High-frequency probe for wafer test

Abstract

The utility model provides a high-frequency probe for wafer testing, and belongs to the technical field of high-frequency probes. The high-frequency probe for wafer testing comprises an outer cylinder, a transmission rotary vane is movably sleeved with the outer cylinder, six groups of slotted holes are formed in the transmission rotary vane, detection probes are movably sleeved with the inner walls of the six groups of slotted holes, and the six groups of detection probes are arranged in a circumferential array with a connecting rod as the circle center. According to the utility model, the rotary knob is rotated, the transmission shaft drives the gear to be engaged with the tooth block, and the tooth block further drives the transmission rotary sheet to synchronously rotate by taking the connecting rod as a circle center, so that synchronous rotation of multiple groups of detection probes is realized, when one group of detection probes moves to a proper position, the probes are automatically pushed out, and after the probes in the current group are worn, the rotary knob is rotated again to quickly replace the probes; the test process does not need to be interrupted for complex operation, the replacement time is shortened, the test process can be ensured to be uninterrupted in a high-throughput test environment, the test efficiency is effectively improved, and the idle time of equipment is shortened.

Description

Technical Field

[0001] This utility model relates to the field of high-frequency probe technology, and in particular to a high-frequency probe for wafer testing. Background Technology

[0002] High-frequency probes in wafer testing are tools used to test high-frequency chips and wafers, primarily for extracting and analyzing high-frequency signals from chips or wafers.

[0003] During wafer testing, the probes of high-frequency probes gradually wear down due to long-term friction. After wear occurs, the shape of the probe tip changes, leading to an increase in contact area or poor contact, which increases contact resistance and affects the accuracy of the measurement signal. When the probe wears out, it needs to be replaced in a timely manner. Frequent replacements not only increase testing costs but also reduce production testing efficiency.

[0004] Therefore, this invention proposes a high-frequency probe for wafer testing. Utility Model Content

[0005] The purpose of this invention is to provide a high-frequency probe for wafer testing to solve the above-mentioned problems.

[0006] To achieve the above objectives, this utility model provides the following technical solution:

[0007] A high-frequency probe for wafer testing includes an outer cylinder. A drive vane is movably fitted inside the outer cylinder. The drive vane has six sets of slots inside, and detection probes are movably fitted onto the inner walls of each of the six sets of slots. The six sets of detection probes are arranged in a circular array with a connecting rod as the center. A limit stop plate is fixedly connected to the outer wall of the top of each detection probe. One end of a spring is fixedly connected to the side of the limit stop plate, and the other end of the spring is fixedly connected to the drive vane. Several sets of toothed blocks are fixedly connected to the outer wall of the drive vane in a circular array. The outer walls of the toothed blocks mesh with gears. A drive shaft is fixedly fitted inside the gears, and a knob is fixedly connected to the outer wall of the drive shaft.

[0008] Furthermore, the inner cavity of the outer cylinder is provided with a sliding groove, which is circular in shape, and one side of the circular ring is V-shaped. The two extended ends of the V-shape are connected to the circular ring. Six sets of limiting sliders are slidably sleeved on the inner wall of the sliding groove, and a connecting sleeve is fixedly connected to the outer wall of the sliding groove.

[0009] Furthermore, a connecting rod is movably sleeved inside the transmission vane. One end of the connecting rod is fixedly connected to a limit baffle two, the outer wall of the limit baffle two is in contact with the outer wall of the transmission vane, and the other end of the connecting rod is fixedly connected to the top of the inner wall of the outer cylinder.

[0010] Furthermore, a connecting limiting cylinder is movably sleeved on the outer wall of the drive shaft. The connecting limiting cylinder is in the shape of two circles of different sizes connected together. The inner wall of one end of the connecting limiting cylinder is fixedly connected to the outer cylinder, and the inner wall of the other end of the connecting limiting cylinder is movably sleeved with the gear.

