Boat circulation mechanism and feeding and discharging system

Abstract

The utility model relates to the technical field of semiconductors and photovoltaics, in particular to a boat circulation mechanism and a feeding and discharging system, and solves the problem that the feeding and discharging sequence is disordered after a boat structure which is circulated through the boat circulation mechanism and carries marked sheets in the related technology. The boat transfer mechanism comprises a connection assembly and a bearing assembly, the bearing assembly is configured to buffer boat structures transferred by the connection assembly, after at least a first sub-boat of the same boat structure is placed on the bearing assembly, a second sub-boat of the boat structure is transferred into the wafer inserting and unloading mechanism through the connection assembly, and the wafer inserting and unloading mechanism is used for inserting and unloading the second sub-boat. The first sub-boat is transferred into the wafer inserting and unloading mechanism, and the first sub-boat and the second sub-boat are sequentially arranged in the direction away from the wafer inserting and unloading mechanism. According to the boat transferring mechanism and the feeding and discharging system, the first sub-boats and the second sub-boats in the boat structure are separated and transferred in sequence, the problem that the transferred marked sheets are disordered in sequence is solved, and the space occupied by the transferring boat structure is saved.

Description

Technical Field

[0001] This disclosure relates to the fields of semiconductor and photovoltaic technology, and in particular to a boat transfer mechanism and a loading and unloading system. Background Technology

[0002] With the development of photovoltaic technology, semiconductors and photovoltaic materials are widely used in industries such as electronics and new energy. Semiconductors and photovoltaic materials typically require chemical processing before they can be applied to products. Coating technology is one such processing method, playing an indispensable role in the cell manufacturing process and significantly impacting cell efficiency. The equipment involved in coating includes at least wafer loading and unloading equipment, boat transfer equipment, and coating equipment. As production capacity and wafer size requirements increase, coating equipment needs to be appropriately enlarged, leading to a corresponding increase in the number of wafer transfer and boat structures. To ensure traceability, wafers are typically marked, with the marking order corresponding to the loading and unloading sequence before and after coating. However, with the increasing number of boat structures, wafer marking can become chaotic, causing confusion in the loading and unloading sequence before and after coating. Utility Model Content

[0003] In view of this, the present disclosure provides a boat transfer mechanism and a loading and unloading system to solve the problem of disordered loading and unloading sequence of silicon wafers after the boat structure carrying the marked wafers is transferred by the boat transfer mechanism in the related art.

[0004] In a first aspect, one embodiment of this disclosure provides a boat transfer mechanism configured to transfer a boat structure into or out of an insert / unload mechanism. The boat structure includes at least a first sub-boat and a second sub-boat. The boat transfer mechanism includes: a connecting component configured to carry and transfer the boat structure; and a carrying component disposed on the connecting component, configured to buffer the boat structure transferred by the connecting component. At least a first sub-boat of the same boat structure is placed after the carrying component. The second sub-boat of the same boat structure is first transferred into the insert / unload mechanism via the connecting component. During the insertion / unloading of the second sub-boat, the first sub-boat is transferred into the insert / unload mechanism, enabling the insert / unload mechanism to transfer the second and first sub-boats sequentially to the connecting component, such that the first and second sub-boats are arranged sequentially in a direction away from the insert / unload mechanism.

[0005] In some embodiments, the connecting assembly includes: a first transfer mechanism, which docks with the insert / unload mechanism along a first horizontal direction; the first transfer mechanism includes a first tray, on which a first sub-boat and / or a second sub-boat are transferred along a second horizontal direction; the first horizontal direction and the second horizontal direction are perpendicular to each other; and a second transfer mechanism, in which the first transfer mechanism and the second transfer mechanism are arranged along the first horizontal direction; the second transfer mechanism includes a second tray, on which the first sub-boat and / or the second sub-boat are transferred along the second horizontal direction to align the first tray and the second tray, so that the first sub-boat and the second sub-boat can transfer between the first tray and the second tray; wherein, a carrying assembly is disposed above the first transfer mechanism and / or the second transfer mechanism, and the first tray and / or the second tray can be aligned with the carrying assembly along the first horizontal direction.

[0006] Secondly, an embodiment of this disclosure also provides a loading and unloading system, including: a sheet insertion and unloading mechanism for inserting sheets into a boat structure or removing sheets from the boat structure, the boat structure including a first sub-boat and a second sub-boat; the boat transfer mechanism described above is configured to transfer the second sub-boat and the first sub-boat before the process out of the sheet insertion and unloading mechanism in sequence, and to transfer the second sub-boat and the first sub-boat after the process into the sheet insertion and unloading mechanism in the same order.

[0007] This disclosure provides a boat transfer mechanism and a loading / unloading system. The boat transfer mechanism is configured to transfer boat structures that are at least divided into a first sub-boat and a second sub-boat. When the boat transfer mechanism transfers the first sub-boat and the second sub-boat, a supporting component is provided to ensure that the first sub-boat and the second sub-boat enter and exit the sheet unloading mechanism in the same order. This avoids confusion between the order of the marked sheet materials before the loading process and the order of the marked sheet materials after the unloading process, thereby ensuring that the sheet materials before and after the process are loaded and unloaded in an orderly manner according to the marked order, thus improving processing efficiency.

[0008] In addition, by using a boat transfer mechanism to transfer the boat structure that has been split into at least a first sub-boat and a second sub-boat, the length of the boat transfer mechanism in the first horizontal direction does not need to match the length of the overall boat structure when transferring the first sub-boat and the second sub-boat respectively. Instead, it only needs to consider the length that can be used to transfer the first sub-boat and the second sub-boat respectively. This shortens the length of the boat transfer mechanism in the first horizontal direction compared to before, reducing the space occupied in the factory. Attached Figure Description

[0009] The above and other objects, features, and advantages of this disclosure will become more apparent from the more detailed description of the embodiments thereof in conjunction with the accompanying drawings. The drawings are provided to further illustrate the embodiments of this disclosure and form part of the specification. They are used together with the embodiments of this disclosure to explain the disclosure and do not constitute a limitation thereof. In the drawings, the same reference numerals generally represent the same components or steps.

[0010] Figure 1 The diagram shown is a schematic diagram of a loading and unloading system provided in an embodiment of this disclosure.

[0011] Figure 2 The diagram shown is a schematic diagram of a boat structure provided in an embodiment of this disclosure.

[0012] Figure 3 As shown Figure 1 The diagram shows a partial enlarged view of the non-rotating boat structure in the loading and unloading system.

[0013] Figure 4 As shown Figure 1 A partially enlarged view of the sheet material loading and unloading mechanism in the loading and unloading system shown.

[0014] Figure 5 As shown Figure 1 The diagram shows a partial enlarged view of the boat transfer mechanism in the loading and unloading system, which involves the transfer of a boat structure.

[0015] Figure 6 The diagram shown is a schematic diagram of the cooperation between the second transfer mechanism and the first transfer mechanism in a boat transfer mechanism provided in an embodiment of this disclosure.

[0016] Figure 7 The diagram shown is a schematic diagram of a boat transfer mechanism according to an embodiment of the present disclosure, in which the first sub-boat and the second sub-boat are transferred.

[0017] Figure 8 The diagram shown is a schematic diagram of the boat transfer mechanism according to another embodiment of the present disclosure, in which the first sub-boat and the second sub-boat are transferred.

[0018] Figure 9 The diagram shown is a schematic diagram of the boat transfer mechanism according to another embodiment of the present disclosure, in which the first sub-boat and the second sub-boat are transferred.

[0019] Figure 10 The diagram shown is a schematic diagram of the boat transfer mechanism according to another embodiment of the present disclosure, in which the first sub-boat and the second sub-boat are transferred.

[0020] Figure 11 The diagram shown is a schematic diagram of the boat transfer mechanism according to another embodiment of the present disclosure, in which the first sub-boat and the second sub-boat are transferred.

