Drying tank device

Abstract

The utility model relates to the technical field of new energy equipment, and provides a drying tank device which comprises a tank body, a mounting frame, a first air inlet plate and a second air inlet plate, the mounting frame is mounted on the inner wall of the tank body, the first air inlet plate and the second air inlet plate are rotatably mounted in the tank body and located on the two opposite sides of the mounting frame, and the first air inlet plate and the second air inlet plate are arranged in the tank body. The interior of the tank body is divided into a first air inlet cavity, a drying cavity and a second air inlet cavity which are arranged and distributed in the first direction, the mounting frame is located in the drying cavity, a silicon wafer is clamped on the mounting frame, and drying air in the first air inlet cavity and the second air inlet cavity is introduced into the drying cavity to dry the silicon wafer. Through the rotary arrangement of the groove body, the mounting frame, the first air inlet plate and the second air inlet plate, uniform distribution and stable flowing of airflow are achieved, the drying efficiency is improved, and water stains are reduced.

Description

Technical Field

[0001] This utility model relates to the field of new energy equipment technology, and in particular to a drying tank device. Background Technology

[0002] With the rapid development of new energy sources, green, sustainable, and clean energy has become a key research focus; solar cells have once again come into the public eye. The continuous upgrading and iteration of new energy sources has led to technological innovation, with improvements in the efficiency and yield of photovoltaic cells not only resulting from changes in process technology but also from upgrades in equipment technology. As the final drying process in cleaning, it can significantly impact the completion of the cleaning process. How to effectively increase the uniformity and stability of airflow and improve the drying efficiency of the tank has become a major challenge.

[0003] Existing drying tanks typically use air intake plates, usually located at the bottom and sides of the tank. These air intakes are mostly circular holes, and the internal extraction devices lack baffles. Currently, reducing water stains and increasing yield can be achieved by increasing the silicon wafer placement area and planning the tank's position. This is achieved by setting up a silicon wafer drying device: a drying tank body and hollow baffles. Multiple hollow baffles divide the inner cavity of the drying tank body into multiple silicon wafer placement areas, with multiple air vents on the sides of the baffles communicating with their inner cavities. However, in existing technologies, further increasing the stability and uniformity of airflow to improve the drying efficiency of the drying tank remains a challenge.

[0004] Therefore, it is necessary to develop a new drying tank device that can achieve stable airflow in the tank, increase drying efficiency, and reduce water stains without affecting production capacity. Utility Model Content

[0005] The purpose of this invention is to provide a drying tank device that has the advantages of improving airflow uniformity and stability, enhancing drying efficiency, and reducing water stains.

[0006] To achieve the above objectives, the present invention adopts the following technical solution:

[0007] The drying tank device according to an embodiment of the present invention includes: a tank body, a mounting frame, a first air inlet plate and a second air inlet plate. The mounting frame is installed on the inner wall of the tank body. The first air inlet plate and the second air inlet plate are rotatably installed inside the tank body and located on opposite sides of the mounting frame. The tank body is divided along a first direction into a first air inlet chamber, a drying chamber and a second air inlet chamber arranged in a row. The mounting frame is located inside the drying chamber. A silicon wafer is snapped onto the mounting frame. Drying gases from the first air inlet chamber and the second air inlet chamber are introduced into the drying chamber to dry the silicon wafer.

[0008] The drying tank device according to the present invention, through the arrangement of the tank body, mounting frame, first air inlet plate and second air inlet plate, and the cooperation of rotating component and air extraction component, achieves uniform distribution and stable flow of airflow, improves drying efficiency, and reduces water stains, thus having significant advantages.

[0009] In addition, the drying tank device according to the above embodiments of the present invention may also have the following additional technical features:

[0010] In some embodiments of this utility model, the first air intake plate is provided with a plurality of first air intake holes, which are evenly distributed on the first air intake plate; the second air intake plate is provided with a plurality of second air intake holes, which are evenly distributed on the second air intake plate; the diameters of the first air intake holes and the second air intake holes increase along the first direction, and the direction of increasing diameters of the first air intake holes and the second air intake holes is directly facing the interior of the groove.