[0011] Furthermore, the outer wall of the outer cylinder is provided with two sets of limiting grooves, and the inner wall of the limiting grooves is slidably sleeved with two sets of limiting sliders II. The outer walls of the two sets of limiting sliders II are fixedly connected with telescopic sleeves, and the inner wall of the telescopic sleeves is fixedly connected with one end of spring I. The other end of spring I is fixedly connected to the outer cylinder.

[0012] Furthermore, a circular hole is provided on the side of the outer cylinder, and a set of detection probes is movably fitted onto the inner wall of the circular hole, with the position of the circular hole aligned with the V-shaped tip of the slide groove.

[0013] The technical effects and advantages of this utility model are as follows:

[0014] 1. By rotating the knob, the drive shaft drives the gear and the tooth block to mesh, and the tooth block in turn drives the transmission vane to rotate synchronously around the connecting rod, realizing the synchronous rotation of multiple sets of detection probes. When a set of detection probes moves to the appropriate position, it automatically extends. When the current set of probes wears out, it can be quickly replaced by rotating the knob again. There is no need to interrupt the test process for complex operations, reducing replacement time. In high-throughput test environments, it can ensure uninterrupted testing, effectively improve test efficiency, and reduce equipment downtime. Attached Figure Description

[0015] Figure 1 This is an external view of a high-frequency probe for wafer testing according to the present invention;

[0016] Figure 2 This is a cross-sectional view of a high-frequency probe for wafer testing according to the present invention.

[0017] Figure 3 This is an internal structure diagram of a high-frequency probe for wafer testing according to the present invention;

[0018] Figure 4 This is a vertical cross-sectional view of a high-frequency probe for wafer testing according to the present invention.

[0019] Figure 5 This is an enlarged view of part A of the high-frequency probe for wafer testing according to this utility model.

[0020] Explanation of reference numerals in the attached figures:

[0021] 1. Outer cylinder; 2. Connecting protective cylinder; 3. Connecting limiting cylinder; 4. Knob; 5. Detection probe; 6. Telescopic sleeve; 7. Limiting slider one; 8. Limiting baffle one; 9. Spring one; 10. Limiting slider two; 11. Transmission vane; 12. Spring two; 13. Gear; 14. Transmission shaft; 15. Connecting rod; 16. Limiting baffle two; 17. Gear block. Detailed Implementation

[0022] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0023] Example 1

[0024] Please see Figures 1 to 5 As shown, the high-frequency probe for wafer testing provided by this utility model includes an outer cylinder 1. A transmission rotor 11 is movably sleeved inside the outer cylinder 1. The transmission rotor 11 has six sets of slots inside. Detection probes 5 are movably sleeved on the inner walls of the six sets of slots. The six sets of detection probes 5 are arranged in a circumferential array with the connecting rod 15 as the center. Limiting baffles 8 are fixedly connected to the outer walls of the top of each detection probe 5. One end of a spring 12 is fixedly connected to the side of the limiting baffle 8. The other end of the spring 12 is fixedly connected to the transmission rotor 11. Several sets of tooth blocks 17 are fixedly connected to the outer wall of the transmission rotor 11. The tooth blocks 17 are arranged in a circumferential array. The outer walls of the tooth blocks 17 mesh with gears 13. A transmission shaft 14 is fixedly sleeved inside the gear 13. A knob 4 is fixedly connected to the outer wall of the transmission shaft 14.

[0025] The inner cavity of the outer cylinder 1 is provided with a sliding groove. The sliding groove is circular, and one side of the circular ring is set in a V shape. The two extended ends of the V shape are connected to the circular ring. Six sets of limiting sliders 7 are slidably sleeved on the inner wall of the sliding groove. The outer wall of the sliding groove is fixedly connected with a connecting sleeve 2.

[0026] A circular hole is provided on the side of the outer cylinder 1. One set of detection probes 5 is movably sleeved on the inner wall of the circular hole, and the position of the circular hole is aligned with the V-shaped tip of the slide groove.

