Evaporation source device and evaporation equipment

Abstract

The utility model discloses an evaporation source device and evaporation equipment, and relates to the field of coating equipment. The evaporation source device comprises a crucible assembly which is provided with an evaporation cavity with an upward opening, and the crucible assembly is used for heating and evaporating materials contained in the evaporation cavity; the lifting mechanism is connected with the crucible assembly and used for driving the crucible assembly to move to a plurality of different height positions in the vertical direction; and the flow promoting mechanism is used for stirring the materials in the evaporation cavity. The evaporation source device provided by the utility model can improve the film coating rate and the film coating effect.

Description

Technical Field

[0001] This utility model relates to the field of coating equipment, and more specifically, to an evaporation source device and an evaporation coating device. Background Technology

[0002] Vacuum deposition equipment is commonly used in the market. Specifically, the evaporation source device of the evaporation equipment includes a crucible for holding and heating the material. After the material melts and evaporates under the heating of the crucible, it reaches the surface of the substrate to form a lithium film.

[0003] In this type of vapor deposition equipment, the crucible height cannot be adjusted. As the vapor deposition process proceeds, the liquid level after the material melts gradually decreases, and the distance between the material and the substrate gradually increases, which leads to a decrease in the coating rate and coating quality. Furthermore, due to the chemically active properties of some materials, such as lithium, they are very likely to react with other substances during the vapor deposition process to generate impurities that float on the liquid surface, causing the evaporation rate to gradually decrease, thereby resulting in a decrease in the coating rate and a deterioration in the coating effect. Utility Model Content

[0004] The purpose of this invention is to provide an evaporation source device that can improve the coating rate and coating effect.

[0005] Another objective of this invention is to provide a vapor deposition equipment with faster deposition rate and better deposition effect.

[0006] The embodiments of this utility model provide a technical solution:

[0007] An evaporation source device, comprising:

[0008] A crucible assembly having an upward-opening evaporation chamber, the crucible assembly being used to heat and evaporate materials contained within the evaporation chamber;

[0009] A lifting mechanism, connected to the crucible assembly, is used to move the crucible assembly vertically to multiple different height positions;

[0010] A flow-inducing mechanism is used to agitate the material within the evaporation chamber.

[0011] In an optional embodiment, the system further includes a fixing plate and a lifting guide rod extending in the vertical direction. The fixing plate is used to connect and fix to an external structure. The top end of the lifting guide rod is connected to the crucible assembly, and the bottom end passes through the fixing plate and slides in cooperation with the fixing plate.

[0012] In an optional embodiment, the lifting mechanism includes a lifting drive component, a worm, a worm wheel, and a lifting screw. The worm and the worm wheel are rotatably mounted on the fixed plate. The lifting drive component is connected to the worm for driving the worm to rotate.

[0013] The worm gear meshes with the outer wall of the worm wheel, the worm wheel has a threaded hole, the lifting screw passes through the threaded hole and is threaded into the threaded hole, and the top end of the lifting screw is connected to the crucible assembly.

[0014] In an optional embodiment, the worm and the worm wheel are disposed on the bottom side surface of the fixed plate, and the fixed plate is provided with a clearance hole through which the lifting screw passes.

[0015] In an optional embodiment, the flow-promoting mechanism includes a rotary drive and at least two rotating rollers, the at least two rotating rollers being arranged side by side in the evaporation chamber, and each rotating roller having multiple blades erected on its sidewall;

[0016] Each of the rotating rollers is coaxially fitted with an input gear, and the input gears corresponding to any two adjacent rotating rollers mesh with each other. The rotation drive is connected to one of the rotating rollers for driving each of the rotating rollers to rotate.

[0017] In an optional embodiment, the flow-promoting mechanism further includes two mounting seats, which are respectively hung on opposite sides of the opening of the evaporation chamber, and the two ends of each rotating roller are rotatably disposed on the two mounting seats.

