Area array light splitting interferometer with optical imaging navigation function

Abstract

The utility model discloses an area array light splitting interferometer with optical imaging navigation. The area array light splitting interferometer is characterized by comprising an area array type spot scanning light splitting interference module, an optical imaging module and a light path conversion module, the area array type spot scanning light splitting interference module, the optical imaging module and the optical path conversion module are assembled in the same structure; the center of a scanning range or an actual scanning range of the area array light splitting interferometer is within an optical imaging view field; the optical path conversion module can realize optical path switching between the area-array spot-scanning light-splitting interference module and the optical imaging module, and the area-array spot-scanning light-splitting interference module and the optical imaging module are enabled to perform optical path switching under the condition that the positions of the area-array spot-scanning light-splitting interference module and the optical imaging module are kept unchanged through the change of the position of a reflector in the optical path conversion module. And high-precision 3D point cloud acquisition and optical image acquisition can be respectively carried out on the same position of the sample.

Description

Technical Field

[0001] This utility model relates to the field of optoelectronic nondestructive testing, and in particular to a planar array beam splitter interferometer with optical imaging navigation. Background Technology

[0002] An interferometer is an instrument that uses the interference phenomenon of light for precision measurement. Its core principle is to split a beam of light into two or more coherent beams, propagate them along different paths, and then recombine them to form interference fringes. Information about the measured object is obtained by analyzing the changes in these fringes. Interferometers have sub-nanometer resolution, enabling non-contact, ultra-high precision measurements that avoid sample damage, as well as multi-parameter measurements: they can simultaneously acquire information such as morphology, refractive index, and stress. It has been widely used in scientific research and production and is a mature technology. In high-precision micro-area three-dimensional morphology measurement applications, white light interferometry microscopes and area array interferometric point scanning interferometers are generally used, as follows:

[0003] White light interferometry (also known as optical profilometry or coherent scanning interferometry) is a high-precision surface topography measurement technique based on the principle of low-coherence interference. Its core feature is the utilization of the short coherence characteristics of white light (a broadband light source) (the interference signal is strongest when the optical path difference is zero). Combined with the lifting and lowering of the microscope and piezoelectric displacement platform, it achieves non-contact three-dimensional topography measurement with nanometer-level vertical resolution. It can perform detection across the entire field of view of the microscope. Beyond the microscope's field of view, a high-precision platform is required, and the experimental environment (vibration, temperature, humidity, etc.) has high requirements.

[0004] Area-array point-scanning interferometer: Based on white light interferometry, this technology uses a spectral splitting method to divide white light into different wavelengths, which are then introduced into a high-precision spectrometer. The distance from the reference point to the sample surface is determined by analyzing the spectral signal. An XY galvanometer is built into the optical path, enabling the single-point interference optical path to scan a large area of ​​the sample morphology. Compared with traditional white light interferometry microscopy, it does not require scanning in the depth of field direction (piezoelectric displacement). Through calibration technology, it ensures the measurement accuracy at the nanometer level, and its measurement area and measurement speed are greatly improved. Because it does not require an external platform and has low requirements for the experimental environment (vibration, temperature, humidity, etc.), this type of interferometer has excellent adaptability and can be applied to a variety of occasions, greatly expanding the application of interferometers. The specification of Chinese invention patent (CN 112325765A) discloses that based on the principle of spectroscopic white light interference, combined with a spectrometer, telecentric lens, XY scanning galvanometer, etc., and combined with scanning software, it realizes high-speed large-area scanning of the sample surface by single-point interference, thereby obtaining a large-area precise three-dimensional contour of the sample surface in a very short time. It has the characteristics of high precision, large range, fast speed, and strong anti-interference ability.

[0005] However, the above invention has shortcomings: First, the point cloud data obtained after scanning in the XYZ directions represents three-dimensional contour data, lacking the true color and grayscale data of the sample surface. This makes it impossible to meet requirements that require qualitative judgment based on color and grayscale. Second, the invention includes a red light indicator point (scanning range center indicator point) emitted along the objective lens optical axis to locate the scanning area. For samples with red or near-red surfaces, the red light indicator point is obscured by the red surface, making it impossible to determine the specific scanning location. This results in the scanned area not being the actual area of ​​interest. Designing the indicator point in other colors also faces similar problems.