[0021] Figure 12 The diagram shown is a schematic diagram of the boat transfer mechanism according to another embodiment of the present disclosure, in which the first sub-boat and the second sub-boat are transferred.

[0022] Figure 13 The diagram shown is a schematic diagram of the boat transfer mechanism according to another embodiment of the present disclosure, in which the first sub-boat and the second sub-boat are transferred.

[0023] Figure 14The diagram shown is a schematic diagram of the boat transfer mechanism according to another embodiment of the present disclosure, in which the first sub-boat and the second sub-boat are transferred.

[0024] Figure 15 The diagram shown is a schematic diagram of the boat transfer mechanism according to another embodiment of the present disclosure, in which the first sub-boat and the second sub-boat are transferred.

[0025] Figure label:

[0026] 10. Loading and unloading system; 1. Boat transfer mechanism; 11. Connecting assembly; 111. First transfer mechanism; 1111. First conveyor; 1112. First pallet; 11121. First sub-pallet; 11122. Second sub-pallet; 112. Second transfer mechanism; 1121. Second conveyor; 1122. Second pallet; 11221. Third sub-pallet; 11222. Fourth sub-pallet; 12. Bearing assembly; 121. Bearing component; 1211. Bearing plate; 122. Lifting drive component; 13. Boat loading and unloading assembly; 14. Temporary storage assembly; 2. Insertion and unloading mechanism; 21. First worktable; 21a. First docking position; 22. Second worktable; 22a. Second docking position; 23. Robot arm 3. Sheet loading and unloading mechanism; 31. First loading conveyor; 31a. First loading bearing position; 32. First unloading conveyor; 32a. First unloading bearing position; 33. Second loading conveyor; 33a. Second loading bearing position; 34. Second unloading conveyor; 34a. Second unloading bearing position; 4. Coating mechanism; 4a. Third docking position; 5. Fixing frame; 6. Boat structure; 61. First sub-boat; 61a. First sub-boat before process; 61b. First sub-boat after process; 62. Second sub-boat; 62a. Second sub-boat before process; 62b. Second sub-boat after process; X. First horizontal direction; Y. Second horizontal direction; L1. First distance; L2. Second length; L3. First length. Detailed Implementation

[0027] The technical solutions of the embodiments of this disclosure will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this disclosure, and not all embodiments. Based on the embodiments of this disclosure, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this disclosure.

[0028] This disclosure provides a boat-turning mechanism, such as... Figures 1 to 4 The boat transfer mechanism 1 is applied to the loading and unloading system 10. It is understood that the loading and unloading system 10 can be used to load unprocessed sheets into the boat structure 6 and feed them to the coating mechanism 4, as well as to remove processed sheets from the boat structure 6 and unload them.

[0029] The loading and unloading system 10 may specifically include a sheet loading and unloading mechanism 3, a sheet insertion and unloading mechanism 2, a boat transfer mechanism 1, and a coating mechanism 4 arranged sequentially along the first horizontal direction X. The sheet loading and unloading mechanism 3 is configured to input pre-processed sheets into the sheet insertion and unloading mechanism 2 and output post-processed sheets from the sheet insertion and unloading mechanism 2. The sheet insertion and unloading mechanism 2 is configured to carry the boat structure 6 and insert pre-processed sheets into the boat structure 6 or remove post-processed sheets from the boat structure 6. The boat transfer mechanism 1 is configured to transfer the boat structure 6 to the sheet insertion and unloading mechanism 2 for sheet insertion and unloading or to the coating equipment for coating the sheets in the boat structure 6.

[0030] Specifically, during sheet feeding, the unprocessed sheet is fed to the insert / unload mechanism 2 via the sheet loading / unloading mechanism 3, and the boat structure 6 is fed to the boat transfer mechanism 1. The boat transfer mechanism 1 causes the boat structure 6 to transfer into the insert / unload mechanism 2. The insert / unload mechanism 2 inserts the unprocessed sheet into the boat structure 6 and returns the boat structure 6 with the unprocessed sheet inserted to the boat transfer mechanism 1. The boat transfer mechanism 1 transfers the boat structure 6 with the unprocessed sheet inserted to the position of the coating mechanism 4 so that it can enter the coating mechanism 4 to complete the coating. When the sheet is unloaded, the boat structure 6 of the processed sheet from the coating mechanism 4 enters the boat transfer mechanism 1. The boat transfer mechanism 1 then transfers the boat structure 6 of the processed sheet into the insert and unload mechanism 2. The insert and unload mechanism 2 takes out the processed sheet and puts it into the sheet loading and unloading mechanism 3 to unload the processed sheet. Then, the insert and unload mechanism 2 inserts a new unprocessed sheet into the boat structure 6 from the sheet loading and unloading mechanism 3. The above loading steps are repeated. The above loading and unloading steps can complete the sheet coating process.

[0031] Optionally, the wafer can be a semiconductor or photovoltaic material used to prepare solar cells, and is uniformly referred to as a "silicon wafer" in this disclosure. After being processed through different processes such as cutting and coating, the silicon wafer is finally called a usable solar cell. The shape of the silicon wafer includes square, round, etc., and its specific size can be adapted to actual needs and is not specifically limited.

[0032] It is understood that the boat structure 6 includes at least a first sub-boat 61 and a second sub-boat 62. The first sub-boat 61 and the second sub-boat 62 are used to carry multiple silicon wafers. The number of silicon wafers carried by the first sub-boat 61 and the second sub-boat 62 can be the same or different, that is, the lengths of the first sub-boat 61 and the second sub-boat 62 can be set to be the same or different, without specific limitation. It should be emphasized that when the first sub-boat 61 and the second sub-boat 62 move on the boat transfer mechanism 1, the length direction of the first sub-boat 61 and the second sub-boat 62 is always parallel to the first horizontal direction X, so as to facilitate the movement of the sub-boats to enter the wafer insertion and removal mechanism 2 or the coating mechanism 4.

[0033] Specifically, the boat transfer mechanism 1 includes a connecting component 11 and a carrying component 12. The connecting component 11 is disposed on one side of the insert and unload mechanism 2. The connecting component 11 is configured to carry and transfer the boat structure 6. The carrying component 12 is configured to buffer the boat structure 6 transferred by the connecting component 11. The connecting component 11 can be specifically configured to carry and transfer the first sub-boat 61a before the process and the second sub-boat 62a before the process, as well as the first sub-boat 61b after the process and the second sub-boat 62b after the process. The carrier assembly 12 is disposed on the connecting assembly 11. At least the first sub-boat 61 of the same boat structure 6 is placed after the carrier assembly 12. The second sub-boat 62 of the same boat structure 6 is first transferred to the insert / unload mechanism 2 via the connecting assembly 11. During the insertion / unloading of the second sub-boat 62, the first sub-boat 61 is transferred to the insert / unload mechanism 2, allowing the insert / unload mechanism 2 to transfer the second sub-boat 62 and the first sub-boat 61 sequentially to the connecting assembly 11, so that the first sub-boat 61 and the second sub-boat 62 are arranged sequentially in a direction away from the insert / unload mechanism 2. Even if the order in which the processed first sub-boat 61b and the processed second sub-boat 62b enter the insert / unload mechanism 2 from the connecting assembly 11 is the same as the order in which the unprocessed first sub-boat 61a and the unprocessed second sub-boat 62a enter the connecting assembly 11 from the insert / unload mechanism 2, the order in which the first sub-boat 61 and the second sub-boat 62 enter and exit the insert / unload mechanism 2 is the same.