[0018] In an optional embodiment, the flow-promoting mechanism further includes a transmission gear, a transmission chain, a drive sprocket, a driven sprocket, and a universal coupling. The drive sprocket is rotatably disposed at the bottom of the crucible assembly, and the rotary drive component is connected to the drive sprocket via the universal coupling.

[0019] The driven sprocket is rotatably disposed on the top of the crucible assembly, and the transmission chain is sleeved between the driving sprocket and the driven sprocket; the transmission gear is coaxially connected to the driven sprocket and meshes with the input gear corresponding to one of the rotating rollers.

[0020] In an optional embodiment, a film thickness gauge is also included, which is disposed above the evaporation chamber.

[0021] In an optional embodiment, the crucible assembly includes a shell and a crucible disposed within the shell, the crucible defining the evaporation chamber, the shell being connected to the lifting mechanism, and a heating coil being disposed between the shell and the crucible.

[0022] This utility model also provides a vapor deposition apparatus, including the aforementioned evaporation source device. The evaporation source device includes a crucible assembly, a lifting mechanism, and a flow-promoting mechanism. The crucible assembly has an upward-facing evaporation chamber and is used to heat and evaporate the material placed in the evaporation chamber. The lifting mechanism is connected to the crucible assembly and is used to drive the crucible assembly to move vertically to multiple different height positions. The flow-promoting mechanism is used to stir the material in the evaporation chamber.

[0023] Compared to existing technologies, the evaporation source device provided by this invention features a lifting mechanism that can move the crucible assembly vertically to multiple different height positions to adjust the distance between the material and the substrate, thereby regulating the coating rate and improving the low-volume coating yield, resulting in a better coating effect. The flow-promoting mechanism agitates the material. After the material melts into a liquid state, the agitation by the flow-promoting mechanism improves the uniformity of the material temperature. Furthermore, the irregular flow of the liquid material under the agitation of the flow-promoting mechanism allows impurities floating on the liquid surface to enter the interior, preventing them from hindering evaporation. Additionally, it increases the atomic concentration difference between the material and the space above the liquid surface, causing material atoms to diffuse rapidly upwards. Therefore, the beneficial effects of the evaporation source device provided by this invention include: improved coating rate and coating effect. Attached Figure Description

[0024] To more clearly illustrate the technical solutions of the embodiments of this utility model, the accompanying drawings used in the embodiments will be briefly described below. It should be understood that the following drawings only show some embodiments of this utility model and therefore should not be considered as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without any creative effort.

[0025] Figure 1 A schematic diagram of the evaporation source device provided in an embodiment of the present invention from a first-view perspective;

[0026] Figure 2 A schematic diagram of the evaporation source device provided in an embodiment of the present invention from a second perspective;

[0027] Figure 3 for Figure 2 Sectional view of section AA;

[0028] Figure 4 for Figure 2 Sectional view of section BB;

[0029] Figure 5 This is a schematic diagram of the evaporation source device provided in an embodiment of the present invention from a third-person perspective.

[0030] Icons: 100-Evaporation source device; 110-Crucible assembly; 111-Evaporation chamber; 112-Outer shell; 113-Crucible; 114-Heating coil; 115-Lifting base plate; 120-Lifting mechanism; 121-Lifting drive component; 122-Worm gear; 123-Worm wheel; 124-Lifting screw; 130-Flow promoting mechanism; 131-Rotation drive component; 132-Rotating roller; 133-Blade; 134-Input gear; 135-Mounting base; 136-Transmission gear; 137-Transmission chain; 138-Drive sprocket; 139-Driven sprocket; 1391-Universal coupling; 140-Fixed plate; 150-Lifting guide rod; 160-Film thickness gauge. Detailed Implementation

[0031] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. The components of the embodiments of this utility model described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0032] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.

