Graphite electrode for single crystal furnace and single crystal furnace

Abstract

The utility model relates to the field of single crystal furnaces, in particular to a graphite electrode for a single crystal furnace and the single crystal furnace, the graphite electrode comprises an electrode body, the electrode body comprises a heater connecting part and a reducing part which are of an integrated structure, and the diameter of the reducing part is smaller than that of the heater connecting part. The two ends of the electrode body are a first end and a second end respectively, the heater connecting part is located at the first end, the first end is used for being connected with a heater, and the second end is used for being connected with an external electrode. The utility model relates to a graphite electrode device for a single crystal furnace, which can reduce the resistivity of the graphite electrode device, and can achieve the effects of energy conservation and consumption reduction when the graphite electrode device is actually arranged between a heater and an external electrode.

Description

Technical Field

[0001] This utility model relates to the field of single crystal furnaces, specifically to a graphite electrode for a single crystal furnace and a single crystal furnace. Background Technology

[0002] With the rapid development of the photovoltaic industry, monocrystalline silicon material, as the main raw material for solar cells, requires crucial quality control during its preparation. The monocrystalline furnace is the core equipment for preparing monocrystalline silicon material, and the graphite electrode, the hot zone component, is a key part of the furnace. Graphite electrodes prepared using advanced production processes such as cold isostatic pressing (M3) possess characteristics such as high strength, dense structure, and good electrical and thermal conductivity. Advanced cutting and grinding equipment is used to process the electrodes according to precise dimensions and shapes, and precision testing methods such as coordinate measuring machines are employed to ensure dimensional accuracy and form tolerances, thus guaranteeing product quality. As a conductor, it transmits the current from the external electrode to the heater, providing the necessary heat for the melting of polycrystalline silicon.

[0003] In existing technologies, the graphite electrodes used in single-crystal furnaces have a diameter of 90mm. During the growth of single-crystal silicon, as the furnace operates for extended periods, the relatively high resistivity of the graphite electrodes, limited by their physical properties, increases energy consumption and heating costs. Their high thermal conductivity also leads to significant heat loss, reducing energy efficiency. Although used under inert gas protection, they still react chemically with oxygen at high temperatures, causing oxidation and corrosion, particularly at the end connected to the heater, where the higher temperature results in more severe oxidation and corrosion, thus shortening the electrode's lifespan. Utility Model Content

[0004] The purpose of this invention is to provide a graphite electrode device for a single crystal furnace, which can reduce its own resistivity and achieve energy saving and consumption reduction when actually installed between the heater and the external electrode.

[0005] Another objective of this invention is to provide a single-crystal furnace that can reduce the resistivity of the graphite electrode and achieve energy saving and consumption reduction when actually installed between the heater and the external electrode.

[0006] The technical solution of this utility model is implemented as follows:

[0007] A graphite electrode for a single crystal furnace includes an electrode body. The electrode body includes an integrally structured heater connection portion and a reduced diameter portion. The diameter of the reduced diameter portion is smaller than the diameter of the heater connection portion. The two ends of the electrode body are a first end and a second end, respectively. The heater connection portion is located at the first end, and the first end is used to connect to a heater. The second end is used to connect to an external electrode.

[0008] Furthermore, a first mounting hole is provided on the end face of the first end, and the first mounting hole is used to connect the heater.

[0009] Furthermore, a second mounting hole is provided on the end face of the second end, which is used to connect an external electrode.

[0010] Furthermore, the first mounting hole is an M36*3 threaded hole, and the second mounting hole is an M45*3 threaded hole.

[0011] Furthermore, the electrode body has a channel along its axial direction, and the two ends of the channel are respectively connected to the first mounting hole and the second mounting hole.

[0012] Furthermore, at least one vent is provided on the side of the electrode body, and the vent is connected to the channel.

[0013] Furthermore, the channel is a circular channel, and the first mounting hole and the second mounting hole are collinear with the central axis of the channel.

[0014] Furthermore, the diameter of the channel ranges from 12 to 17 mm.

[0015] Furthermore, the overall height of the electrode body ranges from 300 to 305 mm, the thickness of the heater connection portion ranges from 8 to 12 mm, the diameter of the heater connection portion is 90 mm, and the diameter of the reduced diameter portion ranges from 55 to 65 mm.