[0034] It is important to emphasize that the first sub-boat 61a and the second sub-boat 62a before the process do not simply refer to the first sub-boat 61 and the second sub-boat 62 respectively carrying unprocessed silicon wafers, and the first sub-boat 61b and the second sub-boat 62b after the process do not simply refer to the first sub-boat 61 and the second sub-boat 62 respectively carrying processed silicon wafers. When the first sub-boat 61 and the second sub-boat 62 enter the boat transfer mechanism 1 for the first time in an unloaded state, the boat transfer mechanism 1 needs to transfer the unloaded first sub-boat 61 and the second sub-boat 62 to the position of the coating mechanism 4 so that the unloaded first sub-boat 61 and the second sub-boat 62 can first enter the coating mechanism 4 for heating. After heating, the first sub-boat 61 and the second sub-boat 62 are then transferred by the boat transfer mechanism 1 to the wafer insertion and removal mechanism 2 to start wafer insertion. Therefore, the first sub-boat 61a before the process and the second sub-boat 62a before the process can also refer to the first sub-boat 61 and the second sub-boat 62 that are empty when they first enter the boat transfer mechanism 1 but do not enter the coating mechanism 4 for the coating process. The first sub-boat 61b and the second sub-boat 62b after the process can also refer to the first sub-boat 61 and the second sub-boat 62 that are empty after they first enter the boat transfer mechanism 1 and are heated by the coating mechanism 4. They will not be emphasized separately thereafter.

[0035] Optionally, the boat structure 6 may also include a third sub-boat, a fourth sub-boat, etc., arranged sequentially with the first sub-boat 61 and the second sub-boat 62 along the first horizontal direction X. Each sub-boat can enter the boat transfer mechanism 1 to enter the wafer insertion and removal mechanism 2 for wafer insertion and removal or enter the coating mechanism 4 to coat the silicon wafer it carries. It can be adapted to actual needs and is not specifically limited.

[0036] The boat transfer mechanism 1 provided in this embodiment is configured to transfer boat structures 6 that are at least divided into a first sub-boat 61 and a second sub-boat 62. When the boat transfer mechanism 1 transfers the first sub-boat 61 and the second sub-boat 62 respectively, the length of the boat transfer mechanism 1 at least in the first horizontal direction X does not need to match the length of the overall boat structure 6. Instead, it only needs to consider the length that can satisfy the transfer of the first sub-boat 61 and the second sub-boat 62 respectively. This shortens the length of the boat transfer mechanism 1 in the first horizontal direction X compared to before, reducing the space occupied in the factory.

[0037] Furthermore, when the number of silicon wafers that the first sub-boat 61 can carry is the same as the number of silicon wafers that the second sub-boat 62 can carry, if the second sub-boat 62, which does not carry silicon wafers, enters the wafer insertion and unloading mechanism 2 before the first sub-boat 61 for wafer insertion, and if the wafer insertion and unloading mechanism 2 is pre-set by the control mechanism to designate the first sub-boat as the second sub-boat 62, the processed first sub-boat 61b and the processed second sub-boat 62b will then enter the wafer insertion and unloading mechanism 2 for wafer unloading via the boat transfer mechanism 1. If the first sub-boat 61 enters before the second sub-boat 62, the wafer insertion and unloading mechanism 2 will identify the first sub-boat 61 as the second sub-boat 62. This will result in the loading and unloading order of silicon wafers in the second sub-boat 62 and the first sub-boat 61 being reversed. If a silicon wafer is judged to be a qualified product, a defective product, or a scrap product during unloading, it is impossible to trace which sub-boat it actually came from, thus leading to an untraceable situation in the silicon wafer processing process. For example, if the number of silicon wafers that the first sub-boat 61 can carry is different from the number of silicon wafers that the second sub-boat 62 can carry, and the second sub-boat 62, which does not carry silicon wafers, enters the wafer insertion / unloading mechanism 2 before the first sub-boat 61 for wafer insertion, if the wafer insertion / unloading mechanism 2 is pre-set by the control mechanism to designate the first sub-boat as the second sub-boat 62, the processed first sub-boat 61b and the processed second sub-boat 62b will enter the wafer insertion / unloading mechanism 2 again via the boat transfer mechanism 1 for wafer unloading. If the first sub-boat 61 enters before the second sub-boat 62, the wafer insertion / unloading mechanism 2 will identify the first sub-boat 61 as the second sub-boat 62. This will result in one of the first sub-boats 61 and the second sub-boat 62 not being completely unloaded, and one of the first sub-boats 61 and the second sub-boat 62 being overloaded during wafer insertion, causing the silicon wafers to be inserted outside the sub-boat and damaged. This will lead to many problems such as chaotic loading and unloading of silicon wafers, easy damage, and lack of traceability. Therefore, in this embodiment of the present disclosure, the carrier component 12 provided in the boat transfer mechanism 1 is used to ensure that the order in which the first sub-boat 61 and the second sub-boat 62 enter and exit the wafer insertion and unloading mechanism 2 is the same, so as to avoid the confusion of the order of silicon wafers before the loading process and the order of silicon wafers after the unloading process, thereby ensuring that the silicon wafers before and after the process are loaded and unloaded in an orderly manner according to the marked order, and improving the processing efficiency.

[0038] Optionally, the loading and unloading system 10 also includes a fixed frame 5. When the loading and unloading system 10 is installed in a space of the factory, the fixed frame 5 can be installed and fixed first, and then the sheet loading and unloading mechanism 3, the sheet insertion and unloading mechanism 2, the boat transfer mechanism 1 and the coating mechanism 4 can be fixedly connected to the fixed frame 5 in sequence along the first horizontal direction X.

[0039] The following detailed description uses the boat structure 6, which includes a first sub-boat 61 and a second sub-boat 62 of the same length in the first horizontal direction X, as an example.

[0040] It should be emphasized that, in order to facilitate the insertion and removal of silicon wafers by the first sub-boat 61 and the second sub-boat 62, the wafer insertion and removal mechanism 2 may specifically include a first workbench 21 and a second workbench 22 arranged at intervals along the second horizontal direction Y, with a robotic arm 23 provided between the first workbench 21 and the second workbench 22. The first workbench 21 is configured to carry one of the first sub-boat 61 and the second sub-boat 62, and the second workbench 22 is configured to carry the other of the first sub-boat 61 and the second sub-boat 62. The robotic arm 23 is configured to insert the unprocessed silicon wafer into the sub-boat carried on the workbench and to remove the processed silicon wafer from the sub-boat on the workbench. Optionally, which of the first workbench 21 and the second workbench 22 is used to carry the first sub-boat 61 and which is used to carry the second sub-boat 62 can be set according to actual needs and is not limited. In this embodiment of the present disclosure, the first workbench 21 is set to carry the first sub-boat 61 and the second workbench 22 is set to carry the second sub-boat 62.

[0041] Optionally, the first workbench 21 and the second workbench 22 may each be provided with a conveyor belt for transport along the first horizontal direction X. The conveyor belt can be used to carry the first sub-boat 61 or the second sub-boat 62, and the conveyor belt can rotate forward or backward in the first horizontal direction X, so that the carried first sub-boat 61 or the second sub-boat 62 enters the boat transfer mechanism 1 or the sub-boat on the boat transfer mechanism 1 is guided by the conveyor belt from the docking position to the corresponding workbench. In other examples, the first workbench 21 and the second workbench 22 may also be configured as platform structures capable of carrying sub-boats. Along the first horizontal direction X, the first workbench 21 has a first docking position 21a on the side facing the boat transfer mechanism 1, and the second workbench 22 has a second docking position 22a on the side facing the boat transfer mechanism 1. The boat transfer mechanism 1 is configured to realize the entry and exit of the first sub-boat 61 or the second sub-boat 62 into and out of the insert and unload mechanism 2 at the first docking position 21a, and to realize the entry and exit of the first sub-boat 61 or the second sub-boat 62 into and out of the insert and unload mechanism 2 at the second docking position 22a. An additional transfer mechanism can be used to move the first sub-boat 61 and the second sub-boat 62, which have been transferred into place in the boat transfer mechanism 1, to the corresponding worktables. Furthermore, the transfer mechanism can also move the sub-boats on the first worktable 21 and the second worktable 22 onto the boat transfer mechanism 1, which will not be described in detail here.

