Moving-in and moving-out device of photoetching machine

Abstract

The utility model discloses a moving-in and moving-out device for a photoetching machine. The moving-in and moving-out device comprises a base; the air cushion assembly comprises an air cushion sleeve, a circular groove is formed in the bottom surface of the air cushion sleeve, and the air cushion sleeve is fixedly arranged on the bottom surface of the base; the air cushion core is arranged in the circular groove of the air cushion sleeve, a plurality of air tap openings are formed in the bottom surface of the air cushion core, an air channel is formed in the air cushion core, and the air tap openings are all communicated with the air channel; a closed space between the air cushion sleeve and the air cushion core is filled with high-pressure air, the length of the air cushion core extending downwards out of the air cushion sleeve can be adjusted by adjusting the air pressure of the high-pressure air, the air channel is filled with the high-pressure air and is sprayed out of the air nozzle, and the base and a workpiece table on the base are suspended through generated reverse impact force. And the directional trundles are arranged at the bottom of the base. According to the device, the heavy workpiece table of the photoetching machine can be conveniently, quickly and stably moved in and out, the accuracy of the position during repeated moving-in and moving-out can be ensured, and parts of the photoetching machine can be conveniently replaced.

Description

Technical Field

[0001] This utility model relates to the field of precision heavy-duty equipment. More specifically, this utility model relates to a transfer-in and transfer-out device for a lithography machine. Background Technology

[0002] A lithography machine, also known as a mask alignment exposure machine, exposure system, or photolithography system, is a core piece of equipment in chip manufacturing. It uses a technique similar to photo printing to transfer the fine pattern on a photomask onto a silicon wafer through light exposure.

[0003] In practice, lithography machines require the replacement of photomasks and other equipment components. As highly integrated, ultra-precision equipment, lithography machines have very limited space for component replacement, and the precision requirements are extremely high. Replacement operations are difficult and prone to damage due to component impacts. To better protect the equipment, one method is to move the workpiece stage, thus providing sufficient space for replacement operations. However, workpiece stages, such as the wafer carrier disclosed in patent CN116387234 A, are typically very heavy, weighing several tons. Furthermore, due to the special environmental and precision requirements of the workpiece stage, conventional handling mechanisms cannot be used. Patent CN101609263A discloses a lithography machine silicon wafer stage moving device and a lithography machine using this device, which includes an airbag and an air cushion device. The working process is as follows: when moving the silicon wafer stage, the air cushion device, leaf springs, and rollers work together to form an air cushion that supports the support plate and the silicon wafer stage, thus moving the silicon wafer stage. After the silicon wafer stage is moved into the support frame, the first and second sets of airbags are inflated to raise the height of the silicon wafer stage until the positioning pins and positioning holes of the support frame are properly positioned, at which point the air cushion device stops working. The lithography machine workpiece stage moving and adjusting device and method disclosed in CN101510056A discloses an air-floating unit, which includes an upper airbag cover, an airbag, a lower airbag cover, a guide structure, and an air-floating pad. The working process is as follows: when moving the workpiece stage, the air-floating pad of the air-floating unit is inflated; when it moves to the mounting frame, the airbag of the air-floating unit is inflated and expanded, raising the workpiece stage to a predetermined height; when moving the workpiece stage out, the airbag is inflated, the air-floating unit contacts the ground, separating the workpiece stage from the frame, then the airbag is deflated, the air-floating unit returns to its original position, and the workpiece stage is moved out of the frame using a drive unit. In patents CN101609263A and CN101510056A, the function of the airbag is to inflate the airbag after the silicon wafer stage or workpiece stage is located in the mounting frame or support frame to adjust the height of the workpiece stage or silicon wafer stage, thereby fixing them to the mounting frame or support frame. It cannot be fine-tuned or positioned. During the movement, only the air cushion device or air floatation pad is used, and it cannot play a role in buffering and shock absorption for the workpiece stage or silicon wafer stage. Utility Model Content

[0004] This invention provides a moving-in and moving-out device for a lithography machine, which can conveniently, quickly and stably move the heavy workpiece stage of the lithography machine in and out, and can ensure the accuracy of the position when moving in and out repeatedly, facilitating the replacement of parts of the lithography machine.