[0006] To address the aforementioned issues, a coaxial imaging technology combining optical imaging and the objective lens of a beam splitter interferometer was developed. This technology enables real-time optical navigation of the beam splitter interferometer using optical images, allowing for rapid target location. Furthermore, it allows for the acquisition of both optical images and interferometric scanning 3D images of the same location, achieving a unified qualitative and quantitative assessment, which is of practical significance. Utility Model Content

[0007] The purpose of this invention is to address the aforementioned shortcomings by providing a planar array interferometer with optical imaging navigation. This interferometer performs optical navigation, imaging, 3D modeling, and 3D measurement of the surface of the material under test, achieving high-precision 3D quantitative detection while simultaneously enabling qualitative judgment of the material's appearance through color and grayscale analysis. This facilitates researchers and testing personnel in quickly observing the micro / nano structure, minute defects, and analyzing color composition of samples, achieving a unified approach to quantitative and qualitative analysis of micro-area detection.

[0008] This utility model is achieved through the following solution:

[0009] An area array beam splitter interferometer with optical imaging navigation includes at least an area array point scanning beam splitter interferometer module, an optical imaging module, and an optical path conversion module. The area array point scanning beam splitter interferometer module, the optical imaging module, and the optical path conversion module are assembled in the same structure with fixed relative positions. The optical axis of the lens of the optical imaging module is aligned with or parallel to the optical axis of the objective lens of the area array point scanning beam splitter interferometer module. Even when the optical axes are not aligned or parallel, clear optical imaging is ensured, and the center of the scanning range or the actual scanning range of the area array beam splitter interferometer is within the optical imaging field of view. The optical path conversion module can switch between the optical paths of the area array point scanning beam splitter interferometer module and the optical imaging module. By changing the position of the reflector, the area array point scanning beam splitter interferometer module and the optical imaging module can perform high-precision 3D point cloud acquisition and optical image acquisition of the same position of the sample while maintaining their positions. It can also achieve independent operation of the area array point scanning spectroscopic interferometry module and the optical imaging module; the instrument is equipped with an LED light source for illumination, which can provide the necessary illumination for optical imaging. The instrument is equipped with necessary support mechanisms and fine adjustment structures for adjusting the spatial position of the instrument and the sample. The system is designed with handles and contact working devices to meet the requirements of stable on-site testing outside the laboratory.

[0010] Specifically, this patent provides a planar array beam splitter interferometer with optical imaging navigation, including a planar array point scanning beam splitter interferometer module, an optical imaging module, an optical path conversion module, an illumination device, a support frame, and a liftable contact observation device. The planar array point scanning beam splitter interferometer module includes a planar array beam splitter interferometer and an interference signal generator and receiver processor, which are connected by an optical fiber and a signal line. The interference signal generator and receiver processor is connected to a data processing unit (computer). The optical imaging module includes an industrial camera and an imaging lens, which are fixedly connected by a mechanical structure. The industrial camera is connected to the computer. The optical path conversion module includes a first reflector and a second reflector, as well as necessary connecting blocks and sliding mechanisms. The system comprises a first reflecting mirror connected to the front end of the imaging lens of an optical imaging module via a connecting block, and a second reflecting mirror connected to the front end of the objective lens of a planar array point-scanning beam-splitting interferometer module via a sliding mechanism and a connecting block. The second reflecting mirror can be moved or flipped. The illumination device, mounted on the connecting block of the second reflecting mirror, is used for illuminating the optical imaging. The support frame, including a base, support column, lifting mechanism, and connecting plate, ensures that the planar array point-scanning beam-splitting interferometer module, the optical imaging module, and the optical path conversion module are in fixed positions and can operate stably. The support frame can adjust the height between itself and the sample. The liftable contact observation device, connected to the front end of the connecting block of the second reflecting mirror, is used to adjust the height during on-site operation.