[0042] In addition, the coating mechanism 4 is provided with a third docking position 4a on the side facing the boat transfer mechanism 1 in the first horizontal direction X. The boat transfer mechanism 1 is also configured to allow the first sub-boat 61 and the second sub-boat 62 to enter and exit the coating equipment together along the first horizontal direction X at the third docking position 4a. The third docking position 4a can be staggered with the first docking position 21a and the second docking position 22a in the second horizontal direction Y, or it can be aligned with the first docking position 21a or the second docking position 22a. It can be adaptively adjusted according to actual needs and is not specifically limited.

[0043] Understandably, based on the aforementioned wafer insertion and unloading mechanism 2, the wafer loading and unloading mechanism 3 includes at least a first loading conveyor 31, disposed on one side of the first worktable 21 in the first horizontal direction X. The first loading conveyor 31 has a first loading bearing position 31a, which is configured to bear the pre-processed silicon wafers loaded by the first loading conveyor 31. The robot arm 23 can insert the pre-processed silicon wafers from the first loading bearing position 31a into the first sub-boat 61 of the first worktable 21. A first unloading conveyor 32 is disposed on one side of the first worktable 21 in the first horizontal direction X. The first loading conveyor 31 and the first unloading conveyor 32 are arranged at intervals in the second horizontal direction Y. The first unloading conveyor 32 has a first unloading bearing position 32a. The robot arm 23 can unload the processed wafers from the first sub-boat 61 of the first worktable 21 to the first unloading bearing position 32a, and then unload the wafers from the first unloading conveyor 32a. The silicon wafers after processing are output from the material carrier position 32a; the second loading conveyor 33 is disposed on one side of the second worktable 22 in the first horizontal direction X, and the second loading conveyor 33 has a second loading carrier position 33a, which is configured to carry the pre-processed wafers loaded by the second loading conveyor 33. The robot arm 23 can insert the pre-processed wafers from the second loading carrier position 33a into the second sub-boat 62 of the second worktable 22; the second unloading conveyor 34 is disposed on one side of the second worktable 22 in the first horizontal direction X, and the second loading conveyor 33 and the second unloading conveyor 34 are arranged at intervals in the second horizontal direction Y. The second unloading conveyor 34 has a second unloading carrier position 34a, and the robot arm 23 can unload the processed silicon wafers from the second sub-boat 62 of the second worktable 22 to the second unloading carrier position 34a, and output the processed silicon wafers from the second unloading carrier position 34a via the second unloading conveyor 34.

[0044] It is understandable that the first loading conveyor 31, the first unloading conveyor 32, the second loading conveyor 33, and the second unloading conveyor 34 of the wafer loading and unloading mechanism 3 may each be equipped with multiple spaced detection elements along the wafer conveying direction to detect the condition of the conveyed silicon wafers. The purpose of detection can be selected according to actual needs, which will not be elaborated further. In addition, the wafer loading and unloading mechanism 3 may also include unloading elements for defective silicon wafers, unloading elements for silicon wafers requiring rework, etc., which can be designed according to actual needs, which will not be elaborated further.

[0045] In some embodiments, such as Figures 5 to 7The connecting assembly 11 includes a second transfer mechanism 112 and a first transfer mechanism 111. The first transfer mechanism 111 docks with the insert / unload mechanism 2 along a first horizontal direction X, and the second transfer mechanism 112 docks with the coating mechanism 4 along the first horizontal direction X. This allows the pre-process second sub-boat 62a and pre-process first sub-boat 61a, which flow out from the insert / unload mechanism 2, to sequentially enter the coating mechanism 4 via the second transfer mechanism 112, and the post-process second sub-boat 62b and post-process first sub-boat 61b to sequentially enter the insert / unload mechanism 2 from the first transfer mechanism 111. Specifically, the first transfer mechanism 111 includes a first tray 1112, which carries a first sub-boat 61 and / or a second sub-boat 62 along a second horizontal direction Y; the first transfer mechanism 111 and the second transfer mechanism 112 are arranged along a first horizontal direction X, and the second transfer mechanism 112 includes a second tray 1122, which carries the first sub-boat 61 and / or the second sub-boat 62 along the second horizontal direction Y to align the first tray 1112 and the second tray 1122, so that the first sub-boat 61 and the second sub-boat 62 can flow between the first tray 1112 and the second tray 1122; wherein, the carrying component 12 is disposed above the first transfer mechanism 111 and / or the second transfer mechanism 112, and the first tray 1112 and / or the second tray 1122 can be aligned with the carrying component 12 along the first horizontal direction X.

[0046] It is understood that the carrier component 12 can be fixedly connected to the fixing frame 5 to be indirectly disposed on the connecting component 11, and the carrier component 12 is disposed above the second transfer mechanism 112 and / or the first transfer mechanism 111. The carrier component 12 is configured to disengage the first sub-boat 61b after the process and the second sub-boat 62b after the process from the second transfer mechanism 112 and / or the first transfer mechanism 111, and to return the disengaged first sub-boat 61 and the second sub-boat 62b to the second transfer mechanism 112 and / or the first transfer mechanism 111 in sequence according to the order in which the first sub-boat 61a and the second sub-boat 62a before the process enter the connecting component 11 from the insert and unload mechanism 2. The first transfer mechanism 111 transfers the first sub-boat 61 and the second sub-boat 62 into the insert and unload mechanism 2 respectively in the order of return. It is understandable that when the first sub-boat 61 and the second sub-boat 62 are moving in and out of the coating equipment for coating, the first sub-boat 61 and the second sub-boat 62 are aligned along the first horizontal direction X and located at the third docking position 4a. When the first sub-boat 61 and the second sub-boat 62 are moving in and out of the insert and unload mechanism 2, the first sub-boat 61 and the second sub-boat 62 are arranged at intervals along the second horizontal direction Y and located at the first docking position 21a and the second docking position 22a respectively. In the process of changing the arrangement of the first sub-boat 61 and the second sub-boat 62 through the cooperation of the first transfer mechanism 111 and the second transfer mechanism 112 to connect with the wafer insertion and unloading mechanism 2 or the coating mechanism 4, the boat transfer mechanism 1 uses the set support component 12 to lift the first sub-boat 61 and the second sub-boat 62, and put the first sub-boat 61 and the second sub-boat 62 back in turn as needed. This adjusts the order in which the first sub-boat 61 and the second sub-boat 62 enter the first worktable 21 and the second worktable 22 of the wafer insertion and unloading mechanism 2, so as to avoid the misalignment of the first sub-boat 61 entering the second worktable 22 and the second sub-boat 62 entering the first worktable 21, thereby avoiding the difference between the order of unloading silicon wafers and the order of loading silicon wafers.

[0047] Specifically, the first transfer mechanism 111 includes a first conveyor 1111, a first sub-pallet 11121, and a second sub-pallet 11122. The first conveyor 1111 is arranged along the second horizontal direction Y. The first sub-pallet 11121 is connected to the first conveyor 1111 and is driven by the first conveyor 1111 to transfer the processed first sub-boat 61b or the processed second sub-boat 62b along the second horizontal direction Y. The second sub-pallet 11122 is connected to the first conveyor 1111 and is driven by the first conveyor 1111 to transfer the unprocessed first sub-boat 61a or the unprocessed second sub-boat 62a along the second horizontal direction Y. The first sub-pallet 11121 and the second sub-pallet 11122 are independent of each other and are arranged at intervals along the second horizontal direction Y. The second transfer mechanism 112 includes a second conveyor 1121, a third sub-pallet 11221, and a fourth sub-pallet 11222. The second conveyor 1121 is arranged along the second horizontal direction Y. The third sub-pallet 11221 is connected to the second conveyor 1121 and is driven by the second conveyor 1121 to transfer the first sub-boat 61b after the process or the second sub-boat 62b after the process along the second horizontal direction Y. The fourth sub-pallet 11222 is connected to the second conveyor 1121 and is driven by the second conveyor 1121 to transfer the first sub-boat 61a before the process or the second sub-boat 62a before the process along the second horizontal direction Y. The third sub-pallet 11221 and the fourth sub-pallet 11222 are independent of each other. By utilizing the cooperation of the first sub-pallet 11121, the third sub-pallet 11221, and the second sub-pallet 11122 and the fourth sub-pallet 11222, the boat transfer mechanism 1 can separate and orderly transfer the two sub-boats before the process and the two sub-boats after the process without interfering with each other. Furthermore, the two sub-boats before the process and the two sub-boats after the process can be simultaneously transferred by the boat transfer mechanism 1 to the coating mechanism 4 and the insert and unload mechanism 2, respectively, which further improves the processing efficiency.