[0027] The slide groove is in the form of a ring and a V-shape. The two ends of the outer cylinder 1 are connected into a whole by the connecting sleeve 2. When the limiting slider 7 slides to the protruding end of the slide groove, the detection probe 5 is pushed out to the outside of the outer cylinder 1 for wafer detection. When the limiting slider 7 slides to the arc section of the slide groove, the detection probe 5 retracts into the outer cylinder 1, realizing the storage of multiple sets of detection probes 5, which is convenient for subsequent recycling and effectively improves the service life of the probes and detection efficiency.

[0028] Example 2

[0029] Based on Example 1, please refer to Figures 1 to 5 As shown, a connecting rod 15 is movably sleeved inside the transmission vane 11. One end of the connecting rod 15 is fixedly connected to a limit baffle 16. The outer wall of the limit baffle 16 fits against the outer wall of the transmission vane 11. The other end of the connecting rod 15 is fixedly connected to the top of the inner wall of the outer cylinder 1.

[0030] The outer wall of the drive shaft 14 is movably sleeved with a connecting limiting cylinder 3. The connecting limiting cylinder 3 is in the shape of two circles of different sizes. The inner wall of one end of the connecting limiting cylinder 3 is fixedly connected to the outer cylinder 1, and the inner wall of the other end of the connecting limiting cylinder 3 is movably sleeved with the gear 13.

[0031] When it is necessary to replace the detection probe 5, turn the knob 4. The transmission shaft 14 drives the gear 13 to mesh with the tooth block 17. The tooth block 17 drives the transmission vane 11 to rotate synchronously around the connecting rod 15, thereby driving multiple sets of detection probes 5 to rotate synchronously. When a set of detection probes 5 moves to the appropriate position, it will automatically extend. When replacing, it will automatically retract and switch to the next set of detection probes 5. The operation is simple and convenient, reducing replacement time and operational complexity, improving detection efficiency, and is suitable for high-throughput detection environments. It can reduce equipment downtime and improve overall production efficiency.

[0032] Example 3

[0033] Based on Examples 1 and 2, please refer to Figures 1 to 5 As shown, the outer wall of the outer cylinder 1 is provided with two sets of limiting grooves. The inner wall of the limiting grooves is slidably fitted with two sets of limiting sliders 10. The outer wall of the two sets of limiting sliders 10 is fixedly connected with a telescopic sleeve 6. The inner wall of the telescopic sleeve 6 is fixedly connected with one end of a spring 9. The other end of the spring 9 is fixedly connected to the outer cylinder 1.

[0034] When fixed, the testing equipment connects to and fixes the telescopic sleeve 6. The elastic potential energy of the spring 9 pushes the outer cylinder 1 downward, so that the protruding testing probe 5 on the outside of the outer cylinder 1 fits tightly with the testing wafer, ensuring the stability of the test. At the same time, the limiting slider 10 limits the extension and retraction of the telescopic sleeve 6, preventing the outer cylinder 1 from rotating inside the telescopic sleeve 6, and ensuring that the round hole at the bottom of the outer cylinder 1 is always in a fixed position, thereby achieving accurate testing and improving the accuracy and reliability of the test.