[0011] In some embodiments of this utility model, the groove body is provided with an opening, and the groove body also includes a cover plate, which is installed at the opening to realize the opening and closing of the opening.

[0012] In some embodiments of this utility model, the first air intake plate is mounted on the cover plate and rotates on the cover plate, and the second air intake plate is mounted on the bottom wall of the groove and rotates on the bottom wall.

[0013] In some embodiments of this utility model, a first rotating member, a first power member, a second rotating member, and a second power member are also included. The first rotating member is disposed between and connects the first air intake plate and the cover plate. The first power member is electrically connected to the rotating member and drives the first rotating member to rotate. The first rotating member drives the first air intake plate to rotate. The second rotating member is disposed between and connects the second air intake plate and the bottom wall. The second power member is electrically connected to the rotating member and drives the second rotating member to rotate. The second rotating member drives the second air intake plate to rotate.

[0014] In some embodiments of this utility model, a third rotating member and a driving member are also included. The third rotating member is rotatably mounted on the bottom wall along a first direction. The second air intake plate passes through the third rotating member and rotates with the third rotating member. The first air intake plate is detachably mounted on the third rotating member. The third rotating member drives the third rotating member to rotate on the cover plate. The driving member is electrically connected to the third rotating member and drives the third rotating member to rotate.

[0015] In some embodiments of this utility model, an air extraction assembly is also included. The air extraction assembly includes an air extraction component. The groove body is provided with an air outlet. The air outlet is located on two side walls of the groove body along the second direction. The two air extraction components are respectively connected to the two air outlets.

[0016] In some embodiments of this utility model, the air extraction assembly further includes a partition plate, two of which are installed in the tank and located near the air outlet. The partition plate is provided with a plurality of channels, which are evenly distributed on the partition plate.

[0017] In some embodiments of this utility model, the groove is provided with a first air supply hole and a second air supply hole, the first air supply hole is connected to the first air inlet chamber, and the second air supply hole is connected to the second air inlet chamber.

[0018] In some embodiments of this utility model, a gas delivery component is also included, wherein the gas delivery component is connected to the first gas delivery hole to deliver dry gas to the first air inlet chamber, and the gas delivery component is connected to the second gas delivery hole to deliver dry gas to the second air inlet chamber.

[0019] Additional aspects and advantages of this invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of the drying tank device according to an embodiment of the present invention;

[0021] Figure 2 This is a schematic diagram of the drying tank device according to another embodiment of the present invention;

[0022] Figure 3 for Figure 1 or Figure 2 A top-down view;

[0023] Figure 4 This is a schematic diagram of the structure of the first air inlet plate and the second air inlet plate of the drying tank device according to an embodiment of the present invention.

[0024] Figure Labels

[0025] 100. Drying tank device;

[0026] 1. Tank body; 11. Cover plate; 12. Bottom wall; 14. First air inlet chamber; 15. Second air inlet chamber; 16. Drying chamber; 17. Opening;

[0027] 2. Mounting bracket;

[0028] 3. First air intake plate; 31. First air intake hole;

[0029] 4. Second air intake plate; 41. Second air intake hole;

[0030] 51. First rotating component; 52. Second rotating component; 53. First power component; 54. Second power component;

[0031] 61. Third rotating component; 62. Driving component;

[0032] 71. Exhaust fan; 72. Partition;

[0033] 81. Gas transmission components; 82. Gas transmission pipelines;

[0034] 9. Handle;

[0035] 200. Silicon wafer; 201. Flower basket. Detailed Implementation

[0036] The following is a more detailed description of a drying tank device according to the present invention, with reference to the accompanying drawings, which illustrate preferred embodiments of the present invention. It should be understood that those skilled in the art can modify the present invention described herein while still achieving its advantageous effects. Therefore, the following description should be understood as being of general knowledge to those skilled in the art and is not intended to limit the present invention.