[0016] A single crystal furnace, comprising the graphite electrode for the single crystal furnace.

[0017] Compared with the prior art, the beneficial effects of this utility model are:

[0018] This invention provides a graphite electrode for a single crystal furnace. The graphite electrode has a heater connection part and a diameter reduction part. The diameter of the diameter reduction part is reduced based on the original graphite electrode (the diameter of the original graphite electrode is the diameter of the graphite electrode used in the prior art). Therefore, the diameter of the diameter reduction part is smaller than the diameter of the heater connection part, thus achieving the reduction of the original graphite electrode diameter. By reducing the diameter of the graphite electrode, the resistivity is reduced. When the two ends of the graphite electrode are connected to the heater and the external electrode respectively, the energy saving and consumption reduction effect can be achieved. In long-term actual use, this technical effect has been fully verified, and it can indeed achieve the purpose of energy saving and consumption reduction.

[0019] The connection between the graphite electrode and the heater is the heater connection part. Since this end of the heater connection part needs to be connected to the heater and has installation requirements, the diameter of the heater connection part cannot be changed. That is, the diameter of the heater connection part is the same as the diameter of the original graphite electrode to ensure stability and safety when connecting the heater. In contrast, the diameter of the heater connection part is an expansion part relative to the diameter of the reduced diameter part. This can ensure the stability and firmness of the connection between the heater and the graphite electrode, while increasing the current passing area, optimizing circuit performance, and improving reliability. Attached Figure Description

[0020] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0021] Figure 1 This is a cross-sectional view of the graphite electrode of this utility model.

[0022] In the picture:

[0023] 1-Electrode body; 101-Heater connection; 102-Reduced diameter section;

[0024] 103 - First end; 104 - Second end; 105 - First mounting hole; 106 - Second mounting hole;

[0025] 107 - Channel; 108 - Vent. Detailed Implementation

[0026] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. The components of the embodiments of this utility model described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0027] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.

[0028] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0029] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product of this utility model is in use. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. In addition, the terms "first," "second," and "third," etc., are only used to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0030] Furthermore, terms such as "horizontal," "vertical," and "sag" do not imply that components must be absolutely horizontal or suspended, but rather that they can be slightly tilted. For example, "horizontal" simply means that its direction is more horizontal relative to "vertical," and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0031] In the description of this utility model, it should also be noted that, unless otherwise explicitly specified and limited, the terms "set," "install," "connect," and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0032] The following detailed description, in conjunction with the accompanying drawings, outlines some embodiments of the present invention. Unless otherwise specified, the following embodiments and features can be combined with each other.

[0033] Example 1

[0034] A graphite electrode for a single crystal furnace includes an electrode body 1. The electrode body 1 includes an integrally structured heater connection portion 101 and a reduced diameter portion 102. Both the heater connection portion 101 and the reduced diameter portion 102 are cylindrical structures, and the axis of the heater connection portion 101 and the axis of the reduced diameter portion 102 are collinear. This collinear arrangement can avoid additional stress caused by eccentric torque, improve the structural strength and service life of the entire graphite electrode, and also reduce the assembly precision requirements: the collinear arrangement means that the angle does not need to be adjusted with particular precision during installation, thereby simplifying the assembly process.

[0035] The diameter of the reduced diameter portion 102 is smaller than the diameter of the heater connection portion 101. The two ends of the electrode body 1 are a first end 103 and a second end 104, respectively. The heater connection portion 101 is located at the first end 103, and the first end 103 is used to connect the heater, while the second end 104 is used to connect the external electrode.

[0036] In this embodiment, the connection between the graphite electrode and the heater is the heater connection part 101. Since this end of the heater connection part 101 needs to be connected to the heater and has specific installation requirements, the diameter of the heater connection part 101 cannot be changed. That is, the diameter of the heater connection part 101 is the same as the diameter of the original graphite electrode to ensure stability and safety when connecting the heater.

[0037] Specifically, a first mounting hole 105 is provided on the end face of the first end 103, that is, a first mounting hole 105 is provided on the end face of the heater connection part 101, and the first mounting hole 105 is used to connect the heater.

[0038] The end face of the second end 104 is provided with a second mounting hole 106, which is used to connect an external electrode.