[0048] It is understood that the first conveyor 1111 and the second conveyor 1121 can be configured as a structure of guide rails and sliders arranged and cooperating along the second horizontal direction Y, or they can be configured as a conveyor belt group structure arranged along the second horizontal direction Y. They can be adapted to actual needs without specific limitations.

[0049] Optionally, the first sub-pallet 11121, the second sub-pallet 11122, the third sub-pallet 11221, and the fourth sub-pallet 11222 can be configured with the same structure. For example, the first sub-pallet 11121 can be configured as a conveyor assembly with a conveyor belt capable of forward or reverse transport along a first horizontal direction X, so that the conveyor belt of the first sub-pallet 11121 can carry the sub-boat while simultaneously allowing the sub-boat to be introduced into or out of the first sub-pallet 11121 along the first horizontal direction X. Further details will not be elaborated here.

[0050] In some embodiments, the carrier assembly 12 may include two or more sets of carrier members 121 and two or more sets of lifting drive members 122. Multiple carrier members 121 are spaced apart along a second horizontal direction Y above the second transfer mechanism 112. Each carrier member 121 is connected to at least one set of lifting drive members 122, which are fixedly connected to the fixed frame 5. The lifting drive members 122 can drive the carrier member 121 to move vertically. Each carrier member 121 includes two carrier plates spaced apart along a first horizontal direction X, with a first distance L1 between the two carrier plates. The first distance L1 is less than the distance between the first sub-boat 61 in the first horizontal direction X. The length of the first horizontal direction X (i.e., the first length L3) and the first distance L1 are less than the length of the second sub-boat 62 in the first horizontal direction X (i.e., the second length L2). The lifting drive 122 can drive the two carrier plates to descend simultaneously until the carrier plates are lower than or equal to the upper surface of the second transfer mechanism 112 in the height direction. When the first sub-boat 61 or the second sub-boat 62 carried by the second transfer mechanism 112 moves along the second horizontal direction Y, the first sub-boat 61 or the second sub-boat 62 is transferred to the two carrier plates. The lifting drive 122 drives the two carrier plates to rise simultaneously so that the first sub-boat 61 or the second sub-boat 62 is disengaged from the second transfer mechanism 112. By utilizing the cooperative structure of the carrier plate and the lifting drive component 122, the two boats are temporarily stored during the process of the first sub-boat 61b after the process and the second sub-boat 62b after the process. This avoids interference with the flow of the two sub-boats before the process, and at the same time, the two sub-boats can be put back in a pre-set order. This allows the first sub-pallet 11121 and / or the third sub-pallet 11221 to transfer the sub-boats to the docking positions of the corresponding worktables in the order in which the insert and unload mechanism 2 outputs the sub-boats.

[0051] In some optional embodiments, the carrying assembly 12 may include one or more carrying members 121 and two or more lifting drive members 122. The carrying members 121 are arranged at intervals along the second horizontal direction Y above the first transfer mechanism 111. Each carrying member 121 is configured to carry a first sub-boat 61 or a second sub-boat 62, and more than one carrying member 121 is configured to carry the first sub-boat 61. Each carrying member 121 is connected to at least one set of lifting drive members 122, and the lifting drive members 122 are capable of driving the carrying member 121 to move in the vertical direction. Each carrying member 121 includes a first horizontal direction Y. Two carrier plates are arranged at an X-axis interval, with a first distance L1 between them. The first distance L1 is less than the length of the first sub-boat 61 in the first horizontal direction X, and the first distance L1 is less than the length of the second sub-boat 62 in the first horizontal direction X. The lifting drive 122 can drive the two carrier plates to descend simultaneously until the carrier plates are lower than or equal to the upper surface of the first transfer mechanism 111 in the height direction, so that the first sub-boat 61 or the second sub-boat 62 is transferred to the two carrier plates. The lifting drive 122 drives the two carrier plates to rise simultaneously so that the first sub-boat 61 or the second sub-boat 62 is disengaged from the first transfer mechanism 111.

[0052] It is understandable that the carrier 121 can be positioned above the first transfer mechanism 111 or the second transfer mechanism 112, depending on actual needs, without specific limitations.

[0053] Optionally, the carrier 121 can be configured as a carrier plate 1211 above the first transfer mechanism 111 or the second transfer mechanism 112. The upper surface of the carrier plate 1211 is flat and is used to support the first sub-boat 61 or the second sub-boat 62. No further details are provided.

[0054] In some embodiments, the boat transfer mechanism 1 further includes a boat pick-and-place assembly 13, which is disposed above the docking assembly 11. The boat pick-and-place assembly 13 is configured to transfer the first sub-boat 61 or the second sub-boat 62 between the insert / unload mechanism 2, the docking assembly 11, and the carrying assembly 12. When the boat structure 6 is first loaded from the outside onto the boat transfer mechanism 1, the boat pick-and-place assembly 13 can grab the first sub-boat 61 or the second sub-boat 62 and move the grabbed first sub-boat 61 and second sub-boat 62 to the second sub-pallet 11122 and the fourth sub-pallet 11222 respectively for carrying, in preparation for entering the coating mechanism 4. Understandably, when the boat structure 6 is unloaded from the boat transfer mechanism 1 after multiple cycles to replace the new boat structure 6, the boat pick-up and drop assembly 13 can also place the gripped first sub-boat 61 or second sub-boat 62 onto the support plate 1211 of the support assembly 12 so that the first sub-boat 61 and second sub-boat 62 on the support assembly 12 can be unloaded by the transfer mechanism.

[0055] Optionally, the boat pick-up and place assembly 13 can be slidably connected to the fixed frame 5 so that the boat pick-up and place assembly 13 can move above the connecting assembly 11 along the second horizontal direction Y. Furthermore, the boat pick-up and place assembly 13 can include a gripper and a lifting member, the lifting member being able to drive the gripper to move vertically. For example, when loading the first sub-boat 61 and the second sub-boat 62 to the boat transfer mechanism 1, the first sub-boat 61 and the second sub-boat 62 can be placed respectively at the end of the second conveyor 1121 away from the fourth sub-pallet 11222. The gripper moves along the second horizontal direction Y to above the first sub-boat 61 or the second sub-boat 62. The lifting member lowers the gripper to grab the lower sub-boat and then rises. The gripper moves along the second horizontal direction Y to above the fourth sub-pallet 11222, placing the grabbed sub-boat on it. When the fourth sub-pallet 11222 is aligned with the second sub-pallet 11122, both can respectively carry the first sub-boat 61 and the second sub-boat 62. When the first sub-boat 61 and the second sub-boat 62 are unloaded, the gripper can move along the second horizontal direction Y to above the fourth sub-pastor 11222 and grip the sub-boats of the fourth sub-pastor 11222 onto the bearing assembly 12 so that the first sub-boat 61 and the second sub-boat 62 can be unloaded respectively.

[0056] In some optional embodiments, the boat transfer mechanism 1 may further include a temporary storage component 14, which is disposed above the connecting component 11. The temporary storage component 14 is configured to temporarily store the first sub-boat 61 and / or the second sub-boat 62 that have moved to the corresponding position, disengaging them from the connecting component 11. Specifically, the temporary storage component 14 may be disposed above the second conveyor 1121, and may have the same structure as the carrying component 12, so that when the first sub-boat 61a or the second sub-boat 62a before the process moves to that position, the temporary storage component 14 can lift the corresponding sub-boat for temporary storage.