[0005] To achieve these objectives and other advantages of this invention, a transfer-in / transfer-out device for a lithography machine is provided, comprising:

[0006] A base, which is horizontally arranged, has an upper surface for placing the workpiece stage of the lithography machine;

[0007] At least one air cushion assembly, the air cushion assembly comprising:

[0008] An air cushion sleeve has a circular groove on its bottom surface, and the air cushion sleeve is fixedly mounted on the bottom surface of the base;

[0009] An air cushion core is disposed within a circular groove of the air cushion sleeve. Multiple air nozzles are located on the bottom surface of the air cushion core, and an air passage is formed inside the air cushion core. All air nozzles are connected to the air passage. High-pressure gas is filled into the enclosed space between the air cushion sleeve and the air cushion core. The length of the air cushion core extending downwards from the air cushion sleeve can be adjusted by regulating the pressure of the high-pressure gas. High-pressure gas is filled into the air passage and ejected from the air nozzles. The reverse impact force generated by the ejected high-pressure gas suspends the base and the workpiece platform above the base.

[0010] The directional casters are located at the bottom of the base, and the suspended base and the workpiece table are moved in a directional manner by the directional casters.

[0011] Preferably, the infeed and outfeed device for the lithography machine further includes support components, of which at least three are provided. The support components are fixedly disposed on the bottom surface of the base, specifically including:

[0012] The support base includes a horizontally arranged base plate and a vertically arranged column on the top surface of the base plate, wherein the cross-section of the upper end of the column is hexagonal.

[0013] A support adjustment sleeve is fitted onto the column, and the inner circumferential surface of the support adjustment sleeve is threadedly connected to the column.

[0014] The support foot is fitted onto the column, with its upper part positioned above the support adjustment sleeve. The lower inner circumferential surface of the support foot is threadedly connected to the outer circumferential surface of the support adjustment sleeve 440.

[0015] A support stop ring is provided, the inner ring surface of which is adapted to fit the upper end of the column. The support stop ring is fitted onto the upper end of the column and located above the support foot. The outer diameter of the support stop ring is smaller than the outer diameter of the support foot and larger than the inner diameter of the support foot. The support foot is fixedly connected to the support stop ring near its inner circumference and to the base near its outer circumference.

[0016] Rotating the support adjustment sleeve causes the support foot and the support stop ring to move up and down in the vertical direction, thereby supporting and leveling the workpiece table.

[0017] Preferably, in the aforementioned infeed and outfeed device for a lithography machine, the support assembly further includes a support locking sleeve, which is fitted onto the column and threadedly connected to the column, and the support locking sleeve is located below the support adjusting sleeve;

[0018] Multiple circular holes are provided on the outer circumferential surfaces of the support adjustment sleeve and the support locking sleeve, so that a tool can be inserted to rotate the support adjustment sleeve and the support locking sleeve.

[0019] Preferably, in the aforementioned infeed / outfeed device for a lithography machine, the air cushion assembly further includes:

[0020] An air cushion bottom cover, which is ring-shaped, is disposed below the air cushion sleeve and is fixedly connected to the air cushion sleeve. The outer diameter of the air cushion bottom cover is the same as the outer diameter of the air cushion sleeve, and the inner diameter of the air cushion bottom cover is smaller than the groove diameter of the circular groove of the air cushion sleeve.

[0021] The vertical cross-section of the air cushion core is T-shaped. The air cushion core includes a first air cushion core portion and a second air cushion core portion fixedly connected to the bottom of the first air cushion core portion. The diameter of the second air cushion core portion is smaller than the diameter of the first air cushion core portion. The diameter of the first air cushion core portion is the same as the diameter of the circular groove of the air cushion sleeve. The height of the first air cushion core portion is smaller than the depth of the circular groove of the air cushion sleeve. The diameter of the second air cushion core portion is the same as the inner diameter of the air cushion bottom cover. The sum of the heights of the first air cushion core portion and the second air cushion core portion is equal to the sum of the depth of the circular groove of the air cushion sleeve and the thickness of the air cushion bottom cover. The air passage is provided inside the second air cushion core portion, and the air nozzle is provided on the bottom surface of the second air cushion core portion.

[0022] Multiple elastic components are provided and are respectively disposed in the space between the air cushion core and the air cushion bottom cover. One end of each elastic component is connected to the air cushion bottom cover and the other end is connected to the edge of the first air cushion core.

[0023] An O-ring is disposed between the first air cushion core and the groove wall of the circular groove of the air cushion sleeve, thereby forming a closed space between the air cushion sleeve and the first air cushion core.