[0039] The first mounting hole 105 is an M36*3 threaded hole with a depth of 45mm. This threaded hole is suitable for M36 bolts with a pitch of 3mm to connect the heater to the graphite electrode bolt.

[0040] The second mounting hole 106 is an M45*3 threaded hole with a depth of 65mm. This threaded hole is suitable for M36 bolts with a pitch of 3mm to connect the graphite electrode to the external electrode bolt.

[0041] In this embodiment, the electrode body 1 has a channel 107 along its axial direction, and the two ends of the channel 107 are respectively connected to the first mounting hole 105 and the second mounting hole 106.

[0042] At least one vent hole 108 is provided on the side of the electrode body 1, and the vent hole 108 is connected to the channel 107. Its advantages are as follows:

[0043] 1. Prevent mechanical damage and extend service life

[0044] Preventing breakage risk: The 108 vent design effectively prevents the internal pressure caused by gas accumulation, avoiding breakage or damage to the graphite electrode due to excessive pressure.

[0045] Reduce stress concentration: By uniformly distributing the gas emission path, local stress concentration is reduced, thereby improving the stability of the electrode structure.

[0046] 2. Improve gas management

[0047] Efficient exhaust: The design of the main line channel 107 connecting with the mounting hole ensures that the gas generated during the installation process can be discharged in a timely manner, avoiding gas stagnation.

[0048] Multi-dimensional exhaust path: The design of the branch line's vent 108 through the side provides additional gas exhaust paths, forming a three-dimensional exhaust system to further ensure smooth gas discharge.

[0049] 3. Improve process adaptability

[0050] Easy to install: The vent 108 design optimizes gas emission during installation, reducing installation difficulty and time costs.

[0051] Improved maintainability: Even if a small amount of gas is generated during use, it can be discharged in a timely manner, reducing the frequency and cost of maintenance.

[0052] 4. Optimize electrochemical performance

[0053] Maintaining reactivity: Preventing gas accumulation from affecting the reactivity of the electrode surface and ensuring that the electrode is always in optimal working condition.

[0054] Increased energy density: By improving gas management, the energy density and overall performance of the electrode are indirectly improved.

[0055] 5. Enhanced security

[0056] Stable operating environment: Maintains internal pressure balance of the electrode, providing a safer and more stable operating environment for the electrode.

[0057] In this embodiment, the channel 107 is a circular channel 107, and the first mounting hole 105 and the second mounting hole 106 are collinear with the central axis of the channel 107. The circular channel 107 design offers several significant advantages for graphite electrodes. These advantages not only improve the performance and reliability of the electrode but also bring convenience during manufacturing and use, as detailed below:

[0058] 1. Advantages of fluid mechanics

[0059] Uniform gas flow: The circular cross-section helps to achieve more uniform gas flow, reduce turbulence and dead zones, and ensure that the gas can be discharged smoothly.

[0060] Minimizes resistance: Compared to other shapes (such as square or rectangular), the circular channel 107 has the smallest friction area, thereby reducing resistance to gas flow.

[0061] 2. Structural integrity

[0062] Uniform stress distribution: When a circular structure is subjected to internal pressure, the stress distribution is more uniform, avoiding stress concentration points, improving structural stability, and reducing the risk of fracture.

[0063] High compressive strength: The geometric characteristics of the circular channel 107 give it better compressive strength at the same material thickness, and it can withstand higher internal pressure without deformation.

[0064] 3. Simple manufacturing process

[0065] Easy to process: Circular drilling is one of the most common operations in machining. The equipment and technology are mature, the production efficiency is high, and the cost is low.

[0066] High dimensional accuracy: Modern processing technology can precisely control the dimensional tolerance of the circular aperture, ensuring the consistency and quality stability of channel 107.

[0067] 4. Thermal management optimization

[0068] Good heat dissipation: The circular channel 107 helps to enhance heat transfer, effectively remove heat, prevent local overheating, and avoid material performance degradation caused by local high temperature.