[0057] The following combination Figure 3 , Figure 5 , Figures 7-15 The working principle of the boat transfer mechanism 1 for transferring the first sub-boat 61 and the second sub-boat 62 is introduced.

[0058] Boat circulation mechanism 1 Figure 3 In this state, the first sub-boat 61 and the second sub-boat 62 are successively loaded onto the two sets of carrier plates of the carrier assembly 12 via the transfer mechanism or transferred to one end of the second conveyor 1121 near the carrier assembly 12. The boat pick-and-place assembly 13 moves along the second horizontal direction Y to above the corresponding first sub-boat 61, as shown. Figure 7First, the first sub-boat 61 is grabbed and transported onto the fourth sub-pallet 11222. Then, the boat grabbing assembly moves in the opposite direction along the second horizontal direction Y to the corresponding second sub-boat 62 and repeats the aforementioned steps to transport the second sub-boat 62 onto the fourth sub-pallet 11222. Simultaneously, when the fourth sub-pallet 11222 carries the first sub-boat 61, the fourth sub-pallet 11222 and the second sub-pallet 11122 are aligned in the first horizontal direction X and both are located at the end of the second conveyor 1121 away from the carrying assembly 12. The conveyor belts of the fourth sub-pallet 11222 and the second sub-pallet 11122 move in the same direction. The first sub-boat 61 carried by the fourth sub-pallet 11222 can be transferred to be carried by the second sub-pallet 11122. The conveyor belts of the fourth sub-pallet 11222 and the second sub-pallet 11122 stop moving. Finally, as... Figure 8 The first sub-boat 61 is loaded onto the second sub-plate 11122, and the second sub-boat 62 is loaded onto the fourth sub-plate 11222. The first sub-boat 61 and the second sub-boat 62 loaded for the first time are the first sub-boat 61a and the second sub-boat 62a before the process without carrying silicon wafers.

[0059] like Figure 9 Before transferring the first sub-boat 61a (empty) and the second sub-boat 62a (pre-process) to the insert / unload mechanism 2 for inserting wafers, both sub-boats need to first enter the coating mechanism 4 for heating. Therefore, in Figure 8 Based on this, the second sub-pallet 11122 and the fourth sub-pallet 11222 move along the second horizontal direction Y, so that the first sub-boat 61a and the second sub-boat 62a before the process, which are carried by them, are aligned with the third docking position 4a in the first horizontal direction X. The drive belts of the second sub-pallet 11122 and the fourth sub-pallet 11222 move synchronously and towards the coating mechanism 4, so that the second sub-boat 62a and the first sub-boat 61a before the process are sequentially conveyed into the coating mechanism 4 for heating. At the same time, during the operation of the coating mechanism 4, the second sub-pallet 11122 and the fourth sub-pallet 11222 move back to their previous positions along the second horizontal direction Y, repeating the above process. Figure 7 , Figure 8 The action of loading the first sub-boat 61a and the second sub-boat 62a before the process onto the second sub-pallet 11122 and the fourth sub-pallet 11222, respectively, is to wait for them to be transferred into the coating mechanism 4.

[0060] like Figure 10During the heating process of the first sub-boat 61 and the second sub-boat 62 by the coating mechanism 4, the first sub-pallet 11121 and the third sub-pallet 11221 move along the second horizontal direction Y until they are aligned with the third docking position 4a in the first horizontal direction X. The heated first sub-boat 61 and the second sub-boat 62 are sequentially conveyed out of the coating mechanism 4, and the processed first sub-boat 61b and the processed second sub-boat 62b sequentially enter the third sub-pallet 11221 from the third docking position 4a. Simultaneously, the conveyor belts of the third sub-pallet 11221 and the first sub-pallet 11121 move along the first horizontal direction X away from the coating mechanism 4, thereby driving the processed first sub-boat 61b, which entered the third sub-pallet 11221 first, into the first sub-pallet 11121, and the processed second sub-boat 62b into the third sub-pallet 11221. The conveyor belts of the third sub-pallet 11221 and the first sub-pallet 11121 then stop moving. Then, the first conveyor 1111 and the second conveyor 1121 respectively drive the first sub-pallet 11121 and the third sub-pallet 11221 to move along the second horizontal direction Y in a direction away from the second sub-pallet 11122, until... Figure 5 The state.

[0061] like Figure 11 During the movement of the third sub-pallet 11221 along the second horizontal direction Y, once the third sub-pallet 11221 reaches the position corresponding to one of the carrier members 121, that is, when the two ends of the sub-boat carried on the third sub-pallet 11221 are above the carrier plate 1211, the lifting drive member 122 drives the two carrier plates 1211 of the same group to rise, thereby causing the processed second sub-boat 62b to detach from the third sub-pallet 11221. The unloaded third sub-pallet 11221 continues to move along the second horizontal direction Y until it stops at a certain position, and the first sub-pallet 11121 also stops after moving to the first horizontal direction X and aligning with another carrier member 121. At this time, the first sub-pallet 11121 and the third sub-pallet 11221 are aligned in the first horizontal direction X, and the conveyor belts of the first sub-pallet 11121 and the third sub-pallet 11221 can be driven in the direction of the first horizontal direction X toward the side of the carrier 121, so that the first sub-boat 61b after processing on the first sub-pallet 11121 flows onto the third sub-pallet 11221, and the conveyor belts of the first sub-pallet 11121 and the third sub-pallet 11221 stop moving. After the third sub-pallet 11221 carries the first sub-boat 61b after the process and, without interfering with the other set of support plates 1211, the other set of lifting drive members 122 raises the two support plates 1211 so that during the movement of the third sub-pallet 11221 along the second horizontal direction Y, the two ends of the first sub-boat 61b after the process can be supported by the two support plates 1211. The lifting drive members 122 raise the support plates 1211 so that the first sub-boat 61b after the process detaches from the third sub-pallet 11221 (e.g., ...). Figure 12Meanwhile, the first sub-boat 61a and the second sub-boat 62a located before the second sub-plate 11122 and the fourth sub-plate 11222 can be sent into the coating mechanism 4 for heating, which will not be described in detail here.

[0062] like Figure 13 In the first sub-boat 61b and the second sub-boat 62b, which are temporarily stored and supported by two sets of carriers 121 after processing, the third sub-pallet 11221 can move along the second horizontal direction Y to below the temporarily stored second sub-boat 62. The carrier assembly 12 places the second sub-boat 62 back onto the third sub-pallet 11221, and the third sub-pallet 11221 carries the second sub-boat 62 and moves along the second horizontal direction Y. At the same time, the first sub-pallet 11121 moves along the second horizontal direction Y to align with the second docking position 22a, so that the third sub-pallet 11221 moves to align with the first sub-pallet 11121 in the first horizontal direction X. The conveyor belts of the first sub-pallet 11121 and the third sub-pallet 11221 can be conveyed along the first horizontal direction X towards the second worktable 22, so that the processed second sub-boat 62b on the third sub-pallet 11221 sequentially passes through the first sub-pallet 11121 and the second docking position 22a into the second worktable 22, and the robot arm 23 can insert pieces into the second sub-boat 62 on the second worktable 22. Figure 14 During the insertion process, the first sub-pallet 11121 moves along the second horizontal direction Y to align with the first docking position 21a. The third sub-pallet 11221 moves along the second horizontal direction Y to below the carrier 121 of the temporarily stored processed first sub-boat 61b, and returns the processed first sub-boat 61b to the third sub-pallet 11221. The third sub-pallet 11221 carries the processed first sub-boat 61b to align with the first sub-pallet 11121 in the first horizontal direction X. The conveyor belts of the third sub-pallet 11221 and the first sub-pallet 11121 convey the processed first sub-boat 61b towards the first worktable 21 along the first horizontal direction X, so that the processed first sub-boat 61b passes through the first sub-pallet 11121 and the first docking position 21a in sequence and enters the first worktable 21. The robot arm 23 can insert the wafer into the first sub-boat 61 on the first worktable 21.

