Device for filtering helium in liquid supply process

Abstract

The utility model relates to the technical field of liquid supply, and discloses a device for filtering helium in a liquid supply process, which comprises a sealing pipe, an upper end cover and a lower end cover, the upper end cover and the lower end cover are arranged at two ends of the sealing pipe, the sealing pipe is sealed by the upper end cover and the lower end cover, a helium filter membrane pipe is arranged in the sealing pipe, and a liquid inlet pipe is arranged on the upper end cover. A liquid inlet pipe is arranged on the upper end cover, a helium filter membrane pipe is arranged on the lower end cover, a liquid outlet pipe is arranged on the lower end cover, the helium filter membrane pipe is connected with the liquid inlet pipe and the liquid outlet pipe, a vacuum connecting pipe is further arranged on the upper end cover, the vacuum connecting pipe is connected to the outside of the helium filter membrane pipe in the sealing pipe, and the vacuum connecting pipe is used for forming negative pressure in the sealing pipe. According to the utility model, micromolecular helium escapes under the action of negative pressure through the filter membrane tube in the prior art, so that helium on liquid is effectively removed.

Description

Technical Field

[0001] This utility model relates to the field of liquid supply technology, and in particular to a device for filtering helium during the liquid supply process. Background Technology

[0002] In industries such as semiconductors, solar energy, and LCD panel manufacturing, high purity is required for some liquid supply equipment used in the production process. These liquids include hydrochloric acid, nitric acid, and hydrogen peroxide. Because helium mixed in these liquids is an inert gas, it cannot be effectively removed by chemical methods. These small amounts of helium often directly affect the manufacturing precision of semiconductors and LCD panels. Utility Model Content

[0003] The purpose of this invention is to solve the above-mentioned problems and provide a device for filtering helium during the liquid supply process. By using a filter membrane tube in the prior art under negative pressure, small molecule helium gas escapes, effectively removing helium gas from the liquid.

[0004] The technical solution adopted by this utility model is:

[0005] A device for filtering helium during liquid supply is characterized by comprising a sealing tube and upper and lower end caps disposed at both ends of the sealing tube, the upper and lower end caps sealing the sealing tube, a helium filter membrane tube disposed inside the sealing tube, an inlet pipe disposed on the upper end cap, an outlet pipe disposed on the lower end cap, the helium filter membrane tube connecting the inlet and outlet pipes, and a vacuum connection pipe disposed on the upper end cap, the vacuum connection pipe connecting to the outside of the helium filter membrane tube inside the sealing tube, the vacuum connection pipe being used to create a negative pressure inside the sealing tube.

[0006] Furthermore, valves are installed on both the inlet pipe and the outlet pipe.

[0007] Furthermore, the vacuum connection tube is connected to the vacuum pump.

[0008] Furthermore, a leakage sensor is connected to the lower end cap.

[0009] Furthermore, the helium filter membrane tube is a spiral tube with a helium permeability greater than 99%.

[0010] Furthermore, a fixing seat is provided on the sealing tube.

[0011] Furthermore, both the spiral tube and the sealing tube are made of transparent glass.

[0012] The beneficial effects of this utility model are:

[0013] (1) The spiral filter membrane tube increases the liquid flow time and effectively removes helium;

[0014] (2) Negative pressure allows helium to escape more quickly;

[0015] (3) The glass tube facilitates observation during use;

[0016] (4) The leakage sensor can detect leakage problems in time during the infusion process. Attached Figure Description

[0017] Appendix Figure 1 This is a three-dimensional structural schematic diagram of the present invention;

[0018] Appendix Figure 2 This is a schematic diagram of a structure with a transparent sealing tube.

[0019] Appendix Figure 3 This is a schematic diagram of the patent.

[0020] The labels in the attached diagram are as follows:

[0021] 1. Sealing tube; 2. Top cap;

[0022] 3. Lower end cap; 4. Liquid inlet pipe;

[0023] 5. Discharge tube; 6. Filter membrane tube;

[0024] 7. Vacuum connection tube; 8. Leakage sensor;

[0025] 9. Fixture. Detailed Implementation

[0026] The following detailed description, in conjunction with the accompanying drawings, describes a specific embodiment of a device for filtering helium during the liquid supply process according to the present invention.