[0011] As a preferred technical solution: the optical axis of the imaging lens included in the optical imaging module is parallel to the optical axis of the objective lens of the area array beam splitter interferometer. The optical axis of the imaging lens included in the optical imaging module passes through a first reflecting mirror and a second reflecting mirror. The mirror surfaces of the first reflecting mirror and the second reflecting mirror are parallel. Through two reflections, it is ensured that the optical axis of the imaging lens after two reflections coincides with or is parallel to the optical axis of the objective lens of the area array beam splitter interferometer.

[0012] Furthermore, the optical axis of the imaging lens included in the optical imaging module is not parallel to the optical axis of the objective lens of the area array beam splitter interferometer. By reflecting through at least one or more mirrors, the direction of the optical axis of the imaging lens is changed to ensure that the center of the scanning range or the actual scanning range of the area array beam splitter interferometer is within the orientation of the optical imaging field of view.

[0013] Furthermore, the mirror surfaces of the first and second mirrors are not parallel, and the angle range between the mirror surfaces of the first and second mirrors is sufficient to achieve clear optical imaging. The center of the scanning range of the area array interferometer or the actual scanning range is within the orientation of the optical imaging field of view.

[0014] Furthermore, the optical axis of the imaging lens included in the optical imaging module is perpendicular to the optical axis of the objective lens of the area array beam splitter interferometer. The optical axis of the imaging lens included in the optical imaging module undergoes a first reflection through the second reflecting mirror, ensuring that the optical axis of the imaging lens after the first reflection coincides with or is parallel to the optical axis of the objective lens of the area array beam splitter interferometer.

[0015] Furthermore, the optical axis of the imaging lens included in the optical imaging module is not perpendicular to the optical axis of the objective lens of the area array beam splitter interferometer. The optical axis of the imaging lens included in the optical imaging module is reflected once by the second reflecting mirror. The angle range between the two is sufficient to achieve clear optical imaging. The center of the scanning range of the area array beam splitter interferometer or the actual scanning range is within the orientation of the optical imaging field of view.

[0016] As a preferred technical solution, the second reflecting mirror connected to the objective lens end of the interferometer can be moved or flipped to ensure that when the area array beam interferometer is working, there are no objects obstructing the interferometer lens and the sample to be tested, and there is no reflection from any intermediate mirror, thus enabling independent operation.

[0017] Furthermore, the second reflector connected to the end of the interferometer's lens can be moved or flipped to ensure that the center of the optical image is aligned with the scanning center of the interferometer.

[0018] Furthermore, the second reflecting mirror connected to the end of the interferometer's lens can be moved or flipped to ensure that the center of the scanning range or the actual scanning range of the area array beam splitter is within the optical imaging field of view.

[0019] Furthermore, the optical path conversion module is equipped with a limiting device to ensure that the second reflector reaches the precise position when it is moved into or removed from the optical path, so as to guarantee the effect of optical imaging and interferometric scanning.

[0020] As a preferred technical solution, the first reflecting mirror and the reflecting mirror connecting component connected to the optical lens contained in the optical imaging module can be separated from the lens so that when the optical imaging module is working, there is no object obstructing the lens and the sample to be tested, and there is no intermediate mirror reflection, so that it can work independently.

[0021] As a preferred technical solution: when the optical axis of the imaging lens included in the optical imaging module is parallel to the optical axis of the objective lens of the area array beam splitter interferometer, the first reflecting mirror connected to the optical lens of the optical imaging module forms an angle with the optical axis of the imaging lens of the optical imaging module. The angle is expressed as an acute angle, with 45° being optimal, and its angle variation range is between 30° and 60°. The reflecting mirror surface connected to the imaging lens of the optical imaging module is parallel to the reflecting mirror surface connected to the objective lens of the interferometer.

[0022] Furthermore, when the reflecting mirror 1 connected to the imaging lens of the optical imaging module is not parallel to the reflecting mirror 2 connected to the interferometer objective lens, the angle variation range of the two reflecting mirrors shall meet the requirements of clear optical imaging, with the center of the scanning range of the area array beam splitter interferometer or the actual scanning range within the orientation of the optical imaging field of view.