[0063] Optionally, during the insertion process, the first sub-plate 11121 and the third sub-plate 11221 can repeat the above steps to transfer the first sub-boat 61b and the second sub-boat 62b after another set of processes in the coating mechanism 4, which will not be described in detail here.

[0064] like Figure 15In the insert / unload mechanism 2, the second sub-boat 62, which enters first, completes inserting the wafer before the first sub-boat 61. The second sub-pallet 11122 moves along the second horizontal direction Y to align with the second docking position 22a, so that the second sub-boat 62a, obtained from inserting the wafer on the second worktable 22, enters the second sub-pallet 11122 via the second docking position 22a. The fourth sub-pallet 11122, carrying the second sub-boat 62a before processing, returns to its original position, aligned with the fourth sub-pallet 11222 in the first horizontal direction X. The conveyor belts of the fourth sub-pallet 11222 and the second sub-pallet 11122 synchronously convey the wafers towards the coating mechanism 4, so that the second sub-boat 62b after processing on the second sub-pallet 11122 is carried by the fourth sub-pallet 11222. After the second sub-plate 11122 moves to align with the first docking position 21a, the first sub-boat 61b, after completing the insert process, enters the second sub-plate 11122 via the first docking position 21a. The second sub-plate 11122 then resets the first sub-boat 61b after the process, allowing the first sub-boat 61a and the second sub-boat 62a before the process on the second sub-plate 11122 and the fourth sub-plate 11222 to enter the coating mechanism 4.

[0065] It is understandable that the steps for the first sub-boat 61a and the second sub-boat 62a before the process on the second sub-plate 11122 and the fourth sub-plate 11222 to flow into the coating mechanism 4 can refer to the relevant description of the first sub-boat 61 and the second sub-boat 62 entering the coating mechanism 4 for heating for the first time, and will not be repeated here.

[0066] Furthermore, the transfer of the first sub-boat 61b and the second sub-boat 62b, which carry the coated silicon wafers after coating by the coating mechanism 4, in the boat transfer mechanism 1 can be referred to the relevant description of the transfer of the first sub-boat 61b and the second sub-boat 62b after the first heating by the coating mechanism 4, and will not be repeated here.

[0067] This disclosure also provides a loading and unloading system, such as... Figure 1 The loading and unloading system 10 includes a sheet loading and unloading mechanism 3, a sheet insertion and unloading mechanism 2, a boat transfer mechanism 1, and a coating mechanism 4 arranged sequentially along a first horizontal direction X. The sheet loading and unloading mechanism 3 is configured to input pre-processed sheets into the sheet insertion and unloading mechanism 2 and output post-processed sheets from the sheet insertion and unloading mechanism 2. The sheet insertion and unloading mechanism 2 is used to insert sheets into the boat structure 6 or remove sheets from the boat structure 6. The boat transfer mechanism 1 is configured to transfer the pre-processed second sub-boat 62a and the pre-processed first sub-boat 61a out of the sheet insertion and unloading mechanism 2 in sequence, and to transfer the post-processed second sub-boat 62b and the post-processed first boat 61b into the sheet insertion and unloading mechanism 2 in the same order.

[0068] Optionally, the first sub-boat 61 and the second sub-boat 62 of the same boat structure 6 are successively transferred to the connecting assembly 11. After at least the first sub-boat 61 of the boat structure 6 is placed on the carrying assembly 12, the second sub-boat 62 of the boat structure 6 is first transferred to the insert and unload mechanism 2 via the connecting assembly 11. During the insertion and unloading of the second sub-boat 62, the first sub-boat 61 is transferred to the insert and unload mechanism 2 via the connecting assembly 11 again, so that the insert and unload mechanism 2 can transfer the second sub-boat 62 and the first sub-boat 61 to the connecting assembly 11 in sequence, so that the first sub-boat 61 and the second sub-boat 62 are arranged in sequence in a direction away from the insert and unload mechanism 2, and the connecting assembly 11 can transfer the second sub-boat 62 and the first sub-boat 61 out in sequence.

[0069] Optionally, the wafer insertion / removal mechanism 2 includes a first worktable 21, a second worktable 22, and a robot arm 23. The first worktable 21 is configured to carry a first sub-boat 61. The second worktable 22 is arranged at a distance from the first worktable 21 in the second horizontal direction Y, and is configured to carry a second sub-boat 62. The robot arm 23 is disposed between the first worktable 21 and the second worktable 22, and is configured to insert pre-processed silicon wafers into the first sub-boat 61 or the second sub-boat 62, and to remove post-processed silicon wafers from the first sub-boat 61 or the second sub-boat 62.

[0070] It is understood that the sheet loading and unloading mechanism 3, sheet insertion and unloading mechanism 2, boat transfer mechanism 1 and coating mechanism 4 in the loading and unloading system 10 can refer to the relevant descriptions in the above embodiments, and will not be repeated here.

[0071] In the embodiments of this disclosure, unless otherwise specified, the connection can be a detachable connection using bolts and nuts, screws, clips, magnetic attraction, etc. In some connections where there is no particular requirement for a detachable fit, a non-detachable connection can be achieved through welding, bonding, or other methods.

[0072] The basic principles of this disclosure have been described above with reference to specific embodiments. However, it should be noted that the advantages, benefits, and effects mentioned in this disclosure are merely examples and not limitations, and should not be considered as essential features of each embodiment of this disclosure. Furthermore, the specific details disclosed above are for illustrative and facilitative purposes only, and are not limitations. These details do not limit the scope of this disclosure to the necessity of employing the aforementioned specific details for implementation.

[0073] The block diagrams of devices, apparatuses, devices, and systems disclosed herein are merely illustrative examples and are not intended to require or imply that they must be connected, arranged, or configured in the manner shown in the block diagrams. As those skilled in the art will recognize, these devices, apparatuses, devices, and systems can be connected, arranged, and configured in any manner. Words such as “comprising,” “including,” “having,” etc., are open-ended terms meaning “including but not limited to,” and are used interchangeably with them. The terms “or” and “and” as used herein refer to the terms “and / or,” and are used interchangeably with them unless the context clearly indicates otherwise. The term “such as” as used herein refers to the phrase “such as but not limited to,” and is used interchangeably with it.

[0074] It should also be noted that in the apparatus, devices, and methods of this disclosure, the components or steps can be disassembled and / or recombined. These disassemblies and / or recombinations should be considered as equivalent solutions to this disclosure.

[0075] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use this disclosure. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein may be applied to other aspects without departing from the scope of this disclosure. Therefore, this disclosure is not intended to be limited to the aspects shown herein, but rather to be carried out within the widest scope consistent with the principles and novel features disclosed herein.

[0076] The above description has been given for purposes of illustration and description. Furthermore, this description is not intended to limit the embodiments of this disclosure to the forms disclosed herein. Although numerous exemplary aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, alterations, additions, and sub-combinations therein.

Claims

1. A boat transfer mechanism, configured to transfer a boat structure into or out of an insert / unload mechanism, said boat structure comprising at least a first sub-boat and a second sub-boat, characterized in that, The boat transfer mechanism includes: A connecting component is configured to carry and transfer the boat structure; A carrier component is disposed on the connecting component, and the carrier component is configured to buffer the boat structure flowing through the connecting component; In this arrangement, at least the first sub-boat of the same boat structure is placed after the bearing assembly. The second sub-boat of the same boat structure is first transferred to the insert / unload mechanism via the docking assembly. During the insertion / unloading of the second sub-boat, the first sub-boat is transferred to the insert / unload mechanism, so that the insert / unload mechanism can transfer the second sub-boat and the first sub-boat to the docking assembly in sequence, so that the first sub-boat and the second sub-boat are arranged sequentially in a direction away from the insert / unload mechanism.