[0037] In the description of this specification, terms such as "one embodiment" or "some embodiments" mean that one or more embodiments of this specification include a particular feature, structure, or characteristic described in connection with that embodiment. Therefore, the phrases "in one embodiment," "in some embodiments," "in other embodiments," "in still other embodiments," etc., appearing in different parts of this specification do not necessarily refer to the same embodiment, but rather mean "one or more, but not all, embodiments," unless otherwise specifically emphasized.

[0038] The embodiments of this utility model are described in detail below. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this utility model, and should not be construed as limiting this utility model.

[0039] The drying tank device 100 according to an embodiment of the present invention is described below with reference to the accompanying drawings.

[0040] According to the drying tank device 100 of the present utility model embodiment, such as Figure 1 , Figure 2As shown, it includes: a tank 1, a mounting bracket 2, a first air intake plate 3, and a second air intake plate 4. The mounting bracket 2 is installed on the inner wall of the tank 1. The first air intake plate 3 and the second air intake plate 4 are rotatably installed inside the tank 1 and located on opposite sides of the mounting bracket 2. The interior of the tank 1 is along a first direction (e.g., ...). Figure 1 The space is divided into a first air inlet chamber 14, a drying chamber 16, and a second air inlet chamber 15 arranged in a Z direction. The mounting bracket 2 is located in the drying chamber 16, and the silicon wafer 200 can be snapped onto the mounting bracket 2. The drying gas from the first air inlet chamber 14 and the second air inlet chamber 15 is introduced into the drying chamber 16 to dry the silicon wafer 200.

[0041] The internal division of the tank 1 is achieved through the installation positions of the first air inlet plate 3 and the second air inlet plate 4, ensuring a uniform airflow distribution from the first air inlet chamber 14 and the second air inlet chamber 15 into the drying chamber 16. The mounting bracket 2 can be designed as a snap-on or fixed type to facilitate the installation and removal of the basket 201 holding the silicon wafer 200. The rotation of the first air inlet plate 3 and the second air inlet plate 4 can be achieved manually or electrically to adjust the direction and intensity of the airflow. Furthermore, the rotation of the first air inlet plate 3 and the second air inlet plate 4 causes convection of the drying gas entering the drying chamber 16, allowing the drying gas to fully contact the silicon wafer 200, thereby improving the drying effect.

[0042] Specifically, the tank 1 can be designed using high-temperature resistant materials to enable long-term use in high-temperature environments. The rotation angles of the first air inlet plate 3 and the second air inlet plate 4 can be controlled by setting a limiting device to avoid uneven airflow distribution caused by excessive rotation. The structure of the mounting bracket 2 can be adjusted according to the shape and size of the silicon wafer 200 to ensure the stability of the silicon wafer 200 during the drying process. The airflow within the drying chamber 16 can be enhanced by setting a guide plate or a fan to improve drying efficiency.

[0043] In a preferred embodiment, multiple guide vanes can be installed inside the tank 1 to further optimize airflow distribution. The rotation of the first air inlet plate 3 and the second air inlet plate 4 can be driven by a motor for automated control. The mounting bracket 2 can be designed with an adjustable height to accommodate silicon wafers 200 of different sizes (e.g., silicon wafers 200 for batteries of different sizes). The airflow within the drying chamber 16 can be monitored by temperature and humidity sensors to improve the drying effect.

[0044] The drying tank device 100 of this invention achieves uniform airflow distribution and efficient drying by optimizing the internal structural design of the tank body 1. Compared with the prior art, this device, by setting rotatable first air inlet plate 3 and second air inlet plate 4, can flexibly adjust the airflow direction, causing convection of the drying gas in the drying chamber 16, thereby improving drying efficiency. Furthermore, the design of the mounting bracket 2 ensures the stability of the silicon wafer 200 during the drying process, avoiding incomplete drying caused by uneven airflow. This device has a simple structure, is easy to operate, and is suitable for various drying scenarios.

