part and a second heating surface located on the second heating part; The first heating surface is attached to the first side surface, and the second heating surface is attached to the second side surface.

7. The valve according to claim 6, characterized in that, The first heater also includes fasteners; The fastener secures the first heating part and the second heating part to the side of the valve body by fitting and tightening them together.

8. The valve according to any one of claims 1 to 7, characterized in that, The valve also includes a piston assembly, an elastic element, and a connecting element; The piston assembly includes a cylinder and a piston rod, and is located at the end of the valve body away from the valve port; One end of the connector is connected to the piston rod, and the other end of the connector is connected to the valve plate; The piston assembly is configured to drive the valve plate away from the valve port via the connector to open the valve port; The elastic element is connected to the connector and configured to drive the valve plate closer to the valve port via the connector to close the valve port.

9. The valve according to claim 8, characterized in that, The elastic element is disposed within the cylinder body; One end of the elastic element is connected to the end of the connector away from the valve plate, and the other end of the elastic element is connected to the inner wall of the cylinder away from the valve body.

10. A vacuum system, characterized in that, Includes a vacuum pump, a vacuum chamber, and a valve as described in any one of claims 1 to 9.

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