2. The boat transfer mechanism according to claim 1, characterized in that, The connection component includes: A first transfer mechanism, which docks with the insert / unload mechanism along a first horizontal direction, includes a first tray, on which the first tray transfers the first sub-boat and / or the second sub-boat along a second horizontal direction; the first horizontal direction and the second horizontal direction are perpendicular to each other; and A second transfer mechanism is provided, wherein the first transfer mechanism and the second transfer mechanism are arranged along the first horizontal direction, and the second transfer mechanism includes a second pallet, the second pallet transfers the first sub-boat and / or the second sub-boat along the second horizontal direction to align the first pallet and the second pallet, so that the first sub-boat and the second sub-boat can transfer between the first pallet and the second pallet; The carrier component is disposed above the first transfer mechanism and / or the second transfer mechanism, and the first pallet and / or the second pallet can be aligned with the carrier component along the first horizontal direction.

3. The boat transfer mechanism according to claim 2, characterized in that, The first circulation mechanism includes: The first conveyor is positioned along the second horizontal direction; The first sub-tray is connected to the first conveyor and is driven by the first conveyor to flow along the second horizontal direction of the first sub-boat or the second sub-boat after the process. The second sub-trail is connected to the first conveyor and is driven by the first conveyor to flow along the second horizontal direction before the first sub-boat or the second sub-boat in the process; the first sub-trail and the second sub-trail are independent of each other and are arranged at intervals along the second horizontal direction. The second circulation mechanism includes: The second conveyor is arranged along the second horizontal direction; The third sub-trailer is connected to the second conveyor and is driven by the second conveyor to flow along the second horizontal direction to either the first sub-boat or the second sub-boat after the process. The fourth sub-trailer is connected to the second conveyor and is driven by the second conveyor to flow along the second horizontal direction before the first sub-boat or the second sub-boat; the third sub-trailer and the fourth sub-trailer are independent of each other.

4. The boat transfer mechanism according to claim 2, characterized in that, The carrier component includes: Two or more sets of carriers, with multiple carriers arranged at intervals along the second horizontal direction above the second transfer mechanism, each carrier being configured to carry the first sub-boat or the second sub-boat; Two or more sets of lifting drive components, each of the carrier components is connected to at least one set of lifting drive components, and the lifting drive components are capable of driving the carrier component to move in the vertical direction; Each of the carriers includes two carrier plates spaced apart along the first horizontal direction, with a first distance between the two carrier plates. The first distance is less than the length of the first sub-boat in the first horizontal direction, and the first distance is less than the length of the second sub-boat in the first horizontal direction. The lifting drive can simultaneously lower the two carrier plates until the carrier plates are lower than or equal to the upper surface of the second transfer mechanism in the height direction, so that the first sub-boat or the second sub-boat is transferred to the two carrier plates. The lifting drive can simultaneously raise the two carrier plates so that the first sub-boat or the second sub-boat is disengaged from the second transfer mechanism.

5. The boat transfer mechanism according to claim 2, characterized in that, The carrier component includes: One or more carriers are arranged at intervals along the second horizontal direction above the first transfer mechanism, and one or more of the carriers are configured to carry the first sub-boat; Two or more sets of lifting drive components, each of the carrier components is connected to at least one set of lifting drive components, and the lifting drive components are capable of driving the carrier component to move in the vertical direction; Each of the carriers includes two carrier plates spaced apart along the first horizontal direction, with a first distance between the two carrier plates. The first distance is less than the length of the first sub-boat in the first horizontal direction, and the first distance is less than the length of the second sub-boat in the first horizontal direction. The lifting drive can simultaneously lower the two carrier plates until the carrier plates are lower than or equal to the upper surface of the first transfer mechanism in the height direction, so that the first sub-boat is transferred to the two carrier plates. The lifting drive can simultaneously raise the two carrier plates so that the first sub-boat is disengaged from the first transfer mechanism.

6. The boat transfer mechanism according to claim 1, characterized in that, Also includes: A boat pick-up and place assembly is disposed above the docking assembly, and the boat pick-up and place assembly is configured to transfer the first sub-boat or the second sub-boat between the insert and unload mechanism, the docking assembly and the carrier assembly.

7. The boat transfer mechanism according to claim 1, characterized in that, Also includes: A temporary storage component is disposed above the docking component, and the temporary storage component is configured to temporarily store the first sub-boat and / or the second sub-boat that has moved to the corresponding position away from the docking component.

8. A loading and unloading system, characterized in that, include: A sheet insertion and removal mechanism for inserting a sheet into a boat structure or removing the sheet from the boat structure, the boat structure including a first sub-boat and a second sub-boat; The boat transfer mechanism according to any one of claims 1-7 is configured to transfer the second sub-boat and the first sub-boat before the process out of the insert / unload mechanism in sequence, and to transfer the second sub-boat and the first sub-boat after the process into the insert / unload mechanism in the same order.

9. The loading and unloading system according to claim 8, characterized in that, The first and second sub-boats of the same boat structure are sequentially transferred to the connecting assembly. At least the first sub-boat of the boat structure is placed after the carrying assembly. The second sub-boat of the boat structure is first transferred to the insert / unload mechanism via the connecting assembly. During the insertion / unload of the second sub-boat, the first sub-boat is transferred back to the insert / unload mechanism via the connecting assembly. This allows the insert / unload mechanism to sequentially transfer the second and first sub-boats to the connecting assembly, so that the first and second sub-boats are arranged sequentially in a direction away from the insert / unload mechanism. The connecting assembly can then sequentially transfer the second and first sub-boats out.

10. The loading and unloading system according to claim 8, characterized in that, The insert / uninstall mechanism includes: The first workbench is configured to support the first sub-boat; A second workbench is arranged at a distance from the first workbench in the second horizontal direction, and the second workbench is configured to carry the second sub-boat. A robotic arm is disposed between the first worktable and the second worktable, the robotic arm being configured to insert the pre-processed sheet into the first sub-boat or the second sub-boat, and to remove the post-processed sheet from the first sub-boat or the second sub-boat.

11. The loading and unloading system according to claim 10, characterized in that, Also includes: A sheet loading and unloading mechanism is disposed on the side of the inserting and unloading mechanism away from the boat transfer mechanism. The sheet loading and unloading mechanism is configured to input the sheet before processing into the inserting and unloading mechanism, and to output the sheet after processing from the inserting and unloading mechanism. The sheet loading and unloading mechanism includes at least: A first feeding conveyor is disposed on one side of the first worktable in the first horizontal direction. The first feeding conveyor has a first feeding bearing position, which is configured to bear the sheet material before the process of feeding through the first feeding conveyor. The robot arm is capable of inserting the sheet material before the process of feeding through the first feeding bearing position into the first sub-boat of the first worktable. The first unloading conveyor is disposed on one side of the first workbench in the first horizontal direction. The first loading conveyor and the first unloading conveyor are arranged at intervals in the second horizontal direction. The first unloading conveyor has a first unloading bearing position. The robot can unload the processed sheet material in the first boat of the first workbench to the first unloading bearing position, and output the processed sheet material at the first unloading bearing position via the first unloading conveyor. The second feeding conveyor is disposed on one side of the second worktable in the first horizontal direction. The second feeding conveyor has a second feeding bearing position, which is configured to bear the sheet material before the process of feeding through the second feeding conveyor. The robot arm can insert the sheet material before the process of feeding through the second feeding bearing position into the second sub-boat of the second worktable. The second unloading conveyor is disposed on one side of the second worktable in the first horizontal direction. The second loading conveyor and the second unloading conveyor are arranged at intervals in the second horizontal direction. The second unloading conveyor has a second unloading bearing position. The robot can unload the processed sheet material in the second boat of the second worktable to the second unloading bearing position, and output the processed sheet material at the second unloading bearing position via the second unloading conveyor.

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