[0045] In some embodiments of this utility model, such as Figure 3 , Figure 4 As shown, the first air intake plate 3 is provided with a plurality of first air intake holes 31, which are evenly distributed on the first air intake plate 3; the second air intake plate 4 is provided with a plurality of second air intake holes 41, which are evenly distributed on the second air intake plate 4. The diameters of the first air intake holes 31 and the second air intake holes 41 increase along the first direction, and the direction of increasing diameters of the first air intake holes 31 and the second air intake holes 41 is directly facing the interior of the groove 1.

[0046] Specifically, the increasing aperture design of the first air inlet 31 and the second air inlet 41 allows the drying gas to gradually increase in airflow intensity and volume as it enters the tank 1, ensuring a uniform distribution of airflow within the tank 1. This design effectively avoids uneven airflow distribution within the tank 1, thereby improving drying efficiency. Furthermore, the uniform distribution of the first air inlet 31 and the second air inlet 41 further ensures airflow stability, enabling the silicon wafer 200 to be heated evenly and reducing water residue.

[0047] In a preferred embodiment, the increasing diameter of the first air inlet 31 and the second air inlet 41 can be achieved by providing holes of different diameters on the air intake plate. For example, one end of the air intake plate can be provided with a smaller diameter hole, while the other end can be provided with a larger diameter hole, thereby creating an effect of increasing diameter, i.e., holes in the shape of a frustum. Furthermore, the arrangement of the air inlets can also be adjusted according to the specific structure of the groove 1 to ensure that the airflow can evenly cover the entire interior of the groove 1.

[0048] Therefore, by optimizing the design of the air inlet, this invention solves the problem of uneven airflow distribution in the prior art, thereby improving the drying efficiency of the drying tank device 100. Compared with the prior art, this invention not only ensures the uniformity and stability of airflow but also reduces water residue, thus improving the drying effect.

[0049] In some embodiments of this utility model, such as Figures 1-3 As shown, the tank 1 has an opening 17, and the tank 1 also includes a cover plate 11, which is installed at the opening 17 to allow the opening 17 to be opened and closed. The cover plate 11 can be installed on the tank 1 via a hinge or slide rail mechanism to facilitate the opening and closing of the opening 17. Specifically, the cover plate 11 can be made of a transparent material to facilitate observation of the interior of the tank 1. As a preferred embodiment, the cover plate 11 can be equipped with a sealing ring to ensure the airtightness of the tank 1 when closed.

[0050] Specifically, the installation method of the cover plate 11 can include, but is not limited to, the following: First, the cover plate 11 is connected to the groove 1 via a hinge, allowing the cover plate 11 to rotate around the hinge axis to open and close; second, the cover plate 11 is connected to the groove 1 via a slide rail, allowing the cover plate 11 to slide along the slide rail to open and close; third, the cover plate 11 is connected to the groove 1 via a detachable method such as a snap-fit ​​or bolt, facilitating maintenance and cleaning. Furthermore, the cover plate 11 can be equipped with a locking device to ensure that the cover plate 11 will not be accidentally opened during the drying process. Further, a handle 9 can also be provided on the cover plate 11 to assist in opening and closing, further improving the ease of use of the cover plate 11.

[0051] To address this, the present invention, by setting the cover plate 11, enables the flexible opening and closing of the opening 17 of the tank 1, facilitating the insertion and removal of the silicon wafer 200, while ensuring airtightness during the drying process and improving drying efficiency. Compared with the prior art, this solution not only simplifies the operation process but also enhances the practicality and reliability of the equipment.

[0052] In some embodiments of this utility model, such as Figure 2 As shown, the first air intake plate 3 is mounted on the cover plate 11 and rotates on the cover plate 11, and the second air intake plate 4 is mounted on the bottom wall 12 of the tank body 1 and rotates on the bottom wall 12.

[0053] Specifically, the first air intake plate 3 is connected to the cover plate 11 via a rotating connector, allowing the first air intake plate 3 to rotate on the cover plate 11, thereby adjusting the air intake angle and airflow direction. The second air intake plate 4 is connected to the bottom wall 12 of the groove 1 via another rotating connector, allowing it to rotate on the bottom wall 12, further optimizing the airflow distribution. Thus, by rotating the first air intake plate 3 and the second air intake plate 4, the air intake position and angle can be flexibly adjusted, enhancing the uniformity and stability of the airflow.