[0027] See appendix Figures 1 to 3 An upper end cap 2 and a lower end cap 3 are provided at both ends of the sealing tube 1. The upper end cap 2 and the lower end cap 3 seal the sealing tube 1. The sealing tube 1 is a transparent glass tube, made of acid- and alkali-resistant and corrosion-resistant glass material, which facilitates observation during liquid injection.

[0028] An inlet pipe 4 is installed on the upper end cap 2, and an outlet pipe 5 is installed on the lower end cap 3. A helium filter membrane tube 6 is installed inside the sealing tube 1. The helium filter membrane tube 6 connects the inlet pipe 4 and the outlet pipe 5 to form a liquid channel. The helium filter membrane tube 6 is a spiral tube with a helium permeability greater than 99%. The filter membrane tube 6 is existing technology and a commercially available product. Its working principle is that the molecular gaps between the filter membranes can only allow small molecules such as helium to pass through, but not large molecules such as water and acids. When liquid flows through the filter membrane tube 6, liquid molecules cannot escape from the filter membrane, and only small helium molecules escape, thereby expelling the helium from the liquid.

[0029] A vacuum connection tube 7 is also provided on the upper end cap 2. The vacuum connection tube 7 is connected to the outside of the helium filter membrane tube 6 inside the sealing tube 1. The vacuum connection tube 7 is used to create a negative pressure inside the sealing tube 1. The negative pressure makes it easier for helium to pass through the filter membrane and be discharged.

[0030] In application, valves are installed on both the inlet pipe 4 and the outlet pipe 5. A vacuum connection pipe 7 is connected to a vacuum pump. A leakage sensor 8 is connected to the lower end cap 3. A fixing seat 9 is installed on the sealing pipe 1. After the fixing seat 9 secures the device, liquid enters the filter membrane tube 6 from the inlet pipe 4. The vacuum pump is turned on, creating a negative pressure inside the sealing pipe 1. During the liquid flow, as it passes through the filter membrane tube 6, helium molecules escape from the filter membrane and are extracted by the vacuum pump, while the liquid continues to flow out from the outlet pipe 5.

[0031] The filter membrane products here are commercially available; for example, you can choose ultrafiltration membrane tubes from Beijing InnoGreen Technology Co., Ltd.

[0032] The above are merely preferred embodiments of this utility model. It should be noted that those skilled in the art can make several improvements and modifications without departing from the principle of this utility model, and these improvements and modifications should also be considered within the scope of protection of this utility model.

Claims

1. A device for filtering helium during liquid supply, characterized in that: The device includes a sealing tube and upper and lower end caps at both ends of the sealing tube, which seal the sealing tube. A helium filter membrane tube is installed inside the sealing tube. An inlet pipe is installed on the upper end cap, and an outlet pipe is installed on the lower end cap. The helium filter membrane tube connects the inlet pipe and the outlet pipe. A vacuum connection pipe is also installed on the upper end cap, which connects to the outside of the helium filter membrane tube inside the sealing tube. The vacuum connection pipe is used to create a negative pressure inside the sealing tube.

2. The apparatus for filtering helium during liquid supply according to claim 1, characterized in that: Valves are installed on both the inlet and outlet pipes.

3. The apparatus for filtering helium during liquid supply according to claim 1, characterized in that: The vacuum connection tube is connected to the vacuum pump.

4. The apparatus for filtering helium during liquid supply according to claim 1, characterized in that: A leakage sensor is connected to the lower end cap.

5. An apparatus for filtering helium during liquid supply according to any one of claims 1 to 4, characterized in that: The helium filter membrane tube is a spiral tube with a helium permeability greater than 99%.

6. The apparatus for filtering helium during liquid supply according to claim 5, characterized in that: A fixing seat is provided on the sealing tube.

7. The apparatus for filtering helium during liquid supply according to claim 5, characterized in that: Both the spiral tube and the sealing tube are made of transparent glass.

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