[0033] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0034] In the description of this utility model, it should be understood that the terms "upper", "lower", "inner", "outer", "left", "right", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship that the utility model product is usually placed in during use, or the orientation or positional relationship that is commonly understood by those skilled in the art. They are only used to facilitate the description of this utility model and to simplify the description, and are not intended to indicate or imply that the device or component referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0035] Furthermore, the terms "first," "second," etc., are used only to distinguish descriptions and should not be interpreted as indicating or implying relative importance.

[0036] In the description of this utility model, it should also be noted that, unless otherwise explicitly specified and limited, terms such as "set" and "connection" should be interpreted broadly. For example, "connection" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can be a connection within two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0037] The specific embodiments of this utility model will now be described in detail with reference to the accompanying drawings.

[0038] Example

[0039] Please see Figure 1 , Figure 1 The diagram shown is a structural schematic of the evaporation source device 100 provided in this embodiment from a first perspective.

[0040] The evaporation source device 100 provided in this embodiment is applied to a vapor deposition equipment. It can heat the material to be deposited to a gaseous state in the deposition chamber of the vapor deposition equipment so that it can be uniformly deposited onto the surface of the substrate to form a film layer.

[0041] The evaporation source device 100 in this embodiment includes a crucible assembly 110, a lifting mechanism 120, and a flow-promoting mechanism 130. The crucible assembly 110 has an upward-opening evaporation chamber 111, and is used to heat and evaporate the material placed in the evaporation chamber 111. The lifting mechanism 120 is connected to the crucible assembly 110 and is used to move the crucible assembly 110 vertically to multiple different height positions, thereby adjusting the height of the crucible assembly 110 within the coating chamber. The flow-promoting mechanism 130 is connected to the crucible assembly 110 and is used to stir the material in the evaporation chamber 111.

[0042] In practical applications, the height of the crucible assembly 110 can be adjusted by the lifting mechanism 120 to meet different coating requirements. For example, before the crucible assembly 110 starts heating the material, the height of the crucible assembly 110 can be lowered by the lifting mechanism 120 to move it away from the substrate above the evaporation chamber 111, thus avoiding damage to the substrate due to high temperature.

[0043] When there is too much material, the height of the crucible assembly 110 can be lowered by the lifting mechanism 120 to prevent the liquid surface of the molten material from being too close to the substrate; conversely, when there is too little material, the height of the crucible assembly 110 can be raised by the lifting mechanism 120 to prevent the liquid surface of the material from being too far from the substrate. This allows for adjustment of the coating effect and coating rate, and improves the low-volume coating qualification rate, thereby obtaining a better coating effect.

[0044] Similarly, in practical applications, the material in the evaporation chamber 111 can be stirred by the flow-promoting mechanism 130 to increase the evaporation rate of the material, thereby improving the coating rate and coating effect.

[0045] After the material melts, the flow-promoting mechanism 130 can be activated during the coating process to stir the material, improve the fluidity of the liquid material, make the material temperature more uniform, and allow impurities floating on the liquid surface to enter the interior, preventing them from hindering the evaporation of the material. It can also increase the atomic concentration difference between the liquid surface and the environment, thereby increasing the evaporation rate of the material, and further improving the coating rate and coating effect.

[0046] Please refer to the following: Figure 2 , Figure 3 and 4 , Figure 2 The diagram shown is a structural schematic of the evaporation source device 100 provided in this embodiment from a second perspective. Figure 3 As shown Figure 2 Sectional view of section AA. Figure 4 As shown Figure 2 Sectional view of section BB.

[0047] The evaporation source device 100 provided in this embodiment also includes a fixing plate 140 and a lifting guide rod 150 extending in the vertical direction. The fixing plate 140 is used to connect and fix with an external structure. The top end of the lifting guide rod 150 is connected to the crucible assembly 110, and the bottom end passes through the fixing plate 140 and slides with the fixing plate 140.

[0048] In fact, there are multiple lifting guide rods 150, which slide in conjunction with the fixed plate 140 and are connected to the crucible assembly 110. The multiple lifting guide rods 150 guide the lifting movement of the crucible assembly 110 and prevent the crucible assembly 110 from moving in other directions relative to the fixed plate 140, such as horizontal displacement or rotational movement.