[0054] In a preferred embodiment, the rotation of the first air intake plate 3 and the second air intake plate 4 can be achieved manually or automatically. For example, manual control can be achieved by setting an adjustment handle or knob, allowing the operator to adjust the angle of the air intake plates according to actual needs. Automatic control can be achieved by driving with a motor or servo system, combined with airflow data fed back from sensors, to adjust the position of the air intake plates in real time to achieve the best drying effect. In addition, the rotating connecting parts can adopt a bearing or hinge structure to ensure the smoothness and durability of the rotation process.

[0055] To address this issue, this invention solves the problems of uneven airflow distribution and low drying efficiency in existing technologies by incorporating a rotatable first air inlet plate 3 and a second air inlet plate 4. The rotation of the first air inlet plate 3 on the cover plate 11 allows for flexible adjustment of the airflow direction at the top, while the rotation of the second air inlet plate 4 on the bottom wall 12 optimizes the airflow distribution at the bottom. Thus, through the synergistic effect of the two air inlets, uniform airflow distribution within the tank 1 is achieved, improving drying efficiency and reducing water residue. Compared to existing technologies, this invention is not only simple in structure and easy to implement, but also significantly improves drying performance, possessing high practical value.

[0056] In some embodiments of this utility model, such as Figure 2 As shown, it also includes a first rotating component 51, a first power component 53, a second rotating component 52, and a second power component 54. The first rotating component 51 is disposed between the first air intake plate 3 and the cover plate 11 and connects the first air intake plate 3 and the cover plate 11. The first power component 53 is electrically connected to the rotating component and drives the first rotating component 51 to rotate. The first rotating component 51 drives the first air intake plate 3 to rotate. The second rotating component 52 is disposed between the second air intake plate 4 and the bottom wall 12 and connects the second air intake plate 4 and the bottom wall 12. The second power component 54 is electrically connected to the rotating component and drives the second rotating component 52 to rotate. The second rotating component 52 drives the second air intake plate 4 to rotate.

[0057] The first rotating component 51 and the second rotating component 52 can be mechanically connected by gears, belts, or connecting rods to achieve rotation, while the first power component 53 and the second power component 54 can be driven by electric motors, hydraulic motors, or pneumatic motors. Specifically, the first rotating component 51 can be connected to the first air intake plate 3 via gears, and the first power component 53 drives the gears to rotate via an electric motor, thereby causing the first air intake plate 3 to rotate on the cover plate 11; the second rotating component 52 can be connected to the second air intake plate 4 via a belt, and the second power component 54 drives the belt to rotate via a hydraulic motor, thereby causing the second air intake plate 4 to rotate on the bottom wall 12.

[0058] Therefore, by setting the first rotating component 51, the first power component 53, the second rotating component 52, and the second power component 54, this utility model achieves independent rotation of the first air inlet plate 3 and the second air inlet plate 4. This allows for adjustment of the air inlet plate angle according to actual needs, enabling more even distribution of drying gas within the tank 1 and improving drying efficiency. Furthermore, the rotating components also make the rotation of the air inlet plates more stable, reducing the impact of airflow fluctuations on the drying effect. Compared with existing technologies, this utility model solves the problems of airflow uniformity and stability by optimizing the rotation method of the air inlet plates, thereby improving the overall performance of the drying tank device 100.

[0059] Furthermore, the first power component 53 and the second power component 54 can also be configured as the same power structure, that is, the first power component 53 is electrically connected to the first rotating component 51 and the second rotating component 52 at the same time, so that the first power component 53 drives the first rotating component 51 and the second rotating component 52 to rotate simultaneously, which simplifies the overall structure of the drying tank device 100 and improves the integration level of the drying tank device 100.