[0024] Preferably, in the aforementioned infeed / outfeed device for a lithography machine, the air cushion assembly further includes:

[0025] A cylindrical pin is disposed in the space between the air cushion core and the air cushion bottom cover. One end of the cylindrical pin is inserted into the first air cushion core and the other end is inserted into the air cushion bottom cover. It guides the air cushion core when it moves outward.

[0026] The first air pipe connector has a ventilation through hole on the circular groove wall of the air cushion sleeve. The first air pipe connector is located at the outer port of the ventilation through hole. High-pressure gas enters the closed space formed by the air cushion sleeve and the air cushion core through the first air pipe connector and the ventilation through hole.

[0027] The second air pipe connector has an opening on the bottom cover of the air cushion so that the second air pipe connector is placed on the second air cushion core and connected to the air passage in the second air cushion core.

[0028] Preferably, the infeed and outfeed device for the lithography machine further includes positioning components, of which multiple components are provided. Specifically, the positioning components include:

[0029] The positioning seat is L-shaped and includes a horizontal part and a vertical part connected to the horizontal part, wherein a spherical groove is carved out on the outer surface of the vertical part;

[0030] The positioning pad has one side that is flat and the other side that is a spherical surface that fits into the spherical groove. The positioning pad is disposed in the spherical groove.

[0031] A through hole is provided at the center of the positioning pad. The through hole extends into the inner side of the vertical part and penetrates the vertical part. The positioning seat is fixed to the side of the base through the through hole.

[0032] Preferably, the infeed and outfeed device for the lithography machine has two elongated slots on the horizontal part of the positioning seat to fix the positioning seat to the ground.

[0033] Preferably, in the photolithography machine's infeed and outfeed device, the outer circumferential surface of the support adjustment sleeve includes a first outer circumferential surface disposed on the upper part and a second outer circumferential surface disposed on the lower part. A thread is provided on the first outer circumferential surface, which is threadedly connected to the inner circumferential surface of the support foot. The diameter of the second outer circumferential surface is larger than the diameter of the first outer circumferential surface, and the circular hole is provided on the second outer circumferential surface.

[0034] Preferably, the infeed and outfeed device for the lithography machine includes three air cushion components; eight positioning components, two of which are located at each right angle position of the base; and four directional casters.

[0035] This invention offers at least the following advantages: An air cushion assembly is provided beneath the base. This assembly includes an air cushion sleeve and an air cushion core, with high-pressure gas filling the enclosed space between the sleeve and core. Adjusting the pressure of the high-pressure gas allows for adjustment of the length of the air cushion core extending downwards from the sleeve, enabling lifting and fine-tuning of the base and the workpiece platform on it. The high-pressure gas filling the enclosed space also provides cushioning and vibration damping for the base and workpiece platform. High-pressure gas is filled into the air passage and ejected from the nozzle. The reverse impact force generated by the ejected high-pressure gas suspends the base and the workpiece platform on it. Therefore, the air cushion assembly of this invention achieves equipment levitation through air flotation. After adjusting the lifting height of the equipment (base and workpiece platform), directional casters are used to move the suspended equipment in and out. These casters ensure linear movement during movement, improving positional accuracy.

[0036] Other advantages, objectives and features of this invention will be partly apparent from the following description, and partly understood by those skilled in the art through study and practice of this invention. Attached Figure Description

[0037] Figure 1 This is a bottom view of the infeed and outfeed device for a lithography machine according to an embodiment of the present invention.

[0038] Figure 2 This is a three-dimensional structural diagram of the infeed and outfeed device for a lithography machine as described in an embodiment of the present invention;

[0039] Figure 3 This is a side view of the infeed and outfeed device for a lithography machine as described in an embodiment of the present invention;

[0040] Figure 4 This is a three-dimensional structural diagram of the air cushion assembly in an embodiment of the present utility model;

[0041] Figure 5 This is a bottom view of the air cushion assembly in an embodiment of the present invention;

[0042] Figure 6 This is a cross-sectional structural diagram of the air cushion assembly in an embodiment of the present utility model;

[0043] Figure 7 This is a cross-sectional structural diagram of the air cushion assembly in an embodiment of the present utility model;

[0044] Figure 8 This is a side view of the air cushion assembly in an embodiment of the present invention.