[0049] The lifting mechanism 120 includes a lifting drive 121, a worm gear 122, a worm wheel 123, and a lifting screw 124. The worm gear 122 and the worm wheel 123 are rotatably mounted on the fixed plate 140. The lifting drive 121 is connected to the worm gear 122 for driving the worm gear 122 to rotate. The worm gear 122 meshes with the outer wall of the worm wheel 123, which has a threaded hole. The lifting screw 124 passes through the threaded hole and is threaded into it. The top end of the lifting screw 124 is connected to the crucible assembly 110.

[0050] In fact, the lifting drive component 121 is located below the fixed plate 140, the crucible assembly 110 is located above the fixed plate 140, the fixed plate 140 is provided with a clearance hole through which the lifting screw 124 passes, and the worm gear 123 and the worm 122 are rotatably disposed on the bottom surface of the fixed plate 140.

[0051] In this embodiment, the worm gear 122 is horizontally arranged and can rotate around a horizontally extending center line under the drive of the lifting drive 121. The axis of the worm wheel 123 extends in the vertical direction and can drive the worm wheel 123 to rotate around a vertically extending center line during the rotation of the worm gear 122.

[0052] During the rotation of the worm gear 123, the threaded connection between the worm gear 123 and the lifting screw 124 drives the lifting screw 124 to move vertically, thereby driving the crucible assembly 110 to move vertically. Preferably, the lifting drive 121 is a motor, and its shaft is coaxially connected to the worm gear 122 via a connecting shaft.

[0053] In this embodiment, the flow-promoting mechanism 130 includes a rotary drive 131 and at least two rotating rollers 132. The at least two rotating rollers 132 are arranged side by side in the evaporation chamber 111, and multiple blades 133 are erected on the side wall of each rotating roller 132. Each rotating roller 132 is coaxially fitted with an input gear 134, and the input gears 134 corresponding to any two adjacent rotating rollers 132 mesh with each other. The rotary drive 131 is connected to one of the rotating rollers 132 for driving each rotating roller 132 to rotate.

[0054] Since the two input gears 134 corresponding to any two adjacent rotating rollers 132 mesh with each other, when the rotating drive 131 drives one of the rotating rollers 132 to rotate, that rotating roller 132 drives the other adjacent rotating roller 132 to rotate synchronously through the input gear 134. Furthermore, the two adjacent rotating rollers 132 rotate in opposite directions, which can cause irregular movement of the liquid material, increasing the evaporation rate of the material and further improving the coating rate and coating effect.

[0055] For ease of installation, the flow-promoting mechanism 130 provided in this embodiment also includes two mounting seats 135, which are respectively hung on opposite sides of the opening of the evaporation chamber 111, and the two ends of each rotating roller 132 are rotatably mounted on the two mounting seats 135.

[0056] In practical applications, after placing the material in the evaporation chamber 111, the two mounting bases 135 are respectively hung on the opposite sides of the opening of the evaporation chamber 111, which can complete the installation of multiple rotating rollers 132 in the evaporation chamber 111, and can also avoid damage to the structure of the crucible assembly 110 itself.

[0057] Please refer to the following: Figure 5 , Figure 5 The diagram shown is a structural schematic of the evaporation source device 100 provided in this embodiment from a third-view perspective.

[0058] The flow-promoting mechanism 130 also includes a transmission gear 136, a transmission chain 137, a drive sprocket 138, a driven sprocket 139, and a universal coupling 1391. The drive sprocket 138 is rotatably disposed at the bottom of the crucible assembly 110, and the rotary drive component 131 is connected to the drive sprocket 138 via the universal coupling 1391. The driven sprocket 139 is rotatably disposed at the top of the crucible assembly 110, and the transmission chain 137 is sleeved between the drive sprocket 138 and the driven sprocket 139. The transmission gear 136 is coaxially connected to the driven sprocket 139 and meshes with the input gear 134 corresponding to one of the rotating rollers 132.