[0069] In this embodiment, the diameter of the channel 107 ranges from 12 to 17 mm, preferably 15 mm. The overall height of the electrode body 1 ranges from 300 to 305 mm, preferably 302 mm, and in actual production, the overall height of the electrode body 1 can be 302 ± 1 mm. The thickness of the heater connection 101 ranges from 8 to 12 mm, preferably 10 mm. The diameter of the heater connection 101 is 90 mm (consistent with the original graphite electrode diameter). The diameter of the reduced diameter portion 102 ranges from 55 to 65 mm, preferably 60 mm. Preferably, there is only one vent hole 108, and the distance between the vent hole 108 and the end face of the second end 104 is 277 mm. Figure 1 As shown.

[0070] Example 2

[0071] A single crystal furnace, comprising the graphite electrode for the single crystal furnace.

[0072] This invention provides a graphite electrode for a single-crystal furnace. The graphite electrode has a heater connection portion 101 and a reduced-diameter portion 102. The diameter of the reduced-diameter portion 102 is smaller than that of the original graphite electrode (the original graphite electrode has a diameter of 90 mm, the same as that used in the prior art). Therefore, the diameter of the reduced-diameter portion 102 is smaller than that of the heater connection portion 101, thus reducing the diameter of the original graphite electrode. By reducing the diameter of the graphite electrode, the resistivity is reduced. When the two ends of the graphite electrode are connected to a heater and an external electrode respectively, energy saving and consumption reduction can be achieved. This has been fully demonstrated in long-term practical use. This technology achieves its intended effect of energy saving and consumption reduction. The connection between the graphite electrode and the heater is the heater connection part 101. Since this end of the heater connection part 101 needs to be connected to the heater and has installation requirements, the diameter of the heater connection part 101 cannot be changed. That is, the diameter of the heater connection part 101 is the same as the diameter of the original graphite electrode to ensure stability and safety when connecting the heater. Relatively speaking, the diameter of the heater connection part 101 is an expansion part relative to the diameter of the reduced diameter part 102. This ensures the stability and firmness of the connection between the heater and the graphite electrode, while increasing the current passing area, optimizing circuit performance, and improving reliability.

[0073] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this utility model, and are not intended to limit it. Although the utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this utility model.

[0074] The above description is merely a preferred embodiment of this utility model and is not intended to limit the utility model. Various modifications and variations can be made to this utility model by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A graphite electrode for a single crystal furnace, comprising an electrode body (1), characterized in that, The electrode body (1) includes an integral heater connection part (101) and a reduced diameter part (102). The diameter of the reduced diameter part (102) is smaller than the diameter of the heater connection part (101). The two ends of the electrode body (1) are a first end (103) and a second end (104), respectively. The heater connection part (101) is located at the first end (103), and the first end (103) is used to connect the heater, while the second end (104) is used to connect the external electrode. The overall height of the electrode body (1) ranges from 300 to 305 mm, the thickness of the heater connection part (101) ranges from 8 to 12 mm, the diameter of the heater connection part (101) is 90 mm, and the diameter of the reduced diameter part (102) ranges from 55 to 65 mm.

2. The graphite electrode for a single crystal furnace according to claim 1, characterized in that, The end face of the first end (103) is provided with a first mounting hole (105), which is used to connect a heater.

3. The graphite electrode for a single crystal furnace according to claim 2, characterized in that, The end face of the second end (104) is provided with a second mounting hole (106), which is used to connect an external electrode.

4. The graphite electrode for a single crystal furnace according to claim 3, characterized in that, The first mounting hole (105) adopts an M36. The threaded hole 3, the second mounting hole (106) adopts M45. 3 threaded holes.

5. The graphite electrode for a single crystal furnace according to claim 3, characterized in that, The electrode body (1) has a channel (107) along its axial direction, and the two ends of the channel (107) are respectively connected to the first mounting hole (105) and the second mounting hole (106).

6. The graphite electrode for a single crystal furnace according to claim 5, characterized in that, The electrode body (1) has at least one vent hole (108) on its side, and the vent hole (108) is connected to the channel (107).

7. The graphite electrode for a single crystal furnace according to claim 5, characterized in that, The channel (107) is a circular channel (107), and the first mounting hole (105) and the second mounting hole (106) are collinear with the central axis of the channel (107).

8. The graphite electrode for a single crystal furnace according to claim 7, characterized in that, The diameter of the channel (107) ranges from 12 to 17 mm.

9. A single crystal furnace, characterized in that, The graphite electrode for a single crystal furnace includes any one of claims 1-8.

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