[0045] Figure 9 This is a cross-sectional schematic diagram of the support component in an embodiment of this utility model;

[0046] Figure 10 This is a side view of the support component in an embodiment of the present utility model;

[0047] Figure 11 This is a top view of the support component in an embodiment of the present utility model;

[0048] Figure 12 This is a cross-sectional schematic diagram of the positioning component in an embodiment of the present utility model;

[0049] Figure 13 This is a three-dimensional schematic diagram of the positioning component in an embodiment of the present utility model;

[0050] Figure 14 This is a side view of the positioning component in an embodiment of the present utility model;

[0051] Figure 15 This is a top view of the positioning component in an embodiment of the present invention. Detailed Implementation

[0052] The present invention will now be described in further detail with reference to the accompanying drawings, so that those skilled in the art can implement it based on the description.

[0053] It should be understood that terms such as “having,” “comprising,” and “including” as used herein do not exclude the presence or addition of one or more other elements or combinations thereof.

[0054] It should be noted that, unless otherwise specified, the experimental methods described in the following embodiments are conventional methods, and the reagents and materials described are commercially available. In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "setting" should be interpreted broadly. For example, they can refer to fixed connection or setting, detachable connection or setting, or integral connection or setting. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances. The terms "lateral," "longitudinal," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description. They do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0055] like Figures 1-8 As shown, this utility model embodiment provides a transfer device for a lithography machine, comprising: a base 1, which is horizontally arranged, the upper surface of which is used to place the workpiece stage of the lithography machine; at least one air cushion assembly 2, the air cushion assembly 2 comprising: an air cushion sleeve 210, the bottom surface of which is provided with a circular groove, the air cushion sleeve 210 being fixedly disposed on the bottom surface of the base 1; an air cushion core 220, which is disposed in the circular groove of the air cushion sleeve 210, the bottom surface of the air cushion core 220 being provided with a plurality of air nozzles 221, and the interior of the air cushion core 220 being provided with an air passage 222, the plurality of air nozzles 221 being connected to the workpiece stage of the lithography machine; and at least one air cushion assembly 2, the air cushion assembly 2 comprising: an air cushion sleeve 210, the bottom surface of which is provided with a circular groove, the air cushion sleeve 210 being fixedly disposed on the bottom surface of the base 1; and an air cushion core 220, which is disposed within the circular groove of the air cushion sleeve 210, the bottom surface of which is provided with a plurality of air nozzles 221 being connected to the workpiece stage of the lithography machine. The air passage 222 is connected; high-pressure gas is filled in the closed space between the air cushion sleeve 210 and the air cushion core 220. The length of the air cushion core 220 extending downward from the air cushion sleeve 210 can be adjusted by adjusting the pressure of the high-pressure gas. High-pressure gas is filled in the air passage 222 and ejected from the air nozzle 221. The reverse impact force generated by the ejected high-pressure gas suspends the base 1 and the workpiece table on the base 1. The directional caster 3 is set at the bottom of the base 1 and the directional caster 3 is used to move the suspended base 1 and the workpiece table in a directional manner.

[0056] In the above embodiment, specifically, a long strip-shaped groove is provided at each of the two opposite edges of the base 1. This long strip-shaped groove serves as a process groove, facilitating the processing of the middle portion of the base 1. The base 1 is made of granite, providing a stable, high-rigidity, and high-precision foundation for the heavy workpiece table. The workpiece table used in this embodiment weighs several tons. Typically, the workpiece table is placed in the middle portion of the base 1. This embodiment includes an air cushion assembly 2 below the base 1. At least one air cushion assembly 2 is provided; preferably, three air cushion assemblies 2 are provided, forming an equilateral triangle on the bottom surface of the base 1. This embodiment also includes four directional casters 3 symmetrically arranged on the bottom surface of the base 1 to ensure stability when moving the base 1. The air cushion assembly 2 in this embodiment includes an air cushion sleeve 210 and an air cushion core 220, with high-pressure gas filling the enclosed space between the air cushion sleeve 210 and the air cushion core 220. The length of the air cushion core 220 extending downwards from the air cushion sleeve 210 can be adjusted by regulating the pressure of the high-pressure gas. This allows for lifting and fine-tuning of the height of the base 1 and the workpiece stage on the base 1. The high-pressure gas filling the enclosed space also provides cushioning and vibration reduction for the base 1 and the workpiece stage. High-pressure gas is filled into the air passage 222 and ejected from the air nozzle 221. The reverse impact force generated by the ejected high-pressure gas suspends the base 1 and the workpiece stage on the base 1. Therefore, the air cushion assembly 2 of this invention uses air buoyancy to achieve equipment levitation. After adjusting the lifting height of the equipment, i.e., the base 1 and the workpiece stage, the directional casters 3 are used to move the suspended equipment in and out in a directional manner. The directional casters 3 ensure the linear movement direction during movement, improving the positional accuracy during movement.