[0059] In this embodiment, the rotary drive component 131 is also located below the fixed plate 140. The rotary drive component 131 is connected to the drive sprocket 138 via a universal coupling 1391. The output torque of the rotary drive component 131 is transmitted to the drive sprocket 138 via the universal coupling 1391, causing the drive sprocket 138 to rotate. When the drive sprocket 138 rotates, it drives the driven sprocket 139 to rotate synchronously via the transmission chain 137. The driven sprocket 139 drives the transmission gear 136 to rotate, and the transmission gear 136 then drives the rotating roller 132 corresponding to one of the input gears 134 meshing with it to rotate, thereby driving each rotating roller 132 to rotate, so as to agitate the material.

[0060] In fact, in this embodiment, the driven sprocket 139 and the transmission gear 136 are both mounted on one of the mounting seats 135. In the actual assembly process, by hanging the two mounting seats 135 on the opposite sides of the opening of the evaporation chamber 111, the installation of multiple rotating rollers 132, transmission gear 136 and driven sprocket 139 can be completed simultaneously, which can greatly improve the assembly efficiency.

[0061] It should be noted that during the lifting process of the lifting mechanism 120 driving the crucible assembly 110 to rise and fall, the crucible assembly 110 will drive the drive sprocket 138 to move synchronously up and down through the fixed seat and the transmission chain 137. Since the rotary drive component 131 is connected to the drive sprocket 138 through the universal coupling 1391, the universal coupling 1391 adapts to the movement of the drive sprocket 138 during its lifting and falling motion, ensuring that the rotary drive component 131 remains in a fixed position. Preferably, the rotary drive component 131 in this embodiment is also a motor.

[0062] In addition, the evaporation source device 100 provided in this embodiment also includes a film thickness gauge 160, which is disposed above the evaporation chamber 111. In actual application, the film thickness gauge 160 detects the evaporation rate of the material, the lifting mechanism 120 adjusts the height of the crucible assembly 110 according to the detection structure of the film thickness gauge 160, and the flow-promoting mechanism 130 adjusts the stirring rate of the material according to the detection structure of the film thickness gauge 160.

[0063] For example, when the film thickness gauge 160 detects that the evaporation rate of the material is low, the lifting mechanism 120 drives the crucible assembly 110 to rise so that the material is closer to the substrate; the flow-promoting mechanism 130 increases the stirring rate of the material to accelerate the flow of the material; the lifting mechanism 120 and the flow-promoting mechanism 130 operate according to the detection results of the film thickness gauge 160, which can achieve precise control of the evaporation rate, improve the consistency of the coating thickness, and increase the yield of low-volume coatings.

[0064] In this embodiment, the crucible assembly 110 includes a shell 112 and a crucible 113 disposed within the shell 112. The crucible 113 defines an evaporation chamber 111, and a heating coil 114 is disposed between the shell 112 and the crucible 113. In this embodiment, for ease of installation, the crucible assembly 110 also includes a lifting base plate 115, on which the shell 112 is disposed. The lifting base plate 115 is connected to the lifting mechanism 120 and the lifting guide rod 150.

[0065] It is understood that the outer shell 112 has a cavity for assembling the crucible 113. The crucible 113 is assembled into this cavity, and a clamping cavity is formed between the outer wall of the crucible 113 and the side wall of the cavity. The heating coil 114 is disposed in this clamping cavity. The heating coil 114 is used to heat the crucible 113, that is, to heat the material, so that the material melts and evaporates.

[0066] In summary, the evaporation source device 100 provided in this embodiment can improve the coating rate and coating effect. Furthermore, the evaporation source device 100 also features a simple and compact structure and is easy to assemble.

[0067] In addition, this embodiment also provides a vapor deposition apparatus equipped with the aforementioned evaporation source device 100. Benefiting from the beneficial effects of the evaporation source device 100, the vapor deposition apparatus provided in this embodiment has the characteristic of precisely adjustable deposition rate and can also obtain better deposition results.