[0023] As a preferred technical solution: when the optical axis of the imaging lens included in the optical imaging module is perpendicular to the optical axis of the objective lens of the area array beam splitter interferometer, the imaging lens is installed horizontally. The optical axis of the optical lens of the optical imaging module forms an angle with the second reflecting mirror connected to the objective lens end of the interferometer. The angle is expressed as an acute angle, with 45° being optimal. The angle is variable, and the range of angle variation is to meet the requirements of clear optical imaging. The center of the scanning range of the area array beam splitter interferometer or the actual scanning range is within the orientation of the optical imaging field of view.

[0024] Furthermore, the imaging lens is not horizontally mounted. The optical axis of the optical lens of the optical imaging module forms an angle with the second reflecting mirror connected to the objective lens of the interferometer. The angle is variable, and the range of angle variation is to meet the requirements of clear optical imaging. The center of the scanning range of the area array beam splitter interferometer or the actual scanning range is within the orientation of the optical imaging field of view.

[0025] As a preferred technical solution, the optical imaging module can be installed separately from the area array beam splitter interferometer module, or the optical imaging module can be directly integrated into the area array beam splitter interferometer module housing to further reduce its size and enhance its portability.

[0026] As a preferred technical solution, a second reflecting mirror connected to the objective lens of the area array beam interferometer is connected to the lens via a reflecting mirror connecting block. The reflecting mirror connecting block is equipped with a liftable contact observation device, which can be quickly installed and disassembled to adapt to different testing environments in the laboratory and on-site. This device enables contact measurement between the area array beam interferometer and the object, increasing the stability of on-site operation.

[0027] As a preferred technical solution, the housing of the area array beam splitter interferometer module or the housing of the whole machine is equipped with a quick-release plate, which can be quickly installed on a general laboratory bracket and a general portable tripod bracket to realize the function of portable and stable testing in the laboratory and on the field.

[0028] In summary, due to the adoption of the above technical solution, the beneficial effects of this utility model are:

[0029] 1. This solution supports optical image navigation inspection, which can quickly locate the target area.

[0030] 2. This solution can simultaneously acquire optical image data and interference 3D image data, achieving a unity of qualitative and quantitative analysis.

[0031] 3. This solution supports both portable and contact-based detection, and has broad applicability. Attached Figure Description

[0032] Figure 1 A schematic diagram of the overall system and modules (dual optical axes parallel);

[0033] Figure 2 A schematic diagram showing an optical imaging module integrated into a beam splitter interferometer module;

[0034] Figure 3 This is a vertical image of the dual optical axes;

[0035] Figure 4 This is a schematic diagram of the reflector angle change in Example 3;

[0036] Figure 5 This is a system component diagram for Example 1;

[0037] Figure 6 This is a schematic diagram of the area array point scanning beam interferometer in Example 1;

[0038] Figure 7 This is a schematic diagram of the slide mechanism in Example 1;

[0039] Figure 8 This is a schematic diagram of the support mechanism in Example 1;

[0040] Figure Descriptions: 001. Area array point scanning beam splitting interferometer module; 002. Optical imaging module; 003. Optical path conversion module; 1. Industrial camera; 2. Imaging lens; 3. Optical imaging optical axis; 4. First reflecting mirror connecting block; 5. First reflecting mirror; 6. First reflecting optical axis; 7. Beam splitting interferometer module optical axis; 8. Area array point scanning beam splitting interferometer; 9. Interference signal generator and receiver processor; 10. Data processing unit; 11. Beam splitting interferometer objective lens; 12. Second reflecting mirror connecting block; 13. Second reflecting mirror; 14. Second reflecting optical axis; 15. Illumination source; 16. Beam splitting interferometer objective lens connecting ring; 17. Sliding mechanism; 18. Liftable contact observation device; 19. Support mechanism; 20. Base; 21. Support column; 22. General lifting mechanism. Detailed Implementation

[0041] All features disclosed in this specification, or all steps in all disclosed methods or processes, may be combined in any way, except for mutually exclusive features and / or steps.

[0042] Any feature disclosed in this specification (including any appended claims and abstract) may be replaced by other equivalent or similar features, unless specifically stated otherwise. That is, unless specifically stated otherwise, each feature is merely one example of a series of equivalent or similar features.

[0043] In the description of this utility model, it should be understood that the terms "upper", "lower", "left", "right", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or component referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0044] Furthermore, the terms "first," "second," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined with "first," "second," etc., may explicitly or implicitly include one or more of that feature.