[0057] In one specific implementation, such as Figures 9-11 As shown, it also includes support components 4, of which at least three are provided. The support components 4 are fixedly disposed on the bottom surface of the base 1, specifically including:

[0058] The support base 410 includes a horizontally arranged base plate 411 and a vertically arranged column 412 on the top surface of the base plate 411. The upper end of the column 412 has a hexagonal cross-section.

[0059] A support adjustment sleeve 440 is fitted onto the column 412, with its upper part located above the support adjustment sleeve 440. The lower inner circumferential surface of the support foot 430 is threadedly connected to the outer circumferential surface of the support adjustment sleeve 440.

[0060] The support foot 430 is fitted onto the column 412 and located above the support adjustment sleeve 440, and the inner circumferential surface of the support foot 430 is threadedly connected to the outer circumferential surface of the support adjustment sleeve 440.

[0061] A support stop ring 420 is provided, the inner ring surface of which is adapted to fit the upper end of the column 412. The support stop ring 420 is fitted onto the upper end of the column 412 and is located above the support foot 430. The outer diameter of the support stop ring 420 is smaller than the outer diameter of the upper part of the support foot 430 and larger than the inner diameter of the upper part of the support foot 430. The support foot 430 is fixedly connected to the support stop ring 420 near its inner circumference by a third screw 421. The support foot 430 is fixedly connected to the base 1 near its outer circumference. A third fixing hole 431 is provided on the support foot 430 to fix the support foot to the base 1.

[0062] Rotating the support adjustment sleeve 440 causes the support foot 430 and the support stop ring 420 to move up and down in the vertical direction, thereby supporting and leveling the workpiece table.

[0063] In the above embodiment, the support component 4 not only supports the base 1 and the workpiece stage, but also allows for fine-tuning of the flatness of the upper surface of the base 1. The upper end of the column 412 of the support base 410 has a hexagonal cross-section, on which the support stop ring 420 is fitted. It cannot rotate, but can only move up and down. The middle and lower outer circumferential surfaces of the column 412 are threaded for easy connection with the support adjustment sleeve 440. Rotating the support adjustment sleeve 440 allows it to move up and down vertically. The support foot 430 is located below the support stop ring 420 and is fixedly connected to it. The lower inner circumferential surface of the support foot 430 is threadedly connected to the outer circumferential surface of the support adjustment sleeve 440. The advantage of this arrangement is that, since the support stop ring 420 and support foot 430 cannot rotate and can only move up and down, rotating the support adjustment sleeve 440 allows the support foot 430 and support stop ring 420 to move downwards or upwards. By adjusting the three support components 4, the flatness of the upper surface of the base 1 can be easily adjusted. In specific implementation, in order to make the contact area between the support foot 430 and the support stop ring 420 relatively large, the vertical cross-section of the inner circumferential surface of the support foot 430 is L-shaped, the horizontal part abuts against the bottom surface of the support stop ring 420, and the vertical part is provided with threads, which are threaded to the outer circumferential surface of the support adjustment sleeve 440.

[0064] In one specific embodiment, the support assembly 4 further includes a support locking sleeve 450, which is fitted onto the column 412 and threadedly connected to the column 412, and the support locking sleeve 450 is located below the support adjusting sleeve 440;

[0065] Multiple circular holes 460 are also provided on the outer circumferential surfaces of the support adjusting sleeve 440 and the support locking sleeve 450 to allow a tool to be inserted to rotate the support adjusting sleeve 440 and the support locking sleeve 450. Specifically, the outer circumferential surface of the support adjusting sleeve 440 includes a first outer circumferential surface on top and a second outer circumferential surface on the bottom. The first outer circumferential surface is threaded to connect with the inner circumferential surface of the lower part of the support foot 430. The diameter of the second outer circumferential surface is larger than that of the first outer circumferential surface, which facilitates the provision of the circular holes 460 on the second outer circumferential surface.

[0066] In the above embodiment, a support locking sleeve 450 is also provided below the support adjusting sleeve 440 to further lock the position of the support adjusting sleeve 440. Furthermore, in a specific embodiment, to facilitate fixing the support foot 430 to the base 1, and to ensure that the bolts used for fixing do not interfere with the circular hole 460 provided on the support adjusting sleeve 440, the vertical cross-section of the outer circumferential surface of the support foot 430 is also L-shaped, and the horizontal part is fixed to the base 1.