[0060] In some embodiments of this utility model, such as Figure 1 As shown, it also includes a third rotating member 61 and a driving member 62. The third rotating member 61 is rotatably mounted on the bottom wall 12 of the groove 1 along the first direction. The second air intake plate 4 passes through the third rotating member 61 and rotates with the third rotating member 61. The first air intake plate 3 is detachably mounted on the third rotating member 61. The third rotating member 61 drives the third rotating member 61 to rotate on the cover plate 11. The driving member 62 is connected to the third rotating member 61 and drives the third rotating member 61 to rotate.

[0061] Specifically, the third rotating member 61, driven by the driving member 62, can rotate along the first direction, thereby driving the second air intake plate 4 to rotate. The first air intake plate 3 is detachably mounted on the third rotating member 61, so the first air intake plate 3 can rotate along with the rotation of the third rotating member 61. This design allows the first air intake plate 3 and the second air intake plate 4 to rotate synchronously, thereby achieving uniform distribution and stable control of the airflow within the tank 1.

[0062] In a preferred embodiment, the third rotating component 61 can be configured as a rotating shaft structure. The third rotating component 61 can be connected to the driving component 62 via direct connection, gear transmission, or belt transmission to ensure smooth and precise rotation. Furthermore, the installation position and angle of the third rotating component 61 can be adjusted according to the specific structure of the groove 1 to optimize the airflow distribution.

[0063] Therefore, by introducing the third rotating component 61 and the driving component 62, this utility model achieves synchronous rotation of the first air inlet plate 3 and the second air inlet plate 4, thereby improving the uniformity and stability of the airflow within the tank 1. Compared with the prior art, this solution not only simplifies the structure of the rotating assembly but also improves drying efficiency, reduces water stains, and solves the problems of uneven airflow distribution and unsatisfactory drying effect in the prior art.

[0064] In some embodiments of this utility model, an air extraction component (not shown in the figure) is also included, such as... Figure 1 , Figure 2 As shown, the air extraction assembly includes an air extraction component 71, and the tank 1 is provided with an air outlet (not shown in the figure). The air outlet is located along the second direction (e.g., Figure 1 On the two side walls of the groove 1 (shown in the X direction), the two air extraction components 71 are respectively connected to the two air outlets.

[0065] Specifically, the function of the extraction assembly is to extract moisture from the tank 1 using the extraction element 71, thereby maintaining a dry environment within the tank 1. The air outlets are located on the two side walls of the tank 1, allowing moisture to be evenly discharged from the tank 1. The two extraction assemblies improve the dehumidification capacity of the drying tank device 100, preventing incomplete dehumidification from affecting the drying effect. The partition 72 further optimizes the airflow distribution. The evenly distributed air holes on the partition 72 ensure that moisture is evenly discharged through the partition 72, preventing localized moisture accumulation. As a preferred embodiment, the extraction element 71 can be a pump, cylinder, or other power component to discharge moisture from the tank 1. Furthermore, the extraction element 71 can also be other structural components capable of achieving the above functions, which will not be elaborated further here.

[0066] Therefore, this invention effectively solves the problem of uneven moisture discharge within the tank 1 through the arrangement of the suction component and the partition 72. The combined use of the suction component 71 and the air outlet ensures that moisture can be discharged quickly and evenly from the inside of the tank 1, while the partition 72 further optimizes the airflow distribution, preventing localized accumulation of moisture within the tank 1. Compared with the prior art, this solution, through its simple structural design, significantly improves the drying efficiency of the tank 1, reduces water residue, and enhances the drying effect.

[0067] In some embodiments of this utility model, such as Figure 1 , Figure 2 As shown, the air extraction assembly also includes a partition 72. Two partitions 72 are installed in the tank 1 and are located near the air outlet. The partition 72 has a plurality of channels (not shown in the figure) and the plurality of channels are evenly distributed on the partition 72.

[0068] Specifically, the baffle 72 effectively guides airflow, resulting in a more uniform airflow distribution within the tank 1. The evenly distributed channels on the baffle 72 ensure that excessively large local pressure differences are not generated when the airflow passes through it, thus preventing airflow instability. As a preferred embodiment, the baffle 72 can be made of metal to improve its durability and stability. Furthermore, the baffle 72's installation position close to the air outlet further optimizes the airflow path and reduces eddy currents within the tank 1.