[0068] The above description is merely a preferred embodiment of this utility model and is not intended to limit the utility model. Various modifications and variations can be made to this utility model by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. An evaporation source device, characterized in that, include: A crucible assembly (110) having an upward-opening evaporation chamber (111) is used to heat and evaporate the material contained in the evaporation chamber (111); A lifting mechanism (120) is connected to the crucible assembly (110) and is used to drive the crucible assembly (110) to move vertically to multiple different height positions; A flow-inducing mechanism (130) is used to agitate the material in the evaporation chamber (111).

2. The evaporation source device according to claim 1, characterized in that, It also includes a fixing plate (140) and a lifting guide rod (150) extending in the vertical direction. The fixing plate (140) is used to connect and fix to an external structure. The top end of the lifting guide rod (150) is connected to the crucible assembly (110), and the bottom end passes through the fixing plate (140) and slides with the fixing plate (140).

3. The evaporation source device according to claim 2, characterized in that, The lifting mechanism (120) includes a lifting drive (121), a worm (122), a worm wheel (123), and a lifting screw (124). The worm (122) and the worm wheel (123) are rotatably mounted on the fixed plate (140). The lifting drive (121) is connected to the worm (122) for driving the worm (122) to rotate. The worm (122) meshes with the outer wall of the worm wheel (123), the worm wheel (123) is provided with a threaded hole, the lifting screw (124) passes through the threaded hole and is threadedly engaged with the threaded hole, and the top end of the lifting screw (124) is connected to the crucible assembly (110).

4. The evaporation source device according to claim 3, characterized in that, The worm (122) and the worm wheel (123) are disposed on the bottom surface of the fixed plate (140), and the fixed plate (140) is provided with a clearance hole through which the lifting screw (124) passes.

5. The evaporation source device according to claim 1, characterized in that, The flow-promoting mechanism (130) includes a rotary drive (131) and at least two rotating rollers (132). The at least two rotating rollers (132) are arranged side by side in the evaporation chamber (111), and a plurality of blades (133) are erected on the side wall of each rotating roller (132). Each of the rotating rollers (132) is coaxially fitted with an input gear (134). The input gears (134) corresponding to any two adjacent rotating rollers (132) mesh with each other. The rotation drive (131) is connected to one of the rotating rollers (132) for driving each of the rotating rollers (132) to rotate.

6. The evaporation source device according to claim 5, characterized in that, The flow-promoting mechanism (130) also includes two mounting seats (135), which are respectively hung on opposite sides of the opening of the evaporation chamber (111), and the two ends of each rotating roller (132) are rotatably disposed on the two mounting seats (135).

7. The evaporation source device according to claim 6, characterized in that, The flow-promoting mechanism (130) also includes a transmission gear (136), a transmission chain (137), a drive sprocket (138), a driven sprocket (139), and a universal coupling (1391). The drive sprocket (138) is rotatably disposed at the bottom of the crucible assembly (110), and the rotary drive (131) is connected to the drive sprocket (138) through the universal coupling (1391). The driven sprocket (139) is rotatably disposed on the top of the crucible assembly (110), and the transmission chain (137) is sleeved between the driving sprocket (138) and the driven sprocket (139); the transmission gear (136) is coaxially connected to the driven sprocket (139) and meshes with the input gear (134) corresponding to one of the rotating rollers (132).

8. The evaporation source device according to claim 1, characterized in that, It also includes a film thickness gauge (160), which is disposed above the evaporation chamber (111).

9. The evaporation source device according to claim 1, characterized in that, The crucible assembly (110) includes a shell (112) and a crucible (113) disposed within the shell (112). The crucible (113) defines the evaporation chamber (111). The shell (112) is connected to the lifting mechanism (120). A heating coil (114) is disposed between the shell (112) and the crucible (113).

10. A vapor deposition apparatus, characterized in that, Includes the evaporation source device (100) as described in any one of claims 1-9.

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