[0067] In one specific embodiment, the air cushion assembly 2 further includes:

[0068] The air cushion bottom cover 230 is annular and is disposed below the air cushion sleeve 210 and fixedly connected to the air cushion sleeve 210. The outer diameter of the air cushion bottom cover 230 is the same as the outer diameter of the air cushion sleeve 210, and the inner diameter of the air cushion bottom cover 230 is smaller than the groove diameter of the circular groove of the air cushion sleeve 210.

[0069] The vertical cross-section of the air cushion core 220 is T-shaped. The air cushion core 220 includes a first air cushion core portion 223 and a second air cushion core portion 224 fixedly connected to the bottom of the first air cushion core portion 223. The diameter of the second air cushion core portion 224 is smaller than the diameter of the first air cushion core portion 223. The diameter of the first air cushion core portion 223 is the same as the diameter of the circular groove of the air cushion sleeve 210. The height of the first air cushion core portion 223 is smaller than the depth of the circular groove of the air cushion sleeve 210. The diameter of the second air cushion core portion 224 is the same as the inner diameter of the air cushion bottom cover 230. The sum of the heights of the first air cushion core portion 223 and the second air cushion core portion 224 is equal to the sum of the depth of the circular groove of the air cushion sleeve 210 and the thickness of the air cushion bottom cover 230. The air passage 222 is provided inside the second air cushion core portion 224, and the air nozzle 221 is provided on the bottom surface of the second air cushion core portion 224.

[0070] Multiple elastic components 6 are provided and are respectively disposed in the space between the air cushion core 220 and the air cushion bottom cover 230. One end of each elastic component 6 is connected to the air cushion bottom cover 230, and the other end is connected to the edge of the first air cushion core 223.

[0071] An O-ring 280 is disposed between the first air cushion core 223 and the groove wall of the circular groove of the air cushion sleeve 210, thereby forming a closed space between the air cushion sleeve 210 and the first air cushion core 223.

[0072] In the above embodiment, the air cushion bottom cover 230 ensures that the first air cushion core 223 does not protrude from the air cushion sleeve 210, while allowing the second air cushion core 224 to extend from the air cushion sleeve 210. The sum of the heights of the first air cushion core 223 and the second air cushion core 224 is equal to the sum of the depth of the circular groove of the air cushion sleeve 210 and the thickness of the air cushion bottom cover 230, ensuring that the air cushion core 220 is completely located within the circular groove of the air cushion sleeve 210 when the air cushion assembly 2 is not in use. In specific implementation, the elastic component 6 is a compression spring, and multiple springs are provided. The number of springs is not specifically limited in this embodiment and can be set according to actual conditions. Preferably, six springs are used. The springs ensure that the air cushion core 220 can retract into the circular groove of the air cushion sleeve 210 before high-pressure gas is introduced into the sealed space. Specifically, a first fixing hole 260 is provided on the air cushion base cover 230, and a first screw 261 is provided in the first fixing hole 260 to fix the air cushion base cover 230 to the air cushion sleeve 210. A second fixing hole 270 is also provided on the air cushion base cover, and a second screw 271 is provided in the second fixing hole 270 to fix the air cushion sleeve 210 to the base 1.

[0073] In one specific embodiment, the air cushion assembly 2 further includes:

[0074] A cylindrical pin 290 is disposed in the space between the air cushion core 220 and the air cushion bottom cover 230. One end of the cylindrical pin 290 is inserted into the first air cushion core 223, and the other end is inserted into the air cushion bottom cover 230. It guides the air cushion core 220 when it moves outward.

[0075] The first air pipe connector 240 has a ventilation through hole 530 on the circular groove wall of the air cushion sleeve 210. The first air pipe connector 240 is located at the outer port of the ventilation through hole 530. High-pressure gas enters the closed space formed by the air cushion sleeve 210 and the air cushion core 220 through the first air pipe connector 240 and the ventilation through hole 530.

[0076] The second air pipe connector 250 has an opening 231 on the air cushion bottom cover 230 so that the second air pipe connector 250 is disposed on the second air cushion core 224 and connected to the air passage 222 in the second air cushion core 224.