[0069] Therefore, by adding the partition plate 72, this invention significantly improves the uniformity and stability of airflow within the tank 1. The evenly distributed channels on the partition plate 72 effectively reduce local pressure differences within the tank 1, thereby preventing airflow instability. Compared to existing technologies, this invention achieves optimized airflow distribution through a simple partition plate 72 design without adding additional complex structures, significantly improving drying efficiency and reducing water residue.

[0070] In some embodiments of this utility model, the tank 1 is provided with a first air supply hole (not shown) and a second air supply hole (not shown), the first air supply hole is connected to the first air inlet chamber 14, and the second air supply hole is connected to the second air inlet chamber 15.

[0071] The first and second air inlets are used to introduce dry gas into the first air inlet chamber 14 and the second air inlet chamber 15, respectively, thereby achieving a uniform distribution of the dry gas within the tank 1. Specifically, the positions of the first and second air inlets can be optimized according to the structure of the tank 1. For example, the first air inlet can be located at the top or side wall of the tank 1, while the second air inlet can be located at the bottom or another side wall of the tank 1, ensuring that the dry gas can cover the entire drying chamber 16. As a preferred embodiment, the diameters of the first air inlet 31 and the second air inlet 41 can be designed to gradually increase to enhance the uniformity and stability of the airflow.

[0072] Therefore, this invention achieves efficient delivery and uniform distribution of drying gas by respectively setting the first air inlet hole and the second air inlet hole at the first air inlet chamber 14 and the second air inlet chamber 15 of the tank body 1. Specifically, the setting of the first air inlet hole and the second air inlet hole allows the drying gas to directly enter the first air inlet chamber 14 and the second air inlet chamber 15 from the outside. Furthermore, by optimizing the position and diameter of the first air inlet hole and the second air inlet hole, the airflow stability within the tank body 1 can be effectively improved, thereby increasing drying efficiency and reducing water residue. Compared with the prior art, this invention significantly improves the drying effect of the tank body 1 without affecting production capacity, and solves the problems of uneven airflow and low drying efficiency in the prior art.

[0073] In some embodiments of this utility model, a gas delivery assembly (not shown in the figure) is also included, wherein the gas delivery assembly is connected to the first gas delivery hole to deliver dry gas to the first air inlet chamber 14, and the gas delivery assembly is connected to the second gas delivery hole to deliver dry gas to the second air inlet chamber 15.

[0074] With this design, the drying gas can enter the first air inlet chamber 14 and the second air inlet chamber 15 respectively, thereby achieving uniform drying of the silicon wafer 200 in the tank 1.

[0075] Specifically, such as Figure 1 , Figure 2 As shown, the gas delivery assembly may include multiple gas delivery pipes 82, which are respectively connected to the first gas delivery port and the second gas delivery port to ensure that the drying gas can efficiently enter the first air inlet chamber 14 and the second air inlet chamber 15. In a preferred embodiment, the gas delivery pipes 82 may be made of high-temperature resistant materials to meet the high-temperature environment requirements during the drying process. Furthermore, the diameter of the gas delivery pipes 82 can be optimized according to the size of the first and second gas delivery ports, improving the stability of gas flow rate and pressure.

[0076] Therefore, this technical solution, through the arrangement of the gas delivery component, solves the problems of uneven airflow and low drying efficiency in the prior art. By separately delivering the drying gas to the first air inlet chamber 14 and the second air inlet chamber 15, the uniformity and stability of the airflow within the tank 1 can be effectively improved, thereby increasing drying efficiency and reducing water residue. Compared with the prior art, this solution significantly improves the drying effect without affecting production capacity, and has high practical value.

[0077] The gas delivery assembly may further include a gas delivery component 81, such as... Figure 1 , Figure 2 As shown, the gas supply component 81 can be configured as a cylinder, air pump, or other structural component capable of supplying dry gas to the first air inlet chamber 14 and the second air inlet chamber 15 through the gas supply pipe 82. By configuring the gas supply component 81, the amount of dry gas input into the drying chamber 16 can be further controlled, thereby improving the uniformity of gas flow and the stability of the gas field, and thus improving the drying effect in the drying chamber 16.