[0045] Example 1

[0046] like Figure 5 As shown, this utility model provides a technical solution: the optical imaging optical axis 3 of the optical imaging module is parallel to the optical axis 7 of the beam splitting interferometer 8 of the array scanning beam splitting interferometer.

[0047] An area array beam splitter interferometer with optical imaging navigation includes, but is not limited to, an area array point scanning beam splitter interferometer module 001, an optical imaging module 002, and an optical path conversion module 003. The area array point scanning beam splitter interferometer module 001, optical imaging module 002, and optical path conversion module 003 are mounted on a fixed support mechanism 19. The area array point scanning beam splitter interferometer module 001 includes an area array beam splitter interferometer and an interference signal generator / receiver processor 9, which are connected via optical fiber and signal lines. The interference signal generator / receiver processor 9 is connected to a data processing unit 10. The optical imaging module 002 includes an industrial camera 1 and an imaging lens 2, which are fixedly connected by threads. The industrial camera 1 is connected to the data processing unit 10. The optical path conversion module 003 includes a first reflector 5, a second reflector 13, and necessary connecting devices. The first reflecting mirror is mounted on the first reflecting mirror connecting block 4, which is connected to the front end of the imaging lens 2 of the optical imaging module 002. The second reflecting mirror is mounted on the second reflecting mirror connecting block 12, which is connected to the sliding mechanism 17 and can slide within the sliding groove. The sliding mechanism 17 is fixedly connected to the beam splitter objective lens connecting ring 16 of the beam splitter objective lens 11, and the beam splitter objective lens connecting ring is connected to the beam splitter objective lens 11. The optical reflecting mirror can slide to change the optical path. An illumination source 15 is mounted on the second reflecting mirror connecting block 12, which is connected to the liftable contact observation device 18.

[0048] Based on the above structure, optical imaging and D-contour imaging after interference can be achieved on the same area of ​​the sample surface without changing the positions of the optical imaging module 002 and the area array point scanning beam splitting interferometer module 001. This allows for the acquisition of sample surface details, color information, grayscale information, and D-point cloud data.

[0049] As an example, the optical axis of the imaging lens 2 included in the optical imaging module 002 is parallel to the optical axis of the objective lens of the area array beam splitter interferometer, the first reflected optical axis 6 is in a horizontal state, the second reflected optical axis 14 is in a vertical state, and the first reflecting mirror 5 is parallel to the reflecting mirror.

[0050] As an example, the lighting device is used for optical imaging illumination and is installed in the inner ring of the second reflector connecting block 12. It has a good light-shielding effect and can prevent excess light from entering the operator's eyes, thus playing a role in labor protection. In this example, the domestically produced OPT-LED520 LED ring light source is used, which has the characteristics of high brightness and low heat generation.

[0051] As an example, the support mechanism includes a base 20, a support column 21, a universal lifting mechanism 22, and a connecting device to ensure that the area array point scanning beam splitting interference module 001, the optical imaging module 002, and the optical path conversion module 003 are in fixed positions, and the whole structure is adjustable up and down and can be stably anti-shake. Since no additional electric displacement mechanism is required, a universal bracket can be used. In this example, the domestic Sanying Precision Control universal vision bracket SY-XW500 is used, which has a good supporting effect on the module.

[0052] As an example, the liftable contact observation device 18 is connected to the front end of the second reflector connecting block to adjust the working distance for observation when in contact.

[0053] Specifically, the height-adjustable contact observation device 18 is designed as a two-section hollow cylindrical structure connected by threads. When observing a sample in contact, rotating the bottom cylinder causes it to rise or fall axially due to the threaded engagement, thus adjusting the height. During rotation, the optimal working distance can be determined by the strength of the interference signal in the data processing unit 10. Contact observation devices for height adjustment can take many forms and belong to general mechanical technology, which is not the focus of this patent and will not be discussed further here.

[0054] As an example, the area array dot scanning beam splitter interferometer 8 and the interference signal generator and receiver processor 9 adopt high-speed area array beam splitter interferometer technology. In this example, the PZ-WLI-2500 interferometer module independently developed by Beijing Pinzhi Chuangsi Instrument Co., Ltd. has the characteristics of the area array beam splitter interferometer 7 and the interference signal generator and receiver processor 98 being separated, the optical part being small in size, having a large range, high precision, and strong anti-interference ability.