[0077] In the above embodiment, the cylindrical pin 290 is a positioning pin. Since the groove inside the air cushion sleeve 210 is a circular groove, and the cross-sections of the first air cushion core 223 and the second air cushion core 224 are also circular, the air cushion core 220 can easily rotate when it extends outward. The cylindrical pin 290 can guide the movement of the air cushion core 220. The first air pipe connector 240 facilitates the filling of high-pressure gas into the ventilation through hole 530 and the enclosed space. The second air pipe connector 250 facilitates the filling of high-pressure gas into the air passage 222. It should be noted that the opening 231 on the air cushion bottom cover 230 is specifically designed to extend towards the air cushion sleeve 210, so that there is a square groove at the position corresponding to the opening 231 on the air cushion sleeve 210, ensuring that the second air pipe connector 250 can be easily connected to the air passage 222.

[0078] In one specific implementation, such as Figures 12-15 As shown, it also includes positioning components 5, of which multiple components are provided. Specifically, positioning components 5 include:

[0079] The positioning seat 510 is L-shaped and includes a horizontal part and a vertical part connected to the horizontal part. A spherical groove is provided on the outer side of the vertical part. Two elongated slots 540 are provided on the horizontal part of the positioning seat 510 so as to fix the positioning seat 510 to the ground by screws.

[0080] The positioning pad 520 has a flat surface on one side and a spherical surface on the other side that is adapted to the spherical groove. The positioning pad 520 is disposed in the spherical groove.

[0081] A through hole 530 is provided at the center of the positioning pad 520. The through hole 530 extends into the inner side of the vertical part and penetrates the vertical part. The positioning seat 510 is fixed to the side of the base 1 through the through hole 530.

[0082] In the above embodiment, specifically, eight positioning components 5 are provided, with two at each right-angle position of the base 1 and one on each right-angle side. The positioning components 5 are used for positioning the base 1. The spherical fit between the positioning seat 510 and the positioning pad 520 ensures that the positioning components 5 are in surface contact with the granite base 1 when they are in contact, ensuring that the base 1 will not be damaged due to pressure from the edges and corners.

[0083] The number of devices and processing scale described herein are for the purpose of simplifying the description of this utility model. Applications, modifications, and variations of this utility model will be readily apparent to those skilled in the art.

[0084] Although the embodiments of this utility model have been disclosed above, they are not limited to the applications listed in the specification and embodiments. They can be applied to various fields suitable for this utility model. For those skilled in the art, other modifications can be easily made. Therefore, without departing from the general concept defined by the claims and their equivalents, this utility model is not limited to the specific details and the illustrations shown and described herein.

Claims

1. A device for infeeding and removing parts of a photolithography machine, characterized in that, include: A base, which is horizontally arranged, has an upper surface for placing the workpiece stage of the lithography machine; At least one air cushion assembly, the air cushion assembly comprising: An air cushion sleeve has a circular groove on its bottom surface, and the air cushion sleeve is fixedly mounted on the bottom surface of the base; An air cushion core is disposed within a circular groove of the air cushion sleeve. Multiple air nozzles are located on the bottom surface of the air cushion core, and an air passage is formed inside the air cushion core. All air nozzles are connected to the air passage. High-pressure gas is filled into the enclosed space between the air cushion sleeve and the air cushion core. The length of the air cushion core extending downwards from the air cushion sleeve can be adjusted by regulating the pressure of the high-pressure gas. High-pressure gas is filled into the air passage and ejected from the air nozzles. The reverse impact force generated by the ejected high-pressure gas suspends the base and the workpiece platform above the base. The directional casters are located at the bottom of the base, and the suspended base and the workpiece table are moved in a directional manner by the directional casters.

2. The infeed / outfeed device for a lithography machine as described in claim 1, characterized in that, It also includes support components, of which at least three are provided, and the support components are fixedly disposed on the bottom surface of the base, specifically including: The support base includes a horizontally arranged base plate and a vertically arranged column on the top surface of the base plate, wherein the cross-section of the upper end of the column is hexagonal. A support adjustment sleeve is fitted onto the column, and the inner circumferential surface of the support adjustment sleeve is threadedly connected to the column. A support foot is fitted onto the column, with its upper part positioned above the support adjustment sleeve. The lower inner circumferential surface of the support foot is threadedly connected to the outer circumferential surface of the support adjustment sleeve. A support stop ring is provided, the inner ring surface of which is adapted to fit the upper end of the column. The support stop ring is fitted onto the upper end of the column and located above the support foot. The outer diameter of the support stop ring is smaller than the outer diameter of the support foot and larger than the inner diameter of the support foot. The support foot is fixedly connected to the support stop ring near its inner circumference and to the base near its outer circumference. Rotating the support adjustment sleeve causes the support foot and the support stop ring to move up and down in the vertical direction, thereby supporting and leveling the workpiece table.