[0035] Working principle: First, connect and fix the testing equipment to the telescopic sleeve 6. In use, turn the knob 4, and the transmission shaft 14 drives the gear 13 to rotate around its own axis. The gear 13 meshes with the gear block 17, and the gear block 17 drives the transmission vane 11 to rotate around the connecting rod 15, thereby driving the six sets of testing probes 5 to rotate synchronously. At this time, the limiting slider 7 at the top of the testing probe 5 slides in the groove. When a set of limiting sliders 7 slides into the V-shaped channel of the groove, it drives the testing probe 5 to slide down along the inner wall of the transmission vane 11 until the limiting slider 7 reaches the protruding end of the V-shaped groove, and the testing probe 5 engages with the round hole on the side of the outer cylinder 1. The probe 5 protrudes from the outer side of the outer cylinder 1 and begins to inspect the wafer. When the tip of the inspection probe 5 becomes worn or has poor contact, the knob 4 is rotated again to make the limit slider 7 slide out along the other end of the slide groove. Under the action of the elastic potential energy of the spring 12, the limit slider 7 slides out of the V-shaped slide groove and pushes the limit baffle 8 to move the inspection probe 5 inward, canceling the connection with the round hole of the outer cylinder 1, and retracting the current set of inspection probes 5. The knob 4 is rotated again until another set of inspection probes 5 protrudes from the surface of the outer cylinder 1 and the inspection continues. This cyclical replacement can effectively reduce the inspection interruption caused by probe wear and significantly improve the inspection efficiency and equipment utilization.

[0036] Finally, it should be noted that the above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A high-frequency probe for wafer testing, characterized in that, The device includes an outer cylinder (1), inside which a transmission vane (11) is movably fitted. The transmission vane (11) has six sets of slots. The inner walls of the six sets of slots are movably fitted with detection probes (5). The six sets of detection probes (5) are arranged in a circular array with the connecting rod (15) as the center. The outer wall of the top of each detection probe (5) is fixedly connected with a limit stop plate (8). The side of the limit stop plate (8) is fixedly connected with one end of a spring (12). The other end of the spring (12) is fixedly connected to the transmission vane (11). The outer wall of the transmission vane (11) is fixedly connected with several sets of tooth blocks (17). The tooth blocks (17) are arranged in a circular array. The outer wall of the tooth blocks (17) meshes with a gear (13). The gear (13) is fixedly fitted with a transmission shaft (14). The outer wall of the transmission shaft (14) is fixedly connected with a knob (4).

2. The high-frequency probe for wafer testing according to claim 1, characterized in that, The outer cylinder (1) has a groove inside. The groove is circular, and one side of the circular ring is V-shaped. The two extended ends of the V-shape are connected to the circular ring. Six sets of limiting sliders (7) are slidably sleeved on the inner wall of the groove. A connecting sleeve (2) is fixedly connected to the outer wall of the groove.

3. A high-frequency probe for wafer testing according to claim 1, characterized in that, The transmission vane (11) is movably sleeved with a connecting rod (15). One end of the connecting rod (15) is fixedly connected to a limiting baffle (16). The outer wall of the limiting baffle (16) is in contact with the outer wall of the transmission vane (11). The other end of the connecting rod (15) is fixedly connected to the top of the inner wall of the outer cylinder (1).

4. A high-frequency probe for wafer testing according to claim 1, characterized in that, The outer wall of the drive shaft (14) is movably sleeved with a connecting limiting cylinder (3). The connecting limiting cylinder (3) is in the shape of two circles of different sizes. The inner wall of one end of the connecting limiting cylinder (3) is fixedly connected to the outer cylinder (1), and the inner wall of the other end of the connecting limiting cylinder (3) is movably sleeved with the gear (13).

5. A high-frequency probe for wafer testing according to claim 1, characterized in that, The outer wall of the outer cylinder (1) is provided with two sets of limiting grooves. The inner wall of the limiting groove is slidably fitted with two sets of limiting sliders (10). The outer walls of the two sets of limiting sliders (10) are fixedly connected with telescopic sleeves (6). The inner wall of the telescopic sleeves (6) is fixedly connected with one end of a spring (9). The other end of the spring (9) is fixedly connected to the outer cylinder (1).

6. A high-frequency probe for wafer testing according to claim 1, characterized in that, The outer cylinder (1) has a circular hole on its side, and a set of detection probes (5) is movably sleeved on the inner wall of the circular hole, and the position of the circular hole is aligned with the V-shaped tip of the slide groove.

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