[0055] As an example, industrial camera 1 uses CMOS or CCD chip technology (in this example, industrial camera 1 from Hangzhou Tupu Co., Ltd. is used, and its image sensor is the GLUX1605BSI CMOS chip from Changguang Chenxin Co., Ltd.), which can obtain excellent images and facilitate subsequent analysis and processing.

[0056] As an example, imaging lens 2 is either a telecentric lens or a general imaging lens 2. In this example, the GHO-2010 telecentric lens from Tianjin Guanghu Optical Technology Co., Ltd. is used, which has the characteristics of small image distortion and sharp imaging.

[0057] As an example, the slide in the slide mechanism 17 is equipped with a position limiting device. The sliding arm of the second reflector connecting block 12 can slide freely in the slide mechanism 17, thereby driving the second reflector to slide freely and stop at a designated position to ensure that the second reflector reaches the designated position and remains stable, thereby realizing unobstructed observation of the same position by the area array point scanning beam splitting interferometer module 001 and the optical imaging module 002.

[0058] As an example, one end of the second reflector connecting block 12 is equipped with a push-pull rod for pushing and pulling the second reflector connecting block 12, which can realize manual translation switching. Furthermore, an electric push-pull device can be installed to realize the rapid and accurate movement of the second reflector connecting block 12 to meet the requirements of high-speed automated detection.

[0059] Furthermore, the relationship between the sliding mechanism 17 and the second reflector connecting block 12 can be designed as a flip-type structure. That is, the second reflector rotates around a certain point to realize the entry into the optical imaging module 002 or to remove the scanning range of the area array point scanning beam splitting interferometer module 001. This type of technology belongs to general mechanical junction technology and is not the focus of this patent. Therefore, it will not be discussed further here.

[0060] The main working process of the area array beam splitter interferometer with optical imaging navigation described above is as follows:

[0061] 1. Pull the push-pull rod of the second reflector connecting block 12 to ensure that the second reflector is moved to the designated position for the optical imaging module 002 to operate.

[0062] 2. On the screen of the data processing unit 10, observe the real-time image generated by the optical imaging module 002, adjust the sample, and move the observation part to the optical imaging field of view.

[0063] 3. Adjust the universal lifting mechanism or the liftable contact observation device 18 to stop and lock at the position where the optical image is clearest.

[0064] 4. Save optical images or perform planar measurements and analysis of real-time optical images.

[0065] 5. Move the push-pull rod of the second reflector connecting block 12 to ensure that the second reflector and related components are moved outside the scanning range of the area array beam interferometer.

[0066] 6. Finely adjust the general lifting mechanism or the liftable contact observation device 18, and observe the intensity of the interference signal on the screen of the data processing unit 10 through software. Stop and lock when the signal is strongest.

[0067] The 7-area beam splitter interferometer begins high-speed acquisition, scanning the same area observed by optical imaging to obtain high-resolution XYZ point cloud data.

[0068] Analysis, 3D measurement and storage of 8XYZ point cloud data.

[0069] Example 2

[0070] like Figure 3As shown, this patent provides a technical solution: the optical axis of the lens included in the optical imaging module 002 is perpendicular to the optical axis of the objective lens of the area array beam splitter interferometer.

[0071] Compared with Embodiment 1, the structure in this example eliminates the first reflecting mirror and the first reflecting mirror connecting block 4. The imaging lens 2 and the industrial camera 11 are placed horizontally and are perpendicular to the optical axis of the light output lens of the area array beam splitter interferometer. In this way, the optical axis of the lens included in the optical imaging module 002 is reflected once by the second reflecting mirror, and the reflected optical axis is coincident with the optical axis of the objective lens of the area array beam splitter interferometer. The rest of the structure is similar to Embodiment 1, and its working process is also similar.