3. The infeed / outfeed device for a lithography machine as described in claim 2, characterized in that, The support assembly also includes a support locking sleeve, which is fitted onto the column and threadedly connected to the column, and the support locking sleeve is located below the support adjusting sleeve; Multiple circular holes are provided on the outer circumferential surfaces of the support adjustment sleeve and the support locking sleeve, so that a tool can be inserted to rotate the support adjustment sleeve and the support locking sleeve.

4. The infeed / outfeed device for a lithography machine as described in claim 1, characterized in that, The air cushion assembly also includes: An air cushion bottom cover, which is ring-shaped, is disposed below the air cushion sleeve and is fixedly connected to the air cushion sleeve. The outer diameter of the air cushion bottom cover is the same as the outer diameter of the air cushion sleeve, and the inner diameter of the air cushion bottom cover is smaller than the groove diameter of the circular groove of the air cushion sleeve. The vertical cross-section of the air cushion core is T-shaped. The air cushion core includes a first air cushion core portion and a second air cushion core portion fixedly connected to the bottom of the first air cushion core portion. The diameter of the second air cushion core portion is smaller than the diameter of the first air cushion core portion. The diameter of the first air cushion core portion is the same as the diameter of the circular groove of the air cushion sleeve. The height of the first air cushion core portion is smaller than the depth of the circular groove of the air cushion sleeve. The diameter of the second air cushion core portion is the same as the inner diameter of the air cushion bottom cover. The sum of the heights of the first air cushion core portion and the second air cushion core portion is equal to the sum of the depth of the circular groove of the air cushion sleeve and the thickness of the air cushion bottom cover. The air passage is provided inside the second air cushion core portion, and the air nozzle is provided on the bottom surface of the second air cushion core portion. Multiple elastic components are provided and are respectively disposed in the space between the air cushion core and the air cushion bottom cover. One end of each elastic component is connected to the air cushion bottom cover and the other end is connected to the edge of the first air cushion core. An O-ring is disposed between the first air cushion core and the groove wall of the circular groove of the air cushion sleeve, thereby forming a closed space between the air cushion sleeve and the first air cushion core.

5. The infeed and outfeed device for a lithography machine as described in claim 4, characterized in that, The air cushion assembly also includes: A cylindrical pin is disposed in the space between the air cushion core and the air cushion bottom cover. One end of the cylindrical pin is inserted into the first air cushion core and the other end is inserted into the air cushion bottom cover. It guides the air cushion core when it moves outward. The first air pipe connector has a ventilation through hole on the circular groove wall of the air cushion sleeve. The first air pipe connector is located at the outer port of the ventilation through hole. High-pressure gas enters the closed space formed by the air cushion sleeve and the air cushion core through the first air pipe connector and the ventilation through hole. The second air pipe connector has an opening on the bottom cover of the air cushion so that the second air pipe connector is placed on the second air cushion core and connected to the air passage in the second air cushion core.

6. The infeed and outfeed device for a lithography machine as described in claim 1, characterized in that, It also includes positioning components, of which multiple components are provided, and the positioning components specifically include: The positioning seat is L-shaped and includes a horizontal part and a vertical part connected to the horizontal part, wherein a spherical groove is carved out on the outer surface of the vertical part; The positioning pad has one side that is flat and the other side that is a spherical surface that fits into the spherical groove. The positioning pad is disposed in the spherical groove. A through hole is provided at the center of the positioning pad. The through hole extends into the inner side of the vertical part and penetrates the vertical part. The positioning seat is fixed to the side of the base through the through hole.

7. The infeed / outfeed device for a lithography machine as described in claim 6, characterized in that, Two elongated slots are provided on the horizontal part of the positioning seat to fix the positioning seat to the ground.

8. The infeed and outfeed device for a lithography machine as described in claim 3, characterized in that, The outer circumferential surface of the support adjustment sleeve includes a first outer circumferential surface disposed on the top and a second outer circumferential surface disposed on the bottom. A thread is provided on the first outer circumferential surface, which is threadedly connected to the inner circumferential surface of the support foot. The diameter of the second outer circumferential surface is larger than the diameter of the first outer circumferential surface, and a circular hole is provided on the second outer circumferential surface.

9. The infeed / outfeed device for a lithography machine as described in claim 6, characterized in that, The air cushion assembly is provided in three parts; the positioning assembly is provided in eight parts, with two parts at each right angle position of the base; and the directional casters are provided in four parts.

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