[0078] It should be understood that the specific embodiments described above are merely illustrative or explanatory of the principles of this utility model and do not constitute a limitation thereof. Therefore, any modifications, equivalent substitutions, improvements, etc., made without departing from the spirit and scope of this utility model should be included within its protection scope. Furthermore, the appended claims are intended to cover all variations and modifications falling within the scope and boundaries of the appended claims, or equivalent forms of such scope and boundaries.

Claims

1. A drying tank device, characterized in that, include: The system comprises a tank, a mounting bracket, a first air inlet plate, and a second air inlet plate. The mounting bracket is installed on the inner wall of the tank. The first air inlet plate and the second air inlet plate are rotatably installed inside the tank and located on opposite sides of the mounting bracket. The interior of the tank is divided into a first air inlet chamber, a drying chamber, and a second air inlet chamber by the first air inlet plate and the second air inlet plate. The mounting bracket is located in the drying chamber and is used to support silicon wafers. Drying gases from the first air inlet chamber and the second air inlet chamber are introduced into the drying chamber through the first air inlet plate and the second air inlet plate to dry the silicon wafers.

2. The drying tank apparatus according to claim 1, characterized in that, The first air intake plate is provided with a plurality of first air intake holes, which are evenly distributed on the first air intake plate; the second air intake plate is provided with a plurality of second air intake holes, which are evenly distributed on the second air intake plate. The diameters of the first air intake holes and the second air intake holes increase along a first direction, and the direction of increasing diameters of the first air intake holes and the second air intake holes is directly facing the inside of the groove.

3. The drying tank apparatus according to claim 1, characterized in that, The tank has an opening, and the tank also includes a cover plate, which is installed at the opening to enable the opening to be opened and closed.

4. The drying tank apparatus according to claim 3, characterized in that, The first air intake plate is mounted on the cover plate and rotates on the cover plate, and the second air intake plate is mounted on the bottom wall of the tank and rotates on the bottom wall.

5. The drying tank apparatus according to claim 4, characterized in that, It also includes a first rotating component, a first power component, a second rotating component, and a second power component. The first rotating component is disposed between the first air intake plate and the cover plate and connects the first air intake plate and the cover plate. The first power component is electrically connected to the rotating component and drives the first rotating component to rotate. The first rotating component drives the first air intake plate to rotate. The second rotating component is disposed between the second air intake plate and the bottom wall and connects the second air intake plate and the bottom wall. The second power component is electrically connected to the rotating component and drives the second rotating component to rotate. The second rotating component drives the second air intake plate to rotate.

6. The drying tank apparatus according to claim 4, characterized in that, It also includes a third rotating component and a driving component. The third rotating component is rotatably mounted on the bottom wall along a first direction. The second air intake plate passes through the third rotating component and rotates with the third rotating component. The first air intake plate is detachably mounted on the third rotating component. The third rotating component drives the third rotating component to rotate on the cover plate. The driving component is electrically connected to the third rotating component and drives the third rotating component to rotate.

7. The drying tank apparatus according to claim 1, characterized in that, It also includes an air extraction assembly, which includes an air extraction component. The tank body is provided with an air outlet, which is located on two side walls of the tank body along the second direction. The two air extraction components are respectively connected to the two air outlets.

8. The drying tank apparatus according to claim 7, characterized in that, The air extraction assembly also includes baffles, two of which are installed in the tank and located near the air outlet. The baffles are provided with multiple channels, which are evenly distributed on the baffles.

9. The drying tank apparatus according to claim 1, characterized in that, The tank is provided with a first air inlet and a second air inlet, the first air inlet being connected to the first air inlet chamber and the second air inlet being connected to the second air inlet chamber.

10. The drying tank apparatus according to claim 9, characterized in that, It also includes a gas delivery component, which connects to the first gas delivery port to deliver dry gas to the first air intake chamber, and connects to the second gas delivery port to deliver dry gas to the second air intake chamber.

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