[0072] Example 3

[0073] like Figure 4 As shown, compared with Embodiment 1, in this example, the angle between the reflecting surface of the first reflecting mirror 5 mounted on the first reflecting mirror connecting block and the optical axis of the imaging lens 2 is not equal to 45°. In this case, the optical axis of the imaging lens 2 included in the optical imaging module 002 is parallel to the optical axis of the objective lens of the area array beam splitter interferometer, the first reflecting optical axis 6 is in a non-horizontal state, the second reflecting optical axis 14 is in a vertical state, the first reflecting mirror 5 and the second reflecting mirror remain parallel, and the rest of the structure is the same as in Embodiment 1, and its working process is also consistent.

[0074] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A beam splitter interferometer with optical imaging navigation, characterized in that: It includes a planar array point scanning beam splitter interferometer module, an optical imaging module, and an optical path conversion module; the planar array point scanning beam splitter interferometer module, the optical imaging module, and the optical path conversion module are assembled in the same structure; the center of the scanning range or the actual scanning range of the planar array beam splitter interferometer is within the optical imaging field of view. The optical path conversion module enables the switching of optical paths between the area array point scanning beam splitting interferometry module and the optical imaging module. By changing the position of the reflector in the optical path conversion module, the area array point scanning beam splitting interferometry module and the optical imaging module can perform high-precision 3D point cloud acquisition and optical image acquisition on the same position of the sample while keeping their positions unchanged.

2. The area array beam splitter interferometer with optical imaging navigation as described in claim 1, characterized in that: The optical axis of the imaging lens included in the optical imaging module is parallel or perpendicular to the optical axis of the objective lens of the area array beam splitter interferometer.

3. The area array beam splitter interferometer with optical imaging navigation as described in claim 1, characterized in that: When the optical axis of the imaging lens included in the optical imaging module is not parallel or perpendicular to the optical axis of the objective lens of the area array beam splitter interferometer, the direction of the optical axis of the imaging lens is changed by reflection from at least one or more mirrors, ensuring that the center of the scanning range or the actual scanning range of the area array beam splitter interferometer is within the optical imaging field of view.

4. The area array beam splitter interferometer with optical imaging navigation as described in claim 1, characterized in that: The second mirror, which is connected to the end of the lens of the area array point scanning beam interferometer, can be moved or flipped to ensure that there are no objects obstructing the lens of the area array point scanning beam interferometer and the sample to be tested when the area array beam interferometer is working. The first reflecting mirror and the reflecting mirror connecting component connected to the optical lens of the optical imaging module can be separated from the lens. After separation, the optical imaging module can work independently, with no object obstructing the lens and the sample to be tested, and no reflection from any reflecting mirror.

5. A beam splitter interferometer with optical imaging navigation as described in claim 2, characterized in that: When the optical imaging optical axis of the optical imaging module is parallel to the optical axis of the beam splitting interferometer of the array point scanning beam splitting interferometer, the first reflecting mirror connected to the optical lens of the optical imaging module forms an angle with the optical axis of the optical lens of the optical imaging module. The angle varies between 30° and 60°. The mirror surface of the first reflecting mirror connected to the imaging lens of the optical imaging module is parallel to the mirror surface of the second reflecting mirror connected to the objective lens of the interferometer.

6. A beam splitter interferometer with optical imaging navigation as described in claim 2, characterized in that: When the optical imaging optical axis of the optical imaging module is perpendicular to the optical axis of the beam splitting interferometer of the array point scanning beam splitting interferometer, the optical axis of the optical lens of the optical imaging module forms an angle with the second reflecting mirror connected to the objective lens end of the array point scanning beam splitting interferometer, and the angle is an acute angle.

7. A planar array beam splitter interferometer with optical imaging navigation as described in claim 1, characterized in that: The optical imaging module is installed separately from the area array beam splitter interferometer module, or the optical imaging module is directly integrated into the area array beam splitter interferometer module housing.

8. A beam splitter interferometer with optical imaging navigation as described in claim 1, characterized in that: The second reflecting mirror, which is connected to the objective lens of the area array point scanning beam interferometer, is connected to the lens via a reflecting mirror connecting block. A lifting contact observation device is installed on the second reflecting mirror connecting block.

9. A beam splitter interferometer with optical imaging navigation as described in claim 1, characterized in that: The housing or the main housing of the area array point scanning spectrometer is equipped with a quick-release plate.

Images